CN218370485U - Handling device and slot type cleaning equipment - Google Patents

Abstract

The application discloses handling device and slot type cleaning equipment, handling device includes first robotic arm subassembly, second robotic arm subassembly and at least one and carries and draw the subassembly. Wherein the first robot arm assembly is drivable to reciprocate in a first direction; one end of the second mechanical arm assembly is connected to the first mechanical arm assembly, and the other end of the second mechanical arm assembly is suspended in the air; the lift assembly is coupled to the first robot arm assembly and the second robot arm assembly. Part of the first mechanical arm assembly, part of the second mechanical arm assembly and part of the lifting assembly are sequentially connected end to form a triangular structure, and in the triangular structure, an inner angle formed by the first mechanical arm assembly and the lifting assembly is smaller than 90 degrees. When the carrying device provided by the application is used for carrying the silicon wafer carrier, the lifting assembly can reduce the load of the second mechanical arm assembly in the vertical direction, and the probability of deformation of the second mechanical arm assembly is reduced, so that the working precision of the carrying device is improved, and the production efficiency is improved.

Description

Handling device and slot type cleaning equipment

Technical Field

The application relates to the technical field of photovoltaics, in particular to a carrying device and a groove type cleaning device.

Background

With the rapid rise of the photovoltaic industry, the demand of the solar cell increases, and in the process of producing the solar cell in large scale, the silicon wafer needs to be washed for many times, such as acid washing, alkali washing, water washing and the like. In the prior art, a silicon wafer carrier provided with a silicon wafer is generally carried to each cleaning station by using a mechanical arm assembly for cleaning, but the mechanical arm used for hanging the silicon wafer carrier is easy to deform under the condition of long-term load, so that the working precision of the mechanical arm assembly is reduced, and the production efficiency is reduced.

SUMMERY OF THE UTILITY MODEL

Utility model purpose: in order to solve the problem that prior art exists, this application provides a handling device and slot type cleaning equipment, can reduce the probability that takes place deformation when the arm is loaded for a long time, improves handling device's work precision.

The technical scheme is as follows: in order to achieve the above purpose, the following technical scheme can be adopted in the application: provided is a conveyance device including:

a first robot arm assembly drivable to reciprocate in a first direction;

one end of the second mechanical arm assembly is connected to the first mechanical arm assembly, and the other end of the second mechanical arm assembly is suspended in the air;

at least one lift assembly coupled to the first robot arm assembly and the second robot arm assembly;

and in the triangular structure, an inner angle formed by the first mechanical arm assembly and the lifting assembly is less than 90 degrees.

Optionally, the second mechanical arm assembly comprises a first side plate, a bottom plate and a second side plate which are fixedly connected in sequence, the first side plate and the second side plate are arranged oppositely, and the first mechanical arm assembly is connected to one end of the first side plate opposite to one end of the second side plate; the lifting assembly comprises:

the reversing mechanism is arranged at the joint of the first mechanical arm assembly and the second mechanical arm assembly;

one end of the pull rope is connected to the first side plate or the second side plate, the other end of the pull rope is connected to the first mechanical arm assembly after being reversed by the reversing mechanism, and the distance between one end of the pull rope and the bottom plate is smaller than the distance between the reversing mechanism and the bottom plate.

Optionally, the reversing mechanism includes a first fixed pulley group, and one end of the pull rope is connected to one end of the first side plate or one end of the second side plate, which is far away from the first mechanical arm assembly.

Optionally, the lifting assembly further comprises a tension sensor mounted in the first robot arm assembly or the second robot arm assembly near the pull rope for detecting the tension degree of the pull rope; the pull rope is connected to the first mechanical arm assembly through an adjustable tensioning screw.

Optionally, the carrying device includes two lifting assemblies, and the reversing mechanisms belonging to the two lifting assemblies are respectively mounted on the first side plate and the second side plate.

Optionally, the portions of the drawstring belonging to the two lifting assemblies between the first side plate and the second side plate are parallel to each other.

Optionally, the first mechanical arm assembly comprises two fixed plates arranged oppositely, and a plurality of reinforcements arranged at intervals \31599; wherein the fixation plate includes a body portion and extension portions, both of the extension portions connected to the second arm assembly, the reinforcement body portion 31599 being fixed between the body portions.

Optionally, the handling device further comprises:

the first driving assembly comprises a first driving motor, a first rotating shaft connected with the first driving motor, a sliding block sleeved on the first rotating shaft, and a guide groove matched with the sliding block, the length extending direction of the first rotating shaft and the guide groove is a first direction, the sliding block is connected with the first mechanical arm assembly, and the sliding block is driven by the first driving motor to move in the guide groove along the first direction in a reciprocating manner.

Optionally, the handling device further comprises:

the second driving assembly comprises a second driving motor, a second rotating shaft connected with the second driving motor, a gear sleeved at one end of the second rotating shaft and an adaptive track of the gear, wherein the track is arranged on the groove type cleaning equipment, and the gear is driven by the second driving motor and follows the track to move.

In order to achieve the above purpose, the following technical scheme can be adopted in the present application: there is provided a tank cleaning apparatus comprising:

the carrying device of the above technical solution;

the hook assembly is fixed on the second mechanical arm assembly;

a cleaning tank for containing a cleaning solution;

when the first mechanical arm assembly drives the second mechanical arm assembly to reciprocate in the first direction, the silicon wafer carrier suspended on the hook assembly moves along to approach or leave the cleaning tank in the first direction.

The beneficial effect of this application is: the handling device provided by the application comprises a first mechanical arm assembly, a second mechanical arm assembly and at least one lifting assembly. Wherein the first robot arm assembly is drivable to reciprocate in a first direction; one end of the second mechanical arm assembly is connected to the first mechanical arm assembly, and the other end of the second mechanical arm assembly is suspended in the air; the lift assembly is coupled to the first robot arm assembly and the second robot arm assembly. Part of the first mechanical arm assembly, part of the second mechanical arm assembly and part of the lifting assembly are sequentially connected end to form a triangular structure, and in the triangular structure, an inner angle formed by the first mechanical arm assembly and the lifting assembly is smaller than 90 degrees. When the silicon wafer carrier is carried by the carrying device, the second mechanical arm component is horizontally arranged, the silicon wafer carrier is hung on the second mechanical arm component, and in the triangular structure, the lifting component can apply vertical upward component force to the second mechanical arm component, so that the load of the second mechanical arm component in the vertical direction is reduced, the deformation probability of the second mechanical arm component is reduced, the working precision of the carrying device is improved, and the production efficiency is improved.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts. Wherein:

FIG. 1 is a schematic structural diagram of an embodiment of a handling apparatus according to the present application;

FIG. 2 is a force analysis diagram of a second robot assembly;

FIG. 3 is an enlarged partial schematic view of FIG. 1 taken at the dashed box;

FIG. 4 is an enlarged, fragmentary view from another perspective of the second robot assembly of FIG. 1;

FIG. 5 is a schematic view of another aspect of the present disclosure;

FIG. 6 is a partially enlarged view of FIG. 5 at the dashed line box N1;

fig. 7 is an enlarged view of the inside of fig. 5 from another view angle at the dashed line N2.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making any creative effort belong to the protection scope of the present application.

Referring to fig. 1-2, fig. 1 is a schematic structural diagram of an embodiment of a carrying device on a trough type cleaning apparatus of the present application, fig. 2 is a force analysis diagram of a second robot assembly, fig. 3 is a partial enlarged schematic diagram of a dashed-line frame in fig. 1, and the carrying device 10 is rotated clockwise by 90 degrees, and includes a first robot assembly 11, a second robot assembly 12, and at least one lifting assembly 13.

The first robot arm assembly 11 may be driven to reciprocate in a first direction Z, and in practical applications, the first robot arm assembly 11 is vertically disposed, which is equivalent to a column of the carrying device 10, and the first direction Z is a vertical direction.

One end of the second mechanical arm assembly 12 is connected to the first mechanical arm assembly 11, and the other end of the second mechanical arm assembly 12 is suspended, so that a hook assembly 20 for hanging the silicon wafer carrier 200 can be arranged on the downward side of the second mechanical arm assembly 12, and when the first mechanical arm assembly 11 reciprocates in the first direction Z, the second mechanical arm assembly 12 drives the silicon wafer carrier 200 to reciprocate in the first direction Z, so that the silicon wafer in the silicon wafer carrier 200 is driven to perform a cleaning process at each cleaning position.

The lifting assembly 13 is connected to the first mechanical arm assembly 11 and the second mechanical arm assembly 12, part of the first mechanical arm assembly 11, part of the second mechanical arm assembly 12 and part of the lifting assembly 13 are sequentially connected end to form a triangular structure, and in the triangular structure, an inner angle formed by the first mechanical arm assembly 11 and the lifting assembly 13 is smaller than 90 degrees. As shown in fig. 1 to 3, a portion of the first robot arm assembly 11 located between points a and B, a portion of the second robot arm assembly 12 located between points B and C, and a portion of the pulling assembly 13 located between points a and C are connected end to form a triangular structure, wherein the AB segment is vertical, the BC segment is horizontal, and the AB segment and the AC segment form an internal angle θ smaller than 90 degrees, such as 80 degrees, 70 degrees, 60 degrees, 50 degrees, 40 degrees, 30 degrees, 20 degrees, 10 degrees, and the like.

As shown in fig. 2, it can be seen from the stress analysis of the second robot assembly 12 at the point C that, in the vertical direction, the second robot assembly 12 is subjected to a pulling force equivalent to the gravity G of the silicon wafer carrier, and the oblique pulling force F applied by the pulling assembly 13 is an upward component force Fcos θ, and due to the existence of the component force Fcos θ, the suspended end of the second robot assembly 12 is subjected to a downward pulling force, that is, the load of the second robot assembly 12 in the vertical direction is reduced, so that in the same configuration, the capability of the second robot assembly 12 to resist deformation is enhanced, and the probability of deformation thereof can be reduced, thereby improving the working accuracy of the handling device, prolonging the service time of the handling device, and improving the production efficiency.

In an embodiment, please refer to fig. 4 in conjunction with fig. 1-3, fig. 4 is a partially enlarged view of another view angle of the second robot assembly in fig. 1, the second robot assembly 12 includes a first side plate 121, a bottom plate 122, and a second side plate 123 fixedly connected in sequence, the first side plate 121 and the second side plate 123 are disposed oppositely, and the first robot assembly 11 is connected to an end of the first side plate 121 opposite to the second side plate 123, i.e., a left end in fig. 1, and a right end in fig. 4. For clarity, the second side plate 123 is not shown in fig. 1 and 3, and the first side plate 121 and a part of the first robot assembly 11 are not shown in fig. 4, and the silicon wafer carrier 200 is shown in fig. 1, and the silicon wafer carrier is not shown in fig. 4.

Specifically, the pull assembly 13 includes a reversing mechanism 131 and a pull cord 132. The reversing mechanism 131 is installed at the connection between the first robot arm assembly 11 and the second robot arm assembly 12, specifically at the point a of the triangle. In some embodiments, the reversing mechanism 131 includes a first set of fixed pulleys, which may include one or more fixed pulleys to change the direction of the pull cord 132. In other embodiments, the reversing mechanism 131 can adopt other reversing manners.

One end of the pulling rope 132 is connected to the first side plate 121 or the second side plate 123, and one end of the pulling rope 132 in fig. 1 and 4 is connected to one end of the first side plate 121 or the second side plate 123 away from the first mechanical arm assembly 11, that is, the point C of the triangle may be specifically realized by various manners such as riveting, welding, and the like. The other end of the pull rope 132 is connected to the first robot arm assembly 11 after being reversed by the reversing mechanism 131, for example, at point D in fig. 1, and the distance between one end of the pull rope 132 and the bottom plate 122 is smaller than the distance between the reversing mechanism 131 and the bottom plate 122. I.e., segment BC is horizontal, the portion of the pull cord 132 between the ACs is higher at one end and lower at the other, creating a diagonal pull to the second robot assembly 12.

This embodiment can alleviate the load of second robotic arm subassembly 12 in vertical direction, reduces its probability that takes place the deformation to improve handling device's work precision, prolong handling device's time of service, improve production efficiency.

In other embodiments, one end of the pulling rope 132 may be connected to the first side plate 121 or the second side plate 123 at other positions, for example, at the middle of BC, and one end of the pulling rope 132 may be connected to the bottom plate 122 as long as the diagonal pulling of the second robot arm assembly 12 can be formed.

In one embodiment, the pulling assembly 13 further comprises a tension sensor (not shown) mounted in the first robot arm assembly 11 or the second robot arm assembly 12 near the pulling rope 132, such as the first side plate 121 or the second side plate 123, for detecting the tension of the pulling rope 132. Wherein the pull rope 132 is connected to the first robot arm assembly 11 by an adjustable tensioning screw 133. When the tension sensor detects that the pull cord 132 is weak, the pull cord 132 can be tightened by adjusting the tightening screw 133, so that the second arm assembly 12 can be better protected.

In one embodiment, the carrying device 10 includes two pulling assemblies 13, and the reversing mechanisms 131 belonging to the two pulling assemblies 13 are respectively mounted on the first side plate 121 and the second side plate 123. Referring to fig. 4 in conjunction with fig. 1, two reversing mechanisms 131 are oppositely disposed, and are respectively mounted on the second side plate 123 and the first side plate 121, which is not shown, and respectively form the above-mentioned triangle with a part of the first robot arm assembly 11 and a part of the second robot arm assembly 12, that is, two pulling ropes 132 respectively belonging to the two pulling assemblies 13 respectively form a diagonal pull to the second robot arm assembly 12.

Preferably, two draw assemblies 13 are symmetrically arranged, and the parts of the draw ropes 132 belonging to two draw assemblies 13 and located between the first side plate 121 and the second side plate 123 are parallel to each other, so that the diagonal tension of the second mechanical arm assembly 12 is formed more uniformly, the probability of deformation of the second mechanical arm assembly is reduced, the working precision of the carrying device is improved, the service time of the carrying device is prolonged, and the production efficiency is improved.

In other embodiments, a greater number of the pull assemblies 13, such as three or more, may be provided according to the size of the second robot assembly 12, and the application is not limited thereto.

In one embodiment, with continued reference to fig. 5 and 6 in conjunction with fig. 1-4, fig. 5 is a schematic structural diagram of another perspective of the carrying device of the present application, fig. 6 is a partially enlarged schematic diagram of a dashed box N1 in fig. 5, and the first robot assembly 11 includes two fixing plates 111 disposed oppositely and a plurality of reinforcements \31599arranged at intervals. For clarity, only one of the fixing plates 111 is shown in fig. 4, and the silicon wafer carrier 200 is shown in fig. 5.

The fixing plate 111 includes a body portion 1111 and an extending portion 1112, and the body portion 1111 and the extending portion 1112 may be integrally formed, or may be connected by various methods such as riveting, welding, and the like. The two extensions 1112 are connected to the second arm module 12, for example, the first side plate 121 and the third side plate 123 of the second arm module 12 are respectively connected to the two extensions 1112 from the outer sides opposite to each other. The reinforcement portions\31599and 112 are fixed between the two body portions 111, so that the shaking of the first mechanical arm assembly 11 in the moving process can be reduced, and the stability of the carrying device is improved. In addition, in this embodiment, a plurality of openings may be formed in the fixing plate 111 to reduce the weight of the first robot arm assembly 11, thereby further reducing the vibration during the movement and improving the accuracy of the handling apparatus.

In one embodiment, please refer to fig. 7 in conjunction with fig. 1-6, fig. 7 is an enlarged view of the inside of fig. 5 at a point of a dashed line N2, and the carrying device further includes a first driving assembly 14. The first driving assembly 14 includes a first driving motor 141, a first rotating shaft 142 connected to the first driving motor 141, a sliding block 143 sleeved on the first rotating shaft 142, and a guiding groove 144 adapted to the sliding block 143, wherein the length extending direction of the first rotating shaft 142 and the guiding groove 144 is a first direction Z, the sliding block 143 is connected to the first robot assembly 11, and the sliding block 143 is driven by the first driving motor 141 to reciprocate in the guiding groove 144 along the first direction Z. For clarity of illustration, the slide 143 is shown in fig. 7 separated from the first robot arm assembly 11 and at the bottom of the guide groove 144.

In addition, the carrying device in this embodiment further includes a cover 15 located at an end of the first arm assembly 11 away from the second arm assembly 12, a through hole is formed on a side panel of the cover 15, and the first arm assembly 11 passes through the through hole to reciprocate in the first direction Z. The first drive assembly 14 is disposed within the housing 15 to protect it. Meanwhile, the cover 15 can further reduce the shaking of the first mechanical arm assembly 11 during the movement process.

Further, referring to fig. 7, the carrying device of the present application further includes a second driving assembly 16, wherein the second driving assembly 16 includes a second driving motor 161, a second rotating shaft (not shown) connected to the second driving motor 161, a gear (not shown) sleeved on one end of the second rotating shaft, and a rail 162 adapted to the gear, the rail 162 can be disposed on the trough type cleaning apparatus, and the gear is driven by the second driving motor 161 to move along the rail 162. As can be seen from fig. 5 and 7, the main body of the rail 162 extends in the second direction Y so that the entire carrying device can reciprocate in the second direction Y to reach the respective cleaning stations.

Based on the same concept, the present application also provides a trough type cleaning apparatus, which includes the carrying device 10, the hook assembly 20 and the cleaning trough according to the above embodiments. Referring to fig. 1-7, the hook assembly 20 is secured to the second robot assembly 12 for suspending the silicon wafer carrier 200. The cleaning tanks are used to contain cleaning liquids, such as an acid cleaning liquid, an alkali cleaning liquid, pure water, and the like, and different cleaning processes can be performed on the silicon wafer by immersing the silicon wafer carrier 200 loaded with the silicon wafer in different cleaning tanks. The specific configuration of the cleaning tank can be the same as that of the prior art, and is not described herein.

In the above embodiments, when the first robot assembly 11 drives the second robot assembly 12 to reciprocate in the first direction Z, the silicon wafer carrier 200 suspended from the hook assembly 20 moves to approach or depart from the cleaning tank in the first direction Z.

This embodiment has alleviateed the load of second robotic arm assembly 12 in vertical direction for under the same configuration, the ability that second robotic arm assembly 12 resisted the deformation becomes strong, can reduce its probability that takes place the deformation, thereby improves handling device's work precision, prolongs handling device's time of in service, improves production efficiency.

In a specific cleaning process, the hook assembly 20 hangs the silicon wafer carrier 200 for holding silicon wafers, the second driving motor 161 rotates, the whole carrying device 10 moves to one of the cleaning stations along the rail 162, and the second driving motor 161 stops rotating. The first driving motor 141 rotates forward to drive the first rotating shaft 142 to rotate, the slide block 143 drives the first mechanical arm assembly 11 to move down, the second mechanical arm assembly 12 moves down along with the first mechanical arm assembly, and the silicon wafer carrier 200 is lowered into a cleaning tank (not shown); the first drive motor 141 reverses to move the first robot arm assembly 11 upward, followed by the second robot arm assembly 12 moving upward, and then rests in a predetermined position. After a plurality of times, the first driving motor 141 rotates forwards to drive the second mechanical arm component 12 to move downwards and take away the silicon wafer carrier 200; the first driving motor 141 rotates reversely to drive the second robot assembly 12 to move upward, so that the silicon wafer carrier 200 leaves the cleaning tank. Thereafter, the second driving motor 161 is rotated, the entire carrying device 10 moves to another cleaning station along the rail 162, and the above process is repeated.

The above-mentioned embodiment of the present invention is only, and not the scope of the patent of the present invention is limited, all the equivalent structures or equivalent processes made by the contents of the specification and the drawings are utilized, or directly or indirectly applied to other related technical fields, and all the same principles are included in the patent protection scope of the present invention.

Claims (10)

1. A handling device, comprising:

a first robot arm assembly drivable to reciprocate in a first direction;

one end of the second mechanical arm assembly is connected to the first mechanical arm assembly, and the other end of the second mechanical arm assembly is suspended in the air;

at least one lift assembly coupled to the first robot arm assembly and the second robot arm assembly;

and in the triangular structure, an inner angle formed by the first mechanical arm assembly and the lifting assembly is less than 90 degrees.

2. The carrying device as claimed in claim 1, wherein the second robot arm assembly comprises a first side plate, a bottom plate and a second side plate which are fixedly connected in sequence, the first side plate and the second side plate are arranged oppositely, and the first robot arm assembly is connected to one end of the first side plate opposite to the second side plate; the lifting assembly comprises:

the reversing mechanism is arranged at the joint of the first mechanical arm assembly and the second mechanical arm assembly;

one end of the pull rope is connected to the first side plate or the second side plate, the other end of the pull rope is connected to the first mechanical arm assembly after being reversed by the reversing mechanism, and the distance between one end of the pull rope and the bottom plate is smaller than the distance between the reversing mechanism and the bottom plate.

3. The transfer device of claim 2, wherein the reversing mechanism includes a first set of tackle blocks, and wherein one end of the pull rope is connected to one end of the first side plate or the second side plate remote from the first robotic arm assembly.

4. The transfer apparatus of claim 2 wherein the lift assembly further comprises a tension sensor mounted in the first or second robot arm assembly proximate the pull line for detecting the tension in the pull line; the pull rope is connected to the first mechanical arm assembly through an adjustable tensioning screw.

5. The transfer apparatus of claim 2, wherein the transfer apparatus comprises two of the pull-up assemblies, and the reversing mechanisms belonging to the two pull-up assemblies are respectively mounted to the first side plate and the second side plate.

6. The carrier device as recited in claim 5, wherein portions of the draw strings belonging to the two pull assemblies between the first side plate and the second side plate are parallel to each other.

7. The handling device of claim 1, wherein the first robotic arm assembly comprises two fixed plates disposed opposite each other and a plurality of spaced apart stiffeners, \31599; wherein the fixation plate includes a body portion and extension portions, both of the extension portions being connected to the second robot arm assembly, the reinforcement portion 31599 being fixed between the two body portions.

8. The handling device according to any of claims 1 to 7, further comprising:

the first driving assembly comprises a first driving motor, a first rotating shaft connected with the first driving motor, a sliding block sleeved on the first rotating shaft, and a guide groove matched with the sliding block, the length extending direction of the first rotating shaft and the guide groove is a first direction, the sliding block is connected with the first mechanical arm assembly, and the sliding block is driven by the first driving motor to move in the guide groove along the first direction in a reciprocating manner.

9. The handling device according to any one of claims 1 to 7, further comprising:

the second driving assembly comprises a second driving motor, a second rotating shaft connected with the second driving motor, a gear sleeved at one end of the second rotating shaft and a track matched with the gear, the track is arranged on the groove type cleaning equipment, and the gear is driven by the second driving motor to move along the track.

10. A tank cleaning apparatus, comprising:

the handling device of any one of claims 1-9;

the hook assembly is fixed on the second mechanical arm assembly;

a cleaning tank for containing a cleaning solution;

when the first mechanical arm assembly drives the second mechanical arm assembly to reciprocate in the first direction, the silicon wafer carrier suspended on the hook assembly moves along to approach or leave the cleaning tank in the first direction.

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