CN217982034U - Laser angle auxiliary adjusting device for manufacturing semiconductor - Google Patents
Laser angle auxiliary adjusting device for manufacturing semiconductor Download PDFInfo
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- CN217982034U CN217982034U CN202222368516.4U CN202222368516U CN217982034U CN 217982034 U CN217982034 U CN 217982034U CN 202222368516 U CN202222368516 U CN 202222368516U CN 217982034 U CN217982034 U CN 217982034U
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 13
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 230000003287 optical effect Effects 0.000 claims abstract description 37
- 230000005540 biological transmission Effects 0.000 claims description 12
- 238000002310 reflectometry Methods 0.000 claims description 5
- 239000005338 frosted glass Substances 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 9
- 239000005337 ground glass Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 230000001154 acute effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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Abstract
The embodiment of the application provides a laser angle auxiliary adjusting device for manufacturing a semiconductor, which comprises a shell and an optical assembly, wherein the shell is provided with an accommodating space and comprises an interference area; the optical assembly is arranged in the accommodating space and can receive the laser beam of the laser source, the optical assembly comprises a beam splitter and a first reflecting piece, the beam splitter can split the laser beam to form a first beam and a second beam in different directions, the first reflecting piece can deflect the first beam, so that the first beam and the second beam interfere in an interference area to form an interference pattern, and the interference pattern is used for the laser source to adjust the incidence angle of the laser beam according to the interference pattern. The utility model provides a laser angle auxiliary regulating device, according to the characteristics of optics interference principle and visible light interference fringe, realized the accurate regulation of the incident angle of the laser beam of laser source to the efficiency of laser beam angle modulation has been improved.
Description
Technical Field
The application belongs to the field of semiconductors, and particularly relates to a laser angle auxiliary adjusting device for manufacturing a semiconductor.
Background
There is a continuing need to increase the computing power of electronic devices, including smart phones, tablets, desktop computers, laptop computers, and many other kinds of electronic devices. Integrated circuits provide computing power for these electronic devices. One way to increase the computational power of an integrated circuit is to increase a given area of a semiconductor substrate, which may include increasing the number of transistors and other integrated circuit features. Features in integrated circuits are created by means of photolithography.
Photolithography techniques include the generation of masks that pattern features to be formed on an integrated circuit die. A photolithographic light source illuminates the integrated circuit die through the mask. The laser can provide the light source of photoetching technique, and at the in-process of changing the laser instrument, need readjust the incident angle that the laser instrument sent laser beam, but, only carry out rough adjustment through modes such as laser marking at present stage, can't guarantee the precision of laser beam incident angle to can't guarantee the work quality and the working life of laser instrument.
SUMMERY OF THE UTILITY MODEL
The embodiment of the application provides a supplementary adjusting device of laser angle for making semiconductor, can solve the technical problem that the precision of the laser beam incident angle that current laser instrument sent can't effectively guarantee.
Embodiments of a first aspect of the present application provide a laser angle assist adjustment apparatus for manufacturing semiconductors, including a housing and an optical assembly. The housing is provided with an accommodating space and comprises an interference area. The optical assembly is arranged in the accommodating space and can receive the laser beam of the laser source, the optical assembly comprises a beam splitter and a first reflecting piece, the beam splitter can split the laser beam to form a first beam and a second beam in different directions, the first reflecting piece can deflect the first beam, so that the first beam and the second beam interfere in an interference area to form an interference pattern, and the interference pattern is used for the laser source to adjust the incidence angle of the laser beam according to the interference pattern.
According to an embodiment of the first aspect of the application, the interference zone is provided at the first side of the housing; the laser beam is shot into the accommodating space from the second side surface of the shell, and the first side surface and the second side surface are vertically arranged.
According to any of the preceding embodiments of the first aspect of the present application, the interference region is disposed at an angle to the beam splitter.
According to any one of the previous embodiments of the first aspect of the present application, the center of the interference region is collinear with the geometric center of the beam splitter.
According to any one of the preceding embodiments of the first aspect of the present application, the interference zone comprises a ground glass piece attached to the housing.
According to any of the preceding embodiments of the first aspect of the present application, the apparatus further comprises: and the transmission piece is arranged on the shell and positioned on the second side surface, and the laser beam is emitted to the beam splitter through the transmission piece.
According to any of the preceding embodiments of the first aspect of the present application, the side of the transmissive element facing away from the beam splitter is provided with a film layer, the reflectivity of which is less than 5%.
According to any of the preceding embodiments of the first aspect of the present application, the optical assembly further comprises: the second reflecting piece can deflect the second light beam to enable the second light beam to be emitted to the interference area through the beam splitter, and the second reflecting piece and the first reflecting piece are arranged in the accommodating space in a mutually perpendicular mode.
According to any of the preceding embodiments of the first aspect of the present application, the optical assembly further comprises: the third reflecting member can deflect the laser beam passing through the transmitting member, so that the laser beam is incident to the beam splitter, and the third reflecting member and the beam splitter are arranged in the accommodating space in a mutually perpendicular mode.
According to any of the preceding embodiments of the first aspect of the present application, the apparatus further comprises: and the lifting mechanism is arranged on the shell and is used for driving the shell to move along the first direction.
The laser angle auxiliary adjusting device for manufacturing the semiconductor comprises a shell and an optical assembly, wherein the optical assembly receives a laser beam of a laser source, separates the laser beam through a beam splitter to form a first beam and a second beam in different directions, deflects the first beam through a first reflecting piece, enables the first beam and the second beam to generate interference patterns in an interference area, and adjusts the incidence angle of the laser beam emitted by the laser source according to the observable interference patterns. The utility model provides a laser angle auxiliary regulating device, according to the characteristics of optics interference principle and visible light interference fringe, realized the accurate regulation of the incident angle of the laser beam of laser source to the efficiency of laser beam angle modulation has been improved. In addition, the auxiliary laser angle adjusting device comprises an interference area, interference patterns can be directly displayed in the interference area, the incident angle can be accurately adjusted conveniently, the structure of the auxiliary laser angle adjusting device is simplified, the operation efficiency is improved, and the working quality of a laser source is improved. Moreover, the laser angle auxiliary adjusting device is simple in integral structure, convenient and fast to operate, and capable of reducing equipment purchasing cost.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments of the present application will be briefly described below, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a laser angle auxiliary adjusting device according to an embodiment of the present application;
FIG. 2 is a schematic diagram illustrating an internal structure of a laser angle auxiliary adjusting device according to an embodiment of the present application;
FIG. 3 is a schematic illustration of an undeflected laser beam in a laser angle assist adjustment apparatus according to an embodiment of the present application;
FIG. 4 is a schematic illustration of a laser beam deflected in a laser angle assist adjustment apparatus provided in accordance with an embodiment of the present application;
FIG. 5 is a schematic diagram of an optical assembly of the laser angle adjustment device according to an embodiment of the present disclosure;
fig. 6 is a schematic structural diagram of an optical assembly in a laser angle auxiliary adjusting device according to another embodiment of the present application.
Description of reference numerals:
100. a laser angle auxiliary adjusting device;
10. a housing; 11. an interference region;
20. an optical component; 21. a beam splitter; 22. a first reflector; 23. a second reflector; 24. a third reflector;
30. a transmissive member;
40. a film layer;
50. a lifting mechanism;
x, first direction.
Detailed Description
Features and exemplary embodiments of various aspects of the present application will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present application. It will be apparent, however, to one skilled in the art that the present application may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the present application by illustrating examples thereof. In the drawings and the following description, at least some well-known structures and techniques have not been shown to avoid unnecessarily obscuring the present application; also, the dimensions of some of the structures may be exaggerated for clarity. Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
In the description of the present application, it is to be noted that, unless otherwise specified, "a plurality" means two or more; furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
The directional terms used in the following description are intended to refer to directions shown in the drawings, and are not intended to limit the specific structure of embodiments of the present application. In the description of the present application, it is also to be noted that, unless otherwise explicitly specified or limited, the terms "mounted" and "connected" are to be interpreted broadly, e.g., as being either fixedly connected, detachably connected, or integrally connected; can be directly connected or indirectly connected. The specific meaning of the above terms in the present application will be understood as the case may be, to one of ordinary skill in the art
For better understanding of the present application, a laser angle auxiliary adjusting device according to an embodiment of the present application is described in detail below with reference to fig. 1 to 6.
First, please refer to fig. 1 and fig. 2, fig. 1 is a schematic structural diagram of an auxiliary laser angle adjusting device according to an embodiment of the present application; fig. 2 is a schematic diagram of an internal structure of a laser angle auxiliary adjusting device according to an embodiment of the present application.
As shown in fig. 1 and 2, the present embodiment provides a laser angle adjusting device for manufacturing a semiconductor, including a housing 10 and an optical assembly 20. The housing 10 defines an accommodating space, and the housing 10 includes an interference area 11. The optical assembly 20 is disposed in the accommodating space, the optical assembly 20 can receive a laser beam of the laser source, the optical assembly 20 includes a beam splitter 21 and a first reflection member 22, the beam splitter 21 can split the laser beam to form a first beam and a second beam in different directions, the first reflection member 22 can deflect the first beam, so that the first beam and the second beam interfere in the interference area 11 to form an interference pattern, wherein the interference pattern is used for the laser source to adjust an incident angle of the laser beam according to the interference pattern.
In the embodiment of the present application, the housing 10 is a peripheral component of the laser angle auxiliary adjusting device 100, and the housing 10 is a basic mounting component of the laser angle auxiliary adjusting device 100, which can provide a mounting base for components such as the optical assembly 20. The shape of the housing 10 may be a rectangular body, a convex body, a cylindrical body, or the like, and is not limited herein.
In the embodiment of the present application, the housing 10 has an accommodating space, and the accommodating space is a non-closed space, and the side surface of the housing 10 may have an opening, so that the laser beam can be incident into the accommodating space through the housing 10, and the optical assembly 20 can receive the laser beam. The shape, size, position, etc. of the receiving space may be set according to actual requirements, for example, the receiving space may be a circular space, a rectangular space, a triangular space, etc., and only needs to meet the requirement of the optical assembly 20 on the position of the receiving space, which is not limited herein.
Referring to fig. 3 and 4 in combination, fig. 3 is a schematic view of an undeflected laser beam in a laser angle auxiliary adjusting device according to an embodiment of the present application; fig. 4 is a schematic diagram of a shifted laser beam in a laser angle auxiliary adjusting device according to an embodiment of the present application.
In the embodiment of the present application, as shown in fig. 3 and 4, the housing 10 includes an interference area 11, and the interference area 11 is used for the first light beam and the second light beam split by the beam splitter 21 to interfere and form an interference pattern. When the incident angle of the laser beam emitted by the laser source is not shifted, a small amount of interference fringes or circular ring-shaped patterns can be observed in the interference region 11; when the incident angle of the laser beam emitted from the laser source is shifted, a pattern of a plurality of interference fringes may be observed in the interference region 11, and the pattern may not be observed due to an excessively large shift, thereby performing precise adjustment of the incident angle of the laser source.
In the embodiment of the present application, the beam splitter 21 may split the laser beam to form a first beam and a second beam in different directions, the first beam is reflected to the first reflection member 22 through the beam splitter 21, the first beam reflected from the first reflection member 22 may be incident to the interference region 11 through the beam splitter 21, the second beam is transmitted in the beam splitter 21, the transmitted second beam may be directly incident to the interference region 11, or may be reflected by the reflection member to be incident to the interference region 11, that is, it is required to satisfy that the first beam and the second beam are incident to the interference region 11 on the same straight line
In the embodiment of the present application, the first reflecting member 22 can deflect the first light beam, and the first reflecting member 22 cooperates with the beam splitter 21 to realize the interference between the first light beam and the second light beam in the interference region 11.
Illustratively, as shown in fig. 3 and 4, the interference region 11 is disposed perpendicular to an incident direction of a laser beam emitted from the laser source, the beam splitter 21 splits the laser beam to form a first beam and a second beam in different directions, the first beam is reflected by the beam splitter 21 to the first reflecting member 22, the first beam reflected by the first reflecting member 22 can be incident on the interference region 11 through the beam splitter 21, the second beam is transmitted in the beam splitter 21, and the transmitted second beam can be directly incident on the interference region 11 or can be incident on the interference region 11 through reflection, so that the first beam and the second beam can be interfered in the interference region 11 to form an interference pattern.
Referring to fig. 5, fig. 5 is a schematic structural diagram of an optical element in a laser angle auxiliary adjusting device according to an embodiment of the present disclosure.
Illustratively, as shown in fig. 5, the interference region 11 is disposed opposite to an incident direction of a laser beam emitted from the laser source, the beam splitter 21 splits the laser beam to form a first beam and a second beam in different directions, the second beam is transmitted in the beam splitter 21, the transmitted second beam can be directly and perpendicularly incident on the interference region 11, the first beam is reflected by the beam splitter 21 to the first reflecting member 22, and the first beam reflected twice by the first reflecting member 22 is directly incident on the interference region 11, so that the first beam and the second beam are interfered in the interference region 11 to form an interference pattern.
In the embodiment of the application, the laser beam emitted by the laser source is visible light, and the wavelength of the laser beam is 350 nm-750 nm.
Alternatively, the first reflecting member 22 may employ a first mirror or a first reflective coating, or the like.
The laser angle auxiliary adjusting device 100 provided by the embodiment of the application comprises a housing 10 and an optical assembly 20, wherein the optical assembly 20 receives a laser beam of a laser source, splits the laser beam into a first beam and a second beam in different directions by a beam splitter 21, and deflects the first beam by a first reflecting member 22, so that the first beam and the second beam generate an interference pattern in an interference area 11, and the incident angle of the laser beam is adjusted according to the observed interference pattern. The laser angle auxiliary adjusting device 100 realizes accurate adjustment of the incident angle of the laser beam emitted by the laser source according to the optical interference principle and the characteristics of the visible light interference fringes, and improves the efficiency of adjusting the incident angle of the laser beam. In addition, including interference zone 11 in the device, can directly show interference pattern at interference zone 11, the accurate regulation of the incident angle of being convenient for simplifies the structure of laser angle auxiliary regulating device 100, improves operating efficiency, promotes the work quality of laser source. Moreover, the laser angle auxiliary adjusting device 100 is simple in overall structure, convenient and fast to operate, and equipment purchasing cost is reduced.
According to an embodiment of the first aspect of the present application, as shown in fig. 1, the interference zone 11 is disposed at a first side of the housing 10. The laser beam is emitted into the accommodating space from a second side surface of the housing 10, and the first side surface and the second side surface are arranged vertically.
In some embodiments of the present application, the first side of the housing 10 is the interference area 11, or the first side portion of the housing 10 is the interference area 11, specifically, the first side of the housing 10 has an opening, and the interference component for forming the interference area 11 is disposed at the opening of the housing 10.
In some embodiments of the present application, the laser beam is emitted into the accommodating space from the second side of the housing 10, the second side of the housing 10 may be provided with a through hole for passing the laser beam, and a transmission member 30 may be disposed at the through hole, so that the laser beam is emitted to the beam splitter 21 through the transmission member 30.
Optionally, the first side surface and the second side surface are of an integral structure, or the first side surface and the second side surface are of a split structure.
In these alternative embodiments, the incident path of the laser beam and the interference region 11 of the laser beam in the laser angle auxiliary adjusting device 100 are configured to be reasonably planned, so as to achieve quick display of the interference pattern and improve the operation efficiency.
According to any of the previous embodiments of the first aspect of the present application, the interference region 11 is arranged at an angle to the beam splitter 21, as shown in fig. 3 and 5.
In some embodiments of the present application, the interference region 11 and the beam splitter 21 are at acute angles, such as 30 °, 35 °, 40 °, 45 °, 50 °, 55 °, 60 °, 65 °, 70 °, and the like.
In these alternative embodiments, the beam splitter 21 may split the laser beam into a first beam and a second beam in different directions, and the interference region 11 is at an acute angle to the beam splitter 21 such that the second beam is incident on the interference region 11 at the second side of the housing 10.
According to any of the previous embodiments of the first aspect of the present application, the center of the interference region 11 is collinear with the geometric center of the beam splitter 21.
In these alternative embodiments, the center of the interference region 11 is collinear with the geometric center of the beam splitter 21 to achieve that the first and second beams interfere in the interference region 11 to form an interference pattern and are centered, to enhance observability, and to also reduce errors caused by misalignment that may cause the interference pattern to not fully appear.
According to any of the previous embodiments of the first aspect of the present application, the interference zone 11 comprises a frosted glass sheet, which is attached to the housing 10.
In these alternative embodiments, the first beam and the second beam interfere at the ground glass sheet to form interference fringes.
According to any of the embodiments of the first aspect of the present application, as shown in fig. 1, the apparatus further includes a transmission member 30 disposed on the housing 10 and located at the second side, and the laser beam is incident to the beam splitter 21 through the transmission member 30.
Optionally, the transmissive member 30 is a lens.
According to any of the previous embodiments of the first aspect of the present application, the side of the transmissive element 30 facing away from the beam splitter 21 is provided with a film layer 40, and the reflectivity of the film layer 40 is less than 5%.
In these alternative embodiments, the film layer 40 allows the laser beam to travel in one direction, thereby reducing the return of a portion of the laser beam to the laser source, and the reflectivity of the film layer is less than 5%, which reduces laser beam loss, thereby ensuring the accuracy of the interference pattern and further improving the efficiency of laser beam angle adjustment.
In accordance with any of the previous embodiments of the first aspect of the present application, as shown in fig. 2, 3 and 4, the optical assembly 20 further comprises: the second reflecting member 23, the second reflecting member 23 can deflect the second light beam, so that the second light beam is incident to the interference region 11 through the beam splitter 21, and the second reflecting member 23 and the first reflecting member 22 are arranged perpendicular to each other in the accommodating space.
In some embodiments of the present disclosure, the second reflecting member 23 and the first reflecting member 22 are disposed perpendicular to each other in the accommodating space, the laser beam enters the accommodating space and is incident on the beam splitter 21, the beam splitter 21 splits the laser beam into a first beam and a second beam in different directions, the first beam is reflected by the beam splitter 21 to the first reflecting member 22, the first beam reflected by the first reflecting member 22 can be incident on the interference region 11 through the beam splitter 21, the second beam is transmitted in the beam splitter 21, the transmitted second beam is incident on the second reflecting member 23, and the second beam reflected by the second reflecting member 23 can be incident on the interference region 11 through the beam splitter 21, so that the first beam and the second beam interfere with each other in the interference region 11 to form an interference pattern.
In these optional embodiments, the second reflecting member 23 and the first reflecting member 22 are disposed perpendicular to each other in the accommodating space, and the second reflecting member 23 can deflect the second light beam, so that the laser light beam enters the accommodating space from the second side surface of the housing 10, and the laser light beam is separated to form the first light beam and the second light beam, which interfere in the interference area 11 on the first side surface of the housing 10 to form an interference pattern, so as to satisfy the perpendicular disposition of the first side surface and the second side surface, which is convenient for observing the interference pattern, and the incidence angle of the laser light beam emitted by the laser source can be quickly adjusted according to the interference pattern.
Referring to fig. 6 in combination, fig. 6 is a schematic structural diagram of an optical element in a laser angle auxiliary adjusting device according to another embodiment of the present disclosure.
In accordance with any of the previous embodiments of the first aspect of the present application, as shown in fig. 2 and 6, the optical assembly 20 further comprises: the third reflecting member 24, the third reflecting member 24 can deflect the laser beam passing through the transmitting member 30, so that the laser beam is incident to the beam splitter 21, and the third reflecting member 24 and the beam splitter 21 are disposed perpendicular to each other in the accommodating space.
In some embodiments of the present application, the laser beam enters the receiving space through the transmissive element 30 and is incident on the third reflective element 24, the third reflective element 24 deflects the laser beam, the third reflective element 24 and the beam splitter 21 are disposed perpendicular to each other in the receiving space, the reflected laser beam is incident on the beam splitter 21, the beam splitter 21 splits the laser beam to form a first beam and a second beam in different directions, the first beam is reflected by the beam splitter 21 to the first reflective element 22, the first reflective element 22 has two, the two first reflective elements 22 are disposed on two sides of the beam splitter 21, the first beam reflected from the first reflective element 22 passes through the beam splitter 21 and is incident on the interference region 11, the second beam is transmitted in the beam splitter 21, and the transmitted second beam is incident on the interference region 11, such that the first beam and the second beam interfere to form an interference pattern in the interference region 11.
In these alternative embodiments, the third reflecting member 24 can deflect the laser beam passing through the transmissive member 30, so that the laser beam enters the beam splitter 21, the third reflecting member 24 and the beam splitter 21 are arranged perpendicular to each other in the receiving space, so that the laser beam enters the receiving space from the second side of the housing 10, the laser beam is split to form a first beam and a second beam, which interfere with each other in the interference area 11 on the first side of the housing 10 to form an interference pattern, which satisfies the requirement that the first side and the second side are arranged perpendicular to each other, so as to facilitate observation of the interference pattern, and the incident angle of the laser beam of the laser source can be quickly adjusted according to the interference pattern.
According to any of the preceding embodiments of the first aspect of the present application, the apparatus further comprises: the lifting mechanism 50 is disposed on the housing 10, and the lifting mechanism 50 is configured to drive the housing 10 to move along a first direction x.
In some embodiments of the present application, the lifting mechanism 50 is installed at the bottom of the housing 10, and the lifting mechanism 50 can drive the housing 10 to move along the first direction x until the laser beam emitted from the laser source enters the accommodating space through the transmission member 30, and the lifting mechanism 50 stops moving and stably supports the housing 10.
Alternatively, the path of the laser beam incident on the transmissive member 30 is on the same straight line with the geometric center of the transmissive member 30.
Alternatively, the lifting mechanism 50 may be selected from a jacking cylinder or a jacking electric cylinder to drive the housing 10 to move.
In some embodiments, as shown in the figures and figures, the present application provides a laser angle adjustment apparatus 100 for manufacturing a semiconductor, including a housing 10, an optical assembly 20, a transmissive member 30, and a film layer 40. The housing 10 defines an accommodating space, and the housing 10 includes an interference area 11. The interference area 11 is disposed on the first side of the housing 10. The transmission member 30 is disposed on the housing 10 and located on the second side surface, the laser beam is emitted into the accommodating space through the transmission member 30, and the first side surface and the second side surface are disposed vertically. The side of the transmissive element 30 facing away from the beam splitter 21 is provided with a film 40, and the reflectivity of the film 40 is less than 5%. The interference zone 11 comprises a frosted glass sheet which is attached to the housing 10. The optical assembly 20 is disposed in the accommodating space, and the optical assembly 20 can receive a laser beam of the laser source. The optical assembly 20 includes a beam splitter 21, a first reflecting member 22, and a second reflecting member 23, and the second reflecting member 23 and the first reflecting member 22 are disposed perpendicular to each other in the receiving space. The beam splitter 21 can split the laser beam to form a first beam and a second beam in different directions, the first beam is reflected by the beam splitter 21 to the first reflecting member 22, the first beam reflected from the first reflecting member 22 can be incident on the ground glass sheet through the beam splitter 21, the second beam is transmitted in the beam splitter 21, the transmitted second beam is transmitted to the second reflecting member 23, and the second beam reflected from the second reflecting member 23 can be incident on the ground glass sheet through the beam splitter 21, so that the first beam and the second beam interfere to form an interference pattern on the ground glass sheet, wherein the interference pattern is used for the laser source to adjust the incident angle of the laser beam according to the interference pattern.
The laser angle auxiliary adjusting device 100 for manufacturing a semiconductor according to the embodiment of the present application realizes accurate adjustment of the incident angle of the laser beam of the laser source according to the optical interference principle and the characteristics of the visible light interference fringes, and improves the efficiency of adjusting the laser beam angle. In addition, including the ground glass piece in the device, can directly show interference pattern at the ground glass piece, the accurate regulation of the incident angle of being convenient for simplifies the supplementary adjusting device 100 structure of laser angle, improves operating efficiency, promotes the work quality of laser source. Moreover, the laser angle auxiliary adjusting device 100 is simple in overall structure, convenient and fast to operate, and equipment purchasing cost is reduced.
While the application has been described with reference to a preferred embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the application. In particular, the technical features mentioned in the embodiments can be combined in any way as long as there is no structural conflict. The present application is not intended to be limited to the particular embodiments disclosed herein but is to cover all embodiments that may fall within the scope of the appended claims.
Claims (10)
1. A laser angle auxiliary adjusting device for manufacturing a semiconductor is characterized by comprising:
the shell is provided with an accommodating space and comprises an interference area;
an optical assembly disposed in the accommodating space, the optical assembly being capable of receiving a laser beam of a laser source, the optical assembly including a beam splitter capable of splitting the laser beam into a first beam and a second beam in different directions, and a first reflecting member capable of deflecting the first beam so that the first beam and the second beam interfere in the interference region to form an interference pattern,
wherein the interference pattern is used for the laser source to adjust the incidence angle of the laser beam according to the interference pattern.
2. Laser angle assisted adjustment device according to claim 1,
the interference area is arranged on the first side surface of the shell;
the laser beam is emitted into the accommodating space from a second side surface of the shell, and the first side surface and the second side surface are vertically arranged.
3. Laser angle assisted adjustment device according to claim 2,
the interference area and the beam splitter are arranged at an included angle.
4. Laser angle assisted adjustment device according to claim 3,
the center of the interference region is collinear with the geometric center of the beam splitter.
5. Laser angle assisted adjustment device according to claim 1,
the interference zone comprises a frosted glass sheet connected to the housing.
6. The laser angle assist adjustment apparatus of claim 2, further comprising:
and the transmission piece is arranged on the shell and positioned on the second side surface, and the laser beam is emitted to the beam splitter through the transmission piece.
7. The laser angle auxiliary adjusting device of claim 6,
one side of the transmission piece, which deviates from the beam splitter, is provided with a film layer, and the reflectivity of the film layer is less than 5%.
8. The laser angle assist adjustment device of claim 1, wherein the optical assembly further comprises:
the second reflecting piece can deflect the second light beam, so that the second light beam is emitted to the interference area through the beam splitter, and the second reflecting piece and the first reflecting piece are arranged in the accommodating space in a mutually perpendicular mode.
9. The laser angle assist adjustment apparatus of claim 6, wherein the optical assembly further comprises:
the third reflecting member can deflect the laser beam passing through the transmitting member, so that the laser beam is incident to the beam splitter, and the third reflecting member and the beam splitter are arranged in the accommodating space in a mutually perpendicular mode.
10. The laser angle assist adjustment device of claim 1, further comprising:
the lifting mechanism is arranged on the shell and used for driving the shell to move along a first direction.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222368516.4U CN217982034U (en) | 2022-09-06 | 2022-09-06 | Laser angle auxiliary adjusting device for manufacturing semiconductor |
| PCT/CN2022/120670 WO2024050877A1 (en) | 2022-09-06 | 2022-09-22 | Laser angle assisted adjustment device for manufacturing semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222368516.4U CN217982034U (en) | 2022-09-06 | 2022-09-06 | Laser angle auxiliary adjusting device for manufacturing semiconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217982034U true CN217982034U (en) | 2022-12-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202222368516.4U Active CN217982034U (en) | 2022-09-06 | 2022-09-06 | Laser angle auxiliary adjusting device for manufacturing semiconductor |
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| CN (1) | CN217982034U (en) |
| WO (1) | WO2024050877A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5771098A (en) * | 1996-09-27 | 1998-06-23 | Fed Corporation | Laser interferometric lithographic system providing automatic change of fringe spacing |
| JP4065468B2 (en) * | 1998-06-30 | 2008-03-26 | キヤノン株式会社 | Exposure apparatus and device manufacturing method using the same |
| CN102043347B (en) * | 2010-10-19 | 2016-01-06 | 长春理工大学 | The method and system of the incident attitude detection of light beam and calibration in laser interference nanometer lithography |
| CN111812948B (en) * | 2020-07-03 | 2021-09-17 | 清华大学 | Light beam incident angle regulating and controlling device and method in laser interference photoetching |
| CN113654656B (en) * | 2021-10-18 | 2022-02-11 | 之江实验室 | Light beam drift detection device and method based on three-light-beam interference |
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2022
- 2022-09-06 CN CN202222368516.4U patent/CN217982034U/en active Active
- 2022-09-22 WO PCT/CN2022/120670 patent/WO2024050877A1/en unknown
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| WO2024050877A1 (en) | 2024-03-14 |
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