CN218336488U - Novel graphite heater - Google Patents
Novel graphite heater Download PDFInfo
- Publication number
- CN218336488U CN218336488U CN202221662886.2U CN202221662886U CN218336488U CN 218336488 U CN218336488 U CN 218336488U CN 202221662886 U CN202221662886 U CN 202221662886U CN 218336488 U CN218336488 U CN 218336488U
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- Prior art keywords
- heating coil
- graphite heater
- heating
- novel graphite
- coil
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 26
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 26
- 239000010439 graphite Substances 0.000 title claims abstract description 26
- 238000010438 heat treatment Methods 0.000 claims abstract description 49
- 230000000694 effects Effects 0.000 abstract description 3
- 238000002474 experimental method Methods 0.000 abstract description 3
- 238000001816 cooling Methods 0.000 abstract description 2
- 230000006698 induction Effects 0.000 abstract description 2
- 230000033228 biological regulation Effects 0.000 abstract 1
- 238000002360 preparation method Methods 0.000 abstract 1
- 239000013078 crystal Substances 0.000 description 7
- 230000000670 limiting effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- General Induction Heating (AREA)
Abstract
The utility model discloses a novel graphite heater, it is including a plurality of mutually independent heating coil, a plurality of heating coil is with the axle center, and single heating coil place plane sets up with the axle center is perpendicular, and is a plurality of the thermal field that heating coil formed is used for the heating of crucible and places, is equipped with the mounting that is used for the support between the adjacent heating coil. The utility model discloses a parallel and mutually independent single-turn heating coil of each other is as the benchmark unit, and not only the thermal field is more even like this, can carry out local range's accurate regulation and control according to the required thermal field gradient of experiment moreover, reaches required effect, owing to be graphite coil, this induction heater need not the water-cooling moreover, the degree of difficulty greatly reduced of preparation technology.
Description
Technical Field
The utility model belongs to the crystal growth field relates to the heater, especially relates to a novel graphite heater, guarantees the coaxial balance of thermal field, improves energy utilization.
Background
The most popular method for growing silicon carbide crystals is by physical vapor phase methods, which require axial temperature gradients of high bottom temperature and low top temperature. So that the atmosphere is under the power of the gradient until the seed crystal surface deposits and crystallizes. The radial temperature gradient required for crystal growth is low in the center and high at the edges.
At present, two heaters are mainly used for high-temperature crystal growth at the temperature of more than 2000 ℃, one is a resistance heater, and the other is an inductance heater. In general, conventional induction heaters employ a spiral copper coil design. When the design is adopted, cooling water needs to be introduced into the coil when the heater is used, and due to the spiral type, the thermal fields formed by the heater are all deviated from the center, and the total thermal fields superposed with each other are inclined. Strictly speaking, such asymmetric heaters are not conducive to growing crystals, particularly in symmetric thermal fields. And for the axial temperature gradient required by a specific thermal field, the traditional inductive heating only depends on the integral effect of the coil, and cannot be accurately regulated and controlled within a certain specific range.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem, the utility model provides a novel graphite heater, this heater adopt electrically conductive good graphite as heating coil's material, adopt the single turn heating coil that is parallel to each other and mutual independence as the benchmark unit, have guaranteed that the total thermal field after the stack is coaxial balanced.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a novel graphite heater, includes a plurality of mutually independent heating coil, and is a plurality of heating coil is with the axle center, and single heating coil place plane sets up with the axle center is perpendicular, and is a plurality of the thermal field that heating coil formed is used for the heating and placing of crucible, is equipped with the mounting that is used for the support between the adjacent heating coil.
As a preferable embodiment of the present invention, the plurality of heating coils are parallel to each other.
As a preferred scheme of the utility model, the interval between the adjacent heating coils is 10-35mm.
As a preferred scheme of the utility model, the interval between adjacent heating coils is 15-30mm.
As a preferred scheme of the utility model, the number of turns of the heating coil is 8-15 turns.
As a preferable aspect of the present invention, the end of the heating coil is provided with a support leg connected to the power supply.
As an optimized scheme of the utility model, the heating coil inserts mutually independent co-frequency current.
As an optimized proposal of the utility model, the fixing piece is a graphite hard felt. The graphite hard felt can be independently arranged or integrally arranged.
Compared with the prior art, the utility model discloses following beneficial effect has:
the utility model discloses a parallel and mutually independent single circle heating coil is as the reference cell, and each circle heating coil all is coaxial center and parallel mutually, has guaranteed like this that the total heat field after the stack is coaxial balanced, and each circle heating coil all is independent control and inserts mutually independent same frequency current moreover, can reach corresponding heat field condition through the electric current of independent control each circle heating coil according to the required heat field gradient of specific experiment like this. And because the graphite coil is adopted, the heating coil does not need water cooling, the difficulty of the manufacturing process is reduced, and the heat produced on the coil can be used as a heat source to be supplied to the whole thermal field, so that the energy utilization rate is improved.
Drawings
Fig. 1 is a schematic diagram of the present invention.
Fig. 2 is a side view of fig. 1.
In the figure, 1. Heating coil; 2. a graphite hard felt; 3. and (5) a support leg.
Detailed Description
For a further understanding of the present invention, reference will be made to the following detailed description taken in conjunction with the accompanying drawings and examples.
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and are not limiting of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings. The utility model discloses in words such as first, second, be for the description the utility model discloses a technical scheme is convenient and set up, and does not have specific limiting action, is general finger, right the technical scheme of the utility model does not constitute limiting action. It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. The technical solutions in the same embodiment and between the technical solutions in different embodiments can be arranged and combined to form a new technical solution without contradiction or conflict, which is all within the scope of the present invention.
Referring to fig. 1 and fig. 2, the utility model provides a graphite heater, including a plurality of heating coil 1 that are parallel to each other and mutually independent, the cavity that a plurality of heating coil 1 formed is used for placing the crucible to form the thermal field, this thermal field is coaxial balanced, and the distribution is more even.
The heating coils 1 are fixed by cylindrical graphite hard felt 3. The distance between adjacent heating coils 1 is 15-30mm, and the number of turns of the heating coils 1 is 8-15 according to actual use.
The end of the heating coil 1 is provided with a support leg 2 connected with a power supply, and the heating coil 1 is parallel to each other and independent from each other, so that the mutually independent same-frequency current can be accessed, and the independent control is convenient, so that the corresponding thermal field condition can be achieved by independently controlling the current of each turn of coil according to the thermal field gradient required by a specific experiment.
Example 1
When the novel graphite heater disclosed by the embodiment is used, proper heat preservation measures are arranged around the heater and the heater is integrally placed into a vacuum cavity or a cavity filled with inert gas. And selecting corresponding coils to control the independent input of the current according to the required thermal field conditions, wherein the current needs to adopt the same-frequency current in consideration of the superposition effect of the electric field.
The distance between adjacent heating coils is 20mm, and the number of turns of the heating coils is 10.
The application of the novel graphite heater of the embodiment in the PVT method is as follows:
because the temperature of the bottom powder region is high and the temperature of the top seed crystal region is low in the PVT method, when the graphite heater is adopted, the temperature of the upper region can be reduced in a current reducing mode (all coil frequencies are unchanged, but the current of the upper coil is small, and the current of the bottom coil is large) or a current introducing mode in an interval mode (all coil frequencies are unchanged, the current magnitude is unchanged, but the current introducing mode in the upper half is interval mode) is adopted in the upper half part of the coil. This allows for more precise control of the thermal field gradient within the furnace body than is possible with conventional heaters.
The present invention and its embodiments have been described above schematically, and the description is not limited thereto, and what is shown in the drawings is only one of the embodiments of the present invention, and the actual structure is not limited thereto. Therefore, if the person skilled in the art receives the teaching of the present invention, without departing from the inventive spirit of the present invention, the person skilled in the art should also design the similar structural modes and embodiments without creativity to the technical solution, and all shall fall within the protection scope of the present invention.
Claims (8)
1. The utility model provides a novel graphite heater, its characterized in that, includes a plurality of mutually independent heating coil, and is a plurality of heating coil is coaxial, and single heating coil place plane sets up with the axle center is perpendicular, and is a plurality of the heat field that heating coil formed is used for the heating and placing of crucible, is equipped with the mounting that is used for supporting between the adjacent heating coil.
2. The novel graphite heater of claim 1, wherein a plurality of said heating coils are parallel to each other.
3. The novel graphite heater of claim 1, wherein the spacing between adjacent heating coils is 10-35mm.
4. A novel graphite heater as claimed in claim 3, wherein the spacing between adjacent heating coils is 15-30mm.
5. The novel graphite heater of claim 1, wherein the number of heating coils is 8-15.
6. The novel graphite heater of claim 1, wherein the end of the heating coil is provided with a leg connected to a power supply.
7. A novel graphite heater as claimed in claim 1 or 6, wherein the heating coils are connected to mutually independent co-frequency currents.
8. The novel graphite heater of claim 1, wherein the fixing member is a graphite hard felt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221662886.2U CN218336488U (en) | 2022-06-29 | 2022-06-29 | Novel graphite heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221662886.2U CN218336488U (en) | 2022-06-29 | 2022-06-29 | Novel graphite heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218336488U true CN218336488U (en) | 2023-01-17 |
Family
ID=84869130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221662886.2U Active CN218336488U (en) | 2022-06-29 | 2022-06-29 | Novel graphite heater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218336488U (en) |
-
2022
- 2022-06-29 CN CN202221662886.2U patent/CN218336488U/en active Active
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