CN218308680U

CN218308680U - Spraying equipment

Info

Publication number: CN218308680U
Application number: CN202221734774.3U
Authority: CN
Inventors: 张言; 夏学; 郭梦龙; 李华
Original assignee: Taizhou Longi Solar Technology Co Ltd
Current assignee: Taizhou Longi Solar Technology Co Ltd
Priority date: 2022-07-05
Filing date: 2022-07-05
Publication date: 2023-01-17
Anticipated expiration: 2032-07-05

Abstract

The utility model discloses a spraying equipment relates to silicon chip spraying technical field, can effectively avoid solution to glue on the silicon chip, promotes the yield of silicon chip, reduces the manufacturing cost of silicon chip. Spraying equipment sprays station, conveying mechanism, spraying mechanism and wiper mechanism including spraying, sprays the station and includes at least one accommodation space for hold and wait to spray the piece. The conveying mechanism comprises a conveying belt which moves in a circulating mode, and the conveying belt is used for bearing and driving the piece to be sprayed to penetrate through the accommodating space. The spraying mechanism is arranged on the spraying station and used for spraying the solution to the accommodating space. The cleaning mechanism is used for cleaning the conveyor belt passing through the accommodating space. The spraying equipment also comprises a drying mechanism which is arranged between the cleaning mechanism and the spraying station and is used for drying the conveying belt cleaned by the cleaning mechanism.

Description

Spraying equipment

Technical Field

The utility model relates to a silicon chip spraying technical field especially relates to a spraying equipment.

Background

Before forming PN junctions on the silicon wafer through a diffusion process, the surface of the silicon wafer needs to be sprayed with a phosphoric acid aqueous solution.

In the prior art, a roller transmission mechanism is mostly adopted for conveying silicon wafers by spraying equipment, and a rubber roller ring for supporting the silicon wafers is sleeved on a roller. When the roller rotates, the roller ring and the silicon wafer are driven to move forwards at a constant speed under the action of friction force, and meanwhile, a spraying mechanism above the silicon wafer sprays phosphoric acid water solution on the silicon wafer.

Because a gap exists between the front and the rear silicon wafers positioned on the roller transmission mechanism in the actual spraying process, the roller ring sleeved on the roller and used for supporting the silicon wafers can be sprayed with phosphoric acid aqueous solution. In the process of transferring the silicon wafer, the phosphoric acid aqueous solution on the roller ring can be adhered to the back of the next silicon wafer, and after the silicon wafer is subjected to PECVD (plasma enhanced chemical vapor deposition) silicon nitride film plating, white spots can appear at the position on the silicon wafer where the phosphoric acid aqueous solution is adhered, so that the silicon wafer is degraded or reworked, and the production cost of the silicon wafer is increased.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a spraying equipment can effectively avoid solution to glue on treating the spraying piece, promotes the yield of treating the spraying piece.

In order to realize the above object, the utility model provides a spraying equipment, including spraying station, conveying mechanism, spraying mechanism and wiper mechanism, spray the station and include at least one accommodation space for hold and treat the spraying piece. The conveying mechanism comprises a conveying belt which moves in a circulating mode, and the conveying belt is used for bearing and driving the piece to be sprayed to penetrate through the accommodating space. The spraying mechanism is arranged at the spraying station and used for spraying the solution to the accommodating space. The cleaning mechanism is used for cleaning the conveying belt passing through the accommodating space.

When the technical scheme is adopted, the utility model provides a spraying equipment is including spraying the station, and sprays the station and include at least one accommodation space for hold and treat the spraying piece. The spraying equipment further comprises a conveying mechanism, a spraying mechanism and a cleaning mechanism, wherein the conveying mechanism comprises a conveying belt which moves in a circulating mode, and the conveying belt is used for bearing and driving the piece to be sprayed to penetrate through the accommodating space. The spraying mechanism is arranged on the spraying station and used for spraying the solution to the accommodating space. After will treating spraying piece and placing on the conveyer belt, conveyer belt endless movement treats that spraying piece is along with conveyer belt synchronous motion to spraying the station and when passing accommodation space, sets up and falls to treating spraying piece surface in the solution that the spraying mechanism who sprays the station sprayed to accommodation space, and is same, and partial solution can fall on the conveyer belt surface. And then, the part to be sprayed with the solution is driven by the conveyor belt to be away from the spraying station, and the conveyor belt continues to circularly move. The wiper mechanism is used for wasing the conveyer belt after spraying the station, with to be wasing getting rid of spraying the station by the solution on the conveyer belt that sprays solution, in order to avoid when the conveyer belt that is sprayed solution bears the weight of once more and treats spraying piece, the solution adhesion is on treating the one side that spraying piece and conveyer belt contacted, when avoiding treating spraying piece and carrying out follow-up technology, produce quality problems, promote the yield of treating spraying piece, and can reduce the rework rate, reduce the manufacturing cost who treats spraying piece.

In a possible implementation manner, the spraying equipment further comprises a drying mechanism, which is arranged between the cleaning mechanism and the spraying station and is used for drying the conveyor belt cleaned by the cleaning mechanism.

When adopting above-mentioned technical scheme, stoving mechanism is used for the conveyer belt after the stoving through wiper mechanism washs to the drying rate of conveyer belt is guaranteed simultaneously when the conveyer belt bears the weight of the piece of waiting to spray, and the conveyer belt with waiting to spray the contact does not have the washing liquid, and is comparatively dry, in order to avoid the existence of washing liquid to reduce the yield of waiting to spray the piece.

In a possible implementation manner, the conveying mechanism further comprises at least one driving roller and a driving part, the conveying belt is wound outside the driving roller, and the driving roller is used for driving the conveying belt to circularly move. The driving component is in driving connection with at least one driving roller and is used for driving the driving roller to rotate.

When adopting above-mentioned technical scheme, drive unit and at least one drive roller drive connection for the drive roller rotates. The conveyer belt is around in the drive roller outside, and the conveyer belt under the effect of the frictional force with the drive roller, the drive roller can drive conveyer belt endless movement to realize that the incessant bearing of conveyer belt waits to spray the piece, in order to promote the degree of mechanization of waiting to spray the production of piece, the production rate of spraying the piece is treated in the increase.

In one possible implementation, the conveying mechanism further comprises a tensioning assembly in tensioning contact with the conveyor belt for adjusting the tension of the conveyor belt.

When adopting above-mentioned technical scheme, tensioning assembly and conveyer belt tensioning contact for adjust the rate of tension of conveyer belt, the tension of conveyer belt changes, appears the phenomenon that the conveyer belt is too loose or too tight. When the conveyer belt was too loose, the conveyer belt off tracking easily appeared, the phenomenon that the conveyer belt skidded appears even for treating that the piece of spraying can not be at the uniform velocity through spraying the station, lead to treating that the solution that is sprayed distributes unevenly on the piece of spraying, the quality of the piece of spraying is treated in the influence. When the conveyer belt is too tight, easily cause the conveyer belt tensile excessive, shorten the life of conveyer belt.

In one possible implementation, the tensioning assembly includes a tensioning shaft and a mounting bracket, and the conveyor belt is wound around the exterior of the tensioning shaft. The mounting bracket is provided with an adjusting groove which is movably matched with the end part of the tensioning shaft so as to adjust the tightness of the conveyor belt.

When the technical scheme is adopted, the mounting frame is provided with the adjusting groove matched with the end part of the tensioning shaft in a moving way, and when the end part of the tensioning shaft moves in the adjusting groove, the relative position of the tensioning shaft and the driving roller can be adjusted, so that the tension of the conveying belt can be adjusted.

In one possible implementation, the cleaning mechanism includes a holding tank and a spray head, and the conveyor belt after the spraying station passes over the holding tank. The spray head is used for spraying the cleaning liquid to the conveying belt passing through the holding tank.

When adopting above-mentioned technical scheme, when the conveyer belt after spraying the station passes through the top of holding tank, the injector head is used for spraying the washing liquid to the conveyer belt that is located the holding tank top, and the injection force that the washing liquid sprays on the conveyer belt forces solution to break away from the conveyer belt and mix with the washing liquid for the conveyer belt obtains thorough washing, promotes the cleaning performance of conveyer belt. Later solution and washing liquid drop to the holding tank under the action of gravity together in, the collection of the washing liquid of being convenient for does benefit to centralized processing. In addition, the cleaning liquid is prevented from leaking, the operation environment is prevented from being polluted, the ground is prevented from being wet and slippery, and potential safety hazards are avoided for workers.

In one possible implementation, the cleaning mechanism includes a holding tank for holding cleaning fluid, and the conveyor belt after the spray station passes through the holding tank and is immersed in the cleaning fluid. At the moment, the conveyor belt sprayed with the solution is cleaned by the cleaning solution, so that the solution on the conveyor belt is mixed into the cleaning solution, the solution on the conveyor belt can be removed, the subsequent bearing of the solution is prevented from polluting the piece to be sprayed, and the yield of the piece to be sprayed is reduced.

In a possible implementation manner, the cleaning mechanism further includes a bubbling pipeline, and the bubbling pipeline is disposed in the holding tank. The bubbling pipe is used for bubbling into the cleaning liquid and is used for bubbling to clean the conveyor belt.

When the technical scheme is adopted, the cleaning mechanism further comprises a bubbling pipeline, and the bubbling pipeline is arranged in the holding tank. The bubbling pipeline is used for bubbling in the washing liquid to be used for the bubbling to wash the conveyer belt, make the conveyer belt obtain thorough washing, promote the cleaning performance of conveyer belt.

In a possible implementation manner, the spraying equipment further comprises a rack, and the conveying mechanism, the spraying mechanism and the cleaning mechanism are all arranged on the rack.

When adopting above-mentioned technical scheme, conveying mechanism, spraying mechanism, wiper mechanism all set up in the frame, and the frame is integrated as an organic whole with conveying mechanism, spraying mechanism, wiper mechanism, has promoted spraying equipment's structural integrity and compactness.

In one possible implementation, the conveyor belt is a conveyor belt with a hollow structure.

When the technical scheme is adopted, the conveying belt is of a hollow structure, so that on one hand, the raw material consumption of the conveying belt is reduced, the cost is saved, on the other hand, the weight of the conveying belt is reduced, and the bearing load of the rack is reduced. The cleaning liquid can also circulate between the two surfaces of the conveying belt, the flowing cleaning effect of the cleaning liquid and the conveying belt is improved, and the drying of the conveying belt can be accelerated.

Drawings

The accompanying drawings, which are described herein, serve to provide a further understanding of the invention and constitute a part of this specification, and the exemplary embodiments and descriptions thereof are provided for explaining the invention without unduly limiting it. In the drawings:

fig. 1 is a schematic structural diagram of a spraying apparatus provided in an embodiment of the present invention;

fig. 2 is a schematic view of a conveying mechanism provided in an embodiment of the present invention;

fig. 3 is a schematic view of a cleaning mechanism according to an embodiment of the present invention.

Reference numerals are as follows:

1-conveying mechanism, 11-conveying belt, 12-driving roller, 13-driving part, 14-tensioning component, 141-tensioning shaft, 142-mounting rack, 2-spraying mechanism, 3-cleaning mechanism, 31-accommodating tank,

32-an injector head, 4-a drying mechanism and 5-a rack.

Detailed Description

In order to make the technical problem, technical solution and beneficial effects to be solved by the present invention more clearly understood, the following description is made in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.

In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the field of photovoltaic cell production, forming a PN junction on a silicon wafer by a diffusion process is an indispensable production step. Before preparing PN junction, spraying phosphoric acid water solution on the surface of the silicon wafer.

Because a gap exists between the front and the rear silicon wafers positioned on the roller transmission mechanism in the actual spraying process, the roller ring sleeved on the roller and used for supporting the silicon wafers can be sprayed with phosphoric acid aqueous solution. In the process of transferring the silicon wafer, the phosphoric acid aqueous solution on the roller ring can be adhered to the back of the next silicon wafer, and after the silicon wafer is subjected to PECVD (plasma enhanced chemical vapor deposition) silicon nitride film plating, white spots can appear at the position on the silicon wafer adhered with the phosphoric acid aqueous solution, so that the silicon wafer is degraded or reworked, and the production cost of the silicon wafer is increased. Therefore, how to reduce or avoid the adhesion of phosphoric acid solution on the back surface of the silicon wafer in the spraying process is a great problem in the industry.

In order to solve the problem among the above-mentioned prior art, as shown in fig. 1 and fig. 2, the embodiment of the utility model provides a spraying equipment, spraying equipment is including spraying station, conveying mechanism 1, spraying mechanism 2 and wiper mechanism 3, and the spraying station includes at least one accommodation space for hold and treat the spraying piece, the example, treat that the spraying piece can be semiconductor sheet such as silicon chip, germanium piece or germanium silicon chip, or other needs spraying solution treat the spraying piece. The conveying mechanism 1 is provided with a circularly moving conveying belt 11, and the conveying belt 11 is used for bearing and driving the piece to be sprayed to pass through the accommodating space. The spraying mechanism 2 is arranged at the spraying station and used for spraying the solution to the accommodating space. The cleaning mechanism 3 is used for cleaning the conveyor belt 11 after passing through the accommodating space.

Adopt under the condition of above-mentioned technical scheme, the embodiment of the utility model provides a spraying equipment is including spraying the station, and sprays the station and include at least one accommodation space for hold and treat the spraying piece. The spraying equipment further comprises a conveying mechanism 1, a spraying mechanism 2 and a cleaning mechanism 3, wherein the conveying mechanism 1 is provided with a circularly moving conveying belt 11, and the conveying belt 11 is used for bearing and driving the piece to be sprayed to penetrate through the accommodating space. The spraying mechanism 2 is arranged at the spraying station and used for spraying the solution to the accommodating space. After will treating that the spraying piece is placed on

conveyer belt

11, 11 circulative movements of conveyer belt, treat that the spraying piece is along with 11 synchronous motion of conveyer belt to spraying the station and when passing accommodation space, set up in the solution that the spraying mechanism 2 that sprays the station sprayed to accommodation space and fall to treating the spraying piece surface, equally, partial solution can fall on the conveyer belt surface. Then, the part to be sprayed with the solution is driven by the conveyor belt 11 to be away from the spraying station, and the conveyor belt 11 continues to circularly move. Cleaning mechanism 3 is used for wasing the conveyer belt 11 after spraying the station, in order to wash the solution that will spray on the station by the conveyer belt 11 of spraying solution and get rid of, in order to avoid being born the weight of again by the conveyer belt 11 of spraying solution and treat when spraying the piece, the solution adhesion is treating on the one side of spraying piece and the contact of conveyer belt 11, when avoiding treating that the spraying piece carries out follow-up technology, produce quality problems, promote the yield of treating the spraying piece, and can reduce the rework rate, reduce the manufacturing cost of treating the spraying piece.

When the utility model is used, when the embodiment of the utility model provides a when the spraying equipment is applied to the photovoltaic trade, treat that the spraying piece can be the silicon chip, the solution that spraying mechanism 2 sprayed to the silicon chip surface can be phosphoric acid aqueous solution to form the PN junction on the silicon chip surface. Certainly, the embodiment of the utility model provides a spraying equipment also can be applied to trades such as 3C, semiconductor, new forms of energy.

Taking the piece to be sprayed as a silicon wafer as an example, the silicon wafer is carried by the conveyor belt 11, and the silicon wafer is placed on the surface of the conveyor belt 11 and horizontally moved by the drive of the conveyor belt 11. When the silicon chip passes through the containing space of the spraying station, a spraying mechanism 2 is arranged on the spraying station. In practice, the spraying mechanism 2 is disposed above the conveyor belt 11 so that the solution sprayed by the spraying mechanism 2 falls onto the surface of the silicon wafer under the action of gravity. The surface of the silicon wafer is generally referred to as the front surface of the silicon wafer, and in this case, the surface in contact with the conveyor belt 11 is the back surface of the silicon wafer. It is understood that when the conveyor belt 11 simultaneously conveys at least two silicon wafers, a gap must exist between the adjacent silicon wafers. In view of this, the solution sprayed by the spraying mechanism 2 falls into the gap between the adjacent two silicon wafers, that is, the surface of the conveyor belt 11, so that the surface of the conveyor belt 11 is sprayed with the solution. The conveyor belt 11 moves circularly to move the silicon chip sprayed with the solution away from the spraying station. The conveyor belt 11 reaches the position of the cleaning mechanism 3, and the cleaning mechanism 3 cleans the conveyor belt 11 after passing through the spraying station to clean and remove the solution on the conveyor belt 11 sprayed with the solution at the spraying station. Supposing that if the cleaning mechanism 3 is not adopted to clean the solution on the conveyor belt 11 sprayed with the solution, when the conveyor belt 11 circularly moves, the conveyor belt 11 sprayed with the solution continuously bears the silicon wafer, and when the back surface of the silicon wafer contacts with the surface of the conveyor belt 11, the phosphoric acid aqueous solution on the conveyor belt 11 adheres to the back surface of the silicon wafer, so that white spots appear at the position on the silicon wafer adhered with the phosphoric acid aqueous solution, the silicon wafer is degraded or reworked, and the production cost of the silicon wafer is increased.

It should be noted that the circularly moving conveyor belt 11, i.e. the conveyor belt 11 itself, forms a closed loop, for example, when a part of the conveyor belt 11 carries a to-be-sprayed member, the to-be-sprayed member is driven by the conveyor belt 11 to move toward a direction close to the spraying station, and after passing through the spraying station, the part of the conveyor belt 11 moves toward the same direction and away from the spraying station. Until the piece to be sprayed is conveyed to the next process step, the part of the conveyor belt 11 continues to bear the piece to be sprayed after being cleaned by the cleaning mechanism 3. An endless moving conveyor belt 11 is also understood to be a conveyor belt 11 that moves in a cycle.

In a possible implementation manner, as shown in fig. 1, the spraying device further includes a drying mechanism 4 disposed between the cleaning mechanism 3 and the spraying station, and configured to dry the conveyor belt 11 cleaned by the cleaning mechanism 3. The drying mechanism 4 is located between the washing mechanism 3 and the spraying station in the moving direction of the conveyor belt 11. The drying mechanism 4 is used for drying the conveyor belt 11 cleaned by the cleaning mechanism 3 to accelerate the drying speed of the conveyor belt 11, and simultaneously, when the conveyor belt 11 bears the piece to be sprayed, the conveyor belt 11 in contact with the piece to be sprayed is not adhered with cleaning liquid and is dry, so that the yield of the piece to be sprayed is prevented from being reduced due to the existence of the cleaning liquid. For example, the drying mechanism 4 may blow the cleaned conveyor belt 11 with hot air to the conveyor belt 11 cleaned by the cleaning mechanism 3, or may dry the cleaned conveyor belt 11 with light, but is not limited thereto and may be selected according to actual conditions.

As a possible implementation manner, referring to fig. 2, the conveying mechanism 1 further includes at least one driving roller 12 and a driving part 13, the conveying belt 11 is wound around the outside of the driving roller 12, and the driving roller 12 is used for driving the conveying belt 11 to move circularly. The driving member 13 is in driving connection with at least one driving roller 12 for driving the driving roller 12 to rotate. So, the drive part 13 drive roller 12 rotates, and 11 winds in the drive roller 12 outside of conveyer belt, and the conveyer roller can drive 11 endless movement of conveyer belt under the effect of the frictional force with conveyer belt 11 to realize 11 incessant bears of conveyer belt and treat the spraying piece, treat the degree of mechanization of spraying piece production in order to promote, the increase treats the production rate of spraying piece. The conveyor belt 11 is wound outside the driving rollers 12, the driving rollers 12 are located in a closed loop surrounded by the conveyor belt 11, the number of the driving rollers 12 is at least one, and the number of the driving rollers 12 can be, for example, one, two, three, four or more. When the number of the driving rollers 12 is one, in order to tension the conveyor belt 11, a passive rotating conveyor roller around which the conveyor belt 11 is wound needs to be provided. That is, when the driving roller 12 is driven to rotate by the driving part 13, the conveying belt 11 moves by a frictional force with the driving roller 12, and likewise, the conveying roller moves by a frictional force with the conveying belt 11, thereby realizing the circulating movement of the conveying belt 11. The driving part 13 may be a driving motor, one end of the driving roller 12 is mechanically connected to an output shaft of the driving motor, and the driving motor drives the driving roller 12 to rotate.

In an alternative, as shown in fig. 2, the conveying mechanism 1 further includes a tensioning assembly 14, and the tensioning assembly 14 is in tensioning contact with the conveyor belt 11 and is used for adjusting the tension of the conveyor belt 11 so as to prevent the tension of the conveyor belt 11 from changing and the conveyor belt 11 from being too loose or too tight. When 11 pine of conveyer belt, 11 off tracking of conveyer belt easily appear, the phenomenon of skidding appears even for treating that the piece of spraying can not be at the uniform velocity through spraying the station, lead to treating that the solution that is sprayed distributes unevenly on the piece of spraying, the influence treats the quality of spraying the piece. When the conveyor belt 11 is too tight, the conveyor belt 11 is easily stretched too much, and the service life of the conveyor belt 11 is shortened.

In some embodiments, as shown in fig. 2, the tensioning assembly 14 includes a tensioning shaft 141 and a mounting bracket 142, with the conveyor belt 11 being wound around the exterior of the tensioning shaft 141. The mounting bracket 142 has an adjustment groove which is movably engaged with an end of the tension shaft 141 to adjust the tension of the conveyor belt 11.

Adopt under the condition of above-mentioned technical scheme, mounting bracket 142 has the tip with tensioning axle 141 and removes complex adjustment tank, when tensioning axle 141's tip removed in the adjustment tank, adjustable tensioning axle 141 and drive roller 12's relative position to the realization is to the regulation of the rate of tension of conveyer belt 11, so, is convenient for adjust the rate of tension of conveyer belt 11, the simple operation.

When the number of the driving rollers 12 is one, the tensioning shaft 141 provided by the embodiment of the present invention can support the conveyor belt 11 with one driving roller 12 to form a closed loop structure. The number of the tension shafts 141 may be one, two, three or more, and is not particularly limited herein. In the embodiment provided by the present invention, the number of the driving rollers 12 is three, and the number of the tensioning shafts 141 is one. As shown in fig. 1 and 2, a conveyor belt 11 between an upper drive roller 12 and a tensioning shaft (not shown) connected to a drive member 13 is used to carry the piece to be sprayed. The cleaning mechanism 3 is positioned below the conveyor belt 11, and the drying mechanism 4 is positioned at the side part of the conveyor belt 11.

In particular, the tensioning shaft 141 may be located inside a closed loop enclosed by the conveyor belt 11, the tensioning shaft 141 being in contact with an inner surface of the conveyor belt 11 for tensioning the conveyor belt 11 outwards. Of course, the tensioning shaft 141 may also be located outside the closed loop enclosed by the conveyor belt 11, and the tensioning shaft 141 is in contact with the outer surface of the conveyor belt 11 for inwardly tensioning the conveyor belt 11, as the case may be. In a specific implementation, the end of the tension shaft 141 is disposed on the mounting frame 142, and when the conveyor belt 11 moves, the end of the tension shaft 141 is tightly disposed on the mounting frame 142. A tension wheel ring is further sleeved on the tension shaft 141, and the tension wheel ring synchronously rotates when the conveyor belt 11 moves.

In one example, as shown in fig. 1 and 3, the cleaning mechanism 3 includes a housing tank 31 and a spray head 32, and the conveyor belt 11 after passing through the spraying station passes over the housing tank 31. The spray head 32 is used to spray a cleaning liquid, which may be clear water, to the conveyor belt 11 passing through the holding tank 31. Like this, when conveyer belt 11 after spraying the station passes through the top of holding tank 31, shower head 32 is used for spouting the washing liquid to the conveyer belt 11 that is located the holding tank 31 top, and the jet power that the washing liquid sprays on conveyer belt 11 forces solution to break away from conveyer belt 11 and mix with the washing liquid for conveyer belt 11 obtains thorough washing, promotes conveyer belt 11's cleaning performance. Then the solution and the cleaning solution fall into the holding tank 31 together under the action of gravity, so that the cleaning solution is convenient to collect, and the centralized treatment is facilitated. In addition, the cleaning liquid is prevented from leaking, the operation environment is prevented from being polluted, the ground is prevented from being wet and slippery, and potential safety hazards are avoided for workers.

In practice, the injector head may be a spray gun structure, and in this case, the holding tank is used only to collect the cleaning fluid after cleaning the conveyer belt, and discharges the cleaning fluid collected. Of course, the cleaning liquid can be held in the holding tank in advance, and the top of the injection head is located in the liquid level of the cleaning liquid. The spray head sprays the cleaning fluid to the surface of the conveyor belt by high pressure. When the cleaning solution is turbid and cannot be used continuously, the cleaning solution is released.

In another example, the cleaning mechanism includes a holding tank for holding the cleaning fluid, and the conveyor belt after passing through the spray station passes through the holding tank and is immersed in the cleaning fluid. At this moment, the conveyor belt sprayed with the solution is cleaned by the cleaning solution, so that the solution on the conveyor belt is blended into the cleaning solution, the solution on the conveyor belt can be removed, the solution is prevented from polluting the subsequent spraying piece to be sprayed, and the yield of the spraying piece to be sprayed is reduced. In this case, it is preferable that a tension shaft is provided in the holding tank, and the tension shaft in the holding tank allows the lowest portion of the conveyor belt to be immersed in the cleaning liquid, so that the conveyor belt can obtain the cleaning effect of the cleaning liquid.

As an optional mode, the cleaning mechanism further comprises a bubbling pipeline, and the bubbling pipeline is arranged in the holding tank. The bubbling pipe is used for bubbling into the cleaning liquid so as to be used for bubbling to clean the conveyor belt. The conveying belt is thoroughly cleaned, and the cleaning effect of the conveying belt is improved.

In a possible implementation manner, referring to fig. 1, the spraying device further includes a frame 5, and the conveying mechanism 1, the spraying mechanism 2, the cleaning mechanism 3, and the drying mechanism 4 are all disposed on the frame 5. Wherein, the mounting frame 142 and the driving part 13 of the conveying mechanism 1 are both arranged on the frame 5. So, frame 5 is integrated as an organic whole with conveying mechanism 1, sprinkling mechanism 2, wiper mechanism 3, has promoted spraying equipment's structural integrity and compactness. In addition, for the tensioning action of the tensioning shaft 141, the tensioning shaft 141 can be synchronously driven to move by moving the mounting frame 142 on the frame 5, so as to adjust the tensioning degree of the conveyor belt 11.

As an alternative, the conveyor belt 11 is a conveyor belt 11 with a hollow structure. Thus, on the one hand, the raw material usage of the conveyor belt 11 is reduced, and the cost is saved. On the other hand, the weight of the conveyor belt 11 is reduced, and the load of the frame 5 is reduced. The cleaning liquid can also be circulated between the two surfaces of the conveyor belt 11, and the flowing cleaning effect of the cleaning liquid and the conveyor belt 11 is improved. Meanwhile, the conveyor belt 11 with the hollow structure can penetrate through hot air or illumination, so that the drying mechanism 4 can be used for fully drying the inner surface and the outer surface of the conveyor belt 11, and drying of the conveyor belt can be accelerated.

In the foregoing description of embodiments, the particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. A spray coating device, comprising:

the spraying station comprises at least one accommodating space for accommodating a piece to be sprayed;

the conveying mechanism comprises a conveying belt which moves in a circulating manner, and the conveying belt is used for bearing and driving the piece to be sprayed to penetrate through the accommodating space;

the spraying mechanism is arranged at the spraying station and used for spraying the solution to the accommodating space;

and the cleaning mechanism is used for cleaning the conveying belt passing through the accommodating space.

2. The spraying apparatus according to claim 1, further comprising a drying mechanism disposed between said cleaning mechanism and said spraying station for drying said conveyor belt cleaned by said cleaning mechanism.

3. The spray coating device of claim 1 wherein said delivery mechanism further comprises:

the conveying belt is wound outside the driving roller, and the driving roller is used for driving the conveying belt to circularly move;

and the driving part is in driving connection with at least one driving roller and is used for driving the driving roller to rotate.

4. A spray device according to claim 3, wherein the conveyor mechanism further comprises a tensioning assembly in tensioning contact with the conveyor belt for adjusting the tension of the conveyor belt.

5. The spray coating device of claim 4 wherein said tensioning assembly comprises:

the tensioning shaft is wound outside the conveyor belt;

and the mounting frame is provided with an adjusting groove which is movably matched with the end part of the tensioning shaft so as to adjust the tightness of the conveyor belt.

6. The spray coating device of claim 1 wherein said purge mechanism comprises:

the conveying belt passes through the spraying station and then passes through the upper part of the accommodating tank;

and the spraying head is used for spraying cleaning liquid to the conveying belt passing through the accommodating tank.

7. The coating apparatus of claim 1 wherein said cleaning mechanism includes a holding tank for holding a cleaning fluid, said conveyor belt after passing through said spray station passing through said holding tank and being immersed in said cleaning fluid.

8. The coating apparatus of claim 7 wherein said cleaning mechanism further comprises a bubbling conduit disposed within said holding tank; the bubbling pipeline is used for bubbling into the cleaning liquid so as to be used for bubbling to clean the conveyor belt.

9. The coating apparatus of claim 1 further comprising a frame, wherein the conveyor mechanism, the spray mechanism, and the purge mechanism are disposed on the frame.

10. The spraying apparatus of claim 1, wherein the conveyor belt is a conveyor belt having an openwork structure.