CN218573579U

CN218573579U - Gas mixing device

Info

Publication number: CN218573579U
Application number: CN202222005342.5U
Authority: CN
Inventors: 杨金东; 林佳继; 朱鹤囡; 戴佳; 孔琪
Original assignee: Laplace Wuxi Semiconductor Technology Co Ltd
Current assignee: Laplace Wuxi Semiconductor Technology Co Ltd
Priority date: 2022-08-01
Filing date: 2022-08-01
Publication date: 2023-03-07
Anticipated expiration: 2032-08-01

Abstract

The utility model provides a gas mixing device, includes the gas mixing tank, be connected with air inlet pipeline and play gas pipeline on the gas mixing tank, air inlet pipeline and play gas pipeline are connected mix same one end and/or same one side of gas mixing tank, the air inlet pipeline runs through the gas mixing tank, its internal end is close mix the inner wall of the other end and/or the opposite side of gas mixing tank. The utility model discloses because the design of air inlet pipeline can let gas when getting into gas mixing tank, thereby because the pressure that gas pressure and gas mixing tank bottom collided lets gas diffusion abundant mixing in gas mixing tank to because the pressure that lasts the air admission production can let gas flow to the gas outlet to the upper portion of gas mixing tank in diffusion and abundant mixing, let the gas after the mixing flow from the gas outlet, the utility model discloses a gas mixing tank simple structure can realize the diffusion mixing through the admission pressure of gas self.

Description

Gas mixing device

Technical Field

The utility model relates to a gas mixing device.

Background

In a plurality of processes, such as Chemical Vapor Deposition (CVD) and other processes used for manufacturing thin film/crystalline silicon heterojunction solar cells, a plurality of process gases are required to be used for establishing a reaction environment or participating in a reaction, and whether the process gases can be fully mixed or not has a great influence on a plurality of process methods.

In the prior art, for the blending of the process gas, some blending devices, such as a gas blending tank, are usually adopted. There are also some publications on the disclosure, for example, some disclose that an airflow distribution baffle is provided in the gas mixing tank, and airflow impact is formed by a plurality of airflow distribution baffles; therefore, the problems of kinetic energy loss and uneven axial distribution of various gases during input after the gases enter the gas mixing tank along the gas path pipeline are solved; still other publications describe that the air inlet pipe is arranged at the bottom of the gas mixing tank, the air outlet is arranged at the upper part of the gas mixing tank, the air inlet is arranged at the lower part, multiple layers of gas mixing mesh plates are arranged in the pipe body of the gas mixing tank at different heights, a mixing cavity is arranged between the mesh plates, and uniform gas mixing is realized through a multilayer structure. The gas mixing device in the prior art is designed with a complex internal structure or is realized through electrical control in order to improve the uniformity of gas mixing, the operation condition of gas is not considered, the complex internal structure can cause the problems of airflow disorder and the like, and in addition, the complex internal structure can also cause fouling easily and is not easy to clean.

Disclosure of Invention

The utility model aims at providing a gas mixing device in order to overcome the not enough of above-mentioned prior art.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a gas mixing device, includes the gas mixing tank, be connected with air inlet pipeline and play gas pipeline on the gas mixing tank, air inlet pipeline and play gas pipeline are connected mix same one end and/or same one side of gas mixing tank, the air inlet pipeline runs through the gas mixing tank, its internal end is close mix the inner wall of the other end and/or the opposite side of gas mixing tank. The same end and the same side specifically indicate which position of gas mixing tank can be confirmed according to placing or using direction of gas mixing tank, for example when gas mixing tank is vertically put, air inlet pipeline and gas outlet pipeline can be connected on the same surface of the upper end of gas mixing tank, the gas circuit structure around the gas mixing tank can be straightened out in this kind of design, and the whole layout design of gas mixing tank and process chamber of being convenient for, more importantly, in this kind of scheme, air inlet pipeline runs through the gas mixing tank, and stretch into the gas mixing tank bottom, when admitting air, process gas strikes the tank bottom and can make gaseous abundant diffusion under the effect of gas pressure, and like this, it is abundant mixing when gaseous arrival gas mixing tank upper portion (gas outlet pipeline position) after the diffusion.

Further, the inner end of the air outlet pipeline is close to the connecting part of the air outlet pipeline and the air mixing tank.

Furthermore, the air outlet of the air outlet pipeline is connected with the air inlet of the process cavity, the air outlet pipeline can also comprise multiple paths according to the actual use condition, and the multiple air outlet pipelines are respectively connected to the multiple air inlets of the process cavity.

Further, the air outlet pipeline is arranged on two sides of the air inlet pipeline.

Further, a pneumatic diaphragm valve is arranged on the air inlet pipeline.

Furthermore, a manual diaphragm valve is arranged on the air inlet pipeline and can be opened or closed according to actual requirements.

Further, a pneumatic diaphragm valve is arranged on the air outlet pipeline.

Furthermore, a manual diaphragm valve is arranged on the air outlet pipeline and can be opened or closed according to actual requirements.

Furthermore, a metering valve is arranged on the gas outlet pipeline. The design of the metering valve can adjust the air output of the air outlet pipeline (namely the air input entering the process cavity), thereby ensuring that the air quantity entering the process cavity of each air outlet pipeline is the same.

Further, a pressure switch is arranged on the gas mixing tank; the air inlet pipeline comprises a first air inlet pipeline which is directly connected with the air mixing tank, a second air inlet pipeline which is connected with the first air inlet pipeline, and a third air inlet pipeline which is connected with the second air inlet pipeline and is connected with an air source, wherein a pneumatic diaphragm valve and a manual diaphragm valve are arranged on the third air inlet pipeline, and a certain included angle is formed between the first air inlet pipeline and the second air inlet pipeline and between the second air inlet pipeline and the third air inlet pipeline; the gas outlet pipeline comprises a first gas outlet pipeline, a second gas outlet pipeline and a third gas outlet pipeline, wherein the first gas outlet pipeline is used for being directly connected with the gas mixing tank, the second gas outlet pipeline is connected with the first gas outlet pipeline, the third gas outlet pipeline is connected with the second gas outlet pipeline and used for being connected with the process cavity, a pneumatic diaphragm valve, a manual diaphragm valve and a metering valve are arranged on the third gas outlet pipeline, and a certain included angle is formed between the first gas outlet pipeline and the second gas outlet pipeline and between the second gas outlet pipeline and the third gas outlet pipeline.

To sum up, the beneficial effects of the utility model are that:

(1) The utility model discloses an among the gas mixing tank, because the design of air inlet line can let gas when getting into the gas mixing tank, thereby because the pressure that gas pressure and gas mixing tank bottom collided lets gas diffusion abundant mixing in the gas mixing tank to because the pressure that lasts the production of admitting air can let gas flow to the gas outlet to the upper portion of gas mixing tank in diffusion and abundant mixing, let the gas after the mixing flow from the gas outlet, the utility model discloses a gas mixing tank simple structure can realize the diffusion mixing through the inlet pressure of gas self.

(2) The utility model discloses an air inlet pipeline sets up in the same one side of gas mixing tank with the gas outlet pipeline, and the gas circuit design is regular unified, is favorable to the overall arrangement of gas mixing tank and process chamber.

(3) The utility model discloses set up the metering valve on the outlet duct way, adjusted the gas flow who goes out the gas pipeline through the metering valve, the gas flow who goes out the gas pipeline also gets into the air input of process chamber to it is the same to ensure that each way goes out the tolerance that the gas pipeline got into the process chamber.

(4) The utility model discloses set up pressure switch on the gas-mixing tank, improve the security of whole device.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

Fig. 2 is a schematic view of the gas mixing tank of the present invention.

Fig. 3 is an angled cross-sectional axial view of fig. 2.

Fig. 4 is a cross-sectional axial view taken at an angle orthogonal to fig. 3.

The reference numbers in the figures: the gas mixing tank comprises a gas mixing tank 1, a first gas inlet pipeline 2, a second gas inlet pipeline 3, a third gas inlet pipeline 4, a pneumatic diaphragm valve 5, a manual diaphragm valve 6, a first gas outlet pipeline 7, a second gas outlet pipeline 8, a third gas outlet pipeline 9, a metering valve 10, a pressure switch 11 and a handle 12.

Detailed Description

The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can also be implemented or applied through other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It is to be noted that the embodiments and features of the embodiments may be combined with each other without conflict.

It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present invention in a schematic manner, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the form, amount and proportion of each component may be changed arbitrarily and the layout of the components may be more complicated.

In the embodiments of the present invention, all directional indicators (such as up, down, left, right, front, rear, horizontal, vertical \8230;) are used only to explain the relative positional relationship between the components in a specific posture, the motion situation, etc., and if the specific posture is changed, the directional indicator is changed accordingly.

Because of reasons such as actual installation use, the parallel relation that the embodiment of the present invention pointed out may actually be approximate parallel relation, and the perpendicular relation may actually be approximate perpendicular relation.

The utility model provides a gas mixing device, including mixing gas pitcher 1, for the convenience of description the utility model discloses in, mixing gas pitcher 1 adopts the vertical mode of putting, is connected with air inlet pipeline and air outlet pipeline on mixing gas pitcher 1, air inlet pipeline and air outlet pipeline all connect mixing gas pitcher 1's upper end.

The air inlet pipeline comprises a first air inlet pipeline 2 used for being directly connected with the air mixing tank, a second air inlet pipeline 3 connected with the first air inlet pipeline 2 and a third air inlet pipeline 4 connected with the second air inlet pipeline 3 and used for being connected with an air source, certain included angles are formed between the first air inlet pipeline 2 and the second air inlet pipeline 3 and between the second air inlet pipeline 3 and the third air inlet pipeline 4 respectively, the pipeline which is integrally bent is formed, the pipeline design is facilitated, and meanwhile, the interference of accessories on the pipeline and the pipeline can be avoided. It should be noted here that the gas source may be in a manner known in the art, and the present invention does not improve the gas source and the gas supply function of the gas source, and is therefore not shown.

The gas outlet pipeline comprises a first gas outlet pipeline 7 for direct connection of the gas mixing tank, a second gas outlet pipeline 8 for connecting 7 of the first gas outlet pipeline and a third gas outlet pipeline 9 for connecting the process cavity, wherein the second gas outlet pipeline 8 is connected and used for connecting the process cavity, a certain included angle is formed between the first gas outlet pipeline 7 and the second gas outlet pipeline 8 and between the second gas outlet pipeline 8 and the third gas outlet pipeline 9 respectively, the included angle can change the pipeline trend, the pipeline design is facilitated, and the interference of accessories on a pipeline and a pipeline can be avoided. It should be noted here that the process chamber may adopt the method in the prior art, and the present invention does not improve the structure and function of the process chamber and the process chamber itself, for example, the process chamber may adopt the method of a reaction furnace, etc.

As shown in fig. 3, the first air inlet pipeline 2 runs through the air mixing tank, the mouth part of the first air inlet pipeline extends into the bottom of the air mixing tank, and the first air inlet pipeline 2 is arranged beside one end of the air mixing tank 1 at the joint part of the first air inlet pipeline, so that when the first air inlet pipeline extends into the bottom of the air mixing tank, the pipeline is bent to a certain degree, the mouth part of the air outlet pipeline is close to the central position of the bottom of the air mixing tank, and thus, the uniform diffusion of air in the whole air mixing tank can be ensured. In addition, the outlet part of the first air inlet pipeline 2 is close to the bottom of the air mixing tank 1, so that the process gas in the first air inlet pipeline 2 can naturally impact the bottom of the tank and be fully diffused under the action of the air inlet pressure during air inlet, and thus, the process gas is uniformly mixed.

Meanwhile, as shown in fig. 3-4, the inner end of the first gas outlet pipeline 7 (the mouth portion inside the gas mixing tank) is close to the connection portion with the gas mixing tank, and is also located at the upper portion of the gas mixing tank in this embodiment, so that, as described in the previous paragraph, the gas inlet pipeline conveys gas to the bottom of the gas mixing tank and collides for diffusion, and then, as the continuous gas inlet pressure generated by continuous gas inlet is always supplied to the bottom of the gas mixing tank, the gas naturally flows to the upper portion of the gas mixing tank after being uniformly diffused, and then flows out of the gas outlet pipe.

Preferably, in this embodiment, the gas outlet pipelines include at least two paths (including the first gas outlet pipeline 7, the second gas outlet pipeline 8, and the third gas outlet pipeline 9, respectively), and gas outlets of the two paths of gas outlet pipelines are respectively connected to two gas inlets of the process chamber, so that for the process chamber, the same gas can be introduced from different positions of the process chamber, and uniformity of the gas in the process chamber can also be improved. Of course, the gas outlet pipeline can be provided with one or more paths according to actual needs, and is not limited to two paths.

As preferred, the gas outlet pipeline sets up the both sides of inlet pipeline, in this embodiment, the gas outlet pipeline sets up to two routes, consequently is located both sides, because the gas that gets into from the inlet pipeline can be spread to around, the gas outlet pipeline sets up and can be more favorable to receiving the gas after the mixing in week side of inlet pipeline, if the gas outlet pipeline has the multichannel, then can corresponding setting around the inlet pipe or around this one side of gas mixing jar.

Preferably, a pneumatic diaphragm valve 5 and a manual diaphragm valve 6 are arranged on the third air inlet pipeline 4, and the manual diaphragm valve can be opened or closed according to actual requirements.

Preferably, the third outlet pipeline 9 is provided with a pneumatic diaphragm valve 5, a manual diaphragm valve 6 and a metering valve 10, and the manual diaphragm valve can be opened or closed according to actual requirements. The gas outlet quantity of the gas outlet pipeline can be adjusted through the design of the metering valve, so that the gas quantity entering the process cavity of each gas outlet pipeline is ensured to be the same.

Preferably, the gas mixing tank 1 is further provided with a pressure switch 11, the pressure in the gas mixing tank 1 can be monitored through the pressure switch 11, so that the size adjustment of the pneumatic diaphragm valve 5 is controlled, the safety of the gas mixing tank is improved, and the gas mixing tank can be adjusted in a matching manner through a manual diaphragm valve when needed.

Preferably, the upper end of the gas mixing tank 1 is further provided with handles 12, which may be symmetrically disposed and avoid the pipeline structure, for example, disposed on two sides of the gas mixing tank 1, so as to facilitate lifting the gas mixing tank 1.

It is obvious that the described embodiments are only some of the embodiments of the present invention, and not all of them. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.

Claims

1. The utility model provides a gas mixing device, includes and mixes the gas pitcher, be connected with air inlet pipeline and go out the gas pipeline on mixing the gas pitcher, its characterized in that: the air inlet pipeline and the air outlet pipeline are connected to the same end and/or the same side of the air mixing tank, the air inlet pipeline penetrates through the air mixing tank, and the inner end of the air inlet pipeline is close to the other end of the air mixing tank and/or the inner wall of the other side of the air mixing tank.

2. A gas mixing apparatus according to claim 1, wherein: the inner end of the air outlet pipeline is close to the connecting part of the air outlet pipeline and the air mixing tank.

3. A gas mixing apparatus according to claim 1, wherein: and the air outlet of the air outlet pipeline is connected with the air inlet of the process cavity.

4. A gas mixing apparatus as claimed in claim 1 or 3, wherein: the air outlet pipelines are arranged on two sides of the air inlet pipeline.

5. A gas mixing apparatus according to claim 1, wherein: and a pneumatic diaphragm valve is arranged on the air inlet pipeline.

6. A gas mixing device according to claim 1 or 5, wherein: and a manual diaphragm valve is arranged on the air inlet pipeline.

7. A gas mixing apparatus according to claim 1, wherein: and a pneumatic diaphragm valve is arranged on the air outlet pipeline.

8. A gas mixing device according to claim 1 or 7, wherein: and a manual diaphragm valve is arranged on the air outlet pipeline.

9. A gas mixing device according to claim 1 or 7, wherein: and a metering valve is arranged on the gas outlet pipeline.

10. A gas mixing apparatus as claimed in claim 1, wherein: a pressure switch is arranged on the gas mixing tank; the air inlet pipeline comprises a first air inlet pipeline which is directly connected with the air mixing tank, a second air inlet pipeline which is connected with the first air inlet pipeline, and a third air inlet pipeline which is connected with the second air inlet pipeline and is connected with an air source, wherein a pneumatic diaphragm valve and a manual diaphragm valve are arranged on the third air inlet pipeline, and a certain included angle is formed between the first air inlet pipeline and the second air inlet pipeline and between the second air inlet pipeline and the third air inlet pipeline; the gas outlet pipeline comprises a first gas outlet pipeline, a second gas outlet pipeline and a third gas outlet pipeline, wherein the first gas outlet pipeline is used for being directly connected with the gas mixing tank, the second gas outlet pipeline is connected with the first gas outlet pipeline, the third gas outlet pipeline is connected with the second gas outlet pipeline and is used for being connected with the process cavity, a pneumatic diaphragm valve, a manual diaphragm valve and a metering valve are arranged on the third gas outlet pipeline, and certain included angles are formed between the first gas outlet pipeline and the second gas outlet pipeline and between the second gas outlet pipeline and the third gas outlet pipeline.