CN217752177U - Silicon rod centering mechanism, silicon rod bearing device and cutting equipment - Google Patents

Abstract

The embodiment of the application provides a silicon rod centering mechanism, silicon rod bear device and cutting equipment, wherein, silicon rod centering mechanism includes: centering the support; at least one pair of centering drive rods; the centering driving rod extends along the first direction and is arranged on the centering support; the centering driving piece is arranged on the centering support; the centering driving piece is arranged on the centering support; the centering driving piece is connected with one end of each pair of centering driving rods and can drive the centering driving rods to move relative to the centering support along a first direction; the pair of centering clamping jaws are respectively arranged at two ends of the centering support along the first direction; the centering clamping jaw is respectively connected with the other end of the driving rod so as to synchronously move along with the centering driving rod; the centering clamping jaws extend towards the silicon rod, and the centering clamping jaws are used for abutting against the silicon rod from two sides to achieve alignment. The silicon rod centering mechanism, the silicon rod bearing device and the cutting equipment provided by the embodiment of the application can be used for centering the silicon rod, and are convenient for halving the silicon rod.

Description

Silicon rod centering mechanism, silicon rod bearing device and cutting equipment

Technical Field

The application relates to a cutting technology of hard and brittle materials, in particular to a silicon rod centering mechanism, a silicon rod bearing device and cutting equipment.

Background

With the development of heterojunction cells, the demand of small silicon wafers is increasing. In a traditional scheme, a cylindrical single crystal silicon rod is generally cut into a square rod, then the square rod is cut into a large silicon wafer, scribing and cutting are carried out on the large silicon wafer to form a small silicon wafer in a laser technology, but the laser scribing process can cause damage and defect states on the cross section of the small silicon wafer, and the conversion efficiency of a finally processed heterojunction battery is seriously influenced.

Disclosure of Invention

In order to solve one of the above technical drawbacks, an embodiment of the present application provides a silicon rod centering mechanism, a silicon rod carrying device and a cutting apparatus.

According to a first aspect of embodiments of the present application, there is provided a silicon rod centering mechanism comprising:

centering the support;

at least one pair of centering drive rods; the centering driving rod extends along a first direction and is arranged on the centering support;

the centering driving piece is arranged on the centering support; the centering driving piece is connected with the end part, close to the centering driving piece, of each pair of centering driving rods, and the centering driving piece can drive the centering driving rods to move relative to the centering support along a first direction;

the pair of centering clamping jaws are respectively arranged at two ends of the centering support along the first direction; the centering clamping jaw is respectively connected with the other end of the driving rod so as to synchronously move along with the centering driving rod; the centering clamping jaws extend towards the silicon rod, and the centering clamping jaws are used for abutting against the silicon rod from two sides to achieve alignment.

According to a second aspect of embodiments of the present application, there is provided a silicon rod carrier device, comprising:

the bearing platform is used for bearing the silicon rod;

according to the silicon rod centering mechanism, the silicon rod centering mechanism is arranged below the bearing platform, and the centering clamping jaw in the silicon rod centering mechanism extends upwards to abut against the side face of the silicon rod.

According to a third aspect of embodiments herein, there is provided a cutting apparatus comprising: the silicon rod carrying device comprises a linear cutting device and the silicon rod carrying device, wherein the linear cutting device and the silicon rod carrying device can move relatively, so that a cutting wire wound in the linear cutting device can cut the silicon rod carried on the silicon rod carrying device.

According to the technical scheme provided by the embodiment of the application, the centering driving piece is arranged on the centering support, and the centering clamping jaws are arranged on two sides of the centering support respectively; one end of the centering driving rod is connected with the centering clamping jaw, the other end of the centering driving rod is connected with the centering driving piece, the centering driving rod is driven by the centering driver to move relative to the centering support, and the centering clamping jaw is driven to move synchronously, so that the silicon rod is pushed to move to a middle position in the process that the two centering clamping jaws in one pair are close to each other and aligned with the cutting line, and the silicon rod is conveniently cut into two small silicon rods with the same cross section subsequently.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:

fig. 1 is a schematic structural view of a silicon rod centering mechanism provided in an embodiment of the present application;

FIG. 2 is a partial cross-sectional view of a silicon rod centering mechanism provided in an embodiment of the present application;

fig. 3 is a schematic structural view of the silicon rod centering mechanism provided by the embodiment of the present application, wherein a centering support is matched with a clamping jaw connecting block.

Reference numerals are as follows:

531-centering the support; 532-centering cylinder; 533-centering the drive rod; 534-centering guide rod; 5341-stop collar; 535-centering jaws; 5351-jaw connection block; 5352-gripper arms; 536-a buffer block; 537-a first protective sheet metal; 538-a second protective sheet metal; 539 organ shield.

Detailed Description

In order to make the technical solutions and advantages of the embodiments of the present application more apparent, the following further detailed description of the exemplary embodiments of the present application with reference to the accompanying drawings makes it clear that the described embodiments are only a part of the embodiments of the present application, and are not exhaustive of all embodiments. It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.

In the traditional scheme, a cylindrical single crystal silicon rod is cut into a square rod, then the square rod is cut into a large silicon wafer, scribing and cutting are carried out on the large silicon wafer to form a small silicon wafer in the laser technology, but the laser scribing process can cause damage and defect states on the cross section of the small silicon wafer, and the conversion efficiency of the finally processed heterojunction battery is seriously influenced.

The embodiment provides a cutting method, after a square rod is obtained, the square rod is cut along the length direction of the square rod to obtain a small silicon rod with a small cross-sectional area, and then the small silicon rod is sliced to directly obtain a silicon wafer with a small size, so that the step of laser scribing is omitted, and the surface of the small silicon wafer is prevented from being damaged. One of the cutting modes can cut from the central line of the silicon rod, a square rod is cut into two small silicon rods with the same cross sectional area, and the small silicon slices obtained after slicing are the same in size and convenient to store and transport. The cutting process has very high requirement on the alignment precision between the wire cutting device and the silicon rod, and the cutting wire must pass through the central line of the square rod.

The embodiment provides a silicon rod centering mechanism, which can be applied to a cutting device and can align the central line of a silicon rod with a cutting line by adjusting the position of the silicon rod.

As shown in fig. 1 to 3, the silicon rod centering mechanism provided in the present embodiment includes: centering abutment 531, centering drive rod 533, and centering jaw 535.

The centering support 531 is a base structure for mounting and supporting the components. The centering driving member is disposed on the centering support 531. The centering driving member may be an electric cylinder, a hydraulic cylinder, an air cylinder, or the like, and in this embodiment, the centering driving member is specifically a centering air cylinder 532.

The number of the centering driving rods 533 is at least one pair, and the pair includes two centering driving rods 533.

The number of centering jaws is at least one pair, one pair comprising two centering jaws 535. When a pair of centering jaws 535 is used, two of the centering jaws 535 are disposed at both ends of the centering support 531 in the first direction. One centering driving rod 533 is correspondingly connected with one centering clamping jaw 535, and the two centering clamping jaws 535 can synchronously move towards each other or move away from each other; alternatively, two centering drive rods 533 may be used to connect one centering jaw 535 to another centering drive rod 533 to connect another centering jaw 535, so that one centering jaw 535 is driven to move by the two centering drive rods 533.

When two pairs of centering jaws 535 are used, the two centering jaws 535 of a pair are disposed at opposite ends of the centering pedestal 531 in the first direction, and the two pairs of centering jaws 535 are spaced apart in a direction perpendicular to the first direction. The centering jaws 535 at the same end are connected to the same centering drive bar 535 to drive the two pairs of centering jaws 535 to move via the centering drive bar.

Alternatively, more than three pairs of centering jaws may be used, and the arrangement may be made with reference to the two pairs.

Specifically, taking the pair of centering jaws 535 as an example, the centering driving rod 533 extends along a first direction, which is a moving direction of the centering jaws 535 and is perpendicular to the center line of the silicon rod. The cylinder 532 is located in the middle, the centering jaws 535 are located on both sides, and one end of the centering driving rod 533 is connected to the cylinder 532, and the other end is connected to the centering jaws 535.

The centering cylinder 532 may drive the centering driving rod 533 to move in the first direction relative to the centering support 531, and drive the centering jaws 535 to move synchronously. The centering cylinder 532 drives the two centering jaws 535 to move the same distance at the same speed.

Before the silicon rod is cut by the cutting device, the centering clamping jaws 535 are driven to move towards each other through the centering cylinder 532, the silicon rod is pushed to move to the neutral position, namely: the center line of the silicon rod is aligned with the cutting line. For example: assuming that the first direction is a left-right direction, if the initial position of the silicon rod is deviated to the left, the centering clamping jaw 535 at the left side contacts the silicon rod first, and pushes the silicon rod to move to the right until the silicon rod moves to contact the centering clamping jaw 535 at the right side, and the silicon rod reaches a neutral position.

According to the technical scheme provided by the embodiment, the centering driving piece is arranged on the centering support, and the two sides of the centering support are respectively provided with the centering clamping jaws; one end of the centering driving rod is connected with the centering clamping jaw, the other end of the centering driving rod is connected with the centering driving piece, the centering driving rod is driven by the centering driver to move relative to the centering support, and the centering clamping jaw is driven to move synchronously, so that the silicon rod is pushed to move to a middle position in the process that the two centering clamping jaws in one pair are close to each other and aligned with the cutting line, and the silicon rod is conveniently cut into two small silicon rods with the same cross section subsequently.

One implementation is as follows: the centering seat 531 has an accommodating space therein. The centering driving piece is arranged in the accommodating space.

The centering driving rod 533 is inserted into the centering support 531, one end of which penetrates into the accommodating space and is connected to the centering cylinder 532, and the other end of which is exposed out of the centering support 531 and is connected to the centering clamping jaw 535. The centering driving rod 533 and the centering support 531 make relative movement, and the centering support 531 guides the movement process.

On the basis of the technical scheme, the two centering guide rods 534 are respectively connected with the two centering clamping jaws 535 in a one-to-one correspondence manner. Specifically, the centering guide bar 534 extends in the first direction and is movably disposed on the centering support 531, and one end of the centering guide bar 534 is connected to the centering jaw 535. One embodiment is: the centering guide bar 534 is inserted into the centering support 531.

During the process that the centering cylinder 532 drives the centering clamping jaws 535 to move, the moving tracks of the centering clamping jaws 535 are easily influenced by friction force, gravity and the like of contact parts, so that the moving tracks deviate from the first direction, and the two centering clamping jaws 535 cannot vertically abut against two side surfaces of the silicon rod. The centering guide rod 534 is connected between the centering clamping jaw 535 and the centering support 531, the movement of the centering clamping jaw 535 is guided, the deviation from the first direction is avoided, so that the two centering clamping jaws 535 are vertically abutted against two side faces of the silicon rod, and the centering accuracy is improved.

On the basis of the above technical solution, the embodiment provides a specific implementation manner of a silicon rod centering mechanism: the centering jaw 535 specifically comprises: a jaw connection block 5351 and a jaw arm 5352. The clamping jaw connecting block 5351 is connected with the centering driving rod 533, the clamping jaw arm 5352 is arranged on the clamping jaw connecting block 5351, the clamping jaw arm 5352 extends towards the silicon rod, and the end portion of the clamping jaw arm 5352 is located on the side face of the silicon rod and used for aligning the silicon rod.

One embodiment is as follows: the clamping jaw arm 5352 is arranged at the top of the clamping jaw connecting block 5351, and the clamping jaw arm 5352 extends upwards to the position that the top end of the clamping jaw arm 5352 is located on the side face of the silicon rod and used for aligning the silicon rod above.

Alternatively, the jaw arm 5352 may be disposed at the bottom of the jaw connection block 5351, and extend downward to the side of the silicon rod for aligning the silicon rod below.

Further, a buffer block 536 is provided on the side of the gripper arm 5352 facing the silicon rod. Buffer 536 is configured to be in direct contact with the surface of the silicon rod to prevent scratching of the surface of the silicon rod, thereby protecting the silicon rod. The buffer block 536 may be made of soft material such as nylon, felt, rubber, and silicone.

One implementation of the centering seat 531 is as follows: the centering support 531 is a box-shaped structure with an inner cavity, the centering cylinders 532 are disposed in the inner cavity, the number of the centering cylinders 532 may be one or two, when one of the centering cylinders 532 is provided, the centering cylinders 532 may be respectively connected to the centering driving rods 533 through a connecting rod transmission structure, and one centering cylinder 532 drives the two centering driving rods 533 to move towards or away from each other. When the number of the centering cylinders 532 is two, one centering cylinder 532 is connected to one centering driving rod 533, and the strokes of the two centering driving rods 533 are the same, so that the centering jaws 535 are driven to move the same distance for centering.

Two sidewalls perpendicular to the first direction in the centering support 531 are provided with a driving rod through hole through which the centering driving rod 533 passes and a guide rod through hole through which the centering guide rod 534 passes. The driving rod through hole is positioned above the guiding rod through hole, and the central lines of the two centering driving rods 533 are arranged side by side; the centerlines of the two centering guide bars 534 are arranged side by side.

Specifically, two side walls of the centering support 531 are respectively provided with four through holes, which are arranged in two rows and two columns, the upper two through holes are used for penetrating the centering driving rod 533, and the lower two through holes are used for penetrating the centering guiding rod 534. As viewed from one side of the centering holder 531, the centering driving rod 533 corresponding to the centering jaw of the one side penetrates into the upper left through hole, and the centering guiding rod 534 penetrates into the lower right through hole. The centering driving rod 533 corresponding to the centering clamping jaw on the other side penetrates through the upper right through hole, and the centering guiding rod 534 penetrates through the lower left through hole. So set up, with the centering actuating lever that a centering clamping jaw corresponds and centering guide bar along the diagonal arrangement of centering support 531, the distance between the two is great, more can improve the stability and the accuracy of removal process.

Furthermore, relative moving parts exist in the centering mechanism, and in order to protect the moving parts, a protective metal plate, an organ shield and the like are covered outside, so that the influence of water, foreign matter, dust and the like entering the centering support on the normal movement of the centering driving rod and the centering guide rod is avoided.

Specifically, a organ shield 539 is connected between the centering support 531 and the centering jaw 535 to seal the space between the centering support 531 and the centering jaw 535. The opening and contraction directions of the organ shield 539 are set in a first direction. As the centering jaw 535 moves outward, the organ shield 539 stretches open; as the centering jaws 535 move inward, the organ shield 539 contracts. The organ shield 539 prevents the ingress of water, foreign matter dust, etc. and does not interfere with the normal movement of the centering jaw 535.

Furthermore, a limiting sleeve 5341 is sleeved on the end part of the centering guide rod 534 close to the centering clamping jaw 535, and is used for limiting the stroke of the centering cylinder and preventing the centering cylinder from crushing the organ shield 539.

Furthermore, a protection metal plate (called as a first protection metal plate 537) is laid above the centering support 531, connected between the two organ shields 539, and can be used for protection from above. In the application process, first protection panel beating 537 can have the contact with the top part among the cutting equipment, and first protection panel beating 537 has certain intensity and wearability, can protect centering support 531, reduce wearing and tearing.

Furthermore, a second protective metal plate 538 is arranged outside the clamping jaw connecting block 5351 in a surrounding mode, the clamping jaw connecting block 5352 is used for protection, abrasion is reduced, and the service life of the clamping jaw connecting block is prolonged.

In order to facilitate a clearer understanding of the technical solution of the present application, the following describes the centering operation of the silicon rod centering mechanism of the present application:

after the silicon rod is placed on the bearing platform of the cutting equipment, the silicon rod is positioned between the two centering clamping jaws and is not contacted with the two centering clamping jaws. And a centering driving piece in the centering mechanism is controlled to work, and at least one pair of centering driving rods is driven to move inwards to drive the two centering clamping jaws to be close to each other. One of the centering clamping jaws contacts with the silicon rod firstly, and pushes the silicon rod to move towards the other clamping jaw until the two centering clamping jaws contact with the silicon rod and clamp the silicon rod.

The centering driving part drives the two centering clamping jaws to move for the same distance at the same fixed speed, so that the silicon rod can be moved to the middle positions of the two centering clamping jaws, and centering and alignment are realized. In the subsequent cutting process, the cutting line may cut through the center line of the silicon rod to cut the silicon rod into two small silicon rods having an equal cross-sectional area.

Taking a square rod with a rectangular cross section as an example, the cutting line cuts through the center line of the square rod, and the square rod can be cut into halves to obtain two small silicon rods with the same cross sectional area.

On the basis of the above technical solution, the present embodiment further provides a silicon rod carrying device, including: the silicon rod centering mechanism is arranged below the bearing platform, and a centering clamping jaw in the silicon rod centering mechanism extends upwards to abut against the side face of the silicon rod.

The number of the centering mechanisms is set according to the length of the silicon rod, when the silicon rod is long, two or more than three centering mechanisms can be arranged along the length direction of the silicon rod, and each centering mechanism is arranged at intervals to apply uniform pushing force to the silicon rod everywhere, so that the silicon rod moves along the first direction, and the silicon rod is prevented from horizontally rotating.

Further, the present embodiment also provides a cutting apparatus, including: the wire cutting device and the silicon rod bearing device can move relatively, so that the silicon rod borne on the silicon rod bearing device is cut by the cutting wire wound in the wire cutting device.

The silicon rod carrying device and the cutting equipment provided by the embodiment have the same technical effects as the centering device.

In the description of the present application, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered limiting of the present application.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; can be mechanically connected, electrically connected or can communicate with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as the case may be.

While the preferred embodiments of the present application have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including the preferred embodiment and all changes and modifications that fall within the scope of the present application.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.

Claims (11)

1. A silicon rod centering mechanism, comprising:

centering the support;

at least one pair of centering drive rods; the centering driving rod extends along a first direction and is arranged on the centering support;

the centering driving piece is arranged on the centering support; the centering driving piece is connected with one end of each pair of centering driving rods and can drive the centering driving rods to move relative to the centering support along a first direction;

the pair of centering clamping jaws are respectively arranged at two ends of the centering support along the first direction; the centering clamping jaw is respectively connected with the other end of the driving rod so as to synchronously move along with the centering driving rod; the centering clamping jaw extends towards the silicon rod, and the centering clamping jaw is used for propping against the silicon rod from two sides to realize alignment.

2. The silicon rod centering mechanism as set forth in claim 1, wherein a receiving space is provided in the centering support, and the centering driving member is located in the receiving space; the centering driving rod penetrates through the centering support, the end part of the centering driving rod penetrating into the accommodating space is connected with the centering driving piece, and the end part of the centering driving piece extending out of the centering support is connected with the centering clamping jaw.

3. The silicon rod centering mechanism of claim 2, further comprising:

the centering guide rod extends along the first direction and is movably arranged on the centering support; one end of the guide rod is connected with the centering clamping jaw.

4. The silicon rod centering mechanism of claim 1, wherein the centering jaw comprises:

the clamping jaw connecting block is connected with the centering driving rod;

the clamping jaw arm is arranged on the clamping jaw connecting block; the gripper arms extend towards the silicon rod to the side of the silicon rod.

5. The silicon rod centering mechanism of claim 4, wherein the centering jaw further comprises:

and the buffer block is arranged on the inner side of the clamping jaw arm facing the silicon rod.

6. The silicon rod centering mechanism as set forth in claim 3, wherein two side walls of the centering support, which are perpendicular to the first direction, are provided with a driving rod through hole through which the centering driving rod passes and a guide rod through hole through which the centering guide rod passes;

the driving rod through hole is positioned above the guide rod through hole, and the central lines of the two centering driving rods are arranged side by side; the central lines of the two centering guide rods are arranged side by side.

7. The silicon rod centering mechanism as set forth in claim 1, wherein the centering driving member is a cylinder, and the number thereof is two; one cylinder is connected with one centering driving rod.

8. The silicon rod centering mechanism of claim 1, further comprising: the organ shield is connected between the centering support and the centering clamping jaw; the opening and contraction directions of the organ shield are arranged along a first direction.

9. The silicon rod centering mechanism of claim 8, further comprising: the protection panel beating is laid in the top of centering support, connects between two organ shields.

10. A silicon rod carrying device, comprising:

the bearing platform is used for bearing the silicon rod;

the silicon rod centering mechanism as set forth in any one of claims 1 to 9, which is disposed below the carrying platform, wherein a centering jaw of the silicon rod centering mechanism extends upward against a side surface of a silicon rod.

11. A cutting apparatus, comprising: a wire cutting device and the silicon rod carrier device as recited in claim 10, wherein the wire cutting device and the silicon rod carrier device are relatively movable, so that a cutting wire wound in the wire cutting device cuts a silicon rod carried on the silicon rod carrier device.

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