CN211480004U - High-stability clamping device - Google Patents
High-stability clamping device Download PDFInfo
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- CN211480004U CN211480004U CN202020221224.6U CN202020221224U CN211480004U CN 211480004 U CN211480004 U CN 211480004U CN 202020221224 U CN202020221224 U CN 202020221224U CN 211480004 U CN211480004 U CN 211480004U
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- clamp
- guide shaft
- supporting rod
- clamping piece
- support
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Abstract
The utility model provides a high stability's clamping device, including first anchor clamps, second anchor clamps, be used for driving the rotation drive mechanism and the cylinder drive that the first anchor clamps of actuating cylinder drive arrangement and cylinder drive arrangement second anchor clamps press from both sides tightly each other or relax, cylinder drive arrangement rotates drive mechanism and includes first bracing piece and second bracing piece, the beneficial effects of the utility model are that: the distance between the guide wheels is adjusted through the sliding plate, so that the first clamping piece and the second clamping piece which are symmetrically arranged rotate the first supporting rod and the second supporting rod, and the first clamp and the second clamp are opened or closed, and the device is simple in structure and convenient to operate; the limit block is arranged to adjust the stroke of the sliding plate, so that the first clamp and the second clamp have proper opening and closing angles and are suitable for wafer boxes with different sizes; the first plastic shell and the second plastic shell are arranged, so that the first supporting rod and the second supporting rod are prevented from being corroded by splashed cleaning liquid in the working process.
Description
Technical Field
The utility model relates to a wafer box clamping device field, in particular to clamping device of high stability.
Background
The round crystal is the most main raw material for preparing the chip, and in the manufacturing process of the chip, the round crystal needs to be subjected to processing procedures such as cutting, polishing, coating and the like, and in the processing process, the round crystal needs to be cleaned for many times. However, in the prior art, the wafer boxes of different specifications need to be used for holding wafers of different specifications, so that the use of the mechanical arms of various specifications leads to high equipment cost. Meanwhile, in the prior art, the clamping device of the wafer box is complex in structure, and the equipment cost is further improved.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model discloses a clamping device of high stability for solve among the prior art wafer box clamping device compatibility poor, the structure is complicated with high costs technical problem, the technical scheme of the utility model is implemented like this:
the utility model provides a high stability's clamping device, includes first anchor clamps, second anchor clamps, is used for the drive first anchor clamps with the rotation drive mechanism and the cylinder drive arrangement that the second anchor clamps are tight or are relaxed each other, its characterized in that: the rotary transmission mechanism comprises a first supporting rod and a second supporting rod, the first supporting rod and the second supporting rod are arranged in parallel, the first supporting rod comprises a first guide shaft, the second supporting rod comprises a second guide shaft, the first guide shaft and the second guide shaft are respectively connected with the support through bearings, and the extending direction of the first supporting rod and the second supporting rod is a first direction; the sliding plate is arranged on the support, the air cylinder driving device is used for driving the sliding plate to move along the first direction, the sliding plate comprises a trapezoid part in an isosceles trapezoid shape, and the trapezoid part comprises a first side inclined plane and a second side inclined plane; the bracket is provided with a first clamping piece for driving the first guide shaft to rotate, one end, far away from the first guide shaft, of the first clamping piece is provided with a first guide wheel, and the first guide wheel is used for contacting with a first side inclined plane; the bracket is provided with a second clamping piece for driving the second guide shaft to rotate, one end, far away from the second guide shaft, of the second clamping piece is provided with a second guide wheel, and the first guide wheel is used for contacting with a second side inclined plane; the first clamping piece and the second clamping piece are connected through a hard spring, one end of the hard spring is fixed with one end, far away from the first guide shaft, of the first clamping piece, and the other end of the hard spring is fixed with one end, far away from the second guide shaft, of the second clamping piece; the hard spring is used for driving the first guide wheel and the second guide wheel to respectively press the first side inclined plane and the second side inclined plane.
Preferably, the support is provided with a limiting block for limiting the sliding plate.
Preferably, one end of the first clamping piece, which is far away from the first guide wheel, is provided with a first light shielding sheet, the bracket is correspondingly provided with a first photoelectric sensor matched with the first light shielding sheet, and the first photoelectric sensor is fixed with the bracket through a bolt; one end, far away from the second leading wheel, of the second clamping piece is provided with a second light shading sheet, a second photoelectric sensor matched with the second light shading sheet is correspondingly arranged on the support, and the second photoelectric sensor is fixed with the support through a bolt.
Preferably, the number of the first photoelectric sensor and the first light-shielding sheet is greater than two, and the number of the second photoelectric sensor and the second light-shielding sheet is greater than two.
Preferably, the first clamp and the second clamp are both U-shaped; the first support rod comprises a first metal sleeve shaft coaxially fixed with the first guide shaft, the first metal sleeve shaft is sleeved with a first plastic shell, and the first clamp is clamped and fixed with the first plastic shell; the second bracing piece include with the coaxial fixed second metal sleeve axle of second guiding axle, second plastic casing has been cup jointed to the second metal sleeve axle, the second anchor clamps with second plastic casing joint is fixed.
Preferably, the first clamp and the second clamp are both provided with a cross bar for supporting the wafer cassette, and an included angle between the cross bar and the first direction is alpha; and alpha <5 deg..
Preferably, the first clamp is provided with a vertical rod for placing the wafer cassette to shake.
Preferably, the number of the first clamp and the second clamp is greater than or equal to two.
Preferably, the support is provided with a plurality of jump springs which are used for limiting the first guide shaft and the second guide shaft respectively.
Implement the utility model has the advantages that:
1. the distance between the guide wheels is adjusted through the sliding plate, so that the first clamping piece and the second clamping piece which are symmetrically arranged rotate the first supporting rod and the second supporting rod, and the first clamp and the second clamp are opened or closed, and the device is simple in structure and convenient to operate;
2. the limit block is arranged to adjust the stroke of the sliding plate, so that the first clamp and the second clamp have proper opening and closing angles and are suitable for wafer boxes with different sizes;
3. the first plastic shell and the second plastic shell are arranged, so that the first supporting rod and the second supporting rod are prevented from being corroded by splashed cleaning liquid in the working process.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only one embodiment of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural view of a gripper device according to an embodiment of the present invention;
fig. 2 is a top view of a gripper apparatus according to an embodiment of the present invention;
fig. 3 is a cross-sectional view of a first support bar according to an embodiment of the present invention;
FIG. 4 is a cross-sectional view of a second support bar according to an embodiment of the present invention;
FIG. 5 is a top view of a bracket according to an embodiment of the present invention;
FIG. 6 is a schematic view of a bracket according to an embodiment of the present invention;
fig. 7 is a schematic diagram of a sliding plate structure according to an embodiment of the present invention.
In the above drawings, the reference numerals denote:
1-a first clamp; 11-a cross-bar; 12-a vertical rod; 13-a clip; 2-a second clamp; 3-a first support bar; 31-a first guide shaft; 32-a first clamp; 33-a first guide wheel; 34-a first shade; 35-a first photosensor; 36-a first metal sleeve shaft; 37-a first plastic housing; 4-a second support bar; 41-a second guide shaft; 42-a second clamp; 43-a second guide wheel; 44-a second shade; 45-a second photosensor; 46-a second metal sleeve shaft; 47-a second plastic housing; 5-a bracket; 51-a limiting block; 52-a clamp spring; 6-a sliding plate; 61-cylinder drive means; 62-a first side bevel; 63-a second side bevel; 64-a trapezoidal portion; 7-hard spring.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.
The utility model provides a clamping device of high stability, the utility model provides an embodiment.
As shown in fig. 1 and 2, the rotation transmission structure includes a first support rod 3 and a second support rod 4, the first clamp 1 and the second clamp 2 for clamping the wafer box are respectively fixed with the first support rod 3 and the second support rod 4 through a clamping piece 13, one ends of the first support rod 3 and the second support rod 4 are fixed with a support 5 through a bearing, and a clamp spring 52 for preventing the first support rod 3 and the second support rod 4 from moving along the axial direction thereof is arranged on the support 5. First bracing piece 3 and second bracing piece 4 are outwards rotatory simultaneously, then first anchor clamps 1 and second anchor clamps 2 can outwards be opened, and when first bracing piece 3 and second bracing piece 4 are inwards rotatory simultaneously, then first anchor clamps 1 and second anchor clamps 2 can inwards be drawn in, and the action can centre gripping wafer box or put down the wafer box more than repeating.
As shown in fig. 2, 3 and 4, the second support rod 4 includes a second guide shaft 41 fixed to the bracket 5 through a bearing, one end of the second guide shaft 41 extends out of the bracket 5 and is coaxially fixed to a second metal sleeve shaft 46, and a second plastic housing 47 is sleeved outside the second metal sleeve shaft 46. The second clamping piece 42 arranged in the bracket 5 is fixed with the second guide shaft 41, the second clamping piece 42 drives the second guide shaft 41 to rotate, and the second guide shaft 41 drives the second clamp 2 to rotate through the second metal sleeve shaft 46 and the second plastic shell 47. The first guide shaft 31, the first metal sleeve shaft 36 and the first plastic housing 37 in the first support bar 3 adopt the same structure as the second guide shaft 41, the second metal sleeve shaft 46 and the second plastic housing 47. The first metal sleeve shaft 36 and the second metal sleeve shaft 46 play a supporting role, the first plastic shell 37 and the second plastic shell 47 are made of Teflon materials, corrosion resistance is high, and cleaning liquid splashed in the operation process is prevented from corroding the first supporting rod 3 and the second supporting rod 4.
As shown in fig. 5 and 6, a sliding plate 6 is disposed in the bracket 5, and a first plane where the sliding plate 6 is located is parallel to a first direction where the first support rod 3 is located. First holder 32 and second holder 42 are arranged in bilateral symmetry of slide plate 6, first leading wheel 33 that is used for contacting first side inclined plane 62 of trapezoidal portion 64 is provided with at first holder 32 top, and the bottom of first holder 32 is provided with the round hole that is used for fixed first guiding axle 31, and the bottom of round hole sets up the opening, tightens up the opening through the bolt, makes the round hole press from both sides tight first guiding axle 31. After the first guide shaft 31 is fixed and fixed with the first clamping member 32, since the front end and the rear end of the first guide shaft 31 are connected with the bracket 5 through the bearing, the first clamping member 32 can drive the first guide shaft 31 to rotate around the axis of the first guide shaft 31. The second clamp 42 and the second guide wheel 43 take the same structure as the first clamp 32 and the first guide wheel 33, and the second guide wheel 43 is used to contact the second side slope 63 of the slide plate 6.
The first clamping piece 32 and the second clamping piece 42 are respectively provided with four hard springs 7 at positions far away from the circular holes, when the first clamping piece 32 and the second clamping piece are connected by using the hard springs 7, the pulling force direction of the hard springs 7 is perpendicular to the first direction, and the pulling force of the hard springs 7 enables the first guide shaft 31 and the second guide shaft 41 to respectively press the first side inclined surface 62 and the second side inclined surface 63. The cylinder driving device 61 is used for moving the trapezoidal sliding block along the first direction, the distance between the first guide wheel 33 and the second guide wheel 43 which are tightly attached to the two sides of the trapezoidal sliding block is increased or decreased, when the first guide wheel 33 and the second guide wheel 43 approach each other, the first clamping piece 32 and the second clamping piece 42 enable the first guide shaft 31 and the second guide shaft 41 to rotate, and the first clamp 1 and the second clamp 2 are opened outwards; when the first guide wheel 33 and the second guide wheel 43 are separated from each other, the first clamp 32 and the second clamp 42 rotate the first guide shaft 31 and the second guide shaft 41, and the first jig 1 and the second jig 2 are retracted. As shown in fig. 7, the first side inclined surface 62 is trapezoidal, and the short side of the first side inclined surface 62 and the long side of the trapezoidal portion 64 are in the same plane, so that the first guide wheel 33 always contacts the first side inclined surface 62 during the operation of the device. The second side inclined surface 63 has the same structure as the first side inclined surface 62.
As shown in fig. 4 and 5, a limiting block 51 is fixed to the bracket 5 by a bolt, and the limiting block 51 is used for limiting the stroke of the sliding plate 6, so as to limit the opening angle of the first clamp 1 and the second clamp 2. Two first light-shielding sheets 34 are fixed to the first limiting block 51 close to the round hole through bolts, two first photoelectric sensors 35 matched with the first light-shielding sheets 34 are fixed to the support 5 through bolts, when the first clamp 1 is opened outwards to the maximum angle, the first photoelectric sensors 35 on the outer side are shielded, and when the first clamp 1 is completely inserted, the first photoelectric sensors 35 on the inner side are shielded. The second light-shielding sheet 44 and the second photosensor 45 adopt a structure similar to the first light-shielding sheet 34 and the first photosensor 35. The first and second photosensors 35 and 45 are used to indicate the positions of the first and second light- shielding sheets 34 and 44, so that the operating states of the first and second jigs 1 and 2 can be indicated.
As shown in fig. 1, 3 and 4, an included angle between the cross bar 11 of the first clamp 1 and the cross bar 11 of the second clamp 2 and the first direction is 1.7 °, and when the first clamp 1 and the second clamp 2 clamp the wafer cassette, the wafer cassette slowly moves to a lower position of the cross bar 11, so that the automatic alignment of the plurality of wafer cassettes is realized. Be provided with the montant 12 that is used for placing the brilliant box of circle and rocks on first anchor clamps 1, spring part and joint piece 13 sliding connection are passed through at the top of montant 12, and the horizontal pole 11 is alignd to the bottom of montant 12, and when first anchor clamps 1 and second anchor clamps 2 held up the brilliant box of circle, montant 12 can provide certain clamping-force for the edge of the brilliant box of circle, reduces rocking of the brilliant box removal in-process.
In the working process of the clamping hand device, firstly, the sliding plate 6 is moved through the air cylinder driving device 61, the first guide wheel 33 and the second guide wheel 43 are close to each other, and the first clamp 1 and the second clamp 2 are opened outwards through the rotation of the first supporting rod 3 and the second supporting rod 4; secondly, the clamping hand device is moved to a grabbing position by using a mechanical arm, the sliding plate 6 is moved by the air cylinder driving device 61, the first guide wheel 33 and the second guide wheel 43 are far away from each other, the first clamp 1 and the second clamp 2 are retracted by the rotation of the first supporting rod 3 and the second supporting rod 4, the cross rod 11 of the first clamp holds the side edge of the wafer box, and the bottom of the vertical rod 12 compresses the side edge of the wafer box; and then, the clamping hands are moved to the placing position by using the mechanical arm, and the wafer box can be put down by reversely carrying out the operations.
The distance between the guide wheels is adjusted through the sliding plate 6, so that the first clamping piece 32 and the second clamping piece 42 which are symmetrically arranged rotate the first supporting rod 3 and the second supporting rod 4, and the first clamp 1 and the second clamp 2 are opened or closed, and the device is simple in structure and convenient to operate;
the limit block 51 is arranged to adjust the stroke of the sliding plate 6, so that the first clamp 1 and the second clamp 2 have proper opening and closing angles and are suitable for the round crystal boxes with the sizes;
the first plastic shell 37 and the second plastic shell 47 are arranged to prevent the first support rod 3 and the second support rod 4 from being corroded by splashed cleaning liquid during working.
It should be understood that the above description is only exemplary of the present invention, and is not intended to limit the present invention, and that any modifications, equivalents, improvements, etc. made within the spirit and principle of the present invention should be included within the scope of the present invention.
Claims (9)
1. A high-stability clamping device comprises a first clamp (1), a second clamp (2), a rotary transmission mechanism and a cylinder driving device (61), wherein the rotary transmission mechanism is used for driving the first clamp (1) and the second clamp (2) to clamp or loosen each other, and the high-stability clamping device is characterized in that:
the rotary transmission mechanism comprises a first supporting rod (3) and a second supporting rod (4), the first supporting rod (3) and the second supporting rod (4) are arranged in parallel, the first supporting rod (3) comprises a first guide shaft (31), the second supporting rod (4) comprises a second guide shaft (41), the first guide shaft (31) and the second guide shaft (41) are respectively connected with a support (5) through bearings, and the extending direction of the first supporting rod (3) and the second supporting rod (4) is a first direction; a sliding plate (6) is arranged on the support (5), the air cylinder driving device (61) is used for driving the sliding plate (6) to move along the first direction, the sliding plate (6) comprises a trapezoid part (64) in an isosceles trapezoid shape, and the trapezoid part (64) comprises a first side inclined surface (62) and a second side inclined surface (63);
the bracket (5) is provided with a first clamping piece (32) for driving the first guide shaft (31) to rotate, one end, far away from the first guide shaft (31), of the first clamping piece (32) is provided with a first guide wheel (33), and the first guide wheel (33) is used for contacting with a first side inclined surface (62);
the bracket (5) is provided with a second clamping piece (42) for driving the second guide shaft (41) to rotate, one end, away from the second guide shaft (41), of the second clamping piece (42) is provided with a second guide wheel (43), and the first guide wheel (33) is used for contacting with a second side inclined surface (63);
the first clamping piece (32) and the second clamping piece (42) are connected through a hard spring (7), one end of the hard spring (7) is fixed with one end, away from the first guide shaft (31), of the first clamping piece (32), and the other end of the hard spring (7) is fixed with one end, away from the second guide shaft (41), of the second clamping piece (42);
the hard spring (7) is used for driving the first guide wheel (33) and the second guide wheel (43) to press the first side inclined surface (62) and the second side inclined surface (63) respectively.
2. A high stability gripping device according to claim 1, wherein: the support (5) is provided with a limiting block (51) used for limiting the sliding plate (6).
3. A high stability gripping device according to claim 1, wherein: a first shading sheet (34) is arranged at one end, away from the first guide wheel (33), of the first clamping piece (32), a first photoelectric sensor (35) matched with the first shading sheet (34) is correspondingly arranged on the support (5), and the first photoelectric sensor (35) is fixed with the support (5) through a bolt;
one end, far away from the second guide wheel (43), of the second clamping piece (42) is provided with a second light shading sheet (44), a second photoelectric sensor (45) matched with the second light shading sheet (44) is correspondingly arranged on the support (5), and the second photoelectric sensor (45) is fixed to the support (5) through a bolt.
4. A high stability clamping device as claimed in claim 3, wherein: the number of the first photoelectric sensors (35) and the number of the first light-shielding sheets (34) are both larger than two, and the number of the second photoelectric sensors (45) and the number of the second light-shielding sheets (44) are both larger than two.
5. A high stability gripping device according to claim 1, wherein:
the first clamp (1) and the second clamp (2) are both U-shaped;
the first support rod (3) comprises a first metal sleeve shaft (36) coaxially fixed with the first guide shaft (31), a first plastic shell (37) is sleeved on the first metal sleeve shaft (36), and the first clamp (1) is clamped and fixed with the first plastic shell (37);
the second bracing piece (4) include with second guiding axle (41) coaxial fixed second metal sleeve axle (46), second plastic casing (47) have been cup jointed in second metal sleeve axle (46), second anchor clamps (2) with second plastic casing (47) joint is fixed.
6. A high stability holding device according to claim 5, wherein said first and second holding device (1, 2) are each provided with a cross bar (11) for supporting the wafer cassette, said cross bar (11) having an angle α with the first direction; and alpha <5 deg..
7. A clamping device with high stability according to claim 6, characterized in that the first clamp (1) is provided with a vertical rod (12) for placing the wafer cassette to shake.
8. A high stability holding device according to claim 7, wherein the number of said first and second holding devices (1, 2) is two or more.
9. A clamping device with high stability as claimed in claim 1, wherein the bracket (5) is provided with a plurality of snap springs for limiting the first guide shaft (31) and the second guide shaft (41) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020221224.6U CN211480004U (en) | 2020-02-27 | 2020-02-27 | High-stability clamping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020221224.6U CN211480004U (en) | 2020-02-27 | 2020-02-27 | High-stability clamping device |
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| Publication Number | Publication Date |
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| CN211480004U true CN211480004U (en) | 2020-09-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202020221224.6U Active CN211480004U (en) | 2020-02-27 | 2020-02-27 | High-stability clamping device |
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| CN (1) | CN211480004U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112109095A (en) * | 2020-09-21 | 2020-12-22 | 芯导精密(北京)设备有限公司 | Novel mechanical arm |
-
2020
- 2020-02-27 CN CN202020221224.6U patent/CN211480004U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112109095A (en) * | 2020-09-21 | 2020-12-22 | 芯导精密(北京)设备有限公司 | Novel mechanical arm |
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