CN218137373U

CN218137373U - Mechanism for preventing mortar from splashing outside

Info

Publication number: CN218137373U
Application number: CN202222055817.1U
Authority: CN
Inventors: 靳立辉; 杨骅; 杜晨朋; 白子川; 吕原杰
Original assignee: Tianjin Huanbo Science and Technology Co Ltd
Current assignee: Tianjin Huanbo Science and Technology Co Ltd
Priority date: 2022-08-05
Filing date: 2022-08-05
Publication date: 2022-12-27
Anticipated expiration: 2032-08-05

Abstract

The utility model provides a mechanism for preventing mortar from splashing outwards, which comprises a protective box body, wherein the protective box body is arranged at the inlet end of a sand-blasting machine and is used for preventing mortar from splashing outwards; and one end of the negative pressure gas circuit is arranged on the protective box body, and the other end of the negative pressure gas circuit extends to the sand blasting machine and is used for reversely sucking the mortar in the protective box body back to the sand blasting machine. The utility model has the advantages that the problem of mortar splashing outside in the process of silicon wafer sand blasting is solved, the external equipment is protected from being corroded and damaged by the mortar, and the environment is indirectly protected; the protective cover is in a visible state, the mortar amount in the cover can be observed at any time, the mortar in the cover can be cleaned at any time, the mortar can be effectively prevented from being accumulated in the protective cover, and the mortar port is prevented from being blocked; the mortar splashed into the cover can be recycled, and the recycling rate of the mortar is improved.

Description

Mechanism for preventing mortar from splashing outwards

Technical Field

The utility model belongs to semiconductor sand blasting machine field especially relates to a prevent mechanism that mortar spatters outward.

Background

In the semiconductor wafer manufacturing industry, a sand blasting process is needed in the manufacturing process of silicon wafers, sand blasting is generally conducted by a sand blasting machine in the process, the silicon wafers are sent to an inlet end of the sand blasting machine, the number of the silicon wafers is large, and a source is needed to be sent to the sand blasting machine continuously, so that the inlet of the sand blasting machine needs to be opened for a long time, the silicon wafers can enter the sand blasting machine conveniently, however, in the sand blasting process, mortar is inevitable to splash from the inlet end to the outside, external equipment is easily polluted by the mortar, other equipment can be seriously blocked or even damaged, therefore, in order to avoid the mortar from splashing outside, and in order to avoid the waste of the mortar, a mechanism for preventing the mortar from splashing outside needs to be designed, the equipment is effectively protected, and meanwhile, the utilization rate of the mortar can be improved.

SUMMERY OF THE UTILITY MODEL

The to-be-solved problem of the utility model is to provide a prevent that mortar from spattering outward mechanism, especially be fit for silicon chip sandblast in-process and prevent that mortar from spattering outward.

In order to solve the technical problem, the utility model discloses a technical scheme is:

a mechanism for preventing mortar from splashing outward, comprising:

the protective box body is arranged at the inlet end of the sand blasting machine and used for preventing mortar from splashing outwards;

and one end of the negative pressure gas circuit is arranged on the protective box body, and the other end of the negative pressure gas circuit extends to the sand blasting machine and is used for reversely sucking the mortar in the protective box body back to the sand blasting machine.

Furthermore, the protection box body is of a cubic structure.

Furthermore, the protection box body comprises a box body support, and the box body support is used for receiving sprayed mortar.

Furthermore, the protection box body further comprises a protection cover, and the protection cover is arranged at the upper end of the box body support and used for preventing mortar from splashing outside.

Furthermore, a conveying hole is formed in the side, connected with the inlet end of the sand blasting machine, of the protective cover, and the conveying hole is used for conveying the silicon wafer into the sand blasting machine.

Furthermore, a handle is arranged on the protective cover and used for lifting the protective cover.

Furthermore, the negative pressure air circuit comprises a vacuum suction port, and the vacuum suction port is arranged at the top end inside the protective box body and used for absorbing mortar in the protective box body.

Furthermore, the negative pressure gas circuit still includes the exhaust pipeline, the one end of exhaust pipeline is connected sand blasting machine, and the other end extends to in the protective housing with the vacuum suction mouth is connected, be used for with the absorptive mortar of vacuum suction mouth is carried back sand blasting machine.

Furthermore, a conveying belt is arranged in the protective box body and used for conveying the silicon wafers into the sand blasting machine.

The utility model has the advantages and positive effects be:

(1) The problem of mortar splashing outside in the process of silicon chip sand blasting is solved, external equipment is protected from being corroded and damaged by the mortar, and the environment is indirectly protected;

(2) The protection casing is visual state, observes the interior mortar volume of cover at any time to can clear up the interior mortar of cover at any time, can effectually prevent that the mortar from piling up in the protection casing, avoid the mortar mouth to block up.

(3) The mortar splashed into the cover can be recycled, and the recycling rate of the mortar is improved.

Drawings

Fig. 1 is a schematic view of a mechanism for preventing mortar from splashing according to an embodiment of the present invention.

In the figure:

1. case body support 2, protective cover 3 and conveying hole

4. Handle 5, vacuum suction port 6 and exhaust pipeline

7. Conveyor belt

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below by referring to the drawings are exemplary intended for explaining the present invention, and should not be construed as limiting the present invention.

As shown in fig. 1, the utility model discloses the structure of embodiment is shown, the utility model provides a relate to a prevent that the mortar from spattering outward the mechanism, this mechanism can effectually prevent in the silicon chip sandblast technology, the outer spattering of sandblast machine mortar, and this mechanism structurally includes: the protection box body is arranged at the inlet end of the sand blasting machine and used for preventing mortar from splashing outwards; on the protection box was located to the one end of negative pressure gas circuit to stretch into the protection box with the pipeline in, the other end extended to sand blasting machine for with the sand pulp back suction sand blasting machine in the protection box the embodiment of the utility model provides an, protection box installs in sand blasting machine's entrance point, the silicon chip gets into sand blasting machine's entry promptly, the purpose is in order to prevent that the mortar from the entry end blowout, and, in preferred scheme, protection box design is the cube structure, and the shape rule is convenient for install.

According to a further optimized scheme, the protective box body comprises a box body support 1, the box body support 1 is used for bearing sprayed mortar, the protective box body further comprises a protective cover 2, the protective cover 2 is arranged at the upper end of the box body support 1 in a covering mode and used for preventing the mortar from splashing outwards, the box body support 1 is made of steel materials or hard plastics and is not easy to bend and can bear certain impact force, the inner surface of the box body support 1 is a smooth surface, and the box body support is easy to clean after the mortar is adhered; 2 transparent material of protection casing, can be transparent plastic cover or glass cover, the size holds in the palm 1 equidimension with the box, and the junction of the two can design into embedded connection, and protection casing 2 inserts the edge that the box held in the palm 1 promptly, is convenient for mention the protection casing at any time, can clear up inside accumulational mortar at any time, for conveniently carrying protection casing 2, is equipped with handle 4 on the protection casing 2.

Preferably, one side of the protective cover 2 connected with the inlet end of the sand blasting machine is provided with a conveying hole 3, the conveying hole 3 is used for conveying a silicon wafer into the sand blasting machine, and the aperture of the conveying hole 3 is slightly larger than that of the inlet of the silicon wafer of the sand blasting machine, so that the situation that the silicon wafer is stuck during input is prevented.

According to the utility model discloses prevent mechanism that mortar spattered outward installs vacuum suction inlet 5 on the negative pressure gas circuit, and the inside top of protection box is located to vacuum suction inlet for absorb the mortar in the protection box, vacuum suction inlet 5 is uncovered for the outer end, and to the internal shrink, be convenient for inhale vacuum suction inlet 5 with the mortar in the box in, thereby reach the purpose that the mortar was retrieved.

The utility model discloses an in the embodiment, exhaust pipe way 6 is still installed to the negative pressure gas circuit, and sand blasting machine is connected to exhaust pipe way 6's one end, and the other end extends to and is connected with vacuum suction inlet 5 in the protective housing for carry back sand blasting machine with vacuum suction inlet 5 absorptive mortar, the mortar accumulation volume in the protective housing can be alleviated to the utilization ratio of effectual improvement mortar simultaneously.

According to the utility model discloses a prevent mechanism that mortar spattered outward is equipped with conveyer belt 7 in the protection box, and conveyer belt 7 is used for carrying the silicon chip to the sandblast built-in, has realized the automation process of silicon chip sandblast technology.

According to the utility model discloses prevent mechanism that mortar spattered outward, the beneficial effect of its production is:

(3) The mortar splashed into the cover can be recovered, and the recycling rate of the mortar is improved.

The embodiments of the present invention have been described in detail, but the description is only for the preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. All the equivalent changes and improvements made according to the application scope of the present invention should still fall within the patent coverage of the present invention.

Claims

1. The utility model provides a prevent mechanism that mortar splashes outward which characterized in that includes:

and one end of the negative pressure gas circuit is arranged on the protective box body, and the other end of the negative pressure gas circuit extends to the sand blasting machine and is used for reversely sucking back the mortar in the protective box body to the sand blasting machine.

2. The mechanism for preventing mortar from splashing outside as claimed in claim 1, wherein the protective box body is of a cubic structure.

3. The mortar splashing prevention mechanism according to claim 1 or 2, wherein the protective box body comprises a box body support, and the box body support is used for receiving sprayed mortar.

4. The mechanism for preventing mortar from splashing outwards as claimed in claim 3, wherein the protective box further comprises a protective cover, and the protective cover is arranged at the upper end of the box support and used for preventing mortar from splashing outwards.

5. The mechanism for preventing mortar from splashing outwards as claimed in claim 4, wherein a conveying hole is formed in one surface of the protective cover connected with the inlet end of the sand blasting machine, and the conveying hole is used for conveying a silicon wafer into the sand blasting machine.

6. The mechanism for preventing mortar from splashing according to claim 4, wherein a handle is arranged on the protective cover and used for lifting the protective cover.

7. The mechanism of claim 1, wherein the negative pressure air path comprises a vacuum suction port, and the vacuum suction port is disposed at a top end inside the protective box and is used for sucking mortar inside the protective box.

8. The mechanism for preventing mortar from splashing outside as claimed in claim 7, wherein the negative pressure air path further comprises an exhaust pipeline, one end of the exhaust pipeline is connected with the sand blasting machine, and the other end of the exhaust pipeline extends into the protective box and is connected with the vacuum suction port, and the exhaust pipeline is used for conveying the mortar absorbed by the vacuum suction port back to the sand blasting machine.

9. The mechanism for preventing mortar from splashing according to any one of claims 1 to 8, wherein a conveyor belt is arranged in the protective box and used for conveying silicon wafers into the sand blasting machine.