CN217757638U

CN217757638U - Solar cell production system and PVD coating device

Info

Publication number: CN217757638U
Application number: CN202221928524.3U
Authority: CN
Inventors: 陶翼; 许修伟; 任民鑫; 王陈
Original assignee: Tongwei Solar Anhui Co Ltd
Current assignee: Tongwei Solar Anhui Co Ltd
Priority date: 2022-07-21
Filing date: 2022-07-21
Publication date: 2022-11-08
Anticipated expiration: 2032-07-21

Abstract

The utility model relates to a solar cell production system and PVD coating device utilizes the mechanism of ajusting to carry out the application of force to the carrier to make the carrier take place slight vibration, and then make the relative carrier of silicon substrate that takes place slight drop or skew in the standing groove remove and just ajust, make the silicon substrate realize accurate putting in the standing groove, guarantee PVD coating film quality, and then guarantee solar cell's quality.

Description

Solar cell production system and PVD coating device

Technical Field

The utility model relates to the technical field of batteries, especially, relate to a solar cell production system and PVD coating device.

Background

The PVD (Physical Vapor Deposition) process is mainly used to form a Transparent Conductive Oxide (TCO) film on a silicon substrate after the CVD (Chemical Vapor Deposition) process is completed. The specific mode is that the silicon substrate which is subjected to the CVD process is fed into a placing groove of a carrier, the carrier and the silicon substrate are conveyed into a vacuum chamber to carry out PVD coating, and the carrier is easy to shake in a small amplitude in the feeding process and the conveying process, so that the silicon substrate is slightly dislocated or shifted in the placing groove, the PVD coating quality is further influenced, and the product quality is finally influenced.

SUMMERY OF THE UTILITY MODEL

In view of the above, it is necessary to provide a solar cell production system and a PVD coating apparatus for the problem of affecting the quality of PVD coating.

The technical scheme is as follows:

in one aspect, a PVD coating apparatus is provided, comprising:

the carrier is provided with a placing groove;

a conveying mechanism for conveying the carrier to a vacuum chamber; and

a centering mechanism for applying a force to the carrier to cause the carrier to vibrate to center the silicon substrate within the placement groove.

The technical solution is further explained as follows:

in one embodiment, the setting mechanism includes a vibrator disposed near the vacuum chamber, the vibrator being capable of applying a vibrating force to the carrier to set the silicon substrate in the placement groove.

In one embodiment, the straightening mechanism comprises an expansion piece and a beating assembly, the expansion piece is in transmission connection with the beating assembly so as to drive the beating assembly to move back and forth in a direction close to or far away from the conveying mechanism, and the beating assembly is used for applying periodic beating force to the carrier so as to straighten the silicon substrate in the placing groove.

In one embodiment, the rapping assembly comprises a telescopic airbag, a rapping head, a communication pipe and a vacuum solenoid valve, one side of the telescopic airbag is connected with the telescopic part, the other side of the telescopic airbag is connected with the rapping head, and the communication pipe is used for communicating the vacuum solenoid valve with the telescopic airbag, so that the telescopic airbag can periodically drive the rapping head to approach or leave the conveying mechanism along the telescopic direction of the telescopic airbag.

In one embodiment, the rapping assembly further comprises an adjusting element for adjusting the communication cross-sectional area of the communication pipe.

In one embodiment, the swing mechanism further includes a distance detecting element, the distance detecting element is used for detecting a distance from the striking head to the carrier, and the distance detecting element is electrically connected to the telescopic member.

In one embodiment, the straightening mechanism further comprises a mounting member, the telescopic member is provided with a telescopic end, the telescopic end is connected with the mounting member, and one side of the telescopic air bag is connected with the mounting member.

In one embodiment, the telescopic member comprises one of a telescopic motor, a telescopic cylinder or a telescopic hydraulic cylinder.

In one embodiment, the PVD coating apparatus further includes a position detection component, the position detection component is configured to detect a position of the carrier on the conveying mechanism, and the position detection component is electrically connected to the conveying mechanism.

In another aspect, a solar cell production system is provided, which comprises the PVD coating device.

The solar cell production system and the PVD coating device of the embodiment utilize the aligning mechanism to apply force to the carrier, so that the carrier vibrates slightly, the silicon substrate slightly falling off or deviating in the placing groove moves relative to the carrier and aligns, the silicon substrate is accurately placed in the placing groove, the PVD coating quality is guaranteed, and the quality of the solar cell is guaranteed.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention and do not constitute a limitation on the invention.

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained without creative efforts.

FIG. 1 is a schematic structural view of a PVD coating apparatus according to an embodiment;

FIG. 2 is a schematic view of the PVD coating apparatus of FIG. 1 from another perspective;

FIG. 3 is a schematic structural diagram of a straightening mechanism of an embodiment of the PVD coating apparatus of FIG. 1.

Description of reference numerals:

100. a carrier; 110. a placement groove; 200. a conveying mechanism; 300. a straightening mechanism; 310. a telescoping member; 311. a telescopic end; 320. a rapping component; 321. a telescopic air bag; 322. a striking head; 323. a communicating pipe; 324. a vacuum solenoid valve; 330. an adjustment element; 340. a distance detection element; 350. a mounting member; 400. a position detection element; 500. a silicon substrate.

Detailed Description

In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will be able to make similar modifications without departing from the spirit and scope of the present invention.

In the conventional PVD coating device, a silicon substrate 500 is fed into a carrier 100 on a conveying mechanism 200 by a feeding mechanism such as a manipulator, so that the silicon substrate 500 is placed in a placing groove 110 of the carrier 100, and the carrier 100 and the silicon substrate 500 are conveyed into a vacuum chamber together by the conveying mechanism 200 for PVD coating, during the feeding process and the conveying process of the conveying mechanism 200, the carrier 100 is likely to shake in a small range, so that the silicon substrate 500 in the placing groove 110 slightly falls off or deviates, and further, problems such as uneven coating, color difference and the like occur during PVD coating in the vacuum chamber, which finally affects the quality of the solar cell.

In one embodiment, a solar cell production system is provided, which includes a PVD coating apparatus, so as to form a transparent conductive oxide thin film on a silicon substrate 500 by using the PVD coating apparatus, and the PVD coating apparatus can ensure that the silicon substrate 500 is accurately placed in a placing groove 110, ensure the quality of the PVD coating, and thus ensure the quality of the solar cell.

As shown in fig. 1 and fig. 2, the PVD coating apparatus specifically includes a carrier 100, a conveying mechanism 200, and a straightening mechanism 300.

The carrier 100 may be in the form of a carrier plate or a tray, the carrier 100 is provided with a placement groove 110, and the silicon substrate 500 may be placed in the placement groove 110 for transportation.

The transfer mechanism 200 may be a conveyor belt or a transfer roller, and after the carrier 100 with the silicon substrate 500 mounted thereon is placed on the transfer mechanism 200, the carrier 100 and the silicon substrate 500 are transferred into the vacuum chamber by the transfer mechanism 200 to perform PVD coating.

In addition, when the carrier 100 with the silicon substrate 500 is transported by the transportation mechanism 200, the silicon substrate 500 may be photographed and detected by a camera or other elements to identify the defects such as chips and unfilled corners, which is not described herein again because it belongs to the prior art.

The carrier 100 is forced by the centering mechanism 300, so that the carrier 100 vibrates slightly, the silicon substrate 500 slightly falling off or deviating in the placing groove 110 moves relative to the carrier 100 and is centered, the silicon substrate 500 is accurately placed in the placing groove 110, the PVD coating quality is guaranteed, and the quality of the solar cell is guaranteed.

In addition, the aligning mechanism 300 can be arranged at a position close to the vacuum chamber, and the silicon substrate 500 can be accurately placed in the placing groove 110 by using the aligning mechanism 300 before the carrier 100 needs to enter the vacuum chamber, so that the placing position accuracy of the silicon substrate 500 in the placing groove 110 after the carrier 100 enters the vacuum chamber can be ensured to the maximum extent, and the PVD coating quality can be ensured to the maximum extent.

It can be understood that, in order to enable the centering mechanism 300 to apply force to the carrier 100 and ensure that the force applied to the carrier 100 will not damage the silicon substrate 500, the position where the centering mechanism 300 applies force to the carrier 100 can be flexibly designed or adjusted, for example, the force can be applied to the edge position of the carrier 100, so that not only the carrier 100 can vibrate to make the silicon substrate 500 slightly dropped or shifted in the placement groove 110 move and centered relative to the carrier 100, but also the silicon substrate 500 will not be damaged.

Conventionally, in order to align the silicon substrate 500, the transportation mechanism 200 needs to be manually suspended, and the position of the silicon substrate 500 in the placing groove 110 is adjusted in a manual alignment manner, which not only affects the film plating efficiency, but also has a safety risk. The PVD coating apparatus of the above embodiment utilizes the aligning mechanism 300 to apply a force to the carrier 100 to align the silicon substrate 500, which does not affect the coating efficiency and is safe and reliable.

In one embodiment, the squaring mechanism 300 includes a vibrator. And the vibrator is arranged close to the vacuum chamber, so that the vibrator can be used for applying a vibration force to the carrier 100, and further the carrier 100 vibrates slightly, so that the silicon substrate 500 slightly falling off or deviating in the placing groove 110 moves and is aligned relative to the carrier 100, the silicon substrate 500 is accurately placed in the placing groove 110, the PVD coating quality is ensured, and the quality of the solar cell is ensured.

It can be understood that the distance between the vibrator and the vacuum chamber can be flexibly adjusted or set according to actual installation conditions or use requirements, and only needs to be satisfied to accurately align the silicon substrate 500 in the placing groove 110 when the carrier 100 enters the vacuum chamber.

In another embodiment, as shown in FIG. 3, a straightening mechanism 300 includes a telescoping member 310 and a rapping assembly 320.

Specifically, the telescopic member 310 is in transmission connection with the rapping assembly 320, so that the telescopic member 310 is utilized to drive the rapping assembly 320 to reciprocate in a direction approaching (as shown in direction a of fig. 2) or away (as shown in direction B of fig. 2) the conveying mechanism 200. When the expansion piece 310 drives the beating component 320 to move to be close to the conveying mechanism 200, the beating component 320 can apply periodic beating force to the carrier 100, so that the carrier 100 slightly vibrates, and the silicon substrate 500 slightly falling off or deviating in the placing groove 110 moves and is aligned relative to the carrier 100, so that the silicon substrate 500 is accurately placed in the placing groove 110, the PVD coating quality is ensured, and the quality of the solar cell is ensured. After the striking assembly 320 finishes the alignment of the silicon substrate 500, the telescopic member 310 drives the striking assembly 320 to move away from the conveying mechanism 200, so as to avoid interference on the conveying of the carrier 100.

As shown in fig. 3, more specifically, the telescopic member 310 and the rapping assembly 320 are disposed above the conveying mechanism 200, and the telescopic member 310 can bring the rapping assembly 320 up or down. When the telescopic member 310 is extended to drive the rapping assembly 320 to descend so as to approach the conveying mechanism 200, the rapping assembly 320 can apply periodic rapping force to the carrier 100 on the conveying mechanism 200; when the telescopic member 310 is retracted to lift the rapping assembly 320 away from the conveying mechanism 200, the rapping assembly 320 does not interfere with the conveying of the carrier 100.

The periodic striking force applied by the striking assembly 320 to the carrier 100 can be achieved by the cam periodically rotating back and forth to collide with the carrier 100, or can be achieved by the carrier 100 striking by periodically extending and retracting.

As shown in fig. 3, in one embodiment, rapping assembly 320 comprises a bellows 321, a rapping head 322, a communication tube 323, and a vacuum solenoid valve 324.

Wherein, modes such as bonding or joint are taken to one side and extensible member 310 of flexible gasbag 321 are connected, and the opposite side that flexible gasbag 321 is relative takes modes such as bonding or spiro union to be connected with beating head 322, so, when extensible member 310 is flexible, can drive flexible gasbag 321 and beat head 322 and remove along the direction of stretching out and drawing back in step, and then make beating head 322 be close to or keep away from conveying mechanism 200. Furthermore, the vacuum solenoid valve 324 is communicated with the telescopic airbag 321 through the communicating pipe 323, so that the vacuum solenoid valve 324 periodically generates vacuum, thereby periodically extending and retracting the telescopic airbag 321, and further driving the knocking head 322 to approach or leave the conveying mechanism 200 along the extending and retracting direction of the telescopic airbag 321.

Specifically, after the telescopic airbag 321 drives the telescopic airbag 321 and the tapping head 322 to approach the conveying mechanism 200, when the vacuum solenoid valve 324 generates vacuum, the telescopic airbag 321 is contracted, and the tapping head 322 is further driven to be away from the carrier 100; when the vacuum solenoid valve 324 is turned off, the telescopic airbag 321 is stretched, and the knocking head 322 is driven to knock the carrier 100; in this way, a periodic striking force can be applied to the carrier 100, so that the carrier 100 vibrates slightly, and the silicon substrate 500 slightly falling off or shifting in the placement groove 110 moves and aligns relative to the carrier 100, so that the silicon substrate 500 is accurately placed in the placement groove 110, the PVD coating quality is ensured, and the quality of the solar cell is ensured. After the silicon substrate 500 is aligned, the expansion member 310 drives the expansion air bag 321 and the striking head 322 to be away from the conveying mechanism 200, so as to avoid interference on the conveyance of the carrier 100.

The striking head 322 may be made of elastic materials such as rubber or silica gel, and can apply a striking force to the carrier 100 without damaging the carrier 100. The striking head 322 may be cylindrical or block-shaped.

As shown in fig. 3, beating assembly 320 further includes an adjustment member 330. In this way, the communication cross-sectional area of communication pipe 323 is adjusted by adjusting element 330, so as to adjust the vacuum degree in retractable air bag 321, and further adjust the retractable speed of retractable air bag 321, and thus adjust the striking force applied by striking head 322 to carrier 100, so that the striking force applied to carrier 100 is suitable, and silicon substrate 500 can be ensured to be aligned, and carrier 100 and silicon substrate 500 are not damaged due to excessive striking force.

The adjusting element 330 may be a switching element such as a switching valve.

As shown in fig. 3, in addition, when the expansion element 310 drives the expansion airbag 321 and the striking head 322 to move toward the direction close to the conveying mechanism 200, in order to ensure that the striking head 322 can strike the carrier 100 after the expansion airbag 321 expands, the swing mechanism 300 further includes a distance detection element 340, the distance detection element 340 is used to detect the distance between the striking head 322 and the carrier 100, and in combination with the electrical connection between the distance detection element 340 and the expansion element 310, the amount of expansion of the expansion element 310 is adjusted according to the detected distance information between the striking head 322 and the carrier 100, so that the striking head 322 can strike the carrier 100 after the expansion airbag 321 expands.

Specifically, when the distance between the tapping head 322 and the carrier 100 detected by the distance detecting element 340 is too large, the telescopic member 310 is further extended, so as to shorten the distance between the tapping head 322 and the carrier 100, and ensure that the tapping head 322 can tap the carrier 100 after the telescopic air bag 321 is extended; when the distance between the tapping head 322 and the carrier 100 detected by the distance detecting element 340 is too small, the telescopic member 310 is contracted, so as to increase the distance between the tapping head 322 and the carrier 100, and avoid that the tapping head 322 applies too large tapping force to the carrier 100 on the premise that the tapping head 322 can tap the carrier 100 after the telescopic air bag 321 is stretched.

Here, the distance detection element 340 may be a distance sensor, a contact switch, or the like capable of detecting a distance between two objects.

In addition, telescoping member 310 and telescoping bladder 321 may be directly connected, and intermediate elements may also be present between telescoping member 310 and telescoping bladder 321 to facilitate installation of telescoping bladder 321.

As shown in FIG. 3, in one embodiment, the squaring mechanism 300 further includes a mount 350. Wherein, extensible member 310 has flexible end 311, and flexible end 311 takes modes such as spiro union or joint with installed part 350 to be connected, and one side and installed part 350 of flexible gasbag 321 take modes such as bonding or joint to be connected, so, when flexible end 311 is flexible, drive installed part 350 in step and remove, and then drive flexible gasbag 321 in step and beat the head 322 and remove. Also, the installation of the telescopic airbag 321 increases the degree of freedom and flexibility in installation by using the installation member 350 as an intermediate connection member.

The mounting member 350 may be in the form of a mounting plate, a mounting frame, or a mounting bracket.

The distance detecting element 340 may be fixed on the mounting member 350 by a screw connection, and the distance between the striking head 322 and the carrier 100 is obtained by detecting the distance between the mounting member 350 and the carrier 100.

In addition, the extension and retraction of the extensible member 310 may be directly achieved through a linear reciprocating motion, for example, the extensible member 310 may be one of an extension motor, an extension cylinder or an extension hydraulic cylinder; the telescoping of the telescoping member 310 may also be accomplished by converting rotational motion to linear motion.

In one embodiment, the telescopic member 310 includes a driving motor, a lead screw, a nut, and a guide bar. The driving motor is in transmission connection with the screw rod, the guide rods are parallel to the screw rod and are arranged at intervals, the screw rod and the guide rods are sleeved with the nuts, and the nuts are in transmission connection with the telescopic air bags 321 to drive the telescopic air bags 321 to move back and forth in the direction close to or far away from the conveying mechanism 200. So set up, can drive the lead screw when driving motor rotates in step and rotate, combine the restraint effect of guide bar to the nut to can avoid the nut to rotate along with the lead screw, and then make the nut along the axial reciprocating motion of lead screw, and then drive flexible gasbag 321 and beat the head 322 and be close to or keep away from conveying mechanism 200.

Meanwhile, in the process of conveying the carrier 100 and the silicon substrate 500 by the conveying mechanism 200, in order to ensure that the carrier 100 can be accurately conveyed to the position corresponding to the aligning mechanism 300, the aligning mechanism 300 can accurately apply force to the carrier 100 so as to make the carrier 100 vibrate to align the silicon substrate 500 in the placing groove 110.

As shown in fig. 2, the PVD coating apparatus optionally further includes a position detection component 400. In this way, the position of the carrier 100 on the conveying mechanism 200 is detected by the position detecting element 400, and the carrier 100 can be accurately conveyed to the position corresponding to the aligning mechanism 300 by the electrical connection between the position detecting element 400 and the conveying mechanism 200, so that the aligning mechanism 300 can accurately apply force to the carrier 100 to vibrate the carrier 100 to align the silicon substrate 500 in the placing groove 110.

Specifically, along the conveying direction of the conveying mechanism 200, when the position detecting element 400 detects that the carrier 100 is located behind the centering mechanism 300, the conveying mechanism 200 is enabled to continue to drive the carrier 100 to move forward until the carrier 100 is conveyed to a position corresponding to the centering mechanism 300, so that the conveying mechanism 200 stops conveying, the silicon substrate 500 on the carrier 100 is centered by the centering mechanism 300, and after the centering is completed, the conveying mechanism 200 continues to drive the carrier 100 to move forward until the carrier 100 is conveyed into the vacuum chamber.

In one embodiment, the centering mechanism 300 is disposed above the conveying mechanism 200, and when the carrier 100 is conveyed to a position right below the centering mechanism 300, it can be determined that the carrier 100 is conveyed to a position corresponding to the centering mechanism 300.

Here, the position detection element 400 may be an element capable of detecting a position, such as a position sensor. Two position detecting elements 400 may be provided at intervals in the conveying direction of the conveying mechanism 200, so that it is possible to detect that the carrier 100 is conveyed to a position corresponding to the squaring mechanism 300 and to stop the conveying mechanism 200 from conveying, respectively.

In addition, in order to make the carrier 100 receive uniform acting force, two aligning mechanisms 300 may be provided, and the two aligning mechanisms 300 are uniformly arranged on two sides of the conveying mechanism 200, so that the two sides of the carrier 100 receive uniform force, and the silicon substrate 500 can be accurately aligned.

In addition, the electrical connection among all parts can also be through setting up intermediate control element such as singlechip and carrying out the processing and the transmission of signal.

The "certain body" and the "certain portion" may be a part corresponding to the "member", that is, the "certain body" and the "certain portion" may be integrally formed with the other part of the "member"; the "part" can be made separately from the "other part" and then combined with the "other part" into a whole. The expressions "a certain body" and "a certain part" in the present application are only one example, and are not intended to limit the scope of the present application for reading convenience, and the technical solutions equivalent to the present application should be understood as being included in the above features and having the same functions.

It should be noted that, the components included in the "unit", "assembly", "mechanism" and "apparatus" of the present application can also be flexibly combined, i.e. can be produced in a modularized manner according to actual needs, so as to facilitate the modularized assembly. The division of the above-mentioned components in the present application is only one example, which is convenient for reading and is not a limitation to the protection scope of the present application, and the same functions as the above-mentioned components should be understood as equivalent technical solutions in the present application.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. The term "and/or" as used in this disclosure includes any and all combinations of one or more of the associated listed items.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to," "disposed on," "secured to," or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. Further, when one element is considered as "fixed transmission connection" with another element, the two elements may be fixed in a detachable connection manner or in an undetachable connection manner, and power transmission can be achieved, such as sleeving, clamping, integrally-formed fixing, welding and the like, which can be achieved in the prior art, and is not cumbersome. When an element is perpendicular or nearly perpendicular to another element, it is desirable that the two elements are perpendicular, but some vertical error may exist due to manufacturing and assembly effects. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a single embodiment. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

It should also be understood that in interpreting the connection or positional relationship of the elements, although not explicitly described, the connection and positional relationship are to be interpreted as including a range of error that should be within an acceptable range of deviation from the particular values as determined by one skilled in the art. For example, "about," "approximately," or "substantially" may mean within one or more standard deviations, without limitation.

The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above examples only represent some embodiments of the present invention, and the description thereof is more specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. A PVD coating apparatus, comprising:

the carrier is provided with a placing groove;

a conveying mechanism for conveying the carrier to a vacuum chamber; and

2. The PVD coating apparatus according to claim 1, wherein the aligning mechanism comprises a vibrator disposed adjacent to the vacuum chamber, the vibrator capable of applying a vibrating force to the carrier to align the silicon substrate in the placement groove.

3. The PVD coating apparatus according to claim 1, wherein the aligning mechanism comprises an expansion member and a striking assembly, the expansion member is in transmission connection with the striking assembly to drive the striking assembly to move back and forth in a direction close to or away from the conveying mechanism, and the striking assembly is configured to apply a periodic striking force to the carrier to align the silicon substrate in the placement groove.

4. The PVD coating device according to claim 3, wherein the rapping assembly comprises a telescopic airbag, a rapping head, a communicating pipe and a vacuum solenoid valve, one side of the telescopic airbag is connected with the telescopic member, the other side of the telescopic airbag is connected with the rapping head, and the communicating pipe is used for communicating the vacuum solenoid valve with the telescopic airbag, so that the telescopic airbag can periodically drive the rapping head to approach or leave the conveying mechanism along the telescopic direction of the telescopic airbag.

5. The PVD coating apparatus of claim 4, wherein the rapping assembly further comprises an adjusting member for adjusting a communication cross-sectional area of the communication pipe.

6. The PVD coating apparatus according to claim 4, wherein the aligning mechanism further comprises a distance detecting element, the distance detecting element is used for detecting a distance from the striking head to the carrier, and the distance detecting element is electrically connected to the telescopic member.

7. The PVD coating apparatus of claim 4, wherein the leveling mechanism further comprises a mounting member, the telescoping member having a telescoping end, the telescoping end being coupled to the mounting member, and one side of the bellows being coupled to the mounting member.

8. The PVD coating apparatus of claim 3, wherein the telescoping member comprises one of a telescoping motor, a telescoping cylinder, or a telescoping hydraulic cylinder.

9. The PVD coating apparatus of any of claims 1 to 8, further comprising a position detection device for detecting a position of the carrier on the conveying mechanism, wherein the position detection device is electrically connected to the conveying mechanism.

10. A solar cell production system comprising the PVD coating apparatus according to any of claims 1 to 9.