CN218566760U - High-performance piezoresistive pressure sensor - Google Patents
High-performance piezoresistive pressure sensor Download PDFInfo
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- CN218566760U CN218566760U CN202222979113.3U CN202222979113U CN218566760U CN 218566760 U CN218566760 U CN 218566760U CN 202222979113 U CN202222979113 U CN 202222979113U CN 218566760 U CN218566760 U CN 218566760U
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Abstract
The utility model provides a high-performance piezoresistive pressure sensor, which comprises a filler neck, a shell and a plug which are connected in sequence; the pressure-sensing pipe is characterized in that a core body pressure-sensing cavity and a pressure-sensing core body are arranged in the filler pipe nozzle, and the pressure-sensing core body is arranged in the core body pressure-sensing cavity; a first filter plate, a signal conditioning plate and a second filter plate are arranged in the shell; the first filter board is electrically connected with a pin of the pressure sensing core body, the signal conditioning board is connected with the second filter board through a pin connector, and the second filter board is connected with the plug through a wire. The utility model filters the voltage signal output by the pressure sensing core body through the first filtering plate, amplifies the filtered voltage signal through the signal conditioning plate and compensates the temperature, thereby improving the output precision of the sensor; carry out the filtering through the power that sets up second filtering board docking plug input, prevent that power signal from producing the interference to the normal work of sensor, further promoted the output accuracy and the long-term stability of sensor.
Description
Technical Field
The utility model relates to a sensor technology field especially relates to a high performance piezoresistive pressure sensor.
Background
Piezoresistive pressure sensors are widely applied in the fields of military and aerospace, and many application occasions have strict requirements on the reliability and temperature errors of the sensors. For example, in the application of pipeline pressure measurement, once the sensor fails to cause the leakage of the measured gas or liquid, the measurement task fails, and in severe cases, even casualties can be caused. Compared with other similar sensors, the piezoresistive sensor has no general mechanical transmission structure, so that the frictional error is completely eliminated, the errors caused by creep deformation and hysteresis of a metal diaphragm in the general sensor can be eliminated, the precision of the sensor is greatly improved, and the piezoresistive sensor has good shock resistance, corrosion resistance, anti-interference capability, stability and reliability, and is widely applied to various fields of aerospace, aviation, navigation and the like.
Errors of the piezoresistive pressure sensor mainly come from the influence of ambient temperature and electromagnetic interference, errors generated by the temperature influence are generally eliminated by a temperature compensation technology, and the errors of the electromagnetic interference are generally eliminated by an electromagnetic shielding technology which can only shield the interference of external signals of the sensor and can not effectively eliminate the interference of internal signals of the sensor, so that the accuracy of the sensor is low; with the development of national economy, the precision and reliability of the piezoresistive pressure sensor in the fields such as aerospace, weaponry and the like are required to be higher and higher, and the precision of the traditional piezoresistive pressure sensor cannot meet the requirement.
Disclosure of Invention
The utility model provides a high performance piezoresistive pressure sensor has solved prior art piezoresistive pressure sensor and has only come the cancellation signal interference through the electromagnetic shield and lead to detecting the problem that the precision is low.
The technical scheme of the utility model is realized like this:
a high-performance piezoresistive pressure sensor comprises a filler neck, a shell and a plug which are connected in sequence; the pressure-sensing pipe is characterized in that a core body pressure-sensing cavity and a pressure-sensing core body are arranged in the filler pipe nozzle, and the pressure-sensing core body is arranged in the core body pressure-sensing cavity; a first filter plate, a signal conditioning plate and a second filter plate are arranged in the shell, and the signal conditioning plate is electrically connected with the first filter plate, the second filter plate and the pressure sensing core body respectively; the first filter board is electrically connected with pins of the pressure sensing core body, the signal conditioning board is electrically connected with the second filter board through a pin connector, the signal conditioning board is electrically connected with the first filter board through a PFC flexible flat cable, and the second filter board is electrically connected with the plug through a wire.
The utility model discloses a set up first filter board and carry out the filtering to the voltage signal of pressure sensing core output to voltage signal after filtering through signal conditioning board enlargies and temperature compensation, and according to using the scene output to satisfy standard voltage signal or current signal, improved the accuracy of sensor output data; the second filter plate is arranged to filter the power input by the butt plug, so that the power signal is prevented from interfering the output signal of the sensor, and the accuracy of the data detected by the sensor is further improved; the second filter plate also plays roles of preventing reverse connection of a power supply, resisting surge and protecting static electricity.
As the preferable proposal of the utility model, one end of the filler neck is provided with a porous buffer screw, and the other end is connected with the shell in a sealing way; the drainage holes of the porous buffer screws are communicated with the core body pressure sensing cavity; the medium is introduced into the core body pressure sensing cavity by arranging the porous buffer screw, so that the impact energy of the medium can be reduced; in addition, the design of core pressure sensing chamber can make the medium intensive mixing after act on the pressure sensing core surface, makes pressure measurement more steady, accurate.
As a preferred scheme of the present invention, the signal conditioning board is integrated with a signal amplifying unit, an ADC sampling unit, a micro control unit, a DAC conversion unit, and a V/I conversion unit, which are electrically connected in sequence, wherein the input end of the signal amplifying unit is connected with the output end of the first filter board, and the output end of the V/I conversion unit is connected with a cable of the plug; the input of the second filter plate is connected with a cable of the plug, and the output of the second filter plate is connected with the micro control unit;
the signal amplification unit is used for enlargiing the voltage signal of first filtering board output, ADC sampling unit is used for converting the voltage signal (analog signal) after amplifying into digital signal, little the control unit is used for right digital signal handles (temperature compensation), DAC converting unit is used for converting the digital signal after the temperature compensation into analog signal, V/I converting unit is used for exporting analog voltage signal or analog current signal according to the demand to cable transmission through the plug gives monitor terminal.
As the preferable proposal of the utility model, the filler neck, the shell and the plug are all made of electromagnetic shielding materials, thereby enhancing the electromagnetic shielding effect of the sensor and ensuring the stable work of the sensor in severe environment; all welding process of each seam crossing of pressure sensing core and casing, stable in structure, and shielding nature, leakproofness are good.
As the utility model discloses preferred scheme, the plug passes through fastening screw with the casing and can dismantle the connection, the installation of the cable of being convenient for and overhaul the sensor.
Advantageous effects
Compared with the prior art, the beneficial effects of the utility model reside in that:
(1) The utility model discloses a set up first filter board and carry out the filtering to the voltage signal of pressure sensing core output to voltage signal after filtering through the signal conditioning board is enlargied and temperature compensation, and according to using the scene output to satisfy standard voltage signal or current signal, improved the accuracy of sensor output data; the second filter plate is arranged to filter the power input by the butt plug, so that the power signal is prevented from interfering the output signal of the sensor, and the accuracy of the data detected by the sensor is further improved;
(2) The medium is introduced into the core body pressure sensing cavity by arranging the porous buffer screw, so that the impact energy of the medium can be reduced; in addition, the design of the core body pressure sensing cavity can enable the medium to be fully mixed and then act on the surface of the pressure sensing core body, so that the pressure measurement is more stable and accurate.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic diagram of an internal structure of a high-performance piezoresistive pressure sensor according to the present invention;
fig. 2 is a schematic diagram of an external structure of a high-performance piezoresistive pressure sensor according to the present invention;
fig. 3 is a schematic block diagram of an electrical connection structure of a high-performance piezoresistive pressure sensor according to the present invention;
in the figure: 1. a filler neck; 2. a housing; 3. a plug; 4. the core body is provided with a pressure sensing cavity; 5. a pressure-sensitive core; 6. a first filter plate; 7. a signal conditioning board; 8. a second filter plate; 9. a porous buffer screw; 10. fastening screws; 11. a pin; 12. a pin connector; 13. soft arranging wires; 14. and (4) conducting wires.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the embodiments of the present invention, and obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1 and 2, the present embodiment provides a high performance piezoresistive pressure sensor, which includes a filler neck 1, a housing 2, and a plug 3 connected in sequence; a core body pressure sensing cavity 4 and a pressure sensing core body 5 are arranged in the filler pipe 1, and the pressure sensing core body 5 is arranged in the core body pressure sensing cavity 4; a first filter plate 6, a signal conditioning plate 7 and a second filter plate 8 are arranged in the shell 2 (all fixedly arranged through screws), and the signal conditioning plate 7 is electrically connected with the first filter plate 6, the second filter plate 8 and the pressure sensing core body 5 respectively; the first filter plate 6 is electrically connected with a pin 11 of the pressure sensing core body 5, the signal conditioning plate 7 is electrically connected with the second filter plate 8 through a pin connector 12, the signal conditioning plate 7 is electrically connected with the first filter plate 6 through a PFC flexible flat cable 13, and the second filter plate 8 is electrically connected with the plug 3 through a flexible wire 14.
In the embodiment, the first filter plate 6 is arranged to filter the voltage signal output by the pressure sensing core body 5, the signal conditioning plate 7 is used to amplify and compensate the temperature of the filtered voltage signal, and the voltage signal or the current signal meeting the standard is output according to the application scene, so that the accuracy of the data output by the sensor is improved; the second filtering plate 8 is arranged to filter the power input by the docking plug 3, so that the power signal is prevented from interfering the output signal of the sensor, and the accuracy of the sensor in detecting data is further improved; the second filter plate 8 also plays a role in preventing reverse connection of a power supply and electrostatic protection.
As a preferable scheme of the embodiment, one end of the filler neck 1 is provided with a porous buffer screw 9, and the other end of the filler neck is sealed with the shell 2 through laser welding; the drainage holes of the porous buffer screws 9 are communicated with the core body pressure sensing cavity 4; the medium is introduced into the core body pressure sensing cavity 4 through the arrangement of the porous buffer screw 9, so that the impact energy of the medium can be reduced; in addition, 4 designs in core pressure sensing chamber can make 5 surfaces of pressure sensing core be acted on after the medium intensive mixing, make pressure measurement more steady, accurate.
As shown in fig. 3, as a preferred solution of this embodiment, a signal amplifying unit, an ADC sampling unit, a micro control unit, a DAC conversion unit, and a V/I conversion unit that are electrically connected in sequence are integrated on the signal conditioning board 7, an input end of the signal amplifying unit is connected with an output end of the first filter board 6, and an output end of the V/I conversion unit is connected with a cable of the plug 3; the input of the second filter plate 8 is connected with the cable of the plug 3, and the output is connected with the micro control unit;
the signal amplification unit is used for amplifying the voltage signal output by the first filter plate 6, the ADC sampling unit is used for converting the amplified voltage signal (analog signal) into a digital signal, the micro control unit is used for processing (temperature compensation) the digital signal, the DAC conversion unit is used for converting the digital signal after temperature compensation into an analog signal, and the V/I conversion unit is used for outputting an analog voltage signal (0.5-4.5V) or an analog current signal (4-20 mA) according to requirements and transmitting the analog voltage signal or the analog current signal to the monitoring terminal through a cable of the plug 3; the V/I conversion unit in the embodiment uses a built-in operational amplifier, and is configured with an external resistor, a capacitor and a triode to realize the conversion between a voltage signal and a two-wire system current signal, wherein the zero voltage corresponds to 4mA current output, and the full-scale output corresponds to 20mA current output; the signal conditioning board 7 integrates relevant pads of voltage and current type outputs, and the required outputs can be directly welded on the circuit board without redesigning or replacing the circuit board.
The pressure sensing core body 5 of the embodiment is used for realizing pressure measurement based on the silicon piezoresistive principle, and the core element of the pressure sensing core body is a silicon piezoresistive chip; the silicon piezoresistive chip converts the sensed medium pressure into a mV level voltage signal. The output of the silicon piezoresistive chip is generally dozens of to hundreds of millivolts, which cannot meet the application requirements of products; meanwhile, the silicon material is sensitive to temperature, the resistance value of the diffused silicon resistor changes along with the change of the temperature, and the influence of the temperature on pressure measurement is large when the temperature is measured in a wide temperature region, so that the mV-level voltage signal output by the pressure sensing core body 5 is amplified by the signal amplification unit in the embodiment to meet the application requirement of a product; and the micro control unit is used for carrying out temperature compensation processing on the amplified voltage signal, so that the influence of the ambient temperature on the detection data of the pressure sensing core body 5 is eliminated, and the accuracy of the detection data of the sensor is improved.
As a preferable scheme of this embodiment, the filler neck 1, the housing 2, and the plug 3 are all made of electromagnetic shielding materials (metal materials with good shielding performance), so that the electromagnetic shielding effect of the sensor is enhanced, and the sensor can stably work in a severe environment. All welding process of each seam crossing of pressure sensing core and casing, stable in structure, and shielding nature, leakproofness are good.
As a preferable scheme of the embodiment, the plug 3 is detachably connected with the housing 2 through a fastening screw 10, so that the installation of a cable and the overhaul of the sensor are facilitated.
The working principle of the sensor of the embodiment is as follows:
an external power supply is introduced through a cable connected with the plug 3 and supplies power to the signal conditioning plate 7, the first filter plate 6 and the pressure sensing core 5 after being filtered by the second filter plate 8; the filler neck 1 is connected with a medium pipeline to introduce a fluid medium, the fluid medium flows into the core body pressure sensing cavity 4 through the drainage holes of the porous buffer screws 9 and acts on the pressure sensing core body 5, a voltage signal output by the pressure sensing core body 5 is filtered by the first filter plate 6 and then transmitted into the signal conditioning plate 7, a standard voltage or current signal is output after the amplification and temperature compensation of the signal conditioning plate 7, and then the standard voltage or current signal is transmitted to the monitoring terminal through the cable of the plug 3.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. A high-performance piezoresistive pressure sensor is characterized by comprising a filler neck (1), a shell (2) and a plug (3) which are connected in sequence; a core body pressure sensing cavity (4) and a pressure sensing core body (5) are arranged in the filler pipe (1), and the pressure sensing core body (5) is arranged in the core body pressure sensing cavity (4); a first filtering plate (6), a signal conditioning plate (7) and a second filtering plate (8) are arranged in the shell (2), and the signal conditioning plate (7) is electrically connected with the first filtering plate (6), the second filtering plate (8) and the pressure sensing core body (5) respectively; first filter board (6) are connected with pin (11) electricity of pressure sensing core (5), signal conditioning board (7) are connected with second filter board (8) use contact pin connector (12) electricity, signal conditioning board (7) are connected through flexible flat cable (13) electricity with first filter board (6), second filter board (8) are connected with plug (3) use wire (14) electricity.
2. A high performance piezoresistive pressure sensor according to claim 1, wherein the filler neck (1) is fitted with a porous buffer screw (9) at one end and is sealingly connected to the housing (2) at the other end; and the drainage hole of the porous buffer screw (9) is communicated with the core body pressure sensing cavity (4).
3. A high-performance piezoresistive pressure sensor according to claim 1, wherein the signal conditioning board (7) is integrated with a signal amplifying unit, an ADC sampling unit, a micro-control unit, a DAC conversion unit and a V/I conversion unit which are electrically connected in sequence, the input end of the signal amplifying unit is connected with the output end of the first filter board (6), and the output end of the V/I conversion unit is connected with the cable of the plug (3); the input of the second filter plate (8) is connected with a cable of the plug (3), and the output of the second filter plate is connected with the micro control unit.
4. The piezoresistive pressure sensor according to claim 1, wherein the filler neck (1), the housing (2) and the plug (3) are made of electromagnetic shielding material, and the joints between the pressure sensing core (5) and the housing (2) are welded.
5. A high performance piezoresistive pressure sensor according to claim 1, wherein said plug (3) is removably connected to the housing (2) by means of a fastening screw (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222979113.3U CN218566760U (en) | 2022-11-09 | 2022-11-09 | High-performance piezoresistive pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222979113.3U CN218566760U (en) | 2022-11-09 | 2022-11-09 | High-performance piezoresistive pressure sensor |
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| Publication Number | Publication Date |
|---|---|
| CN218566760U true CN218566760U (en) | 2023-03-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222979113.3U Expired - Fee Related CN218566760U (en) | 2022-11-09 | 2022-11-09 | High-performance piezoresistive pressure sensor |
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| Country | Link |
|---|---|
| CN (1) | CN218566760U (en) |
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- 2022-11-09 CN CN202222979113.3U patent/CN218566760U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information |
Inventor after: Huang Xinglong Inventor after: Ren Zhong Inventor after: Zhang Bo Inventor before: Ren Zhong Inventor before: Zhang Bo |
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| CB03 | Change of inventor or designer information | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20230303 |