CN217822689U - Wafer boat box - Google Patents
Wafer boat box Download PDFInfo
- Publication number
- CN217822689U CN217822689U CN202221343285.5U CN202221343285U CN217822689U CN 217822689 U CN217822689 U CN 217822689U CN 202221343285 U CN202221343285 U CN 202221343285U CN 217822689 U CN217822689 U CN 217822689U
- Authority
- CN
- China
- Prior art keywords
- wafer
- wafer boat
- side plates
- boat box
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses a wafer boat box, which relates to the field of wafer loading boxes and comprises two side plates, wherein wafer clamping grooves are respectively arranged on the two side plates, the rear ends of the wafer clamping grooves are relatively bent to form necking, and ear plates are respectively arranged at the front ends of the two side plates; the two ends of the connecting plate are respectively connected with the tops of the two side plates; two ends of the positioning plate are respectively connected with the bottoms of the two side plates; the structure of the utility model can place the wafer carrier connecting plate for loading wafers downwards when scanning the wafers, the manipulator takes out the wafers from the front end of the wafer clamping groove for scanning, and the wafers are put back to the original position after scanning; then, when the wafer boat box is transferred and stored, the wafer boat box is firstly rotated backwards and horizontally placed by the manipulator, and then the lug plate is held to lift and transfer the wafer boat box to a storage point; the wafer boat box can be operated by matching with a manipulator in the whole process, so that the efficiency is high; the necking structure of the wafer boat box can hold the wafer without falling off, and the mechanical operation can reduce the shaking, so that the wafer is not easy to slide off.
Description
Technical Field
The utility model relates to a wafer loads the box field, concretely relates to wafer carrier.
Background
Wafer cassettes are mainly used for storing and transporting wafers in semiconductor manufacturing, and wafers are generally transported to various stations of a manufacturing line through the wafer cassette because the wafers are processed and processed in various different processes, and then stored in a warehouse after the wafers are processed.
A wafer boat box in the market at present comprises a box body, wherein grooves which are oppositely arranged are arranged on the box body, and wafers are placed in the grooves. When the data of the wafer needs to be scanned, the wafer is taken out from the wafer boat box manually, the code scanning identification is carried out on the wafer, and the wafer is put back to the wafer boat box after the operation is finished. Such an approach has a problem of low efficiency due to the time and effort consumed by manual operation.
The wafers after scanning need to be transported to a warehouse for storage, and the wafers are easy to slide because the wafers are difficult to shake during manual transportation of the wafer carrier box.
In view of the above, the present inventors have made extensive conception on the defects and inconveniences caused by the imperfect design of the wafer boat, and have actively studied, improved, and tried to develop and design the present invention.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a wafer boat box that is efficient, the difficult landing of wafer.
In order to achieve the above purpose, the utility model discloses a solution is:
a wafer boat box comprises two side plates, wherein wafer clamping grooves are respectively arranged on the two side plates, the rear ends of the wafer clamping grooves are oppositely bent to form necking, and ear plates are respectively arranged at the front ends of the two side plates;
the two ends of the connecting plate are respectively connected with the tops of the two side plates;
and two ends of the positioning plate are respectively connected with the bottoms of the two side plates.
Furthermore, the two ends of the positioning plate are respectively provided with a positioning block.
Furthermore, the rear ends of the two side plates are respectively provided with a long strip plate.
Furthermore, a reinforcing lath is arranged on the connecting plate.
Further, the wafer boat box is of an integrally formed structure.
After the scheme is adopted, the structure of the utility model can place the wafer carrier connecting plate for loading the wafer 5 downwards when the wafer is scanned, the wafer is taken out from the front end of the wafer clamping groove by the manipulator for scanning, and the wafer is put back to the original position after the scanning; then when the wafer boat box is transferred and stored, the wafer boat box is firstly rotated backwards and horizontally placed by the manipulator, and then the lug plate is held to lift and transfer the wafer boat box to a storage point. The wafer boat box can be operated by matching with a manipulator in the whole process, so that the efficiency is high; the necking structure of the wafer boat box can hold the wafer without falling off, and the mechanical operation can reduce the shaking, so that the wafer is not easy to slide off.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a first vertical perspective view of a preferred embodiment of the present invention in cooperation with a wafer;
FIG. 2 is a second vertical perspective view of the preferred embodiment of the present invention in cooperation with a wafer;
FIG. 3 is a perspective view of the preferred embodiment of the present invention in horizontal position with the wafer engaged;
fig. 4 is an exploded view of the preferred embodiment of the present invention in cooperation with a wafer and an auxiliary device.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be described in detail below.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
As shown in fig. 1, the wafer boat case of the present invention comprises two side plates 1, wherein the two side plates 1 are respectively provided with a wafer clamping groove 11, the rear end of the wafer clamping groove 11 is relatively bent to form a throat, and the front ends of the two side plates 1 are respectively provided with an ear plate 12; the two ends of the connecting plate 2 are respectively connected with the tops of the two side plates 1; the two ends of the positioning plate 3 are respectively connected with the bottoms of the two side plates 1.
As shown in fig. 2, the necking formed by the wafer clamping groove 11 of the wafer boat of the present invention can limit the wafer position.
When the wafer 4 is scanned, the wafer boat positioning plate 3 for loading the wafer 4 is downwards arranged on the conveyor belt, after the wafer boat reaches the corresponding position, the wafer 4 is clamped from the front end of the wafer clamping groove 11 by the manipulator, and then the manipulator moves to the scanning equipment and places the wafer 4 on the scanning platform; after the scanning, the robot takes back the wafer 4, moves to the wafer boat, puts the wafer 4 into the wafer boat from the front end of the wafer slot 11, and stops when the wafer 4 contacts the notch at the rear end of the wafer slot 11, thus the wafer 4 can be put back to the original position.
Meanwhile, as shown in fig. 3, the front ends of the two side plates 1 are respectively provided with the ear plates 12, when the wafer boat box is transported to a storage point after the wafer 4 is scanned, the two side plates 1 of the wafer boat box are clamped by a manipulator, the wafer boat box is rotated backwards, the rear ends of the two side plates 1 of the wafer boat box are downward, the ear plates 12 of the wafer boat box are upward, the manipulator is lifted up from the lower parts of the two ear plates 12, and the wafer boat box can be lifted up and transferred; the wafer 4 can be held at the necking position by the structure with wide upper part and narrow lower part in the transferring process.
The key point of this embodiment is that the structure of the present invention can place the wafer carrier positioning plate 3 for loading the wafer 4 downward when scanning the wafer 4, the manipulator takes out the wafer 4 from the front end of the wafer clamping groove 11 for scanning, and the wafer 4 is placed back to the original position after scanning; then, when the wafer boat box is transferred and stored, the wafer boat box is firstly rotated backwards and horizontally placed by a manipulator, and then the lug plate 12 is supported to lift and transfer the wafer boat box to a storage point; the wafer boat box can be operated by matching with a manipulator in the whole process, so that the efficiency is high; the necking structure of the wafer boat can hold the wafer 4 without falling off, and the mechanical operation can reduce the shaking, so that the wafer is not easy to slide off.
As shown in fig. 4, the positioning plates are provided with positioning blocks 31 at both ends thereof, respectively. When the wafer boat is placed on the conveyor belt to move, the wafer boat can be installed on the auxiliary device 5 through the positioning block 31 in a matched mode, so that the wafer boat can be reduced in shaking during conveying, and the stability of the wafer boat during moving on the conveyor belt is improved.
The rear ends of the two side plates 1 are respectively provided with a long strip plate 13. When the wafer boat box is transferred and stored, the long strip plates 13 arranged at the rear ends of the two side plates 1 face downwards, so that the two long strip plates 13 are used as bases, and the wafer boat box can be stably and horizontally placed on a plane and is not easy to skew.
The connecting plate 2 is provided with a reinforcing lath 21. The reinforcing lath 21 is arranged to increase the strength of the connecting plate 2 and improve the whole deformation resistance of the wafer boat box.
The wafer boat box is of an integrally formed structure, and the structure is more stable.
The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for the general technical personnel in the field, according to the idea of the present invention, there are changes in the concrete implementation and the application scope. In summary, the content of the present specification should not be construed as a limitation of the present invention.
Claims (5)
1. A wafer boat, comprising: comprises that
The wafer clamping grooves are respectively arranged on the two side plates, the rear ends of the wafer clamping grooves are oppositely bent to form necking, and the front ends of the two side plates are respectively provided with lug plates;
the two ends of the connecting plate are respectively connected with the tops of the two side plates;
and two ends of the positioning plate are respectively connected with the bottoms of the two side plates.
2. The wafer boat cassette of claim 1, wherein: and positioning blocks are respectively arranged at two ends of the positioning plate.
3. The wafer boat cassette of claim 1, wherein: the rear ends of the two side plates are also respectively provided with a long lath.
4. The wafer boat cassette of claim 1, wherein: and a reinforcing lath is arranged on the connecting plate.
5. The wafer boat cassette of claim 1, wherein: the wafer boat box is of an integrated structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221343285.5U CN217822689U (en) | 2022-05-31 | 2022-05-31 | Wafer boat box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221343285.5U CN217822689U (en) | 2022-05-31 | 2022-05-31 | Wafer boat box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217822689U true CN217822689U (en) | 2022-11-15 |
Family
ID=83988797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221343285.5U Active CN217822689U (en) | 2022-05-31 | 2022-05-31 | Wafer boat box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217822689U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117174631A (en) * | 2023-11-03 | 2023-12-05 | 南通玖方新材料股份有限公司 | Silicon chip clamping device |
-
2022
- 2022-05-31 CN CN202221343285.5U patent/CN217822689U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117174631A (en) * | 2023-11-03 | 2023-12-05 | 南通玖方新材料股份有限公司 | Silicon chip clamping device |
| CN117174631B (en) * | 2023-11-03 | 2024-02-27 | 南通玖方新材料股份有限公司 | Silicon chip clamping device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5088468B2 (en) | Conveying system using a suspended conveying cart | |
| CN217822689U (en) | Wafer boat box | |
| KR102450289B1 (en) | Container transport device and container transport facility | |
| US6874638B2 (en) | Wafer cassette | |
| US20080240892A1 (en) | Storage buffer device for automated material handling systems | |
| JP3971601B2 (en) | Substrate delivery apparatus and substrate processing apparatus | |
| US20220319890A1 (en) | Apparatus and methods for handling die carriers | |
| US9768046B2 (en) | Wafer storage container | |
| JP2006347752A (en) | Conveyance system | |
| CN213438984U (en) | Apparatus for polishing semiconductor wafers | |
| US20060249965A1 (en) | Gripper and method for operating the same | |
| CN102683251A (en) | Substrate treating apparatus | |
| KR102162937B1 (en) | Cylindrical secondary battery handler | |
| JP5402156B2 (en) | Traveling vehicle system | |
| US20090142170A1 (en) | Loadport | |
| US20180290841A1 (en) | System for transferring components of different designs | |
| CN114772235A (en) | Material conveying device and battery cell loading and unloading method | |
| CN208938949U (en) | A kind of wafer has enough to meet the need loading and unloading equipment automatically | |
| KR102162936B1 (en) | Cylindrical secondary battery handler | |
| TWI332476B (en) | Transporting device | |
| US11804394B2 (en) | Methods and systems for improving transfer efficiency of an automated material handling system | |
| CN219044624U (en) | Disc disassembling and distributing mechanism for transfer disc | |
| US11833633B2 (en) | Tray and magazine for handling profiles | |
| CN216763382U (en) | Feeding machine | |
| CN109230125B (en) | Goods sending method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |