CN218200975U - Crystal support and carrying device - Google Patents

Abstract

The embodiment of the utility model provides a crystal support and handling device. The crystal support comprises: a bottom plate and a connecting platform; the bottom plate comprises a first surface and a second surface which are opposite, the first end of the connecting table is connected to the first surface of the bottom plate, and the second surface of the bottom plate is used for bonding the silicon rod; the second end of the connecting platform is provided with a first connecting structure and/or the connecting platform is provided with a second connecting structure, the first connecting structure is used for being connected with the carrying assembly so that the carrying assembly can carry the crystal support, and the second connecting structure is used for being matched with the carrying robot so that the carrying robot can carry the crystal support.

Description

Crystal support and carrying device

Technical Field

The utility model relates to a silicon rod technical field, concretely relates to crystal support and handling device.

Background

During the production process, the silicon rod needs to be processed to form a silicon wafer. In this process, the silicon rods need to be viscose-fixed-fed to a slicer, and the silicon rods need to be carried in each process. In the prior art, the silicon rods are conveyed mainly in a manual mode, and the efficiency of conveying the silicon rods is low.

SUMMERY OF THE UTILITY MODEL

The embodiment of the utility model provides a crystal support and handling device to solve the lower problem of efficiency of transport silicon rod among the correlation technique.

In order to solve the technical problem, the utility model discloses a so realize:

in a first aspect, an embodiment of the present invention provides a crystal support, the crystal support includes: a bottom plate and a connecting platform;

the bottom plate comprises a first surface and a second surface which are opposite, the first end of the connecting table is connected to the first surface of the bottom plate, and the second surface of the bottom plate is used for bonding a silicon rod;

the second end of the connecting table is provided with a first connecting structure and/or the connecting table is provided with a second connecting structure, the first connecting structure is used for being connected with the carrying assembly so that the carrying assembly carries the crystal support, and the second connecting structure is used for being matched with a carrying robot so that the carrying robot carries the crystal support.

Optionally, a second end of the connecting platform is provided with a first through groove, two groove walls opposite to the first through groove are respectively provided with a first limiting boss, a positioning boss is arranged at the bottom of the first through groove, and the first through groove, the first limiting boss and the positioning boss form the first connecting structure;

the positioning boss is used for positioning the carrying assembly when the first connecting structure is connected with the carrying assembly, the first through groove is used for embedding part of the carrying assembly, and the first limiting boss is used for limiting part of the carrying assembly.

Optionally, a third connecting structure is further arranged at the second end of the connecting table, and the third connecting structure is used for being matched with an embedded structure on slicing equipment of the silicon rod;

a second through groove is formed in the second end of the connecting table, a second limiting boss is respectively arranged on two opposite groove walls of the second through groove, and the second through groove and the second limiting boss form a third connecting structure;

the second through groove is used for accommodating an embedding structure on the slicing equipment, and the second limiting boss is used for limiting the embedding structure.

Optionally, the second connecting structure includes at least two insertion grooves, the at least two insertion grooves are located between the first end and the second end of the connecting platform, the cross section of each insertion groove is quadrilateral, and the insertion grooves are used for accommodating the plug connectors of the transfer robot.

Optionally, a positioning hole is disposed between the first end and the second end of the connecting table, and the positioning hole is used for positioning the crystal support when the crystal support is conveyed.

In a second aspect, an embodiment of the present invention provides a carrying device, which includes a carrying assembly and the crystal support of any one of the first aspect;

the carrying assembly comprises a fixed plate and a transition plate; the fixed plate and the transition plate are arranged at intervals and connected, a connecting block is arranged on the surface of the transition plate, which is far away from the fixed plate, and the connecting block is used for being matched with the first connecting structure;

wherein the connection block is adapted to the first connection structure.

Optionally, the driving part is disposed on a surface of the fixed plate away from the transition plate, the driving part is connected to the transition plate through a connecting part, and the driving part is configured to drive the transition plate to move along a direction parallel to the fixed plate through the connecting part, so that the connecting block is matched with the first connecting structure, or the connecting block is separated from the first connecting structure.

Optionally, a first sliding block is arranged on the surface, facing the transition plate, of the fixed plate, a first sliding rail is arranged on the surface, facing the fixed plate, of the transition plate, the first sliding block is embedded in the first sliding rail, and the extending direction of the first sliding rail is the same as the moving direction of the transition plate;

or a second slide rail is arranged on the surface, facing the transition plate, of the fixed plate, a second slide block is arranged on the surface, facing the fixed plate, of the transition plate, the second slide block is embedded in the second slide rail, and the extending direction of the second slide rail is the same as the moving direction of the transition plate.

Optionally, a limiting structure is arranged between the fixed plate and the transition plate, and the limiting structure is used for limiting the transition plate when the transition plate is close to the fixed plate, so that the transition plate is moved to a target position and stops.

Optionally, the limiting structure includes a first limiting table, a second limiting table and a limiting member;

the first limiting table is arranged on the surface, facing the fixed plate, of the fixed plate, the second limiting table is arranged on the surface, facing the fixed plate, of the fixed plate, a mounting hole is formed in the second limiting table, and the limiting piece penetrates through the mounting hole;

under the condition that the transition plate moves along the direction close to the fixed plate, one end of the limiting part is abutted against the first limiting table, so that the transition plate stops moving to the target position.

The embodiment of the utility model provides an in, because the first end of connecting the platform is connected in the first face of bottom plate, consequently, when will connecting the platform and remove, connect the platform just can drive the bottom plate and remove simultaneously. And the second surface of the bottom plate can be bonded with the silicon rod, so that the silicon rod can be moved by moving the connecting platform after the silicon rod is bonded on the second surface of the bottom plate, and the silicon rod can be conveyed. In addition, when the second end of the connecting table is provided with the first connecting structure, the first connecting structure can be connected with the carrying component when the connecting table needs to be moved, so that the carrying component can move the connecting table, carry the crystal support and carry the silicon rod; when the second connecting structure is arranged on the connecting table, the second connecting structure can be matched with the carrying robot when the connecting table needs to be moved, so that the carrying robot can carry the crystal support, and the silicon rod can be carried; when the second end of connecting the platform is provided with first connection structure, and connect and set up the second connection structure on the platform, at this moment, when needs mobile station, both can remove the connection platform through carrying the subassembly, also can remove the connection platform through transfer robot to the brilliant support of transport makes the silicon rod carried. That is, in the embodiment of the utility model, through setting up the bottom plate, set up the connection platform in the first face of bottom plate, second end at the connection platform sets up first connection structure and/or is connected the bench and be provided with second connection structure, can be in the viscose process of silicon rod, bond the silicon rod at the second face of bottom plate, later can hold in the palm the transport silicon rod through carrying the brilliant, and can be connected or second connection structure and transfer robot cooperation through first connection structure and transport subassembly, realize the brilliant support of automatic transport, and then automatic transport silicon rod, make the efficiency of transport silicon rod improve.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic view of a crystal support according to an embodiment of the present invention;

fig. 2 is a schematic view of a conveying device according to an embodiment of the present invention.

Reference numerals are as follows:

10: a base plate; 20: a connecting table; 30: a handling assembly; 21: a first connecting structure; 22: a third connecting structure; 23: a second connecting structure; 24: positioning holes; 31: a fixing plate; 32: a transition plate; 33: a drive member; 34: a limiting structure; 211: a first through groove; 212: a first limit boss; 213: positioning the boss; 221: a second through groove; 222: a second limit boss; 231: inserting grooves; 311: a first slider; 321: a first slide rail; 320: connecting blocks; 331: a connecting member; 341: a first limit table; 342: a second limit table; 343: a stopper; 3201: a groove; 3202: and (4) a boss.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, of the embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It should be appreciated that reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment of the present invention. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

Referring to fig. 1, a schematic diagram of a crystal support provided by an embodiment of the present invention is shown. As shown in fig. 1, the wafer holder includes: a base plate 10 and a connecting table 20.

The base plate 10 includes a first surface and a second surface opposite to the first surface, a first end of the connecting stage 20 is connected to the first surface of the base plate 10, and the second surface of the base plate 10 is used for bonding the silicon rod. The second end of the connecting table 20 is provided with a first connecting structure 21 and/or the connecting table is provided with a second connecting structure 23, the first connecting structure 21 is used for connecting with the carrying assembly 30 so that the carrying assembly 30 carries the crystal support, and the second connecting structure 23 is used for matching with the carrying robot so that the carrying robot carries the crystal support.

In the embodiment of the present invention, since the first end of the connection platform 20 is connected to the first surface of the bottom plate 10, when the connection platform 20 moves, the connection platform 20 can drive the bottom plate 10 to move simultaneously. Since the silicon rod can be bonded to the second surface of the base plate 10, the silicon rod can be moved by moving the connecting stage 20 after the silicon rod is bonded to the second surface of the base plate 10, and thus the silicon rod can be transported. In addition, when the second end of the connecting table 20 is provided with the first connecting structure 21, when the connecting table 20 needs to be moved, the first connecting structure 21 can be connected with the carrying assembly 30, so that the carrying assembly 30 can move the connecting table 20, thereby carrying the crystal support and carrying the silicon rod; when the second connecting structure 23 is arranged on the connecting table 20, when the connecting table 20 needs to be moved, the second connecting structure 23 can be matched with the transfer robot, so that the transfer robot can transfer the crystal support, and the silicon rod can be transferred; when the second end of the connecting stage 20 is provided with the first connecting structure and the second connecting structure 23 is provided on the connecting stage 20, when the stage 20 needs to be moved, the connecting stage 20 can be moved by the carrying assembly 30, or the connecting stage 20 can be moved by the carrying robot, so that the silicon rod can be carried. That is, in the embodiment of the present invention, through setting up the bottom plate 10, set up the connection platform 20 in the first face of bottom plate 10, set up first connection structure 21 and/or be provided with the second connection structure on the connection platform 20 at the second end of connection platform 20, can bond the silicon rod at the second face of bottom plate 10 in the viscose process of silicon rod, can carry the silicon rod through carrying the brilliant support afterwards, and can be connected with transport subassembly 30 or second connection structure 23 and the cooperation of transfer robot through first connection structure 21, realize the brilliant support of automatic transport, and then automatic transport silicon rod for the efficiency of carrying the silicon rod improves.

It should be further noted that, in the embodiment of the present invention, as shown in fig. 1, the number of the first connection structures 21 may be two, two first connection structures 21 may be distributed at intervals, and two first connection structures 21 may be symmetrical with respect to the center of the second end of the connection platform 20, that is, two first connection structures 21 are symmetrically disposed. Of course, the number of the first connecting structures 21 may also be other numbers, for example, the number of the first connecting structures 21 is 3, and for example, the number of the first connecting structures 21 is 4. The embodiment of the present invention is not limited to the specific number of the first connecting structures 21.

In addition, the carrying assembly 30 has a small volume, and when the wafer support is located in a small space, the wafer support can be carried by the carrying assembly 30. The carrying robot has larger volume, and when the crystal support is positioned in a larger space, the crystal support can be carried by the carrying robot. Therefore, the crystal support can be automatically conveyed in any space, and the conveying efficiency is improved.

In addition, in some embodiments, the second end of the connecting platform 20 is provided with a first through groove 211, two groove walls of the first through groove 211 opposite to each other are respectively provided with a first limiting boss 212, a groove bottom of the first through groove 211 is provided with a positioning boss 213, and the first through groove 211, the first limiting boss 212 and the positioning boss 213 form the first connecting structure 21. The positioning boss 213 is used for positioning the carrying assembly 30 when the first connecting structure 21 is connected with the carrying assembly 30, the first through slot 211 is used for embedding a part of the carrying assembly 30, and the first limiting boss 212 is used for limiting the part of the carrying assembly 30.

Since the first through groove 211, the first limiting boss 212 and the positioning boss 213 form the first connecting structure 21, when the first connecting structure 21 is connected to the carrying assembly 30, part of the carrying assembly 30 can be moved into the first through groove 211, and when part of the carrying assembly 30 is moved into the first through groove 211, the positioning boss 213 can position part of the carrying assembly 30, so that the position where part of the carrying assembly 30 is moved into the first through groove 211 is correct. After partial handling assembly 30 moves into first through slot 211, when the wafer support needs to be lifted, first limiting boss 212 can limit partial handling assembly 30, so that partial handling assembly 30 can be prevented from being separated from first through slot 211, and partial handling assembly 30 can lift the wafer support through first limiting boss 212.

In addition, in some embodiments, the second end of the connection station 20 is further provided with a third connection arrangement 22, the third connection arrangement 22 being adapted to cooperate with a mosaic arrangement on a slicing apparatus for silicon rods. The second end of the connecting platform 20 is provided with a second through groove 221, two groove walls opposite to the second through groove 221 are respectively provided with a second limiting boss 222, and the second through groove 221 and the second limiting boss 222 form a third connecting structure 22. The second through groove 221 is used for accommodating an inlay structure on the slicing apparatus, and the second limit boss 222 is used for limiting the inlay structure.

Because the second leads to groove 221 and the spacing boss 222 of second constitutes third connection structure 22, consequently, the mosaic structure on the section equipment alright with embedding second leads to groove 221, later when holding in the palm through section equipment transport is brilliant, even when making brilliant the support promoted, mosaic structure alright with blockking by the spacing boss 222 of second, the spacing boss 222 of second promptly can be spacing to mosaic structure, thereby avoid mosaic structure to break away from in the second lead to groove 221, make the section equipment can remove brilliant the support through mosaic structure.

In addition, in the embodiment of the present invention, the number of the third connecting structures 22 may be two, two third connecting structures 22 are distributed at intervals, and two third connecting structures 22 are distributed symmetrically about the center of the second end of the connecting platform 20. Of course, the number of the third connecting structures 22 may also be other numbers, for example, the number of the third connecting structures 22 is 3, and for example, the number of the third connecting structures 22 is 4. The specific number of the third connecting structures 22 is not limited herein.

In addition, in the embodiment of the present invention, as shown in fig. 1, when the number of the first connection structures 21 is two, the third connection structures 22 may be located between the two first connection structures 21, that is, the third connection structures 22 are spaced between the two first connection structures 21. Wherein the two first connecting structures 21 are centrosymmetric about the second end of the connecting table 20.

In addition, in some embodiments, the second connecting structure 23 may include at least two insertion grooves 231, the at least two insertion grooves 231 are located between the first end and the second end of the connecting stage 20, the insertion grooves 231 have a quadrangular cross section, and the insertion grooves 231 are used to receive insertion parts of the transfer robot.

Because at least two inserting grooves 231 are arranged between the first end and the second end of the connecting table 20, and the robot for carrying the crystal support generally adopts an inserting type structure, when the crystal support is carried by the carrying robot, the inserting piece of the carrying robot can be inserted into the inserting groove 231, and then the carrying robot can carry the crystal support, namely, the crystal support can be conveniently carried by the carrying robot by arranging the inserting groove 231.

In addition, the cross-section of the insertion groove 231 is quadrilateral, so that the insertion part can shake less in the insertion groove 231 after the insertion part of the transfer robot is inserted into the insertion groove 231, and the problems that the error is large when the transfer robot transfers the crystal support due to the fact that the insertion part shakes in the insertion groove 231 and the crystal support shakes in the transfer process are avoided.

It should be noted that the cross section of the insertion groove 231 refers to a cross section in a direction perpendicular to the first end to the second end of the first connection stage 20. In addition, the cross section of the insertion groove 231 is square, and at this time, it indicates that there is no fillet in the insertion groove 231, so that the insertion groove 231 can be in close contact with the plug connector of the transfer robot.

In addition, in some embodiments, a positioning hole 24 is disposed between the first end and the second end of the connection stage 20, and the positioning hole 24 is used for positioning the wafer holder when the wafer holder is transported.

Because the positioning hole 24 is arranged between the first end and the second end of the connecting table 20, when other devices are required to carry the crystal support, the crystal support can be positioned through the positioning hole 24 at first, so that when the crystal support is carried by other devices, the crystal support can be carried by other devices stably, and the problems that the crystal support is inclined, shaken and the like in the crystal support carrying process are avoided. That is, by providing the positioning hole 24, the crystal support can be positioned when the crystal support is conveyed, so that the crystal support can be stably conveyed no matter what kind of device is used for conveying the crystal support.

It should be noted that the positioning hole 24 may be a circular hole, and of course, the positioning hole 24 may also be a hole with other shapes, for example, the positioning hole 24 is a square hole, and for example, the positioning hole 24 is an elliptical hole. The specific shape of the positioning hole 24 is not limited herein.

In addition, in the embodiment of the present invention, the crystal support may be an integrated structure, that is, the connection platform 20 and the bottom plate 10 are an integrated structure, and the crystal support may be directly formed through a die-casting process. Of course, the connection stage 20 may also be welded to the base plate 10. Therefore, the embodiments of the present invention are not limited herein.

Additionally, in the embodiment of the present invention, the material that the brilliant holds in the palm can be the aluminium material, and the material that connects platform 20 and bottom plate 10 is the aluminium material promptly, because the density of aluminium is on a low side in metal material, consequently, the brilliant weight of holding in the palm of aluminium material is lighter, can make the brilliant production that satisfies current automation assembly line that holds in the palm. In addition, when the crystal support is made of aluminum, after the crystal support is machined, the whole crystal support needs to be subjected to hard oxidation, so that the reaction caused by the fact that aluminum ions are active metals is avoided, and the strength and the hardness of the surface of the crystal support can be improved by the hard oxidation. Of course, the material of the crystal support may be other metal materials, for example, the material of the crystal support is steel material. The embodiment of the present invention is not limited herein for the specific type of the material of the crystal support.

In addition, in the embodiment of the utility model provides an in, can be through setting up the size of bottom plate 10 for the brilliant bonding that holds in the palm the silicon rod that can satisfy not unidimensional, thereby makes the brilliant production that holds in the palm the solar wafer that can satisfy not unidimensional.

For example, the width of the bottom plate 10 may be set to 220mm, and the silicon rod with the specification of M6 to M12 can be satisfied from the crystal support, so that any spare parts do not need to be replaced in the production process.

In the embodiment of the present invention, since the first end of the connection platform 20 is connected to the first surface of the bottom plate 10, when the connection platform 20 moves, the connection platform 20 can drive the bottom plate 10 to move simultaneously. Since the silicon rod can be bonded to the second surface of the base plate 10, the silicon rod can be moved by moving the connecting stage 20 after the silicon rod is bonded to the second surface of the base plate 10, and thus the silicon rod can be transported. In addition, when the second end of the connecting table 20 is provided with the first connecting structure 21, when the connecting table 20 needs to be moved, the first connecting structure 21 can be connected with the carrying component 30, so that the carrying component 30 can move the connecting table 20, thereby carrying the crystal support, and carrying the silicon rod; when the second connecting structure 23 is arranged on the connecting platform 20, when the connecting platform 20 needs to be moved, the second connecting structure 23 can be matched with the transfer robot, so that the transfer robot can transfer the crystal support, and the silicon rod can be transferred; when the second end of the connecting stage 20 is provided with the first connecting structure and the second connecting structure 23 is provided on the connecting stage 20, when the stage 20 needs to be moved, the connecting stage 20 can be moved by the carrying assembly 30, or the connecting stage 20 can be moved by the carrying robot, so that the silicon rod can be carried. That is, in the embodiment of the utility model provides an, through setting up bottom plate 10, set up connection platform 20 in the first face of bottom plate 10, second end at connection platform 20 sets up first connection structure 21 and/or is provided with second connection structure on connecting platform 20, can be in the viscose process of silicon rod, bond the silicon rod at the second face of bottom plate 10, afterwards can carry the silicon rod through carrying brilliant support, and can be connected through first connection structure 21 and transport subassembly 30 or second connection structure 23 and transfer robot cooperation, realize automatic transport brilliant support, and then automatic transport silicon rod for the efficiency of transport silicon rod improves.

Referring to fig. 2, a schematic diagram of a carrying device provided in an embodiment of the present invention is shown, and as shown in fig. 2, the carrying device includes a carrying assembly 30 and a crystal tray in any embodiment of the foregoing embodiments.

The handling assembly 30 includes a fixed plate 31, a transition plate 32. The fixed plate 31 and the transition plate 32 are arranged at an interval, the fixed plate 31 is connected with the transition plate 32, a connecting block 320 is arranged on the surface of the transition plate 32 departing from the fixed plate 31, and the connecting block 320 is used for being matched with the first connecting structure 21. Wherein the connection block 320 is adapted to the first connection structure 21.

The embodiment of the utility model provides an in, because fixed plate 31 and the setting of cab apron 32 interval, and fixed plate 31 with cross cab apron 32 and be connected, cross the surface that cab apron 32 deviates from fixed plate 31 and be provided with connecting block 320, consequently, when needs transport brilliant support, alright in order to make connecting block 320 and the cooperation of first connection structure 21 to can be through removing fixed plate 31, make brilliant support carried.

In addition, in some embodiments, the carrying device may further include a driving member 33, the driving member 33 is disposed on a surface of the fixing plate 31 facing away from the transition plate 32, the driving member 33 is connected to the transition plate 32 through a connecting member 331, and the driving member 33 is configured to drive the transition plate 32 to move in a direction parallel to the fixing plate 31 through the connecting member 331, so as to engage the connection block 320 with the first connection structure 21 or disengage the connection block 320 from the first connection structure 21.

In the embodiment of the present invention, since the surface of the fixed plate 31 deviating from the transition plate 32 is provided with the driving element 33, the driving element 33 is connected with the transition plate 32 through the connecting element 331, therefore, the driving element 33 can drive the connecting element 331 to move, so that the connecting element 331 drives the transition plate 32 to move, i.e. the driving element 33 can drive the transition plate 32 to move. Because the connecting block 320 is arranged on the surface of the transition plate 32 departing from the fixed plate 31, the driving part 33 drives the transition plate 32 to move along the direction parallel to the fixed plate 31 through the connecting part 331, and when the transition plate 32 moves close to the fixed plate 31, the connecting block 320 can be matched with the first connecting structure 21 on the crystal support, so that the carrying component 30 can grab the crystal support, and when the transition plate 32 moves away from the fixed plate 31, the connecting block 320 can be separated from the first connecting structure 21, so that the carrying component 30 can release the crystal support. That is, by providing the driving member 33 on the fixing plate 31, the driving member 33 is connected to the transition plate 32 through the connecting member 331, and the connecting block 320 is connected to the transition plate 32, so that the transition plate 32 can be driven by the driving member 33 to move, the connecting block 320 on the transition plate 32 is matched with the first connecting structure 21 on the crystal support, and after the silicon rod is adhered to the second surface of the bottom plate 10 of the crystal support, the crystal support can be moved by the carrying assembly 30, so as to move the silicon rod, and thus, the efficiency of moving the silicon rod is improved.

In addition, after the driving part 33 is arranged, the transition plate 32 is driven by the driving part 33 to move, so that the crystal holder can meet silicon rods with different sizes. For example, when the size of the silicon rod is small, the distance that the driving member 33 drives the transition plate 32 to move is small, and when the size of the silicon rod is large, the distance that the driving member 33 drives the transition plate 32 to move is large.

It should be noted that, when the first connecting structure 21 is composed of the first through groove 211, the first limiting boss 212 and the positioning boss 213, at this time, a groove 3201 may be disposed on the connecting block 320, and bosses 3202 may be disposed on two sides of the connecting block 320, so that the connecting block 320 may be inserted into the first through groove 211 when the connecting block 320 is engaged with the first connecting structure 21. When connecting block 320 imbeds first logical groove 211, recess 3201 on connecting block 320 can cooperate with location boss 213 to location boss 213 can fix a position connecting block 320, after connecting block 320 imbeds first logical groove 211, boss 3202 on connecting block 320 alright with first spacing boss 212 butt, when handling subassembly 30 promoted the brilliant support through connecting block 320, first spacing boss 212 alright with carry on spacingly to connecting block 320.

It should also be noted that, in the embodiment of the present invention, the driving element 33 may be a cylinder, and of course, the driving element 33 may also be of other types, for example, the driving element 33 is a motor, when the driving element 33 is a motor, at this time, the output shaft of the motor may be connected to a lead screw, a slider is connected to the lead screw, and the slider is connected to the connecting element 331, so that when the slider moves on the lead screw, the slider drives the connecting element 331 to move, so that the transition plate 32 moves. The embodiment of the present invention is not limited to the specific type of the driving member 33.

In addition, in some embodiments, the surface of the fixed plate 31 facing the transition plate 32 is provided with a first sliding block 311, the surface of the transition plate 32 facing the fixed plate 31 is provided with a first sliding rail 321, the first sliding block 311 is embedded in the first sliding rail 321, and the extending direction of the first sliding rail 321 is the same as the moving direction of the transition plate 32. Or, a second slide rail is arranged on the surface of the fixed plate 31 facing the transition plate 32, a second slider is arranged on the surface of the transition plate 32 facing the fixed plate 31, the second slider is embedded in the second slide rail, and the extending direction of the second slide rail is the same as the moving direction of the transition plate 32.

When the fixed plate 31 is provided with the first slider 311 on the surface facing the transition plate 32, the transition plate 32 is provided with the first slide rail 321 on the surface facing the fixed plate 31, and the first slider 311 is embedded in the first slide rail 321, at this time, when the transition plate 32 moves under the action of the driving part 33, the transition plate 32 can drive the first slide rail 321 to slide along the first slider 311, so that the first slide rail 321 is matched with the first slider 311, and the guiding effect can be achieved on the movement of the transition plate 32. After the connecting block 320 on the transition plate 32 is matched with the first connecting structure 21 on the crystal support, the transition plate 32 is equivalent to bear the weight of the crystal support, and the first slider 311 is embedded in the first sliding rail 321, so that the first slider 311 is matched with the first sliding rail 321, and more fixed plates 31 can be connected with the transition plate 32, so that more stress points can be provided for the fixed plates 31 when bearing, and the bearing of the carrying assembly 30 is facilitated.

Similarly, when the fixed plate 31 is provided with the second slide rail on the surface facing the transition plate 32, the surface facing the fixed plate 31 of the transition plate 32 is provided with the second slider, and the second slider is embedded in the second slide rail, at this moment, when the transition plate 32 moves under the action of the driving part 33, the transition plate 32 can drive the second slider to slide along the second slide rail, so that the second slider is matched with the second slide rail, and the guide effect can be played on the movement of the transition plate 32. After the connecting block 320 on the transition plate 32 is matched with the first connecting structure 21 on the crystal support, the transition plate 32 is equivalent to the weight of the crystal support, and the second slide rail is embedded in the second slide block, so that the second slide rail is matched with the second slide block, and more fixed plates 31 can be connected with the transition plate 32, so that more stress points can be provided for the fixed plates 31 when bearing, and the bearing of the carrying assembly 30 is facilitated.

Additionally, in some embodiments, the number of drives 33 is two and the number of transition plates 32 is two. Two transition plates 32 are disposed on opposite sides of the fixing plate 31, one driving member 33 is connected to one transition plate 32 by a connecting member 331, and one transition plate 32 is connected to one connecting member 320. The driving directions of the two driving members 33 are opposite to each other so that the moving directions of the two transition plates 32 are opposite to each other, and the two connection blocks 320 are simultaneously inserted into the first connection structure 21 or the two connection blocks 320 are simultaneously separated from the first connection structure 21.

Since the driving directions of the two driving members 33 are opposite, when the two driving members 33 respectively drive the two transition plates 32 to move, the moving directions of the two transition plates 32 are opposite, and the two transition plates 32 are located at opposite sides of the fixed plate 31, so that the two transition plates 32 can simultaneously approach the fixed plate 31 or simultaneously move away from the fixed plate 31. When the two driving members 33 respectively drive the two transition plates 32 to simultaneously approach the fixed plate 31, the connection blocks 320 on the two transition plates 32 can be simultaneously embedded into the first connection structure 21, and when the two transition plates 32 simultaneously move away from the fixed plate 31, the connection blocks 320 on the two transition plates 32 can be simultaneously separated from the first connection structure 21. When the connecting blocks 320 on the two transition plates 32 are embedded into the first connecting structures 21 at the same time, the two opposite sides of the first connecting structures 21 can be stressed at the same time, so that when the carrying assembly 30 moves the crystal support, the stress of the crystal support is balanced, and the problem of shaking caused by uneven stress of the crystal support is avoided.

In addition, in some embodiments, a limit structure 34 is disposed between the fixed plate 31 and the transition plate 32, and the limit structure 34 is used for limiting the transition plate 32 when the transition plate 32 approaches the fixed plate 31, so that the transition plate 32 is moved to the target position and stops.

When the limiting structure 34 is disposed between the fixed plate 31 and the transition plate 32, at this time, when the driving part 33 drives the transition plate 32 to be close to the fixed plate 31, the limiting structure 34 may limit the transition plate 32, so as to limit the connecting block 320 on the transition plate 32, and enable the connecting block 320 to be matched with the first connecting structure 21 at a proper position. That is, the limiting structure 34 can limit the transition plate 32 to achieve the purpose of limiting the connection block 320, so that the transition plate 32 stops at the target position, and the connection block 320 is more suitable to be matched with the first connection structure 21.

It should be noted that, when the first connecting structure 21 includes the first through groove 211, the first limiting boss 212, and the positioning boss 213, at this time, the transition plate 32 is limited by the limiting structure 34, so that the connecting block 320 can be limited, and the position of the connecting block 320 embedded in the first through groove 211 is proper.

In addition, in some embodiments, the position-limiting structure 34 includes a first position-limiting platform 341, a second position-limiting platform 342, and a position-limiting member 343. The first limiting table 341 is disposed on a surface of the fixing plate 31 facing the transition plate 32, the second limiting table 342 is disposed on a surface of the transition plate 32 facing the fixing plate 31, a mounting hole is disposed on the second limiting table 342, and the limiting member 343 penetrates through the mounting hole. When the transition plate 32 moves in a direction approaching the fixed plate 31, one end of the stopper 343 abuts against the first stopper 341 to stop the movement of the transition plate 32 to the target position.

Because the first limiting table 341 is disposed on the surface of the fixing plate 31 facing the transition plate 32, the second limiting table 342 is disposed on the surface of the transition plate 32 facing the fixing plate 31, the second limiting table 342 is provided with a mounting hole, and the limiting member 343 is disposed in the mounting hole in a penetrating manner, when the driving member 33 drives the transition plate 32 to move in a direction close to the fixing plate 31, the transition plate 32 will drive the second limiting table 342 and the limiting member 343 to move, so that when the transition plate 32 moves to a target position, the limiting member 343 abuts against the first limiting table 341, and the first limiting table 341 provides resistance to the limiting member 343, so that the limiting member 343 stops moving, and the limiting member 343 drives the second limiting table 342 to stop moving, and finally the transition plate 32 stops moving.

It should be noted that the limiting member 343 may be an adjusting nut, and of course, the limiting member 343 may have other structures, for example, the limiting member 343 may be a pin, and at this time, the pin may be fixed in the installation hole. The specific type of the limiting member 343 is not limited herein.

In addition, the limiting structure 34 may also have other structures, for example, the limiting structure 34 may include a first limiting table 341 and a second limiting table 342, a fixing boss is disposed on the second limiting table 342, the fixing boss faces the first limiting limit, the first limiting table 341 is disposed on a surface of the fixing plate 31 facing the transition plate 32, and the second limiting table 342 is disposed on a surface of the transition plate 32 facing the fixing plate 31. The embodiment of the present invention is not limited herein with respect to the specific structure of the limiting structure 34.

The embodiment of the utility model provides a below is to the use of handling device does concrete description: when using the carrying device provided by the embodiment of the utility model, can adhere the silicon rod to the second face of bottom plate 10 through the viscose earlier, accomplish the fixed to the silicon rod. Then, the silicon rod can be separated from the bottom plate 10 by connecting the silicon rod with the crystal support through the carrying assembly 30, that is, the connecting block 320 is embedded into the first connecting structure 21 on the crystal support, and then the carrying assembly 30 is conveyed through the conveying belt, so that the crystal support and the silicon rod can be conveyed, and then the silicon rod can be separated from the bottom plate 10, and then the bottom plate 10 can be washed to clean the second surface of the bottom plate 10. When the silicon rod needs to be transported again, the silicon rod can be bonded to the second surface of the bottom plate 10 again, and the crystal support can be transported again.

The embodiment of the utility model provides an in, because fixed plate 31 and the setting of cab apron 32 interval, and fixed plate 31 with cross cab apron 32 and be connected, cross the surface that cab apron 32 deviates from fixed plate 31 and be provided with connecting block 320, consequently, when needs transport brilliant support, alright in order to make connecting block 320 and the cooperation of first connection structure 21 to can be through removing fixed plate 31, make brilliant support carried. In addition, the surface of the fixing plate 31, which is far away from the transition plate 32, is provided with a driving part 33, and the driving part 33 is connected with the transition plate 32 through a connecting part 331, so that the driving part 33 can drive the connecting part 331 to move, so that the connecting part 331 drives the transition plate 32 to move, that is, the driving part 33 can drive the transition plate 32 to move. Because the connecting block 320 is arranged on the surface of the transition plate 32 departing from the fixed plate 31, the driving part 33 drives the transition plate 32 to move along the direction parallel to the fixed plate 31 through the connecting part 331, and when the transition plate 32 moves close to the fixed plate 31, the connecting block 320 can be matched with the first connecting structure 21 on the crystal support, so that the carrying component 30 can grab the crystal support, and when the transition plate 32 moves away from the fixed plate 31, the connecting block 320 can be separated from the first connecting structure 21, so that the carrying component 30 can release the crystal support. That is, by providing the driving member 33 on the fixing plate 31, the driving member 33 is connected to the transition plate 32 through the connecting member 331, and the connecting block 320 is connected to the transition plate 32, so that the transition plate 32 can be driven by the driving member 33 to move, the connecting block 320 on the transition plate 32 is matched with the first connecting structure 21 on the crystal support, and after the silicon rod is adhered to the second surface of the bottom plate 10 of the crystal support, the crystal support can be moved by the carrying assembly 30, so as to move the silicon rod, and thus, the efficiency of moving the silicon rod is improved.

It should be noted that, in this specification, each embodiment is described in a progressive manner, and each embodiment focuses on differences from other embodiments, and portions that are the same as and similar to each other in each embodiment may be referred to.

While alternative embodiments of the present invention have been described, additional variations and modifications of these embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including alternative embodiments and all alterations and modifications that fall within the scope of the embodiments of the invention.

Finally, it should also be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity from another entity without necessarily requiring or implying any actual such relationship or order between such entities. Furthermore, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that an article or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such article or terminal. Without further limitation, an element defined by the phrases "comprising one of 8230; \8230;" 8230; "does not exclude the presence of additional identical elements in an article or terminal device comprising the element.

It is right above to the technical scheme that the utility model provides a detailed introduction has been carried out, and it is right to have used specific individual example herein the utility model discloses a principle and implementation mode have been elucidated, simultaneously, to the general technical staff in this field, according to the utility model discloses a principle and implementation mode all have the change part on concrete implementation mode and application scope, to sum up, this description content should not be understood as the restriction of the utility model.

Claims (10)

1. A crystal tray, comprising: a bottom plate and a connecting platform;

the bottom plate comprises a first surface and a second surface which are opposite, the first end of the connecting table is connected to the first surface of the bottom plate, and the second surface of the bottom plate is used for bonding a silicon rod;

the second end of the connecting table is provided with a first connecting structure and/or the connecting table is provided with a second connecting structure, the first connecting structure is used for being connected with the carrying assembly so that the carrying assembly carries the crystal support, and the second connecting structure is used for being matched with a carrying robot so that the carrying robot carries the crystal support.

2. The wafer holder according to claim 1, wherein a second end of the connecting table is provided with a first through groove, two opposite groove walls of the first through groove are respectively provided with a first limiting boss, a groove bottom of the first through groove is provided with a positioning boss, and the first through groove, the first limiting boss and the positioning boss constitute the first connecting structure;

the positioning boss is used for positioning the carrying assembly when the first connecting structure is connected with the carrying assembly, the first through groove is used for embedding part of the carrying assembly, and the first limiting boss is used for limiting part of the carrying assembly.

3. The crystal holder according to claim 1, wherein the second end of the connecting table is further provided with a third connecting structure, and the third connecting structure is used for being matched with an embedded structure on a slicing device of the silicon rod;

a second through groove is formed in the second end of the connecting table, a second limiting boss is respectively arranged on two opposite groove walls of the second through groove, and the second through groove and the second limiting boss form a third connecting structure;

the second through groove is used for accommodating an embedding structure on the slicing equipment, and the second limiting boss is used for limiting the embedding structure.

4. The wafer holder according to claim 1, wherein the second connection structure comprises at least two insertion grooves, the at least two insertion grooves are located between the first end and the second end of the connection platform, the cross section of each insertion groove is quadrilateral, and the insertion grooves are used for accommodating plug connectors of a transfer robot.

5. The wafer holder according to claim 1, wherein a positioning hole is provided between the first end and the second end of the connection table, and the positioning hole is used for positioning the wafer holder when the wafer holder is conveyed.

6. A handling device, characterized in that the handling device comprises a handling assembly and a crystal holder as claimed in any one of claims 1-5;

the carrying assembly comprises a fixed plate and a transition plate; the fixed plate and the transition plate are arranged at intervals and connected, a connecting block is arranged on the surface of the transition plate, which is far away from the fixed plate, and the connecting block is used for being matched with the first connecting structure;

wherein the connection block is adapted to the first connection structure.

7. The handling device of claim 6, further comprising a drive member;

the driving piece is arranged on the surface, deviating from the transition plate, of the fixed plate, is connected with the transition plate through a connecting piece, and is used for driving the transition plate to move in a direction parallel to the fixed plate through the connecting piece, so that the connecting block is matched with the first connecting structure, or the connecting block is separated from the first connecting structure.

8. The carrying device as claimed in claim 6, wherein the surface of the fixed plate facing the transition plate is provided with a first slide block, the surface of the transition plate facing the fixed plate is provided with a first slide rail, the first slide block is embedded in the first slide rail, and the extending direction of the first slide rail is the same as the moving direction of the transition plate;

or a second slide rail is arranged on the surface, facing the transition plate, of the fixed plate, a second slide block is arranged on the surface, facing the fixed plate, of the transition plate, the second slide block is embedded in the second slide rail, and the extending direction of the second slide rail is the same as the moving direction of the transition plate.

9. The handling device as recited in claim 6, wherein a limiting structure is disposed between the fixed plate and the transition plate, and the limiting structure is used for limiting the transition plate when the transition plate is close to the fixed plate, so that the transition plate is moved to a target position and stops.

10. The handling device of claim 9, wherein the limiting structure comprises a first limiting table, a second limiting table and a limiting member;

the first limiting table is arranged on the surface, facing the fixed plate, of the fixed plate, the second limiting table is arranged on the surface, facing the fixed plate, of the fixed plate, a mounting hole is formed in the second limiting table, and the limiting piece penetrates through the mounting hole;

under the condition that the transition plate moves along the direction close to the fixed plate, one end of the limiting part is abutted against the first limiting table, so that the transition plate stops moving to the target position.

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