CN218291099U

CN218291099U - Reduce loading structure and tool that appear five colourings when coating deposit

Info

Publication number: CN218291099U
Application number: CN202221293268.5U
Authority: CN
Inventors: 刘鑫; 蒋懿
Original assignee: Chengdu Tuowei High Tech Photoelectric Technology Co ltd
Current assignee: Chengdu Tuowei High Tech Photoelectric Technology Co ltd
Priority date: 2022-05-27
Filing date: 2022-05-27
Publication date: 2023-01-13
Anticipated expiration: 2032-05-27

Abstract

The application discloses appear loading structure and tool of five colours when reducing coating deposit, including a plurality of loading portions, each limit of work piece corresponds a loading portion at least, each loading portion is including supporting adapting unit and at least one support portion, and support portion is connected with supporting adapting unit, is provided with the support portion contact surface that contacts with the work piece when the work piece loads in the support portion, and the length direction of support portion contact surface is by the distance that the work piece edge extends to the work piece center when loading, and the long x1 value of support portion contact surface <2cm, and the width of support portion contact surface is y1, and the thickness of support portion is z1, and the y1 value is far less than the length of side of work piece. The colorful phenomenon appears when this application reduces the coating deposit, has improved the effective usable floor area of work piece.

Description

Colorful loading structure and jig for reducing coating deposition

Technical Field

The application relates to the field of magnetron sputtering, in particular to a colorful loading structure and a fixture for reducing coating deposition.

Background

In the magnetron sputtering process, a workpiece is loaded on a loading structure of a jig for magnetron sputtering, and a coating is sputtered on the workpiece, the loading structure of the existing jig is shown in fig. 1-2, the loading structure is a square frame 1, the square frame 1 is surrounded by 4 loading parts 2 with a U-shaped section along the length direction, wherein the depth of the U-shaped groove is 2cm, during loading, the edge of one side of the workpiece is inserted into the U-shaped groove of 1 loading part 2, then the second loading part 2 is moved, the edge of the second side of the workpiece enters the U-shaped groove of the second loading part 2, then the third loading part 2 is moved, the edge of the third side of the workpiece enters the U-shaped groove of the third loading part 2, finally the fourth loading part 2 is moved, the edge of the last side of the workpiece enters the U-shaped groove of the fourth loading part 2, loading of the workpiece is completed, then the jig with the loading structure, the workpiece is subjected to the magnetron sputtering process step, the magnetron sputtering process is completed, and the coating is formed on the workpiece.

The workpiece on the loading structure has a five-color phenomenon during magnetron sputtering coating deposition, and the workpiece with the five-color phenomenon has short service life on one hand and influences the attractiveness of the workpiece on the other hand.

SUMMERY OF THE UTILITY MODEL

Based on the above problem, the application provides a loading structure that appears the multicolour when reducing the coating deposit, and the phenomenon that appears the multicolour when this loading structure that appears the multicolour when reducing the coating deposit has improved the effective usable floor area of work piece.

The utility model provides a reduce loading structure that five colourings appear when coating deposit, includes a plurality of loading portions, and each limit of work piece corresponds a loading portion at least, each loading portion is including supporting adapting unit and at least one support portion, and the support portion is connected with supporting adapting unit, is provided with the support portion contact surface that contacts with the work piece when the work piece loads on the support portion, and the length direction of support portion contact surface is the distance that extends to the work piece center by the work piece edge when loading, and the long x1 value of support portion contact surface <2cm, and the width of support portion contact surface is y1, and the thickness of support portion is z1, and the y1 value is far less than the length of side of work piece.

Optionally, each loading part further comprises at least one card part, the card part is connected to the support connecting part, the length x2 value of the contact surface of the card part is less than 2cm, the width of the contact surface of the card part is y1, the thickness of the card part is z1, and the value of y2 is far smaller than the side length of the workpiece.

Optionally, the x1 value, y1 value and z1 value are determined according to the weight of the workpiece and the moving speed in the deposition process.

Optionally, the x2 value, y2 value and z2 value are determined according to the weight of the workpiece and the moving speed in the deposition process.

Optionally, the x1 value is 5mm.

Optionally, the x2 value is 5mm.

Optionally, the card contact surface and the holder contact surface are both strip-shaped, where x1 is much larger than y1 or z1, and x2 is much larger than y2 or z 2. A loading structure that reduces the occurrence of color artifacts upon coating deposition.

Optionally, x1 and x2 are straight lines, y1 and y2 are arc lines, a far surface gradually far away from the workpiece is further disposed at an end of the clamping portion contact surface far away from the supporting and connecting component, and a far surface gradually far away from the workpiece is further disposed at an end of the supporting portion contact surface far away from the supporting and connecting component.

Optionally, the clamping portion is a truncated cone shape gradually opened towards the workpiece direction from the supporting and connecting member, and the support portion is a truncated cone shape gradually opened towards the workpiece direction from the supporting and connecting member.

The application also provides a jig.

A jig comprises the loading structure for reducing the occurrence of five colors during coating deposition.

The invention has the following principle and beneficial effects:

the inventor of the application researches and analyzes the existing coated workpiece with the colorful phenomenon, and finds that the part of the coating with the colorful phenomenon is positioned at a position 2cm away from the edge of the workpiece, and the distance is just the depth of the U-shaped groove of the loading part 2, and the colorful phenomenon is at the junction of plating and non-plating. Thus, the phenomenon of the festoon is related to the loading structure.

This application is through the contact with loading structure and work piece by the face contact of large tracts of land change for the contact of very little area (similar to the point contact), the multicoloured phenomenon appears when having reduced the coating deposit on the one hand, and on the other hand has increased the picture layer area of work piece to prolong the life of work piece on the one hand, improved the pleasing to the eye degree of work piece, on the other hand has still increased the effective usable floor area of work piece.

Drawings

FIG. 1 is a schematic view of a loading structure in the background art of the present invention;

FIG. 2 is a schematic structural view of a loading member according to the background art of the present invention;

FIG. 3 is a schematic bottom view of a loading structure for reducing the appearance of color artifacts during coating deposition in accordance with the present invention;

FIG. 4 is a schematic view of the loading part with a locking part according to the present invention;

fig. 5 is a schematic structural view of a locking portion (a holder portion) of the present invention;

fig. 6 is a schematic structural view of a locking portion (holder portion) of the present invention;

fig. 7 is a schematic structural view of a locking portion (holder portion) of the present invention;

fig. 8 is a schematic structural view of a locking portion (a holding portion) of the present invention.

Detailed Description

The present application will be further described with reference to the accompanying drawings.

In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc. are directions or positional relationships based on the directions or positional relationships shown in the drawings, or directions or positional relationships conventionally placed when the products of the present invention are used, and are only for convenience of description of the present invention and simplification of the description, but not for indication or suggestion that the indicated device or element must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another, and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be further noted that, unless otherwise explicitly specified or limited, the terms "disposed," "opened," "mounted," "connected," and "connected" are to be construed broadly, e.g., as either a fixed connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 3, fig. 3 is a schematic bottom view of a loading structure for reducing the occurrence of five colors during coating deposition according to the present invention.

The utility model provides a reduce loading structure that five colourings appear when coating deposits, includes a plurality of loading portions 1, each limit of work piece 4 corresponds a loading portion 1 at least, each loading portion 1 includes and supports adapting unit 2 and at least one support portion 3, support portion 3 is connected with supporting adapting unit 2, be provided with on the support portion 3 with the 3 contact surface 5 of support portion that work piece 4 contacted when loading of work piece 4, the length direction of support portion 3 contact surface 5 is the distance that extends to work piece 4 center by work piece 4 edge when loading, the long x1 value of support portion 3 contact surface 5 <2cm.

It should be understood by those skilled in the art that the support connection member 2 of the present invention is connected to the moving member of the jig, which is the same as that of the prior art.

In one or more specific embodiments of the present invention, the value of x1, the value of y1, and the value of z1 of the contact surface 5 of the holder 3 are determined according to the weight of the workpiece 4 and the movement speed during the deposition process, and the smaller the value of x1 and the value of y1, the better the stability of the workpiece 4 during movement.

In one or more particular embodiments of the present invention, the length x1 of the contact surface 5 of the receptacle 3 is 5mm.

Referring to fig. 4, in one or more specific embodiments of the present invention, each loading portion 1 further includes at least one locking portion 6, the locking portion 6 is connected to the supporting and connecting member 2, when the workpiece 4 is loaded, the locking portion 6 is located above the workpiece 4, the supporting portion 3 is located below the workpiece 4, the workpiece 4 is held in the middle, and the locking portion 6 is disposed to make the movement of the workpiece 4 more stable. The length x2 of the contact surface 5 of the card portion 6 is <2cm.

In one or more specific embodiments of the present invention, the value of x2, the value of y2, and the value of z2 of the contact surface 5 of the card portion 6 are determined according to the weight of the workpiece 4 and the movement speed during the deposition process, and the smaller the value of x2 and the value of y2, the better the stability of the workpiece 4 during movement.

In one or more specific embodiments of the present invention, the length x2 value of the contact surface 5 of the card portion 6 is <2cm.

In one or more embodiments of the present invention, referring to fig. 5, in fig. 5, the contact surface 5 of the engaging portion 6 (the receiving portion 3) is rectangular, and the engaging portion 6 (the receiving portion 3) is rectangular.

In one or more specific embodiments of the present invention, please refer to fig. 6, in fig. 6, the contact surface 5 of the locking portion 6 (the supporting portion 3) is a strip shape, the x1 value is much larger than the y1 value or the z1 value, and the x2 value is much larger than the y2 value or the z2 value, so as to reduce the influence of the loading structure on the workpiece 4, thereby reducing the occurrence probability of the five colors.

In one or more specific embodiments of the present invention, please refer to fig. 7, in fig. 7, x1 and x2 of the contact surface 5 of the card portion 6 (the support portion 3) are straight lines, y1 and y2 are arc lines, and the end of the contact surface 5 of the card portion 6 (the support portion 3) away from the support connecting component 2 is further provided with a far surface 7 away from the workpiece 4 gradually, so that the far surface 7 is arranged, and the contact surface 5 of the card portion 6 (the support portion 3) is less under the stable condition when the workpiece 4 is ensured to move, the influence of the loading structure on the workpiece 4 is reduced, and the occurrence probability of the five colors is reduced.

In one or more specific embodiments of the present invention, please refer to fig. 8, in fig. 8, the locking portion 6 (the support portion 3) is a truncated cone gradually opened from the support connecting component 2 to the workpiece 4, and the locking portion 6 (the support portion 3) is a truncated cone, so that under the condition of ensuring the stability of the movement of the workpiece 4, the contact surface 5 of the locking portion 6 (the support portion 3) is less, the influence of the loading structure on the workpiece 4 is reduced, and the occurrence probability of the five colors is reduced.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made to the present application by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A loading structure for reducing the occurrence of five colors during coating deposition comprises a plurality of loading parts (1), wherein each edge of a workpiece (4) at least corresponds to one loading part (1), and is characterized in that: each loading part (1) comprises a supporting connecting part (2) and at least one support part (3), the support parts (3) are connected with the supporting connecting part (2), the support parts (3) are provided with support part (3) contact surfaces (5) which are contacted with the workpieces (4) when the workpieces (4) are loaded, the length direction of the support part (3) contact surfaces (5) is the distance extending from the edges of the workpieces (4) to the centers of the workpieces (4) when the workpieces (4) are loaded, the length x1 value of the support part (3) contact surfaces (5) is less than 2cm, the width of the support part (3) contact surfaces (5) is y1, the thickness of the support part (3) is z1, and the y1 value is far smaller than the side length of the workpieces (4).

2. A loading structure for reducing the occurrence of color cast during coating deposition as claimed in claim 1, wherein each loading portion (1) further comprises at least one card portion (6), the card portion (6) is connected to the supporting and connecting member (2), the length x2 of the contact surface (5) of the card portion (6) is less than 2cm, the width of the contact surface (5) of the card portion (6) is y1, the thickness of the card portion (6) is z1, and the value of y2 is much smaller than the side length of the workpiece (4).

3. A loading structure to reduce the occurrence of colour while depositing a coating according to claim 2, characterized in that said values x1, y1 and z1 are dependent on the weight of the workpiece (4) and on the speed of movement during deposition.

4. A loading structure for reducing the occurrence of color cast during coating deposition as claimed in claim 2 wherein the x2 value, y2 value and z2 value are determined according to the weight of the workpiece (4) and the speed of movement during deposition.

5. The loading structure for reducing the occurrence of five colors during coating deposition of claim 2 wherein said x1 value is 5mm.

6. The loading structure for reducing the occurrence of five colors during coating deposition of claim 2, wherein said x2 value is 5mm.

7. The loading structure for reducing the occurrence of color cast during coating deposition as claimed in claim 2, wherein the contact surface (5) of the card portion (6) and the contact surface (5) of the holder portion (3) are both strip-shaped, wherein the value of x1 is much larger than the value of y1 or the value of z1, and the value of x2 is much larger than the value of y2 or the value of z 2.

8. The loading structure for reducing the occurrence of the coating color during the deposition according to claim 2, wherein x1 and x2 are straight lines, y1 and y2 are arc lines, a far surface (7) which is gradually far away from the workpiece (4) is further arranged at one end of the contact surface (5) of the clamping portion (6) far away from the supporting and connecting component (2), and a far surface (7) which is gradually far away from the workpiece (4) is further arranged at one end of the contact surface (5) of the supporting portion (3) far away from the supporting and connecting component (2).

9. The loading structure for reducing the occurrence of the coating color during the deposition according to claim 2, wherein the locking portion (6) has a circular truncated cone shape gradually opened from the supporting and connecting member (2) to the workpiece (4), and the holding portion (3) has a circular truncated cone shape gradually opened from the supporting and connecting member (2) to the workpiece (4).

10. A fixture, comprising the loading structure of any one of claims 1-9 for reducing the appearance of a color cast during coating deposition.