CN213401127U - Asymmetric wafer cleaning flower basket - Google Patents
Asymmetric wafer cleaning flower basket Download PDFInfo
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- CN213401127U CN213401127U CN202023007005.7U CN202023007005U CN213401127U CN 213401127 U CN213401127 U CN 213401127U CN 202023007005 U CN202023007005 U CN 202023007005U CN 213401127 U CN213401127 U CN 213401127U
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- wafer
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- cleaning
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Abstract
The invention discloses an asymmetric wafer cleaning flower basket which comprises a cleaning flower basket main body, wherein a plurality of wafer limiting grooves are formed in the cleaning flower basket main body, the sizes of the wafer limiting grooves are matched with those of wafers, the wafers can be conveniently inserted into the wafer limiting grooves, a certain included angle is formed between the surface, provided with the wafer limiting grooves, of the cleaning flower basket main body and the bottom surface of the cleaning flower basket main body, the surface, provided with the wafer limiting grooves, of the cleaning flower basket main body is of an inclined structure, and the bottoms of the wafer limiting grooves are V-shaped and are not closed. The surface of the asymmetric wafer cleaning flower basket provided by the invention is arranged to be inclined, so that liquid cannot stay on the surface of the flower basket, residual liquid drops cannot be formed, and the safety performance is improved.
Description
Technical Field
The invention relates to an asymmetric wafer cleaning flower basket.
Background
The wafer is usually cleaned by various dangerous chemicals (strong acid, strong base, strong oxidant or strong corrosive chemicals), the wafer is placed in a cleaning flower basket during cleaning, the manufacturing material of the cleaning flower basket mostly adopts polytetrafluoroethylene, the polytetrafluoroethylene is a surface self-cleaning hydrophobic material, and the water solution is easy to form a large contact angle on the surface of the hydrophobic material so as to form water drops. Therefore, residual liquid remained on the flat surface of the flower basket is easy to form water drops, and in the process of cleaning the wafer by multiple solutions, the water drop residual liquid is easy to drip from the surface of the hydrophobic flower basket in the process of lifting and moving switching of the flower basket. On the one hand, the residual liquid may drip on the experiment table, and then be touched by the operating personnel by mistake to cause physiological damage. On the other hand, the raffinate may pass into the next solution along with the flower basket, affecting the concentration of the solution, and even affecting its chemical properties to some extent.
Disclosure of Invention
The invention aims to provide an asymmetric wafer cleaning flower basket, which can be used for placing cleaning liquid to form residual liquid drops on the surface of the flower basket.
The technical scheme adopted by the invention is as follows: asymmetric wafer washs basket of flowers, including wasing the basket of flowers main part, establish a plurality of wafer spacing grooves in the washing basket of flowers main part, the size in wafer spacing groove matches with the size of wafer, and the wafer of being convenient for inserts in the wafer spacing groove, its characterized in that: the surface of the cleaning basket body provided with the wafer limiting groove and the bottom surface of the cleaning basket body form a certain included angle, and the angle range is 10-65 degrees. The face, provided with the wafer limiting groove, of the cleaning flower basket main body is of an inclined structure, and the bottom of the wafer limiting groove is V-shaped and is not closed.
Preferably, the washing flower basket further comprises a handle, and the handle is arranged on the washing flower basket main body.
Preferably, the cleaning flower basket body is made of polytetrafluoroethylene.
Preferably, the wafer limiting groove is perpendicular to the bottom surface of the cleaning basket body.
Preferably, the handle is integrally formed with the cleaning basket body.
Preferably, a handle clamping hole is formed in the cleaning basket body, and the handle is fixed to the cleaning basket body through the handle clamping hole.
The surface of the asymmetric wafer cleaning flower basket provided by the invention is arranged to be inclined, so that liquid cannot stay on the surface of the flower basket, residual liquid drops cannot be formed, and the use safety performance is improved.
Drawings
Fig. 1 is a schematic structural view of an asymmetric wafer cleaning basket in embodiment 1.
Fig. 2 is a schematic structural view of an asymmetric wafer cleaning basket according to embodiment 2.
FIG. 3 is a cross-sectional view of the asymmetric wafer cleaning basket.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
Example 1
As shown in fig. 1, this asymmetric wafer washs basket of flowers, including wasing basket of flowers main part 1, it establishes a plurality of wafer spacing grooves 2 in the washing basket of flowers main part, the size in wafer spacing groove matches with the size of wafer, and the wafer of being convenient for inserts in the wafer spacing groove, the face that washs the basket of flowers main part and is equipped with the wafer spacing groove is certain contained angle with the bottom surface of wasing the basket of flowers main part, and the face that washs the basket of flowers main part and is equipped with the wafer spacing groove is the slope structure, can see from fig. 3, the bottom in wafer spacing groove is the V font, does not seal and can let solution remain and flow away from the bottom.
Example 2
As shown in fig. 2, the structure is substantially the same as the embodiment, and the washing basket further comprises a handle 3, which is arranged on the washing basket body and is integrally formed with the washing basket body.
The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.
Claims (6)
1. The utility model provides an asymmetric wafer washs basket of flowers, includes washs the basket of flowers main part, it establishes a plurality of wafer spacing grooves in the basket of flowers main part to wash, the size in wafer spacing groove matches with the size of wafer, and the wafer of being convenient for inserts in the wafer spacing groove, its characterized in that: the surface of the cleaning basket body provided with the wafer limiting groove and the bottom surface of the cleaning basket body form a certain included angle, the angle range is 10-65 degrees, the surface of the cleaning basket body provided with the wafer limiting groove is of an inclined structure, and the bottom of the wafer limiting groove is V-shaped and is not closed.
2. The asymmetric wafer cleaning basket as recited in claim 1, wherein: still include the handle, the handle sets up on wasing the basket of flowers main part.
3. The asymmetric wafer cleaning basket as recited in claim 1, wherein: the cleaning flower basket main body is made of polytetrafluoroethylene.
4. The asymmetric wafer cleaning basket as in claim 1 or 2, wherein: the wafer limiting groove is perpendicular to the bottom surface of the cleaning flower basket main body.
5. The asymmetric wafer cleaning basket as recited in claim 2, wherein: the handle and the cleaning flower basket main body are integrally formed.
6. The asymmetric wafer cleaning basket as recited in claim 2, wherein: the cleaning flower basket is characterized in that a handle clamping hole is formed in the cleaning flower basket body, and the handle is fixed on the cleaning flower basket body through the handle clamping hole.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202023007005.7U CN213401127U (en) | 2020-12-15 | 2020-12-15 | Asymmetric wafer cleaning flower basket |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202023007005.7U CN213401127U (en) | 2020-12-15 | 2020-12-15 | Asymmetric wafer cleaning flower basket |
Publications (1)
Publication Number | Publication Date |
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CN213401127U true CN213401127U (en) | 2021-06-08 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202023007005.7U Active CN213401127U (en) | 2020-12-15 | 2020-12-15 | Asymmetric wafer cleaning flower basket |
Country Status (1)
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CN (1) | CN213401127U (en) |
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2020
- 2020-12-15 CN CN202023007005.7U patent/CN213401127U/en active Active
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