CN218196137U

CN218196137U - Splitting machine

Info

Publication number: CN218196137U
Application number: CN202222212753.1U
Authority: CN
Inventors: 邹志勇; 梁国炤; 胡心悦; 王利彪; 周福海; 余俊华; 高云峰
Original assignee: Shenzhen Hans Semiconductor Equipment Technology Co Ltd
Current assignee: Shenzhen Hans Semiconductor Equipment Technology Co Ltd
Priority date: 2022-08-23
Filing date: 2022-08-23
Publication date: 2023-01-03
Anticipated expiration: 2032-08-23

Abstract

The application discloses lobe of a leaf machine. The lobe of a leaf machine includes: a machine platform; the receiving table assembly is arranged on the machine table and used for supporting the splitting position of the material sheet; the receiving table assembly comprises a first receiving table and a second receiving table, the first receiving table and the second receiving table support a material sheet together, and the first receiving table and the second receiving table can move along a first direction; the first sliding rail is arranged on the machine table along a first direction, and the first receiving table and the second receiving table are both in sliding connection with the sliding rail; and the cleaver assembly is arranged above the receiving platform assembly and used for splitting the material sheet on the receiving platform assembly. The application provides a crack mascerating machine that stability, rigidity and precision are all higher.

Description

Splitting machine

Technical Field

The application relates to the technical field of wafer processing, in particular to a splitting machine.

Background

The splitting machine is a device for splitting and separating the wafer. Wafers are silicon wafers used to make silicon semiconductor circuits. The splitting machine can automatically split the wafer, and compared with the manual separation of the wafer, the splitting machine is high in splitting efficiency and high in automation degree. However, the existing splitting machine has some problems, such as poor stability and structural rigidity, which results in poor precision.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the application provides a cracking machine with higher stability, rigidity and precision

To achieve the purpose, the following technical scheme is adopted in the application:

a lobe mill, comprising:

a machine platform;

the receiving table assembly is arranged on the machine table and used for supporting the splitting position of the material sheet; the receiving table assembly comprises a first receiving table and a second receiving table, the first receiving table and the second receiving table support a material sheet together, and the first receiving table and the second receiving table can move along a first direction;

the first sliding rail is arranged on the machine table along a first direction, and the first receiving table and the second receiving table are both connected with the first sliding rail in a sliding manner;

the first driving part is arranged on the machine table and used for driving the first receiving table to move along the first direction;

the second driving part is arranged on the machine table and used for driving the second receiving table to move along the first direction;

and the cleaver assembly is arranged above the receiving platform assembly and used for splitting the material sheet on the receiving platform assembly.

As an alternative to the above-described splitting machine, the first receiving stage and the second receiving stage each include:

the sliding plate is connected with the first sliding rail;

the connecting seat is arranged on the sliding plate;

the receiving piece is arranged at the top end of the connecting seat and used for supporting the material piece.

As an alternative of the above splitting machine, a jack screw is arranged between the connecting seat and the sliding plate of at least one of the first receiving platform and the second receiving platform, so that the height of at least one of the first receiving platform and the second receiving platform is adjustable.

As an alternative to the above-mentioned splitting machine, the jackscrew is a hollow cylinder, and comprises a bottom wall and a side wall;

the periphery of the jackscrew is provided with external threads, the connecting seat is provided with a jackscrew mounting hole, internal threads are arranged in the jackscrew mounting hole, the jackscrew is arranged in the jackscrew mounting hole, and the bottom of the jackscrew is abutted to the sliding plate;

the diapire is equipped with and link up the mounting hole of diapire, the jackscrew pass through the screw with the slide is connected.

As an alternative of the above-mentioned splitting machine, the splitting machine further comprises:

the clamping assembly is arranged on the machine table and used for supporting and clamping the material sheet, and the clamping assembly can move along the first direction; the clamping assembly is annular, and the receiving platform assembly is arranged in the annular.

the third driving piece is arranged on the machine table, connected with the clamping assembly and used for driving the clamping assembly to move along the first direction;

the first driving part is arranged at one end of the receiving platform assembly along the first direction; the second driving piece is arranged on one side of the receiving platform assembly along a second direction, and the third driving piece is arranged on the other side of the receiving platform assembly along the second direction; the second direction is perpendicular to the first direction.

As an alternative to the above wafer splitting machine, the clamping assembly comprises:

the mounting bottom plate is connected with the machine table in a sliding mode and can move along the first direction;

the revolving stage rotates and locates on the mounting plate, the revolving stage includes inner circle revolving stage and outer lane revolving stage, inner circle revolving stage detachable locates in the outer lane revolving stage, so that the revolving stage adapts to the tablet of not unidimensional.

the feeding assembly is arranged on the machine table and comprises a lifting table, and the lifting table is used for placing a material box;

the positioning assembly comprises a supporting plate, a positioning track and a camera; the supporting plate is horizontally arranged on the machine table, and the positioning rails are arranged on two sides of the supporting plate along the first direction; the camera is arranged above the supporting plate and used for photographing the material sheets on the supporting plate;

the feeding assembly, the positioning assembly and the receiving assembly are sequentially arranged along a second direction, and the second direction is perpendicular to the first direction.

As an alternative scheme of the splitting machine, at least two groups of material box mounting holes are formed in the lifting platform and used for fixing material boxes, and the at least two groups of material box mounting holes can be suitable for material boxes with different sizes;

at least two groups of rail mounting hole sites are arranged on the supporting plate and used for mounting the positioning rails, and the material sheets with different sizes can be positioned when the positioning rails are mounted to different rail mounting hole sites.

As an alternative to the above-described splitter, the riving knife assembly comprises:

the fourth driving part is arranged on the machine table;

and the riving knife is connected with the output end of the fourth driving part, and the fourth driving part can drive the riving knife to move up and down.

The embodiment of the application has the advantages that: two receiving platforms of the receiving platform assembly are connected to the machine platform through the same sliding rail in a sliding mode, and the two receiving platforms are driven by the driving piece respectively and move along the first direction relatively to adjust the position of the receiving platform and the distance between the two receiving platforms. In this application embodiment, receive the platform through same slide rail sliding connection on the board with two, for receiving the platform to connect respectively on the slide rail of difference, can promote the stability and the rigidity of connection. Because receive the platform to be connected with the slide rail generally will receive the platform to install on the slide rail slider, the cooperation itself between slider and the slide rail just has the clearance, if will receive the platform to connect respectively on different slide rails, stability and holistic rigidity are lower to the precision also can reduce. In the embodiment of the application, two receiving platforms are connected to the platform through the same slide rail in a sliding manner, so that the stability, the rigidity and the precision of the splitting machine can be improved.

Drawings

FIG. 1 is a schematic structural diagram of a breaking machine according to an embodiment of the present disclosure;

FIG. 2 is a schematic view of a part of the structure of a splitting machine according to an embodiment of the present application;

FIG. 3 is a schematic view of the structure of FIG. 2 from another perspective;

FIG. 4 is a schematic view of the structure of FIG. 2 with the clamping assembly removed;

FIG. 5 is an enlarged schematic view of portion A of FIG. 4;

FIG. 6 is a schematic view of a connection seat of the first receiving platform according to an embodiment of the present application;

fig. 7 is a schematic cross-sectional view of a connecting seat of a first receiving platform according to an embodiment of the present application;

FIG. 8 is a schematic structural view of a jackscrew according to an embodiment of the present application;

FIG. 9 is a schematic structural view of another perspective of a jackscrew in an embodiment of the present application;

FIG. 10 is a schematic structural diagram of a loading assembly according to an embodiment of the present application;

FIG. 11 is a schematic structural diagram of a positioning assembly according to an embodiment of the present application;

fig. 12 is a schematic structural diagram of a tow assembly according to an embodiment of the present application.

In the figure:

100. a splitting machine;

110. a machine platform; 111. hollowing out holes;

120. a receiving assembly; 121. a first receiving stage; 1211. a first driving member; 1212. a slide plate; 1213. a connecting seat; 12131. a jackscrew mounting hole; 1214. receiving a workpiece; 1215. carrying out top thread; 12151. a bottom wall; 12151a, mounting holes; 12152. a side wall; 1216. a gasket; 122. a second receiving stage; 1221. a second driving member;

130. a first slide rail;

140. a riving knife assembly; 141. a fourth drive; 142. a riving knife;

150. a photographing component;

160. a clamping assembly; 161. a third driving member; 162. rotating the driving member; 163. mounting a bottom plate; 164. a rotating table; 1641. an inner ring turntable; 1642. an outer ring turntable; 165. a second slide rail; 166. a clamping member;

170. a feeding assembly; 171. a lifting platform; 1711. a material box mounting hole site; 1712. positioning blocks; 172. a magazine; 173. a lifting drive member;

180. a positioning assembly; 181. a support plate; 182. positioning the track; 183. a camera; 184. a panel light source;

190. a dragging component; 191. a fifth driving member; 192. a sixth driving member; 193. a clamping jaw.

Detailed Description

The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the application and are not limiting of the application. It should be further noted that, for the convenience of description, only some of the structures related to the present application are shown in the drawings, not all of the structures.

In the description of the present application, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; may be directly connected or indirectly connected through an intermediate. The meaning of the above terms in the present application can be understood by those of ordinary skill in the art as the case may be.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact of the first and second features, or may comprise contact of the first and second features not directly but through another feature in between.

In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are used based on the orientations and positional relationships shown in the drawings, and are only for convenience of description and simplification of operation, but do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. The terms "first" and "second" are used only for descriptive purposes and are not intended to be limiting.

The embodiment of the application provides a splitting machine. For convenience of description, the first direction, the second direction, and the third direction are defined in the embodiments of the present application. The first direction, the second direction and the third direction are vertical to each other. As shown in fig. 1, the first direction, the second direction, and the third direction may correspond to a Y direction, an X direction, and a Z direction of the spatial coordinate system, respectively. The first direction, the second direction and the third direction can also be understood as the front-back direction, the left-right direction and the up-down direction of the splitting machine.

Referring to fig. 1 to 5, the splitting machine 100 includes a machine base 110, a receiving assembly 120, a first slide rail 130, a first driving member 1211, a second driving member 1221, and a riving knife assembly 140. The receiving table assembly 120 is disposed on the machine table 110, and the receiving table assembly 120 is used for supporting the splitting position of the material sheet. As shown in fig. 4 and 5, the stage assembly 120 includes a first stage 121 and a second stage 122. The first receiving table 121 and the second receiving table 122 jointly support the material sheet, and a gap can be arranged between the first receiving table 121 and the second receiving table 122, so that the riving knife 142 can split the material sheet from the gap. Both the first receiving table 121 and the second receiving table 122 are movable in a first direction so as to adjust the gap between the first receiving table 121 and the second receiving table 122 to accommodate different sized sheets. In the embodiment of the present application, the web refers to a wafer web.

As shown in fig. 4 and 5, the first slide rail 130 is disposed on the machine base 110 and arranged along a first direction. The first receiving platform 121 and the second receiving platform 122 are slidably connected to the first slide rail 130. As shown in fig. 5, the first receiving table 121 and the second receiving table 122 are disposed to face each other in a front-rear direction, and both the first receiving table 121 and the second receiving table 122 can move along the first slide rail 130, and the first receiving table 121 and the second receiving table 122 are guided by the first slide rail 130. The first driving member 1211 and the second driving member 1221 are disposed on the machine table 110, the first driving member 1211 is used for driving the first receiving table 121 to move along the first direction, and the second driving member 1221 is used for driving the second receiving table 122 to move along the first direction. The riving knife assembly 140 is disposed above the table assembly 120 for cleaving the web on the table assembly 120. The number of the first slide rails 130 may be two, the two first slide rails 130 are disposed at intervals along the second direction, and the two sides of the first receiving platform 121 and the two sides of the second receiving platform 122 along the second direction are respectively connected to the two first slide rails 130. The two first slide rails 130 are arranged to improve the smoothness of the movement of the receiving platform.

In the embodiment of the present application, two receiving stations (the first receiving station 121 and the second receiving station 122) of the receiving station assembly 120 are slidably connected to the machine station 110 through the same sliding rail (the first sliding rail 130), and the two receiving stations are respectively driven by the driving element to move relatively along the first direction. The first receiving platform 121 and the second receiving platform 122 are slidably connected to the machine platform 110 through the same slide rail, and compared with the case that the first receiving platform 121 and the second receiving platform 122 are respectively connected to different slide rails, the stability and rigidity of connection can be improved. Because the connection of receiving platform and slide rail will generally receive the platform to install on the slide rail slider, the cooperation itself between slider and the slide rail just has the clearance, if will receive platform 121 and second to receive platform 122 to connect respectively on different slide rails, stability and holistic rigidity are lower to the precision also can reduce. In the embodiment of the application, the first receiving table 121 and the second receiving table 122 are slidably connected to the machine table 110 through the same slide rail, so that the stability, rigidity and precision of the splitting machine 100 can be improved. The first slide rail 130 may be a double-bead heavy pre-compression guide rail.

As shown in fig. 5, each of the first and second receiving

stages

121 and 122 includes a sliding plate 1212, a connecting seat 1213, and a receiving member 1214. The receiving elements 1214 are force-bearing support elements in direct contact with the material. The sled 1212 is coupled to the first sled 130. Connecting seat 1213 is provided on slide 1212. The receiver 1214 is disposed at the top end of the connecting seat 1213. The connecting seats 1213 have a certain height so that the receiving table can jack up the material sheets to facilitate the splitting of the material sheets.

Referring to fig. 5 to 7, a top thread 1215 is provided between the coupling seat 1213 and the sliding plate 1212 of at least one of the first and second tables 121 and 122, so that the height of at least one of the first and second tables 121 and 122 can be adjusted, thereby facilitating the adjustment of the first and second tables 121 and 122 to the same height.

Specifically, the top thread 1215 is disposed between the connecting seat 1213 and the sliding plate 1212 of the first receiving base 121. As shown in fig. 8 and 9, the tip 1215 is hollow and cylindrical and includes a bottom wall 12151 and a side wall 12152. The outer circumference of the tip thread 1215 is provided with an external thread, and as shown in fig. 6, the coupling seat 1213 is provided with a tip thread mounting hole 12131, an internal thread is provided in the tip thread mounting hole 12131, and the tip thread 1215 is mounted in the tip thread mounting hole 12131 such that the tip thread 1215 is screwed in the tip thread mounting hole 12131 by the external thread of the outer circumference thereof being engaged with the internal thread in the tip thread mounting hole 12131. As shown in fig. 7, the jack thread mounting hole 12131 penetrates the top and bottom of the slide plate 1212, the jack thread 1215 penetrates the jack thread mounting hole 12131, and the bottom of the jack thread 1215 abuts the slide plate 1212, as shown in fig. 5 and 7. Specifically, referring to fig. 6 and 7, the top thread 1215 may abut the sliding plate 1212 through a shim 1216. When the tip thread 1215 is rotated, the tip thread 1215 may move up and down in the tip thread installation hole 12131, thereby adjusting the height of the coupling seat 1213, that is, the height of the entire first receiving table 121.

Meanwhile, as shown in fig. 8 and 9, a bottom wall 12151 of the thread 1215 is provided with a mounting hole 12151a penetrating the bottom wall 12151, and the thread 1215 is connected to the sled 1212 by a screw. The screw is inserted through the mounting hole 12151a in the bottom wall 12151 of the top thread 1215 and locked to the sled 1212, thereby securing the top thread 1215 to the sled 1212. In turn, set screw 1215 is threadably engaged with attachment base 1213 so that attachment base 1213 is secured to sled 1212. During installation, the connecting section 1213 is adjusted in height by rotating the top thread 1215, and then the top thread 1215 is locked to the sled 1212 by passing a screw through the mounting hole 12151a in the bottom wall 12151 of the top thread 1215. In the installation process, the meter can be made while installing, namely the height of the receiving platform can be adjusted while installing.

It is understood that the top thread 1215 may be mounted on the second receptacle 122, or the top thread 1215 may be mounted on both the first receptacle 121 and the second receptacle 122 in other embodiments, and is not limited thereto.

As shown in fig. 4, a photographing assembly 150 is disposed below the platform assembly 120. The tablet on the subject table assembly 120 is photographed by the photographing assembly 150, so that the positions of the first subject table 121 and the second subject table 122 are adjusted according to the photographing result.

As shown in fig. 2 and 3, the splitter 100 also includes a clamp assembly 160. The clamping assembly 160 is disposed on the machine table 110 and is used for supporting and clamping the material sheet. The clamping assembly 160 is movable in a first direction to move the sheet such that different cleave lines on the sheet are aligned with the catch table assembly 120 and the riving knife 142 to cleave different locations of the sheet. As shown in fig. 2, the clamping assembly 160 has a ring shape, the table assembly 120 is disposed in the ring shape, and the clamping assembly 160 surrounds the table assembly 120. The material sheets are generally circular and the edges of the material sheets are supported on the clamping assembly 160 and clamped by the clamping assembly 160. The middle position of the material sheet is supported on the table assembly 120, so that the table assembly 120 supports the position of the material sheet to be split in the middle, and the chopper 142 splits the position of the material sheet supported on the table assembly 120. The table assembly 120 may be positioned higher than the clamping assembly 160 so that the table assembly 120 lifts the web slightly to facilitate cleaving.

As shown in fig. 3 and 4, the splitter 100 further includes a third driving member 161. The third driving member 161 is disposed on the machine base 110, and the third driving member 161 is connected to the clamping assembly 160 and is used for driving the clamping assembly 160 to move along the first direction. As shown in fig. 4, the first driving member 1211 is disposed at one end of the table assembly 120 in the first direction, and the first driving member 1211 may be disposed at a front end of the table assembly 120. The second driving member 1221 is disposed at one side of the stage assembly 120 in the second direction, and the second driving member 1221 is disposed at the left side of the stage assembly 120. The third driving member 161 is disposed on the other side of the stage assembly 120 in the second direction, and the third driving member 161 may be disposed on the right side of the stage assembly 120. Referring to fig. 3, the above configuration is provided to make the position of the machine table 110 behind the receiving unit 120 be free, and here, a hollow hole 111 may be provided to accommodate the rotary driving member 162. As shown in fig. 3, the clamping assembly 160 may include a mounting base plate 163, a rotary table 164, and a rotary drive 162, wherein the rotary table 164 and the rotary drive 162 are mounted on the mounting base plate 163, and the rotary drive 162 is used to drive the rotary table 164 to rotate. The main body of the rotary driving member 162 can be accommodated in the hollow hole 111 of the machine 110, thereby saving space.

As shown in fig. 3, the mounting base plate 163 of the clamping assembly 160 is slidably connected to the machine base 110, and the mounting base plate 163 can move along a first direction. Specifically, the mounting base plate 163 may be slidably connected to the machine base 110 through the second slide rail 165. The rotary table 164 is rotatably provided on the mounting base plate 163. The rotary drive 162 may be, for example, a motor. The rotary table 164 is geared to the drive end of the rotary drive 162 so that the rotary drive 162 drives the rotary table 164 to rotate. A clamping member 166 is also provided on the turntable 164 to clamp the web on the turntable 164. As shown in fig. 2, the rotary table 164 comprises an inner ring turntable 1641 and an outer ring turntable 1642, the inner ring turntable 1641 being removably arranged within the outer ring turntable 1642 to adapt the rotary table 164 to different sized webs. When the web size is small, the inner turn-table 1641 may be disposed inside the outer turn-table 1642 to support the web of smaller size; when the web is larger in size, the inner turn 1641 may be removed from the outer turn 1642 and the larger size web may be supported by the outer turn 1642.

In one embodiment, as shown in fig. 1, the splitting machine 100 further includes a feeding assembly 170 and a positioning assembly 180. The feeding assembly 170, the positioning assembly 180 and the receiving assembly 120 are sequentially arranged along the second direction. Such that the web is sequentially moved from the feeding assembly 170 to the positioning assembly 180 and the table assembly 120. The loading assembly 170 is disposed at the front end of the machine 110. As shown in fig. 10, the loading assembly 170 includes a lifting platform 171, and the lifting platform 171 is used for placing the magazine 172. The tablets are stacked in the magazine 172. The lift table 171 can be lifted and lowered. Specifically, as shown in fig. 10, the feeding assembly 170 may further include a lifting driving member 173, and the lifting driving member 173 is configured to drive the lifting platform 171 to lift. The lifting driving member 173 is disposed on the machine base 110, and the lifting platform 171 is connected to the lifting driving member 173.

The positioning assembly 180 is used for shooting and positioning the material sheet so as to acquire the outline size of the wafer. As shown in fig. 11, the positioning assembly 180 includes a support plate 181, a positioning rail 182, and a camera 183. The supporting plate 181 is horizontally disposed on the machine table 110, and the positioning rails 182 are disposed on two sides of the supporting plate 181 along the first direction. In other words, the positioning rails 182 are two, and the two positioning rails 182 are respectively disposed at front and rear sides of the support plate 181. When a sheet is transferred in a second direction onto the positioning assembly 180, the sheet is sandwiched between the two positioning rails 182 for positioning and securing. A camera 183 is mounted above the support plate 181, and the camera 183 is used to take a picture of the material sheets on the support plate 181. The camera 183 may employ a wide-angle camera. Further, as shown in fig. 11, a panel light source 184 is disposed on the supporting plate 181, and the panel light source 184 is located between the two positioning rails 182. When the web is moved onto the support plate 181, the panel light source 184 emits infrared light so that the camera 183 can clearly capture the wafer profile.

In the embodiment of the present application, in order to adapt to the splitting operation of tablets with different sizes, as shown in most enlarged portions in fig. 10, at least two sets of magazine mounting hole locations 1711 are arranged on the lifting table 171, the magazine mounting hole locations 1711 are used for fixing magazines, and the at least two sets of magazine mounting hole locations 1711 can be suitable for magazines 172 with different sizes, so that the lifting table 171 can mount and fix magazines 172 with different sizes, that is, tablets with different sizes. Specifically, the magazine 172 is positioned by mounting the positioning block 1712 on the elevating table 171 through a screw and a magazine mounting hole 1711, and abutting the side wall of the magazine 172 against the positioning block 1712. The positioning block 1712 shown in fig. 10 is mounted on a group of magazine mounting holes 1711, which is suitable for positioning a 4-inch magazine 172; when the magazine 172 with 6 inches of tablets needs to be positioned, the positioning blocks 1712 are detached and mounted on the other set of magazine mounting holes 1711.

Similar to the arrangement of the plurality of magazine mounting holes 1711 on the lifting platform 171, referring to fig. 11, at least two sets of rail mounting holes for mounting the positioning rails 182 may also be arranged on the supporting plate 181, so that the positioning rails 182 may be mounted on different rail mounting holes, and the distance between two positioning rails 182 may be adjusted to clamp tablets of different sizes. When the positioning rail 182 is arranged at different rail mounting hole positions, the material sheets with different sizes can be positioned.

As shown in FIG. 1, the riving knife assembly 140 includes a fourth drive member 141 and a riving knife 142. The fourth driving member 141 is disposed on the machine base 110. Specifically, the riving knife 142 must have a height since it is positioned above the platform assembly 120. Therefore, a gantry may be provided on the machine base 110, and the fourth driving member 141 may be mounted on the gantry. The riving knife 142 is connected with the output end of the fourth driving part 141, and the fourth driving part 141 can drive the riving knife 142 to move up and down so as to realize the lifting of the riving knife 142.

As shown in fig. 1, the splitter 100 further includes a tow assembly 190. As shown in fig. 1, the dragging assembly 190 is disposed at one side, for example, the front side, of the machine table 110 along the first direction. The tow assembly 190 is used to move the web in a second direction. As shown in fig. 12, the tow assembly 190 includes a fifth drive 191, a sixth drive 192, and a jaw 193. The fifth driving element 191 is installed on the machine platform 110, the sixth driving element 192 is connected to the fifth driving element 191, and the fifth driving element 191 can drive the sixth driving element 192 to move along the second direction. The jaw 193 is connected to a sixth drive member 192, and the sixth drive member 192 can drive the jaw 193 up and down. The clamping jaw 193 may employ, for example, a clamping jaw 193 cylinder, the clamping jaw 193 being used to clamp a web. When it is desired to move a web, the sixth drive 192 drives the clamping jaw 193 down to a height corresponding to the web, the clamping jaw 193 clamps the web, and the fifth drive 191 drives the clamping jaw 193 to move in the second direction, dragging the web, for example, from the magazine 172 to the positioning assembly 180, or from the positioning assembly 180 to the clamping assembly 160. Alternatively, as shown in fig. 12, the clamping jaws 193 and the sixth drive 192 may be provided in two sets, one set of clamping jaws 193 for moving a web from the magazine 172 to the positioning assembly 180 and the other set of clamping jaws 193 for moving a web from the positioning assembly 180 to the clamping assembly 160.

In the embodiment of the present application, the working process of the splitting machine 100 is:

the material dragging assembly 190 moves the material sheet in the material box 172 of the material loading assembly 170 to the positioning assembly 180, the material sheet is clamped by the positioning rails 182 of the positioning assembly 180, the camera 183 of the positioning assembly 180 photographs the material sheet, and the outline size of the wafer is captured;

the dragging assembly 190 drags the material sheet on the positioning assembly 180 to the clamping assembly 160, and the clamping assembly 160 clamps the wafer material sheet;

the photographing assembly 150 photographs the tablets, adjusts the positions of the first receiving table 121 and the second receiving table 122 according to the photographing result, and adjusts the rotation angle of the rotating table 164 according to the photographing result, so as to ensure that the cleaving line on the wafer and the cutting edge of the riving knife 142 are on the same horizontal line and have no deflection angle;

the fourth driving part 141 of the riving knife assembly 140 drives the riving knife 142 to descend, so as to split the wafer on the receiving platform assembly 120;

after one of the splitting lines of the wafer is split, the clamping assembly 160 moves along the first direction, moves the next splitting line to the receiving table assembly 120, and continues to split the next splitting line until all the splitting lines in the first direction are split; the turntable 164 of the clamping assembly 160 rotates 90 degrees to rotate the wafer sheet 90 degrees, and repeats the previous splitting step, and continues to split the wafer sheet rotated 90 degrees until the wafer splitting is completed.

It should be understood that the above examples are merely examples for clearly illustrating the present application, and are not intended to limit the embodiments of the present application. Numerous obvious variations, adaptations and substitutions will occur to those skilled in the art without departing from the scope of the present application. This need not be, nor should it be exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.

Claims

1. A lobe machine, characterized by, includes:

a machine platform;

and the riving knife assembly is arranged above the receiving platform assembly and is used for splitting the material sheet on the receiving platform assembly.

2. The lobe of claim 1, wherein the first and second tables each include:

the sliding plate is connected with the first sliding rail;

the connecting seat is arranged on the sliding plate;

the receiving piece is arranged at the top end of the connecting seat and used for supporting the material sheet.

3. The splitting machine of claim 2, wherein a jack screw is arranged between the connecting seat and the sliding plate of at least one of the first receiving platform and the second receiving platform, so that the height of at least one of the first receiving platform and the second receiving platform is adjustable.

4. The chipper of claim 3, wherein the jackscrew is hollow cylindrical comprising a bottom wall and a side wall;

the periphery of the jackscrew is provided with external threads, the connecting seat is provided with a jackscrew mounting hole, internal threads are arranged in the jackscrew mounting hole, the jackscrew is arranged in the jackscrew mounting hole, and the bottom of the jackscrew is abutted against the sliding plate;

5. The splitting machine of claim 1, further comprising:

6. The wafer splitter of claim 5, further comprising:

the first driving piece is arranged at one end of the receiving platform assembly along the first direction; the second driving piece is arranged on one side of the receiving platform assembly along a second direction, and the third driving piece is arranged on the other side of the receiving platform assembly along the second direction; the second direction is perpendicular to the first direction.

7. The wafer splitter of claim 5, wherein the clamping assembly comprises:

the revolving stage rotates to be located mounting plate is last, the revolving stage includes inner circle revolving stage and outer lane revolving stage, inner circle revolving stage detachable locates in the outer lane revolving stage, so that the revolving stage adapts to not unidimensional tablet.

8. The splitting machine of claim 1, further comprising:

9. The splitting machine as claimed in claim 8, wherein at least two sets of magazine mounting holes are provided on the lifting table for securing magazines, at least two sets of magazine mounting holes being adaptable for magazines of different sizes;

10. The splitting machine of claim 1, wherein the riving knife assembly comprises:

the fourth driving piece is arranged on the machine table;