CN218368541U - Clamping device - Google Patents

Abstract

An embodiment of the utility model provides a clamping device relates to semiconductor technology field. The clamping device comprises a clamping body, a first clamping piece, a second clamping piece and a pushing piece. The first clamping piece is movably connected to the clamping body and provided with a first clamping column, and the first clamping column is used for being clamped into a first clamping hole in one side of the protective film. The second clamping piece is movably connected to the clamping body and provided with a second clamping column, and the second clamping column is used for being clamped into a second clamping hole in the other side of the protective film. The pushing piece is movably connected with the clamping body and is provided with a pushing wall used for sliding and abutting against the first clamping piece and the second clamping piece; the pushing piece is used for pushing the wall to simultaneously act on the first clamping piece and the second clamping piece in the process of moving relative to the clamping pieces, so that the first clamping column and the second clamping column can approach each other to clamp the protective film or move away from each other to release the protective film.

Description

Clamping device

Technical Field

The utility model relates to the field of semiconductor technology, particularly, relate to a clamping device.

Background

The pattern surface of the photomask generally needs to be attached with a protective film, so that the defects caused by the fact that particles, dust and the like fall on the pattern in the environment or the manufacturing process and the back exposure can be prevented. In the prior art, the taking and using of the protective film (pellicle) are all directly operated by hands of operators, namely manual film pasting. In the operation process, the direct contact between the hands of people and the protective film greatly increases the risk of breakage of the protective film caused by people, and the adhered dust of the worn gloves can be printed on the frame or the edge of the protective film, thereby affecting the quality of the protective film. When the protective film is manually transferred, the protective film may fall off due to improper operation.

Therefore, a tool for assisting the film sticking is needed to avoid manually taking the protective film directly.

SUMMERY OF THE UTILITY MODEL

The utility model provides a clamping device, it can realize supplementary pad pasting through the centre gripping protecting film.

The embodiment of the utility model discloses a can realize like this:

an embodiment of the utility model provides a clamping device, it includes:

a clamping body;

the first clamping piece is movably connected to the clamping body and provided with a first clamping column, and the first clamping column is clamped into a first clamping hole in one side of the protective film;

the second clamping piece is movably connected to the clamping body and provided with a second clamping column, and the second clamping column is clamped into a second clamping hole in the other side of the protective film; and

the pushing piece is movably connected with the clamping body and is provided with a pushing wall used for slidably abutting against the first clamping piece and the second clamping piece; the pushing piece is used for simultaneously acting on the first clamping piece and the second clamping piece by the pushing wall during the process of moving relative to the clamping pieces, so that the first clamping column and the second clamping column can approach each other to clamp the protective film or move away from each other to release the protective film.

Optionally, the clamping body comprises a first shell, a second shell and a third shell which are connected in sequence, and a clamping space for accommodating the protective film is defined among the first shell, the second shell and the third shell;

the first shell is provided with a first telescopic hole, and the first clamping column is matched with the first telescopic hole in a sliding mode so as to be clamped into or withdrawn from a first clamping hole of the protective film in the clamping space;

the second shell is provided with a first displacement hole and a second displacement hole, the first clamping piece is used for abutting against the pushing wall through the first displacement hole, and the second clamping piece is used for abutting against the pushing wall through the second displacement hole;

the third shell is provided with a second telescopic hole, and the second clamping column is matched with the second telescopic hole in a sliding mode to be clamped into or withdrawn from a second clamping hole of the protective film in the clamping space.

Optionally, the first clamping piece comprises a first rod piece, a second rod piece and a third rod piece which are connected in sequence; the first rod piece is perpendicular to the second rod piece, the second rod piece is perpendicular to the third rod piece, and the first rod piece and the third rod piece extend oppositely relative to the second rod piece; the first rod piece is accommodated in the first shell, the second rod piece is accommodated in the second shell, and the third rod piece is abutted against the pushing wall through the first displacement hole; the first clamping column is arranged on the first rod piece; and/or the second clamping piece comprises a fourth rod piece, a fifth rod piece and a sixth rod piece which are connected in sequence; the fourth rod piece is perpendicular to the fifth rod piece, the fifth rod piece is perpendicular to the sixth rod piece, and the fourth rod piece and the sixth rod piece extend oppositely relative to the fifth rod piece; the fourth rod piece is contained in the third shell, the fifth rod piece is contained in the second shell, and the sixth rod piece is abutted against the pushing wall through the second displacement hole; the second clamping column is arranged on the fourth rod piece.

Optionally, the clamping body further comprises a support guide rod connected to the second housing and extending away from the clamping space; the pushing piece is movably sleeved on the supporting guide rod to push the first clamping piece and the second clamping piece along the extending direction of the supporting guide rod.

Optionally, the pushing member includes a supporting plate, a first surrounding plate and a second surrounding plate; the first enclosing plate and the second enclosing plate are respectively positioned at two sides of the supporting guide rod, the supporting guide rod is sleeved with the abutting plate, and the edges of two sides of the abutting plate are respectively connected with one side edge of the first enclosing plate and one side edge of the second enclosing plate; the pushing wall is formed by a side wall surface of the abutting plate between the first enclosing plate and the second enclosing plate.

Optionally, a limiting post is arranged on the supporting guide rod, the pushing member is provided with a limiting groove, and the limiting post is limited in the limiting groove.

Optionally, the clamping device further includes a handle, the supporting guide rod is provided with an external thread, the handle is provided with an internal thread, the internal thread is in threaded fit with the external thread, and the handle is configured to push the pushing member to move relative to the clamping body in a process of rotating relative to the supporting guide rod.

Optionally, the pushing wall is an arc wall or two oppositely distributed inclined walls.

Optionally, the clamping device further comprises a first elastic member, and the first elastic member acts on the clamping body and the first clamping member, so that the first clamping column has a movement tendency of releasing the protective film under the action of the first elastic member; and/or the clamping device further comprises a second elastic piece, and the second elastic piece acts on the clamping body and the second clamping piece, so that the second clamping column has a movement tendency of loosening the protective film under the action of the second elastic piece.

Optionally, the first elastic member is a spring, and the first elastic member is sleeved on the first clamping column; and/or the second elastic piece is a spring, and the second clamping column is sleeved with the second elastic piece.

The utility model discloses clamping device's beneficial effect includes, for example:

the clamping device comprises a clamping body, a first clamping piece, a second clamping piece and a pushing piece. The first clamping piece is movably connected to the clamping body and provided with a first clamping column, and the first clamping column is used for being clamped into a first clamping hole in one side of the protective film. The second clamping piece is movably connected to the clamping body and provided with a second clamping column, and the second clamping column is used for being clamped into a second clamping hole in the other side of the protective film. The pushing piece is movably connected with the clamping body and is provided with a pushing wall used for sliding and abutting against the first clamping piece and the second clamping piece; the pushing piece is used for pushing the wall to simultaneously act on the first clamping piece and the second clamping piece in the process of moving relative to the clamping pieces, so that the first clamping column and the second clamping column can be close to each other to clamp the protective film or be far away from each other to release the protective film. Thus, a user can operate the pushing piece, for example, the first clamping piece and the second clamping piece are operated to be away from each other, so that the first clamping column and the second clamping column are away from each other, and the protective film is conveniently placed between the first clamping column and the second clamping column. After the protective film is placed in place, the first clamping piece and the second clamping piece can be operated to be close to each other, so that the first clamping column and the second clamping column are close to each other, the first clamping hole and the second clamping hole of the protective film are clamped into the first clamping hole and the second clamping hole respectively, the clamping of the protective film is completed, and the auxiliary film pasting is facilitated. Because the auxiliary film pasting is carried out by adopting the tool, the manual direct taking of the protective film can be avoided, and the film pasting quality can be greatly improved.

Drawings

In order to more clearly illustrate the technical solution of the embodiments of the present invention, the drawings which are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and it is also possible for those skilled in the art to obtain other related drawings based on the drawings without inventive efforts.

FIG. 1 is a schematic view illustrating a first clamping device clamping a protective film according to this embodiment;

fig. 2 is a schematic view of a first kind of clamping device provided in this embodiment from a first viewing angle;

fig. 3 is a schematic view of the first clamping device in a second view angle according to the present embodiment;

fig. 4 is a schematic view of the first clamping device provided in this embodiment from a third perspective;

FIG. 5 is a schematic view of a second clamping device provided in this embodiment;

fig. 6 is a schematic view of a third clamping device provided in this embodiment.

Icon: 100-a clamping device; 10-a clamping body; 101-a clamping space; 11-a first housing; 111-a first telescoping bore; 12-a second housing; 121-first displacement hole; 122-a second displacement aperture; 13-a third housing; 131-a second telescoping bore; 14-supporting a guide bar; 15-a limiting column; 20-a first clamp; 201-a first clamping column; 21-a first bar; 22-a second bar; 23-a third bar; 30-a second clamp; 301-a second clamping column; 31-a fourth bar; 32-a fifth bar member; 33-a sixth rod; 40-a pusher; 401-a pusher wall; 402-a limiting groove; 41-a first enclosing plate; 42-a second enclosing plywood; 43-a holding plate; 50-a handle; 61-a first elastic member; 62-a second elastic member; 200-a protective film; 210-a first card hole; 220-second card hole.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without making creative efforts belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined or explained in subsequent figures.

In the description of the present invention, it should be noted that, if the terms "upper", "lower", "inner", "outer", etc. indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the products of the present invention are used, the description is only for convenience of description and simplification, but the indication or suggestion that the indicated device or element must have a specific position, be constructed and operated in a specific orientation, and thus, should not be interpreted as a limitation of the present invention.

Furthermore, the appearances of the terms "first," "second," and the like, if any, are only used to distinguish one description from another and are not to be construed as indicating or implying relative importance.

It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.

As described in the background, a protective film is generally required to be attached to the pattern surface of the photomask, so that the defects caused by the falling of particles, dust and the like onto the pattern in the environment or the process can be prevented. In the prior art, the taking and using of the protective film (pellicle) are all directly operated by hands of operators, namely manual film pasting. In the operation process, the direct contact between the hands of people and the protective film greatly increases the risk of breakage of the protective film caused by people, and the adhered dust of the worn gloves can be printed on the frame or the edge of the protective film, thereby affecting the quality of the protective film. When the protective film is transferred manually, there is a risk that the protective film may fall off if the operation is not performed properly. Therefore, a tool for assisting the film sticking is needed to avoid the manual taking of the protective film directly.

In view of the above, referring to fig. 1-4, the clamping device 100 of the present embodiment can effectively solve the above-mentioned technical problems, and can implement auxiliary film attachment by clamping the protective film 200.

Referring to fig. 1, the present embodiment provides a clamping device 100 for clamping a pellicle 200, and the clamping device 100 can be understood as a clamp for clamping the pellicle 200. The clamping device 100 utilizes the structural characteristics of the protective film 200, for example, by utilizing the clamping holes on the side of the protective film 200, the clamping device 100 clamps the protective film 200 to clamp the protective film 200.

Referring to fig. 1 to 4, the clamping device 100 of the present embodiment will be described in detail below.

The clamping device 100 includes a clamping body 10, a first clamping member 20, a second clamping member 30, and a pushing member 40. The first clamping member 20 is movably connected to the clamping body 10, the first clamping member 20 is provided with a first clamping column 201, and the first clamping column 201 is used for being clamped into a first clamping hole 210 on one side of the protective film 200. The second clamping member 30 is movably connected to the clamping body 10, the second clamping member 30 is provided with a second clamping column 301, and the second clamping column 301 is used for being clamped into the second clamping hole 220 on the other side of the protective film 200. The pushing member 40 is movably connected to the clamping body 10, and the pushing member 40 has a pushing wall 401 for slidably abutting against the first clamping member 20 and the second clamping member 30; the pusher 40 is adapted to act, during the movement with respect to the grippers, on the first gripper 20 and on the second gripper 30 simultaneously by the pushing wall 401, so as to enable the first gripper 201 and the second gripper 301 to move towards each other to grip the pellicle 200 or away from each other to release the pellicle 200. Thus, the user can operate the pushing member 40, for example, operate the first clamping member 20 and the second clamping member 30 to move away from each other, so that the first clamping column 201 and the second clamping column 301 move away from each other, thereby facilitating the protective film 200 to be placed between the first clamping column 201 and the second clamping column 301. After the protective film 200 is placed in place, the first clamping piece 20 and the second clamping piece 30 can be operated to be close to each other, so that the first clamping column 201 and the second clamping column 301 are close to each other, the first clamping hole 210 and the second clamping hole 220 of the protective film 200 are clamped respectively, the protective film 200 is clamped, and auxiliary film sticking is facilitated. Because the auxiliary film pasting is carried out by adopting the tool, the manual direct taking of the protective film 200 can be avoided, and the film pasting quality can be greatly improved.

Referring to fig. 1, the number of the first clamping holes 210 distributed on one side of the protective film 200 is two, and the number of the second clamping holes 220 distributed on the other side of the protective film 200 is two, and correspondingly, in the embodiment, the number of the first clamping columns 201 and the number of the second clamping columns 301 are two, so that stable operation can be realized by clamping four positions on the side surface of the protective film 200. Of course, when the protective film 200 is designed to have six clamping holes, the number of the clamping posts can be six correspondingly. Therefore, the number of the clamping columns is not limited in the present embodiment, and specifically, the number of the clamping columns may be two, three, four, or more.

Meanwhile, in order to avoid great damage to the protective film 200, the first clamping column 201 and the first clamping hole 210 are in clearance fit, and the second clamping column 301 and the second clamping hole 220 are in clearance fit. Meanwhile, the first and second clamping columns 201 and 301 need to be rigid enough to improve the clamping effect.

Referring to fig. 1 to 4, in order to optimize the shape of the clamping body 10, in the present embodiment, the clamping body 10 includes a first housing 11, a second housing 12, and a third housing 13 connected in sequence, and a clamping space 101 for accommodating the protective film 200 is defined between the first housing 11, the second housing 12, and the third housing 13. In other words, the shape is similar to a U-shaped structure, which facilitates the taking and placing of the protective film 200.

Specifically, the first housing 11 is provided with a first telescopic hole 111, and the first clamping column 201 is slidably matched with the first telescopic hole 111 to be clamped into or withdrawn from a first clamping hole 210 of the protection film 200 located in the clamping space 101.

The second housing 12 is provided with a first displacement hole 121 and a second displacement hole 122, the first clamping member 20 is configured to abut against the pushing wall 401 through the first displacement hole 121, and the second clamping member 30 is configured to abut against the pushing wall 401 through the second displacement hole 122.

The third housing 13 is provided with a second telescopic hole 131, and the second clamping column 301 is slidably matched with the second telescopic hole 131 to be clamped into or withdrawn from the second clamping hole 220 of the protective film 200 in the clamping space 101.

In the above, when the size of the protective film 200 is large, the first clamping column 201 and the second clamping column 301 can respectively extend out of the first telescopic hole 111 and the second telescopic hole 131 by a short distance so as to clamp the protective film 200, and when the size of the protective film 200 is small, the first clamping column 201 and the second clamping column 301 need to respectively extend out of the first telescopic hole 111 and the second telescopic hole 131 by a long distance. This design can therefore accommodate different sizes of protective films 200.

In order to better adapt to the U-shaped structure, in the present embodiment, the first clamping member 20 includes a first rod 21, a second rod 22 and a third rod 23 connected in sequence; the first bar 21 is perpendicular to the second bar 22, the second bar 22 is perpendicular to the third bar 23, and the first bar 21 and the third bar 23 extend back to back relative to the second bar 22; the first rod 21 is accommodated in the first shell 11, the second rod 22 is accommodated in the second shell 12, and the third rod 23 abuts against the pushing wall 401 through the first displacement hole 121; the first clamping column 201 is disposed on the first rod 21.

Meanwhile, the second clamping member 30 includes a fourth rod 31, a fifth rod 32 and a sixth rod 33 connected in sequence; the fourth bar 31 is perpendicular to the fifth bar 32, the fifth bar 32 is perpendicular to the sixth bar 33, and the fourth bar 31 and the sixth bar 33 extend away from the fifth bar 32; the fourth rod 31 is accommodated in the third shell 13, the fifth rod 32 is accommodated in the second shell 12, and the sixth rod 33 abuts against the pushing wall 401 through the second displacement hole 122; the second clamping column 301 is disposed on the fourth rod 31.

Of course, in other embodiments, the first rod 21, the second rod 22 and the third rod 23 may not be vertical, and may be inclined. Alternatively, the three rods are not all linear rods, for example, the first rod 21 is linear, the second rod 22 is arc-shaped, and the third rod 23 is linear. Likewise, the shape of the second clamping member 30 is not limited. Meanwhile, the first clamping member 20 may be a linear structure itself, and the second clamping member 30 may be a linear structure itself. Generally, the first clamping member 20 and the second clamping member 30 are symmetrically distributed for operational stability.

For convenience of operation, in the present embodiment, the clamping body 10 further includes a supporting guide rod 14, and the supporting guide rod 14 is connected to the second housing 12 and extends along a direction away from the clamping space 101; pushing member 40 movably sleeves support guide bar 14 to push first clamping member 20 and second clamping member 30 in the extending direction of support guide bar 14. Because the pushing member 40 is sleeved on the supporting and guiding rod 14, the supporting and guiding rod 14 can play a certain role in guiding movement, which is beneficial to driving the first clamping member 20 and the second clamping member 30 to move.

In addition, in consideration of the need to enclose and protect the first clamping member 20 and the second clamping member 30, in the embodiment, the pushing member 40 includes a holding plate 43, a first enclosing plate 41 and a second enclosing plate 42; the first enclosing plate 41 and the second enclosing plate 42 are respectively positioned at two sides of the supporting guide rod 14, the supporting guide rod 14 is sleeved with the abutting plate 43, and the edges of two sides of the abutting plate 43 are respectively connected with one side edge of the first enclosing plate 41 and one side edge of the second enclosing plate 42; a side wall surface of the abutting plate 43 between the first enclosing plate 41 and the second enclosing plate 42 forms a pushing wall 401.

It is understood that the pushing member 40 is a housing structure with an open top, and the purpose of the opening is to penetrate the supporting guide bar 14, the third rod 23 of the first clamping member 20, the sixth rod 33 of the second clamping member 30, and the like. The bottom side of the pushing member 40 is sleeved with the support guide bar 14.

In order to facilitate pushing the third rod 23 of the first clamping member 20 and the sixth rod 33 of the second clamping member 30, the pushing wall 401 is an arc-shaped wall in the present embodiment. Specifically, the arcuate wall is a continuous semi-circular wall. It can also be understood that the pushing wall 401 includes two arc surfaces distributed oppositely, and the two arc surfaces respectively support against the first clamping member 20 and the second clamping member 30, and the two arc surfaces are concentric.

Referring to fig. 3, when the pushing member 40 moves along the direction a, the pushing wall 401 of the pushing member 40 abuts against the third rod 23 of the first clamping member 20 and the sixth rod 33 of the second clamping member 30, so that the pushing wall and the sixth rod 23 are driven to move along the direction a, and because the pushing wall 401 is an arc-shaped wall, the third rod 23 moves along the direction a and also moves along the direction B. Similarly, the sixth pin 33 moves in the direction C simultaneously with the movement in the direction a. In other words, the pushing member 40 moves along a, so that the first clamping column 201 disposed on the first rod 21 and the second clamping column 301 disposed on the fourth rod 31 can be close to each other, and when the protective film 200 is placed in the clamping space 101, the first clamping column 201 and the second clamping column 301 can be respectively clamped into the first clamping hole 210 and the second clamping hole 220 of the protective film 200, so as to clamp the protective film 200.

Referring to fig. 2 and 3, in order to avoid the excessive movement amplitude of the pushing member 40, in this embodiment, the supporting guide rod 14 is provided with a limiting post 15, the pushing member 40 is provided with a limiting groove 402, and the limiting post 15 is limited in the limiting groove 402. Specifically, the first enclosing plate 41 and the second enclosing plate 42 are both provided with a limiting groove 402, and meanwhile, both sides of the supporting guide bar 14 are both correspondingly provided with limiting posts 15.

Meanwhile, in order to facilitate pushing the pushing member 40 to move, in this embodiment, the clamping device 100 further includes a handle 50, the supporting guide rod 14 is provided with an external thread, the handle 50 is provided with an internal thread, the internal thread is in threaded fit with the external thread, and the handle 50 is configured to push the pushing member 40 to move relative to the clamping body 10 in a process of rotating relative to the supporting guide rod 14. When an operator operates the clamp, the operator can hold the first housing 11 of the clamping body 10 with the left hand, and rotate the handle 50 with the right hand, and during the rotation of the handle 50, due to the threaded fit, the handle will move along the direction a, so as to push the pushing member 40 to move. The clamping force when clamping the protective film 200 can be adjusted by rotating the handle 50 for different turns.

Of course, in order to facilitate the resetting, in this embodiment, the clamping device 100 further includes the first elastic member 61, and the first elastic member 61 acts on the clamping body 10 and the first clamping member 20, so that the first clamping column 201 has a movement tendency of releasing the protection film 200 under the action of the first elastic member 61. Meanwhile, the clamping device 100 further includes a second elastic member 62, and the second elastic member 62 acts on the clamping body 10 and the second clamping member 30, so that the second clamping column 301 has a movement tendency of releasing the protective film 200 under the action of the second elastic member 62.

In other words, when it is necessary to remove the protective film 200, the handle 50 is rotated so that the handle 50 moves in the direction opposite to the direction a, the pushing member 40 is not pushed by the handle 50, the first clamping member 20 moves in the direction opposite to the direction B by the first elastic member 61, and the second clamping member 30 moves in the direction opposite to the direction C by the second elastic member 62. By the above action, the first holding pillar 201 and the second holding pillar 301 are disengaged from the pellicle 200.

In this embodiment, the first clamping column 201 and the second clamping column 301 are similar to a thimble structure, and in order to facilitate the installation of the first elastic element 61 and the second elastic element 62, specifically, the first elastic element 61 is a spring, and the first elastic element 61 is sleeved on the first clamping column 201. Specifically, the second elastic member 62 is a spring, and the second elastic member 62 is sleeved on the second clamping column 301. Of course, in other embodiments, the elastic member may be an elastic plate member.

Referring to fig. 5, fig. 5 shows a second clamping device 100 provided in the present embodiment, which has the same structure and principle as the first clamping device 100, except that:

the pushing wall 401 is two inclined walls distributed oppositely. Specifically, the pushing wall 401 is two planes, each of which abuts against the first clamping member 20 and the second clamping member 30, respectively. Similarly, when the pushing member 40 moves in the direction a by the handle 50, the first clamping member 20 and the second clamping member 30 can be moved in the directions B and C. Thereby achieving the first clamping stud 201 and the second clamping stud 301 to be close to each other.

Referring to fig. 6, fig. 6 shows a third clamping device 100 provided in the present embodiment, which has the same structure and principle as the first clamping device 100, except that:

in this embodiment, although the pushing wall 401 is an arc-shaped wall, it includes two arc-shaped surfaces that are distributed oppositely and respectively abut against the first clamping member 20 and the second clamping member 30, and particularly, the two arc-shaped surfaces are not concentric, and the centers of the two arc-shaped surfaces are respectively located at two sides of the supporting and guiding rod 14. Two arc-shaped faces can be understood as two circumscribed circular sections.

In this way, generally, the first elastic member 61 sleeved on the first clamping column 201 is a tension spring, and the second elastic member 62 sleeved on the second clamping column 301 is a tension spring. In other words, when the pushing member 40 moves in the direction a under the action of the handle 50, the first clamping member 20 and the second clamping member 30 can be moved in the directions D and E, respectively. Thereby effecting the first 201 and second 301 gripping legs to move away from each other. When the handle 50 is turned and the pushing member 40 moves in the direction opposite to the direction a, the first clamping column 201 and the second clamping column 301 approach each other under the pulling action of the first elastic member 61 and the second elastic member 62, and the reset is realized.

The clamping device 100 provided by the embodiment has at least the following advantages:

when the protective film overturning device is used, the protective film 200 is taken out of the protective film box through the clamping device 100, the protective film 200 can be effectively clamped through the matching of the clamping columns and the clamping holes, and the protective film 200 can be easily overturned. By eliminating the need to manually transfer the protective film 200 directly, puncturing of the protective film 200 due to improper handling can be avoided. Meanwhile, the probability of polluting the protective film 200 can be effectively reduced, and the risk of falling of the protective film 200 can also be reduced.

To sum up, the embodiment of the present invention provides a clamping device 100, and the clamping device 100 includes a clamping body 10, a first clamping member 20, a second clamping member 30, and a pushing member 40. The first clamping member 20 is movably connected to the clamping body 10, the first clamping member 20 is provided with a first clamping column 201, and the first clamping column 201 is used for being clamped into a first clamping hole 210 on one side of the protective film 200. The second clamping member 30 is movably connected to the clamping body 10, the second clamping member 30 is provided with a second clamping column 301, and the second clamping column 301 is used for being clamped into the second clamping hole 220 on the other side of the protective film 200. The pushing member 40 is movably connected to the clamping body 10, and the pushing member 40 has a pushing wall 401 for slidably abutting against the first clamping member 20 and the second clamping member 30; the pusher 40 is intended to act, during the movement with respect to the clamps, on both the first clamp 20 and the second clamp 30 by the pusher wall 401, so as to enable the first clamping column 201 and the second clamping column 301 to approach each other to clamp the pellicle 200 or to move away from each other to release the pellicle 200. In this way, a user can operate the pushing member 40, for example, operate the first clamping member 20 and the second clamping member 30 to move away from each other, so that the first clamping column 201 and the second clamping column 301 move away from each other, thereby facilitating the protective film 200 to be placed between the first clamping column 201 and the second clamping column 301. After the protective film 200 is placed in place, the first clamping member 20 and the second clamping member 30 can be operated to be close to each other, so that the first clamping column 201 and the second clamping column 301 are close to each other, and are clamped into the first clamping hole 210 and the second clamping hole 220 of the protective film 200 respectively, so that the protective film 200 is clamped, and auxiliary film pasting is facilitated. Because the auxiliary film pasting is carried out by adopting the tool, the manual direct taking of the protective film 200 can be avoided, and the film pasting quality can be greatly improved.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A clamping device (100) comprising:

a clamping body (10);

the first clamping piece (20), the first clamping piece (20) is movably connected to the clamping body (10), the first clamping piece (20) is provided with a first clamping column (201), and the first clamping column (201) is used for being clamped into a first clamping hole (210) on one side of the protective film (200);

the second clamping piece (30), the second clamping piece (30) is movably connected to the clamping body (10), the second clamping piece (30) is provided with a second clamping column (301), and the second clamping column (301) is used for being clamped into a second clamping hole (220) on the other side of the protective film (200); and

a pusher (40), the pusher (40) being movably connected to the clamping body (10), the pusher (40) having a pushing wall (401) for sliding against the first and second clamps (20, 30); the pushing member (40) is used for simultaneously acting on the first clamping member (20) and the second clamping member (30) by the pushing wall (401) in the process of moving relative to the clamping members, so that the first clamping column (201) and the second clamping column (301) can approach each other to clamp the protective film (200) or move away from each other to release the protective film (200).

2. The clamping device (100) according to claim 1, wherein the clamping body (10) comprises a first shell (11), a second shell (12) and a third shell (13) which are connected in sequence, and a clamping space (101) for accommodating the protective film (200) is defined between the first shell (11), the second shell (12) and the third shell (13);

the first shell (11) is provided with a first telescopic hole (111), and the first clamping column (201) is matched with the first telescopic hole (111) in a sliding manner so as to be clamped into or withdrawn from a first clamping hole (210) of the protective film (200) in the clamping space (101);

the second shell (12) is provided with a first displacement hole (121) and a second displacement hole (122), the first clamping piece (20) is used for abutting against the pushing wall (401) through the first displacement hole (121), and the second clamping piece (30) is used for abutting against the pushing wall (401) through the second displacement hole (122);

the third shell (13) is provided with a second telescopic hole (131), and the second clamping column (301) is matched with the second telescopic hole (131) in a sliding mode to be clamped into or withdrawn from a second clamping hole (220) of the protective film (200) in the clamping space (101).

3. The clamping device (100) according to claim 2, wherein the first clamping member (20) comprises a first bar (21), a second bar (22) and a third bar (23) connected in sequence; the first bar (21) and the second bar (22) are perpendicular, the second bar (22) and the third bar (23) are perpendicular, and the first bar (21) and the third bar (23) extend back to back relative to the second bar (22); the first rod piece (21) is accommodated in the first shell (11), the second rod piece (22) is accommodated in the second shell (12), and the third rod piece (23) is abutted against the pushing wall (401) through the first displacement hole (121); the first clamping column (201) is arranged on the first rod piece (21); and/or the presence of a gas in the gas,

the second clamping piece (30) comprises a fourth rod piece (31), a fifth rod piece (32) and a sixth rod piece (33) which are connected in sequence; said fourth rod (31) and said fifth rod (32) being perpendicular, said fifth rod (32) and said sixth rod (33) being perpendicular, said fourth rod (31) and said sixth rod (33) extending away from said fifth rod (32); the fourth rod piece (31) is accommodated in the third shell (13), the fifth rod piece (32) is accommodated in the second shell (12), and the sixth rod piece (33) is abutted against the pushing wall (401) through the second displacement hole (122); the second clamping column (301) is provided to the fourth rod member (31).

4. The clamping device (100) according to claim 2, wherein the clamping body (10) further comprises a support guide bar (14), the support guide bar (14) being connected to the second housing (12) and extending away from the clamping space (101); the pushing member (40) is movably sleeved on the supporting guide rod (14) to push the first clamping member (20) and the second clamping member (30) along the extending direction of the supporting guide rod (14).

5. The clamping device (100) of claim 4, wherein the pusher (40) comprises an abutment plate (43), a first enclosing plate (41) and a second enclosing plate (42); the first enclosing plate (41) and the second enclosing plate (42) are respectively positioned at two sides of the supporting guide rod (14), the supporting guide rod (14) is sleeved with the abutting plate (43), and the edges of two sides of the abutting plate (43) are respectively connected with the edge of one side of the first enclosing plate (41) and the edge of one side of the second enclosing plate (42); the pushing wall (401) is formed by a side wall surface of the abutting plate (43) between the first enclosing plate (41) and the second enclosing plate (42).

6. The clamping device (100) according to claim 4, wherein the supporting guide rod (14) is provided with a limiting post (15), the pushing member (40) is provided with a limiting groove (402), and the limiting post (15) is limited in the limiting groove (402).

7. Clamping device (100) according to claim 4, characterised in that the clamping device (100) further comprises a handle (50), the support guide bar (14) being provided with an external thread, the handle (50) being provided with an internal thread, the internal thread being in threaded engagement with the external thread, the handle (50) being adapted to urge the pusher (40) to move relative to the clamping body (10) during rotation relative to the support guide bar (14).

8. The clamping device (100) according to any one of claims 1 to 7, wherein the pushing wall (401) is an arc-shaped wall or two oppositely distributed inclined walls.

9. The clamping device (100) according to any one of claims 1 to 7, wherein the clamping device (100) further comprises a first elastic member (61), and the first elastic member (61) acts on the clamping body (10) and the first clamping member (20) such that the first clamping column (201) has a tendency to move to release the protective membrane (200) under the action of the first elastic member (61); and/or the presence of a gas in the atmosphere,

the clamping device (100) further comprises a second elastic piece (62), and the second elastic piece (62) acts on the clamping body (10) and the second clamping piece (30), so that the second clamping column (301) has a movement tendency of loosening the protective film (200) under the action of the second elastic piece (62).

10. The clamping device (100) according to claim 9, wherein the first resilient member (61) is a spring, the first resilient member (61) being fitted over the first clamping stud (201); and/or the presence of a gas in the gas,

the second elastic piece (62) is a spring, and the second elastic piece (62) is sleeved on the second clamping column (301).

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