CN218395132U - A high-efficient belt cleaning device of pipe for chemical vapor deposition - Google Patents

A high-efficient belt cleaning device of pipe for chemical vapor deposition Download PDF

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Publication number
CN218395132U
CN218395132U CN202222653728.7U CN202222653728U CN218395132U CN 218395132 U CN218395132 U CN 218395132U CN 202222653728 U CN202222653728 U CN 202222653728U CN 218395132 U CN218395132 U CN 218395132U
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China
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pipe
vapor deposition
cleaning
dwang
chemical vapor
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CN202222653728.7U
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Chinese (zh)
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钟兴进
何淑英
何浩梁
林玉章
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Guangzhou Honghao Optoelectronic Semiconductor Co ltd
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Guangzhou Honghao Optoelectronic Semiconductor Co ltd
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Abstract

The utility model relates to a vapor deposition equipment technical field just discloses a high-efficient belt cleaning device of pipe for chemical vapor deposition, including supporting elevating system and wiper mechanism, wiper mechanism movable mounting puts in supporting elevating system surface central point, supports elevating system and sets up around the wiper mechanism surface. The utility model discloses a sweeper surface is corresponding with joint groove surface position, start driving motor, the pivot is rotated, it moves to drive the conveyer belt, conveyer belt inner wall and dwang surface contact, can effectively drive the dwang and rotate in step, the staff is with the pipe joint in joint trench position, and highly adjust the backup pad through external equipment, let rotate the loop bar and descend to inside the pipe, the water in the water tank is introduced into the pipe in the hole that looses of seting up, rotate the loop bar and effectively let the sweeper brush rotate inside the pipe and clean, can be to pipe inner chamber sanitization, and the work efficiency is improved.

Description

A high-efficient belt cleaning device of pipe for chemical vapor deposition
Technical Field
The utility model relates to a vapor deposition equipment technical field specifically is a high-efficient belt cleaning device of pipe for chemical vapor deposition.
Background
The vapor deposition equipment is a new technology for forming a metal or compound coating with specificity on the surface by changing the surface composition of a workpiece through physical and chemical processes generated in vapor, and the vapor deposition equipment needs to use a cleaning device to clean a conduit of the equipment after being used.
At present, the existing method for cleaning the catheter is mainly to manually clean the catheter by workers, the cleaning effect of the catheter is poor easily, an inner cavity is not easy to clean completely, the working efficiency is low, and the improvement is needed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a high-efficient belt cleaning device of pipe for chemical vapor deposition to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above purpose, the utility model provides a following technical scheme:
the utility model provides a high-efficient belt cleaning device of pipe for chemical vapor deposition, is including supporting elevating system and wiper mechanism, wiper mechanism movable mounting is in supporting elevating system surface central point and putting, it sets up around the wiper mechanism surface to support elevating system.
The supporting and lifting mechanism comprises a positioning groove, the positioning groove is formed in the center of the surface of the bottom of the supporting and lifting mechanism, and a clamping groove is formed in the center of the surface of the positioning groove.
The wiper mechanism includes the backup pad, backup pad movable mounting is in wiper mechanism top surface, backup pad top fixed surface installs the water tank, the water inlet has been seted up to water tank top surface both sides, backup pad bottom surface movable mounting has the dwang, dwang bottom fixed surface is connected with the rotating sleeve pole, the hole that looses has been seted up all around to rotating sleeve pole surface, the hole that looses surface fixedly connected with brush cleaner all around.
Preferably, support columns are fixedly mounted on the periphery of the top of the support lifting mechanism, and a lifting groove is formed in one side of the surface of each support column.
Preferably, driving motor is fixedly mounted on two sides of the top surface of the supporting plate, a rotating shaft is fixedly connected to the bottom of the driving motor, and a conveying belt is fixedly connected to the outer surface of the rotating shaft.
Preferably, conveyer belt inner wall all around with dwang surface contact, just the conveyer belt that rotates the loop bar through setting up rotates at dwang bottom surface, can drive a plurality of dwangs in step through the conveyer belt that sets up and rotate, makes the rotation loop bar that sets up wash the pipe.
Preferably, the lifting block is fixedly connected to the periphery of the outer surface of the supporting column, the lifting block moves in a lifting mode on the surface of the lifting groove, the height of the supporting plate can be adjusted through external equipment of a worker, the rotating sleeve rod can effectively fall into the guide pipe, and the operation is convenient and simple.
Preferably, the dwang top is linked together with water tank inside, just it is linked together through the hole that looses with the water tank to rotate the loop bar to run through the dwang inside, and the dwang of setting can introduce the water in the water tank to rotating the loop bar in, when needing to wash the pipe, introduces the pipe with water from the hole that looses, washs convenient high-efficient to the pipe.
Preferably, the brush cleaner evenly distributed is around rotating loop bar surface, just the brush cleaner surface is corresponding with joint groove surface position, start driving motor, the pivot rotates, drive the conveyer belt operation, conveyer belt inner wall and dwang surface contact, can effectively drive the dwang and rotate in step, the staff is with the pipe joint in joint groove position, and adjust the height of backup pad through external equipment, let rotate loop bar and descend inside the pipe, the water in the water tank is introduced into the pipe in the hole that looses who sets up, rotate the loop bar and rotate effectively let the brush cleaner clean in the inside rotation of pipe, can be to pipe inner chamber sanitization, and work efficiency is improved.
The utility model provides a high-efficient belt cleaning device of pipe for chemical vapor deposition possesses following beneficial effect:
(1) The utility model discloses a dwang top is linked together with water tank inside, and it is linked together with the water tank through the hole that looses to rotate the loop bar and run through the dwang inside, the dwang of setting can be introduced the water in the water tank to rotating the loop bar in, when needing to wash the pipe, introduce water to the pipe from the hole that looses, wash the pipe, it is convenient high-efficient, conveyer belt inner wall all around with dwang surface contact, and the conveyer belt that rotates the loop bar through setting up rotates on dwang bottom surface, can drive a plurality of dwangs in step through the conveyer belt that sets up and rotate, the rotating loop bar that makes the setting washs the pipe.
(2) The utility model discloses a fixedly connected with elevator all around the support column surface, elevator are at lift groove surface lifting motion, and staff's accessible external equipment is to the height adjustment of backup pad, effectively will rotate the loop bar and descend to the pipe in, convenient operation is simple.
(3) The utility model discloses a sweeper brush evenly distributed rotates the loop bar surface around, and the sweeper brush surface is corresponding with joint groove surface position, start driving motor, the pivot is rotated, it moves to drive the conveyer belt, conveyer belt inner wall and dwang surface contact, can effectively drive the dwang and rotate in step, the staff is with the pipe joint at joint groove position, and adjust the height of backup pad through external equipment, let rotate loop bar and descend inside the pipe, the scattered water hole of seting up is introduced the pipe with the water in the water tank, rotate the loop bar and rotate effectively to let the sweeper brush and clean in the inside rotation of pipe, can be to pipe inner chamber sanitization, and the work efficiency is improved.
Drawings
FIG. 1 is a front perspective view of the overall structure of the present invention;
fig. 2 is a schematic perspective view of the whole structure surface viewed from above;
FIG. 3 is a schematic view of the overall structure of the side of the present invention;
fig. 4 is a schematic view of the cleaning mechanism structure surface viewed from above.
In the figure: 1. a supporting lifting mechanism; 101. positioning a groove; 102. a clamping groove; 103. a support column; 104. a lifting groove; 2. a cleaning mechanism; 201. a water tank; 202. a water inlet; 203. a support plate; 204. rotating the rod; 205. rotating the loop bar; 206. a conveyor belt; 207. a drive motor; 208. a rotating shaft; 209. a water-sprinkling hole; 210. and (6) cleaning the brush.
Detailed Description
As shown in fig. 1-4, the utility model provides the following technical solutions:
the first embodiment is as follows:
the utility model provides a high-efficient belt cleaning device of pipe for chemical vapor deposition, is including supporting elevating system 1 and wiper mechanism 2, and wiper mechanism 2 movable mounting is put in supporting elevating system 1 surperficial central point, supports elevating system 1 and sets up around 2 surfaces of wiper mechanism.
Cleaning mechanism 2 includes backup pad 203, backup pad 203 movable mounting is in 2 top surfaces of cleaning mechanism, backup pad 203 top fixed surface installs water tank 201, water inlet 202 has been seted up to water tank 201 top surface both sides, backup pad 203 bottom fixed surface installs dwang 204, dwang 204 bottom fixed surface is connected with and rotates loop bar 205, it has scattered water hole 209 to have seted up all around to rotate loop bar 205 surface, it has cleaning brush 210 to scatter fixedly connected with all around the surface of water hole 209, backup pad 203 top surface both sides fixed mounting has driving motor 207, driving motor 207 bottom fixedly connected with pivot 208, pivot 208 outer fixed surface is connected with conveyer belt 206.
The cleaning brush 210 is uniformly distributed around the outer surface of the rotating sleeve rod 205, the outer surface of the cleaning brush 210 corresponds to the outer surface of the clamping groove 102, the driving motor 207 is started, the rotating shaft 208 rotates to drive the conveying belt 206 to operate, the inner wall of the conveying belt 206 is in contact with the outer surface of the rotating rod 204, the rotating rod 204 can be effectively driven to rotate synchronously, a worker clamps the pipe at the position of the clamping groove 102, the height of the supporting plate 203 is adjusted through external equipment, the rotating sleeve rod 205 descends into the pipe, water in the water tank 201 is introduced into the pipe through the arranged water scattering holes 209, the cleaning brush can effectively rotate and clean the inner cavity of the pipe through the rotation of the rotating sleeve rod 205, the working efficiency is improved, the top of the rotating rod 204 is communicated with the inner part of the water tank 201, the rotating sleeve rod 205 penetrates through the rotating sleeve rod 204 and is communicated with the water tank 201 through the water scattering holes 209, the arranged water rotating sleeve rod 204 can introduce water in the water tank 201 into the rotating sleeve rod 205, when the pipe needs to be cleaned, the pipe is cleaned, the pipe is convenient and efficient, the inner wall of the conveying belt 206 is in contact with the outer surface of the rotating sleeve rod 204, the rotating sleeve rod 204 can drive the rotating surface of the rotating sleeve rod 205 to clean the rotating sleeve rod 205 through the rotating sleeve rod 206, and the rotating surface, and the rotating sleeve rod 206.
The second embodiment:
the utility model provides a high-efficient belt cleaning device of pipe for chemical vapor deposition, is including supporting elevating system 1 and wiper mechanism 2, and wiper mechanism 2 movable mounting is in supporting 1 surperficial central point of elevating system and puts, supports elevating system 1 and sets up around wiper mechanism 2 surface.
The supporting lifting mechanism 1 comprises a positioning groove 101, the positioning groove 101 is formed in the center of the surface of the bottom of the supporting lifting mechanism 1, a clamping groove 102 is formed in the center of the surface of the positioning groove 101, a supporting column 103 is fixedly mounted on the periphery of the top of the supporting lifting mechanism 1, and a lifting groove 104 is formed in one side of the surface of the supporting column 103.
Through support column 103 surface fixedly connected with lifter all around, the lifter is at lifting groove 104 surface elevating movement, and staff's accessible external equipment is to the height adjustment of backup pad 203, effectively will rotate loop bar 205 and descend to the pipe in, convenient operation is simple.
The utility model discloses during the use, around rotating loop bar 205 surface through brush cleaner 210 evenly distributed, and brush cleaner 210 surface is corresponding with joint groove 102 surface position, start driving motor 207, pivot 208 rotates, it moves to drive conveyer belt 206, conveyer belt 206 inner wall and dwang 204 surface contact, can effectively drive dwang 204 synchronous rotation, the staff is with the pipe joint at joint groove 102 position, and highly adjust backup pad 203 through external equipment, let rotate loop bar 205 and descend to the pipe insidely, the hole 209 that looses of seting up is introduced the pipe among the water tank 201, rotate loop bar 205 and rotate and effectively let the brush clean in the inside rotation of pipe, can be to pipe inner chamber sanitization, improve work efficiency, dwang 204 top and the inside of water tank 201 are linked together, and rotate loop bar 205 and run through inside through the hole 209 that looses of dwang 204 and water tank 201 and be linked together, the dwang 204 of setting can introduce the water in the water tank 201 to rotating loop bar 205 in, when needing to wash the pipe, introduce water to the pipe from the hole 209 that looses to the pipe, wash convenient high-efficient, 206 high efficiency, the conveyer belt inner wall 206 and the surface of contact sets up the rotation of conveyer belt 204, and the rotation of the rotation sets up the synchronous rotation of the bottom that the pipe 204 that the rotation can carry out the rotation and set up all around, the pipe 204, the rotation of the rotation loop bar 204, the rotation sets up the rotation of the pipe 204.
It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Claims (7)

1. A high-efficient belt cleaning device of pipe for chemical vapor deposition, including supporting elevating system (1) and wiper mechanism (2), its characterized in that: the cleaning mechanism (2) is movably arranged at the center of the surface of the supporting and lifting mechanism (1), and the supporting and lifting mechanism (1) is arranged around the outer surface of the cleaning mechanism (2);
the supporting and lifting mechanism (1) comprises a positioning groove (101), the positioning groove (101) is formed in the center of the bottom surface of the supporting and lifting mechanism (1), and a clamping groove (102) is formed in the center of the surface of the positioning groove (101);
wiper mechanism (2) are including backup pad (203), backup pad (203) movable mounting is in wiper mechanism (2) top surface, backup pad (203) top fixed surface installs water tank (201), water inlet (202) have been seted up to water tank (201) top surface both sides, backup pad (203) bottom fixed surface installs dwang (204), dwang (204) bottom fixed surface is connected with and rotates loop bar (205), it has seted up water hole (209) to spill all around to rotate loop bar (205) surface, water hole (209) surface fixedly connected with brush cleaner (210) all around spill.
2. The apparatus for cleaning a guide tube for chemical vapor deposition as set forth in claim 1, wherein: support elevating system (1) top fixed mounting all around has support column (103), lift groove (104) have been seted up to support column (103) surface one side.
3. The apparatus for cleaning a guide tube for chemical vapor deposition as set forth in claim 1, wherein: supporting plate (203) top surface both sides fixed mounting has driving motor (207), driving motor (207) bottom fixedly connected with pivot (208), pivot (208) outer fixed surface is connected with conveyer belt (206).
4. The apparatus for cleaning a guide tube for chemical vapor deposition as set forth in claim 3, wherein: conveyer belt (206) inner wall is all around with dwang (204) surface contact, just rotate loop bar (205) and rotate at dwang (204) bottom surface through conveyer belt (206) that sets up.
5. The apparatus for cleaning a guide tube for chemical vapor deposition as set forth in claim 2, wherein: the lifting blocks are fixedly connected to the periphery of the outer surface of the supporting column (103), and move up and down on the surface of the lifting groove (104).
6. The apparatus for cleaning a guide tube for chemical vapor deposition as set forth in claim 1, wherein: dwang (204) top and water tank (201) are inside to be linked together, just it runs through dwang (204) inside and is linked together with water tank (201) through water hole (209) to rotate loop bar (205).
7. The apparatus for cleaning a guide tube for chemical vapor deposition as set forth in claim 1, wherein: the cleaning brushes (210) are uniformly distributed on the periphery of the outer surface of the rotating sleeve rod (205), and the outer surfaces of the cleaning brushes (210) correspond to the outer surface of the clamping groove (102).
CN202222653728.7U 2022-10-09 2022-10-09 A high-efficient belt cleaning device of pipe for chemical vapor deposition Active CN218395132U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222653728.7U CN218395132U (en) 2022-10-09 2022-10-09 A high-efficient belt cleaning device of pipe for chemical vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222653728.7U CN218395132U (en) 2022-10-09 2022-10-09 A high-efficient belt cleaning device of pipe for chemical vapor deposition

Publications (1)

Publication Number Publication Date
CN218395132U true CN218395132U (en) 2023-01-31

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ID=85000662

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202222653728.7U Active CN218395132U (en) 2022-10-09 2022-10-09 A high-efficient belt cleaning device of pipe for chemical vapor deposition

Country Status (1)

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CN (1) CN218395132U (en)

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