CN201034559Y - Device for testing planarity and depth of parallelism of clintheriform workpieces top and plane - Google Patents

Device for testing planarity and depth of parallelism of clintheriform workpieces top and plane Download PDF

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Publication number
CN201034559Y
CN201034559Y CNU2007200693157U CN200720069315U CN201034559Y CN 201034559 Y CN201034559 Y CN 201034559Y CN U2007200693157 U CNU2007200693157 U CN U2007200693157U CN 200720069315 U CN200720069315 U CN 200720069315U CN 201034559 Y CN201034559 Y CN 201034559Y
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China
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vertical
plate
workpiece
plane
base
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CNU2007200693157U
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Chinese (zh)
Inventor
李迎伟
李明
李伟
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上海大学
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Priority to CNU2007200693157U priority Critical patent/CN201034559Y/en
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Publication of CN201034559Y publication Critical patent/CN201034559Y/en

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Abstract

The utility model relates to a detecting device for detecting the flatness and parallelism of upper and lower planes of a tabular workpiece. The device includes a base, one side of the base is provided with a transverse moving mechanism, the transverse moving mechanism is provided with a vertical moving mechanism with a laser sensor. A grating scale is arranged on the transverse moving mechanism, simultaneity, the moving part of grating scale is fixedly connected with the vertical moving mechanism with the laser sensor. Other side of the base is provided with a longitudinal slip platform, a workpiece detecting platform is arranged on the slip platform, while in work, the upper and lower laser sensors are transversely moving along the upper and lower directions of the work detecting platform. The device has characteristics in easy structure, convenient to use, fast to detecting and high measuring accuracy, which is suitable to the industry such as the productive industry of ray guard plate and others that need accurately detecting the flatness and parallelism of upper and lower planes of the production.

Description

The flatness of lower plane and depth of parallelism pick-up unit on the plate workpiece
Technical field
The utility model relates to a kind of pick-up unit that the flatness and the depth of parallelism of lower plane on the plate workpiece are carried out non-contact measurement synchronously, and is particularly a kind of at the flatness of last lower plane and the special detection device of the exigent sheet-like workpieces of the depth of parallelism.
Background technology
The flatness of present known measuring workpieces and depth of parallelism technology are carried out under three dimensional coordinate measuring machine, this is not the specialized equipment of a kind of special measurement plane degree and the depth of parallelism, be characterized in contact type measurement, promptly realize measuring with the probe contact workpiece of three dimensional coordinate measuring machine, and in measuring process, can not gather the position data of putting on two planes to be measured of workpiece simultaneously, be to turn the survey another side again after workpiece must have been surveyed the data that simultaneously go up point, in computing machine, simulate two planes again according to these points again, further estimate the depth of parallelism on two planes, this measurement means costs dearly, and efficient is not high, only be strict with the measurement of the workpiece of plane parallel degree up and down for some, this measurement means is just not too practical.Develop a kind of flatness of contactless measurement flat panel workpieces and the special detection device of the depth of parallelism, be that measure portion does not need contact workpiece to finish, and can measure the special detection device of the flatness and the depth of parallelism of flat panel workpieces to the data that the collection point is carried out on workpiece two surfaces to be measured simultaneously, can reduce some measurement expense, improve efficiency of measurement the single manufacturing enterprise of product measurement pattern requirement.
The utility model content
The purpose of this utility model is the defective at prior art, and the inspection amount device of the flatness and the depth of parallelism of lower plane on a kind of plate workpiece is provided, and improves efficiency of measurement, reduces production costs.
For achieving the above object, the utility model adopts following technical proposals:
The flatness of lower plane and depth of parallelism pick-up unit on a kind of plate workpiece, comprise base, work piece platform and laser sensor, it is characterized in that a side is installed a transverse moving mechanism by a fixing perpendicular side plate above the described base, laser sensor vertical movement mechanism of fixed installation fixedly mounts two described laser sensors respectively on the described transverse moving mechanism on the vertical moving frame of the upper and lower side of described laser sensor vertical movement mechanism; But described base opposite side is installed the vertically slide unit of positioning of a level, workpiece sensing platform of fixed installation on the described slide unit, and the centre of described workpiece sensing platform place work piece has a laterally long groove of wearing; During work, described two laser sensors are in the upper and lower of described work piece platform respectively and aim at described horizontal length and wear groove.
The structure of above-mentioned transverse moving mechanism is: a fixing base is fixedlyed connected with described perpendicular side plate, the vertical plane of described fixing base up and down both sides each fix a cross slide way, two cross slide waies slide with two traversing slide blocks respectively and mate, two traversing slide blocks are fixedlyed connected the cover plate of described laser sensor vertical movement mechanism with one fixedly connected, the fixedly connected end plate of one end of described fixing base, fixed installation one motor on this end plate; A horizontal drive screw makes the one end connect the output terminal of described motor by bearings, and the other end and nut revolve joins, and described nut is fixedly installed on the inboard vertical plane of described fixing base.
The upper side of the fixing base of above-mentioned transverse moving mechanism is installed a grating chi, the movable part of described grating chi is fixedly connected by web joint, and the vertical web joint that is connected transverse moving mechanism on described web joint and the laser sensor vertical movement mechanism is fixedly connected.
One side of above-mentioned base is equipped with two near switch bracket, and each is near respectively installing one near switch on the switch bracket, and be equipped with on the side of slide unit one corresponding to it switch block.
The structure of above-mentioned laser sensor vertical mechanism is: a vertical substrate is fixedlyed connected with cover plate by described vertical web joint, the both sides, front and back of the vertical plane of vertical substrate, fix two vertical guide stem by block, there is up and down each two vertical slipper fixedly connected with each minor flaps up and down respectively, up and down the two minor flaps vertical moving frame of each fixedly connected installation laser sensor respectively; A vertical drive screw rod is arranged by bearings, make the one end connect an output shaft that is installed on the motor on the vertical substrate one end fixed charge method end plate, and the other end and two drive nuts revolve and join, and described two drive nuts are fixedly mounted on respectively up and down on two inboard vertical planes of minor flaps; One side of described vertical substrate is respectively installed one respectively near switch by two near switch bracket, correspondingly installs one near sensor block on the side of minor flaps on described.
Above-mentioned slide unit mechanism is: two horizontal longitudinal rails are fixedly mounted on the described base, four guide rail slide blocks slide with described two horizontal longitudinal rails respectively and mate, four fixedly connected supports of guide rail slide block, the described workbench of fixed installation above the support, a side of support is equipped with positive stop and near sensor block.
Electric mounting box is arranged under the above-mentioned base, the driver of two motors is housed in the electric mounting box, the power supply unit of two laser sensors and grating chi with and the input computing machine the data processing circuit, the communication line of the input computing machine of contact-making switch etc., and these data circuits are linked to each other with a control computer; Control computer internal configurations one blocks of data capture card, the signal of described electrical equipment except that the grating chi all links to each other with this data collecting card by above-mentioned communication line with data, and in compunication, accept computer control; Described grating chi carries out exchanges data by the corresponding interface and the computing machine of computing machine.
The utility model compared with prior art, have following conspicuous characteristics and advantage: because the utility model adopts two laser sensors simultaneously lower plane on the workpiece to be carried out the non-contact data collection, and can utilize computer controlled automatic, thereby improved efficient, reduced the measurement cost.The utility model is simple in structure, easy to operate, detection speed is fast, and accuracy of detection height (this precision depends on the precision of sensor) is applicable to as special production industries that the flatness and the depth of parallelism of lower plane on the plate workpiece are had relatively high expectations such as radiation protection plates.
Description of drawings
Fig. 1 is the structural representation stereographic map of an embodiment of the present utility model;
Fig. 2 is the structural representation stereographic map of transverse moving mechanism in Fig. 1 example;
Fig. 3 is the structural representation stereographic map of laser sensor vertical movement mechanism in Fig. 1 example;
Fig. 4 is the structural representation stereographic map of slide unit in Fig. 1 example
Embodiment
A preferred embodiment accompanying drawings of the present utility model is as follows:
Fig. 1 is the flatness of lower plane on this plate workpiece and the structural perspective of depth of parallelism pick-up unit, it comprises: base 1, it is provided with a perpendicular side plate 2, the side that this perpendicular side plate 2 is positioned at directly over the base 1 is equipped with a transverse moving mechanism 3, this transverse moving mechanism 3 is connected with laser sensor vertical movement mechanism 7 by vertical web joint 20, and driving laser sensor vertical movement mechanism 7 traverse motions, simultaneously, these transverse moving mechanism 3 tops are equipped with a grating chi 4, the movable part 6 of grating chi 4 is connected with vertical web joint 20 by web joint 5, thereby grating chi 4 can collect the shift values that laser sensor vertical movement mechanism 7 laterally moves; Described laser sensor vertical movement mechanism 7 is used for drive installation two laser sensors 9,10 thereon and moves up and down, and the position data of gathering workpiece vertical direction of the point on two planes about in the of 11 by described two laser sensors 9,10; With respect to the opposite side that perpendicular side plate 2 is installed one slide unit 14 is installed on the base 1, this slide unit 14 is used to place flat panel workpieces 11 and moves on the direction perpendicular to laser sensor 9,10 direction of measurement and optical grating ruler measurement direction, laser sensor is moved, so that the position data of the point of a plurality of positions on the acquisition plane on this direction at the measurement point on the workpiece; One side of base 1 is equipped with two near switch bracket 17,18, near installing respectively on the switch bracket 17,18 near switch 16,19, is used for detecting the position that slide unit 14 moves near switch 16,19 on base 1; The driver and the data communication apparatus of each motor can be installed in the box under the base 1, and these drivers are connected with a computing machine with data communication apparatus, and controlled by it, and this computing machine is handled coming on the self-test device data of each sensor.
Fig. 2 is the structural perspective of transverse moving mechanism 3 in Fig. 1 example, and this transverse moving mechanism 3 mainly is made up of end plate 27, motor 26, bearing 28, horizontal drive screw 24, nut 21, cover plate 22, two horizontal moving sliders 31,23, two cross slide waies 29,25 and fixing base 30.One end of fixing base 30 is installed vertical its positive end plate 27, a motor 26 is installed in the outside of end plate 27, these motor 26 main shafts link to each other with horizontal drive screw 24 1 ends, described horizontal drive screw 24 other ends are supported by bearing 28, laterally on the drive screw 24 nut 21 is installed, a cover plate 22 is installed in these nut 21 tops; Other two parallel sides of fixing base 30 are installed two cross slide waies 29,25 respectively, and a supporting traversing slide block 31 and 23 is installed respectively on two cross slide waies 29,25, and traversing slide block 31 is all fixedlyed connected with cover plate 22 with 23; This cover plate 22 is to link to each other with laser sensor vertical movement mechanism 7 among Fig. 1 by the vertical web joint 20 of the middleware among Fig. 1.
Fig. 3 is the structural perspective of laser sensor vertical movement mechanism 7 in Fig. 1 example, this laser sensor vertical movement mechanism 7 is mainly by two vertical guide stem 35,37, vertical drive screw rod 36, vertical slipper 33,51,38,41, drive nut 43,53, bearing 54, block 40,32,52, minor flaps 34,39, vertical moving frame 8,15, laser sensor 9,10, near switch 45,48, near switch bracket 46,49, near sensor block 50, motor 56, end plate 31, installing plate 20 and vertically substrate 42 form.Vertically on the one side of substrate 42 two pairs of identical vertical slippers 33,51,38,41 are installed; Vertical guide stem 35,37 is installed between described two pairs of vertical slippers, and vertical slipper 33,51,38,41 can slidably reciprocate along guide rod 35,37; On the vertical substrate 42 between two pairs of vertical guide stem 35,37, the installation shaft line parallel is in the bearing 54 of two vertical guide stem axis; Vertical drive screw rod 36 is installed in the bearing 54; Two drive nuts 43,53 are installed on the vertical drive screw rod 36; One minor flaps 39,34 is installed respectively on two drive nuts 43,53; Described minor flaps 39,34 is fixedly connected on respectively on two groups of vertical slippers 33,51,38,41, and can move back and forth along the vertical guide stem axis direction together with these two groups of vertical slippers 33,51,38,41 respectively; The vertical moving frame 8,15 of two laser sensors 9,10 is installed respectively above the minor flaps 39,34; Two laser sensors 9,10 are installed respectively above the vertical moving frame 8,15, and laser sensor 9,10 lays respectively at the inboard of vertical moving frame 8,15, and it is opposite that the installation site should guarantee to send the laser radiation direction; Vertically be positioned at the outside of vertical slipper 33,51,38,41 on the substrate 42, a block 40,32,52 respectively is installed, block 40,32,52 is fixedlyed connected with vertical guide stem 35,37 respectively, thereby vertical guide stem 35,37 is fixed on the vertical substrate 42; Vertically on the end face of substrate 42 end plate 31 is installed, end plate 31 outsides are equipped with a motor 56, and motor 56 main shafts are fixedlyed connected with described vertical drive screw rod 36; Vertically install on the side of substrate 42 two near switch bracket 46,49, two near installing respectively on the switch bracket 46,49 near switch 45,48; In addition, vertically on the bottom surface of substrate 42 installing plate 20 is installed also, is used for whole laser sensor vertical movement mechanism 7 is fixed on described transverse moving mechanism 3; On slide block 51 outsides, install near sensor block 50.
Fig. 4 is the structural perspective of slide unit 14 in Fig. 1 example, and this slide unit 14 is mainly by guide rail slide block 57,58,62,64, horizontal longitudinal rail 59,61, positive stop 63, form near sensor block 65, support 60 and work piece platform 13.Described support 60 bottom surfaces are installed the guide rail slide block 57,58,62,64 of two pairs of mounting hole parallel axes respectively; Every pair of guide rail slide block is installed on the horizontal longitudinal rail 59,61 and also can slides along this guide rail, also fix a positive stop 63 on horizontal longitudinal rail 61; Workpiece detection platform 13 is installed in support 60 tops, has a laterally long groove 12 of wearing on the workpiece sensing platform 13, and workpiece 11 is placed on laterally long position of wearing directly over the groove 12 on the workpiece sensing platform 13, and support 60 lower end side are installed positive stop 63.
When the flatness of lower plane and depth of parallelism pick-up unit are worked on the plate workpiece of present embodiment, the horizontal length that the operator is placed on workpiece sensing platform 13 to flat panel workpieces 11 is worn position directly over the groove 12, and slide unit 14 push to laser detector under, make near sensor block 65 and face near switch 16, owing to adjust through installing in advance, at this moment, two laser sensors 9,10 laser just in time can be got to workbench 13 upper flat plate workpiece 11 and be on the position of groove 12, simultaneously, computer acquisition is to the state near switch, judge that slide unit 14 positions are ready, start the computer testing program, motor 56 drives vertical drive screw rod 36 and rotates, vertical drive screw rod 36 drives drive nut 43,53 move to the direction of workpiece 11 together, drive nut 43,53 drive fixed installation minor flaps 34 thereon, 39, and then drive is fixedly mounted on minor flaps 34, on 39 near switch bracket 49,46 are being with laser sensor 9,10 move in the range ability of laser sensor, because laser sensor 9,10 not need contact workpiece 11 be that detectable workpiece 11 is to its distance in beam direction, therefore, can realize non-contact measurement, at this moment, sense near sensor block 50 near switch 45, and pass to Computer signal by communication device, it is ready that computing machine judgement laser sensor begins the measuring position, computing machine is by laser sensor 9,10 gather any position data (being designated as the Z directional data) of vertical direction of workpiece 11 upper and lower surfaces, write down the grating chi reading (being designated as the directions X data) of 4 this moments simultaneously, then, control motor 26 drives screw rod 24 and rotates, screw rod 24 drives nut 21, nut drives cover plate 22 motions, cover plate 22 drags a bit of fixing distance of whole laser sensor vertical movement mechanism mounted thereto 7 motions, this segment distance is by program setting, simultaneously, the reading of computer acquisition grating chi 4, obtain the size of actual motion distance, when this reaches setting value apart from size, control motor 26 stops, begin by laser sensor 9,10 gather the position data of the vertical direction of second of flat panel workpieces 11 upper and lower surface, circulation is gone down, computing machine obtains one group of such data, and (this group is put under three-dimensional system of coordinate except top described X, Y directional data beyond the Z direction, all be designated as zero), at this moment, laser sensor vertical movement mechanism 7 moves to an end of transverse moving mechanism 3, then, the operator promotes slide unit 14 forward, make near sensor block 29 and face near switch 19, computing machine judges that slide unit 14 enters second measuring position, start computer program and enter next job step, computer control motor 26 motion in the other direction, and gather the Z directional data of the second row point, method is identical when gathering first group of point.The Y directional data all is designated as the poor of two positions in three-dimensional system of coordinate; Two row's directions X data are program settings and pass through control motor movement specific implementation.According to the data of each X, Y, Z direction, can simulate in the computing machine flat panel workpieces on lower plane, further can estimate out the flatness and the depth of parallelism of lower plane.

Claims (7)

1. the flatness and the depth of parallelism pick-up unit of lower plane on the plate workpiece, comprise base [1], workpiece sensing platform [13] and laser sensor [9,10], it is characterized in that a side is installed a transverse moving mechanism [3] by a fixing perpendicular side plate [2] above the described base [1], described transverse moving mechanism [3] is gone up a fixed installation laser sensor vertical movement mechanism [7], and the vertical moving frame of the upper and lower side of described laser sensor vertical movement mechanism [7] fixedly mounts two described laser sensors [9,101 respectively on [8,15]; Described base [1] but go up opposite side the vertically slide unit [14] of positioning of a level be installed, described slide unit [14] is gone up a fixed installation workpiece sensing platform [13], the centre that described workpiece sensing platform [13] is gone up place work piece [11] has a laterally long groove [12] of wearing; During work, described two laser sensors [9,10] are in the upper and lower of described workpiece [1] respectively and aim at described horizontal length and wear groove [12].
2. according to claims 1 described plate workpiece up and down flatness and the depth of parallelism pick-up unit on two planes, it is characterized in that, the structure of described transverse moving mechanism [3] is: a fixing base [30] is fixedlyed connected with described perpendicular side plate [2], the vertical plane of described fixing base [30] up and down both sides each fix a cross slide way [25,29], two cross slide waies [25,29] respectively with two traversing slide blocks [23,31] slip coupling, two traversing slide blocks [23,3 1] it is fixedly connected to fixedly connected the cover plate [22] of laser sensor vertical movement mechanism [7] with one, the fixedly connected end plate of one end of described fixing base [30] [27] fixedly mounts servomotor [26] on this end plate; A horizontal drive screw is supported by bearing [28], makes the one end connect the output terminal of described motor [26], and the other end and nut [21] revolve joins, and described nut [21] is fixedly installed on the inboard vertical plane of described fixing base [30].
3. the flatness of lower plane and depth of parallelism pick-up unit on the plate workpiece according to claim 2, a grating chi of top installation [4] that it is characterized in that the fixing base [30] of described transverse moving mechanism [3], the movable part [6] of described grating chi [4] is fixedly connected by web joint [5], described web joint [5] be positioned at laser sensor vertical movement mechanism [7] on to be connected the vertical web joint [20] of transverse moving mechanism [3] fixedly connected.
4. the flatness of lower plane and depth of parallelism pick-up unit on the plate workpiece according to claim 1, it is characterized in that, one side of described base [1] is equipped with two near switch bracket [17,18], each is near respectively installing one near switch [16,19] on the switch bracket [17,18], and be equipped with on the side of described slide unit [14] one corresponding to it switch block [65].
5. according to the flatness and the depth of parallelism pick-up unit of lower plane on claims 1 described plate workpiece, the structure that it is characterized in that described laser sensor vertical mechanism [7] is: a vertical substrate [42] is fixedlyed connected with cover plate [22] by described vertical web joint [20], vertically pass through block [32 on the both sides, front and back of the vertical plane of substrate [42], 40,52] two vertical guide stem [37 of support fixation, 35], each two vertical slipper [33 up and down, 51,38,41] respectively with each minor flaps [34 up and down, 39] fixedly connected, two minor flaps [34 up and down, 39] the fixedly connected installation laser sensor [9 of difference, 10] vertical moving frame [8,15]; A vertical drive screw rod [36] is supported by bearing [54], make the one end be connected and installed in the output shaft of the motor [56] on the fixed charge method end plate [31] of vertical substrate [42] one ends, and the other end and two drive nuts [53,43] revolve and join, and described two drive nuts [53,43] are fixedly mounted on respectively up and down on the inboard vertical plane of two minor flaps [34,39]; One side of described vertical substrate [42] is respectively installed one respectively near switch [48,45] by two near switch bracket [49,46], correspondingly installs one near sensor block [50] on the side of minor flaps [34] on described.
6. according to the flatness and the depth of parallelism pick-up unit of lower plane on claims 1 described plate workpiece, the structure that it is characterized in that described slide unit mechanism [14] is: two horizontal longitudinal rails [59,61] be fixedly mounted on the described base [1], four guide rail slide blocks [57,58,62,64] respectively with described two horizontal longitudinal rails [59,61] slip coupling, four guide rail slide blocks [57,58,62,64] a fixedly connected support [60], fixed installation described workpiece sensing platform [13] above the support [60], a side of support [60] are equipped with limited block [63] and near sensor block [65].
7. according to the flatness and the depth of parallelism pick-up unit of lower plane on claims 1 described plate workpiece, it is characterized in that under the described base [1] electric mounting box being arranged, the driver of two motors [26,56] is housed in the electric mounting box, the data processing circuit of the power supply unit of two laser sensors [9,10] and grating chi [4] and input computing machine, the tie line of the input computing machine of contact-making switch [16,19,48,45] etc., and these data circuits are linked to each other with a control computer; The internal configurations one blocks of data capture card of control computer; The signal of described electrical equipment except that grating chi [4] all links to each other with this data collecting card by described data circuit with data, and with compunication, accept computer control; Described grating chi [4] carries out exchanges data by the corresponding interface and the computing machine of computing machine.
CNU2007200693157U 2007-04-25 2007-04-25 Device for testing planarity and depth of parallelism of clintheriform workpieces top and plane CN201034559Y (en)

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CNU2007200693157U CN201034559Y (en) 2007-04-25 2007-04-25 Device for testing planarity and depth of parallelism of clintheriform workpieces top and plane

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Application Number Priority Date Filing Date Title
CNU2007200693157U CN201034559Y (en) 2007-04-25 2007-04-25 Device for testing planarity and depth of parallelism of clintheriform workpieces top and plane

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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101571550B (en) * 2009-06-08 2011-12-21 北京航空航天大学 Three-dimensional moving mechanism under high vacuum environment
CN102538661A (en) * 2011-12-30 2012-07-04 深圳市龙霖科技发展有限公司 System and method for rapidly detecting flatness of sectional material
CN102878939A (en) * 2012-10-22 2013-01-16 浙江大学 Device and method for measuring non-contact gaps
CN103292702A (en) * 2013-06-25 2013-09-11 湖北工业大学 Geometric dimension measuring instrument of silicon rod
CN103363913A (en) * 2013-04-25 2013-10-23 苏州方林科技股份有限公司 Workpiece detecting equipment
CN103822589A (en) * 2014-02-12 2014-05-28 元虎虎 Thickness-flatness testing machine
CN103983218A (en) * 2014-03-26 2014-08-13 东莞市天勤仪器有限公司 Multi-laser flatness measuring instrument
CN104034286A (en) * 2013-03-06 2014-09-10 昆山富利瑞电子科技有限公司 Metal plate coplanarity detection equipment
CN104266614A (en) * 2014-09-03 2015-01-07 上海大学 Full-automatic panel planeness detection device
TWI485359B (en) * 2011-03-30 2015-05-21 Hon Hai Prec Ind Co Ltd System and method for flatness measuring by laser
CN105043307A (en) * 2015-08-06 2015-11-11 苏州金牛精密机械有限公司 Tool for detecting plate flatness
CN105091802A (en) * 2015-09-09 2015-11-25 华中科技大学 Portable two-dimensional following laser measurement device based on laser distance measuring sensor
CN105241399A (en) * 2015-09-09 2016-01-13 合肥芯碁微电子装备有限公司 Method of measuring dynamic flatness of precision positioning platform
CN105371776A (en) * 2015-12-09 2016-03-02 上海电机学院 Device for detecting damage degree of electric welding electrode head
CN106767659A (en) * 2016-12-20 2017-05-31 武汉钢铁股份有限公司 Automatic coarseness measuring apparatus
CN110220483A (en) * 2019-06-28 2019-09-10 江苏省百斯特检测技术有限公司 Three axial plane degree detection systems of one kind and its detection method
CN111141235A (en) * 2019-12-31 2020-05-12 浙江合众新能源汽车有限公司 Utensil is assisted in quick discernment punching press sheet material deformation
CN111928800A (en) * 2020-06-01 2020-11-13 深圳市誉辰自动化设备有限公司 Non-contact type detector for battery appearance

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101571550B (en) * 2009-06-08 2011-12-21 北京航空航天大学 Three-dimensional moving mechanism under high vacuum environment
TWI485359B (en) * 2011-03-30 2015-05-21 Hon Hai Prec Ind Co Ltd System and method for flatness measuring by laser
CN102538661A (en) * 2011-12-30 2012-07-04 深圳市龙霖科技发展有限公司 System and method for rapidly detecting flatness of sectional material
CN102878939A (en) * 2012-10-22 2013-01-16 浙江大学 Device and method for measuring non-contact gaps
CN102878939B (en) * 2012-10-22 2015-04-29 浙江大学 Method for measuring non-contact gaps
CN104034286A (en) * 2013-03-06 2014-09-10 昆山富利瑞电子科技有限公司 Metal plate coplanarity detection equipment
CN103363913B (en) * 2013-04-25 2014-06-11 苏州方林科技股份有限公司 Workpiece detecting equipment
CN103363913A (en) * 2013-04-25 2013-10-23 苏州方林科技股份有限公司 Workpiece detecting equipment
CN103292702B (en) * 2013-06-25 2015-12-09 湖北工业大学 A kind of silicon rod physical dimension measuring instrument
CN103292702A (en) * 2013-06-25 2013-09-11 湖北工业大学 Geometric dimension measuring instrument of silicon rod
CN103822589A (en) * 2014-02-12 2014-05-28 元虎虎 Thickness-flatness testing machine
CN103983218A (en) * 2014-03-26 2014-08-13 东莞市天勤仪器有限公司 Multi-laser flatness measuring instrument
CN104266614A (en) * 2014-09-03 2015-01-07 上海大学 Full-automatic panel planeness detection device
CN104266614B (en) * 2014-09-03 2017-05-10 上海大学 Full-automatic panel planeness detection device
CN105043307B (en) * 2015-08-06 2017-09-29 刘建华 A kind of plate flatness detection tool
CN105043307A (en) * 2015-08-06 2015-11-11 苏州金牛精密机械有限公司 Tool for detecting plate flatness
CN105241399A (en) * 2015-09-09 2016-01-13 合肥芯碁微电子装备有限公司 Method of measuring dynamic flatness of precision positioning platform
CN105091802A (en) * 2015-09-09 2015-11-25 华中科技大学 Portable two-dimensional following laser measurement device based on laser distance measuring sensor
CN105241399B (en) * 2015-09-09 2018-04-10 合肥芯碁微电子装备有限公司 A kind of measuring method of precisely locating platform dynamic flatness
CN105371776A (en) * 2015-12-09 2016-03-02 上海电机学院 Device for detecting damage degree of electric welding electrode head
CN106767659A (en) * 2016-12-20 2017-05-31 武汉钢铁股份有限公司 Automatic coarseness measuring apparatus
CN110220483A (en) * 2019-06-28 2019-09-10 江苏省百斯特检测技术有限公司 Three axial plane degree detection systems of one kind and its detection method
CN111141235A (en) * 2019-12-31 2020-05-12 浙江合众新能源汽车有限公司 Utensil is assisted in quick discernment punching press sheet material deformation
CN111928800A (en) * 2020-06-01 2020-11-13 深圳市誉辰自动化设备有限公司 Non-contact type detector for battery appearance

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