CN217728668U

CN217728668U - Three-axis alignment platform

Info

Publication number: CN217728668U
Application number: CN202222049629.8U
Authority: CN
Inventors: 杨登丰; 刘文锋
Original assignee: Tgb Precision Technology Shenzhen Co ltd
Current assignee: Tgb Precision Technology Shenzhen Co ltd
Priority date: 2022-08-04
Filing date: 2022-08-04
Publication date: 2022-11-04
Anticipated expiration: 2032-08-04

Abstract

The utility model relates to a three-axis alignment platform, belonging to the technical field of alignment platforms, comprising a mounting support plate, two mounting platforms, and a transverse driving shaft and a longitudinal driving shaft which are arranged on the mounting support plate, wherein each transverse driving shaft comprises a transverse driving component and an X sliding block, and the transverse driving component is connected with the X sliding block through an X connecting piece; the longitudinal driving shaft comprises a longitudinal driving assembly and a Y sliding block, and the longitudinal driving assembly is connected with the Y sliding block through a Y connecting piece; the sliding directions of the X sliding block and the Y sliding block on the installation support plate are mutually vertical, and the installation platform is arranged at the tops of the transverse driving shaft and the longitudinal driving shaft. The method and the device have the effect of overcoming the defect that the space utilization rate of the alignment platform is low.

Description

Three-axis alignment platform

Technical Field

The application relates to the technical field of alignment platforms, in particular to a three-axis alignment platform.

Background

With the continuous progress of society and the rapid development of science and technology, the requirements on the processing precision and the like of a plurality of products are higher and higher, so that the requirements on corresponding processing equipment are higher and higher. At present, all need use the counterpoint platform in equipment such as semiconductor, LCD manufacturing, high-accuracy laminating or detection, the counterpoint platform can the accurate adjustment treat the position of processing product, the alignment precision of counterpoint platform has direct influence to the processingquality of product, for example UVW counterpoint platform etc. UVW counterpoint platform usually through the discernment to the location reference point, adopt the image counterpoint algorithm of sub-pixel level to calculate the offset of testee in XY theta direction, and the corresponding amount of movement of automatic control moving platform reverse movement, correct the position of testee, realize accurate automatic alignment location.

In the related technology, the UVW alignment platform is provided with a U driving shaft, a V driving shaft and a W driving shaft, the three driving shafts are arranged on the platform in a triangular mode, and alignment detection can be only carried out on parts with larger sizes and in the positive direction, and the UVW alignment platform cannot be suitable for alignment detection of strip-shaped parts; on the other hand, each of the U driving shaft, the V driving shaft and the W driving shaft is provided with a motor, a screw rod, a nut and an XY theta sliding block, the nut is connected to the screw rod in a threaded mode, and the motor can drive the nut to reciprocate on the screw rod; the nut is located the XY theta sliding block for the thickness of XY theta sliding block is great, and then makes the thickness of whole counterpoint platform great, causes the structure to interfere, is unfavorable for the counterpoint to detect the part.

In view of the above-mentioned related art, the inventors consider that there is a drawback of low space utilization of the alignment stage.

SUMMERY OF THE UTILITY MODEL

In order to improve the space utilization who counterpoints the platform, this application provides a triaxial counterpoints platform.

The application provides a three-axis alignment platform adopts following technical scheme:

a three-axis alignment platform comprises a mounting support plate, a mounting platform, and transverse driving shafts and longitudinal driving shafts which are arranged on the mounting support plate, wherein the number of the transverse driving shafts is two, each transverse driving shaft comprises a transverse driving assembly and an X sliding block, and the transverse driving assemblies are connected with the X sliding blocks through X connecting pieces; the longitudinal driving shaft comprises a longitudinal driving assembly and a Y sliding block, and the longitudinal driving assembly is connected with the Y sliding block through a Y connecting piece; the sliding directions of the X sliding block and the Y sliding block on the installation support plate are mutually perpendicular, and the installation platform is arranged at the tops of the transverse driving shaft and the longitudinal driving shaft.

By adopting the technical scheme, the transverse driving assembly is connected with the X sliding block through the X connecting piece and can drive the X sliding block to slide on the installation carrier plate, and the longitudinal driving assembly is connected with the Y sliding block through the Y connecting piece and can drive the Y sliding block to slide on the installation carrier plate so as to be used for carrying out alignment detection on parts;

compare in the correlation technique nut and be located XY theta sliding block, this application will be respectively with horizontal drive assembly and X sliding block and vertical drive assembly and Y sliding block equal division and set up alone, horizontal drive assembly drives the X sliding block through the X connecting piece and removes, and vertical drive assembly drives the Y sliding block through the Y connecting piece and removes, thereby make X sliding block and Y sliding block all reduce the thickness of a nut, thereby make the thickness of whole triaxial counterpoint platform less, can effectually improve the space utilization of triaxial counterpoint platform, and the effectual structure that has reduced to the spare part counterpoint detection is interfered.

Optionally, the X sliding block and the Y sliding block are both located on the same straight line of the installation support plate, one side of each X sliding block, which is far away from the installation support plate, is connected with a Y driven block in a sliding manner, one side of each Y sliding block, which is far away from the installation support plate, is connected with an X driven block in a sliding manner, and the X driven block is connected with one of the Y driven blocks through a fixing plate.

By adopting the technical scheme, the X sliding block and the Y sliding block are both positioned on the same straight line of the mounting carrier plate, so that the space utilization rate of the three-axis alignment platform is effectively improved; in addition, when the X driven block is connected with one of the Y driven blocks through the fixing plate, the Y sliding block can drive the mounting platform to move along the Y-axis direction.

Optionally, one side of each Y driven block, which is far away from the X sliding block, is rotatably connected with a θ plate, and the θ plate is fixedly connected with one side of the mounting platform.

Through adopting above-mentioned technical scheme, theta board and Y driven piece rotate to be connected to realized the rotation counterpoint test to the part.

Optionally, be provided with the X slide rail on installation support plate and the Y sliding block, and the direction that sets up of X slide rail is unanimous with the glide direction of X sliding block, X sliding block and X driven piece all slide with the X slide rail and are connected.

By adopting the technical scheme, the X slide rail is arranged on the installation support plate, so that the sliding connection between the X slide block and the installation support plate is realized; and the Y sliding block is provided with an X sliding rail, so that the sliding connection of the X driven block along with the X sliding block is realized.

Optionally, all be provided with the Y slide rail on installation support plate and the X sliding block, and the direction that sets up of Y slide rail is unanimous with the glide direction of Y sliding block, Y sliding block and Y driven piece all slide with the X slide rail and are connected.

By adopting the technical scheme, the Y slide rail is arranged on the mounting support plate, so that the sliding connection between the Y slide block and the mounting support plate is realized; and the Y slide rail is arranged on the X slide block, so that the Y driven block is connected with the Y slide block in a sliding manner along with the Y slide block.

Optionally, the transverse driving assembly comprises a transverse motor and a transverse screw rod, the transverse screw rod is connected with the transverse motor, a transverse nut is connected to the transverse screw rod in a threaded manner, and the transverse nut is connected with the X connecting piece; the longitudinal driving assembly comprises a longitudinal motor and a longitudinal screw rod, the longitudinal screw rod is connected with the longitudinal motor, a longitudinal nut is in threaded connection with the longitudinal screw rod, and the longitudinal nut is connected with the Y connecting piece.

By adopting the technical scheme, the transverse nut is connected with the X connecting piece, and the X connecting piece is connected with the X sliding block, so that the transverse nut can drive the X sliding block to move through the X connecting piece; the general nut is connected with the Y connecting piece, and the Y connecting piece is connected with the Y sliding block, so that the longitudinal nut can drive the Y sliding block to move through the Y connecting piece; therefore, the transverse driving assembly drives the X sliding block to move through the X connecting piece, and the longitudinal driving assembly drives the Y sliding block to move through the Y connecting piece.

Optionally, the mounting support plate is further provided with a mounting groove, and the transverse motor, the longitudinal motor, the X sliding block and the Y sliding block are all arranged in the mounting groove.

Through adopting above-mentioned technical scheme, horizontal motor, vertical motor, X sliding block and Y sliding block all set up in the mounting groove for horizontal motor, vertical motor, X sliding block and Y sliding block have reduced the mounting height for the installation support plate, thereby have reduced the thickness of triaxial counterpoint platform.

Optionally, the transverse nut and the longitudinal nut are both provided with induction sheets, the mounting support plate is provided with an induction seat, and the induction seat is used for inducing the positions of the induction sheets.

Through adopting above-mentioned technical scheme, the response seat is used for responding to the position of piece to be used for adjusting the distance that slides of X sliding block and Y sliding block on the installation support plate.

In summary, the present application includes at least one of the following beneficial technical effects:

1. according to the three-axis alignment platform, the transverse driving assembly and the X sliding block as well as the longitudinal driving assembly and the Y sliding block are respectively and independently arranged, the transverse driving assembly drives the X sliding block to move through the X connecting piece, and the longitudinal driving assembly drives the Y sliding block to move through the Y connecting piece, so that the thickness of a nut is reduced for both the X sliding block and the Y sliding block, the thickness of the whole three-axis alignment platform is smaller, the space utilization rate of the three-axis alignment platform can be effectively improved, and the structural interference of alignment detection of parts is effectively reduced;

the 2.X sliding block and the Y sliding block are both positioned on the same straight line for mounting the carrier plate, so that the space utilization rate of the three-axis alignment platform is effectively improved; in addition, when the X driven block is connected with one of the Y driven blocks through the fixing plate, the Y sliding block can drive the mounting platform to move along the Y-axis direction;

3. the induction seat is used for inducing the position of the induction sheet so as to adjust the sliding distance of the X sliding block and the Y sliding block on the installation carrier plate.

Drawings

Fig. 1 is a schematic overall structure diagram of a three-axis alignment platform according to an embodiment of the present application.

Fig. 2 is a schematic partial structural diagram of a three-axis alignment platform according to an embodiment of the present application.

Description of reference numerals: 1. mounting a carrier plate; 11. mounting a platform; 12. an X slide rail; 13. a Y slide rail; 14. mounting grooves; 15. an induction seat; 2. a transverse drive shaft; 21. a lateral drive assembly; 211. a transverse motor; 212. a transverse screw rod; 213. a transverse nut; 2131. an induction sheet; 22. an X slider; 221. a Y slave block; 222. a fixing plate; 223. a theta plate; 23. an X connection member; 3. a longitudinal drive shaft; 31. a longitudinal drive assembly; 311. a longitudinal motor; 312. a longitudinal screw rod; 313. a longitudinal nut; 32. a Y slider; 321. an X follower block; 322. and a Y connecting piece.

Detailed Description

The present application is described in further detail below with reference to the attached drawing figures.

The embodiment of the application discloses triaxial counterpoint platform. Referring to fig. 1 and 2, the three-axis aligning platform includes a mounting carrier plate 1, a transverse driving shaft 2, a longitudinal driving shaft 3 and a mounting platform 11, in the embodiment of the present application, the mounting carrier plate 1 is a rectangular plate structure. In the embodiment of the present application, the number of the transverse driving shafts 2 is two, and the two transverse driving shafts 2 are longitudinally installed at the left and right sides of the top of the mounting carrier plate 1. The number of the longitudinal driving shafts 3 is one, the longitudinal driving shafts 3 are transversely installed at the rear side of the top of the mounting carrier plate 1, and the longitudinal driving shafts 3 are positioned between the two transverse driving shafts 2. The mounting is mounted on top of a transverse drive shaft 2 for driving the mounting platform 11 in the X-axis direction and a longitudinal drive shaft 3 for driving the mounting platform 11 in the Y-axis direction.

The transverse drive shaft 2 includes a transverse drive assembly 21 and an X slide block 22, and the transverse drive assembly 21 is connected with the X slide block 22 through an X connecting member 23, in this embodiment, the X connecting member 23 is a connecting plate. The transverse drive assembly 21 includes a transverse motor 211, a transverse screw 212 and a transverse nut 213. The transverse motor 211 is arranged on the upper surface of the mounting support plate 1 through a screw, the transverse screw rod 212 is in transmission connection with the transverse motor 211, and the transverse nut 213 is in threaded connection with the transverse screw rod 212, so that the transverse motor 211 can drive the transverse nut 213 to reciprocate on the screw rod. The cross nut 213 is connected to the X link 23 by a screw, and the X link 23 is connected to the X slider 22 by a screw.

The longitudinal driving shaft 3 includes a longitudinal driving assembly 31 and a Y sliding block 32, the longitudinal driving assembly 31 is connected with the Y sliding block 32 through a Y connecting member 322, and in the embodiment of the present application, the Y connecting member 322 is a connecting plate. The longitudinal driving assembly 31 includes a longitudinal motor 311, a longitudinal screw 312 and a longitudinal nut 313. The longitudinal motor 311 is arranged on the upper surface of the mounting carrier plate 1 through a screw, the longitudinal screw 312 is in transmission connection with the longitudinal motor 311, and the longitudinal nut 313 is in threaded connection with the longitudinal screw 312, so that the longitudinal motor 311 can drive the longitudinal nut 313 to reciprocate on the screw. The longitudinal nut 313 is connected to the Y link 322 by a screw, and the Y link 322 is connected to the Y slider 32 by a screw.

The mounting carrier plate 1 is provided with a mounting groove 14, and the transverse motor 211, the longitudinal motor 311, the X sliding block 22 and the Y sliding block 32 are all located in the mounting groove 14. In the embodiment of the present application, two X sliding blocks 22 and one Y sliding block 32 are located on the same line on the mounting carrier board 1. Therefore, the structure of the whole three-axis alignment platform is more compact, the space utilization rate is effectively improved, and the alignment detection of the strip-shaped part can be more suitable, so that the applicability is improved.

The transverse nut 213 and the longitudinal nut 313 are both connected with an induction sheet 2131 through screws, the positions, close to the transverse nut 213 and the longitudinal nut 313, on the mounting support plate 1 are respectively connected with an induction seat 15 through screws, and one end of the induction sheet 2131 is located in the induction seat 15. The sensing seat 15 is used for sensing the position of the sensing piece 2131, so as to adjust the sliding distance of the X sliding block 22 and the Y sliding block 32 on the mounting carrier board 1.

The side of the X-slider 22 away from the mounting carrier 1 is connected with a Y-follower 221 in a sliding manner, and the sliding direction of the Y-follower 221 is consistent with that of the Y-slider 32. The side of the Y slider 32 away from the mounting carrier 1 is slidably connected with the X follower 321, and the sliding direction of the X follower 321 is the same as that of the X slider 22. In the embodiment of the present application, the fixing plate 222 is connected to the X driven block 321 through a screw, and the side of the fixing plate 222 away from the X driven block 321 is connected to one of the Y driven blocks 221 through a screw, so that the X driven block 321 and the Y driven block 221 synchronously slide.

In the embodiment of the present application, the side of the two Y follower blocks 221 away from the X slide block 22 is rotatably connected with the θ plate 223, and the θ plate 223 is connected with the side of the mounting platform 11 facing the mounting carrier plate 1 by screws. In addition, the mounting platform 11 is not connected to the X follower block 321.

Compared with the prior art that three UVW driving shafts are arranged on a platform in a triangular mode, the three UVW driving shafts can only carry out alignment detection on parts which are large in size and in the positive direction, when long-strip-shaped parts are detected, if the distance between a U shaft and a V shaft is simply lengthened and then the W shaft is close to the inner side, the motion amplitude of the W shaft is small, the problem that the control difficulty of the W shaft is greatly improved can occur, an algorithm for controlling the motor motion of the UVW driving shafts needs to be more complex, and the control precision is influenced; therefore, in the embodiment of the present application, the θ plate 223 is not rotatably disposed on the X driven block 321, so that the difficulty of controlling the W axis is greatly reduced, the algorithm for controlling the movement of the transverse motor 211 and the longitudinal motor 311 is simple, the control precision is improved, and the alignment detection of the elongated part is more facilitated.

The mounting carrier plate 1 is provided with an X slide rail 12 in the mounting groove 14 for mounting the X slide block 22 and the upper surface of the Y slide block 32, the arrangement direction of the X slide rail 12 is consistent with the sliding direction of the X slide block 22, and the X slide block 22 and the X driven block 321 are respectively connected with the X slide rail 12 in a sliding manner. The mounting carrier plate 1 is provided with a Y slide rail 13 in the mounting groove 14 for mounting the Y slide block 32 and the upper surface of the X slide block 22 through screws, the arrangement direction of the Y slide rail 13 is consistent with the sliding direction of the Y slide block 32, and the Y slide block 32 and the Y driven block 221 are respectively connected with the Y slide rail 13 in a sliding manner.

The implementation principle of the three-axis alignment platform in the embodiment of the application is as follows: when the alignment detection of the elongated part to be detected is needed, firstly, the elongated part is installed on the installation platform 11, then, the two transverse motors 211 are started to respectively drive the X sliding blocks 22 to move on the installation carrier plate 1 in the same direction, and the X sliding blocks can be used for aligning the elongated part in the X-axis direction; then the transverse motor 211 stops driving, the longitudinal motor 311 starts, the Y sliding block 32 is driven to move on the mounting carrier plate 1, the Y sliding block 32 drives the X driven block 321 to move synchronously, and since the X driven block 321 is connected with one of the Y driven blocks 221 through the fixing plate 222, the Y sliding block 32 can drive all the Y driven blocks 221 to move synchronously for aligning the elongated part in the Y axis direction; then, the longitudinal motor 311 stops driving, the two transverse motors 211 respectively drive the X sliding block 22 to slide in opposite directions, the X sliding block 22 drives the Y driven block 221 to move synchronously, and the θ plate 223 is rotatably connected to the Y driven block 221, so that the mounting platform 11 rotates relative to the Y driven block 221, and the long strip-shaped part is aligned rotationally.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. A triaxial counterpoint platform which characterized in that: the mounting device comprises a mounting carrier plate (1), a mounting platform (11), and transverse driving shafts (2) and longitudinal driving shafts (3) which are arranged on the mounting carrier plate (1), wherein the number of the transverse driving shafts (2) is two, each transverse driving shaft (2) comprises a transverse driving assembly (21) and an X sliding block (22), and the transverse driving assemblies (21) are connected with the X sliding blocks (22) through X connecting pieces (23); the longitudinal driving shaft (3) comprises a longitudinal driving assembly (31) and a Y sliding block (32), and the longitudinal driving assembly (31) is connected with the Y sliding block (32) through a Y connecting piece (322); the sliding directions of the X sliding block (22) and the Y sliding block (32) on the installation carrier plate (1) are mutually vertical, and the installation platform (11) is arranged at the tops of the transverse driving shaft (2) and the longitudinal driving shaft (3).

2. The tri-axial alignment platform of claim 1, wherein: x sliding block (22) and Y sliding block (32) all are located the collinear of installation support plate (1), each it is connected with Y follower (221) to keep away from one side of installation support plate (1) on X sliding block (22) and slide, it is connected with X follower (321) to keep away from one side of installation support plate (1) and slide on Y sliding block (32), just X follower (321) are connected through fixed plate (222) with one of them Y follower (221).

3. The tri-axial alignment platform of claim 2, wherein: and one side of each Y driven block (221), which is far away from the X sliding block (22), is rotatably connected with a theta plate (223), and the theta plate (223) is fixedly connected with one side of the mounting platform (11).

4. The tri-axial alignment platform of claim 2, wherein: the X-shaped sliding block is characterized in that X sliding rails (12) are arranged on the installation carrier plate (1) and the Y sliding block (32), the arrangement direction of the X sliding rails (12) is consistent with the sliding direction of the X sliding block (22), and the X sliding block (22) and the X driven block (321) are connected with the X sliding rails (12) in a sliding mode.

5. The tri-axial alignment platform of claim 2, wherein: all be provided with Y slide rail (13) on installation support plate (1) and X sliding block (22), and the direction that sets up of Y slide rail (13) is unanimous with the glide direction of Y sliding block (32), Y sliding block (32) and Y driven piece (221) all slide with X slide rail (12) and are connected.

6. The tri-axial alignment platform of claim 1, wherein: the transverse driving assembly (21) comprises a transverse motor (211) and a transverse screw rod (212), the transverse screw rod (212) is connected with the transverse motor (211), a transverse nut (213) is in threaded connection with the transverse screw rod (212), and the transverse nut (213) is connected with the X connecting piece (23); the longitudinal driving assembly (31) comprises a longitudinal motor (311) and a longitudinal screw rod (312), the longitudinal screw rod (312) is connected with the longitudinal motor (311), a longitudinal nut (313) is in threaded connection with the longitudinal screw rod (312), and the longitudinal nut (313) is connected with a Y connecting piece (322).

7. The tri-axial alignment platform of claim 6, wherein: still seted up mounting groove (14) on installation support plate (1), horizontal motor (211), vertical motor (311), X sliding block (22) and Y sliding block (32) all set up in mounting groove (14).

8. The tri-axial alignment platform of claim 6, wherein: the transverse nut (213) and the longitudinal nut (313) are both provided with induction pieces (2131), the mounting carrier plate (1) is provided with an induction seat (15), and the induction seat (15) is used for inducing the positions of the induction pieces (2131).