CN217958785U - Silicon-based atomizing core capable of uniformly generating heat and measuring temperature - Google Patents

Silicon-based atomizing core capable of uniformly generating heat and measuring temperature Download PDF

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CN217958785U
CN217958785U CN202221933741.1U CN202221933741U CN217958785U CN 217958785 U CN217958785 U CN 217958785U CN 202221933741 U CN202221933741 U CN 202221933741U CN 217958785 U CN217958785 U CN 217958785U
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silicon
stock solution
hole
atomizing
heating plate
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李文翔
王敏锐
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Meiman Xinsheng Hangzhou Microelectronics Co ltd
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Meiman Xinsheng Hangzhou Microelectronics Co ltd
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Abstract

The utility model discloses an evenly generate heat and measurable silicon-based atomizing core of temperature, include: silica-based heating plate, the stock solution is cotton and the substrate piece, be provided with the stock solution chamber on the silica-based heating plate, silica-based heating plate surface is provided with a plurality of atomizing hole, the atomizing hole communicates to the stock solution chamber, the stock solution is cotton to be set up in the stock solution intracavity, the heater preparation is on silica-based heating plate surface, the tip of heater is provided with the electrode, be provided with the passivation protective layer on the heater, be provided with the first hole of dodging of the position correspondence electrode on the passivation protective layer, the hole is dodged to the second that still is provided with the position correspondence atomizing hole on the passivation protective layer, substrate piece fixed mounting is on silica-based heating plate stock solution chamber side surface, be provided with the feed liquor hole that the position corresponds the stock solution chamber on the substrate piece. The utility model discloses compare in prior art, the atomizing surface heat distribution is even, and the atomizing homogeneity is good, and the temperature is measurable.

Description

Silicon-based atomizing core capable of uniformly generating heat and measuring temperature
Technical Field
The utility model belongs to hot atomizer chip field especially relates to an evenly generate heat and measurable silicon-based atomizing core of temperature.
Background
The heating atomization core is used as a core component of a liquid atomization product, and heats liquid to change the liquid into a mist aerosol form to be emitted. The atomizing element is used for heating the atomized liquid quickly, uniformly, consistently and finely, and the generation of harmful substances is reduced as much as possible.
The existing liquid heating atomization cores mainly have the following two types:
the first is a cotton core atomizing core, and the metal heating wire is directly wound on the cotton core rod or supported in the cotton core tube. The metal heating wire is in direct contact with the cotton core, and the liquid absorbed and stored by the cotton core is atomized into aerogel to volatilize by the heat of the metal heating wire.
The second one is porous ceramic atomizing core comprising porous ceramic and heating electrode. Porous ceramic is made into a bowl-shaped structure through high-temperature sintering, a heating electrode is designed into a specific shape and is attached to the surface of the ceramic, and in the working process, the heating electrode heats liquid absorbed and stored in the porous ceramic to form mist which is emitted by ceramic micropores. Due to the existence of the micron-sized honeycomb holes, the atomized aerosol is finer and more uniform.
The existing cotton core atomization core has the following defects: 1) The metal heating wires are contacted with the cotton core in a winding or supporting mode, the distance between every two adjacent heating wires is large, and the size of atomized aerogel particles is large; 2) At high temperatures, the metal components in the heater and debris from the wick material may be carried by the aerosol formed by the atomization and inhaled by the user, creating a potential health hazard; 3) The cotton core is in non-uniform contact with the metal heating wire, the heating is non-uniform, and the resistance of the heating wire is changed due to high-temperature carbonization, so that the temperature of the heating wire is changed, and the atomization uniformity, stability and consistency are poor; 4) The volume of the cotton core atomizing core is relatively large.
The existing ceramic atomizing core is prepared by adopting a porous ceramic sintering technology, and a metal heating wire is arranged on the surface of the ceramic atomizing core, so that the ceramic atomizing core has the following defects: 1) The porous ceramic sintering process is unstable, the pore size and the number are difficult to control, the yield is low, the uniformity is poor, and the atomization uniformity is poor; 2) The porous ceramic has low and uneven thermal conductivity, easily causes over-high local temperature, dry-burns carbon deposition and is easily damaged; 3) The porous ceramic has complex components, inevitably contains substances harmful to human bodies, and has potential safety hazards.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a: the silicon-based atomizing core capable of generating heat uniformly and measuring the temperature is provided, the heat distribution of an atomizing surface is uniform, the atomizing uniformity is good, and the temperature can be measured.
In order to realize the above-mentioned purpose, the utility model provides an evenly generate heat and measurable silicon-based atomizing core of temperature, include: silica-based heating plate, the stock solution is cotton and the substrate piece, be provided with the stock solution chamber on the silica-based heating plate, silica-based heating plate surface is provided with a plurality of atomization hole, the atomization hole communicates to the stock solution chamber, the stock solution is cotton to be set up in the stock solution intracavity, the heater preparation is on silica-based heating plate surface, the tip of heater is provided with the electrode, be provided with the passivation protective layer on the heater, be provided with the first hole of dodging of the corresponding electrode in position on the passivation protective layer, the hole is dodged to the second that still is provided with the corresponding atomization hole in position on the passivation protective layer, a stock solution chamber side surface on the silica-based heating plate of substrate piece fixed mounting, be provided with the feed liquor hole that the position corresponds the stock solution chamber on the substrate piece.
As a further description of the above technical solution:
the liquid inlet hole is internally provided with liquid guide cotton.
As a further description of the above technical solution:
the silicon-based heating piece comprises a silicon film and a silicon frame, the silicon film is correspondingly arranged above the liquid storage cavity, and the atomizing holes are formed in the silicon film.
As a further description of the above technical solution:
the substrate sheet is a glass sheet, a quartz sheet, a silica gel sheet or a ceramic sheet.
As a further description of the above technical solution:
the thickness of the substrate sheet is 100 μm-1mm.
The utility model provides a pair of evenly generate heat and measurable silicon-based atomizing core of temperature, the manufacturing step is as follows:
s1, depositing a heating wire and an electrode on a silicon-based heating sheet, and making a specific pattern by a dry etching or wet etching process;
s2, depositing a passivation protective layer on the heating wire and the electrode, and etching the passivation protective layer on the electrode through a dry etching process or a wet etching process;
s3, sequentially etching the passivation protective layer and the silicon-based heating sheet by using a dry etching process or a wet etching process to form atomizing holes on the silicon-based heating sheet;
s4, etching a liquid storage cavity on the back of the silicon-based heating piece by using a dry etching process or a wet etching process;
s5, putting high-temperature-resistant liquid storage cotton into the liquid storage cavity;
and S6, connecting the substrate sheet with the liquid inlet hole to one side of the liquid storage cavity of the silicon-based heating sheet.
As a further description of the above technical solution:
in step S6, the liquid inlet hole processing process includes one of a sand blasting process, a laser process, a mechanical drilling process, a wet etching process, and a dry etching process.
As a further description of the above technical solution:
in step S6, liquid guide cotton is arranged in the liquid inlet hole, and the liquid guide cotton is organic cotton or cellucotton.
As a further description of the above technical solution:
in step S6, the substrate sheet and the silicon-based heating sheet are connected by one of eutectic bonding, adhesive bonding, and direct contact.
To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:
1. the utility model discloses in, whole atomizing core comprises silicon-based piece, the cotton, the substrate piece that has the feed liquor hole of generating heat of high temperature resistant liquid storage, chooses for use to make human harmless material, and wherein the feed liquor is downthehole also can contain the drain cotton. Liquid enters the liquid storage cavity from the liquid inlet hole, is absorbed by the liquid storage cotton of the liquid storage cavity and is uniformly distributed in the liquid storage cotton. The heat generated by the metal heating wire is uniformly distributed on the silicon film to heat and atomize the liquid in the liquid storage cotton. Atomizing aerogel releases through the micron order atomizing hole, and atomizing hole size, the nimble customization of distribution, even exquisiteness after the liquid atomization.
2. The utility model discloses in, select molybdenum material preparation metal heating wire for use, harmless to the human body to have the better resistance temperature characteristic of linearity, can calculate out concrete temperature through the resistance value of heating wire in the direct measurement operating condition, it is measurable to realize the temperature, prevents that the high temperature from releasing harmful substance.
3. The utility model discloses in, atomizing face (silicon film) heat distribution is even on the atomizing core, and the atomizing homogeneity is good, and the temperature is measurable, can avoid local dry combustion method. In addition, the atomizing hole is matched with the liquid storage cotton, and the atomizing core has high liquid locking performance.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a first silicon-based atomizing core scheme which can uniformly generate heat and can measure temperature.
Fig. 2 is a schematic structural diagram of a second silicon-based atomizing core scheme with uniform heating and measurable temperature.
Fig. 3 is a schematic structural diagram of the silicon-based heating sheet processed in the step S1 of manufacturing the silicon-based atomizing core which can uniformly heat and measure the temperature.
Fig. 4 is a schematic structural diagram of the silicon-based heating sheet processed in the step S2 of manufacturing the silicon-based atomizing core which can uniformly heat and measure the temperature.
Fig. 5 is a schematic structural diagram of the silicon-based heating sheet processed in the step S3 of manufacturing the silicon-based atomizing core which can uniformly heat and measure the temperature.
Fig. 6 is a schematic structural diagram of the silicon-based heating sheet processed in the step S4 of manufacturing the silicon-based atomizing core which can uniformly heat and measure the temperature.
Fig. 7 is a schematic structural view of the silicon-based heating sheet processed in the step S5 of manufacturing the silicon-based atomizing core which can uniformly generate heat and can measure the temperature.
Fig. 8 is a schematic structural view of the silicon-based heating sheet processed in the step S6 of manufacturing the silicon-based atomizing core which can uniformly heat and measure the temperature.
Illustration of the drawings:
1. a silicon-based heating sheet; 11. a liquid storage cavity; 12. an atomization orifice; 13. a silicon film; 14. a silicon frame; 2. a heating wire; 21. an electrode; 3. liquid storage cotton; 4. a substrate sheet; 41. a liquid inlet hole; 5. passivating the protective layer; 51. a first avoidance hole; 52. a second avoidance hole; 6. and (4) liquid guide cotton.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the embodiments of the present invention, it should be noted that the terms "upper", "inner" and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the utility model is used, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to which the term refers must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1, the present invention provides a silicon-based atomizing core capable of generating heat uniformly and measuring temperature, including: silica-based heating plate 1, stock solution cotton 3 and substrate piece 4, be provided with stock solution chamber 11 on silica-based heating plate 1, silica-based heating plate 1 surface is provided with a plurality of atomization hole 12, atomization hole 12 communicates to stock solution chamber 11, stock solution cotton 3 sets up in stock solution chamber 11, the preparation of heater 2 is on silica-based heating plate 1 surface, the tip of heater 2 is provided with electrode 21, be provided with passivation protective layer 5 on heater 2, be provided with the first hole 51 of dodging that the position corresponds electrode 21 on passivation protective layer 5, still be provided with the second that the position corresponds atomization hole 12 on passivation protective layer 5 and dodge hole 52, 11 a side surface in stock solution chamber on silica-based heating plate 1 of substrate piece 4 fixed mounting, be provided with the feed liquor hole 41 that the position corresponds stock solution chamber 11 on substrate piece 4.
Be provided with in the feed liquor hole 41 and lead liquid cotton 6, can set up according to the demand is nimble in the substrate piece 4 and lead liquid cotton 6, see specifically figure 2, utilize to lead liquid cotton 6 to improve oil feed stability, increase thermal-insulated effect.
The silicon-based heating plate 1 comprises a silicon film 13 and a silicon frame 14, wherein the silicon film 13 is correspondingly arranged above the liquid storage cavity 11, and the atomizing hole 12 is arranged on the silicon film 13.
The substrate sheet 4 is a glass sheet, a quartz sheet, a silica gel sheet or a ceramic sheet, and the substrate sheet 4 is usually made of a material with poor thermal conductivity, so as to ensure the heat insulation effect, such as glass, quartz, a silica gel pad, ceramic, a temperature-resistant high polymer material and the like.
The thickness of the substrate sheet 4 is 100 μm-1mm, and the substrate sheet is flexibly arranged according to requirements.
Referring to fig. 3-8, the silicon-based atomizing core with uniform heat generation and measurable temperature provided by the present invention has the following manufacturing steps:
s1, depositing a Mo heating wire 2 and a Mo electrode 21 on a silicon-based heating plate 1, and making a specific pattern by a dry etching or wet etching process;
s2, depositing a passivation protective layer 5 on the heating wire 2 and the electrode 21, and etching the passivation protective layer 5 on the electrode 21 through a dry etching process or a wet etching process, wherein the passivation protective layer 5 can be made of silicon oxide, silicon nitride or silicon oxide, silicon nitride and the like, and the thickness can be dozens of nanometers to dozens of micrometers;
s3, sequentially etching the passivation protective layer 5 and the silicon-based heating sheet 1 by using a dry etching process or a wet etching process, and forming atomization holes 12 in the silicon-based heating sheet 1, wherein the depth of the atomization holes 12 can be several micrometers to hundreds of micrometers;
s4, etching a liquid storage cavity 11 on the back surface of the silicon-based heating sheet 1 by using a dry etching process or a wet etching process, wherein the depth of the liquid storage cavity 11 can be dozens of micrometers to hundreds of micrometers;
s5, putting high-temperature-resistant liquid storage cotton 3 into the liquid storage cavity 11, wherein the liquid storage cotton can be organic pure cotton, flax, cotton blended yarn and the like;
s6, connecting the substrate 4 with the liquid inlet hole 41 to one side of the liquid storage cavity 11 of the silicon-based heating sheet 1, wherein the hole (the liquid inlet hole 41) on the substrate 4 can be processed by processes such as sand blasting, laser, mechanical drilling, wet etching, dry etching and the like. The substrate sheet and the silicon-based heating sheet 1 can be connected together by eutectic bonding, adhesives, direct contact (direct contact under the positioning of an external positioning structure, but not fixed between the two), and the like. The substrate sheet (e.g., glass sheet) thickness may be in the range of 100 μm to 1mm. The holes on the substrate sheet are tens of micrometers to 1mm in size, and the number of the holes can be one to hundreds, and the holes are distributed singly or in an array.
In step S6, the liquid guide cotton 6 is arranged in the liquid inlet hole 41, and the liquid guide cotton 6 is organic cotton or cellucotton, so that the oil inlet stability can be improved, and the heat insulation effect is improved.
The working principle is as follows: the whole atomization core consists of a silicon-based heating piece, high-temperature-resistant liquid storage cotton and a substrate piece with a liquid inlet hole, wherein the liquid inlet hole can also contain liquid guide cotton. Liquid enters the liquid storage cavity from the liquid inlet hole, is absorbed by the liquid storage cotton of the liquid storage cavity and is uniformly distributed in the liquid storage cotton. The heat generated by the metal heating wire is uniformly distributed on the silicon film to heat and atomize the liquid in the liquid storage cotton. The atomized aerogel is released through the micron-sized atomization holes, and is uniform and fine. The silicon-based heating plate is provided with a metal heating wire, an atomizing hole, a passivation protective layer, a silicon film, a silicon frame and a liquid storage cavity. The passivation protective layer can prevent metal components in the heating wire from being carried by aerosol formed by atomization at high temperature, and the metal components are prevented from being inhaled by a user.
The metal heating wire is made of molybdenum materials, is harmless to human bodies, has the resistance temperature characteristic with good linearity, and can calculate the specific temperature by directly measuring the resistance value of the heating wire in the working state to prevent harmful substances from being released due to overhigh temperature. The silicon material has good heat-conducting property, and can uniformly distribute the heat generated by the metal heating wire on the silicon film, thereby avoiding dry burning caused by local overheating. The size and arrangement of the atomizing holes can be adjusted according to the atomizing effect, and the uniformity is higher. The size of the atomization hole is usually dozens of microns, and the atomization uniformity is good. In addition, the atomization core has a better liquid locking function through the matching of the atomization holes and the liquid storage cotton.
The liquid storage cavity is composed of a silicon frame and a silicon film, and high-temperature-resistant liquid storage cotton is arranged in the liquid storage cavity. The liquid storage cotton is in close contact with a silicon membrane area with an atomizing hole and a metal heating wire. The silicon material has good thermal conductivity, and the heat of the metal heating wire is distributed on the whole silicon film in a relatively uniform conduction mode. The silicon film is relatively thin, so that excessive heat can be prevented from being transmitted to the silicon frame, and the heat efficiency is improved. The silicon film heats the liquid on the stock solution cotton and atomizes, and the atomizing aerogel distributes out through the atomizing hole.
The cotton storage liquid will need the storage of atomizing liquid equipartition in the stock solution intracavity for the liquid distribution that contacts with the silicon membrane is more even, is difficult for receiving external environment influence, improves the atomizing stability. And the liquid storage cotton can prevent the heat of the silicon film from being conducted downwards, so that the heat loss is reduced, and the influence of the excessive conducted heat on the liquid in the liquid storage system is reduced.
The substrate sheet is provided with a liquid inlet hole which is contacted with one side of the liquid storage cavity of the silicon-based heating sheet. Liquid flows into the liquid storage cavity through the liquid inlet hole and is adsorbed by the liquid storage cotton. The size, number and arrangement of the liquid inlet holes can be flexibly set so as to realize the optimal atomization effect. The liquid guide cotton can be placed in the liquid inlet hole, so that the oil inlet stability can be improved, and the heat insulation effect is improved. The substrate sheet is usually made of a material with poor thermal conductivity, such as glass, quartz, silica gel pad, ceramic, and temperature-resistant polymer material.
The above, only be the embodiment of the preferred of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, which are designed to be replaced or changed equally, all should be covered within the protection scope of the present invention.

Claims (5)

1. A silicon-based atomizing core capable of generating heat uniformly and measuring temperature is characterized by comprising: silicon-based heating plate (1), stock solution cotton (3) and substrate piece (4), be provided with stock solution chamber (11) on silicon-based heating plate (1), silicon-based heating plate (1) surface is provided with a plurality of atomization hole (12), atomization hole (12) communicate to stock solution chamber (11), stock solution cotton (3) set up in stock solution chamber (11), heater (2) preparation is in silicon-based heating plate (1) surface, the tip of heater (2) is provided with electrode (21), be provided with passivation protective layer (5) on heater (2), it corresponds to be provided with the position on passivation protective layer (5) the hole (51) is dodged to the first of electrode (21), it corresponds still to be provided with the position on passivation protective layer (5) the hole (52) is dodged to the second of atomization hole (12), substrate piece (4) fixed mounting is in silicon-based heating plate (1) stock solution chamber (11) side surface, be provided with the position on substrate piece (4) and correspond the feed liquor hole (41) of stock solution chamber (11).
2. The silicon-based atomizing core capable of uniformly generating heat and measuring temperature as claimed in claim 1, wherein a liquid guide cotton (6) is disposed in the liquid inlet hole (41).
3. The silicon-based atomizing core capable of generating heat uniformly and measuring temperature according to claim 1, wherein the silicon-based heating sheet (1) comprises a silicon film (13) and a silicon frame (14), the silicon film (13) is correspondingly disposed above the liquid storage cavity (11), and the atomizing holes (12) are disposed on the silicon film (13).
4. A uniformly heat-generating and temperature-measurable silicon-based atomizing core according to claim 1, characterized in that the substrate sheet (4) is a glass sheet, a quartz sheet, a silica gel sheet or a ceramic sheet.
5. A homogeneous exothermic and temperature measurable silicon-based atomizing core according to claim 1, wherein the substrate sheet (4) has a thickness of 100 μm to 1mm.
CN202221933741.1U 2022-07-25 2022-07-25 Silicon-based atomizing core capable of uniformly generating heat and measuring temperature Active CN217958785U (en)

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CN202221933741.1U CN217958785U (en) 2022-07-25 2022-07-25 Silicon-based atomizing core capable of uniformly generating heat and measuring temperature

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