CN217740481U - Wafer sorter with safeguard function - Google Patents
Wafer sorter with safeguard function Download PDFInfo
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- CN217740481U CN217740481U CN202221417916.3U CN202221417916U CN217740481U CN 217740481 U CN217740481 U CN 217740481U CN 202221417916 U CN202221417916 U CN 202221417916U CN 217740481 U CN217740481 U CN 217740481U
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Abstract
The utility model belongs to the technical field of wafer classification machine, especially, for a wafer classification machine with safeguard function, including the delivery track, the inner wall of delivery track is provided with conveying assembly, delivery track's upper surface and lower surface bear the one side rigid coupling that the thing frame is relative with two respectively, delivery track's upper surface and lower surface are provided with spacing subassembly, and it is rotatory to drive gear b and gear an through two step motor, and gear a is rotatory to drive the thread bush, and two rotatory two screw rod downshifts of driving of two thread bushes, and two screw rod downshifts drive two limiting plates and are close to each other, according to the distance between two limiting plates of the diameter adjustment of circle brilliant, carry on spacingly to the circle brilliant, avoid the slope to appear at the in-process that removes of circle brilliant, solved the in-process of carrying of circle brilliant very easily produces the incline, lead to getting the putting suction head can't carry out the categorised problem of normal letter sorting to the circle brilliant.
Description
Technical Field
The utility model belongs to the technical field of wafer classification machine, concretely relates to wafer classification machine with safeguard function.
Background
Silicon Wafer (Wafer) used for manufacturing a silicon semiconductor integrated circuit refers to a silicon Wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a Wafer because it has a circular shape. The wafer is a carrier for producing integrated circuits, during the processing of the wafer, the type and quality of the produced wafer are different due to external factors, AOI test is usually carried out in an automatic optical detector, after the type and quality of the wafer are detected, the wafer is sorted through a wafer sorter according to the difference of the type and quality, the wafer sorter sorts the wafer on the surface of a transportation rail by taking and placing suction heads, the transportation rail for arranging the wafer is arranged below the taking and placing suction heads, the wafer linearly moves on the transportation rail, and the suction heads grab the wafer storage position when the suction heads are taken and placed below the suction heads.
Chinese utility model patent publication No. CN215896348U a full-automatic wafer conveyor of semiconductor device, the device is through setting up the cylinder, be convenient for promote the slider, provide power for the motion of slider, the cylinder produces certain limiting displacement to the slider through the piston rod simultaneously, avoid the slider to take place to slide receiving the influence of other power, a slide block, the design of connecting plate and extension board, make traditional fixed conveyor change into movable, adjust and the basket of flowers clearance with this, cooperation gyro wheel one, gyro wheel two, drive wheel one, drive wheel two, gyro wheel three and gyro wheel four and drive belt, make the wafer accurately carry to the basket of flowers in.
However, the device is not provided with a limiting device, the round crystal is very easy to deflect in the conveying process, so that the round crystal cannot be moved to the position of the picking and placing suction head on the lower side of the round crystal sorting machine or cannot be in central symmetry with the picking and placing suction head, and the picking and placing suction head cannot normally sort the round crystal.
SUMMERY OF THE UTILITY MODEL
To solve the problems set forth in the background art described above. The utility model provides a wafer sorter with safeguard function.
In order to achieve the above object, the utility model provides a following technical scheme: the wafer sorting machine with the protection function comprises a conveying rail, wherein a conveying assembly is arranged on the inner wall of the conveying rail, the upper surface and the lower surface of the conveying rail are fixedly connected with the opposite surfaces of two object bearing frames respectively, and limiting assemblies are arranged on the upper surface and the lower surface of the conveying rail.
Preferably, conveying component includes and rotates drive roll and the driven voller of being connected with the lower surface left and right sides of delivery track inner wall, the surface of drive roll passes through the conveyer belt and is connected with the outward appearance transmission of driven voller, the top of driven voller is connected with the upper surface rotation of delivery track inner wall, the bearing and the pivot of delivery track inner wall upper surface joint and servo motor's output shaft rigid coupling are passed through to the top of drive roll, servo motor installs the left side at the delivery track upper surface.
Preferably, the front surface of the conveying belt is symmetrically and fixedly connected with a plurality of anti-collision plates.
Preferably, spacing subassembly is including installing two step motor at delivery track upper surface and lower surface, step motor's output shaft and gear b's upper surface rigid coupling, gear b's surface and gear a's surface engagement, gear a's lower surface and the upper surface rigid coupling of thread bush, the inner wall threaded connection of thread bush has the screw rod, the surface rigid coupling of thread bush is at the bearing inner wall of delivery track upper surface joint, the bottom of screw rod is connected with the upper surface rotation of limiting plate.
Preferably, the lower surface mounting of limiting plate has the cushion, the material of cushion is the rubber material.
Preferably, two through holes are respectively formed in the left side and the right side of the upper surface of the conveying track, the inner walls of the through holes are connected with the outer surface of the sliding rod in a sliding mode, and the bottom end of the sliding rod is fixedly connected with the upper surface of the limiting plate.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses, it is rotatory with gear a to drive gear b through two step motor, gear a is rotatory to drive the thread bush rotatory, two rotatory two screw rods that drive of thread bush move down, two screw rods move down and drive two limiting plates and be close to each other, distance between two limiting plates according to the diameter adjustment of the round brilliant, carry on spacingly to the round brilliant, avoid the round brilliant incline to appear at the in-process that removes, solved the round brilliant in the in-process of carrying and very easily produced the incline, lead to getting to put the unable normal categorised problem of letter sorting of carrying out to the round brilliant.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:
fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic sectional view of the front view of the present invention;
in the figure: 1. a conveying track;
a conveying assembly: 21. a drive roll; 22. a servo motor; 23. a driven roller; 24. a conveyor belt;
a limiting component: 31. a threaded sleeve; 32. a screw; 33. a gear a; 34. a gear b; 35. a stepping motor; 36. a limiting plate;
4. a soft cushion; 5. an anti-collision plate; 6. a through hole; 7. a slide bar; 8. a bearing frame.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Examples
Referring to fig. 1-2, the present invention provides the following technical solutions: the wafer sorting machine with the protection function comprises a conveying rail 1, wherein a conveying assembly is arranged on the inner wall of the conveying rail 1, the upper surface and the lower surface of the conveying rail 1 are fixedly connected with one surfaces, opposite to two object bearing frames 8, of the two object bearing frames respectively, and limiting assemblies are arranged on the upper surface and the lower surface of the conveying rail 1.
Specifically, the conveying assembly comprises a driving roller 21 and a driven roller 23 which are rotatably connected with the left side and the right side of the lower surface of the inner wall of the conveying track 1, the outer surface of the driving roller 21 is in transmission connection with the outer surface of the driven roller 23 through a conveying belt 24, the top end of the driven roller 23 is rotatably connected with the upper surface of the inner wall of the conveying track 1, the top end of the driving roller 21 is fixedly connected with an output shaft of a servo motor 22 through a bearing and a rotating shaft which are clamped on the upper surface of the inner wall of the conveying track 1, and the servo motor 22 is installed on the left side of the upper surface of the conveying track 1;
the servo motor 22 drives the driving roller 21 to rotate, the driving roller 21 rotates to drive the driven roller 23 to rotate through the conveying belt 24, and then the round crystal is conveyed, classified and sorted through the conveying belt 24.
Specifically, a plurality of anti-collision plates 5 are symmetrically and fixedly connected to the front side of the conveying belt 24;
the anti-collision plate 5 can separate the round crystals to avoid mutual collision of the round crystals.
Specifically, the limiting assembly comprises two stepping motors 35 arranged on the upper surface and the lower surface of the conveying track 1, an output shaft of each stepping motor 35 is fixedly connected with the upper surface of a gear b34, the outer surface of the gear b34 is meshed with the outer surface of a gear a33, the lower surface of the gear a33 is fixedly connected with the upper surface of a threaded sleeve 31, the inner wall of the threaded sleeve 31 is in threaded connection with a screw rod 32, the outer surface of the threaded sleeve 31 is fixedly connected to the inner wall of a bearing clamped on the upper surface of the conveying track 1, and the bottom end of the screw rod 32 is rotatably connected with the upper surface of a limiting plate 36;
drive gear b34 and gear a33 through two step motor 35 and rotate, gear a33 is rotatory to drive thread bush 31 rotatory, and two screw rods 32 downstream are driven in two thread bush 31 rotations, and two screw rods 32 downstream drive two limiting plates 36 and are close to each other, according to the distance between two limiting plates 36 of diameter adjustment of the round brilliant, carry out spacingly to the round brilliant, avoid the round brilliant skew to appear in the in-process that removes.
Specifically, a cushion 4 is mounted on the lower surface of the limiting plate 36, and the cushion 4 is made of rubber;
the cushion 4 can prevent the limiting plate 36 from damaging the surface of the wafer when the wafer is conveyed and collides with the limiting plate 36.
Specifically, two through holes 6 are respectively formed in the left side and the right side of the upper surface of the conveying track 1, the inner walls of the through holes 6 are slidably connected with the outer surface of a sliding rod 7, and the bottom end of the sliding rod 7 is fixedly connected with the upper surface of a limiting plate 36;
the screw 32 drives the limiting plate 36 to move in the same direction, the limiting plate 36 moves to drive the sliding rod 7 to move in the same direction in the through hole 6, the limiting plate 36 is limited by the through hole 6 and the limiting rod, and the limiting plate 36 is prevented from shaking in the moving process.
The utility model discloses a theory of operation and use flow:
the utility model, when in use;
the servo motor 22 drives the driving roller 21 to rotate, the driving roller 21 rotates to drive the driven roller 23 to rotate through the conveying belt 24, and then the conveying belt 24 conveys, classifies and sorts the round crystals, and the anti-collision plate 5 can separate the round crystals to avoid mutual collision of the round crystals;
two step motor 35 drive gear b34 and gear a33 are rotatory, and gear a33 is rotatory to drive thread bush 31 rotatory, and two screw rods 32 of the rotatory drive of two thread bush 31 move down, and two screw rods 32 move down and drive two limiting plates 36 and be close to each other, and according to the distance between two limiting plates 36 of diameter adjustment of circle brilliant, carry out spacingly to the circle brilliant, avoid the round brilliant skew to appear in the in-process that removes.
It is well within the skill of those in the art to implement, without undue experimentation, the present invention as directed to circuits and electronic components and modules that are not software and method improvements.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides a wafer sorter with safeguard function, includes delivery track (1), its characterized in that: the inner wall of the conveying track (1) is provided with a conveying assembly, the upper surface and the lower surface of the conveying track (1) are fixedly connected with the opposite surfaces of the two object bearing frames (8) respectively, and the upper surface and the lower surface of the conveying track (1) are provided with limiting assemblies.
2. The wafer sorting machine with the protection function as claimed in claim 1, wherein: conveying assembly includes and rotates drive roll (21) and driven voller (23) of being connected with delivery track (1) inner wall lower surface left and right sides, the surface of drive roll (21) passes through conveyer belt (24) and is connected with the outward appearance transmission of driven voller (23), the top of driven voller (23) is connected with the upper surface rotation of delivery track (1) inner wall, the top of drive roll (21) is through the bearing of delivery track (1) inner wall upper surface joint and the output shaft rigid coupling of pivot and servo motor (22), the left side at delivery track (1) upper surface is installed in servo motor (22).
3. The wafer sorting machine with the protection function as claimed in claim 2, wherein: the front surface of the conveying belt (24) is symmetrically and fixedly connected with a plurality of anti-collision plates (5).
4. The wafer sorting machine with the protection function as claimed in claim 1, wherein: spacing subassembly is including installing two step motor (35) at delivery track (1) upper surface and lower surface, the output shaft of step motor (35) and the upper surface rigid coupling of gear b (34), the surface of gear b (34) and the surface engagement of gear a (33), the lower surface of gear a (33) and the upper surface rigid coupling of thread bush (31), the inner wall threaded connection of thread bush (31) has screw rod (32), the bearing inner wall of the surface rigid coupling of thread bush (31) at delivery track (1) upper surface joint, the bottom of screw rod (32) is connected with the upper surface rotation of limiting plate (36).
5. The wafer sorting machine with the protection function as claimed in claim 4, wherein: the lower surface of the limiting plate (36) is provided with a cushion (4), and the cushion (4) is made of rubber.
6. The wafer sorting machine with the protection function as claimed in claim 4, wherein: two through-holes (6) have been seted up respectively to the left and right sides of delivery track (1) upper surface, the surface sliding connection of through-hole (6) inner wall and slide bar (7), the bottom of slide bar (7) and the upper surface rigid coupling of limiting plate (36).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221417916.3U CN217740481U (en) | 2022-06-08 | 2022-06-08 | Wafer sorter with safeguard function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221417916.3U CN217740481U (en) | 2022-06-08 | 2022-06-08 | Wafer sorter with safeguard function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217740481U true CN217740481U (en) | 2022-11-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221417916.3U Active CN217740481U (en) | 2022-06-08 | 2022-06-08 | Wafer sorter with safeguard function |
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| Country | Link |
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| CN (1) | CN217740481U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117352440A (en) * | 2023-12-05 | 2024-01-05 | 青岛育豪微电子设备有限公司 | Semiconductor cooling device |
-
2022
- 2022-06-08 CN CN202221417916.3U patent/CN217740481U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117352440A (en) * | 2023-12-05 | 2024-01-05 | 青岛育豪微电子设备有限公司 | Semiconductor cooling device |
| CN117352440B (en) * | 2023-12-05 | 2024-04-12 | 青岛育豪微电子设备有限公司 | Semiconductor cooling device |
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