CN217911333U

CN217911333U - Coating machine for coating planar substrate

Info

Publication number: CN217911333U
Application number: CN202222291447.1U
Authority: CN
Inventors: 陈锋光
Original assignee: New Best System Technology Suzhou Co ltd
Current assignee: New Best System Technology Suzhou Co ltd
Priority date: 2022-08-30
Filing date: 2022-08-30
Publication date: 2022-11-29
Anticipated expiration: 2032-08-30

Abstract

The utility model relates to a coating machine of coating plane substrate, including coating cavity and substrate frame, the substrate frame is located the coating cavity, still including the removal base that can realize the back and forth movement, and the substrate frame is installed on removing the base along X axle direction, is provided with at least one ion source unit in the coating cavity in the substrate frame outside. The utility model relates to a coating machine for coating plane base material, which can realize the reciprocating motion of a substrate frame in the inner cavity of the coating along the X-axis direction through a movable base which can realize the reciprocating motion in the inner cavity of the coating, thereby realizing the uniform coating of the substrate; because the distance between the substrate frame and the ion source in the vertical direction is consistent, the uniformity of the distribution of the thickness of the coating on the substrate on the surface of the whole substrate can be realized; through the cooperation between the sensor systems formed by a plurality of sensors, the position or the movement device, the speed, the direction and the like of the substrate frame can be conveniently detected.

Description

Coating machine for coating plane base material

Technical Field

The utility model relates to a coating machine correlation technique field especially relates to a coating machine of coating plane substrate.

Background

When rectangular or planar substrates are coated, the substrate holder for holding the substrate is usually fixedly disposed in the coating chamber, so that the substrate cannot be coated in a reciprocating manner, and the distances between the mounting positions of a plurality of ion sources in an ion source system for coating the substrate and the substrate holder are not uniform, which may result in non-uniform distribution of the thickness of the coating on the substrate over the entire surface of the substrate.

In view of the above-mentioned drawbacks, the present inventors have made active research and innovation to create a coating machine for coating a planar substrate, which is more industrially valuable.

SUMMERY OF THE UTILITY MODEL

In order to solve the above technical problems, the present invention provides a coating machine for coating a planar substrate.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a coating machine of coating plane substrate, including coating cavity and substrate frame, the substrate frame is located the coating cavity, still including the removal base that can realize back and forth movement, the substrate frame is installed on removing the base along X axle direction, the bottom of removing the base is provided with a plurality of and removes the truckle, be provided with at least one ion source unit in the coating cavity in the substrate frame outside, it is provided with the first sensor of at least one base along one side of X axle negative direction to remove the base, it is provided with at least one base second sensor to remove the base along one side of X axle positive direction, the coating cavity is provided with the first sensor of at least one cavity along one side of X axle negative direction, the coating cavity is provided with at least one cavity second sensor along one side of X axle positive direction.

As a further improvement, the coating cavity of the bottom of the movable base is internally provided with a scanning path along the X-axis direction, and the bottom of the movable base is provided with a scanner matched with the scanning path.

As the utility model discloses a further improvement moves the substrate frame mounting groove that is provided with on the base and supplies the substrate frame installation, still is provided with a plurality of draw-in groove in the substrate frame mounting groove, and the cardboard joint of substrate frame bottom is in the draw-in groove, and the cardboard passes through the bolt to be installed in the draw-in groove.

As a further improvement of the present invention, the ion source unit is located at one side or both sides of the coating cavity along the X-axis direction, at one side or both sides of the coating cavity along the Y-axis direction, and at one side or both sides of the coating cavity along the Z-axis direction.

As a further improvement of the utility model, the ion source unit comprises an ion source mounting groove which is uniformly arranged along the X-axis direction, an ion source is arranged in the ion source mounting groove, and a baffle plate is arranged in the coating cavity of one side of the ion source facing the substrate frame.

As a further improvement of the utility model, the distance between a plurality of ion sources on one side and the substrate holder is the same.

As a further improvement of the utility model, the coating cavity is provided with a plurality of vacuum holes.

As a further improvement of the utility model, the quantity of coating cavity is a plurality of, and the even interconnect in proper order along the X axle direction of a plurality of coating cavity is in the same place.

As a further improvement, the inner top of the coating cavity is also provided with a vision system for monitoring the processing condition in the coating cavity in real time.

Borrow by above-mentioned scheme, the utility model discloses at least, have following advantage:

the utility model relates to a coating machine for coating plane base material, which can realize the reciprocating motion of a substrate frame in the inner cavity of the coating along the X-axis direction through a movable base which can realize the reciprocating motion in the inner cavity of the coating, thereby realizing the uniform coating of the substrate; because the distance between the substrate frame and the ion source in the vertical direction is consistent, the uniformity of the coating thickness on the substrate on the whole substrate surface can be realized; through the cooperation between the sensor systems formed by a plurality of sensors, the position or the movement device, the speed, the direction and the like of the substrate frame can be conveniently detected.

The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on these drawings without inventive efforts.

FIG. 1 is a schematic view of a coating machine for coating a flat substrate according to the present invention;

fig. 2 is a front view of the present invention;

FIG. 3 is a schematic view of the structure of the mobile base and substrate holder of FIG. 1;

fig. 4 is a schematic structural diagram of the first embodiment of the present invention;

fig. 5 is a schematic structural diagram of a second embodiment of the present invention;

fig. 6 is a schematic structural diagram of an ion source unit according to the present invention.

In the drawings, the meanings of the reference numerals are as follows.

1 coating cavity 2 cavity first sensor

3 ion source unit 4 mobile base

5 substrate holder 6 evacuation hole

7 base first sensor 8 scanning path

9 base second sensor 10 cavity second sensor

11 moving caster 12 scanner

13 substrate holder mounting groove 14 clamping groove

15 chuck plate 16 bolt

17 ion source mounting groove 18 ion source

19 baffle plate

Detailed Description

The following detailed description of the embodiments of the present invention is made with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

In order to make the technical solution of the present invention better understood, the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by those skilled in the art without creative efforts belong to the protection scope of the present invention.

Examples

As shown in figures 1 to 6 of the drawings,

the utility model provides a coating machine of coating plane substrate, including coating cavity 1 and substrate frame 5, substrate frame 5 is located coating cavity 1, still including the removal base 4 that can realize the back and forth movement, substrate frame 5 is installed on removing base 4 along X axle direction, the bottom of removing base 4 is provided with a plurality of and removes truckle 11, be provided with at least one ion source unit 3 in the coating cavity 1 in the substrate frame 5 outside, it is provided with at least one first sensor of base 7 to remove base 4 along one side of X axle negative direction, it is provided with at least one second sensor of base 9 to remove base 4 along one side of X axle positive direction, coating cavity 1 is provided with at least one first sensor of cavity 2 along one side of X axle negative direction, coating cavity 1 is provided with at least one second sensor of cavity 10 along one side of X axle positive direction. Wherein, the appearance structures of the coating cavity 1 and the substrate frame 5 can be arranged in a rectangular structure.

The moving track of the moving base 4 in the coating cavity 1, a scanning path 8 is further arranged in the coating cavity 1 at the bottom of the moving base 4 along the X-axis direction, and a scanner 12 matched with the scanning path 8 is arranged at the bottom of the moving base 4. The working principle of the scanner 12 and the scanning path 8 may be a two-dimensional code path recognition technology which is conventional in the robot motion field or other equally-replaceable technologies.

The utility model discloses first embodiment removes and is provided with the substrate frame mounting groove 13 that supplies 5 installations of substrate frame on the base 4, still is provided with a plurality of draw-in groove 14 in the substrate frame mounting groove 13, and the 15 joints of cardboard of 5 bottoms of substrate frame are in draw-in groove 14, and cardboard 15 passes through bolt 16 to be installed in draw-in groove 14.

The ion source unit 3 is located at one side or two sides of the coating cavity 1 along the X-axis direction, the ion source unit 3 is located at one side or two sides of the coating cavity 1 along the Y-axis direction, and the ion source unit 3 is located at one side or two sides of the coating cavity 1 along the Z-axis direction.

The ion source unit 3 comprises ion source mounting grooves 17 uniformly arranged along the X-axis direction, an ion source 18 is mounted in the ion source mounting groove 17, and a baffle plate 19 is arranged in the coating cavity 1 at one side of the ion source 18 facing the substrate holder 5.

The spacing between the several ion sources 18 on one side and the substrate holder 5 is the same. The ion source 18 may be a variety of types, and the specific type selection depends on the requirements of the processing conditions, and may be a pre-treatment ion source or several coating ion sources, or a combination of several pre-treatment ion sources and several coating ion sources, where the pre-treatment ion source is an anode layer ion source or a filament ion source, and the coating ion source is magnetron sputtering or cathode arc or an electron gun. In addition, the ion source 18 may be a microwave ion source or a radio frequency ion source, or the like.

The front of each single ion source 18 is provided with a baffle 19 capable of automatically opening and closing, the structure of the baffle 19 is a mechanism for driving the baffle 19 to open and close through an air cylinder or a motor, and the baffle 19 can be closed when the ion sources 18 do not need to work, so that mutual cross contamination between the two is avoided.

The substrate frame 5 is arranged on the movable base 4 through the substrate frame mounting groove 13, the substrate frame 5 can be conveniently detached and replaced, in addition, the substrate frame is also arranged for the adjustment of the adaptability of the ion source unit 3, the position of the ion source unit 3 can be adjusted adaptively in the application, the corresponding adjustment is also required to be made for the same substrate frame 5, wherein the most critical factor is that the mounting position of the substrate on the substrate frame 5 is matched with the ion source unit 3.

The utility model discloses the second embodiment, the quantity of coating cavity 1 is a plurality of, and the even interconnect in proper order along X axle direction of a plurality of coating cavity 1 is in the same place.

The coating cavity 1 is also provided with a plurality of vacuum holes 16. Each independent coating cavity 1 is respectively provided with an independent bias source, and the substrate frame 5 is connected with the bias source and insulated from the cavity.

Additional secondary visual monitoring: the top of the inner side of the coating cavity 1 is also provided with a visual system for monitoring the processing condition in the coating cavity 1 in real time, and the visual system can be a CCD visual system or an infrared detector and the like.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly referring to the number of technical features being grined. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected: either mechanically or electrically: the terms may be directly connected or indirectly connected through an intermediate medium, or may be a communication between two elements.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims

1. The utility model provides a coating machine of coating plane substrate, includes coating cavity (1) and substrate frame (5), substrate frame (5) are located coating cavity (1), its characterized in that still includes movable base (4) that can realize the back and forth movement, install on movable base (4) along the X axle direction substrate frame (5), the bottom of movable base (4) is provided with a plurality of and removes truckle (11), be provided with at least one ion source unit (3) in coating cavity (1) in the substrate frame (5) outside, movable base (4) are provided with at least one first sensor of base (7) along one side of X axle negative direction, movable base (4) are provided with at least one second sensor of base (9) along one side of X axle positive direction, coating cavity (1) is provided with at least one first sensor of cavity (2) along one side of X axle negative direction, coating cavity (1) are provided with at least one second sensor of cavity (10) along one side of X axle positive direction.

2. The coating machine for coating flat substrates according to claim 1, characterized in that the coating chamber (1) at the bottom of the movable base (4) is further provided with a scanning path (8) along the X-axis direction, and the bottom of the movable base (4) is provided with a scanner (12) which is matched with the scanning path (8).

3. The coating machine for coating flat substrates according to claim 1, wherein the movable base (4) is provided with a substrate holder mounting groove (13) for mounting the substrate holder (5), a plurality of clamping grooves (14) are further formed in the substrate holder mounting groove (13), the clamping plate (15) at the bottom of the substrate holder (5) is clamped in the clamping grooves (14), and the clamping plate (15) is mounted in the clamping grooves (14) through bolts (16).

4. The coating machine for coating a planar substrate according to claim 1, wherein said ion source unit (3) is located at one side or both sides of the coating chamber (1) in the direction of the X-axis, said ion source unit (3) is located at one side or both sides of the coating chamber (1) in the direction of the Y-axis, and said ion source unit (3) is located at one side or both sides of the coating chamber (1) in the direction of the Z-axis.

5. The coating machine for coating flat substrates according to claim 1, wherein the ion source unit (3) comprises ion source mounting grooves (17) uniformly arranged along the X-axis direction, an ion source (18) is mounted in the ion source mounting groove (17), and a baffle plate (19) is arranged in the coating cavity (1) at the side of the ion source (18) facing the substrate holder (5).

6. A coating machine for coating flat substrates according to claim 5, characterized in that several of the ion sources (18) on one side are equally spaced from the substrate holder (5).

7. A coating machine for coating flat substrates according to claim 1, characterized in that the coating chamber (1) is also provided with several evacuation holes (6).

8. The coating machine for coating flat substrates according to claim 1, characterized in that the number of coating chambers (1) is several, and several coating chambers (1) are uniformly connected to each other in sequence along the X-axis direction.

9. A coating machine for coating flat substrates according to claim 1, characterized in that the inside top of the coating chamber (1) is also provided with a vision system for real-time monitoring of the process in the coating chamber (1).