CN217822701U

CN217822701U - Conveyor belt for conveying carrier plate and carrier plate conveying device

Info

Publication number: CN217822701U
Application number: CN202221474901.0U
Authority: CN
Inventors: 刘彦斌; 孙晓晟
Original assignee: Shanghai Lixiang Wanlihui Film Equipment Co ltd
Current assignee: Ideal Wanlihui Semiconductor Equipment Shanghai Co ltd
Priority date: 2022-06-13
Filing date: 2022-06-13
Publication date: 2022-11-15
Anticipated expiration: 2032-06-13

Abstract

The utility model provides a conveyer belt and support plate conveyer for conveying the support plate. The conveyer belt includes the body and sets up a plurality of conveying teeth of contact with the transfer gear in the body inboard, the conveyer belt is still including setting up the body outside, being used for bearing a plurality of cushions of support plate, a plurality of conveying teeth are including the metal tooth and a plurality of non-metal tooth that repeated interval was arranged, a plurality of cushion detachably fix in the metal tooth. The utility model discloses can avoid support plate and conveyer belt direct contact, reduce the conveyer belt and remain the trace at the support plate back to reduce the adverse effect of high temperature to the conveyer belt and to the harmful effects that the technology caused.

Description

Conveyor belt for conveying carrier plate and carrier plate conveying device

Technical Field

The utility model relates to a solar cell makes the field, in particular to conveyer belt and support plate conveyer for conveying the support plate.

Background

The thin film/crystalline silicon heterojunction solar cell (hereinafter referred to as heterojunction solar cell, also called HIT or SHJ solar cell) belongs to the third-generation high-efficiency solar cell technology, combines the advantages of the first-generation crystalline silicon and the second-generation silicon thin film, has the characteristics of high conversion efficiency, low temperature coefficient and the like, particularly has the conversion efficiency of the double-sided heterojunction solar cell reaching more than 26 percent, and has wide market prospect.

In the manufacturing process of the heterojunction solar cell, a vacuum coating device such as a Plasma Enhanced Chemical Vapor Deposition (PECVD) device, a Physical Vapor Deposition (PVD) device, etc. is used to form the amorphous silicon/microcrystalline silicon layer and the transparent conductive layer TCO, respectively. After the film coating is finished in the vacuum film coating equipment, the carrier plate (or tray) bearing the silicon wafer is conveyed from the corresponding process chamber to the wafer discharging chamber in a vacuum state.

The tray used circularly is transmitted by the synchronous belt, and the transmission mode is high-speed, stable and simple in structure. However, the material of the synchronous belt is generally not high temperature resistant, and even if the high temperature resistant layer is arranged, the imprinting of the material of the synchronous belt is remained on the surface contacted with the tray after long-term use and is brought into the reaction cavity, so that the process efficiency is influenced.

Therefore, how to provide a conveyor belt for conveying a carrier plate and a carrier plate conveying device, so as to avoid direct contact between the carrier plate and the conveyor belt, and reduce the imprint of the carrier belt remaining on the back surface of the carrier plate, thereby reducing the negative influence of high temperature on the conveyor belt and the negative influence on the process, has become a technical problem to be solved urgently in the industry.

SUMMERY OF THE UTILITY MODEL

To the above problem of prior art, the utility model provides a conveyer belt for conveying support plate, it includes the body and sets up a plurality of conveying teeth in the inboard and transfer gear contact of body, the conveyer belt is still including setting up the body outside, be used for bearing a plurality of cushions of support plate, a plurality of conveying teeth include the metal tooth and a plurality of non-metal tooth that repeated interval was arranged, a plurality of cushion detachably fix in the metal tooth.

In one embodiment, the body is a polyurethane body or a high-temperature-resistant rubber body, the non-metal teeth are polyurethane teeth, and the metal teeth are stainless steel teeth.

In one embodiment, the cushion blocks are uniformly distributed on the conveyor belt, and the distance between every two adjacent cushion blocks is set to enable the adjacent cushion blocks to jointly support the carrier plate.

In one embodiment, the cushion block is a ceramic cushion block, an aluminum alloy cushion block or a PEEK cushion block.

In an embodiment, the metal teeth comprise a tooth part and a bolt part which are fixedly connected, a first threaded hole is formed in the bolt part, a first through hole for the bolt part to pass through is formed in the body, the bolt part passes through the first through hole and is arranged at the top of the body, and the tooth part abuts against the bottom of the body and is arranged between the two non-metal teeth.

In an embodiment, the cushion block is provided with a second through hole matched with the bolt part, the bolt part extends into the second through hole from the bottom of the cushion block, and a screw or a bolt extends into the second through hole from the top of the cushion block and is in threaded connection with the first threaded hole of the bolt part so as to fix the cushion block on the body.

In one embodiment, the edges of the two sides of the cushion block respectively account for 20-30% of the total width of the cushion block, and the chamfer angle of the edges is 30-45 degrees.

In one embodiment, the plurality of transmission teeth includes 1 metal tooth and 9 non-metal teeth arranged at repeated intervals.

The utility model also provides a support plate conveyer, be in including two at least transfer pulleys and tensioning conveyer belt on the transfer pulley, the conveyer belt is as above arbitrary any the conveyer belt, the support plate conveys on a plurality of adjacent cushions.

In one embodiment, the carrier plate transfer device comprises six transfer wheels and three conveyor belts each tensioned over two transfer wheels, each carrier plate being transferred by 30 to 40 pads on the three conveyor belts.

Carry the conveyer belt trace into the reaction chamber with conveyer belt direct contact easily among the prior art with the carrier plate to influence process efficiency and compare, the utility model discloses a conveyer belt for conveying the carrier plate includes the body and sets up a plurality of conveying teeth in the inboard and transfer gear contact of body, the conveyer belt is still including setting up the body outside, be used for bearing a plurality of cushions of carrier plate, a plurality of conveying teeth include the metal tooth and a plurality of non-metal tooth that repeated interval arranged, a plurality of cushion detachably fix in the metal tooth. The utility model discloses can avoid support plate and conveyer belt direct contact, reduce the conveyer belt and remain the trace at the support plate back to reduce the adverse effect of high temperature to the conveyer belt and to the harmful effects that the technology caused.

Drawings

The above features and advantages of the present invention will be better understood after reading the detailed description of embodiments of the present disclosure in conjunction with the following drawings. In the drawings, components are not necessarily drawn to scale, and components having similar associated characteristics or features may have the same or similar reference numerals.

Fig. 1 is a schematic view of a composition structure of a carrier plate conveying device of the present invention;

fig. 2 is a schematic structural diagram of a conveyor belt for conveying a carrier plate according to the present invention;

FIG. 3 is a schematic view of the structure of the metal teeth of FIG. 1; and

fig. 4 is a schematic structural diagram of a part of the conveyor belt for conveying the carrier plate according to the present invention.

Detailed description of the preferred embodiments

The present invention will be described in detail below with reference to the attached drawings and specific embodiments so that the objects, features and advantages of the invention can be more clearly understood. It should be understood that the aspects described below in connection with the figures and the specific embodiments are only exemplary and should not be interpreted as imposing any limitation on the scope of the present invention. The singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise. As used in this specification and the appended claims, the terms "first," "second," and the like do not denote any order, quantity, or importance, but rather are used to distinguish one element from another.

Referring to fig. 1, it is a schematic diagram of a composition structure of the carrier plate conveying device of the present invention. As shown in fig. 1, the carrier plate conveyor 1 comprises a conveyor belt 2 and at least two conveyor wheels 3, of which only one conveyor wheel 3 is shown in fig. 1, typically two conveyor wheels 3 being used. The conveyor belt 2 is tensioned against said conveyor wheel 3. The specific structure of the conveyor belt 2 is as follows.

Referring to fig. 2 to 4, fig. 2 is a schematic structural diagram of a conveyor belt for conveying carrier plates according to the present invention; FIG. 3 is a schematic view of the structure of the metal teeth of FIG. 1; fig. 4 is a schematic structural diagram of a part of the conveyor belt for conveying the carrier plate according to the present invention. As shown in fig. 1, 2 and 4, the conveyor belt 2 for conveying carrier plates of the present invention includes a body 20 and a plurality of spacers 24.

The inner side of the body 20 is provided with a plurality of transmission teeth 22 contacting with the transmission wheel 3, and the plurality of transmission teeth 22 comprise a plurality of non-metal teeth 220 and metal teeth 222 which are repeatedly arranged at intervals. In the present embodiment, the plurality of transmission teeth 22 includes 9

non-metal teeth

220 and 1 metal tooth 222 arranged at repeated intervals.

The plurality of pads 24 are disposed outside the body 20 for carrying the carrier plate (not shown), and the plurality of pads 24 are detachably fixed in the metal teeth 222.

The body 20 is a polyurethane body or a high temperature resistant rubber body, the high temperature resistant rubber body can reduce adverse effects of heat radiation of the high temperature carrier plate on the conveyor belt 2, and the high temperature resistant rubber can be butyl rubber, halogenated butyl rubber, chlorohydrin rubber, acrylate or other high temperature resistant rubbers commonly used in the industry. The non-metal teeth 220 are polyurethane teeth, and the metal teeth 222 are stainless steel teeth. When the body 20 is a polyurethane body, the body 20 and the non-metallic teeth 220 can be integrally formed

The cushion blocks 24 are uniformly distributed on the conveyor belt 2, and the distance between adjacent cushion blocks 24 is set so that the adjacent cushion blocks 24 can support the carrier plate together. The carrier plates (not shown) are transported over adjacent pads 24.

The cushion block 22 is a ceramic cushion block, an aluminum alloy cushion block or a PEEK cushion block. The edges of the two sides of the cushion block 22 respectively account for 20-30% of the total width of the cushion block, and the chamfer angle of the edges is 30-45 degrees.

The carrier plate conveying device 1 may include three conveyor belts 2 and six conveyor wheels 3, the three conveyor belts 2 are arranged in parallel and are respectively tensioned on the two conveyor wheels 3, and each carrier plate is conveyed by 30 to 39 cushion blocks 24 on the three conveyor belts 2 together. Each carrier plate is carried and transported by 10 to 13 pads 24 adjacent to each other on each conveyor belt 2. The distance between the three conveyor belts 2 can be 650mm, a cushion block 24 can be arranged on each synchronous belt 2 at an interval of 100mm, and each carrier plate with area of 1420mm × 1420mm is supported and conveyed by the 39 cushion blocks 24 on the three conveyor belts 2.

As shown in fig. 3, the metal teeth 222 include a tooth portion 222A and a bolt portion 222B that are fixedly connected, a first threaded hole 222C is formed in the bolt portion 222B, a first through hole 200 (see fig. 1) for the bolt portion 222B to pass through is formed in the body 20, the bolt portion 222B passes through the first through hole 200 and is disposed at the top of the body 20, and the tooth portion 222A abuts against the bottom of the body and is disposed between two non-metal teeth 220.

The cushion block 24 is provided with a second through hole 240 matched with the bolt portion 222B, the bolt portion 222B extends into the second through hole 240 from the bottom of the cushion block, and a screw or bolt 26 extends into the second through hole 240 from the top of the cushion block and is screwed with the first threaded hole 222C of the bolt portion 222B so as to fix the cushion block 24 on the body 20. After all the pads 24 are fixed on the body 20, the transmission wheel 3 rotates to drive the transmission belt 2 to move along with the transmission belt, so as to drive the carrier plate placed on the transmission belt to move, and the carrier plate is prevented from directly contacting the transmission belt 2.

The utility model discloses a conveyer belt for conveying support plate includes the body and sets up a plurality of conveying teeth in the inboard and transfer gear contact of body, the conveyer belt is still including setting up the body outside, be used for bearing a plurality of cushions of support plate, a plurality of conveying teeth include the metal tooth and a plurality of non-metal tooth that repeated interval was arranged, a plurality of cushion detachably fix in the metal tooth. The utility model discloses can avoid support plate and conveyer belt direct contact, reduce the conveyer belt and remain the trace at the support plate back to reduce the adverse effect of high temperature to the conveyer belt and to the adverse effect that the technology caused.

The above-described embodiments are provided to enable persons skilled in the art to make or use the invention, and many modifications and variations can be made to the above-described embodiments by persons skilled in the art without departing from the inventive concept, so that the scope of the invention is not limited by the above-described embodiments, but should be accorded the widest scope consistent with the innovative features recited in the claims.

Claims

1. The utility model provides a conveyer belt for conveying support plate, its includes the body and sets up a plurality of conveying teeth that contact with the transfer gear in the body inboard, its characterized in that, the conveyer belt still including set up in the body outside, be used for bearing a plurality of cushion of support plate, a plurality of conveying teeth include the metal tooth and a plurality of non-metal tooth that repeated interval was arranged, a plurality of cushion detachably fix in the metal tooth.

2. A conveyor belt for conveying carrier plates as claimed in claim 1 wherein the body is a polyurethane body or a high temperature resistant rubber body, the non-metallic teeth are polyurethane teeth, and the metallic teeth are stainless steel teeth.

3. A conveyor belt for conveying carrier plates as claimed in claim 1 wherein the spacers are evenly spaced on the conveyor belt, and the spacing between adjacent spacers is such that adjacent spacers can jointly support the carrier plate.

4. A conveyor belt for conveying carrier plates as claimed in claim 1, wherein the spacers are ceramic spacers, aluminum alloy spacers or PEEK spacers.

5. A carrier belt for conveying carrier plates as claimed in claim 1, wherein the metal teeth include a tooth portion and a bolt portion, the bolt portion has a first threaded hole, the body has a first through hole for passing the bolt portion, the bolt portion is disposed on the top of the body through the first through hole, and the tooth portion abuts against the bottom of the body and is disposed between two non-metal teeth.

6. The carrier belt according to claim 5, wherein the spacer has a second through hole matching with the bolt portion, the bolt portion extends from the bottom of the spacer into the second through hole, and a screw or a bolt extends from the top of the spacer into the second through hole and is screwed with the first threaded hole of the bolt portion to fix the spacer to the body.

7. A conveyor belt for conveying carrier plates as claimed in claim 1 wherein the two side edges of the spacer each occupy 20-30% of the total width of the spacer, and the chamfer angle of the edge is 30-45 °.

8. A conveyor belt for conveying carrier plates as claimed in claim 1, wherein the plurality of conveying teeth includes 1 metal tooth and 9 non-metal teeth arranged at repeated intervals.

9. A carrier sheet conveyor comprising at least two conveyor wheels and a conveyor belt according to any one of claims 1 to 8 tensioned over said conveyor wheels, said carrier sheet being conveyed over a plurality of adjacent mat blocks.

10. A carrier sheet conveyor according to claim 9 comprising six conveyor wheels and three conveyor belts tensioned one over the other on two conveyor wheels, each carrier sheet being conveyed together by 30 to 39 pads on the three conveyor belts.