CN217822728U - Spacing adjusting device - Google Patents

Abstract

The application relates to the field of semiconductor processing equipment, in particular to a spacing adjusting device which comprises a rack, and a substrate conveying mechanism, a laser displacement sensor, an upper CCD (charge coupled device) detecting mechanism, a crystal grain conveying mechanism and an ejection mechanism which are sequentially arranged on the rack; the laser displacement sensor is used for detecting the shape of the substrate, and the upper CCD detection mechanism is used for detecting the position of the substrate; the substrate conveying mechanism is used for driving the substrate to move along the horizontal direction, and the crystal grain conveying mechanism is used for driving the plurality of crystal grains to move along the horizontal direction; the ejection mechanism comprises an ejector pin, an ejection force adjusting assembly and a lifting assembly, the lifting assembly is arranged on the rack, and the lifting assembly is used for driving the ejection force adjusting assembly to lift; the bottom end of the jacking force adjusting assembly is fixedly connected with the ejector pin, and the jacking force adjusting assembly is used for adjusting the jacking force of the ejector pin; the thimble is used for jacking the crystal grains to the surface of the substrate. The quality of the crystal grains mounted on the substrate is improved.

Description

Spacing adjusting device

Technical Field

The application relates to the field of semiconductor processing equipment, in particular to a distance adjusting device.

Background

At present, a PCB, also called a printed circuit board in chinese name, is an important electronic component, is a support for an electronic component, and is a carrier for electrical connection of the electronic component. With the continuous progress of semiconductor technology, the application of the crystal grains in the semiconductor parts is also becoming more extensive.

The related art discloses an ejection mechanism, which comprises a rack, a lifting piece and an ejector pin, wherein the lifting piece is arranged on the rack in a sliding manner, a driving piece is used for driving the ejector pin to lift, and the ejector pin is used for ejecting crystal grains to the surface of a substrate in the descending process so as to fix the crystal grains.

With respect to the related art among the above, there are the following drawbacks: the substrate can be bent and deformed, so that the substrate is partially tilted; the lifting stroke of the ejector pins in the related art is fixed, and when the upward tilting amplitude of the substrate is too large, the ejector pins are easy to generate the conditions of crystal grain overturning, top damage and the like in the process of sequentially ejecting the crystal grains to the surface of the substrate, so that the crystal grains are easy to damage.

SUMMERY OF THE UTILITY MODEL

In order to improve the quality of the installation of the crystal grains on the substrate, the application provides a spacing adjusting device.

The application provides a spacing adjusting device adopts following technical scheme:

an interval adjusting device comprises a rack, and a substrate conveying mechanism, a laser displacement sensor, an upper CCD (charge coupled device) detecting mechanism, a crystal grain conveying mechanism and an ejection mechanism which are sequentially arranged on the rack; the laser displacement sensor is used for detecting the shape of the substrate, and the upper CCD detection mechanism is used for detecting the position of the substrate; the substrate conveying mechanism is used for driving the substrate to move along the horizontal direction, and the crystal grain conveying mechanism is used for driving a plurality of crystal grains to move along the horizontal direction;

the ejection mechanism comprises an ejector pin, an ejection force adjusting component and a lifting component, the lifting component is arranged on the rack, and the lifting component is used for driving the ejection force adjusting component to lift; the bottom end of the jacking force adjusting assembly is fixedly connected with the ejector pin, and the jacking force adjusting assembly is used for adjusting the jacking force of the ejector pin; the ejector pin is used for ejecting the crystal grains to the surface of the substrate.

By adopting the technical scheme, the laser displacement sensor is used for detecting the shape of the substrate, so that the tilting height of the substrate can be conveniently detected, and the upper CCD detection mechanism is used for detecting the position of the substrate, so that the initial position of the substrate can be conveniently identified; the lifting assembly drives the jacking force adjusting assembly to lift, so that the ejector pins connected to the jacking force adjusting assembly can be driven to lift, and meanwhile, the size of the jacking force of the ejector pins can be adjusted by the jacking force adjusting assembly according to the shape of the substrate measured by the laser displacement sensor, so that the descending height of the ejector pins can be conveniently adjusted when the ejector pins perform grain operation; the ejector pins can accurately eject the crystal grains on the blue film to the surface of the substrate in sequence, so that the conditions of overturning and top damage of the crystal grains during ejection operation can be avoided, and the quality of the crystal grains mounted on the substrate is improved.

Optionally, the lifting assembly comprises a lifting driving piece and a lifting piece, the lifting piece is arranged on the rack in a sliding mode, the lifting driving piece is used for driving the lifting piece to lift, and the jacking force adjusting assembly is arranged on the lifting piece.

Through adopting above-mentioned technical scheme, the lift driving piece drive lift, and the lift drives jacking force adjusting part and goes up and down, and jacking force adjusting part drives the thimble and goes up and down to a plurality of crystalline grains on the blue membrane push up to the surface of base plate in proper order, and then realize automaticly.

Optionally, the thimble mechanism further comprises a guide assembly, the guide assembly comprises a guide rail and a sliding block, the guide rail is fixed on the frame, and the sliding block is fixed on the lifting member; the guide rail passes through the sliding block, and the sliding block is in sliding fit with the guide rail.

Through adopting above-mentioned technical scheme, the guide rail has the guide effect to sliding to there is the guide effect to the lift, increased the stability that the lift goes up and down.

Optionally, the substrate conveying mechanism includes a substrate carrying platform, a first sliding member, a first horizontal driving member, a second sliding member, and a second horizontal driving member; the first sliding part is arranged on the rack in a sliding manner, and the first horizontal driving part is used for driving the first sliding part to slide along a first direction; the second sliding part is arranged on the first sliding part in a sliding mode, the second horizontal driving part is used for driving the second sliding part to slide along the second direction, the substrate bearing platform is fixed on the second sliding part and used for bearing a substrate.

By adopting the technical scheme, the first horizontal driving piece drives the first sliding piece to slide along the first direction, and the first sliding piece drives the second sliding piece and the substrate bearing platform to slide along the first direction, so that the substrate is driven to move along the first direction; meanwhile, the second horizontal driving piece drives the second sliding piece to slide along the second direction, and the second sliding piece drives the substrate bearing platform to slide along the second direction, so that the substrate bearing platform is driven to slide along the second direction, and the substrate is driven to move along the horizontal direction.

Optionally, the crystal grain conveying mechanism includes a crystal grain bearing platform, a third sliding member, a third horizontal driving member, a fourth sliding member, and a fourth horizontal driving member; the third sliding part is arranged on the rack in a sliding manner, and the third horizontal driving part is used for driving the third sliding part to slide along a third direction; the fourth sliding part is arranged on the third sliding part in a sliding mode, the fourth horizontal driving part is used for driving the fourth sliding part to slide along a fourth direction, and the crystal grain bearing platform is used for bearing a blue film.

By adopting the technical scheme, the third horizontal driving piece drives the third sliding piece to slide along the first direction, and the third sliding piece drives the fourth sliding piece and the crystal grain bearing platform to slide along the first direction; meanwhile, the fourth horizontal driving part drives the fourth sliding part to slide along the second direction, and the fourth sliding part drives the crystal grain bearing platform to slide along the second direction, so that the crystal grain bearing platform is driven to slide along the second direction, and the substrate is driven to move along the horizontal direction.

Optionally, a through annular groove is formed in the upper surface of the crystal grain bearing platform, and a bearing ring is fixedly arranged on the inner side wall of the annular groove.

By adopting the technical scheme, the annular groove is arranged, so that the lower CCD detection mechanism can accurately detect the positions of a plurality of crystal grains, and meanwhile, the annular groove has a positioning effect on the blue film; the bearing ring has an upward bearing effect on the blue film, and the stability of the blue film and the plurality of crystal grains placed on the crystal grain bearing platform is improved.

Optionally, a plurality of clamping assemblies for clamping the blue film are arranged on the carrying platform.

By adopting the technical scheme, the clamping component has a fixing effect on the blue film, and the firmness of fixing the blue film on the crystal grain bearing platform is improved.

Optionally, the clamping assembly includes a fixing block and a screw rod, the fixing block is fixed on the crystal grain bearing platform, the screw rod penetrates through the fixing block, the screw rod is in threaded fit with the fixing block, and the bottom end of the screw rod abuts against the upper surface of the blue film.

Through adopting above-mentioned technical scheme, the staff is through rotatory screw rod, and the convenience of staff's installation and dismantlement blue membrane has been increased to the distance between the bottom of adjusting screw rod to blue membrane upper surface of being convenient for.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the laser displacement sensor is used for detecting the shape of the substrate, so that the tilting height of the substrate can be conveniently detected, and the upper CCD detection mechanism is used for detecting the position of the substrate, so that the initial position of the substrate can be conveniently identified; the lifting assembly drives the jacking force adjusting assembly to lift, so that a thimble connected to the jacking force adjusting assembly can be driven to lift, and the size of the jacking force of the thimble can be adjusted by the jacking force adjusting assembly according to the shape of the substrate measured by the laser displacement sensor, so that the descending height of the thimble can be conveniently adjusted when the thimble performs grain operation; the ejector pins can accurately eject the crystal grains on the blue film to the surface of the substrate in sequence, so that the conditions of overturning and top damage of the crystal grains during ejection operation can be avoided, and the quality of the crystal grains mounted on the substrate is improved;

2. the lifting driving piece drives the lifting piece to lift, the lifting piece drives the jacking force adjusting assembly to lift, and the jacking force adjusting assembly drives the ejector pin to lift, so that a plurality of crystal grains on the blue film are sequentially jacked to the surface of the substrate, and automation is further realized;

3. the guide rail has a guiding function on sliding, so that the lifting piece is guided, and the lifting stability of the lifting piece is improved.

Drawings

Fig. 1 is a schematic structural diagram of a spacing adjustment device in an embodiment of the present application.

Fig. 2 is a schematic structural diagram of another view angle of the spacing adjustment device in the embodiment of the present application.

Fig. 3 is a partially enlarged view of a portion a in fig. 2.

Fig. 4 is a partially enlarged view of a portion B in fig. 2.

Fig. 5 is a partially enlarged view of a portion C in fig. 1.

Fig. 6 is a partially enlarged view of a portion D in fig. 1.

Description of reference numerals:

1. a frame; 2. a substrate transfer mechanism; 21. a substrate carrying platform; 22. a first glide; 23. a second glide; 24. a first guide rail; 25. a first slider; 26. a second guide rail; 27. a second slider; 3. a laser displacement sensor; 4. an upper CCD detection mechanism; 5. a die transfer mechanism; 51. a die-bearing platform; 511. positioning a groove; 512. a load ring; 52. a third glide; 53. a fourth glide; 54. a third guide rail; 55. a third slider; 56. a fourth guide rail; 57. a fourth slider; 6. a lower CCD detection mechanism; 7. an ejection mechanism; 71. a thimble; 72. a jacking force adjusting assembly; 721. a voice coil motor; 722. an air bearing; 73. a lifting assembly; 731. a lifting drive member; 732. a lifting member; 74. a guide assembly; 741. a vertical guide rail; 742. a lifting slide block; 8. a clamping mechanism; 81. a fixed block; 82. a screw.

Detailed Description

The present application is described in further detail below with reference to figures 1-6.

For convenience of understanding, in the three-dimensional coordinate system in the present embodiment, the pitch adjustment device will be described based on the fact that the longitudinal direction of the X axis is defined as a first direction, the longitudinal direction of the Y axis is defined as a second direction, and the longitudinal direction of the Z axis is defined as a third direction.

The embodiment of the application discloses a distance adjusting device. Referring to fig. 1, the interval adjusting apparatus includes a frame 1, and a substrate conveying mechanism 2, a laser displacement sensor 3, an upper CCD detecting mechanism 4, a die conveying mechanism 5, a lower CCD detecting mechanism 6, and an ejection mechanism 7, which are disposed on the frame 1. The substrate conveying mechanism 2 is used for carrying the substrate and driving the substrate to move along the horizontal direction. The laser displacement sensor 3 is located above the substrate transfer mechanism 2, and the laser displacement sensor 3 is used to detect the shape of the substrate. The upper CCD detection mechanism 4 is located above the substrate, and the upper CCD detection mechanism 4 is used for detecting the position of the substrate. The die transfer mechanism 5 is located above the substrate transfer mechanism 2, and the die transfer mechanism 5 is used for carrying a plurality of dies and driving the dies to move along a horizontal direction. The lower CCD detection mechanism 6 is positioned below the crystal grain conveying mechanism 5, and the lower CCD detection mechanism 6 is used for detecting the positions of a plurality of crystal grains. The ejection mechanism 7 is located above the die conveying mechanism 5, and the ejection mechanism 7 sequentially ejects the dies onto the surface of the substrate.

Referring to fig. 2 and 3, the substrate transfer mechanism 2 includes a substrate supporting platform 21, a first slide 22, a first horizontal driving member, a second slide 23, and a second horizontal driving member. The first sliding member 22 is slidably disposed on the frame 1, the first horizontal driving member is disposed on the frame 1, and the first horizontal driving member is used for driving the first sliding member 22 to slide along a first direction. The second sliding member 23 is slidably disposed on the first sliding member 22, the second horizontal driving member is used for driving the second sliding member 23 to slide along the second direction, the substrate bearing platform 21 is fixed on the upper surface of the second sliding member 23, and the substrate bearing platform 21 is used for bearing a substrate. The first horizontal driving member drives the first sliding member 22 to slide along the first direction, so as to drive the substrate to move along the first direction. Meanwhile, the second horizontal driving member drives the second sliding member 23 to slide along the second direction, so as to drive the substrate to move along the second direction.

Referring to fig. 3, in particular, the first sliding member 22 and the second sliding member 23 may be sliding blocks or sliding tables. First horizontal driving piece and second horizontal driving piece can be linear electric motor, and linear electric motor has simple structure, positioning accuracy height, reaction rate fast, advantages such as safe and reliable and practical long service life. Of course, the first horizontal driving piece and the second horizontal driving piece can be replaced by an air cylinder or a screw rod stepping motor, the air cylinder has the advantages of simple structure, large output force, strong waterproof capability and the like, and the screw rod stepping motor has the advantages of simple structure, long service life and the like.

With continued reference to fig. 3, two first guide rails 24 are fixedly disposed on the upper surface of the frame 1, and each of the two first guide rails 24 extends along a first direction. Two first sliding blocks 25 are fixedly arranged on the lower surface of the first sliding member 22. The two first guide rails 24 are respectively arranged on the two first sliding blocks 25 in a penetrating manner, and the two first sliding blocks 25 are respectively matched with the two first guide rails 24 in a sliding manner. The two first guide rails 24 guide the first sliding member 22, and increase the stability of the sliding of the first sliding member 22 in the first direction.

With continued reference to fig. 3, two second rails 26 are fixedly disposed on the upper surface of first glide 22, and both second rails 26 extend in the second direction. The lower surface of the second sliding member 23 is fixedly provided with two second sliding blocks 27, the two second guide rails 26 are respectively arranged through the two second sliding blocks 27, and the two second sliding blocks 27 are respectively matched with the two second guide rails 26 in a sliding manner. The two second guide rails 26 guide the second sliding member 23, and increase the stability of the sliding of the second sliding member 23 in the second direction.

Referring to fig. 2 and 4, the die transfer mechanism 5 includes a die supporting platform 51, a third sliding member 52, a third horizontal driving member, a fourth sliding member 53, and a fourth horizontal driving member. The third sliding member 52 is slidably disposed on the rack 1, and the third horizontal driving member is disposed on the rack 1 and is used for driving the third sliding member 52 to slide along the second direction. The fourth sliding member 53 is slidably disposed on the third sliding member 52, the fourth horizontal driving member is configured to drive the fourth sliding member 53 to slide along the first direction, the crystal grain bearing platform 51 is configured to bear a blue film, and the blue film is configured to bear a plurality of crystal grains. The third horizontal driving member drives the third sliding member 52 to slide along the second direction, so as to drive the plurality of crystal grains to move along the first direction at the same time. Meanwhile, the fourth horizontal driving member drives the fourth sliding member 53 to slide along the first direction, so as to drive the plurality of crystal grains to move along the first direction simultaneously. Similarly, the third sliding member 52 and the fourth sliding member 53 may be sliding blocks or sliding tables, and the third horizontal driving member and the fourth horizontal driving member may also be linear motors or cylinders or motor screw rod structures.

Referring to fig. 4, two third guide rails 54 are fixedly disposed on the frame 1, the two third guide rails 54 both extend along the second direction, two third sliders 55 are fixedly disposed on the upper surface of the third sliding member 52, the two third guide rails 54 respectively penetrate through the two third sliders 55, and the two third sliders 55 respectively slidably cooperate with the two third guide rails 54. The two third guide rails 54 respectively guide the two third sliders 55, thereby increasing the stability of the third slider 52 sliding in the second direction.

With continued reference to fig. 4, a lower surface of third glide member 52 is fixedly provided with two fourth rails 56, both fourth rails 56 extending in the first direction. Two fourth sliding blocks 57 are fixedly arranged on the upper surface of the fourth sliding member 53, the two fourth guide rails 56 respectively penetrate through the two fourth sliding blocks 57, and the two fourth sliding blocks 57 are respectively matched with the two fourth guide rails 56 in a sliding manner. The two fourth guide rails 56 respectively guide the two fourth sliders 57, thereby increasing the stability of the fourth slider 53 sliding in the first direction.

Referring to fig. 1 and 4, the upper surface of the die platform 51 is provided with a through positioning slot 511, and a carrying ring 512 is fixedly disposed on the inner side wall of the positioning slot 511. The positioning groove 511 has a positioning function on the blue film, and the bearing ring 512 has an upward bearing function on the blue film, so that the stability of placing the blue film and a plurality of crystal grains on the crystal grain bearing platform 51 is improved.

Referring to fig. 4, a plurality of clamping mechanisms 8 for clamping the blue film are disposed on the die supporting platform 51, in this embodiment, the number of the clamping mechanisms 8 is four, and the four clamping mechanisms 8 are uniformly distributed along the circumferential direction. Specifically, each clamping mechanism 8 includes a fixing block 81 and a screw 82, the fixing block 81 is fixed on the upper surface of the crystal grain bearing platform 51 through a bolt, the screw 82 penetrates through the fixing block 81, the screw 82 is in threaded fit with the fixing block 81, and the bottom end of the screw 82 abuts against the upper surface of the blue film. The staff is through rotatory screw rod 82, is convenient for adjust the bottom of screw rod 82 to blue distance between the membrane upper surface, has increased the convenience that the staff installed and dismantled blue membrane.

Referring to fig. 1 and 6, the ejection mechanism 7 includes an ejector pin 71, an ejection force adjusting assembly 72, and a lifting assembly 73. Specifically, the lifting assembly 73 includes a lifting driving member 731 and a lifting member 732, and the lifting driving member 731 is used for driving the lifting member 732 to lift. Specifically, the lifting driving part 731 can be a linear motor, an air cylinder or a motor screw structure, and the lifting part 732 can be a lifting block, a lifting plate or a lifting table. The lifting member 732 is slidably disposed on the frame 1, the jacking force adjusting assembly 72 is disposed on the lifting member 732, a bottom end of the jacking force adjusting assembly 72 is fixedly connected to the ejector pin 71, the jacking force adjusting assembly 72 is used for adjusting a jacking force of the ejector pin 71, and the ejector pin 71 is used for jacking the die to a surface of the substrate. Because the jacking force adjusting component 72 can adjust the jacking force of the thimble 71, the situation that crystal grains are turned over and damaged during the ejection operation can be avoided when the thimble 71 performs the crystal ejection operation, and the efficiency of welding the crystal grains on the substrate is improved.

Referring to fig. 6, in particular, the jacking force adjusting assembly 72 includes a voice coil motor 721 and an air bearing 722, the voice coil motor 721 is fixed on the lifting member 732, the voice coil motor 721 is used for driving the air bearing 722 to lift, and the bottom end of the air bearing 722 is fixedly connected to the thimble 71. Specifically, the ventilation pressure of the air bearing 722 is 0.005-0.1Mpa, so that the jacking force of the thimble 71 is 0.02-1N. The magnitude of the pushing force of the thimble 71 is adjusted by adjusting the ventilation air pressure of the air bearing 722. Of course, the jacking force adjusting assembly 72 in the present application can also be replaced by a gas spring, which is an industrial accessory capable of supporting, buffering, braking, height adjusting, angle adjusting and other functions, and compared with a common spring, the gas spring has the obvious advantages of relatively slow speed, small dynamic force change, easy control and the like, thereby protecting the crystal grains during the crystal jacking operation.

With continued reference to fig. 6, the thimble 71 further includes two guide assemblies 74, each guide assembly 74 includes a vertical guide 741 and a lifting slider 742, the vertical guide 741 is fixed to the frame 1, and the vertical guide 741 extends in the third direction. The lifting slider 742 is fixed on the lifting member 732, the vertical guide rail 741 passes through the lifting slider 742, and the lifting slider 742 is slidably engaged with the vertical guide rail 741. The vertical guide rail 741 guides the lifting slider 742, thereby guiding the lifting member 732 and increasing the stability of the lifting member 732.

The implementation principle of the above embodiment is as follows: the laser displacement sensor 3 is used for detecting the shape of the substrate so as to detect the tilting height of the substrate conveniently, and the upper CCD detection mechanism 4 is used for detecting the position of the substrate so as to identify the initial position of the substrate conveniently; the lifting component 73 drives the jacking force adjusting component 72 to lift, so that the jacking pin 71 connected to the jacking force adjusting component 72 can be driven to lift, and according to the shape of the substrate measured by the laser displacement sensor 3, the jacking force of the jacking pin 71 can be adjusted by the jacking force adjusting component 72, so that when the jacking pin 71 performs the grain operation, the height of the descending of the jacking pin 71 can be adjusted conveniently; the thimble 71 can accurately push the crystal grains on the blue film to the surface of the substrate in sequence, so that the conditions of overturning and top damage of the crystal grains during the push-out operation can be avoided, and the quality of the crystal grains installed on the substrate is improved.

The above are preferred embodiments of the present application, and the scope of protection of the present application is not limited thereto, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (8)

1. An interval adjusting device, its characterized in that: comprises a frame (1), and a substrate conveying mechanism (2), a laser displacement sensor (3), an upper CCD detection mechanism (4), a crystal grain conveying mechanism (5) and an ejection mechanism (7) which are arranged on the frame (1) in sequence; the laser displacement sensor (3) is used for detecting the shape of the substrate, and the upper CCD detection mechanism (4) is used for detecting the position of the substrate; the substrate conveying mechanism (2) is used for driving the substrate to move along the horizontal direction, and the crystal grain conveying mechanism (5) is used for driving a plurality of crystal grains to move along the horizontal direction;

the ejection mechanism (7) comprises an ejector pin (71), an ejection force adjusting assembly (72) and a lifting assembly (73), the lifting assembly (73) is arranged on the rack (1), and the lifting assembly (73) is used for driving the ejection force adjusting assembly (72) to lift; the bottom end of the jacking force adjusting assembly (72) is fixedly connected with the ejector pin (71), and the jacking force adjusting assembly (72) is used for adjusting the jacking force of the ejector pin (71); the ejector pins (71) are used for ejecting the crystal grains to the surface of the substrate.

2. A spacing adjustment device according to claim 1, wherein: the lifting assembly (73) comprises a lifting driving part (731) and a lifting part (732), the lifting part (732) is arranged on the rack (1) in a sliding mode, the lifting driving part (731) is used for driving the lifting part (732) to lift, and the jacking force adjusting assembly (72) is arranged on the lifting part (732).

3. A spacing adjustment device according to claim 2, wherein: the thimble (71) mechanism further comprises a guide assembly (74), the guide assembly (74) comprises a guide rail and a sliding block, the guide rail is fixed on the rack (1), and the sliding block is fixed on the lifting piece (732); the guide rail passes through the sliding block, and the sliding block is in sliding fit with the guide rail.

4. A spacing adjustment device according to claim 1, wherein: the substrate conveying mechanism (2) comprises a substrate bearing platform (21), a first sliding piece (22), a first horizontal driving piece, a second sliding piece (23) and a second horizontal driving piece; the first sliding piece (22) is arranged on the rack (1) in a sliding mode, and the first horizontal driving piece is used for driving the first sliding piece (22) to slide along a first direction; the second sliding piece (23) is arranged on the first sliding piece (22) in a sliding mode, the second horizontal driving piece is used for driving the second sliding piece (23) to slide along the second direction, the substrate bearing platform (21) is fixed on the second sliding piece (23), and the substrate bearing platform (21) is used for bearing a substrate.

5. A spacing adjustment device according to claim 1, wherein: the crystal grain conveying mechanism (5) comprises a crystal grain bearing platform (51), a third sliding piece (52), a third horizontal driving piece, a fourth sliding piece (53) and a fourth horizontal driving piece; the third sliding part (52) is arranged on the rack (1) in a sliding manner, and the third horizontal driving part is used for driving the third sliding part (52) to slide along a third direction; the fourth sliding member (53) is slidably disposed on the third sliding member (52), the fourth horizontal driving member is used for driving the fourth sliding member (53) to slide along a fourth direction, and the grain bearing platform (51) is used for bearing a blue film.

6. A spacing adjustment device according to claim 5, wherein: the upper surface of the crystal grain bearing platform (51) is provided with a through annular groove, and a bearing ring (512) is fixedly arranged in the annular groove.

7. A spacing adjustment device according to claim 6, wherein: and the bearing platform is provided with a plurality of clamping components for clamping the blue film.

8. A spacing adjustment device according to claim 7, wherein: the clamping assembly comprises a fixed block (81) and a screw (82), the fixed block (81) is fixed on the crystal grain bearing platform (51), the screw (82) penetrates through the fixed block (81), the screw (82) is in threaded fit with the fixed block (81), and the bottom end of the screw (82) is abutted to the upper surface of the blue film.

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