CN218309634U

CN218309634U - Carrier for cleaning chip

Info

Publication number: CN218309634U
Application number: CN202222791088.6U
Authority: CN
Inventors: 鲍士伟; 谷飞
Original assignee: Suzhou Suna Photoelectric Co ltd
Current assignee: Suzhou Suna Photoelectric Co ltd
Priority date: 2022-10-21
Filing date: 2022-10-21
Publication date: 2023-01-17
Anticipated expiration: 2032-10-21

Abstract

The utility model discloses a carrier for cleaning chips, which comprises a flower basket body, wherein the flower basket body is provided with a containing cavity capable of containing the chips, the inner wall of the containing cavity is provided with a first water outlet hole, and the inner wall of the containing cavity is also provided with at least one groove, the length of the groove is greater than the length or the diameter of the chip, and the width is less than the width or the diameter of the chip; when the chip is arranged in the accommodating cavity, the part of the groove is exposed on at least one side of the chip, and an avoiding structure which can be used for a clamping mechanism for clamping the chip to stretch into is formed. Use the embodiment of the utility model provides a carrier for rinsing chip conveniently presss from both sides and gets mechanism and chip direct contact and centre gripping to take out the chip from abluent basket of flowers in, greatly reduced chip surface figure by the possibility of fish tail, convenient quick operation.

Description

Carrier for cleaning chip

Technical Field

The utility model relates to a bear device, in particular to a carrier for rinsing chip belongs to semiconductor technology technical field.

Background

In the development stage of semiconductor optical chips, especially in the verification stage of single-step process, many sets of comparative experiments are usually required, and from the cost perspective, the entire 2-inch or 3-inch epitaxial wafer is generally not selected for the experiment, but rather, the epitaxial wafer is divided into a plurality of relatively smaller epitaxial wafers as the experimental wafers (hereinafter, referred to as chips) to perform the verification of the single-step process.

Multiple cleanings are required during each validation of the single step process. And in the cleaning process link, place the chip and wash in the basket of flowers, need use the clamp mechanism such as tweezers to press from both sides and get the chip in operation process, and the problem that is difficult to press from both sides can appear in the chip that is less relatively, and tweezers very easily fish tail chip surface or terminal surface, cause harmful effects to the experimental result. The surface of the chip has a ridge waveguide and other pattern structures, and if the pattern structures are damaged by external force, the structural performance of the chip is damaged, so that the experiment fails. In the conventional cleaning carrier, the chip is difficult to take and place after cleaning, and even a skilled operator often causes the chip to be broken by clamping or the surface of the chip to be scratched by tweezers.

SUMMERY OF THE UTILITY MODEL

An object of the present invention is to provide a carrier for cleaning chips, which is used to solve the above problems.

In order to realize the purpose of the utility model, the utility model adopts the technical scheme that includes:

the embodiment of the utility model provides a carrier for rinsing chip, including the basket of flowers body, the basket of flowers body has the cavity of accommodating that can hold the chip, be provided with first apopore on the inner wall of the cavity of accommodating, and, still be provided with at least a slot on the inner wall of the cavity of accommodating, the length of slot is greater than the length or the diameter of chip, and the width is less than the width or the diameter of chip;

when the chip is placed in the accommodating cavity, the part of the groove is exposed on at least one side of the chip, and an avoiding structure for the clamping mechanism for clamping the chip to stretch into is formed.

Compared with the prior art, the utility model has the advantages that:

1) By using the carrier for cleaning the chip provided by the embodiment of the utility model, the clamping mechanism is convenient to directly contact and clamp the chip, so that the chip can be conveniently taken out from the cleaned carrier, the possibility that the pattern structure on the surface of the chip is scratched is greatly reduced, and the carrier is convenient and quick to operate;

2) By using the carrier for cleaning the chip provided by the embodiment of the utility model, the clamping mechanism is convenient to directly contact and clamp the chip, so that the chip can be conveniently taken out from the cleaned carrier, the possibility of damage to the edge of the chip is greatly reduced, and the operation is convenient and rapid;

3) Use the embodiment of the utility model provides a carrier for rinsing chip can improve the discharge rate of depositing water in the basket of flowers to reduce depositing water of chip bottom, the follow-up clearance chip of being convenient for.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the description below are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a schematic diagram of a carrier for cleaning a chip according to an exemplary embodiment of the present invention;

fig. 2 is a top view of a carrier for cleaning chips according to an exemplary embodiment of the present invention;

fig. 3 isbase:Sub>A view frombase:Sub>A-base:Sub>A of fig. 2 in accordance with an exemplary embodiment of the present invention;

fig. 4 is anbase:Sub>A-base:Sub>A view of another embodiment of fig. 2;

description of the reference numerals:

1. a flower basket body; 111. a first water outlet; 12. an avoidance structure; 121. a trench; 1211. a first tank body; 1212. a second tank body; 122. a second water outlet; 2. a handle.

Detailed Description

In view of the deficiencies in the prior art, the inventor of the present invention has made extensive studies and practice to provide the technical solution of the present invention. The technical solution, its implementation and principles, etc. will be further explained as follows.

In some more specific embodiments, the first water outlet hole is disposed on a bottom wall of the accommodating chamber.

In some more specific embodiments, a plurality of the avoiding structures are crosswise arranged on the bottom wall of the accommodating chamber.

In some specific embodiments, the avoiding structures intersect to form a designated area, and at least one first water outlet hole is formed in the designated area.

In some specific embodiments, the avoiding structure further includes a plurality of second water outlet holes, and the plurality of second water outlet holes are disposed on the bottom wall of the groove.

In some specific embodiments, at least one second water outlet hole is formed at the intersection of the avoidance structures.

In some more specific embodiments, the bottom wall of the housing chamber is continuously connected to the bottom surface of the groove.

In some more specific embodiments, the bottom wall of the receiving chamber is connected to the bottom surface of the groove via a transition surface.

In some specific embodiments, the groove comprises a first groove body and a second groove body, the second groove body is arranged at two ends of the first groove body, and the depth of at least part of the first groove body is greater than that of the second groove body.

The technical solution, implementation processes, principles and the like will be further explained with reference to the drawings and specific embodiments, and unless otherwise specified, the chips used in the embodiments of the present invention are components known to those skilled in the art, which are commercially available, and the specific structure and model thereof are not limited herein.

Examples

Referring to fig. 1-2, a carrier for cleaning a chip according to this embodiment is provided, which includes a basket body 1, the basket body 1 has a receiving chamber capable of receiving a chip, a first water outlet 111 is disposed on an inner wall of the receiving chamber, and at least one groove 121 is further disposed on the inner wall of the receiving chamber, a length of the groove 121 is greater than a length or a diameter of the chip, and a width of the groove 121 is smaller than a width or a diameter of the chip;

when the chip is placed in the accommodating chamber, a part of the groove 121 is exposed on at least one side of the chip, and an avoiding structure 12 into which a clamping mechanism for clamping the chip can extend is formed.

Understandably, the chips can be placed in the flower basket body 1 for cleaning, the specifications of the chips are not only the same, but also are approximately rectangular and circular, therefore, the length of the groove 121 is larger than the length or diameter of the chip, and the width is smaller than the width or diameter of the chip, so as to ensure that the part of the groove 121 is exposed on at least one side of the chip, and form an avoiding structure 12 into which a clamping mechanism for clamping the chip can extend. After the washing, when shifting out the washing region with basket of flowers body 1, the hydroenergy of surviving can be through the accepting cavity of first apopore 111 outflow basket of flowers in the basket of flowers body 1 to discharge the inside deposit water fast, so that follow-up clamp gets the operation. After the conventional washing, be difficult to once press from both sides when getting and get the success, easily cause the surperficial fish tail of chip, and use the embodiment of the utility model provides a when a carrier for rinsing the chip, press from both sides and get the mechanism and can stretch into and dodge structure 12, the chip is got to accurate clamp, has greatly reduced the possibility that chip surface figure structure was by the fish tail, convenient quick operation.

Further, the first outlet hole 111 is disposed on the bottom wall of the accommodating chamber. The first outlet hole 111 may be disposed on a sidewall of the accommodating chamber, or may be disposed on a bottom wall of the accommodating chamber, so as to facilitate rapid discharge of the stored water.

Further, a plurality of the avoiding structures 12 are arranged on the bottom wall of the accommodating chamber in a crossed manner. The specifications of the chips are different, and when a plurality of chips are placed in the flower basket body 1, the chips can be taken out through the avoidance structures 12. The avoidance structures 12 are arranged in a crossed manner, so that more clamping positions can be provided for clamping operation, and an operator can conveniently select the optimal clamping position to clamp the chip.

Further, the avoiding structure 12 is intersected and enclosed to form a designated area, and at least one first water outlet hole 111 is arranged in the designated area. Partial water storage may be left between the bottom of the chip and the flower basket body 1, and when the clamping mechanism is used for moving the chip, the water stored between the bottom of the chip and the flower basket body 1 can be quickly discharged from the first water outlet hole 111, so that the water stored on the surface of the chip is reduced.

Further, the avoiding structure 12 further includes a plurality of second water outlet holes 122, and the plurality of second water outlet holes 122 are disposed on the bottom wall of the groove 121. Understandably, a part of water is still reserved in the groove 121 for the clamping mechanism to extend into, and the second water outlet hole 122 formed in the bottom wall of the groove 121 facilitates the discharge of the water stored in the groove 121, so that the clamping mechanism can be placed by people more conveniently, the clamping position can be accurately positioned, the possibility of chip edge damage is greatly reduced, and the rapid operation is facilitated.

Specifically, at least one second water outlet 122 is disposed at the intersection of the avoiding structure 12. When the flower basket body 1 is lifted out of the cleaning area, the reserved water can flow through the grooves 121 arranged in different directions and is collected and discharged through the second water outlet holes 122, the water guide area is increased, and the water outflow speed is improved

Further, the bottom wall of the accommodating chamber is connected to the bottom surface of the groove 121 via a transition surface. As shown in fig. 3, the bottom surface is continuously connected with the bottom surface of the groove 121, so that water remaining in the basket body 1 can flow into the groove 121 first and then flow out through the second water outlet hole 122, that is, the water in the area where the chip is located is discharged through the second water outlet hole 122 first, so as to take the chip in advance.

Further, the bottom wall of the receiving chamber is continuously connected with the bottom surface of the groove 121. As in conventional cleaning operations, the water in the channel 121 is too much to affect the proper operation of cleaning or picking up chips. The bottom surface may be continuously connected to the first surface. Referring to fig. 4, the water stored in the accommodating chamber can be quickly guided to the second outlet hole 122 through the bottom surface, so as to accelerate the discharge of the water.

Specifically, the bottom surface of the groove 121 is a curved surface, and the curved surface is formed by sinking towards the side deviating from the placing space. The bottom surface of slot 121 is the curved surface, and the curved surface here does not influence the normal of chip and places, will when the basket of flowers was taken out from the aquatic, because the curved surface orientation deviates from placing space one side and caves in, the flow direction of water will flow towards the sunken direction of curved surface to accelerate the outflow of water, be convenient for accelerate the clearance chip.

Specifically, the bottom surface of the groove 121 is a plane, and the bottom surface and the first surface are arranged at an angle. Understandably, when the bottom surface is arranged at an angle with the first surface, the bottom surface is a slope surface and can guide the drainage of running water.

Further, the groove 121 includes a first groove 1211 and a second groove 1212, the second groove 1212 is disposed at two ends of the first groove 1211, and at least a portion of the first groove 1211 is deeper than the second groove 1212. It will be appreciated that the running water can flow along the groove 121 to the second outlet hole 122 for discharge due to gravity. When the water is stored in the flower basket, part of the flowing water can be discharged through the second avoiding structure 12 communicated with the second groove 1212. Part of the flowing water flows through the second slot 1212, flows to the first slot 1211 with a lower horizontal position, and is discharged through the second outlet hole 122 of the first slot 1211. More flow exit paths are added to the running water to speed up the discharge of the running water.

The carrier for cleaning the chip further comprises a grab handle 2 arranged on the flower basket, and the grab handle 2 can be at least restrained by a clamping mechanism to enable the flower basket to be fixed at a specified position. The grip 2 may be held by hand or held by a gripper mechanism to carry the basket away from the washing area.

Compared with the prior art, the utility model has the advantages that:

1) By using the carrier for cleaning the chip provided by the embodiment of the utility model, the clamping mechanism is convenient to directly contact and clamp the chip, so that the chip can be taken out from the cleaned flower basket, the possibility of scratching the surface pattern of the chip is greatly reduced, and the carrier is convenient and quick to operate;

It should be understood that the above-mentioned embodiments are merely illustrative of the technical concepts and features of the invention, and the purpose of the present invention is to provide those skilled in the art with the understanding of the content of the present invention and the implementation thereof, and therefore, the protection scope of the present invention should not be limited thereby. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. A carrier for cleaning a chip, comprising:

the flower basket comprises a flower basket body (1), wherein the flower basket body (1) is provided with a containing cavity capable of containing a chip, the inner wall of the containing cavity is provided with a first water outlet hole (111), the inner wall of the containing cavity is also provided with at least one groove (121), the length of the groove (121) is greater than the length or diameter of the chip, and the width of the groove is smaller than the width or diameter of the chip;

when the chip is placed in the accommodating chamber, part of the groove (121) is exposed on at least one side of the chip, and an avoiding structure (12) into which a clamping mechanism for clamping the chip can extend is formed.

2. The carrier for cleaning chips as claimed in claim 1, wherein:

the first water outlet hole (111) is formed in the bottom wall of the accommodating cavity.

3. A carrier for cleaning chips as defined in claim 2, wherein:

the avoidance structures (12) are arranged on the bottom wall of the containing cavity in a crossed mode.

4. A carrier for washing chips as claimed in claim 3, wherein:

the avoiding structures (12) are intersected and enclosed to form a designated area, and at least one first water outlet hole (111) is formed in the designated area.

5. A carrier for cleaning chips as defined in claim 1, wherein:

the avoiding structure (12) further comprises a plurality of second water outlet holes (122), and the second water outlet holes (122) are formed in the bottom wall of the groove (121).

6. The carrier for washing chips as claimed in claim 5, wherein:

at least one second water outlet hole (122) is formed in the intersection of the avoidance structure (12).

7. The carrier for washing chips as claimed in claim 5, wherein:

the bottom wall of the containing cavity is continuously connected with the bottom surface of the groove (121).

8. The carrier for washing chips as claimed in claim 4, wherein:

the bottom wall of the containing cavity is connected with the bottom surface of the groove (121) through a transition surface.

9. A carrier for cleaning chips as defined in claim 1, wherein:

the groove (121) comprises a first groove body (1211) and a second groove body (1212), wherein the second groove body (1212) is arranged at two ends of the first groove body (1211), and the depth of at least part of the first groove body (1211) is larger than that of the second groove body (1212).