CN218200897U

CN218200897U - Automatic unloading material grabbing device

Info

Publication number: CN218200897U
Application number: CN202222244870.6U
Authority: CN
Inventors: 章祥静; 黄新普
Original assignee: Wuxi Rongneng Semiconductor Material Co ltd
Current assignee: Wuxi Rongneng Semiconductor Material Co ltd
Priority date: 2022-08-25
Filing date: 2022-08-25
Publication date: 2023-01-03
Anticipated expiration: 2032-08-25

Abstract

The utility model relates to an automatic unloading material grabbing device, including taking off gluey frame, translation device and with the elevating gear that the translation device distal end is connected, elevating gear includes the second platform, the second platform distal end has the support, support distal end four corners department sets up the first portion of colluding that the opening is up, it colludes the portion to take off gluey frame near-end four corners department and sets up the second that the opening is down, first portion of colluding colludes respectively the second portion of colluding, elevating gear for translation device goes up and down along vertical direction, makes the frame that comes unstuck falls into in the carrier, simple structure, convenient operation, and can carry out long distance level, vertical removal.

Description

Automatic unloading material grabbing device

Technical Field

The utility model relates to a silicon chip production technical field especially relates to an automatic unloading is grabbed and is expected device.

Background

When the silicon wafer is taken and placed, the mechanical arm is usually adopted to grab so as to improve the efficiency. For example, in the degumming of silicon wafers, the movement of a crystal support loaded with the silicon wafers or a degumming frame in different water tanks needs to be completed by a mechanical arm. However, the traditional mechanical arm is mostly used for picking and placing the wafer support and is not suitable for picking and placing the degumming frame.

The patent of chinese utility model with document number CN207509217U discloses a silicon chip snatchs manipulator, including support, rotary device, connecting rod, mount, telescopic cylinder, connecting plate and clamping device, rotary device sets up on the support, and connecting rod one end is connected with rotary device, and the other end is connected with the mount, telescopic cylinder sets up on the mount, and telescopic cylinder's telescopic link is connected with the connecting plate, clamping device sets up on the connecting plate, and clamping device includes centre gripping cylinder and a plurality of claw, and a plurality of claw sets up in centre gripping cylinder side and be connected with the centre gripping cylinder. Although the technical scheme can grab the crystal support, the technical scheme is not suitable for grabbing the degumming frame and cannot move for a long distance.

SUMMERY OF THE UTILITY MODEL

To the shortcoming of the above prior art, the utility model aims at providing an automatic unloading is grabbed and is expected device to solve one or more problems among the prior art.

In order to achieve the above purpose, the technical scheme of the utility model is as follows:

the utility model provides an automatic unloading material grabbing device, including taking off gluey frame, translation device and with the elevating gear that the translation device distal end is connected, elevating gear includes the second platform, the second platform distal end has the support, support distal end four corners department sets up the first portion of colluding that the opening is up, it colludes the portion to take off gluey frame near-end four corners department sets up the second that the opening is down, first portion of colluding catches on respectively the second portion of colluding, elevating gear for translation device goes up and down along vertical direction, makes it falls into in the carrier to come unstuck the frame.

Further, the translation device comprises a sliding rod and a first platform sliding on the sliding rod, and the first platform is provided with at least two lifting shafts.

Furthermore, the elevator shaft comprises a first hole formed in the first platform and a limiting frame arranged at the near end of the first hole.

Furthermore, at least two rod parts are arranged at the near end of the second platform, the surfaces of the rod parts are provided with teeth, and the rod parts penetrate through the first holes and vertically lift in the limiting frame.

Furthermore, a first fixing seat is arranged at the near end of the first platform, the first fixing seat comprises a first motor and a first rotating shaft driven by the output end of the first motor, first gears are arranged at two ends of the first rotating shaft, and the first gears are meshed with the tooth parts of the rod parts.

Furthermore, a second fixing seat is arranged at the near end of the first platform, the second fixing seat comprises a second motor and a second rotating shaft driven by the output end of the second motor, and second gears are arranged at two ends of the second rotating shaft.

Furthermore, the automatic blanking and material grabbing device further comprises a moving rod, the moving rod is arranged in parallel with the sliding rod, and the far end of the moving rod is meshed with the second gear.

Further, a photoelectric sensor is arranged at the near end of the second platform.

Furthermore, the degumming frame comprises a first plate and a second plate, and a space for accommodating the silicon wafer is formed by enclosing at least six toothed bars between the first plate and the second plate.

Further, the carrier comprises a box body and four rollers arranged at the far end of the box body.

Compared with the prior art, the utility model discloses a beneficial technological effect as follows:

the utility model discloses an automatic unloading material grabbing device, including taking off gluey frame, translation device and with the elevating gear that the translation device distal end is connected, elevating gear includes the second platform, the second platform distal end has the support, support distal end four corners department sets up the first portion of colluding that the opening is up, it colludes the portion to take off gluey frame near-end four corners department and sets up the second that the opening is down, first portion of colluding colludes respectively the second portion of colluding, elevating gear for translation device goes up and down along vertical direction, makes the frame that comes unstuck falls into in the carrier, simple structure, convenient operation, and can carry out long distance level, vertical removal.

Drawings

Fig. 1 shows a schematic structural diagram of a lifting device, a degumming frame and a carrier in an automatic blanking grabbing device provided by the embodiment of the utility model.

Fig. 2 shows a schematic structural diagram of a translation device in an automatic blanking and material grabbing device provided by the embodiment of the present invention.

In the drawings, the reference numbers:

1. a lifting device; 10. a second platform; 11. a photoelectric sensor; 12. a support; 121. a first hook part; 13. a rod portion; 131. a tooth portion; 2. a translation device; 20. a first platform; 21. a slide bar; 22. a first fixed seat; 221. a first motor; 222. a first rotating shaft; 223. a first gear; 23. a second fixed seat; 231. a second motor; 232. a second rotating shaft; 233. a second gear; 24. a lift shaft; 241. a first hole; 242. a limiting frame; 3. a degumming frame; 31. a second hook part; 32. a first plate; 33. a second plate; 34. a rack bar; 4. a carrier; 41. a box body; 42. and a roller.

Detailed Description

To make the objects, features and advantages of the present invention more comprehensible, please refer to the attached drawings. It should be understood that the structure, ratio, size and the like shown in the drawings attached to the present specification are only used for matching with the content disclosed in the specification, so as to be known and read by those skilled in the art, and are not used for limiting the limitation of the implementation of the present invention, so that the present invention does not have the essential significance in the technology, and any modification of the structure, change of the ratio relationship or adjustment of the size should still fall within the scope of the technical content disclosed in the present invention without affecting the function and the achievable purpose of the present invention.

In the description of the present invention, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like are defined to indicate an orientation or positional relationship based on that shown in the drawings, merely to facilitate the description of the present invention and to simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

In order to describe the structure of the automatic blanking and material grabbing device more clearly, the present invention defines terms "far end" and "near end", specifically, "far end" refers to the end close to the ascending direction, and "near end" refers to the end close to the descending direction, taking fig. 1 as an example, the upper end of the rod part 13 in fig. 1 is the near end, and the lower end of the rod part 13 in fig. 1 is the far end.

Example one

Referring to fig. 1 and 2, an automatic blanking material grabbing device includes a degumming frame 3, a translation device 2, and a lifting device 1 connected to a far end of the translation device 2, where the lifting device 1 includes a second platform 10, a support 12 is provided at a far end of the second platform 10, four corners of a far end of the support 12 are provided with first hook portions 121 with upward openings, four corners of a near end of the degumming frame 3 are provided with second hook portions 31 with downward openings, the first hook portions 121 respectively hook the second hook portions 31, and the lifting device 1 is lifted in a vertical direction relative to the translation device 2, so that the degumming frame 3 falls into a carrier 4.

Specifically, the second hook 31 can rotate relative to the first plate 32 and the second plate 33, so that the second hook 31 can hook the first hook 121 conveniently.

The specific structure of the translation means 2 and the lifting means 1 is described below as follows:

referring to fig. 2, further, the translation device 2 includes two slide bars 21 and a first platform 20 sliding on the slide bars 21, and the first platform 20 is provided with at least two shafts 24.

Referring to fig. 2, the elevator shaft 24 further includes a first hole 241 formed on the first platform 20, and a limiting frame 242 disposed at a proximal end of the first hole 241, wherein the limiting frame 242 is a semi-surrounding structure.

Referring to fig. 1, further, two rod portions 13 are vertically disposed at a proximal end of the second platform 10, a tooth portion 131 is disposed on a surface of the rod portion 13, and the rod portion 13 passes through the first hole 241 and vertically ascends and descends in the limiting frame 242.

Referring to fig. 2, further, a first fixing seat 22 is disposed at a proximal end of the first platform 20, the proximal end of the first fixing seat 22 is connected to a first motor 221, the first rotating shaft 222 penetrates through the first fixing seat 22, an output end of the first motor 221 drives the first rotating shaft 222 to rotate through gear transmission in the prior art, first gears 223 are disposed at two ends of the first rotating shaft 222, and the first gears 223 are engaged with the tooth portions 131 of the rod portion 13 through openings of the limiting frame 242, so that the rod portion 13 is driven to lift when the first gears 223 rotate.

Referring to fig. 2, further, a second fixing seat 23 is disposed at a proximal end of the first platform 20, the proximal end of the second fixing seat 23 is connected to a second motor 231, the second rotating shaft 232 passes through the second fixing seat 23, an output end of the second motor 231 drives the second rotating shaft 232 to rotate through gear transmission in the prior art, and second gears 233 are disposed at two ends of the second rotating shaft 232. Preferably, a bearing seat (not shown) is further provided at the proximal end of the first platform 20 for fixing the second rotating shaft 232, so as to prevent the second rotating shaft 232 from being deformed and damaged due to the pushing force on the first platform 20.

Referring to fig. 2, further, the automatic blanking and material grabbing device further includes a moving rod (not shown in the figure), the moving rod is disposed right above the sliding rod 21 and parallel to the sliding rod 21, the distal end of the moving rod has insections to engage with the second gear 233, so that the second gear 233 drives the first platform 20 to slide along the sliding rod 21 when rotating.

Referring to fig. 1, further, a photoelectric sensor 11 is disposed at a proximal end of the second platform 10, and the photoelectric sensor 11 is connected to the first motor 221 for controlling the height of the second platform 10. The light emitted from the emitting end of the photoelectric sensor 11 is perpendicular to the first platform 20, and the lifting distance of the second platform 10 is detected by converting the reflected light signal into an electric signal.

The specific structure of the degumming frame 3 and the carrier 4 is described below as follows:

referring to fig. 1, the frame 3 further includes a first plate 32 and a second plate 33, three rack bars 34 are respectively disposed between the first plate 32 and the second plate 33 along a lateral direction, two rack bars 34 are disposed along a bottom direction, and eight rack bars 34 enclose a space for accommodating silicon wafers.

Referring to fig. 1, further, the carrier 4 includes a box 41 and four rollers 42 disposed at a distal end of the box 41.

The utility model discloses a concrete work flow as follows:

after the silicon wafer in the degumming rack 3 is cleaned in the water tank (not shown in the figure), the second motor 231 rotates to make the second gear 233 drive the second platform 10 to slide along the slide bar 21, so that the automatic blanking material grabbing device stops right above the water tank, the first motor 221 rotates to make the first gear 223 drive the rod part 13 to descend, the first hook parts 121 are respectively hooked on the corresponding second hook parts 31, the first motor 221 rotates in the reverse direction to make the first gear 223 drive the rod part 13 to ascend, and the lifting device 1 drives the degumming rack 3 to ascend.

The second motor 231 rotates to enable the second gear 233 to drive the second platform 10 to slide along the slide bar 21, so that the automatic blanking material grabbing device stops right above the box body 41 of the carrier 4, the first motor 221 rotates to enable the first gear 223 to drive the rod part 13 to descend, the lifting device 1 drives the degumming frame 3 to descend to fall into the box body 41, and the first hook part 121 and the second hook part 31 are unhooked.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. The utility model provides an automatic material device is grabbed in unloading which characterized in that: including taking off gluey frame, translation device and with the elevating gear that translation device distal end is connected, elevating gear includes the second platform, the second platform distal end has the support, support distal end four corners department sets up the first portion of colluding that the opening is up, take off gluey frame near-end four corners department sets up the second portion of colluding that the opening is down, first portion of colluding catches on respectively the second portion of colluding, elevating gear for translation device goes up and down along vertical direction, makes it falls into in the carrier to come unstuck the frame.

2. The automatic blanking and material grabbing device as claimed in claim 1, wherein: the translation device comprises a sliding rod and a first platform sliding on the sliding rod, and the first platform is provided with at least two lifting shafts.

3. The automatic blanking and material grabbing device as claimed in claim 2, wherein: the elevator shaft comprises a first hole formed in the first platform and a limiting frame arranged at the near end of the first hole.

4. The automatic blanking and material grabbing device as claimed in claim 3, wherein: the near end of the second platform is provided with at least two rod parts, the surfaces of the rod parts are provided with teeth, and the rod parts penetrate through the first holes and vertically lift in the limiting frame.

5. The automatic blanking and material grabbing device as claimed in claim 4, wherein: the near end of the first platform is provided with a first fixing seat, the first fixing seat comprises a first motor and a first rotating shaft driven by the output end of the first motor, two ends of the first rotating shaft are provided with first gears, and the first gears are meshed with the tooth parts of the rod parts.

6. The automatic blanking and material grabbing device as claimed in claim 2, wherein: the first platform near-end sets up the second fixing base, the second fixing base include the second motor and by second motor output driven second pivot, second pivot both ends set up the second gear.

7. The automatic blanking and material grabbing device as claimed in claim 6, wherein: the automatic blanking and material grabbing device further comprises a moving rod, the moving rod is arranged in parallel with the sliding rod, and the far end of the moving rod is meshed with the second gear.

8. The automatic blanking and material grabbing device as claimed in claim 1, wherein: and a photoelectric sensor is arranged at the near end of the second platform.

9. The automatic blanking and material grabbing device as claimed in claim 1, wherein: the degumming frame comprises a first plate and a second plate, and at least six toothed bars are arranged between the first plate and the second plate to enclose a space for accommodating a silicon wafer.

10. The automatic blanking and material grabbing device as claimed in claim 1, wherein: the carrier comprises a box body and four rollers arranged at the far end of the box body.