CN201427995Y - System by using mist chemical agent to carry out single-side continuous chemical wet processing - Google Patents
System by using mist chemical agent to carry out single-side continuous chemical wet processing Download PDFInfo
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- CN201427995Y CN201427995Y CN2009200779068U CN200920077906U CN201427995Y CN 201427995 Y CN201427995 Y CN 201427995Y CN 2009200779068 U CN2009200779068 U CN 2009200779068U CN 200920077906 U CN200920077906 U CN 200920077906U CN 201427995 Y CN201427995 Y CN 201427995Y
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Abstract
The utility model relates to a system by using a mist chemical agent to carry out single-side continuous chemical wet processing, which comprises an atomization device which can enable an air chemicalagent and a liquid chemical agent to generate the mist chemical agent, a plurality of chemical wet processing chamber units, a plurality of deionized water spraying wet processing chamber units, a plurality of isopropanol (IPA) drying processing chamber units and a transporting mechanism for orderly transporting pre-processed material into each processing unit chamber. The system by using a mistchemical agent to carry out single-side continuous chemical wet processing also comprises an atomizing knife with a plurality of mist chemical agent jets, capillary tubes are arranged at the middle ofthe mist chemical agent jets, and the mist chemical agent is sprayed to the surface of the pre-processed material in a fan shape through the space of the mist chemical agent jets at the periphery ofthe capillary tubes. The system enables the single-side continuous chemical wet processing to become simple and feasible, and effectively solves the problem of cross sully caused that a traditional fixing chemical art groove repeatedly uses chemical liquid; and meanwhile, the chemical art processing uniformity, the flexibility and the product of panel substrates and pre-processed material film substrates are increased.
Description
Technical field
The utility model relates to a kind ofly handles the system of solar cell/flat-panel monitor substrate or film-substrate with chemical process, especially on a large scale substrate or film-substrate are carried out the wet treatment of single face continuous chemical with vaporific chemical agent system.
Background technology
It is essential and extremely important processing step and technology during substrates such as solar cell and new-type display screen are produced that wet chemical is handled.It not only is used to dispel substrate surface damage and metal and the non-metal contaminants that causes because of previous work program, and can also be the substrate artistic face state (as the long wool and phosphoric acid glass (PSG) cleaning of solar cell substrates, it is directly determining photovoltaic efficiency of conversion and work-ing life thereof) of an optimum of next step technological process formation.Equally, this procedure for wet processing has occupied whole solar cell/flat-panel monitor substrate, and more than the 25%-30% of film-substrate production process.Therefore, unsuitable procedure for wet processing can be given substrate surface, and film-substrate causes damage, faults such as circuit efficiency and work-ing life, and the consumption of excessive chemical liquids and deionized water, thus give the quality of production, output and energy consumption have caused bigger negative impact.In solar cell/flat-panel monitor substrate production process, wet treatment process is directly connected to its photovoltaic/photoelectric efficiency of conversion and work-ing life.
Current in the solar cell substrates production process wet chemical treatment technology of most critical remain substrate and go damage in the mechanical workout, the dispeling of surperficial long wool and phosphoric acid glass.Because " temperature control easily " of alkali electroless liquid reaches the characteristics of " mild reaction ", sodium hydroxide (NaOH) and potassium hydroxide (KOH) making herbs into wool etching are widely used, but it is long also to exist the process time, the shortcoming that corresponding industrial production is slower.
As semiconductor integrated circuit industry initial period, scientist, the slip-stick artist constantly studies, and explores new processing method and relevant device, currently some otherly is suggested and uses being modified with alternative chemical treatment technology menu.For example, people add buffer reagent in the production technique chemical liquids, control the speed and the homogeneity of long wool as Virahol (IPA).Add ozone (O in deionized water
3+ H
2O) or diluted hydrofluoric acid (HF+H
2O) make the silicon solar substrate surface become hydrophobicity, few to reach the water mark, the purpose that particle is few etc.
At current solar cell/flat-panel monitor substrate, and in the film-substrate large-scale production process process, at present multiple-grooved wet treatment method still occupies main flow, is placed on as one group of silicon chip of solar cell and carries out burn in a series of cell bodies that contain different liqs chemical agent and deionized water and clean, dash and drench.Its main deficiency has been to use too complicated automation control system (organizing substrate loading and unloading and transmission manipulator) more and has uninterruptedly monitored for the chemical pH value that guarantees the substrate process consistency, adds and filters Controlling System.More chemical liquids, deionized water have been consumed.The a large amount of sharply heat absorptions that take place under the volume production situation or the chemical reaction of heat release are (based on the low-cost business prototype of sun power industry, be generally greater than every batch more than 400 and greater than 2000 wet treatment production requirements hourly), thereby influenced the consistence of quality product and technology, caused the defective of product to a certain extent; Common more than 400 every batch get at last to do adopted hot air circulation, or centrifuge dripping can bring big water gaging mark and particle contamination problems.Fixedly in the wet treatment of multiple-grooved chemical technology, because the repeated use of chemical liquids can bring serious product to intersect again and stain.
At present, wet treatment apparatus that other are new and Technology are used in the big rule production process of cleaning solar energy cell substrate too, for example, the continuous race blade technolgy and the equipment of the directed positioning roller press roll of Germany RENA company, because tension force than high viscosity chemical formulation liquid, add directed the location upward guiding and the location of bottom roller, can realize the sun power substrate in the single face etching (lower surface) of running continuously under the sheet form, and the function of cleaning.But it does not have to solve fixing chemical technology groove chemical liquids and reuses the product intersection contamination problem of being brought, can't keep chemical liquids pH value and every batch of consistent problem of substrate wet treatment process effect, and its directed location is gone up the guiding of bottom roller and the additional minute-pressure of the improper generation of the localized debugging of substrate and the substrate face that is etched and is in the characteristics of one side with conveying roller and has brought the surperficial many strips roller of new problem-solar battery sheet impression, can influence solar battery sheet photovoltaic efficiency of conversion and work-ing life to a certain extent. along with the more and more thinner trend of solar cell substrates, the localized structure of the guiding of last bottom roller and substrate, very easily cause strong stress, increase fragmentation rate in substrate inside.For example some offshore companies are immersed in the film-substrate wireline reel of tightening in the chemical technology groove in film-substrate coating single side explained hereafter again, produce thin film substrate material wrinkling/break/chemical liquids is penetrated into serious problems such as the back side,
When solar cell/flat-panel monitor substrate (FPD) and film-substrate just when bigger thinner size direction develops, the company of this industry, the scientists and engineers also more and more is concerned about the functional performance value ratio (COO) of this treatment facility and technology.In other words, they more and more are concerned about each substrate (solar cell or flat-panel monitor substrate), or the workmanship of unit sizes film and cost thereof.In above-mentioned substrate wet treatment field, no matter in any one function cost-efficiency analysis, deionized water and liquid chemical agent have all accounted for maximum consumption proportion.It is deionized water cost the highest (32%) in 200 millimeters the silicon chip procedure for wet processing that the CORDON of Intel company and ROBERT disclose at diameter in their functional price ratio (COO) analysis report, liquid chemical agent the 3rd (16%), the basic equipment cost accounts for second (23%).The consumption that reduces deionized water and chemical agent not only helps functional price ratio (COO), the more important thing is to help environment.In solar cell substrates and flat-panel monitor substrate use on a large scale and produce, quality, cost, and will become three new big critical function cost performance (COO) analytical elements work-ing life.
People are seeking new method always and technology makes every effort to guaranteeing that reducing intersection stains, reduce functional price ratio when increasing output, be unit time mass type output/(equipment+total cost of production), under the situation that solar cell/flat-panel monitor (FPD) substrate and film-substrate are just developing towards bigger thinner size direction, also more and more higher to the requirement of particle contamination and water mark.Be analogous to the semiconductor integrated circuit industry, use the still less etching of chemical agent, clean (gaseous state or gas) also has been proposed to replace specific wet processing methods (as plasma etching, making herbs into wool etc.).But such process only can be dispeled the pollutent or the material of particular type, but stays some atypical material grains and metal pollutants from its dry-cure process.These methods have been quickened the caused substrate surface damage of isoionic activity because the ultraviolet ray of using is more active.And the drying treatment method does not possess the wet treatment method can dispel predetermined substance particulate effect in cleaning process, because it can not use the specific wet chemical that has prepared to handle compound agent, reason be these compound agentes can not they steam or gas in have (NaOH+IPA+H for example
2O).Therefore, the wet chemical treatment technology still can be in dominant position in solar cell substrates and flat-panel monitor substrate wet treatment industry in decades from now on.
Therefore, on solar cell/flat-panel monitor (FPD) substrate and the film-substrate market to producing a kind of wet treatment advanced technology, simple and reliable, and a kind of novel wet processing methods and system that cost is saved greatly, especially there are the intensive demand in substrate and film-substrate chemistry single face wet processing methods and system
Novel content
The purpose of this utility model is to provide a kind of usefulness system that vaporific chemical agent carries out the wet treatment of single face continuous chemical, make solar cell/flat-panel monitor substrate or the quick wet treatment of the film-substrate single face chemical liquids simple possible that becomes, efficiently solve conventional fixed chemical technology groove and reuse the intersection of chemical liquids and stain problem; Be immersed in the substrate material that the film-substrate wireline reel in the chemical technology groove produces wrinkling/break/chemical liquids is penetrated into back side problem, homogeneity, handiness and output that solar cell/flat-panel monitor substrate or film-substrate single face chemical technology are handled have been strengthened simultaneously.
For achieving the above object, the technical solution of the utility model is as follows:
The system that the vaporific chemical agent of a kind of usefulness carries out the wet treatment of single face continuous chemical, comprise the spraying gun that the aerochemistry agent that can make heating and liquid chemical agent produce vaporific chemical agent, several wet chemical process chambers unit, several deionized water spray wet treatment cavity unit, and Virahol (IPA) is got dry-cure cavity unit, and pending material sent into the intravital transport sector in each processing unit chamber successively, this system also comprises the spraying cutter, this spraying cutter has a plurality of vaporific chemical agent loopholes, be provided with kapillary in the middle of the jet orifice, described vaporific chemical agent is the surface of fan-shaped spray to pending material by the jet orifice space of kapillary periphery.
Described diameter of section size capillaceous is less than 1mm.
Also have the heating isothermal device that makes vaporific chemical agent insulation between described spraying gun and the spraying cutter.
Described pending material is solar cell or flat-panel monitor substrate.Described transport sector comprises the rotation transmissions synchronously of many groups and at the dislocation roller that differs 1-3mm perpendicular to transmission direction.
Described pending materials for solar cells or flat-panel monitor film-substrate.Described transport sector comprises two tightening pulleys that are used for material loading and blanking, lays respectively at the material loading end and the blanking end of treatment chamber, and described film-substrate is wound on the tightening pulley, and described tightening pulley has and can detect automatically and the transmitter of adjustment of tonicity.
Producing vaporific chemical agent by chemical gas that heats and liquid chemical agent in spraying gun comprises:
The chemical gas of heating is ozone gas (O
3), liquid chemical agent is sodium hydroxide (NaOH);
And/or the chemical gas of heating is ozone gas (O
3), liquid chemical agent is potassium hydroxide (KOH);
And/or the chemical gas of heating is ozone gas (O
3), liquid chemical agent is deionized water (H2O);
And/or the chemical gas of heating is oxide gas (N
2), liquid chemical agent is the film coating agent of heating back low-viscosity;
And/or the chemical gas of heating is ozone gas (O
3), liquid chemical agent is that nitric acid/hydrofluoric acid is main mixing acid (HNO
3+ HF);
And/or the chemical gas of heating is ozone gas (O
3), liquid chemical agent is that sulfuric acid is main mixing acid (H
2SO
4).
The pressure range of described liquid chemical agent is a 1-10 pound per square inch; The pressure range of aerochemistry agent is a 10-20 pound per square inch.
The utility model makes solar cell/flat-panel monitor substrate and the quick wet treatment of the film-substrate single face chemical liquids simple possible that becomes, as silicon single crystal/polysilicon solar battery slice single face " the quick making herbs into wool of acidic chemical liquid " production technique, greatly improved the turnout of high-quality product. this utility model has broken through the traditional chemical liquid bath and has cleaned the big and big bottleneck of deionized water rinsing consumption with the acid amount; It is sharply overheated or cold excessively to efficiently solve traditional chemical liquid bath cleaning chemical liquids reaction under the volume production situation, has a strong impact on the defective of product production and process consistency; Efficiently solve conventional fixed chemical technology groove and reuse the intersection contamination problem of chemical liquids; And be immersed in the substrate material that the film-substrate wireline reel in the chemical technology groove produces wrinkling/break/chemical liquids is penetrated into key issues such as the back side, also fundamentally solved conventional air or nitrogen and blown/dry the water mark of generation and the defectives such as particle of increase; Strengthened substrate simultaneously, homogeneity, handiness and the output of the wet treatment of film-substrate single face chemical technology.This utility model system can not only save chemical liquids and deionized water, the handiness production that can also bring huge technology and product for this industry.
Description of drawings
Fig. 1 is the synoptic diagram that the vaporific chemical agent of usefulness of the present utility model carries out single face continuous chemical wet method treatment system.
Fig. 2 is the utility model carries out single face continuous chemical wet method treatment system with vaporific chemical agent a structure diagram.
Fig. 3 is the structural representation of spraying cutter of the present utility model (foggy knife).
Embodiment
The system that the vaporific chemical agent of usefulness of the present utility model carries out the wet treatment of single face continuous chemical can be used for solar cell or flat-panel monitor substrate or film-substrate, or needs to carry out the element that wet chemical is handled in other semiconductor integrated circuit.Below be example just with substrate and film-substrate, describe the constitutional features and the advantage of wet chemical treatment system of the present utility model in detail.
The system that carries out the wet treatment of single face continuous chemical with vaporific chemical agent comprises the transport sector that is used to carry pending material, can make the aerochemistry agent of heating and the spraying gun that liquid chemical agent produces vaporific chemical agent, several wet chemical process chambers unit, several deionized water spray (can add super/million acoustic energies) wet treatment process cavity unit, Virahol (IPA) is got dried cavity unit and is formed.The various vaporific chemical agent that is heated and pressurizes enters in the corresponding art breading cavity by designing unique corresponding dynamic spraying cutter (foggy knife) according to sequence of control and process menu.These miniature vaporific chemical agents just can evenly be sprayed on corresponding chemical liquid film on substrate or film-substrate top layer and the periphery because of being subjected to heat and pressure effect, dynamically form an effective chemical art breading film on every substrate or film-substrate surface and periphery.Chemical technology is handled the reaction times of film by its concentration, and the transmission speed of temperature and pending material is controlled.
As depicted in figs. 1 and 2, horizontal processing cavity 1, its top is furnished with some spraying cuttves 4, and substrate 3a or film-substrate 3b (also can use artificial transmission and semi-automatic transmission to send into successively in the horizontal processing cavity 1 by automatic transport sector.All material and transport sectors that contact with chemical liquids or gas in the described cavity are to make in the chemical liquids of respective handling technology or the material substance of gas by refusing corruption.
Illustrated the transmission structure of solar cell or flat-panel monitor substrate 3a among Fig. 2 a, comprise many group dislocation rollers 2, synchrodrive conical gear 18 and servomotor 17, dislocation roller 2 is differing 1-3mm perpendicular to transmission direction, substrate 3a places above the dislocation roller 2, servomotor 17 drives synchronous conical gear 18 and rotates, and drives many group dislocation rollers 2 and rotates synchronously, and substrate 3a successive is successively entered in the corresponding art breading cavity 1.
Illustrated to be used to transmit the transmission structure of film-substrate 3b among Fig. 2 b, also have many group dislocation rollers 2, but have a wireline reel and tightening pulley 5 respectively in process chambers 1 material loading side and blanking side, two tightening pulleys 5 respectively connect a servomotor 17, film-substrate 3b places on the wireline reel of material loading and discharging area, is driven by tightening pulley 5, and film-substrate 3b moves forward on dislocation roller 2, sent into continuously in the corresponding art breading cavity, after wet chemical is handled, exported cavity 1 again.The effect of dislocation roller 2 is to guarantee that film-substrate 3b wrinkle can not take place, and this tightening pulley 5 has tension pick-up, is used for detecting and regulating automatically the tension force of film-substrate, and film-substrate 3b can not broken or wrinkle.
Chemical agent by valve 15 by automatic acid supplying system or manually add chemical flow container 13, one group of liquid level sensor 12 is liquid levels of this chemical liquids in being used for treating processes, one group of thermometric transmitter 10 and well heater 14 are installed on the chemical flow container 13, are used for temperature survey and control.Specific gas (as nitrogen, N
2) be transported to by the road by gas pressure reducer 7 and gas control valve 6 in the atomization unit 4 in each group spraying cutter 4 of process chambers inside, and go out by the chemical liquids mixture ratio atomised jet of chemical gas flow control valve 9 and 8 controls of chemical liquids control valve.Single face continuous chemical wet method treatment system of the present utility model also comprises heating isothermal device, makes the vaporific chemical agent that has heated remain on certain temperature, with requirement and the consistence of guaranteeing technology.Described heating isothermal device, for example can be that vaporific chemical agent flow line is located in the closed pipeline that has constant temperature gas or liquid, make vaporific chemical agent mobile entire path all be in the isothermal environment that is determined by technology, therefore this vaporific chemical agent also can keep its specific temperature.The tapping valve 16 that vaporific chemical agent flow line is positioned at the process chambers bottom can be connected to (as spent acid alkali lye treatment system, industrial wastewater treatment system, or chemical liquids recycling system) on the corresponding handling procedure.This vaporific chemical liquids procedure for wet processing is not changeless, but can be according to the process combination of reality, and cooperates other chemical liquid and chemical gas to make up flexibly.
The utility model also comprises the design of a spraying cutter (foggy knife), and it makes atomized liquid become flat fan to be sprayed on substrate surface and the periphery.As shown in Figure 3, the spraying cutter comprises PTFE/PFA air knife main body 41, spray capillary 42, chemical liquids import 43, chemical liquids joint 44, aerochemistry agent import 45, aerochemistry agent gas connection 46, pressurized gas passage 47, vaporific chemical liquids jet orifice 48.The spraying cutter is made up of many groups sprayer unit, and each sprayer unit is by middle kapillary 41 supplying chemical liquid, and kapillary is positioned at the centre of whole vaporific chemical liquids jet orifice 48.When technology is carried out, chemical liquids is in chemical liquids import 43 enters kapillary 41, and the aerochemistry agent of injection enters pressurized gas passage 47, the siphonic effect that gas flow produced through aerochemistry agent import 45, make chemical liquids flow out kapillary, and blow out vaporific fine particle by aerodynamic force.These small-particles are directly injected to substrate surface.Diameter of section capillaceous is of a size of less than 1mm, and is thin more, and gaseous tension is big more, vaporific thin more.
Pending substrate that will the wet treatment of single face continuous chemical or film-substrate are sent in the corresponding art breading cavity successively by transmission structure automatically, spraying cutter (foggy knife) is handled film single face uniaxially with even vaporific chemical technology and dynamically is sprayed on substrate surface and the periphery, it shown in the accompanying drawing one of them wet chemical process chambers unit, each art breading cavity Elementary Function is independent of each other, but is analogous to the unit in the accompanying drawing.
In treating processes, the mist cutter that has at least one group of atomization unit to constitute will be applied to the wet chemical of substrate transport or film-substrate and handle.Have at least the input port of an aqueous chemical formula agent will be connected above-mentioned atomization unit and at least one chemical gas input port is connected to above-mentioned atomization unit.The pressure range of liquid chemical agent is a 1-10 pound per square inch.The pressure range of aerochemistry agent is a 10-20 pound per square inch.
Chemical gas and liquid chemical agent by heating produce vaporific chemical agent in spraying gun, specifically include but not limited to:
Use the ozone gas (O of heating
3) atomizing sodium hydroxide (NaOH) dispel substrate physical abuse and surperficial long wool;
Use the ozone gas (O of heating
3) atomizing potassium hydroxide (KOH) dispel substrate physical abuse and surperficial long wool;
Use the ozone gas (O of heating
3) atomizing deionized water (H2O) dispels the common particle of substrate and peel off optical cement;
Use heated nitrogen (N
2) or the specific film coating agent of air atomizing of dried and clean, as: heating back low-viscosity just/negative optical cement agent;
Use the ozone gas (O of heating
3) atomizing nitric acid/hydrofluoric acid is main mixing acid (HNO
3+ HF) dispel solar cell substrates physical abuse and surperficial long wool;
Use the ozone gas (O of heating
3) atomizing sulfuric acid is main mixing acid (H
2SO
4) dispel solar cell substrates physical abuse and surperficial long wool.
Because vaporific chemical liquids by gas injection mixing generation, is different from gas is blown into liquid in dissolving.Compare with the wet treatment of traditional chemical liquid bath, the utility model has also been broken through the bottleneck of particular chemical gas limited concentration in deionized water.According to the formula of chemist Henri, the solubleness of gas in liquid is by liquid pressure and temperature decision, as ozone gas (O
3) maxima solubility in the traditional chemical liquid bath is less than 20ppm, and atomizing ozone gas (O of the present utility model
3) maxima solubility can reach more than the 100ppm.
After system starts, equipment self-inspection, the dislocation roller that comprises transport sector, on/detection and the adjusting automatically of blanking film-substrate wireline reel tension force, and the liquid level of all chemical flow containers and chemical liquids temperature, when all devices to be determined and processing condition all are satisfied, put successively and treat the wet treatment substrate or open film-substrate starting material wireline reel servomotor, manage inside cavity then throughout and carry out every wet treatment process production continuously by pre-set chemical technology step.
After each vaporific chemical agent was handled, the quick spray Cleaning for High Capacity and the heated nitrogen of deionized water that can/million acoustic energies super with having were carried out corresponding technology isothermal, nitrogen deoxygenation processing steps such as (preventing material oxidation).The wet treatment time is much shorter compared with slot type that is now using or race chip wet treatment technology, and it only needs to clean chemical processing agent seldom remaining on substrate or the film-substrate.
The front provides the description to preferred embodiment, so that any technician in this area can use or utilize the utility model.To this preferred embodiment, those skilled in the art can make various modifications or conversion on the basis that does not break away from the utility model principle.Should be appreciated that in the specification sheets for embodiment only be a kind of preferred embodiment, modification or conversion that this embodiment is made do not break away from protection domain of the present utility model.
Claims (9)
1. system that carries out the wet treatment of single face continuous chemical with vaporific chemical agent, comprise the spraying gun that the aerochemistry agent that can make heating and liquid chemical agent produce vaporific chemical agent, several wet chemical process chambers unit, several deionized water spray wet treatment cavity unit, and Virahol (IPA) is got dry-cure cavity unit, and pending material sent into the intravital transport sector in each processing unit chamber successively, it is characterized in that, this system also comprises the spraying cutter, this spraying cutter has a plurality of vaporific chemical agent loopholes, be provided with kapillary in the middle of the jet orifice, described vaporific chemical agent is the surface of fan-shaped spray to pending material by the jet orifice space of kapillary periphery.
2. the system that the vaporific chemical agent of usefulness according to claim 1 carries out the wet treatment of single face continuous chemical is characterized in that, described diameter of section size capillaceous is less than 1mm.
3. the system that the vaporific chemical agent of usefulness according to claim 2 carries out the wet treatment of single face continuous chemical is characterized in that, produces vaporific chemical agent by chemical gas that heats and liquid chemical agent in spraying gun and comprises:
The chemical gas of heating is ozone gas (O
3), liquid chemical agent is sodium hydroxide (NaOH);
And/or the chemical gas of heating is ozone gas (O
3), liquid chemical agent is potassium hydroxide (KOH);
And/or the chemical gas of heating is ozone gas (O
3), liquid chemical agent is deionized water (H2O);
And/or the chemical gas of heating is oxide gas (N
2), liquid chemical agent is the film coating agent of heating back low-viscosity;
And/or the chemical gas of heating is ozone gas (O
3), liquid chemical agent is that nitric acid/hydrofluoric acid is main mixing acid (HNO
3+ HF);
And/or the chemical gas of heating is ozone gas (O
3), liquid chemical agent is that sulfuric acid is main mixing acid (H2
SO
4).
4. the system that the vaporific chemical agent of usefulness according to claim 3 carries out the wet treatment of single face continuous chemical is characterized in that, the pressure range of described liquid chemical agent is a 1-10 pound per square inch; The pressure range of aerochemistry agent is a 10-20 pound per square inch.
5. the system that the vaporific chemical agent of usefulness according to claim 4 carries out the wet treatment of single face continuous chemical is characterized in that, also has the heating isothermal device that makes vaporific chemical agent insulation between described spraying gun and the spraying cutter.
6. the system that carries out the wet treatment of single face continuous chemical according to the vaporific chemical agent of each described usefulness of claim 1 to 5 is characterized in that, described pending material is solar cell or flat-panel monitor substrate.
7. wet chemical treatment system according to claim 6, it is characterized in that, described transport sector comprises many groups at the dislocation roller that differs 1-3mm perpendicular to transmission direction, and servomotor and synchrodrive conical gear, and conical gear drives how group dislocation rollers rotate synchronously synchronously.
8. the system that carries out the wet treatment of single face continuous chemical according to the vaporific chemical agent of each described usefulness of claim 1 to 5 is characterized in that, described pending material is solar cell or flat-panel monitor film-substrate.
9. the system that the vaporific chemical agent of usefulness according to claim 8 carries out the wet treatment of single face continuous chemical, it is characterized in that, described transport sector comprises many groups and at the dislocation roller that differs 1-3mm perpendicular to transmission direction, wireline reel and tightening pulley with material loading end that lays respectively at treatment chamber and blanking end, described film-substrate places on the wireline reel, driven by described tightening pulley and to drive the dislocation roller and rotate transmission synchronously, described tightening pulley also has and can detect automatically and the transmitter of adjustment of tonicity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200779068U CN201427995Y (en) | 2009-07-07 | 2009-07-07 | System by using mist chemical agent to carry out single-side continuous chemical wet processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200779068U CN201427995Y (en) | 2009-07-07 | 2009-07-07 | System by using mist chemical agent to carry out single-side continuous chemical wet processing |
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| Publication Number | Publication Date |
|---|---|
| CN201427995Y true CN201427995Y (en) | 2010-03-24 |
Family
ID=42031725
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| CN2009200779068U Expired - Fee Related CN201427995Y (en) | 2009-07-07 | 2009-07-07 | System by using mist chemical agent to carry out single-side continuous chemical wet processing |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103049015A (en) * | 2012-12-20 | 2013-04-17 | 北京七星华创电子股份有限公司 | Device and method for controlling temperature of chemical liquid |
| CN104209867A (en) * | 2013-08-27 | 2014-12-17 | 东旭集团有限公司 | Method and system for carrying out surface treatment on glass substrate |
| CN105914170A (en) * | 2016-05-12 | 2016-08-31 | 华南师范大学 | Device used for producing black silicon |
| CN106856161A (en) * | 2016-12-14 | 2017-06-16 | 北京七星华创电子股份有限公司 | A kind of method of use two-phase flow atomization cleaning wafer surface pollutant |
| CN112599458A (en) * | 2021-03-03 | 2021-04-02 | 西安奕斯伟硅片技术有限公司 | Silicon wafer etching device and method |
| CN114930506A (en) * | 2019-11-22 | 2022-08-19 | 上海思恩电子信息科技有限公司 | Method and apparatus for wet processing of integrated circuit substrates using a mixture of chemical vapors and gases |
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2009
- 2009-07-07 CN CN2009200779068U patent/CN201427995Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103049015A (en) * | 2012-12-20 | 2013-04-17 | 北京七星华创电子股份有限公司 | Device and method for controlling temperature of chemical liquid |
| CN104209867A (en) * | 2013-08-27 | 2014-12-17 | 东旭集团有限公司 | Method and system for carrying out surface treatment on glass substrate |
| CN105914170A (en) * | 2016-05-12 | 2016-08-31 | 华南师范大学 | Device used for producing black silicon |
| CN106856161A (en) * | 2016-12-14 | 2017-06-16 | 北京七星华创电子股份有限公司 | A kind of method of use two-phase flow atomization cleaning wafer surface pollutant |
| CN106856161B (en) * | 2016-12-14 | 2019-12-13 | 北京七星华创电子股份有限公司 | method for cleaning pollutants on surface of wafer by two-phase flow atomization |
| CN114930506A (en) * | 2019-11-22 | 2022-08-19 | 上海思恩电子信息科技有限公司 | Method and apparatus for wet processing of integrated circuit substrates using a mixture of chemical vapors and gases |
| CN114930506B (en) * | 2019-11-22 | 2023-07-07 | 上海思恩电子信息科技有限公司 | Method and apparatus for wet processing integrated circuit substrates using a mixture of chemical vapor and chemical gas |
| CN112599458A (en) * | 2021-03-03 | 2021-04-02 | 西安奕斯伟硅片技术有限公司 | Silicon wafer etching device and method |
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