CN205209684U - High reliability pressure drag formula pressure sensor - Google Patents
High reliability pressure drag formula pressure sensor Download PDFInfo
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- CN205209684U CN205209684U CN201520794185.8U CN201520794185U CN205209684U CN 205209684 U CN205209684 U CN 205209684U CN 201520794185 U CN201520794185 U CN 201520794185U CN 205209684 U CN205209684 U CN 205209684U
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Abstract
The utility model discloses a high reliability pressure drag formula pressure sensor, include: drawing and pressing mouth, sensing element, adaptor, shielding part, circuit board, wave filter, shell, draw and press the mouth upper end and place sensing element, sensing element presses mouth welded connection with drawing, and sensing element presses the mouth inner chamber to form a seal chamber with drawing, the adaptor draws through threaded connection presses the mouth and locates the rubber coating at the screw thread, draw and press mouth and shell welded connection, adaptor upper end fixed circuit board and shielding part, the wave filter is installed on the shielding part, the electric connector fixed connection shell, sensing element is connected with circuit board electricity, and the circuit board is connected with the wave filter electricity, and the wave filter is connected with the electric connector electricity, and measuring -signal is exported after carrying out temperature compensating and filter amplifier to voltage signal to output voltage to circuit board behind the sensing element measurement measurement medium, circuit board, and measuring -signal conveys to electric connector after passing through the wave filter protection, becomes the sensor output. This sensor has high overload capacity, good temperature characteristic and measures the performance, has wide application prospect in the space flight field.
Description
Technical field
The invention belongs to pressure sensor design technology, be specifically related to a kind of high reliability piezoresistive pressure sensor.
Background technology
Piezoresistive pressure sensor is widely used at military and aerospace field, and there is strict requirement many application scenarios to the reliability of sensor and temperature error.As measured in application at pipeline pressure, once sensor failure causes tested gas or fluid leakage, not only can make measurement mission failure, serious situation even can cause casualties.Piezoresistive transducer is compared with other same type of sensor, there is no common mechanical drive mechanism, so completely eliminate frictional error, also the error that in general sensor, metallic membrane produces because of creep, sluggishness can be eliminated, substantially increase the precision of sensor, and vibration strength, corrosion resistance, antijamming capability, stability and good reliability, be widely used in the every field such as space flight, aviation, navigation.
Piezoresistive pressure sensor is to responsive to temperature, the impact of environment temperature can be subject to, output signal is caused to produce zero point drift and sensitivity drift, traditional technique for temperature compensation many employings resolution element design, compensation method has series and parallel compensated resistance compensation, thermistor compensation and diode compensation etc., these compensation method debug processs are complicated and compensation precision is limited, in recent years along with technical development uses intelligent signal compensation chip to improve compensation precision.Along with the development of national economy, the such as field such as Aero-Space, weaponry proposes more and more higher requirement to the reliability of piezoresistive pressure sensor under the temperature range significantly changed.
The high reliability piezoresistive pressure sensor that the present invention proposes comprises selects the design of MEMS pressure-sensing device, sensor mechanical structure and temperature-compensation circuit to design three parts.Select suitable MEMS pressure-sensing device can design the sensor of different range as requested, method is flexible.Design of Mechanical Structure adopts and is welded to connect connected mode locking with screw thread viscose glue, ensures that product has enough structural strengths, avoids revealing and losing efficacy, and greatly improves the reliability of product.Temperature-compensation circuit design can not only improve the precision of product, reduce temperature error, sensor output signal scope can also be freely set as requested, adopt sensor provided by the invention, there are 3 times amount stroke pressure overload capacity, and by the examination of environmental test on arrow, space flight and the tonometric request for utilization of military field can be met.
Summary of the invention
For the pressure transducer of space industry, have strict requirement to the structural strength of product and reliability, present invention employs the piezoresistive pressure sensitive element made based on MEMS technology, this component structure is simple and reliable and overload capacity is strong.In order to prevent sensor from revealing, the present invention adopts the connection of welding and realizing between sensitive element and pressure-inducing nozzle, and sealing structure can ensure that product possesses the overvoltage capabilities of 3 times of design ranges; Sheathing material is stainless steel, welds with pressure-inducing nozzle, and case surface has better corrosion resistance after electric conductive oxidation; Adaptor material is aluminium, and the light and good manufacturability of this material, adaptor adds viscose glue with pressure-inducing nozzle by screw thread and is connected, and which is easy and simple to handle and intensity is high, effectively can ensure the reliability of sensor.
The invention provides a kind of high reliability piezoresistive pressure sensor, comprise: pressure-inducing nozzle, sensitive element, adaptor, shielding part, circuit board, wave filter, shell, pressure-inducing nozzle upper ends sensitive element, sensitive element and pressure-inducing nozzle are welded to connect, and sensitive element and pressure-inducing nozzle inner chamber form a seal chamber; Adaptor is threaded connection pressure-inducing nozzle and at screw thread place gluing; Pressure-inducing nozzle and shell are welded to connect; Adaptor upper end fixing circuit board and shielding part, wave filter is arranged on shielding part; Electric connector is fixedly connected with shell; Sensitive element is electrically connected with circuit board; circuit board is electrically connected with wave filter; wave filter is electrically connected with electric connector; after measured medium measured by sensitive element, output voltage signal is to circuit board; circuit board exports measuring-signal after carrying out temperature compensation and filter and amplification to voltage signal; measuring-signal, by being sent to electric connector after filter protection, becoming sensor and exports.
Described circuit board is doubling plate, and material is epoxy glass fabric pressing plate, comprises the first source of stable pressure and the second source of stable pressure, signal condition chip, pressure-sensitive electric bridge; Power supply connects the first source of stable pressure the 1st pin and the second source of stable pressure the 1st pin, and the first source of stable pressure the 1st pin connects 0.1uf capacity earth, and the second source of stable pressure the 1st pin connects 0.1uf capacity earth, the first source of stable pressure the 3rd pin and the second source of stable pressure the 3rd pin common ground; First source of stable pressure and the second source of stable pressure are signal condition chip power supply; Second source of stable pressure the 2nd pin connects the 9th pin of signal condition chip, and the first source of stable pressure the 2nd pin connects the 7th pin of signal condition chip; 5th pin of signal condition chip connects 1 end of pressure-sensitive electric bridge, powers to pressure-sensitive electric bridge, the 5th pin of signal condition chip and the 1st pin short circuit; 4th pin of signal condition chip connects 4 ends of pressure-sensitive electric bridge, and the 6th pin of signal condition chip connects 2 ends of pressure-sensitive electric bridge, 3 end ground connection G of pressure-sensitive electric bridge, the 3rd pin of signal condition chip and the 8th pin ground connection; During debugging, the 11st pin of signal condition chip is communicated with Intelligent debug system with the 10th pin, and the 11st pin having debugged signal condition chip is unsettled, the 10th pin ground connection; 2nd pin output temperature of signal condition chip compensates and signal after amplifying, exports after the 2nd pin of signal condition chip connects low-pass filter circuit.
Further, transient voltage suppressor diode is connect between the power supply to ground.
Described pressure-inducing nozzle adopts stainless steel material, and screw thread, pitch are established in pressure-inducing nozzle lower end, and screw thread is established in pressure-inducing nozzle upper end.
Described sensitive element is MEAS87N and MEAS85C.
Adaptor material is aluminium, and lower end internal whorl and pressure-inducing nozzle threaded upper ends coordinate, and there are 4 threaded holes and 1 groove in upper end.
Described electric connector is 4 core contact pins, and No. 1 contact pin connects+15V power supply, and No. 2 contact pins connect output signal, and No. 3 contact pins connect ground, and No. 4 contact pins are empty.
Beneficial effect of the present invention is as follows:
For checking effect of the present invention, produce 10 model machines of the present invention, wherein 5 small-range pressure transducers, 5 wide range pressure transducers, all the sensors all can bear the pressure overload of 3 times of ranges, and smoothly by the test of the rigor condition such as vibration, Wen Xun, impact, overload and infrabar.Experimental test result shows, the zero-bit output voltage of piezoresistive pressure sensor of the present invention is distributed between 144mV ~ 156mV, Full-span output voltage's distribiuting is between 4.898V ~ 4.903V, normal temperature precision is distributed between 0.080% ~ 0.146%, total temperature scope resultnat accuracy is distributed in: between 0.216% ~ 0.358%, is all well positioned to meet the requirement of design objective.
High reliability piezoresistive pressure sensor provided by the invention has high overload ability and good temperature characterisitic, has excellent measurement performance, has broad application prospects at space industry.
Accompanying drawing explanation
Fig. 1 is the complete machine structure figure of piezoresistive pressure sensor of the present invention;
1-pressure-inducing nozzle 2-sensitive element 3-adaptor 4-shell 5-circuit board 6-screw 7-shielding part 8-wave filter 9-wire 10-screw 11-electric connector A-weld seam B-weld seam
Fig. 2 is the structural representation of sensors of large measurement range pressure-inducing nozzle;
Fig. 3 is the structural representation of small-range sensor pressure-inducing nozzle;
Fig. 4 is the structural representation of sensors of large measurement range adaptor;
Fig. 5 is the structural representation of small-range sensor adaptor;
Fig. 6 is the structural representation of shell;
Fig. 7 is the front view of shielding part;
Fig. 8 is the vertical view of shielding part;
Fig. 9 is intelligent compensation circuit diagram;
Embodiment
Below in conjunction with the drawings and specific embodiments, technical scheme of the present invention is described in further details.Obviously, described embodiment is only a part of embodiment of the present invention, instead of whole embodiments.Based on embodiments of the invention, those skilled in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of present invention.
As shown in Figure 1, piezoresistive pressure sensor of the present invention comprises pressure-inducing nozzle, sensitive element, adaptor, shielding part, wave filter, shell, sensitive element and pressure-inducing nozzle are welded to connect, pressure-inducing nozzle is threadedly attached on tested pipeline or casing during measurement, the tested gas of the inside or liquid enter into pressure-inducing nozzle inner chamber and contact with sensitive element, after sensitive element pressure-bearing, output voltage signal is to circuit board, and voltage signal is compensated through circuit board temperature and exported by electric connector after filter and amplification.
1, sensitive element welding
The sensitive element 85C series sensor selecting MEAS company to produce as small-range sensor sensing element, range 15-500psi; Select MEAS87N series sensor as sensors of large measurement range sensitive element, range 1000-5000psi.These two series are can weld type all steel material.Different according to sensitive element physical dimension, dimensional structure design in pressure-inducing nozzle upper end is also different, as shown in Figure 2 and Figure 3.85C series sensor is installed to small-range pressure-inducing nozzle upper end, and 87N series sensor is installed to wide range pressure-inducing nozzle upper end, and sensitive element and pressure-inducing nozzle are by being welded to connect, and sensitive element and pressure-inducing nozzle inner chamber form the cavity of a sealing jointly.
2, adaptor structure
The adaptor structure of sensor is used for fixing circuit board and shielding part, and different according to pressure-inducing nozzle size, adaptor also has different structures as shown in Figure 4, Figure 5.Adaptor material is aluminium, the light and good manufacturability of this material.Adaptor lower end internal whorl is connected with pressure-inducing nozzle, and viscose glue is locking, and adaptor upper end is used for fixing circuit board and shielding part; Shielding part is equipped with wave filter, the shielding of electromagnetic interference signal to external world can be realized.
3, sensor circuit designs
Sensor circuit designs adopts signal condition chip to export sensor and compensates, and adopts transient voltage suppressor diode realizing circuit anti-spike pulsation interference.Select Max1452 to be signal condition chip, Max1452 chip is that 16 pin SSOP encapsulate, and operating temperature range is between-40 ~ 125 DEG C, and power supply voltage range is 4.5 ~ 5.5V, and static current of lcd is 2mA.Max1452 can realize the compensation of zero point and sensitivity simultaneously, within sensor temperature error can reach sensor full scale 0.5% after compensating, and output end signal can not be made to introduce quantizing noise.
As shown in Figure 9, be the application circuit of Max1452.U1 and U2 is two panels voltage stabilizing chip 7805, U3 be Max1452, U4 is pressure-sensitive electric bridge.U3 has two feeder ears, and one is positive voltage VDD, and another is the supply voltage VDDF of EEPROM, in order to suppress mutual noise, selects two voltage stabilizing chip U1 and U2 to power respectively.
+ 15V power supply meets source of stable pressure U1 the 1st pin in and source of stable pressure U2 the 1st pin in.U1 the 1st pin in connects 0.1uf electric capacity C1 ground connection, and U2 the 1st pin in connects 0.1uf electric capacity C2 ground connection.U1 the 3rd pin GND and U2 the 3rd pin GND common ground G.U1 and U2 is that Max1452 powers, and U2 the 2nd pin out meets the 9th pin VDDF of signal condition chip U3, and U1 the 2nd pin OUT meets the 7th pin VDD of U3.The 5th pin BDR of U3 connects 1 end of U4, is powered after Max1452 works on power by BDR to electric bridge U4, and the 5th pin BDR of U3 and the 1st pin ISRC short circuit when constant voltage is powered, the 4th pin INP of U3 connects 4 ends of U4, and the 6th pin INP of U3 connects 2 ends of U4.The 3 end ground connection G of U4.The 3rd pin VSS of U3 and the 8th pin TEST ground connection G.The 2nd pin OUT output temperature of U3 compensates and signal after amplifying.R1 and C3 forms low-pass filter circuit, exports U0 after the 2nd pin OUT of U3 connects low-pass filter circuit.
Between power supply to ground, connect transient voltage suppressor diode, when superpotential spike appears in power supply, its working impedance drops to very low conduction value immediately, absorbs the energy of power supply spike, and by voltage clamping to ratings 5V, protects sensor circuit.Between power supply and transient voltage suppressor diode, seal in current-limiting resistance, when transient voltage suppressor diode working impedance drops to conduction value, current-limiting resistance can play the protective effect to power supply.
Postsignal filter amplification circuit can carry out filtering and amplification to the output signal after temperature compensation, filtering high-frequency interferencing signal.Circuit board is doubling plate, and material selection epoxy glass fabric pressing plate is as material, and intensity is larger.As shown in Figure 1, circuit board is connected with adaptor, shielding part by screw, and structure is reliable.
3, the assembly connection of complete machine structure
In complete machine structure assembling process, mechanical connection mainly contains three places, pressure-inducing nozzle and shell, adaptor and pressure-inducing nozzle, electric connector and shell respectively, the strength of joint at three places is very crucial to the structural strength of complete machine, its housing and pressure-inducing nozzle are by being welded to connect, and adaptor and pressure-inducing nozzle are threaded connection place's Tu glue fixation, and on electric connector and shell attachment screw, gluing is fixed locking, three place's syndetons are reliable, effectively ensure that the structural strength of complete machine.In addition, sensitive element and pressure-inducing nozzle are welded to connect, and circuit board is connected with adaptor by screw with shielding part, and wave filter is arranged on shielding part.Electric connector is connected with shell by screw.
Electrical connection is connected with circuit board for sensitive element; after measured medium measured by sensitive element, output voltage signal Uin is to circuit board; circuit board exports measuring-signal Ut after carrying out temperature compensation and filter and amplification to voltage signal Uin; measuring-signal Ut is connected with the external world by being sent to electric connector after filter protection, becomes sensor and exports Uout.Electric connector is 4 core contact pins, and No. 1 contact pin connects+15V power supply, and No. 2 contact pins connect output signal U out, and No. 3 contact pins connect ground, and No. 4 contact pins are empty.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the present invention.Be apparent to the multiple amendment of these embodiments concerning the patented technology personnel of this area, General Principle as defined herein can without departing from the present invention, realize in other embodiments.Therefore, the present invention can not be restricted to these embodiments shown in this article, but will meet the most wide region consistent with principle disclosed herein and features of novelty.
Claims (7)
1. a high reliability piezoresistive pressure sensor, it is characterized in that, comprise: pressure-inducing nozzle, sensitive element, adaptor, shielding part, circuit board, wave filter, shell, pressure-inducing nozzle upper ends sensitive element, sensitive element and pressure-inducing nozzle are welded to connect, and sensitive element and pressure-inducing nozzle inner chamber form a seal chamber; Adaptor is threaded connection pressure-inducing nozzle and at screw thread place gluing; Pressure-inducing nozzle and shell are welded to connect; Adaptor upper end fixing circuit board and shielding part, wave filter is arranged on shielding part; Electric connector is fixedly connected with shell; Sensitive element is electrically connected with circuit board; circuit board is electrically connected with wave filter; wave filter is electrically connected with electric connector; after measured medium measured by sensitive element, output voltage signal is to circuit board; circuit board exports measuring-signal after carrying out temperature compensation and filter and amplification to voltage signal; measuring-signal, by being sent to electric connector after filter protection, becoming sensor and exports.
2. a kind of high reliability piezoresistive pressure sensor according to claim 1, is characterized in that, described circuit board is doubling plate, and material is epoxy glass fabric pressing plate, comprises the first source of stable pressure and the second source of stable pressure, signal condition chip, pressure-sensitive electric bridge; Power supply connects the first source of stable pressure the 1st pin and the second source of stable pressure the 1st pin, and the first source of stable pressure the 1st pin connects 0.1uf capacity earth, and the second source of stable pressure the 1st pin connects 0.1uf capacity earth, the first source of stable pressure the 3rd pin and the second source of stable pressure the 3rd pin common ground; First source of stable pressure and the second source of stable pressure are signal condition chip power supply; Second source of stable pressure the 2nd pin connects the 9th pin of signal condition chip, and the first source of stable pressure the 2nd pin connects the 7th pin of signal condition chip; 5th pin of signal condition chip connects 1 end of pressure-sensitive electric bridge, and the 5th pin of signal condition chip is powered to pressure-sensitive electric bridge, the 5th pin and the 1st pin short circuit; 4th pin of signal condition chip connects 2 ends of pressure-sensitive electric bridge, and the 6th pin of signal condition chip connects 4 ends of pressure-sensitive electric bridge, 3 end ground connection of pressure-sensitive electric bridge, the 3rd pin of signal condition chip and the 8th pin ground connection; Signal after 2nd pin output temperature of signal condition chip compensates, exports after the 2nd pin of signal condition chip connects low-pass filter circuit.
3. a kind of high reliability piezoresistive pressure sensor according to claim 2, is characterized in that, between power supply to ground, connect transient voltage suppressor diode.
4. a kind of high reliability piezoresistive pressure sensor any one of claim 1-3 described in claim, is characterized in that, described pressure-inducing nozzle adopts stainless steel material, and screw thread, pitch are established in pressure-inducing nozzle lower end, and screw thread is established in pressure-inducing nozzle upper end.
5. a kind of high reliability piezoresistive pressure sensor according to claim 4, is characterized in that, described sensitive element is MEAS87N and MEAS85C.
6. a kind of high reliability piezoresistive pressure sensor according to claim 4, is characterized in that, described adaptor material is aluminium, and lower end internal whorl and pressure-inducing nozzle threaded upper ends coordinate, and there are 4 threaded holes and 1 groove in upper end.
7. a kind of high reliability piezoresistive pressure sensor according to claim 1, is characterized in that, described electric connector is 4 core contact pins, and No. 1 contact pin connects+15V power supply, and No. 2 contact pins connect output signal, and No. 3 contact pins connect ground, and No. 4 contact pins are empty.
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| CN201520794185.8U CN205209684U (en) | 2015-10-14 | 2015-10-14 | High reliability pressure drag formula pressure sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105973525A (en) * | 2015-10-14 | 2016-09-28 | 北京强度环境研究所 | High-reliability piezoresistive pressure sensor |
| CN113984251A (en) * | 2021-10-26 | 2022-01-28 | 西安微电子技术研究所 | Debugging method of silicon piezoresistive pressure sensor |
-
2015
- 2015-10-14 CN CN201520794185.8U patent/CN205209684U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105973525A (en) * | 2015-10-14 | 2016-09-28 | 北京强度环境研究所 | High-reliability piezoresistive pressure sensor |
| CN113984251A (en) * | 2021-10-26 | 2022-01-28 | 西安微电子技术研究所 | Debugging method of silicon piezoresistive pressure sensor |
| CN113984251B (en) * | 2021-10-26 | 2023-09-22 | 西安微电子技术研究所 | Debugging method of silicon piezoresistive pressure sensor |
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