CN218098693U - Shearing ball pushing experimental device under wide temperature range electrification - Google Patents

Shearing ball pushing experimental device under wide temperature range electrification Download PDF

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Publication number
CN218098693U
CN218098693U CN202222325770.6U CN202222325770U CN218098693U CN 218098693 U CN218098693 U CN 218098693U CN 202222325770 U CN202222325770 U CN 202222325770U CN 218098693 U CN218098693 U CN 218098693U
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heating furnace
temperature
sample
hearth
control heating
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李望云
莫兰清
何思亮
秦红波
黄家强
位松
刘东静
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Guilin University of Electronic Technology
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Guilin University of Electronic Technology
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Abstract

The utility model provides a shearing push ball experimental apparatus under wide temperature range circular telegram, including accuse temperature heating furnace, anchor clamps, thrust tester and cooling module. The temperature control heating furnace is used for providing temperature adjustment for the sample, the clamp is arranged in a hearth of the heating furnace, and the clamp is used for fixing the sample; the thrust tester is used for applying shearing force to welding points of the sample, and the electric field mechanism is used for applying an electric field to the sample. And the cooling component is communicated with the hearth of the temperature control heating furnace and is used for introducing cooling gas into the hearth of the temperature control heating furnace. According to the shearing push ball experimental device under the condition of wide temperature range power-on, on the basis of a shearing push ball test experiment, power-on and wide temperature range adjusting factors are introduced, and the three are combined to simulate the real environment of a welding spot in service, so that the mechanical property of a welding spot sample under the condition of power-on and temperature change can be conveniently researched, and reference is provided for researching the reliability of an electronic product.

Description

Shearing ball pushing experimental device under wide temperature range electrification
Technical Field
The utility model relates to an electronic packaging technology field, concretely relates to shearing push ball experimental apparatus under wide temperature range circular telegram.
Background
With the development of semiconductor manufacturing, the interconnection technology in packaging gradually diversifies, and technologies such as ball grid array, flip chip, wafer level packaging, through silicon via and the like appear. Among them, solder joints are important interconnection bodies in the aforementioned technologies, and for this reason, the reliability of solder joints is an important guarantee of the aforementioned technologies. In the aspect of measuring the mechanical properties of welding spots, since the end of the 20 th century 70 s, the shear ball test gradually became one of the main methods for evaluating the quality and integrity of the welding spots.
Since the service environment of the solder joint in the packaged device is the electric-thermal-force coupling field, a few solder joints will experience periodic cold and hot shock, which not only seriously affects the reliability of the solder joint, but also directly causes the performance deterioration of the electronic product. Therefore, the shear ball pushing experiment is very important for the reliability evaluation of the welding spot in the assembled device in the aspect of researching the mechanical property of the welding spot.
However, the current technology for realizing the wide-range stepless regulation of the working temperature of a welding spot sample under the electrifying condition based on the shear ball pushing tester is relatively lack, and the evaluation of the shear ball pushing performance of the welding spot under the electrifying and stepless temperature regulation conditions is limited. Therefore, how to simulate the real service environment of the welding spot sample and explore the mechanical properties of the welding spot sample under the conditions of power-on and temperature change is an urgent problem to be solved by the technical personnel in the field.
SUMMERY OF THE UTILITY MODEL
To the defect among the prior art, the utility model aims at providing a shearing push ball experimental apparatus under wide temperature range circular telegram to the true in service environment of simulation solder joint, explores the mechanical properties of solder joint sample under circular telegram and the temperature variation condition.
In order to achieve the purpose, the utility model provides a shearing and ball pushing experimental device under the condition of electrifying in a wide temperature range, which comprises a temperature control heating furnace, a temperature control heating furnace and a temperature control device, wherein the temperature control heating furnace is used for providing temperature regulation for a sample; the fixture is arranged in a hearth of the temperature-controlled heating furnace and is used for fixing a sample; the thrust tester is used for applying a shearing force to a welding spot of the sample; an electric field mechanism for applying an electric field to the sample; and the cooling component is communicated with the hearth of the temperature control heating furnace and is used for introducing cooling gas into the hearth of the temperature control heating furnace so as to cool the hearth of the temperature control heating furnace.
Preferably, the electric field mechanism comprises: a power source; one end of the first lead is connected with the anode of the power supply, and the other end of the first lead extends into the hearth of the temperature control heating furnace; one end of the second lead is connected with the negative electrode of the power supply, and the other end of the second lead extends into the hearth of the temperature-controlled heating furnace;
when the first lead is connected with the push broach of the thrust tester and the second lead is connected with the sample, the power supply, the first lead, the push broach of the thrust tester, the sample and the second lead can form an electric loop; or,
when the first and second wires are connected to the test sample, respectively, the power source, the first wire, the test sample, and the second wire may form an electrical circuit.
Preferably, the clamp is provided with a clamping groove, the electric field mechanism further comprises a first insulating part and a second insulating part, and the first insulating part and the second insulating part are both in an L-shaped structure; the short edge of the first insulating part is lapped on the top of the clamp, and the long edge of the first insulating part is vertically arranged and attached to the side wall of the clamping groove; the short side of the second insulating part is lapped on the top of the clamp, the long side of the second insulating part is vertically arranged and attached to the other side wall of the clamping groove, and the long side of the second insulating part is arranged in parallel with the long side of the first insulating part.
Preferably, the first lead is sleeved with a first high-temperature-resistant insulating ceramic tube, and the second lead is sleeved with a second high-temperature-resistant insulating ceramic tube; the temperature control heating furnace is provided with a mounting hole, and the first high-temperature-resistant insulating ceramic tube and the second high-temperature-resistant insulating ceramic tube are inserted into the mounting hole.
Preferably, the cooling assembly comprises a gas refrigeration accessory and a cooling gas tank; one side of the temperature control heating furnace is provided with a first air hole communicated with a hearth of the temperature control heating furnace, the cooling air tank is communicated with the first air hole, and the gas refrigeration accessory is installed on the cooling air tank.
Preferably, the device also comprises a protective gas tank filled with protective gas; one side of the temperature control heating furnace is provided with a second air hole communicated with the hearth of the temperature control heating furnace, the protective air tank is communicated with the second air hole, and the protective air tank is used for introducing protective gas into the hearth of the temperature control heating furnace.
Preferably, a high-temperature-resistant insulating plate is laid on the top of the temperature-controlled heating furnace.
Preferably, the temperature-controlled heating furnace is provided with a thermocouple for measuring the temperature of the hearth.
Preferably, the device further comprises a computer, wherein the computer is electrically connected with the temperature-controlled heating furnace, the thrust tester, the cooling assembly and the electric field mechanism respectively.
The utility model has the advantages that:
the utility model discloses a shearing push ball experimental apparatus under wide temperature range circular telegram on the basis of shearing push ball test experiment, introduced circular telegram and wide temperature range adjustment factor, the three combines together and has simulated the true environment that the solder joint was in active service to be convenient for study solder joint sample mechanical properties under circular telegram and the temperature variation condition, and then provide the reference for studying the reliability of electronic product. Meanwhile, the experimental device is simple in structure, can test various types of samples, and is wide in application range.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below. Throughout the drawings, like elements or portions are generally identified by like reference numerals. In the drawings, elements or portions are not necessarily drawn to scale.
Fig. 1 is a schematic structural view of a shear ball experimental apparatus powered on in a wide temperature range according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a single-interface interconnection pad sample;
FIG. 3 is a schematic structural diagram of a dual-interface interconnect structure sample (with an even number of pads);
FIG. 4 is a schematic structural diagram of a dual-interface interconnect structure sample (the number of solder joints is an odd number);
FIG. 5 is a schematic illustration of the connection of an electric field mechanism to a single interface interconnect pad sample;
FIG. 6 is a schematic diagram of an electric field mechanism and a dual interface interconnect structure sample (with an even number of solder joints);
FIG. 7 is a schematic diagram of an electric field mechanism and a dual interface interconnect structure sample (with an odd number of solder joints);
reference numerals are as follows:
10-temperature control heating furnace, 11-mounting hole, 12-first air hole, 13-second air hole and 14-high temperature resistant insulating plate;
20-a clamp, 21-a fixed clamping block, 22-a movable clamping block and 23-a clamping groove;
30-a thrust tester, 31-a push broach;
41-power supply, 42-first wire, 43-second wire, 44-first insulator, 45-second insulator, 46-first high temperature resistant insulating ceramic tube, 47-second high temperature resistant insulating ceramic tube;
51-gas refrigeration accessories, 52-cooling gas tanks;
60-protective gas tank;
70-a computer;
81-single interface interconnection welding spot sample, 82-double interface interconnection structure sample, 83-first copper wire, 84-second copper wire, 85-third copper wire, 86-fourth copper wire and 87-fifth copper wire.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following examples are only used to illustrate the technical solutions of the present invention more clearly, and therefore are only used as examples, and the protection scope of the present invention is not limited thereby.
It is to be noted that unless otherwise specified, technical or scientific terms used herein shall have the ordinary meaning as understood by those skilled in the art to which the present invention belongs.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience of description and simplicity of description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting.
Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
As shown in fig. 1-7, in an embodiment of the present invention, a shear ball experimental apparatus under power-on of a wide temperature range is provided, which includes a temperature-controlled heating furnace 10, a fixture 20, a thrust tester 30 and a cooling assembly.
The temperature-controlled heating furnace 10 is used for providing temperature adjustment for a sample, the fixture 20 is arranged in a hearth of the temperature-controlled heating furnace 10, the fixture 20 is used for fixing the sample, specifically, a fixed clamping block 21 and a movable clamping block 22 are arranged on the fixture 20, the fixed clamping block 21 is fixedly arranged on the fixture 20, the movable clamping block 22 is in sliding fit on the fixture 20 and is arranged in parallel with the fixed clamping block 21, a clamping groove 23 (further explained below) for clamping the sample is formed between the movable clamping block 22 and the fixed clamping block 21, and of course, in order to lock the movable clamping block 22, a locking member (such as a bolt) is arranged on the movable clamping block 22.
The thrust tester 30 is used for applying a shearing force to a welding point of a sample, and specifically, the thrust tester 30 has a push-type broach 31, and the push-type broach 31 can push the welding point along a direction parallel to the surface of the sample plate, so as to evaluate the capability of mechanical shearing which can be borne by the welding point. The electric field mechanism is used for applying an electric field to the sample, the cooling assembly is communicated with the hearth of the temperature control heating furnace 10, and the cooling assembly is used for introducing cooling gas into the hearth of the temperature control heating furnace 10 so as to cool the hearth of the temperature control heating furnace 10.
According to the shearing push ball experimental device under the condition of wide temperature range electrification, on the basis of a shearing push ball test experiment, the factors of electrification and wide temperature range adjustment are introduced, and the factors of electrification and wide temperature range adjustment are combined to simulate the real environment of a welding spot service, so that the mechanical properties of a welding spot sample under the conditions of electrification and temperature change can be conveniently researched, and reference is provided for researching the reliability of an electronic product. Meanwhile, the experimental device is simple in structure, can test various types of samples, and is wide in application range.
In one embodiment, the electric field mechanism comprises a power source 41, a first conducting wire 42 and a second conducting wire 43, the power source 41 is arranged on the outer wall of the temperature-controlled heating furnace 10, one end of the first conducting wire 42 is connected with the positive pole of the power source 41, the other end of the first conducting wire 42 extends into the hearth of the temperature-controlled heating furnace 10, one end of the second conducting wire 43 is connected with the negative pole of the power source 41, and the other end of the second conducting wire 43 extends into the hearth of the temperature-controlled heating furnace 10. Of course, in order to avoid the phenomenon that the first wire 42 or the second wire 43 contacts the temperature-controlled heating furnace 10, the first wire 42 is sleeved with a first high-temperature-resistant insulating ceramic tube 46, the second wire 43 is sleeved with a second high-temperature-resistant insulating ceramic tube 47, specifically, the temperature-controlled heating furnace 10 is provided with a mounting hole 11, and the first high-temperature-resistant insulating ceramic tube 46 and the second high-temperature-resistant insulating ceramic tube 47 are inserted into the mounting hole 11.
The connection mode of the free ends of the first lead 42 and the second lead 43 can be adjusted according to different sample types. Specifically, referring to fig. 2 and 5 (in fig. 5, 6 and 7, arrows indicate current flowing directions), when the sample is a single-interface interconnection pad sample 81, the sample is processed, specifically, after a green oil layer of a substrate (PCB) of the single-interface interconnection pad sample 81 is scraped, a first copper wire 83 is connected to an exposed Cu substrate, then, the first wire 42 is connected to the push-type broach 31, the second wire 43 is connected to the first copper wire 83, and after the push-type broach 31 is contacted with a pad, the power source 41, the first wire 42, the push-type broach 31, the single-interface interconnection pad sample 81 and the second wire 43 form an electric circuit, so that an electric field can be applied to the single-interface interconnection pad sample 81.
Of course, in this embodiment, the case where the number of the pads of the single-interface interconnection pad sample 81 is one is shown, and when the number of the pads of the single-interface interconnection pad sample 81 is multiple, the push-type broach 31 continues to move after pushing away one pad, and after the push-type broach 31 contacts the next pad, the power source 41, the first wire 42, the push-type broach 31, the single-interface interconnection pad sample 81, and the second wire 43 form an electrical loop.
When the sample is the double-interface interconnection structure sample 82, specifically, the double-interface interconnection structure sample 82 is composed of a chip, solder bumps and a substrate, the chip and the solder bumps are firstly connected and fixed together by a process method, and at the moment, the chip and the solder bumps are integrated. This assembly is then reflowed or thermocompression bonded to a substrate to form a dual interface interconnect structure 82.
Referring to fig. 3 and 6, if the number of the pads on the dual-interface interconnection structure sample 82 is even, the sample is also processed, specifically, a second copper wire 84 is connected to the Al end on the left side (side close to the push-type broach 31) of the dual-interface interconnection structure sample 82 chip, and then a third copper wire 85 is connected to the Al end on the right side (side far from the push-type broach 31) of the dual-interface interconnection structure sample 82 chip. The first wire 42 is then connected to the second copper wire 84 (e.g., via a conductive clip), and the second wire 43 is connected to the third copper wire 85, such that the power source 41, the first wire 42, the second copper wire 84, the dual-interface interconnect structure 82, the third copper wire 85, and the second wire 43 form an electrical circuit, and thus, current flows through all the pads (following the daisy chain flow pattern) to apply an electric field to the dual-interface interconnect structure 82.
Referring to fig. 4 and 7, if the number of the solder joints on the dual-interface interconnection structure sample 82 is odd, the sample is processed, specifically, a fourth copper wire 86 is connected to the Al end on the left side (the side close to the push broach 31) of the chip of the dual-interface interconnection structure sample 82, and then a fifth copper wire 87 is connected to the Cu base on the right side (the side far from the push broach 31) of the substrate of the dual-interface interconnection structure sample 82. Then, the first wire 42 is connected to the fourth copper wire 86, and the second wire 43 is connected to the fifth copper wire 87, at this time, the power source 41, the first wire 42, the fourth copper wire 86, the dual-interface interconnect structure sample 82, the fifth copper wire 87, and the second wire 43 form an electrical circuit, so that a current passes through all the pads (following the flow pattern of the daisy chain), thereby applying an electric field to the dual-interface interconnect structure sample 82.
In this embodiment, the power supply 41 is a dc/ac power supply, and can apply dc/ac power within a range of 0 to 100A, with a current loading accuracy of ± 0.001A, an output frequency of 0.001 to 50000Hz, and a frequency loading accuracy of 0.001Hz.
In one embodiment, the clamp 20 is provided with a clamping groove 23 (the area between the movable clamping block 22 and the fixed clamping block 21), and the electric field mechanism further comprises a first insulating member 44 and a second insulating member 45, wherein the first insulating member 44 and the second insulating member 45 are both in an L-shaped structure. The short side of the first insulating member 44 overlaps the top of the fixed clamp block 21, and the long side of the first insulating member 44 is vertically arranged and abuts against the side wall of the slot 23. The short side of the second insulating member 45 is lapped on the top of the movable clamping block 22, the long side of the second insulating member 45 is vertically arranged and attached to the other side wall of the clamping groove 23, and the long side of the second insulating member 45 is arranged in parallel with the long side of the first insulating member 44. The structural design can avoid the situation that the fixed clamping block 21 and the movable clamping block 22 are contacted with the sample at high temperature to conduct electricity.
In one embodiment, the cooling assembly includes a gas chilling accessory 51 and a cooling gas canister 52. The gas refrigeration accessory 51 is called GCA for short, one side of the temperature control heating furnace 10 is provided with a first air hole 12 communicated with a hearth of the temperature control heating furnace, and the cooling gas tank 52 is communicated with the first air hole 12. The gas refrigeration accessory 51 is mounted on the cooling gas tank 52 and electrically connected to the computer 70, and the gas refrigeration accessory 51 mainly has two functions, one is to control the output of the cooling gas tank 52, and the other is to open and close the cooling gas tank 52. The design of the gas refrigeration accessory 51 and the cooling gas tank 52 can provide a low-temperature environment for the hearth of the temperature-controlled heating furnace 10, thereby providing a cooling function for the sample.
In one embodiment, the apparatus further comprises a shielding gas tank 60 containing shielding gas. One side of the temperature-controlled heating furnace 10 is provided with a second air hole 13 communicated with the hearth of the temperature-controlled heating furnace, the protective air tank 60 is communicated with the second air hole 13, and the protective air tank 60 is used for introducing protective gas into the hearth of the temperature-controlled heating furnace 10. The protective gas tank 60 can discharge the air in the temperature-controlled heating furnace 10 out of the furnace by introducing protective gas.
In one embodiment, to facilitate the detection of the temperature within the temperature controlled furnace 10, the temperature controlled furnace 10 is provided with a thermocouple (not shown in the drawings) for measuring the furnace temperature. Meanwhile, a high-temperature resistant insulating plate 14 is laid on the top of the temperature control heating furnace 10. The bearing temperature range of the temperature control heating furnace 10 is-196 ℃ to 400 ℃, and the temperature control loading range of the temperature control heating furnace 10 can provide a test environment with a wide temperature field range from low temperature to high temperature for a sample.
In one embodiment, in order to facilitate the control of the temperature-controlled heating furnace 10, the thrust tester 30, the cooling module, and the electric field mechanism, the shearing and pushing ball experimental apparatus powered on in the wide temperature range further includes a computer 70, the computer 70 is electrically connected to the temperature-controlled heating furnace 10, the thrust tester 30, the cooling module, and the electric field mechanism, respectively, and the computer 70 can singly control the temperature-controlled heating furnace 10, the thrust tester 30, the cooling module, and the electric field mechanism to operate, so as to realize the application of the coupling fields without affecting each other.
In the specification of the present invention, a large number of specific details are explained. It is understood, however, that embodiments of the invention may be practiced without these specific details. In some instances, well-known methods, structures and techniques have not been shown in detail in order not to obscure an understanding of this description.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included in the scope of the claims and description of the present invention.

Claims (9)

1. The utility model provides a shearing push ball experimental apparatus under wide temperature range circular telegram which characterized in that: the method comprises the following steps:
a temperature-controlled heating furnace for providing temperature regulation to the sample;
the fixture is arranged in a hearth of the temperature-controlled heating furnace and is used for fixing a sample;
the thrust tester is used for applying shearing force to the welding spot of the sample;
an electric field mechanism for applying an electric field to a sample; and
and the cooling component is communicated with the hearth of the temperature control heating furnace and is used for introducing cooling gas into the hearth of the temperature control heating furnace so as to cool the hearth of the temperature control heating furnace.
2. The wide temperature range energized shear ball experimental apparatus of claim 1, wherein: the electric field mechanism includes:
a power source;
one end of the first lead is connected with the anode of the power supply, and the other end of the first lead extends into the hearth of the temperature-controlled heating furnace; and
one end of the second lead is connected with the negative electrode of the power supply, and the other end of the second lead extends into the hearth of the temperature-controlled heating furnace;
when the first lead is connected with the push broach of the thrust tester and the second lead is connected with the sample, the power supply, the first lead, the push broach of the thrust tester, the sample and the second lead can form an electric loop; or,
when the first wire and the second wire are connected to the sample, respectively, the power source, the first wire, the sample, and the second wire may form an electrical circuit.
3. The shear-push experimental apparatus under power-on of a wide temperature range of claim 2, characterized in that: the clamp is provided with a clamping groove, the electric field mechanism further comprises a first insulating part and a second insulating part, and the first insulating part and the second insulating part are both in L-shaped structures;
the short edge of the first insulating part is lapped on the top of the clamp, and the long edge of the first insulating part is vertically arranged and attached to the side wall of the clamping groove;
the short side of the second insulating part is lapped on the top of the clamp, the long side of the second insulating part is vertically arranged and attached to the other side wall of the clamping groove, and the long side of the second insulating part is arranged in parallel with the long side of the first insulating part.
4. The shear-push experimental apparatus under power-on of a wide temperature range of claim 2, characterized in that: the first lead is sleeved with a first high-temperature-resistant insulating ceramic tube, and the second lead is sleeved with a second high-temperature-resistant insulating ceramic tube;
and the temperature control heating furnace is provided with a mounting hole, and the first high-temperature-resistant insulating ceramic tube and the second high-temperature-resistant insulating ceramic tube are inserted in the mounting hole.
5. The wide temperature range energized shear ball experimental apparatus of claim 1, wherein: the cooling assembly comprises a gas refrigeration accessory and a cooling gas tank;
one side of the temperature control heating furnace is provided with a first air hole communicated with a hearth of the temperature control heating furnace, the cooling air tank is communicated with the first air hole, and the gas refrigeration accessory is installed on the cooling air tank.
6. The wide temperature range energized shear ball experimental apparatus of claim 1, wherein: the device also comprises a protective gas tank filled with protective gas;
one side of the temperature control heating furnace is provided with a second air hole communicated with the hearth of the temperature control heating furnace, the protective air tank is communicated with the second air hole, and the protective air tank is used for introducing protective gas into the hearth of the temperature control heating furnace.
7. The shear-push ball experimental apparatus under wide temperature range power-on of claim 1, characterized in that: and a high-temperature-resistant insulating plate is laid on the top of the temperature-control heating furnace.
8. The wide temperature range energized shear ball experimental apparatus of claim 1, wherein: the temperature control heating furnace is provided with a thermocouple for measuring the temperature of the hearth.
9. A shear push ball experimental apparatus under wide temperature range power-on according to any one of claims 1-8, characterized in that: the device also comprises a computer, wherein the computer is respectively electrically connected with the temperature control heating furnace, the thrust tester, the cooling assembly and the electric field mechanism.
CN202222325770.6U 2022-09-01 2022-09-01 Shearing ball pushing experimental device under wide temperature range electrification Active CN218098693U (en)

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Application Number Priority Date Filing Date Title
CN202222325770.6U CN218098693U (en) 2022-09-01 2022-09-01 Shearing ball pushing experimental device under wide temperature range electrification

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Application Number Priority Date Filing Date Title
CN202222325770.6U CN218098693U (en) 2022-09-01 2022-09-01 Shearing ball pushing experimental device under wide temperature range electrification

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CN218098693U true CN218098693U (en) 2022-12-20

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