CN218069808U - Transport device - Google Patents
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- CN218069808U CN218069808U CN202222437650.5U CN202222437650U CN218069808U CN 218069808 U CN218069808 U CN 218069808U CN 202222437650 U CN202222437650 U CN 202222437650U CN 218069808 U CN218069808 U CN 218069808U
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- 239000000428 dust Substances 0.000 claims description 10
- 230000000712 assembly Effects 0.000 claims description 9
- 238000000429 assembly Methods 0.000 claims description 9
- 239000002245 particle Substances 0.000 abstract description 16
- 230000003749 cleanliness Effects 0.000 abstract description 7
- 230000033001 locomotion Effects 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008520 organization Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
Abstract
The conveyer that this application embodiment provided is used for being connected with the aspiration pump, and conveyer includes: base station and glide the subassembly. The base station comprises a plurality of through holes, and the through holes are used for being communicated with an air inlet of the air suction pump; the base station is located to the subassembly that slides, and the subassembly that slides includes guide rail and slide, and the guide rail extends along the first direction, slide and guide rail swing joint, a plurality of through-holes set up along the guide rail. The slide among the subassembly that slides can reduce suspended particles and fall into in the guide rail, the through-hole be used for with the air inlet intercommunication of aspiration pump, the suspended particles that conveyer produced when removing can be bled to the through-hole by the aspiration pump and siphoned away to can improve conveyer's cleanliness factor.
Description
Technical Field
The utility model belongs to the technical field of the semiconductor technology and specifically relates to a conveyer.
Background
During the manufacturing of semiconductor products, the wafers may be transported by a transport device. Suspended particles are easily generated due to mutual friction of various parts of the transportation device in a motion state. Since wafers are silicon wafers used for manufacturing silicon semiconductor circuits, semiconductor products are required to be formed through a plurality of processes in an environment with high cleanliness.
The International Organization for Standardization (ISO International Organization for Standardization) sets out a clean room or clean zone air suspension particle cleanliness rating standard, and the transportation device in the prior art does not clean the suspension particles generated in the movement process, so that the transportation device is difficult to meet the standard.
Therefore, a new transportation device is needed to solve the above technical problems.
SUMMERY OF THE UTILITY MODEL
The conveyer that this application embodiment provided can reduce the suspended particle that produces in the transportation, improves the clean grade of conveyer place environment.
An embodiment of the application provides a conveyer, this conveyer is used for being connected with the aspiration pump, and the conveyer includes:
the base station comprises a plurality of through holes, and the through holes are used for being communicated with an air inlet of the air suction pump;
the base station is located to the subassembly that slides, and the subassembly that slides includes guide rail and slide, and the guide rail extends along the first direction, slide and guide rail swing joint, a plurality of through-holes set up along the guide rail.
According to any preceding embodiment of this application, the subassembly that slides still includes the dust piece, and the dust piece extends along the first direction, and the guide rail is shielded at least along the second direction to the dust piece, and the slide includes interconnect's connecting piece and slider, and the slider moves along the guide rail, and the connecting piece encloses with the dust piece and forms the accommodating space that is used for holding the slider, and first direction and the crossing setting of second direction.
According to any one of the preceding embodiments of the application, the dust-proof piece comprises a first shielding plate and a second shielding plate which are connected with each other, the first shielding plate and the sliding block are arranged at intervals along a third direction, the connecting piece comprises a first connecting plate, the first connecting plate is connected with the sliding block, the first connecting plate and the second shielding plate are arranged on two opposite sides of the sliding block along a second direction, and the third direction, the first direction and the second direction are arranged in a pairwise intersecting manner.
According to any of the previous embodiments of the application, the connection member is at least partially inserted between the dust guard and the guide rail and connected to the slider.
According to any one of the preceding embodiments of the application, the dust-proof piece comprises a first shielding plate and a second shielding plate which are connected with each other, the first shielding plate and the sliding block are arranged at intervals along the third direction, the connecting piece comprises a first connecting plate and a second connecting plate which are connected with each other, the second connecting plate is connected with the sliding block and arranged at intervals along the third direction with the first shielding plate, the first connecting plate and the second shielding plate are arranged on two opposite sides of the sliding block along the second direction, and the third direction, the first direction and the second direction are arranged in a pairwise intersecting manner.
According to any one of the preceding embodiments of the application, the number of the sliding assemblies is two, and the transportation device further comprises a cover plate, and the cover plate is connected with the two first connecting plates.
According to any one of the preceding embodiments of the application, the dust-proof piece comprises a first shielding plate, a second shielding plate and a third shielding plate, the second shielding plate and the third shielding plate are respectively and vertically connected with the first shielding plate, the connecting piece comprises a first connecting plate, a third connecting plate and a fourth connecting plate, the first connecting plate is connected with the sliding block, the fourth connecting plate and the first connecting plate are respectively and vertically connected with the third connecting plate, the fourth connecting plate and the first connecting plate are arranged oppositely along the second direction, the first shielding plate and the third connecting plate are at least partially arranged oppositely along the third direction, and the third shielding plate is arranged between the first connecting plate and the fourth connecting plate.
According to any one of the preceding embodiments of the application, the dust-proof piece comprises a first shielding plate, a second shielding plate and a third shielding plate, the second shielding plate and the third shielding plate are respectively and vertically connected with the first shielding plate, the connecting piece comprises a first connecting plate, a second connecting plate, a third connecting plate and a fourth connecting plate, the second connecting plate is respectively connected with the sliding block and the first connecting plate and is arranged at intervals along a third direction with the first shielding plate, the fourth connecting plate and the first connecting plate are respectively and vertically connected with the third connecting plate, along the second direction, the fourth connecting plate and the first connecting plate are arranged oppositely, along the third direction, the first shielding plate and the third connecting plate are at least partially arranged oppositely, and the third shielding plate is arranged between the first connecting plate and the fourth connecting plate.
According to any one of the preceding embodiments of the application, the number of the sliding assemblies is two, and the transportation device further comprises a cover plate, and the cover plate is connected with the two fourth connecting plates.
According to any of the preceding embodiments of the present application, the transportation device further comprises a driving member connected to the cover plate and configured to drive the carriage to move in the first direction.
According to any of the previous embodiments of the present application, the driving member includes a motor, a main gear engaged with the main gear, and a rack disposed between the two guide rails, and the driving motor is configured to drive the main gear to move along the rack.
According to any of the preceding embodiments of the application, the drive member further comprises a driven gear engaging with the rack, the driven gear being connected to the cover plate.
The conveyer that this application embodiment provided is used for being connected with the aspiration pump, and the conveyer includes: base station and slip subassembly. The base station comprises a plurality of through holes, and the through holes are used for being communicated with an air inlet of the air suction pump; the base station is located to the subassembly that slides, and the subassembly that slides includes guide rail and slide, and the guide rail extends along the first direction, slide and guide rail swing joint, and a plurality of through-holes set up along the guide rail. The slide among the subassembly that slides can reduce suspended particles and fall into in the guide rail, the through-hole be used for with the air inlet intercommunication of aspiration pump, the suspended particles that conveyer produced when removing can be bled to the through-hole by the aspiration pump and siphoned away to can improve conveyer's cleanliness factor.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments of the present application will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic view of a transportation device provided in an embodiment of the present application;
FIG. 2 is an enlarged view of a portion A of FIG. 1;
FIG. 3 is a schematic cross-sectional view of a glide assembly according to an embodiment of the present disclosure;
FIG. 4 is a schematic cross-sectional view of another glide assembly provided in an embodiment of the present application;
FIG. 5 is a schematic cross-sectional view of another glide assembly provided in an embodiment of the present application;
FIG. 6 is a schematic cross-sectional view of another glide assembly provided in an embodiment of the present application.
Description of reference numerals:
100. a transportation device;
1. a base station; 11. a through hole; 2. a slipping component; 21. a guide rail;
22. a slide base; 221. a connecting member; 221a, a first connecting plate; 221b, a second connecting plate; 221c, a third connecting plate; 221d, a fourth connecting plate; 222. a slider;
23. a dust-proof member; 231. a first shielding plate; 232. a second shielding plate; 233. a third shielding plate;
3. a cover plate;
4. a drive member; 41. a motor; 42. a main gear; 43. a rack; 44. a driven gear;
x, a first direction; y, a second direction; z, third direction.
Detailed Description
Features and exemplary embodiments of various aspects of the present application will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present application. It will be apparent, however, to one skilled in the art that the present application may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the present application by illustrating examples thereof. In the drawings and the following description, at least some well-known structures and techniques have not been shown to avoid unnecessarily obscuring the present application; also, the dimensions of some of the structures may be exaggerated for clarity. Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
In the description of the present application, it is to be noted that, unless otherwise specified, "a plurality" means two or more; the terms "upper," "lower," "left," "right," "inner," "outer," and the like, indicate an orientation or positional relationship that is merely for convenience in describing the application and to simplify the description, and do not indicate or imply that the referenced components or elements must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the application. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The directional terms appearing in the following description are directions shown in the drawings and do not limit the specific structure of the embodiments of the present application. In the description of the present application, it is also to be noted that, unless otherwise explicitly specified or limited, the terms "mounted" and "connected" are to be interpreted broadly, e.g., as being either fixedly connected, detachably connected, or integrally connected; can be directly connected or indirectly connected. The specific meaning of the above terms in the present application can be understood as appropriate by one of ordinary skill in the art.
Referring to fig. 1 and 2 together, the present application provides a transporter 100, the transporter 100 being adapted to be connected to a suction pump, the transporter 100 comprising: the air suction device comprises a base platform 1 and a sliding assembly 2, wherein the base platform 1 comprises a plurality of through holes 11, and the through holes 11 are used for being communicated with an air inlet of an air suction pump; the sliding assembly 2 is arranged on the base platform 1, the sliding assembly 2 comprises a guide rail 21 and a sliding seat 22, the guide rail 21 extends along the first direction X, the sliding seat 22 is movably connected with the guide rail 21, and the through holes 11 are arranged along the guide rail 21.
The transportation device 100 can be used for transporting and transferring wafers, and a material taking or placing device can be installed on the sliding assembly 2. Specifically, the material taking or placing device may be a robot, and the robot may suck or grab the material to be transferred, such as a wafer. The sliding component 2 drives the manipulator to move along the first direction X. The base 1 may be provided on the ground or a processing table. The carriage 22 can slide along the guide rail 21 to change the relative position of the carriage 22 and the guide rail 21.
In the transport device 100 that this application provided, through locating the subassembly 2 that slides in the base station 1, set up the subassembly 2 that slides and include slide 22 and the guide rail 21 that extends along first direction X, a plurality of through-holes 11 set up along guide rail 21, and through-hole 11 can communicate with the air inlet of aspiration pump, therefore when the suspended particle that transport device 100 produced when removing, can be bled to through-hole 11 by the aspiration pump and siphoned away to can improve the cleanliness factor of transport device 100.
In some optional embodiments, the sliding assembly 2 further includes a dust-proof member 23, the dust-proof member 23 extends along the first direction X, the dust-proof member 23 shields the guide rail 21 at least along the second direction Y, the sliding base 22 includes a connecting member 221 and a sliding block 222 connected to each other, the sliding block 222 moves along the guide rail 21, the connecting member 221 and the dust-proof member 23 enclose a receiving space for receiving the sliding block 222, and the first direction X and the second direction Y are arranged to intersect.
In these alternative embodiments, the connection 221 with the slider 222 moves along the guide rail 21 during the movement of the slider 222 along the guide rail 21. The dust-proof 23 extending in the first direction X may shield the guide rail 21 in the second direction Y, the first direction X and the second direction Y may be perpendicular to each other, the first direction X may be a length direction of the guide rail 21, and the second direction Y may be a width direction of the guide rail 21. Part of the dust-proof piece 23 can be arranged at one end of the slider 222 far away from the guide rail 21, and part of the dust-proof piece 23 can be arranged at an interval with the slider 222 along the second direction Y and fixedly connected with the base table 1, so that the dust-proof piece 23 can reduce foreign matters and impurities from falling into the slider 222 and the guide rail 21. The connecting piece 221 and the dust-proof piece 23 enclose to form an accommodating space for accommodating the slider 222, so that the sputtering of suspended particles generated by the mutual movement between the slider 222 and the guide rail 21 to the outside of the accommodating space can be reduced, and meanwhile, the connecting piece 221 and the dust-proof piece 23 can also reduce the blocking of the suspended particles from entering the accommodating space.
Referring to fig. 3, fig. 3 is a sliding assembly 2 according to the present application. In this subassembly 2 that slides dust keeper 23 includes first shielding plate 231 and second shielding plate 232 of interconnect, first shielding plate 231 sets up along third direction Z interval with slider 222, and connecting piece 221 includes first connecting plate 221a, and first connecting plate 221a is connected with slider 222, and along second direction Y, first connecting plate 221a and second shielding plate 232 locate the relative both sides of slider 222, and third direction Z, first direction X and two liang of crossing settings of second direction Y.
In these alternative embodiments, the first direction X and the second direction Y may be horizontal directions, the first direction X may be a length direction of the guide rail 21, the second direction Y may be a width direction of the guide rail 21, and the third direction Z may be a vertical direction. The first direction X, the second direction Y, and the third direction Z may be perpendicular to each other two by two. The first shielding plate 231 and the second shielding plate 232 are connected perpendicularly to each other and extend along the first direction X, and the length of the first shielding plate 231 and the second shielding plate 232 extending along the first direction X may be equal to the length of the guide rail 21 extending along the first direction X, or, in order to better improve the shielding effect of the dust-proof piece 23 on the guide rail 21 and the slider 222, the length of the first shielding plate 231 and the second shielding plate 232 extending along the first direction X may be greater than the length of the guide rail 21 extending along the first direction X.
The first connection plate 221a is connected to the slider 222 and is movable together along the guide rail 21. In order to reduce the floating particles generated by the first shielding plate 231 during movement, a gap may be formed between the first shielding plate 231 and the first connecting plate 221a, so that the first shielding plate 231 and the first connecting plate 221a do not contact with each other, thereby avoiding friction.
In some alternative embodiments, the connection member 221 is at least partially inserted between the dust-proof member 23 and the slider 222 and connected to the slider 222.
In these alternative embodiments, the sliding block 222 is disposed on the guide rail 21, and in order to better prevent dust from the guide rail 21 and improve cleanliness, the dust-proof member 23 may be disposed around the periphery of the sliding block 222, and in order to move the sliding block 222 and the connecting member 221 together in the first direction X, a portion of the connecting member 221 is inserted between the dust-proof member 23 and the guide rail 21 and connected to the sliding block 222.
Referring to fig. 4, fig. 4 is another sliding assembly 2 provided in the present application. This dust keeper 23 includes first shielding plate 231 and second shielding plate 232 of interconnect, first shielding plate 231 sets up along third direction Z interval with slider 222, connecting piece 221 includes interconnect's first connecting plate 221a and second connecting plate 221b, second connecting plate 221b is connected with slider 222, and set up along third direction Z interval with first shielding plate 231, along second direction Y, the relative both sides of slider 222 are located to first connecting plate 221a and second shielding plate 232, third direction Z, two liang of crossing settings in first direction X and second direction Y.
In these alternative embodiments, the first shielding plate 231 and the slider 222 are spaced apart from each other along the third direction Z, and the width of the first shielding plate 231 along the second direction Y may be greater than the width of the slider 222 along the second direction Y, so that the first shielding plate 231 can better shield the slider 222, and thus the connecting member 221 needs to be provided with the second connecting plate 221b to connect with the slider 222, and similarly, in order to reduce the suspended particles generated by the first shielding plate 231 during movement, a gap may exist between the first shielding plate 231 and the first connecting plate 221a.
In order to enhance the connection strength of the second connection plate 221b and the slider 222, the second connection plate 221b may be connected to an end of the slider 222 away from the rail 21, or the second connection plate 221b may include a receiving hole through which the slider 222 may be connected to the second connection plate 221 b.
In some alternative embodiments, the number of skid units 2 is two, and the transportation device 100 further includes a cover plate 3, and the cover plate 3 connects the two first connection plates 221a.
In these alternative embodiments, the number of the sliding assemblies 2 is two, the number of the second shielding plates 232 and the number of the first connecting plates 221a are also two, and the two second shielding plates 232 may be oppositely disposed along the second direction Y. The cover plate 3 connecting the two first connection plates 221a can improve the stability of the movement of the two sliders 222 and the two first connection plates 221a.
Referring to fig. 5, fig. 5 is another sliding assembly 2 provided in the present application. The dust-proof component 23 includes a first shielding plate 231, a second shielding plate 232 and a third shielding plate 233, the second shielding plate 232 and the third shielding plate 233 are respectively connected with the first shielding plate 231 perpendicularly, the connection component 221 includes a first connection plate 221a, a third connection plate 221c and a fourth connection plate 221d, the first connection plate 221a is connected with the slider 222, the fourth connection plate 221d and the first connection plate 221a are respectively connected with the third connection plate 221c perpendicularly, along the second direction Y, the fourth connection plate 221d and the first connection plate 221a are arranged oppositely, along the third direction Z, the first shielding plate 231 and the third connection plate 221c are at least partially arranged oppositely, and the third shielding plate 233 is arranged between the first connection plate 221a and the fourth connection plate 221d.
In these alternative embodiments, the fourth connecting plate 221d and the first connecting plate 221a are vertically connected to the third connecting plate 221c, the first connecting plate 221a, the third connecting plate 221c and the fourth connecting plate 221d enclose an accommodating space for accommodating the third shielding plate 233, and there is a gap between the third shielding plate 233 and the first connecting plate 221a, the third connecting plate 221c and the fourth connecting plate 221d, so as to prevent the third shielding plate 233 from contacting with the connecting plate 221 to generate suspended particles. The first connection plate 221a is connected to the slider 222 and spaced apart from the first shielding plate 231 in the third direction Z.
Referring to fig. 6, fig. 6 is another exemplary glide assembly 2 provided herein. The dust-proof member 23 includes a first shielding plate 231, a second shielding plate 232 and a third shielding plate 233, the second shielding plate 232 and the third shielding plate 233 are respectively connected to the first shielding plate 231 perpendicularly, the connection member 221 includes a first connection plate 221a, a second connection plate 221b, a third connection plate 221c and a fourth connection plate 221d, the second connection plate 221b is respectively connected to the slider 222 and the first connection plate 221a and is spaced from the first shielding plate 231 along the third direction Z, the fourth connection plate 221d and the first connection plate 221a are respectively connected to the third connection plate 221c perpendicularly, the fourth connection plate 221d and the first connection plate 221a are arranged oppositely along the second direction Y, the first shielding plate 231 and the third connection plate 221c are at least partially arranged oppositely along the third direction Z, and the third shielding plate 233 is arranged between the first connection plate 221a and the fourth connection plate 221d.
In these alternative embodiments, the first connection plate 221a and the second connection plate 221b are interposed between the dust protector 23 and the guide rail 21, the second connection plate 221b is connected to the slider 222, the second connection plate 221b is disposed spaced from the first shutter plate 231 in the third direction Z, and the second connection plate 221b is disposed spaced from the second shutter plate 232 in the second direction Y. The first connection plate 221a and the second connection plate 221b are vertically connected,
referring to fig. 2 and 6, in some alternative embodiments, the number of the sliding assemblies 2 is two, and the transportation device 100 further includes a cover plate 3, and the cover plate 3 connects the two fourth connecting plates 221d.
In these alternative embodiments, the number of the sliding assemblies 2 is two, the number of the second shielding plates 232 and the number of the fourth connecting plates 221d are also two, and the two second shielding plates 232 may be oppositely disposed along the second direction Y. The cover plate 3 connecting the two fourth connecting plates 221d can improve the stability of the movement of the two sliders 222 and the two fourth connecting plates 221d.
In some alternative embodiments, the transportation device 100 further includes a driving member 4, and the driving member 4 is connected to the cover plate 3 and is used for driving the sliding seat 22 to move along the first direction X.
In these alternative embodiments, the driving member 4 drives the cover plate 3 to move, the cover plate 3 is connected to the fourth connecting plate 221d, and the fourth connecting plate 221d is connected to the sliding block 222, so that the driving member 4 can drive the sliding block 222 to move along the guide rail 21.
In some alternative embodiments, the driving member 4 comprises a driving motor 41, a main gear 42 and a rack 43, wherein the rack 43 is disposed between the two guide rails 21, and the driving motor 41 is used for driving the main gear 42 to move along the rack 43.
In these alternative embodiments, the driving motor 41 drives the main gear 42 to rotate on the rack 43, thereby driving the cover plate 3 to move, and driving the connecting member 221 and the sliding block 222 to move. The rack gear 43 may be connected to the base 1 so that the rack gear 43 may be prevented from being displaced and deformed by a force during the movement of the main gear 42 along the rack gear 43 when the main gear 42 is moved along the rack gear 43. Optionally, the through hole 11 is disposed between the two sliding assemblies 2, and the air pump can pump the suspended particles generated by the mutual rotation of the main gear 42 and the rack 43 in real time, so as to reduce the number of the suspended particles between the two sliding assemblies 2, thereby improving the cleanliness of the transportation device 100.
In some alternative embodiments, the driving member 4 further comprises a driven gear 44 engaged with the rack 43, and the driven gear 44 is connected with the cover plate 3.
In these alternative embodiments, the driven gear 44 is connected to the cover plate 3, the driven gear 44 may be a gap eliminating gear, the gap eliminating gear may improve transmission accuracy, reduce idle stroke of the motor 41 driving the main gear 42 to rotate forward and backward, and reduce transmission dead zone.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
In addition, the term "and/or" herein is only one kind of association relationship describing the association object, and means that there may be three kinds of relationships, for example, a and/or B, and may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter associated objects are in an "or" relationship.
It should be understood that in the embodiment of the present application, "B corresponding to a" means that B is associated with a, from which B can be determined. It should also be understood that determining B from a does not mean determining B from a alone, but may be determined from a and/or other information.
While the invention has been described with reference to specific embodiments, the scope of the invention is not limited thereto, and those skilled in the art can easily conceive various equivalent modifications or substitutions within the technical scope of the invention, and these modifications or substitutions are intended to be included in the scope of the invention. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (12)
1. A transporter for connection to a suction pump, the transporter comprising:
the base station comprises a plurality of through holes, and the through holes are used for being communicated with an air inlet of the air suction pump;
the subassembly that slides locates the base station, the subassembly that slides includes guide rail and slide, the guide rail extends along the first direction, the slide with guide rail swing joint, a plurality of through-holes are followed the guide rail sets up.
2. The transportation apparatus as claimed in claim 1, wherein the sliding assembly further comprises a dust-proof member extending along the first direction, the dust-proof member covers the guide rail at least along the second direction, the sliding base comprises a connecting member and a sliding block connected with each other, the sliding block moves along the guide rail, the connecting member and the dust-proof member enclose a receiving space for receiving the sliding block, and the first direction and the second direction are arranged to intersect.
3. The transportation apparatus of claim 2,
the dust-proof piece comprises a first shielding plate and a second shielding plate which are connected with each other, the first shielding plate and the sliding block are arranged at intervals along a third direction,
the connecting piece comprises a first connecting plate, the first connecting plate is connected with the sliding block, the first connecting plate and the second baffle plate are arranged on two opposite sides of the sliding block along the second direction, and the third direction, the first direction and the second direction are arranged in a pairwise intersecting mode.
4. A transportation device according to claim 3, wherein said attachment member is at least partially inserted between said dust guard and said guide rail and connected to said slider.
5. The transportation apparatus of claim 4,
the dust-proof piece comprises a first shielding plate and a second shielding plate which are connected with each other, the first shielding plate and the sliding block are arranged at intervals along a third direction,
the connecting piece comprises a first connecting plate and a second connecting plate which are connected with each other, the second connecting plate is connected with the sliding block and arranged at intervals along the third direction with the first shielding plate, the first connecting plate and the second shielding plate are arranged on two opposite sides of the sliding block along the second direction, and the third direction, the first direction and the second direction are arranged in a pairwise intersecting manner.
6. A transporting arrangement as claimed in any one of claims 4 or 5,
the number of the sliding assemblies is two, and the conveying device further comprises a cover plate which is connected with the two first connecting plates.
7. The transportation apparatus of claim 4,
the dust-proof piece comprises a first shielding plate, a second shielding plate and a third shielding plate, the second shielding plate and the third shielding plate are respectively and vertically connected with the first shielding plate,
the connecting piece comprises a first connecting plate, a third connecting plate and a fourth connecting plate, the first connecting plate is connected with the slide block, the fourth connecting plate and the first connecting plate are respectively and vertically connected with the third connecting plate,
the fourth connecting plate and the first connecting plate are oppositely arranged along the second direction,
along the third direction, the first shielding plate and the third connecting plate are at least partially arranged oppositely, and the third shielding plate is arranged between the first connecting plate and the fourth connecting plate.
8. The transportation apparatus of claim 4,
the dust-proof piece comprises a first shielding plate, a second shielding plate and a third shielding plate, the second shielding plate and the third shielding plate are respectively and vertically connected with the first shielding plate,
the connecting piece comprises a first connecting plate, a second connecting plate, a third connecting plate and a fourth connecting plate, the second connecting plate is respectively connected with the sliding block and the first connecting plate and is arranged at intervals with the first shielding plate along the third direction, the fourth connecting plate and the first connecting plate are respectively and vertically connected with the third connecting plate,
the fourth connecting plate and the first connecting plate are oppositely arranged along the second direction,
along the third direction, the first shielding plate and the third connecting plate are at least partially arranged oppositely, and the third shielding plate is arranged between the first connecting plate and the fourth connecting plate.
9. A transporting arrangement as claimed in any one of claims 7-8,
the number of the sliding assemblies is two, the conveying device further comprises a cover plate, and the cover plate is connected with the two fourth connecting plates.
10. The transporter according to claim 9, further comprising a drive member coupled to the cover and configured to drive the carriage in a first direction.
11. A transporting arrangement as claimed in claim 10, characterised in that the drive member comprises a motor, a main gear and a toothed rack which mesh with each other, the toothed rack being provided between the two guide rails, the motor being arranged to drive the main gear along the toothed rack.
12. The transporter according to claim 11, wherein the drive further comprises a driven gear engaged with the rack, the driven gear being connected to the cover.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222437650.5U CN218069808U (en) | 2022-09-14 | 2022-09-14 | Transport device |
| PCT/CN2022/120853 WO2024055352A1 (en) | 2022-09-14 | 2022-09-23 | Transportation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222437650.5U CN218069808U (en) | 2022-09-14 | 2022-09-14 | Transport device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218069808U true CN218069808U (en) | 2022-12-16 |
Family
ID=84408501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222437650.5U Active CN218069808U (en) | 2022-09-14 | 2022-09-14 | Transport device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN218069808U (en) |
| WO (1) | WO2024055352A1 (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4522795B2 (en) * | 2003-09-04 | 2010-08-11 | 株式会社日立ハイテクノロジーズ | Vacuum processing equipment |
| KR100852378B1 (en) * | 2004-10-25 | 2008-08-18 | 도쿄엘렉트론가부시키가이샤 | Carrying system, substrate treating device, and carrying method |
| DE102005039453B4 (en) * | 2005-08-18 | 2007-06-28 | Asys Automatic Systems Gmbh & Co. Kg | Machining plant of modular construction for flat substrates |
| JP2017227726A (en) * | 2016-06-21 | 2017-12-28 | キヤノン株式会社 | Substrate processing method, substrate processing device, and article manufacturing method |
| TWI760024B (en) * | 2020-12-23 | 2022-04-01 | 台灣積體電路製造股份有限公司 | Apparatus for processing a wafer and method for processing a wafer |
| CN217055971U (en) * | 2021-03-27 | 2022-07-26 | 苏州三迈斯精密工业有限公司 | Long-life high leakproofness high accuracy straight line module |
-
2022
- 2022-09-14 CN CN202222437650.5U patent/CN218069808U/en active Active
- 2022-09-23 WO PCT/CN2022/120853 patent/WO2024055352A1/en unknown
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| WO2024055352A1 (en) | 2024-03-21 |
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