CN218445114U - Online ellipsometry testing arrangement - Google Patents
Online ellipsometry testing arrangement Download PDFInfo
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- CN218445114U CN218445114U CN202222097337.1U CN202222097337U CN218445114U CN 218445114 U CN218445114 U CN 218445114U CN 202222097337 U CN202222097337 U CN 202222097337U CN 218445114 U CN218445114 U CN 218445114U
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Abstract
The utility model provides an online ellipsometry testing device, which comprises two sets of ellipsometer hosts which are correspondingly arranged, wherein each ellipsometer host is respectively provided with a light source end and a receiving end; the solar cell module comprises a solar cell production line, and is characterized by also comprising probes, wherein lenses are correspondingly arranged on two sides of each probe respectively, and the probes are arranged right above the solar cell production line; each light source end is correspondingly connected with a lens positioned at the same side of the probe, each receiving end is correspondingly connected with a lens positioned at the other side of the probe, and the light source end of the same ellipsometer host corresponds to the lens connected with the receiving end; the light source end transmits light beams into the lens through the optical fiber, the polarizer is arranged in the lens, and the analyzer is arranged in the lens corresponding to the light source end on the other side of the probe. The utility model discloses can export the membrane thickness and the refracting index parameter of current solar cell in real time, satisfy solar cell's the demand of examining the function entirely on line.
Description
Technical Field
The utility model relates to a solar cell tests technical field, concretely relates to online ellipsometry testing arrangement.
Background
At present, the front-end process of a crystalline silicon solar cell is blue in batch after cleaning, surface texturing, diffusion and peripheral etching processes are carried out, and SixNy and other film layers are deposited through film coating (such as PECVD-plasma enhanced chemical vapor deposition). However, after the lamination in the subsequent step, the appearance color is different from each other such as blue or red. The phenomenon is caused by the inconsistency of the refractive index and the thickness of the SixNy film layer through theoretical analysis.
At present, there are two types of devices that can satisfy the requirements for testing film thickness and refractive index: the first is a laser ellipsometer; the other is a spectrum ellipsometer, but the existing equipment does not have the function of online full detection.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing an online ellipsometry testing device.
In order to achieve the above object, the present invention provides an online ellipsometry testing apparatus, which includes two sets of ellipsometry hosts correspondingly arranged, each ellipsometry host having a light source end and a receiving end respectively; the solar cell module comprises a solar cell production line, and is characterized by also comprising probes, wherein lenses are correspondingly arranged on two sides of each probe respectively, and the probes are arranged right above the solar cell production line; each light source end is correspondingly connected with a lens positioned at the same side of the probe, each receiving end is correspondingly connected with a lens positioned at the other side of the probe, and the light source end of the same ellipsometer host corresponds to the lens connected with the receiving end; the light source end transmits light beams to the lens through the optical fiber, the polarizer is assembled in the lens, the analyzer is assembled in the lens corresponding to the light source end on the other side of the probe, and the lens receives reflected light beams emitted by the corresponding light source end and reflected by the surface of the solar cell and transmits the light beams to the corresponding receiving end through the optical fiber.
As the utility model discloses a preferred setting is still including setting up the position sensor of solar cell production line one side, position sensor with the probe is corresponding, just the position sensor electricity is connected to ellipsometer host computer IO end.
As the utility model discloses a preferred setting, ellipsometer host computer USB end electric connection is to the industrial computer, the industrial computer electricity is connected the solar cell production line.
The utility model has the advantages that:
the utility model discloses a light beam that light source end sent, through solar cell surface reflection, the light beam that carries multilayer film interference signal receives the conduction through the receiving terminal and advances the ellipsometer host computer, and the ellipsometer host computer modulates, back calculation etc. this signal, can output current solar cell's the thick and refractive index parameter of membrane in real time.
The utility model discloses solar cell's the demand of examining the function entirely on line can be satisfied.
Drawings
Fig. 1 is a schematic structural diagram of an online ellipsometry testing apparatus provided by the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1, the utility model provides an online ellipsometry testing device, which comprises two ellipsometer hosts 1 correspondingly arranged, each ellipsometer host having a light source end 2 and a receiving end 3; the solar cell module comprises a solar cell production line 6, and is characterized by further comprising a probe 4, wherein two sides of the probe 4 are respectively and correspondingly provided with a lens 5, and the probe 4 is arranged right above the solar cell production line 6; each light source end 2 is correspondingly connected with a lens 5 positioned on the same side of the probe 4, each receiving end 3 is correspondingly connected with a lens 5 positioned on the other side of the probe 4, and the light source end 2 of the same ellipsometer host 1 corresponds to the lens 5 connected with the receiving end 3; the light source end 3 transmits light beams to the lens 5 through optical fibers, a polarizer is arranged in the lens 5, an analyzer is arranged in the lens 5 corresponding to the light source end 2 on the other side of the probe 4, and the lens 5 receives reflected light beams which are emitted by the corresponding light source end 2 and reflected by the surface of the solar cell and transmits the light beams to the corresponding receiving end 3 through the optical fibers.
As the utility model discloses the preferred setting of embodiment, further, still including setting up position sensor 7 of 6 one sides of solar cell production line, position sensor 7 with probe 4 is corresponding, just position sensor 7 electricity is connected to ellipsometer host computer 1IO end.
As the utility model discloses preferred setting, furtherly, 1USB end electric connection of ellipsometer host computer is to industrial computer 8, industrial computer 8 electricity is connected solar cell production line 6.
The utility model discloses a light beam that light source end sent, through solar cell surface reflection, the light beam that carries multilayer film interference signal receives the conduction through the receiving terminal and advances the ellipsometer host computer, and the ellipsometer host computer modulates, back calculation etc. this signal, can output current solar cell's the thick and refractive index parameter of membrane in real time. The utility model discloses solar cell's online function of examining entirely can be satisfied. Meanwhile, the device is not only suitable for thin film measurement (the thickness of the thin film is in the range of 1-2000 nm), but also can be used for thick film measurement (the thickness of the thick film is in the range of 2-400 um).
Furthermore, those skilled in the art will appreciate that while some embodiments described herein include some features included in other embodiments, rather than other features, combinations of features of different embodiments are meant to be within the scope of the invention and form different embodiments. For example, in the claims above, any of the claimed embodiments may be used in any combination. The information disclosed in this background section is only for enhancement of understanding of the general background of the invention and should not be taken as an acknowledgement or any form of suggestion that this information constitutes prior art already known to a person skilled in the art.
Claims (3)
1. The online ellipsometry testing device is characterized by comprising two sets of ellipsometer hosts which are correspondingly arranged, wherein each ellipsometer host is respectively provided with a light source end and a receiving end; the solar cell production line comprises a solar cell production line and is characterized by further comprising a probe, wherein two sides of the probe are respectively and correspondingly provided with a lens, and the probe is arranged right above the solar cell production line; each light source end is correspondingly connected with a lens positioned at the same side of the probe, each receiving end is correspondingly connected with a lens positioned at the other side of the probe, and the light source end of the same ellipsometer host corresponds to the lens connected with the receiving end; the light source end transmits light beams to the lens through the optical fiber, the polarizer is assembled in the lens, the analyzer is assembled in the lens corresponding to the light source end on the other side of the probe, and the lens receives reflected light beams emitted by the corresponding light source end and reflected by the surface of the solar cell and transmits the light beams to the corresponding receiving end through the optical fiber.
2. The on-line ellipsometry testing apparatus of claim 1, further comprising a position sensor disposed at one side of the solar cell production line, wherein the position sensor corresponds to the probe and is electrically connected to an IO terminal of the ellipsometer host.
3. The on-line ellipsometry testing apparatus of claim 1, wherein the USB terminal of the ellipsometer host is electrically connected to an industrial personal computer, and the industrial personal computer is electrically connected to the solar cell production line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222097337.1U CN218445114U (en) | 2022-08-10 | 2022-08-10 | Online ellipsometry testing arrangement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222097337.1U CN218445114U (en) | 2022-08-10 | 2022-08-10 | Online ellipsometry testing arrangement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218445114U true CN218445114U (en) | 2023-02-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN202222097337.1U Active CN218445114U (en) | 2022-08-10 | 2022-08-10 | Online ellipsometry testing arrangement |
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| CN (1) | CN218445114U (en) |
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2022
- 2022-08-10 CN CN202222097337.1U patent/CN218445114U/en active Active
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