CN113941555B

CN113941555B - Water splashing prevention structure of coating barrel appearance

Info

Publication number: CN113941555B
Application number: CN202111077123.1A
Authority: CN
Inventors: 程永龙; 马林; 时丕航
Original assignee: Suzhou Maxwell Technologies Co Ltd
Current assignee: Maiwei Technology (Zhuhai) Co.,Ltd.
Priority date: 2021-09-14
Filing date: 2021-09-14
Publication date: 2022-08-26
Anticipated expiration: 2041-09-14
Also published as: CN113941555A

Abstract

The invention provides a splash-proof structure of a coating barrel shape, relates to the technical field of semiconductor production, and can be used for a wafer cleaning process to effectively prevent water from splashing; this splashproof water structure includes: integrated into one piece's staving subassembly includes: the barrel body is of a hollow structure, and the carrying platform is covered in the barrel body; the inclined plate is arranged at the bottom of the barrel body and is used for being in sealing connection with the outer surface of the bearing platform; the driving communication port is arranged on the inclined plate and used for mounting water spraying equipment; the barrel lower drainage port is arranged at the lowest part of the inclined plate and used for lower drainage; an upper shield assembly for effecting an upper splash guard and a drum cover, comprising: the upper cover structure is of an upper and lower opening type structure, and the lower end of the upper cover structure is detachably and fixedly connected with the upper end of the barrel body assembly; one end of the upper cover plate is hinged with the upper cover structure, and the other end of the upper cover plate can be buckled with the upper cover structure in an opening and closing manner; the upper splash guard is arranged on the inner wall of the bottom of the upper cover structure; and the upper drainage port is arranged on the upper splash shield and used for upper drainage. The technical scheme provided by the invention is suitable for the process of cleaning or gluing the wafer.

Description

Water splashing prevention structure of coating barrel appearance

Technical Field

The invention relates to the technical field of semiconductor production, in particular to a splash-proof structure for coating the appearance of a barrel.

Background

Wafers (wafers) are the basic raw material for the fabrication of semiconductor devices. The wafer is prepared by the procedures of crystal pulling, slicing and the like, the wafer is formed into a tiny circuit structure through a series of semiconductor manufacturing processes, and then the tiny circuit structure is cut, packaged and tested into a chip, so that the wafer is widely applied to various electronic devices.

In recent years, with the rapid development of the optoelectronic industry, the demand for high-integration and high-performance semiconductor wafers is increasing, and the wafer dicing technology has an important influence on the improvement of the yield and the packaging efficiency. There are many ways of dicing wafers, mainly using laser dicing technology. Regardless of the cutting technique, some contaminants are generated during the operation.

When the wafer is cleaned, the wafer rotates on the carrier at a high speed, and water on the wafer is thrown to the periphery due to centrifugal force. When the wafer is cleaned, water is prevented from running outside to pollute other mechanisms, and water is prevented from returning to the wafer, so that a splash-proof device is required to be adopted for splash prevention. In the existing wafer processing, the wafer is cleaned and prevented from splashing in a plurality of modes, and a waterproof curtain and a protective cover are commonly used. The waterproof curtain belongs to the consumable article and needs periodic replacement, and the waterproof effect of waterproof curtain is not good, and water is easily beaten on the wafer. The processing technology and structure of the protective cover for cleaning the wafer in the market are complex, and the processing cost is high.

Accordingly, there is a need to develop a splash guard structure for coating the exterior of a bucket that addresses the deficiencies of the prior art to address or mitigate one or more of the problems set forth above.

Disclosure of Invention

In view of the above, the present invention provides a water-splashing prevention structure of a coating barrel, which can be used in a wafer cleaning process to prevent water splashing and avoid pollutants from affecting subsequent operations of a wafer.

The invention provides a splash-proof structure for coating the appearance of a barrel, which is characterized by comprising: the splash-proof structure includes: the barrel comprises a barrel body assembly and an upper cover assembly, wherein the barrel body assembly is integrally formed, and the upper cover assembly is used for realizing the functions of an upper splash guard and a barrel cover;

the staving subassembly includes:

the barrel body is of a hollow structure and is provided with an upper opening and a lower opening, and is used for covering the carrying platform for placing the wafer;

the inclined plate is arranged at the bottom of the barrel body and is used for being in sealed contact connection with the outer surface of the bearing platform;

the driving communication port is arranged on the inclined plate and used for mounting water spraying equipment;

the barrel lower drainage port is arranged at the lowest part of the inclined plate and is used for lower drainage;

the upper housing assembly includes:

the upper cover structure is of an upper and lower opening type structure, and the lower end of the upper cover structure is detachably and fixedly connected with the upper end of the barrel body assembly;

one end of the upper cover plate is hinged with one end wall of the upper cover structure, and the other end of the upper cover plate can be buckled with the other end wall of the upper cover structure in an opening and closing manner;

the upper splash guard is arranged on the inner wall of the bottom of the upper cover structure;

and the upper drainage port is arranged on the upper splash guard and used for upper drainage.

The above aspect and any possible implementation manner further provide an implementation manner, wherein the side wall of the upper cover assembly is provided with a water mist extraction interface for connecting with an external extraction device to realize extraction of water mist.

In the aspect and any possible implementation manner described above, an implementation manner is further provided, in which an inner and outer water-gas butt-joint plate is arranged on the sidewall of the barrel body, and the inner and outer water-gas butt-joint plate is detachably connected with the sidewall of the barrel body.

In accordance with the above aspect and any possible implementation manner, there is further provided an implementation manner in which the barrel body is cylindrical, and the inclined plate is disposed along an inner wall of the cylindrical barrel body and is annular.

The above aspect and any possible implementation manner further provide an implementation manner, wherein the barrel body is a combination of a cylinder and a square, and the inclined plate is arranged along the inner wall of the cylinder barrel body and is a combination of a ring or a semi-ring and a square.

The above aspect and any possible implementation further provide an implementation in which the square has a length less than a diameter of the cylinder.

There is further provided in accordance with the above-described aspect and any one of the possible implementations, an implementation in which the upper housing cover is a transparent plate.

There is further provided in accordance with the above-described aspect and any one of the possible implementations, an implementation in which the upper housing structure is square.

The above aspect and any possible implementation further provide an implementation, wherein the upper splash plate is shaped like a ring with an outer side and an inner side.

When the splash-proof structure is used for wafer gluing, a nozzle humidifier is further disposed on the inclined plate and is used for humidifying glue spraying equipment disposed in the driving communication port.

The above aspects and any possible implementations further provide an implementation in which the barrel assembly and the upper housing structure are both surface treated with glass bead blasting.

In the aspect and any possible implementation manner described above, a reinforcing inner ring is provided at the inner edge of the top of the barrel body, so as to increase strength, reinforce the barrel body and prevent deformation of the barrel body.

Compared with the prior art, one of the technical schemes has the following advantages or beneficial effects: the anti-splashing structure of the coating barrel is simple to process and low in cost, and can prevent water from leaking outside and hitting a product;

another technical scheme in the above technical scheme has the following advantages or beneficial effects: the water is not easy to accumulate, and the water flow from the upper part to the lower part of the barrel body can be timely discharged out of the barrel.

Of course, it is not necessary for any one product in which the invention is practiced to achieve all of the above-described technical effects simultaneously.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is an elevational view of an upper cover of a splash guard structure for coating the exterior of a bucket in accordance with one embodiment of the present invention;

FIG. 2 is an overall elevational view of an upper housing of a splash guard structure in the form of a coating bucket according to one embodiment of the present invention;

FIG. 3 is an elevational view of the upper housing lid provided by one embodiment of the present invention;

FIG. 4 is an elevational view of a splash guard configuration in the form of a coating bucket according to one embodiment of the present invention;

FIG. 5 is an inside cross-sectional view of a splash guard in the form of a coating bucket according to one embodiment of the present invention;

fig. 6 is a top view of a splash guard structure of the external shape of a coating bucket according to an embodiment of the present invention.

Wherein, in the figure:

1. an upper housing structure; 2. an upper cover plate; 3. a water mist extraction interface; 4. a barrel body; 5. a barrel lower drain pipe; 6. inner and outer water vapor butt joint plates; 7. a hasp; 8. a handle; 9. a hinge; 10. a transparent acrylic sheet; 11. The upper cover blocks the water inner edge; 12. an upper cover drainage port; 13. driving the communicating pipe; 14. reinforcing the inner ring; 15. An inclined plate; 16. the barrel blocks water at the inner edge; 17. a stage mounting port; 18. a nozzle humidifier.

Detailed Description

For better understanding of the technical solutions of the present invention, the following detailed descriptions of the embodiments of the present invention are provided with reference to the accompanying drawings.

It should be understood that the described embodiments are only some embodiments of the invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The terminology used in the embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the description of the invention and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

The coating barrel-shaped splash-proof structure comprises a cylindrical barrel body 4 which is integrally sealed and welded, wherein the barrel body 4 is of a hollow structure with an upper opening and a lower opening, the surface is smooth, and the gaps generated by assembling parts can be reduced by integrally sealing and welding, so that water leakage is prevented. Compared with the protective cover on the market, the protective cover has low cost and is simple and firm to process and install.

As shown in fig. 1-2, an upper cover structure 1 and an upper cover plate 2 are arranged at the upper end of the barrel body, the upper cover structure 1 is connected with the upper end of the barrel body, the upper cover plate 2 is arranged at the upper end of the upper cover structure 1, and the barrel body is opened and closed through the upper cover plate 2. The lower end section of the upper cover structure 1 is square, and the front wall is a rectangular wall plate. The two side walls comprise two parts, the lower part is a rectangular wall plate with the same height as the front wall, the upper part is a trapezoidal wall plate, and the rectangular wall plate and the trapezoidal wall plate are integrally formed. The rear wall also comprises two parts, one part is a vertically arranged rectangular wall plate with the same height as the front wall, the other part is an obliquely arranged rectangular wall plate, and the obliquely arranged rectangular wall plate is connected with the short bevel edge of the trapezoidal wall plate of the side wall. The rear wall is higher than the front wall in overall height. The upper cover plate 2 is obliquely arranged on the top of the upper cover structure 1 by being connected with the long bevel edge of the trapezoidal wall plate, the upper end edge of the front wall and the upper end edge of the rear wall. The top end of the upper cover plate 2 is hinged with the rear wall through more than two groups of hinges 9. The lower end of the upper cover plate 2 is buckled with the front wall plate through more than two groups of tower buckles 7. The middle position of the lower end of the upper cover plate 2 is provided with a handle 8 for realizing the opening and closing of the upper cover plate 2. The upper cover structure 1 and the upper cover plate 2 are integrally formed structures, the upper cover plate 2 is hinged to the upper cover structure 1 to be opened and closed, and the upper cover structure is simple to assemble, firm, durable and convenient.

A water mist extraction interface is arranged on one side wall of the upper cover structure 1 and is used for being connected with external extraction equipment through a pipeline, so that water mist in the barrel is extracted.

The side of the barrel body 4 is provided with a square space communicated with the inside of the barrel body, and the bottom of the square space is provided with a painful lower drainage pipe 5 for draining redundant waste water out of the barrel body. The outer side wall of the square space is provided with an inner water-gas butt joint plate 6 and an outer water-gas butt joint plate 6 which are used for realizing water-gas butt joint of the interior and the exterior of the barrel body.

As shown in FIG. 3, the bottom of the upper cover plate 2 is provided with an upper cover water-blocking inner edge 11, and the upper cover water-blocking inner edge 11 can block water splashed inside the barrel body to a certain extent, so that the water splashed into the upper cover structure and onto the upper cover plate can be prevented. Because the upper cover structure 1 is square, the barrel body 4 is round, and the width of the upper cover structure is not less than the diameter of the barrel body 4, four end corners of the upper cover structure are protruded relative to the barrel body 4, and an upper cover drainage connector 12 is arranged at one or more end corners and is used for removing water splashed into the upper cover structure after water or mist is cooled and falls off.

As shown in fig. 4-6, the bottom of the barrel body 4 is provided with an inclined plate 15 along the inner wall of the barrel body, and the inclined plate 15 has a small inclination from the barrel body to the lower drain pipe 5 of the barrel body in a square space, so that water on the barrel wall can be left and then flows to the lower drain pipe 5 along the inclined plate 15 to be discharged, and water accumulation is prevented. The inner ring of the inclined plate 15 forms a bucket water-blocking inner edge 16, so that the area of a splash water passing surface can be reduced, and water is prevented from splashing on a wafer.

Still be equipped with drive communicating pipe 13 in the square space of staving lateral wall department, be provided with the swinging boom in the drive communicating pipe 13, the swinging boom is used for fixed water jet equipment or spouts mucilage binding and puts, sets up water jet equipment when carrying out wafer washing, sets up when being used for the wafer rubber coating and spouts the mucilage binding and put.

The top of the barrel body is provided with a reinforcing inner ring 14 along the wall of the barrel body, which is used for increasing the strength, reinforcing the barrel body and preventing the barrel body from deforming.

The operator can open the tower fastener 7, and the upper cover plate is opened through the handle 8, so that the maintenance or the observation is convenient. In addition, the upper cover plate 2 may be a transparent acrylic plate 10, which allows an operator to view the inside without opening the upper cover plate.

The invention has the characteristics that the coating barrel adopts special glass bead sand blasting surface treatment, and a thin oxide layer is generated on the surface to prevent rusting. Before treatment, the relevant welding spots can be leveled to prevent the generation of the sand holes. The sandblast is a surface treatment process, and the sandblast medium is many, and different sandblast processes are very important to the selection of sandblast medium, and glass pearl is selected for use as the sandblast medium in this application, and the staving material is stainless steel, and glass pearl sandblast surface treatment mainly can get rid of the sand hole when welding, and the surface rust cleaning, other sandblast medium relatively, and the glass pearl makes the barrel surface more smooth pleasing to the eye.

The sand blasting is to use compressed air to drive the abrasive to run at a high speed which can reach 200m/s, so that the high-speed sand strikes the surface of the workpiece, the surface of different workpieces can be cleaned, effects of rust removal, oxide scale removal, surface roughness generation and the like can be realized, the participation of the metal surface in compressive stress can be enhanced, the surface layer tensile stress can be removed, and the anti-fatigue effect can be improved. The method can also be used for decorating the surface condition of some metals, such as beautification of ornaments such as glass, stainless steel, aluminum alloy, clothes and the like.

When the coating bucket works, the carrier platform provided with the wafer is arranged inside the bucket body, the carrier platform rotates at a high speed, and water on the carrier platform splashes to the bucket wall of the coating bucket due to centrifugal force. The water on the wall of the barrel flows from high to low along the inclined plate 15 and flows to the lower drainage pipe 5 of the barrel at the lowest part of the bottom surface of the coating barrel to be discharged.

Inside and outside aqueous vapor buttcover plate 6 is used for inserting soon, including outside aqueous vapor buttcover plate 6 sets up on the outer end wall of the square structure of staving, is provided with quick connector on inside and outside aqueous vapor buttcover plate 6, can realize inside and outside aqueous vapor buttcover plate 6 for the quick plug of inside and outside water pipe unload soon, the intercommunication exchange of outside water with gas in the realization. The inner and outer water-gas butt-joint plates 6 are hermetically connected with the barrel body, so that water leakage is prevented. When cleaning, the water pipe outside the barrel is connected with the water pipe inside the barrel through the quick-plugging connector on the internal and external water-gas butt-joint plate 6 to realize cleaning; an air pipe on a water spraying rotating arm cylinder in the barrel is connected with an air pipe outside the barrel through an inner and outer water-air butt joint plate 6.

The upper shield subassembly is used for preventing that water upwards splashes away, and water splashes the inner wall and flows to the upper shield subassembly bottom surface, and the upper shield is kept off water and is prevented that water from flowing out and beat the product along 11. The water flows out from the upper cover drainage port 12 and is finally discharged together with the lower drainage pipe 5 of the coating barrel. Because the carrying platform rotates at a high speed to generate negative pressure to cause water mist, the water mist extraction interface 3 of the upper cover assembly is communicated to the negative pressure dust extraction pipeline to extract the generated water mist, and an inclined water receiving disc is arranged below the interface to prevent the water mist from dropping on a product during water mist extraction.

The bottom of the barrel body 4 is provided with a platform mounting port 17, the shape of the platform mounting port is matched with the platform, the platform extends into the barrel body 4 from the platform mounting port 17, the wafer is placed on the platform, the water is sprayed to the wafer through a water spraying device arranged in the driving communicating pipe 13, the cleaning water splashes around the barrel body under the high-speed operation of the platform, the cleaning water is restrained by the anti-splashing coating barrel, the anti-splashing effect relative to the outside is realized, and the secondary splashing cannot be generated on the wafer.

The square space at the side of the barrel body is provided with a nozzle humidifier 18, and the nozzle humidifier 18 is opposite to the driving communicating pipe 13 and is respectively positioned at two ends of the square space. The nozzle humidifier 18 is used to humidify a glue nozzle of a gluing device installed in the drive communicating pipe 13 during gluing.

The splashproof water structure of this patent can be used for preventing of wafer cleaning process to splash, and the wafer is put on the microscope carrier in the middle, and the coating bucket is fixed on the module, can reciprocate under the effect of module. When cleaning, the module drives the coating barrel to move upwards, the water retaining inner edge 16 of the barrel is clamped at the edge of the carrying platform to serve as a baffle plate, and water leakage is prevented in a sealing mode. The top end of the barrel is matched with the upper cover component. And driving the water spraying rotating arm in the communicating pipe 13 to spray water for cleaning, moving the barrel downwards after the cleaning is finished, and opening the upper cover plate 2 to take out the wafer. The gluing process and the cleaning process are different and will not be described in detail.

The same rotary arm and the conventional rotary arm can be adopted for the water spraying rotary arm and the gluing rotary arm, and the invention is not explained in detail.

The invention is suitable for wafer cleaning or wafer gluing in the semiconductor industry, and can avoid pollutants from influencing subsequent operation of the wafer during cleaning.

The detailed description is given above to a splash-proof structure of a coating barrel shape provided by the embodiments of the present application. The above description of the embodiments is only for the purpose of helping to understand the method of the present application and its core ideas; meanwhile, for a person skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.

As used in the specification and claims, certain terms are used to refer to particular components. As one skilled in the art will appreciate, manufacturers may refer to a component by different names. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. "substantially" means within an acceptable error range, and a person skilled in the art can solve the technical problem within a certain error range to substantially achieve the technical effect. The following description is of the preferred embodiment for carrying out the present application, but is made for the purpose of illustrating the general principles of the application and is not to be taken in a limiting sense. The protection scope of the present application shall be subject to the definitions of the appended claims.

It is also noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a good or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such good or system. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of additional like elements in the article of commerce or system in which the element is comprised.

It should be understood that the term "and/or" as used herein is merely a relationship that describes an associated object, meaning that three relationships may exist, e.g., a and/or B, may represent: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.

The foregoing description shows and describes several preferred embodiments of the present application, but as aforementioned, it is to be understood that the application is not limited to the forms disclosed herein, but is not to be construed as excluding other embodiments and is capable of use in various other combinations, modifications, and environments and is capable of changes within the scope of the application as described herein, commensurate with the above teachings, or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the application, which is to be protected by the claims appended hereto.

Claims

1. A splash guard structure for coating bucket profiles, the splash guard structure comprising: the barrel comprises a barrel body assembly and an upper cover assembly, wherein the barrel body assembly is integrally formed, and the upper cover assembly is used for realizing the functions of an upper splash guard and a barrel cover;

the staving subassembly includes:

the inclined plate is arranged at the bottom of the barrel body and is used for being in sealed contact connection with the outer surface of the carrying platform;

the upper housing assembly includes:

the upper water discharging port is arranged on the upper splash plate and is used for discharging water upwards;

the bottom of the upper cover plate is provided with an upper cover water-retaining inner edge;

the inner ring of the inclined plate forms a barrel water retaining inner edge;

the barrel body is in a cylindrical and square combined shape, and the inclined plate is arranged along the inner wall of the cylindrical barrel body.

2. The coating drum exterior splash guard structure as in claim 1, wherein the side wall of the upper shroud assembly is provided with a mist extraction interface for connection to an external extraction device for mist extraction.

3. The structure of claim 1, wherein the inner and outer water vapor butt-joint plates are detachably connected to the sidewall of the barrel.

4. The structure of claim 1, wherein the inclined plate has a combination of a circular shape or a semi-circular shape and a square shape.

5. The structure of claim 4, wherein the square has a length smaller than a diameter of the cylindrical shape.

6. The structure of claim 1, wherein the upper cover plate is a transparent plate.

7. The coating bucket appearance splashproof water structure of claim 1, wherein the upper hood structure is square.

8. The structure of claim 7, wherein the upper splash plate has a ring-like shape with an outer side and an inner side.

9. The coating drum exterior splashproof water structure of claim 1, wherein when the splashproof water structure is used for wafer gluing, a nozzle humidifier is also arranged on the inclined plate and is used for humidifying glue spraying equipment arranged at the driving communication port.