CN217797588U

CN217797588U - Full-automatic piece equipment of wiping of gum

Info

Publication number: CN217797588U
Application number: CN202222197408.5U
Authority: CN
Inventors: 陈小响; 杜阳
Original assignee: Jiangsu Silicon Integrity Semiconductor Technology Co Ltd
Current assignee: Jiangsu Silicon Integrity Semiconductor Technology Co Ltd
Priority date: 2022-08-19
Filing date: 2022-08-19
Publication date: 2022-11-15
Anticipated expiration: 2032-08-19

Abstract

The utility model belongs to the technical field of the semiconductor package, concretely relates to piece equipment is wiped in full-automatic of gum, include loading attachment, cleaning device and the unloader that from left to right sets gradually, cleaning device includes the fixed station, the fixed station center is fixed with through the rotation axis and wipes the piece chassis, the periphery of wiping the piece chassis is fixed with spray set, cleaning device and gas blowing device, spray set, cleaning device and gas blowing device all do the rotation around the stiff end, and whole process realizes full self-cleaning operation, has improved cleaning efficiency greatly.

Description

Full-automatic piece equipment of wiping of gum

Technical Field

The invention belongs to the technical field of semiconductor packaging, and particularly relates to a full-automatic back adhesive sheet wiping device.

Background

Wafer gum is that a glue film made of photosensitive material is attached to the back side surface of the wafer, the glue film is exposed along the outer edge of the wafer, the exposed glue film is cleaned by using a developing solution to remove the glue film on the periphery of the outer edge of the wafer, and the whole gum-applying process is completed through a series of operations.

Need carry out the back to the supplied materials wafer and wipe the piece before carrying out the gum, all be artifical manual piece of wiping at this in-process, the operator with the wafer manual place wipe the piece platform on, use alcohol and dustless cloth to wipe the piece cleanness to the wafer back, probably because manual operation is improper at clean in-process, produce certain damage to the wafer, waste time and energy moreover, clean speed is slow, greatly reduced cleaning efficiency.

Disclosure of Invention

An object of the utility model is to provide a piece equipment is wiped to gum full-automatic to solve artifical manual piece of wiping and lead to clean inconvenient and the technical problem of inefficiency.

In order to solve the technical problem, the utility model discloses a full-automatic piece equipment of wiping of gum concrete technical scheme as follows:

a full-automatic back adhesive sheet wiping device comprises a feeding device, a cleaning device and a discharging device which are sequentially arranged from left to right; cleaning device includes the fixed station, the fixed station center is fixed with through the rotation axis and wipes the piece chassis, the periphery on wiping the piece chassis is fixed with spray set, cleaning device and gas blowing device, spray set, cleaning device and gas blowing device all do the rotation around the stiff end, and full self-cleaning operation is realized to whole process, has improved cleaning efficiency greatly.

Further, the wiping piece chassis comprises an 8-inch placing table and a 12-inch placing table which are coaxially arranged, and the wiping piece chassis is located on the same plane, so that wafers of different sizes can be cleaned, and the utilization rate of the equipment is greatly improved.

Furthermore, the peripheries of the 8-inch placing table (12) and the 12-inch placing table (13) are provided with supporting columns (15) for positioning and placing the wafer.

Further, the number of the support columns (15) is at least three, so that the wafer can be stably maintained.

Furthermore, the spraying device, the cleaning device and the blowing device all comprise a rotating shaft and a rotating motor for driving the rotating shaft to rotate, the rotating motor is arranged on the fixed table, and the rotating shaft is sleeved with a fixed rod; the alcohol spraying device is characterized in that an alcohol spray head is arranged at the suspended end of the fixing rod of the spraying device, an air blowing spray head is arranged at the suspended end of the fixing rod of the air blowing device, and a cleaning head is arranged at the suspended end of the fixing rod of the cleaning device.

Furthermore, the cleaning head, the blowing nozzle and the alcohol nozzle are provided with inductors.

Further comprises a loading rack and a loading arm moving between the loading rack and the wiping chassis.

Furthermore, the blanking device comprises a blanking rack and a blanking arm which moves between the blanking rack and the wiping chassis, so that the automatic wafer grabbing function is realized.

Furthermore, the outside of fixed station is provided with the washing protection casing, avoids splashing outside at clear in-process spot, causes the pollution to the surrounding environment.

The utility model discloses a piece equipment is wiped to full-automatic back glue grabs the wafer through loading attachment and cleans on getting clean chassis, is provided with cleaning device, spray set and gas blowing device on the clean chassis and can carries out full self-cleaning operation, and the cleanness finishes to remove the wafer down through unloader, and whole process need not manual operation, has also practiced thrift the human cost when having improved clean efficiency greatly.

Drawings

FIG. 1 is a top view of the full-automatic back adhesive sheet wiping device of the present invention;

the notation in the figure is: 1. a feeding sheet rack; 2. a wafer; 3. a feeding arm; 4. cleaning the protective cover; 5. a wiping chassis; 6. a cleaning head; 7. a rotary motor; 8. a blowing nozzle; 9. an alcohol spray head; 10. a blanking arm; 11. blanking a sheet frame; 12. 8 cun placing table; 13. 12 cun placing table; 14. a fixed table; 15. and (7) supporting the column.

Detailed Description

In order to better understand the purpose, structure and function of the present invention, the following describes the elevator attaching frame assembly fixture in further detail with reference to the attached drawings.

As shown in fig. 1, a full-automatic piece equipment of wiping of gum contains the cleaning device who fixes on the platform, cleaning device contains fixed station 14, fixed station 14 center is fixed with wiping piece chassis 5 through the rotation axis, wiping piece chassis 5 contains 8 cun of coaxial setting and

places platform

12 and 12 cun and place platform 13, and is in the coplanar, 8 cun place platform 12 with the periphery of 12 cun place platform 13 all is provided with three support column 15, support column 15 sets up to the telescopic, is used for the location to place 8 cun wafers and 12 cun wafers, 8 cun place platform 12 with 12 cun place and all be provided with the vacuum hole on the platform 13 for adsorb the wafer, with the wafer laminating on placing the platform, the outside of fixed station 14 is provided with washing protection casing 4, avoids splashing outside clean in-process spot, causes the pollution to the surrounding environment.

The spraying device, the cleaning device and the air blowing device are sequentially connected with the connecting part of the fixed table 14 in a clockwise direction to form an equilateral triangle.

The driving device comprises a shaft lever and a rotary motor 7 for driving the shaft lever to rotate, and a fixed rod is fixedly sleeved on the shaft lever.

Spray set still contains alcohol shower nozzle 9, 9 fixed connection of alcohol shower nozzle are in the free end of dead lever, 9 departments of alcohol shower nozzle are provided with induction system, under the effect of rotary motor 7, drive 9 horizontal rotations of alcohol shower nozzle, through induction system, when getting into 5 within ranges of clean chassis, and the anticlockwise swing of left side is turned to the right side to alcohol shower nozzle 9 begins, sprays out alcohol to the back of wafer 2, and after the clean back that finishes of swing round, alcohol shower nozzle 9 regresses the home position.

The cleaning device further comprises a cleaning head 6, the cleaning head 6 is fixedly connected to the free end of the fixing rod, an induction device is arranged at the position of the cleaning head 6, the cleaning head 6 is driven to rotate horizontally under the action of a rotating motor 7, the cleaning head 6 starts to descend through the induction device when entering the range of the cleaning piece chassis 5, the cleaning head 6 starts to descend, the cleaning head 6 starts to clean the back of the wafer 2 when contacting the back of the wafer from left to right, the cleaning piece chassis 5 starts to rotate clockwise, the cleaning head 6 returns to the original position after three circles of swinging cleaning are finished, and the cleaning piece chassis 5 stops rotating. In this embodiment, the material of the cleaning head 6 may be a dust-free cloth.

The blowing device further comprises a blowing nozzle 8, the blowing nozzle 8 is fixedly connected to the hanging end of the fixing rod, a sensing device is arranged at the blowing nozzle 8, the blowing nozzle 8 is driven to rotate horizontally under the action of the rotating motor 7, the blowing nozzle 8 starts to move from the left end to the right end to blow and clean the wafer when the wafer enters the range of the cleaning chassis 5 through the sensing device, and the blowing nozzle 8 returns to the original position after three circles of swinging and cleaning are finished. In this embodiment, to prevent the gas from affecting the equipment, an inert gas is used as the source of the purging gas, such as N ₂ 。

The wafer cleaning device comprises a platform, a feeding sheet frame 1 and a feeding arm 3 are arranged at the left end of a wiping sheet chassis 5, a wafer 2 is placed on the feeding sheet frame 1, a supporting column 15 is lifted firstly during feeding, then the wafer 2 is grabbed onto the supporting column 15 of the wiping sheet chassis 5 through the feeding arm 3, the feeding arm 3 is withdrawn from a gap between the wafer and the wiping sheet chassis 5 and then the supporting column 15 is lowered, so that the wafer is attached to the surface of the wiping sheet chassis 5, a controller is introduced to receive information fed back by a sensing device during actual application, the controller controls a spraying device, a cleaning device and an air blowing device to work respectively, a discharging sheet frame 11 and a discharging arm 10 are arranged at the right end of the wiping sheet chassis 5 on the platform, after cleaning is finished, the supporting column 15 is lifted again, the cleaned wafer 2 is placed on the discharging sheet frame 11 through the discharging arm 10, full-automatic operation is achieved in the whole process, and cleaning efficiency of wiping sheets is greatly improved.

It is to be understood that the present invention has been described with reference to certain embodiments, and that various changes in the features and embodiments, or equivalent substitutions may be made therein by those skilled in the art without departing from the spirit and scope of the invention. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof. Therefore, it is intended that the invention not be limited to the particular embodiment disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.

Claims

1. The full-automatic back adhesive sheet wiping equipment is characterized by comprising a feeding device, a cleaning device and a discharging device which are sequentially arranged from left to right; the cleaning device comprises a fixed platform (14), a wiping piece chassis (5) is fixed at the center of the fixed platform (14) through a rotating shaft, a spraying device, a cleaning device and a blowing device are fixed on the periphery of the wiping piece chassis (5), and the spraying device, the cleaning device and the blowing device rotate around the fixed end.

2. The full-automatic adhesive-backed wiping equipment according to claim 1, wherein the wiping chassis (5) comprises an 8-inch placing table (12) and a 12-inch placing table (13) which are coaxially arranged and are positioned on the same plane.

3. The full-automatic back adhesive sheet wiping equipment according to claim 2, wherein supporting columns (15) are arranged on the peripheries of the 8-inch placing table (12) and the 12-inch placing table (13).

4. The full-automatic adhesive-backed wiping apparatus according to claim 3, wherein the number of the supporting columns (15) is set to at least three.

5. The full-automatic back adhesive wiping equipment as claimed in claim 1, wherein the spraying device, the cleaning device and the blowing device each comprise a rotating shaft and a rotating motor (7) for driving the rotating shaft to rotate, the rotating motor (7) is arranged on the fixed table (14), and the rotating shaft is sleeved with a fixed rod; an alcohol spray head (9) is arranged at the free end of the fixing rod of the spraying device, an air blowing spray head (8) is arranged at the free end of the fixing rod of the air blowing device, and a cleaning head (6) is arranged at the free end of the fixing rod of the cleaning device.

6. The full-automatic back adhesive sheet wiping equipment as claimed in claim 5, wherein inductors are arranged at the cleaning head (6), the air blowing nozzle (8) and the alcohol nozzle (9).

7. The full-automatic adhesive-backed wiping device according to claim 1, characterized in that the feeding device comprises a feeding rack (1) and a feeding arm (3) moving between the feeding rack (1) and the wiping chassis (5).

8. The full-automatic adhesive-backed sheet wiping equipment according to claim 1, wherein the blanking device comprises a blanking rack (11) and a blanking arm (10) moving between the blanking rack (11) and the sheet wiping chassis (5).

9. The full-automatic back adhesive wiping equipment according to claim 1, wherein a cleaning protective cover (4) is arranged on the outer side of the fixed table (14).