CN217689768U

CN217689768U - Double-sided nano-imprinting equipment

Info

Publication number: CN217689768U
Application number: CN202221417596.1U
Authority: CN
Inventors: 陈振浩; 李晓军
Original assignee: GBA National Institute for Nanotechnology Innovation
Current assignee: GBA National Institute for Nanotechnology Innovation
Priority date: 2022-06-08
Filing date: 2022-06-08
Publication date: 2022-10-28
Anticipated expiration: 2032-06-08

Abstract

The application discloses two-sided nanometer impression equipment relates to micro-nano impression technical field, and the two-sided nanometer impression equipment that this application designed includes equipment main part, base plate strutting arrangement, first template imprinting device, first ejecting device, second template imprinting device, second ejecting device, aligning device and controlling means. The double-sided stamping operation of the template on the template supporting device is realized by arranging the first ejection device, the second template stamping device and the second ejection device, and compared with the traditional single-sided stamping mode, the stamping efficiency can be improved. The alignment device can capture the first template mark, the second template mark and the substrate mark, and the alignment is realized by the feedback control device through the driving adjustment of the control device, so that the double-sided imprinting is more accurately performed, the accuracy of pattern imprinting is improved, and the whole equipment can realize high-efficiency and accurate double-sided imprinting operation.

Description

Double-sided nano-imprinting equipment

Technical Field

The application relates to the technical field of micro-nano imprinting, in particular to double-sided nano imprinting equipment.

Background

Nanoimprint is a novel micro-nano processing method for preparing high-resolution micro-nano patterns on special high polymer materials by forming in a physical and mechanical mode. With the development of nano-imprint technology, nano-imprint technology has become another important processing technology following machining technology and lithography technology.

The nanoimprint technology has been widely applied in the fields of microelectronics, materials, biomedicine, optics and the like, and particularly in the field of micro-nano optics, the nanoimprint technology has been widely used for preparing diffraction optical components such as DOE, AR and the like. With the development of the market and technology, higher requirements are put forward on the product quality, and the components prepared by double-sided nano-imprinting are a new trend in the future. However, the single-sided imprinting technology is widely used at present, and the defects of low imprinting efficiency, poor alignment precision, low product cleanliness and the like exist.

SUMMERY OF THE UTILITY MODEL

In view of the above, an object of the present application is to provide a double-sided nanoimprinting apparatus capable of realizing high-efficiency and accurate imprint operation.

To achieve the above technical object, the present application provides a double-sided nanoimprint apparatus including:

an apparatus body having an impression work compartment;

the substrate supporting device is arranged in the imprinting operation cabin and is used for supporting and fixing a substrate to be imprinted;

the first template imprinting device is arranged in the imprinting operation cabin and used for fixing a first template and imprinting the pattern on the first template to one side surface of the substrate;

the first ejection device is arranged in the imprinting operation cabin and used for providing acting force for the first template to be attached to the substrate and providing a curing light source;

the second template imprinting device is arranged in the imprinting operation cabin and used for fixing a second template and imprinting the pattern on the second template to the other side surface of the substrate;

the second ejection device is arranged in the imprinting operation cabin and used for providing acting force for the second template to be tightly attached to the substrate and providing a curing light source;

an alignment device mounted in the imprint process chamber on the same side of the first template imprint device or the second template imprint device with respect to the substrate support device, the alignment device being configured to capture a first template mark on the first template and a second template mark on the second template, or to capture a first template mark on the first template and a substrate mark on the substrate, or to capture a second template mark on the second template and a substrate mark on the substrate;

a control device installed at the apparatus body and electrically connected with the substrate supporting device, the first template imprinting device, the second template imprinting device, and the aligning device;

when in alignment, the control device is used for controlling the first template imprinting device to drive the first template to move and/or controlling the second template imprinting device to drive the second template to move, so that the first template mark and the second template mark are relatively overlapped; or

The control device is used for controlling the first template imprinting device to drive the first template to move and/or controlling the substrate supporting device to drive the substrate to move so as to enable the first template mark and the substrate mark to be relatively overlapped; or

The control device is used for controlling the second template imprinting device to drive the second template to move and/or controlling the substrate supporting device to drive the substrate to move, so that the second template mark and the substrate mark are relatively overlapped.

Further, the first template imprinting apparatus and the second template imprinting apparatus each include:

the template frame is provided with a template mounting station;

the two first Y-axis moving mechanisms are symmetrically arranged relative to the template frame and are used for driving the template frame to move along the Y direction;

and the two first Z-axis moving mechanisms correspond to the first Y-axis moving mechanisms one by one and are connected with the first Y-axis moving mechanisms and used for driving the first Y-axis moving mechanisms to move so that the template frame moves along the direction close to or far away from the substrate supporting device.

Further, the first template imprinting apparatus and the second template imprinting apparatus each further include:

the two first X-axis moving mechanisms are symmetrically arranged relative to the template frame, are respectively connected with the template frame and are used for driving the template frame to move along the X direction;

and the two first Y-axis moving mechanisms are in one-to-one correspondence with the first X-axis moving mechanisms and are used for driving the first X-axis moving mechanisms to move along the Y direction so as to drive the template frame to move along the Y direction.

the roll shaft is arranged in the template frame and is in contact with the first template or the second template;

the roller shaft driving assembly is installed on the template frame and connected with the roller shaft and used for driving the roller shaft to move in the template frame so as to roll the first template or the second template.

Further, the first ejection device and the second ejection device each include:

the first cylinder is provided with a first opening at one end, facing the substrate supporting device, of the first cylinder;

a transparent first support plate mounted within the first cylinder;

the first curing lamp is arranged on one side, far away from the first opening, of the first supporting plate;

the first transparent ventilating plate is arranged in the first cylinder, is positioned on one side, close to the first opening, of the first supporting plate and forms a first ventilating cavity with the first supporting plate;

a first positive pressure device in communication with the first ventilation lumen;

the sealing ring is arranged on the first cylinder and is annularly arranged outside the first ventilation plate;

and the second Z-axis moving mechanism is connected with the first cylinder and used for driving the first cylinder to move so as to form a sealed extrusion cavity among the sealing ring, the first ventilating plate and the side wall of the first cylinder.

Further, the first template imprinting apparatus includes:

the template frame is provided with a template mounting station;

the two first Z-axis moving mechanisms are connected with the first Y-axis moving mechanisms in a one-to-one correspondence manner and are used for driving the first Y-axis moving mechanisms to move so as to enable the template frame to move along the direction close to or far away from the substrate supporting device;

the second template imprinting apparatus includes:

a second opening is formed in one end, facing the substrate supporting device, of the second cylinder, a template mounting step communicated with the second opening is arranged at one end of the second cylinder, and a plurality of first vacuum adsorption holes are formed in the mounting step;

the first negative pressure device is communicated with the first vacuum adsorption hole;

the third Z-axis moving mechanism is used for driving the second cylinder to move along the direction close to or far away from the substrate supporting device;

the second X-axis moving mechanism is connected with the third Z-axis moving mechanism and is used for driving the third Z-axis moving mechanism to move along the X direction so as to drive the second cylinder to move along the X direction;

and the second Y-axis moving mechanism is connected with the second X-axis moving mechanism and is used for driving the second X-axis moving mechanism to move along the Y direction so as to drive the second cylinder to move along the Y direction.

Further, the first template imprinting apparatus further includes:

and the two first Y-axis moving mechanisms correspond to the first X-axis moving mechanisms one by one and are connected for driving the first X-axis moving mechanisms to move along the Y direction so as to drive the template frame to move along the Y direction.

Further, the second template imprinting apparatus further includes:

the first rotating mechanism is arranged on the third Z-axis moving mechanism and connected with the second cylinder body and used for driving the second cylinder body to rotate.

Further, the first template imprinting apparatus further includes:

the roll shaft is arranged in the template frame and is in contact with the first template;

the roller drive assembly, roller drive assembly install in on the template frame and with the roller is connected, is used for the drive roller to be in the template frame internalization to roll in first template.

Further, the first ejection device includes:

a transparent first support plate mounted within the first cylinder;

the first curing lamp is mounted on one side, far away from the first opening, of the first supporting plate;

the sealing ring is arranged on one end of the first cylinder body and is arranged outside the first ventilating plate in an encircling manner;

the second Z-axis moving mechanism is connected with the first barrel and used for driving the first barrel to move so that a sealed extrusion cavity is formed among the sealing ring, the first ventilating plate and the side wall of the first barrel;

the second ejection device includes:

a transparent second support plate mounted within the second barrel;

the second curing lamp is arranged on one surface, far away from the second opening, of the second supporting plate;

the second transparent ventilating plate is arranged in the second cylinder, is positioned on one side of the second supporting plate close to the second opening, and forms a second ventilating cavity with the second supporting plate;

and the second positive pressure device is communicated with the second ventilation cavity, and the air flow sent out through the ventilation opening on the second ventilation plate acts on the second template, so that the second template can be arched.

Further, the alignment device includes:

at least one image collector;

the third X-axis moving mechanism is connected with the image collector and is used for driving the image collector to move;

and the third Y-axis moving mechanism is connected with the third X-axis moving mechanism and is used for driving the third X-axis moving mechanism to move so as to drive the image collector to move.

Further, the substrate supporting apparatus includes:

the substrate comprises a base, wherein a through groove is formed in the base, a flange used for supporting the substrate is annularly arranged on the through groove, and a plurality of second vacuum adsorption holes are formed in the flange;

and the second negative pressure device is communicated with the second vacuum adsorption hole.

Furthermore, the first template imprinting device and the second template imprinting device are distributed in a contraposition mode relative to the substrate supporting device;

the substrate supporting apparatus further includes: the two fourth X-axis moving mechanisms are connected with the base and used for driving the base to move along the X direction, each fourth X-axis moving mechanism comprises a moving piece, a second rotating mechanism is arranged on the moving piece, and the second rotating mechanism is connected with the base and used for driving the base to rotate;

and the two fourth Y-axis moving mechanisms correspond to the fourth X-axis moving mechanism one by one and are connected with the fourth X-axis moving mechanism for driving the fourth X-axis moving mechanism to move so as to drive the base to move along the Y direction.

the substrate supporting apparatus further includes:

the two fifth X-axis moving mechanisms are symmetrically arranged relative to the base, are connected with the base and are used for driving the substrate to move from a position outside the first template imprinting device and the second template imprinting device to a position between the first template imprinting device and the second template imprinting device.

Further, the first template imprinting device and the second template imprinting device are distributed in a staggered mode relative to the substrate supporting device;

the substrate supporting apparatus further includes:

and the two fifth X-axis moving mechanisms are symmetrically arranged relative to the base, are connected with the base, and can be used for driving the substrate to perform switching motion between a position aligned with the first template imprinting device and a position aligned with the second template imprinting device.

Further, the substrate supporting apparatus further includes:

the limiting mechanism comprises a brake and a limiting plate;

be equipped with the mounting groove on the base, the stopper inlay to be located the mounting groove and with limiting plate connection, in before the operation of first template coining device, the stopper can drive the limiting plate moves to aligning the mounting groove position, so that the limiting plate can retract when receiving external force extrusion the mounting groove, in before the operation of second template coining device, the stopper can drive the limiting plate stretches out the mounting groove and with it is right between the flange the base plate forms the centre gripping.

Further, still include:

and the glue spraying device is arranged in the impression operation cabin and is used for spraying glue on the first template, the second template or the substrate.

Further, the glue spraying device comprises:

the charging bucket is used for storing rubber materials;

the spray head is connected with the charging bucket;

the sixth X-axis moving mechanism is connected with the spray head and is used for driving the spray head to move;

and the fifth Y-axis moving mechanism is connected with the sixth X-axis moving mechanism and is used for driving the sixth X-axis moving mechanism to move so as to drive the spray head to move.

According to the technical scheme, the double-sided nano-imprinting equipment comprises an equipment main body, a substrate supporting device, a first template imprinting device, a first ejection device, a second template imprinting device, a second ejection device, an alignment device and a control device. The double-sided imprinting operation of the substrate on the substrate supporting device is realized by arranging the first template imprinting device, the first ejection device, the second template imprinting device and the second ejection device, and compared with the traditional single-sided imprinting mode, the imprinting efficiency can be improved. The alignment device is used for capturing a first template mark on the first template and a second template mark on the second template, or capturing a first template mark on the first template and a substrate mark on the substrate, or capturing a second template mark on the second template and a substrate mark on the substrate, and feeding back to the control device, and the control device can control the first template imprinting device to drive the first template to move and/or control the second template imprinting device to drive the second template to move so as to enable the first template mark and the second template mark to be relatively overlapped when aligning; or controlling the first template imprinting device to drive the first template to move and/or controlling the substrate supporting device to drive the substrate to move so that the first template mark and the second template mark are relatively overlapped; or controlling the second template imprinting device to drive the second template to move and/or controlling the substrate supporting device to drive the substrate to move, so that the second template mark and the substrate mark are relatively overlapped. Due to the arrangement of the alignment device, double-sided imprinting can be more accurately carried out, the accuracy of pattern imprinting is improved, and efficient and accurate double-sided imprinting operation can be realized by the whole equipment.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the description below are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without inventive labor.

FIG. 1 is a schematic diagram of a first assembly structure of a double-sided nanoimprint apparatus provided in the present application;

FIG. 2 is a schematic diagram of a second assembly structure of a double-sided nanoimprinting apparatus provided in the present application;

FIG. 3 is a schematic diagram of a third assembly structure of a double-sided nanoimprinting apparatus provided in the present application;

fig. 4 is a schematic structural diagram of a first rotating mechanism of a double-sided nanoimprint lithography apparatus provided in the present application;

FIG. 5 is a schematic diagram of a fourth exemplary assembly of a double-sided nanoimprinting apparatus provided in the present application;

FIG. 6 is an enlarged view of the position A in FIG. 3;

in the figure: 100. an apparatus main body; 200. a first template imprinting device; 300. a second template imprinting device; 400. a first ejection device; 500. a second ejection device; 600. a substrate support device; 700. an alignment device; 800. a substrate; 901. a first template; 902. a second template;

1. a cage frame; 21. a first Z-axis moving mechanism; 22. a first Y-axis moving mechanism; 23. a template frame; 24. a roll shaft; 25. a first X-axis moving mechanism; 31. a first cylinder; 32. a first support plate; 33. a first curing lamp; 34. a seal ring; 35. a second Z-axis moving mechanism; 36. a first air permeable plate; 41. a second cylinder; 411. a first vacuum adsorption hole; 42. a second Y-axis moving mechanism; 43. a second X-axis moving mechanism; 44. a third Z-axis moving mechanism; 45. a first rotating mechanism; 51. a second support plate; 52. a second curing lamp; 53. a second louver; 61. an image collector; 62. a third X-axis moving mechanism; 63. a third Y-axis moving mechanism; 71. a base; 711. a second vacuum adsorption hole; 712. mounting grooves; 72. a fourth X-axis moving mechanism; 73. a fourth Y-axis moving mechanism; 75. a fifth X-axis moving mechanism; 76. a second rotating mechanism; 761. a rotating electric machine; 762. a driving gear; 763. a ring gear; 77. a limiting mechanism; 771. a brake; 772. a limiting plate; 8. a glue spraying device; 81. a charging bucket; 82. a spray head; 83. a fifth Y-axis moving mechanism; 84. and a sixth X-axis moving mechanism.

Detailed Description

The technical solutions of the embodiments of the present application will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making creative efforts belong to the protection scope of the embodiments in the present application.

In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on orientations or positional relationships shown in the drawings, and are only for convenience of description of the embodiments of the present application and for simplicity of description, but do not indicate or imply that the devices or elements referred to must have specific orientations, be configured in specific orientations, and operate, and thus, should not be construed as limiting the embodiments of the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the embodiments of the present application, it should be noted that the terms "mounted," "connected," and "connected" are used broadly and are defined as, for example, a fixed connection, an exchangeable connection, an integrated connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection through an intermediate medium, and a communication between two elements, unless otherwise explicitly stated or limited. Specific meanings of the above terms in the embodiments of the present application can be understood as specific cases by those of ordinary skill in the art.

The embodiment of the application discloses double-sided nanoimprint equipment.

Referring to fig. 1, an embodiment of a double-sided nanoimprinting apparatus provided in the embodiment of the present application includes:

the apparatus includes a main body 100, a substrate supporting device 600, a first template imprinting device 200, a first ejector 400, a second template imprinting device 300, a second ejector 500, an alignment device 700, and a control device (not shown).

Wherein the apparatus body 100 has an imprint process chamber to provide an imprint process space.

The substrate supporting device 600 is installed at the imprinting operation chamber, and supports and fixes the substrate 800 to be imprinted.

The first template imprinting device 200 is installed in the imprinting operation compartment, and is configured to fix the first template 901 and imprint a pattern on the first template 901 onto a side of the substrate 800; the first ejection device 400, the first ejection device 400 is installed in the imprint process chamber, and is used for providing a force for the first template 901 to cling to the substrate 800 and providing a curing light source, and specifically, may be a UV curing light source.

The second template imprinting device 300, the second template imprinting device 300 being mounted in the imprinting operation compartment for fixing the second template 902 and imprinting the pattern on the second template 902 onto the other side of the substrate 800; the second ejection device 500, the second ejection device 500 is installed in the imprint process chamber, and is used for providing a force for the second template 902 to cling to the substrate 800 and providing a curing light source, and specifically, may be a UV curing light source.

An alignment device 700, the alignment device 700 being mounted to the imprint process chamber on the same side of the first template imprint device 200 or the second template imprint device 300 with respect to the substrate support device 600, the alignment device 700 being configured to capture a first template 901 mark on the first template 901 and a second template mark on the second template 902, or to capture a first template mark on the first template 901 and a substrate mark on the substrate 800, or to capture a second template mark on the second template 902 and a substrate mark on the substrate 800. The first template mark, the second template mark, and the substrate mark may be specific patterns, for example, a pattern feature on the template is set as a mark, a pattern feature on the pattern on the side of the substrate 800 that has been imprinted is set as a mark, or a mark pattern separately designed in a region other than the pattern feature region of the template/substrate, such as a cross shape, a well shape, and the like.

The control device may specifically include a combination of electrical control devices such as a PLC control board or a processor, and is mounted to the apparatus body 100 and electrically connected to the substrate supporting device 600, the first template imprinting device 200, the second template imprinting device 300, and the alignment device 700.

During alignment, the control device may control the first template imprinting device 200 and the second template imprinting device 300 to move so as to align the first template 901 with the second template 902, specifically, to drive the first template 901 to move and/or control the second template imprinting device 300 to drive the second template 902 to move, so as to make the first template mark and the second template mark coincide with each other. Or

The control means may also control the first template imprinting means 200 and the substrate supporting means 600 to move so that the first template 901 is aligned with the substrate 800 imprinted with the one-sided pattern. Specifically, the first template 901 is driven to move and/or the substrate supporting device 600 is controlled to drive the substrate 800 to move, so that the first template mark and the substrate mark are relatively overlapped; or

The control device may also control the second template imprinting device 300 and the substrate supporting device 600 to move so as to align the second template 902 with the substrate 800 imprinted with a pattern, specifically drive the second template imprinting device 300 to drive the second template 902 to move and/or control the substrate supporting device 600 to drive the substrate 800 to move, so that the second template marks and the substrate marks are relatively overlapped.

Compared with single-sided imprinting equipment, the double-sided nano-imprinting equipment designed by the application has higher imprinting efficiency, and meanwhile, the imprinting accuracy is better due to the design of the aligning device 700, so that the whole double-sided imprinting operation with high efficiency and accuracy is realized.

The foregoing is a description of a main structure of a double-sided nanoimprint apparatus provided in an embodiment of the present application, and the following is a more detailed description of a double-sided nanoimprint apparatus provided in an embodiment of the present application, specifically referring to fig. 1 to 6.

First combination of the first template imprinting apparatus 200 and the second template imprinting apparatus 300:

referring to fig. 1 and 2, each of the first template imprinting apparatus 200 and the second template imprinting apparatus 300 includes:

a stencil frame 23, two first Z-axis moving mechanisms 21, and two first Y-axis moving mechanisms 22.

One side of the template frame 23 facing the substrate supporting device 600 has a template mounting station for mounting and fixing the first template 901/the second template 902, and the fixing mode may be a clamping, vacuum adsorption and other detachable fixing modes to facilitate the dismounting and replacing of the first template 901/the second template 902, and of course, the template mounting station may also be disposed in the frame or other positions, which is not limited specifically.

Further, the two first Y-axis moving mechanisms 22 are symmetrically disposed relative to the stencil frame 23, and are configured to drive the stencil frame 23 to move along the Y direction. When the device is used, the first Y-axis moving mechanism 22 can drive the template frame 23 to move out of the imprinting operation cabin of the device main body 100 along the Y direction, and after the first template 901/the second template 902 are fixed on the template frame 23, the first Y-axis moving mechanism 22 drives the template frame 23 to move towards the imprinting operation cabin of the device main body 100 along the Y direction, and meanwhile, the device can be combined with the alignment device 700 to perform displacement adjustment according to the alignment requirement, so that automatic alignment is effectively realized. In addition, the first template imprinting apparatus 200 and the second template imprinting apparatus 300 further include two first Z-axis moving mechanisms 21, and the two first Z-axis moving mechanisms 21 are connected to the first Y-axis moving mechanisms 22 in a one-to-one correspondence manner, and are configured to drive the first Y-axis moving mechanisms 22 to move, so that the template frame 23 moves in a direction close to or away from the substrate supporting apparatus 600, thereby achieving the imprinting purpose, meanwhile, the two first Z-axis moving mechanisms 21 are moving mechanisms that are relatively independently disposed, thereby achieving tilt control of the template frame 23, further enabling the first template 901/the second template 902 fixed on the template frame 23 to have a certain tilt angle relative to the substrate 800, as shown in fig. 1-4, so as to effectively solve the problem of bubbles generated when the first template 901/the second template 902 is attached to the substrate 800, and obtain a better imprinting operation effect.

Further, the first template imprinting device 200 and the second template imprinting device 300 may further include two first X-axis moving mechanisms 25, where the two first X-axis moving mechanisms 25 are symmetrically disposed with respect to the template frame 23 and are respectively connected to the template frame 23 for driving the template frame 23 to move along the X direction. The two first Y-axis moving mechanisms 22 are connected to the first X-axis moving mechanism 25 in a one-to-one correspondence manner, and are configured to drive the first X-axis moving mechanism 25 to move along the Y direction, and further drive the template frame 23 connected to the first X-axis moving mechanism 25 to move along the Y direction. Through the arrangement of the first X-axis moving mechanism 25, the first template 901 or the second template 902 fixed on the template frame 23 can move not only along the Y direction, but also along the X direction, so that before imprinting and attaching, the first template 901 or the second template 902 can be moved along the X and Y directions relative to the substrate 800 according to the information fed back by the alignment device 700, thereby realizing the alignment operation of the first template 901 or the second template 902 with the substrate 800, and effectively ensuring the position and angle relationship between the patterns imprinted on the substrate 800 on the first template 901 and the second template 902. In addition, the first Y-axis moving mechanism 22 and the first X-axis moving mechanism 25 are both symmetrically disposed with respect to the template frame 23, so that a square-like combination can be formed, and further, the interference between the first template 901 and the second template 902 can be avoided by using the square-like combination while the XY displacement of the template frame 23 is adjusted, thereby ensuring the stable imprinting operation.

Each moving mechanism can be a screw rod sliding table, an air cylinder sliding table and other moving mechanisms, and is not limited specifically. Taking the screw rod sliding table as an example, in a specific application, the two first Z-axis moving mechanisms 21 may be installed on two sides of the formwork frame 23. The two first Y-axis moving mechanisms 22 are correspondingly mounted on the movable portions of the first Z-axis moving mechanisms 21 one by one, that is, each first Y-axis moving mechanism 22 is correspondingly mounted on one first Z-axis moving mechanism 21 one by one, and each first Y-axis moving mechanism 22 has two movable portions which are arranged at intervals and move synchronously. The two first X-axis moving mechanisms 25 are installed between the movable portions of the two first Y-axis moving mechanisms 22 in a one-to-one correspondence, and the movable portions of the two first X-axis moving mechanisms 25 are connected to the stencil frame 23. The XYZ displacement adjustment of the template frame 23 is realized by the cooperation of this XYZ movement mechanism. More specifically, each first Y-axis moving mechanism 22 is fixed to the movable portion of the Z-axis moving mechanism 21 in a cross-frame manner; meanwhile, the number of the movable portions on the first Y-axis moving mechanism 22 is two, the two movable portions are distributed at intervals and move synchronously, the first X-axis moving mechanisms 25 are installed between the movable portions of the two first Y-axis moving mechanisms 22 in a one-to-one correspondence manner, and the movable portions of the first X-axis moving mechanisms are connected with the side frames of the template frame 23 in the Y-axis moving direction, so that XYZ displacement adjustment is realized while interference between the first template 901/the second template 902 is avoided. Of course, the present invention is not limited to the above design, and those skilled in the art can make appropriate design changes based on the above design to ensure that the stamping operation can be performed stably.

Further, based on the above-mentioned mechanism components of the first template imprinting apparatus 200 and the second template imprinting apparatus 300, each of them may further include a roller 24 and a roller driving assembly (not shown).

As shown in fig. 2, the roller 24 is provided in the template frame 23 and may contact the first template 901 or the second template 902; the roller driving assembly is mounted on the form frame 23 and connected with the roller 24 for driving the roller 24 to move within the form frame 23 to roll the first form 901 or the second form 902.

When the roller shaft driving assembly is specifically designed, the roller shaft driving assembly can comprise a motor, a driving chain wheel, a driven chain wheel and a chain; the output shaft of the motor is fixedly sleeved with a driving sprocket and is arranged at a position on one side of the template frame 23 close to one first Z-axis moving mechanism 21 or a position on one side of the other first Z-axis moving mechanism 21, the driven sprocket is pivoted on the template frame 23 at the position on the other side opposite to the driving sprocket, and the sprocket is connected between the driving sprocket and the driven sprocket. One end of the roll shaft 24 is connected with the chain, and the other end is movably connected on the template frame 23, so that the roll shaft driving component can drive the roll shaft 24 to move through the design. Of course, the present invention is not limited to the above design, and those skilled in the art can make appropriate design changes based on the design.

Because the template frame 23 is controlled by the two independent first Z-axis moving mechanisms 21, a certain included angle can be formed between the template frame 23 and the substrate 800, and the roller shaft driving assembly can drive the roller shaft 24 to move and roll the first template 901 from the included angle side, so that the pattern on the first template 901 is rolled onto the substrate 800, and the effect of removing bubbles is achieved, and a better imprinting effect is achieved.

Further, in the case that the first template imprinting apparatus 200 and the second template imprinting apparatus 300 employ a frame-type roll design.

As shown in fig. 3, each of the first ejection device 400 and the second ejection device 500 includes a first cylinder 31, a transparent first support plate 32, a first curing lamp 33, a transparent first ventilation plate 36, a first positive pressure device (not shown), a seal ring 34, and a second Z-axis moving mechanism 35.

A first opening is formed at one end of the first cylinder 31 facing the substrate supporting device 600, the first supporting plate 32 is installed in the first cylinder 31, and the first curing lamp 33 is installed on one side of the first supporting plate 32 away from the first opening; the first ventilation plate 36 is installed in the first cylinder 31, is positioned on one side of the first support plate 32 close to the first opening, and forms a first ventilation cavity with the first support plate 32; the first positive pressure device is communicated with the first ventilation cavity; the sealing ring 34 is arranged on the first cylinder 31 and is annularly arranged outside the first ventilation plate 36; the movable part of the second Z-axis moving mechanism 35 is connected to the first cylinder 31 for driving the first cylinder 31 to move, so that a sealed extrusion cavity is formed between the sealing ring 34, the first ventilation plate 36 and the side wall of the first cylinder 31.

Specifically, the second Z-axis moving mechanism 35 may be a telescopic cylinder, and is not limited. The sealing ring 34 may be embedded around an end surface of the first barrel 31, or be disposed around an intersection of the first ventilation plate 36 and a sidewall of the first barrel 36, and can contact with the first mold plate 901 or the second mold plate 902, which is not limited in particular. When the second Z-axis moving mechanism 35 drives the first cylinder 31 to move until the sealing ring 34 contacts with the first template 901 or the second template 902, the airflow in the first ventilation cavity uniformly passes through the first ventilation plate 36, so as to realize the effect of pressing the first template 901 or the second template 902, and the first ventilation plate 36 may be a wind equalizing plate, so that the applied acting force is more uniform. The working principle is as follows, after the roll shaft 24 finishes the work of attaching and removing bubbles, the second Z-axis moving mechanism 35 can drive the first cylinder 31 to move towards the substrate 800, so that the sealing ring 34 is in contact with the first template 901 or the second template 902, a closed cavity is formed by combination, then gas is injected into the first ventilation cavity through the first positive pressure device, the injected gas is uniformly sent into the extrusion cavity through the air holes in the first ventilation plate 36, and uniform extrusion action is formed on the first template 901/the second template 902, so that the patterns on the first template 901/the second template 902 are better imprinted on the substrate 800, and meanwhile, the first curing lamp 33 is turned on to cure the imprinted patterns.

The first curing lamp 33 may be a UV curing lamp.

Second combination of the first template imprinting apparatus 200 and the second template imprinting apparatus 300:

as shown in fig. 2, the first template imprinting apparatus 200 adopts a frame-type roll design as in the first solution, and the second template imprinting apparatus 300 is a different design from the first template imprinting apparatus 200, as follows:

the first template imprinting device 200 adopts a frame-type rolling design, and specifically includes a template frame 23, two first Z-axis moving mechanisms 21, two first Y-axis moving mechanisms 22, two first X-axis moving mechanisms 25, a roller 24, and a roller driving assembly, which may specifically refer to the foregoing contents and will not be described in detail.

And the second template imprinting apparatus 300 may be configured to include a second cylinder 41, a first negative pressure device (not shown), a second Y-axis moving mechanism 42, a second X-axis moving mechanism 43, and a third Z-axis moving mechanism 44.

A second opening is formed in one end, facing the substrate supporting device 600, of the second cylinder 41, a template mounting step communicated with the second opening is arranged at one end of the second cylinder 41, and a plurality of first vacuum adsorption holes 411 are formed in the template mounting step; the first negative pressure means communicates with the first vacuum adsorption hole 411. The second template 902 is fixed by adopting a vacuum adsorption mode, so that the assembly and disassembly are convenient, and the maintenance is simple.

Further, a third Z-axis moving mechanism 44 is connected to the second cylinder 41, and the third Z-axis moving mechanism 44 is configured to drive the second cylinder 41 to move in a direction close to or away from the substrate supporting apparatus 600; the second X-axis moving mechanism 43 is connected to the third Z-axis moving mechanism 44, and is configured to drive the third Z-axis moving mechanism 44 to move along the X direction, so as to drive the second cylinder 41 to move along the X direction; the second Y-axis moving mechanism 42 is connected to the second X-axis moving mechanism 43, and is configured to drive the second X-axis moving mechanism 43 to move along the Y direction, so as to drive the second cylinder 41 to move along the Y direction. The second X/Y axis moving mechanism may be a screw sliding mechanism, which drives the second cylinder 41 to move to the target imprinting position, and simultaneously, the second template 902 and the substrate 800 may be aligned by cooperating with the alignment device 700. The Z-axis moving mechanism may be a cylinder lifting mechanism, and drives the second cylinder 41 to move toward the substrate 800 to perform the imprinting operation. Specifically, the second X-axis moving mechanism 43 is mounted on the movable portion of the second Y-axis moving mechanism 42; the third Z-axis moving mechanism 44 is attached to the movable portion of the second X-axis moving mechanism 43.

The second template imprinting apparatus 300 has the imprinting working principle: the second X-axis moving mechanism 43 and the second Y-axis moving mechanism 42 drive the second cylinder 41 to move to the target imprinting position, and the third Z-axis moving mechanism 44 drives the second cylinder 41 to move until the second template 902 contacts the substrate 800, so as to realize imprinting. In this embodiment, a combination of frame-type roll embossing and cylinder embossing is achieved.

Further, as shown in fig. 3, the second imprinting apparatus 300 may further include a first rotating mechanism 45, the first rotating mechanism 45 is mounted on the third Z-axis moving mechanism 44, and the first rotating mechanism 45 is connected to the second cylinder 41 and is configured to drive the second cylinder 41 to rotate. Due to the design of the first rotating mechanism 45, the second template 902 also has adjustment in the R-axis direction, so that convenience and accuracy of alignment are further improved, and the first rotating mechanism 45 may be a flat rotating motor, which is not particularly limited.

Further, based on the above-mentioned combination of the frame-type roll embossing and the cylinder embossing, the first ejection device 400 may include the first cylinder 31, the transparent first support plate 32, the first curing lamp 33, the transparent first ventilation plate 36, the first positive pressure device, the sealing ring 34, and the second Z-axis moving mechanism 35. The matching of the components can refer to the above contents, and is not described in detail.

The second ejection device 500 may be a device including a transparent second support plate 51, a second curing lamp 52, a transparent second ventilation plate 53, and a second positive pressure device (not shown).

The second support plate 51 is mounted in the second cylinder 41; the second curing lamp 52 is mounted on a side of the second support plate 51 away from the second opening; the second ventilating plate 53 is arranged in the second cylinder 41, is positioned on one side of the second supporting plate 51 close to the second opening, and forms a second ventilating cavity with the second supporting plate 51; the second positive pressure device is communicated with the second vent cavity.

The working principle of the second ejection device 500 is as follows: when the second template 902 is completely attached to the substrate 800, the second positive pressure device is started, air is introduced into the second ventilating cavity, the introduced air enters the extrusion cavity formed between the second ventilating plate 53 and the second template 902 through the second ventilating plate 53 and extrudes the second template 902, so that the second template 902 is better attached to the substrate 800, and the second curing lamp 52 is started to realize curing.

The second curing lamp 52 may be embodied as a UV curing lamp.

Further, the second die plate 902 can be raised by the air flow sent out through the ventilation opening of the second ventilation plate 53 acting on the second die plate 902. In this design, a certain air flow is introduced before imprinting, so that the second template 902 is arched, the third Z-axis moving mechanism 44 is driven to make the arched second template 902 start to abut against the substrate 800, the arched part of the second template 902 contacts the substrate 800 first, the contact area between the second template 902 and the substrate 800 is gradually increased along with the driving of the third Z-axis moving mechanism 44 until the second template is completely contacted with the substrate, and the process can play a role in removing bubbles and has a function of different works with the roller shaft 24. After the second template 902 is in contact with the substrate 800, the gas can be continuously introduced to extrude the second template 902, so that a better imprinting effect is achieved.

In the present application, the alignment apparatus 700 includes at least one image collector 61, a third X-axis moving mechanism 62, and a third Y-axis moving mechanism 63.

Specifically, the third X-axis moving mechanism 62 is connected to the image collector 61, and is configured to drive the image collector 61 to move; the third Y-axis moving mechanism 63 is connected to the third X-axis moving mechanism 62, and is configured to drive the third X-axis moving mechanism 62 to move, so as to drive the image collector 61 to move. Taking the screw slide table as an example, the third X-axis moving mechanism 62 is mounted on the movable portion of the third Y-axis moving mechanism 63, and the movable portion of the third X-axis moving mechanism 62 is connected to the image acquirer 61. The third X-axis moving mechanism 62 and the third Y-axis moving mechanism 63 are provided so that the image acquirer 61 can perform displacement adjustment in the XY-axis direction, so that the acquisition of the mark is more convenient, and at the same time, the image acquirer can be moved to a position where it does not interfere with other devices when not in use.

Further, the image collector 61 may be a CCD camera, and is not limited specifically. The number of the image collectors 61 may be preferably two, that is, two image collectors 61 are arranged as shown in the figure, so that the alignment of more sets of marks can be realized, and the alignment precision can be further improved compared with the arrangement of a single image collector 61.

In the present application, the substrate supporting apparatus 600 may include a base 71 and a second negative pressure device (not shown).

As shown in fig. 2, a through groove is formed in the base 71, a flange for supporting the substrate 800 is annularly provided on the through groove, a plurality of second vacuum absorption holes 711 are formed in the flange, and the second negative pressure device is communicated with the second vacuum absorption holes 711. The substrate 800 is supported and fixed in a vacuum adsorption mode, and the disassembly, assembly and maintenance are more convenient.

Further, the positions of the first template imprinting device 200 and the second template imprinting device 300 may be distributed in an alignment manner with respect to the substrate supporting device 600, as shown in fig. 1 to 3, that is, the positions of the first template imprinting device 200 and the second template imprinting device 300 are located at two sides of the substrate supporting device 600 within a same spatial range and are disposed opposite to each other.

Taking this as an example, as shown in fig. 1 and 2, a scheme is exemplified in which the first template imprinting apparatus 200 and the second template imprinting apparatus 300 are distributed in a manner of being aligned with respect to the substrate supporting apparatus 600.

The substrate supporting apparatus 600 may further include two fourth Y-axis moving mechanisms 73 and two fourth X-axis moving mechanisms 72.

The two fourth X-axis moving mechanisms 72 are connected to the base 71 and used for driving the base to move in the X direction, and each of the two fourth X-axis moving mechanisms includes a moving member, a second rotating mechanism 76 is disposed on the moving member, and the second rotating mechanism 76 is connected to the base 71 and used for driving the base 71 to rotate. In addition, the two fourth Y-axis moving mechanisms 73 are connected to the fourth X-axis moving mechanism 72 in a one-to-one correspondence manner, and are configured to drive the fourth X-axis moving mechanism 72 to move, and further drive the base 71 to move along the Y direction. Specifically, taking a design of a screw rod sliding table as an example, two fourth Y-axis moving mechanisms 73 are arranged at intervals, and each fourth Y-axis moving mechanism 73 has two moving parts which are arranged at intervals and rotate synchronously; the two fourth X-axis moving mechanisms 72 are correspondingly installed between the moving parts of the two fourth Y-axis moving mechanisms 73 one by one, the moving parts of the fourth X-axis moving mechanisms form moving parts, and the moving parts are provided with second rotating mechanisms 76, and the second rotating mechanisms 76 are connected with the base 71 and used for driving the base 71 to rotate. The combination of the moving mechanisms enables the substrate 800 to be adjusted in the XY-axis direction and the R-axis direction, wherein the cooperation between the fourth Y-axis moving mechanism 73 and the fourth X-axis moving mechanism can refer to the cooperation between the first Y-axis moving mechanism 22 and the first X-axis moving mechanism 25, and the movement adjustment is satisfied without interfering with the operations of the first template imprinting device 200 and the second template imprinting device 300, which is not described in detail herein. In addition, the addition of R-axis motion to the substrate 800 allows for more flexibility in performing alignment operations.

When the second rotating mechanism 76 is specifically designed, as shown in fig. 4, it may include a rotating motor 761, a driving gear 762, and a gear ring 763; a step for supporting the base 71 is provided on the movable portion of the fourth X-axis moving mechanism 72, a groove is provided on the bottom surface of the step, a rotating motor 761 is fitted in a side wall of the groove, an output shaft of the rotating motor 761 extends into the groove and is fitted with the driving gear 762, a portion of the driving gear 762 extends out of the groove, and the ring gear 763 is fixed to the bottom of the base 71 and is engaged with the driving gear 762. The base 71 is rotatably mounted on the movable portions of the two fourth X-axis moving mechanisms 72, and is driven by a rotating motor 761 to perform a rotating motion. Of course, the present invention is not limited to the above design, and those skilled in the art can make appropriate design changes based on the above design without limitation.

As shown in fig. 1 and fig. 2, the stamping process may be: the first template imprinting device 200 first imprints the pattern on the first template 901 onto the substrate 800; the second template mark on the second template 902 is aligned with the substrate mark on the substrate 800 imprinted with the pattern by the alignment apparatus 700, and after the alignment, the second template imprinting apparatus 300 is controlled to imprint the pattern on the second template 902 on the substrate 800.

As shown in fig. 3, another example is the arrangement of the first template imprint apparatus 200 and the second template imprint apparatus 300 in alignment with respect to the substrate support apparatus 600.

The substrate supporting apparatus 600 may further include two fifth X-axis moving mechanisms 75. The two fifth X-axis moving mechanisms 75 are symmetrically disposed with respect to the base 71, and are connected to the base 71, and may be configured to drive the substrate 800 to move from a position outside the first template imprinting apparatus 200 and the second template imprinting apparatus 300 to a position between the first template imprinting apparatus 200 and the second template imprinting apparatus 300.

The assembly shown in fig. 3 may be performed as follows: based on the alignment apparatus 700, the first template mark on the first template 901 and the second template mark on the second template 902 are aligned, and then the fifth X-axis moving mechanism 75 is controlled to move the substrate 800 between the first template imprinting apparatus 200 and the second template imprinting apparatus 300, and then the imprinting of the first template imprinting apparatus 200 and the second template imprinting apparatus 300 is respectively completed, or the imprinting of the first template imprinting apparatus 200 and the second template imprinting apparatus 300 is completed simultaneously.

As shown in fig. 5, the first template imprinting apparatus 200 and the second template imprinting apparatus 300 may also be disposed with a dislocation with respect to the substrate support apparatus 600.

For example, the substrate supporting apparatus 600 may further include: and two fifth X-axis moving mechanisms 75, wherein the two fifth X-axis moving mechanisms 75 are symmetrically arranged with respect to the base 71 and connected to the base 71, and are configured to drive the substrate 800 to perform a switching motion between a position aligned with the first template imprinting apparatus 200 and a position aligned with the second template imprinting apparatus 300.

The assembly shown in fig. 5 may be performed as follows: the substrate 800 is driven by the fifth X-axis moving mechanism 75 to move to a position aligned with the first template imprinting apparatus 200, and then the first template imprinting apparatus 200 is used to realize imprinting. Then, the substrate 800 is driven by the fifth X-axis moving mechanism 75 to move to the position of the second template imprinting apparatus 300, and then the substrate mark on the substrate 800 and the second template mark on the second template 902 are aligned based on the alignment apparatus 700, and the other surface of the substrate 800 is imprinted by the second template imprinting apparatus 300.

By way of example, the first template imprinting device 200 is disposed toward the top surface of the flange, and the second template imprinting device 300 is disposed toward the bottom surface of the flange, when the first template imprinting device 200 is imprinted, the flange plays a supporting role, and when the second template imprinting device 300 is imprinted, the flange cannot play a supporting role, so that there is a risk that the substrate 800 is ejected out during imprinting, and therefore, the substrate supporting device 600 of the present application may be additionally provided with a limiting mechanism 77.

As shown in fig. 6, the limiting mechanism 77 may include a stopper 771 and a limiting plate 772.

The base 71 is provided with a mounting groove 712, the stopper 771 is embedded in the mounting groove 712 and connected to the limiting plate 772, before the first template imprinting apparatus 200 operates, the stopper 771 can drive the limiting plate 772 to move to the position of the mounting groove 712, so that the limiting plate 772 can retract into the mounting groove 712 when being extruded by an external force, and before the second template imprinting apparatus 300 operates, the stopper 771 can drive the limiting plate 772 to extend out of the mounting groove 712 and clamp the substrate 800 with the flange. The design of the limiting mechanism 77 prevents the substrate 800 from being ejected during the imprinting operation of the second template imprinting apparatus 300.

The specific design of the brake 771 may also include a rotating motor, an output shaft of the rotating motor is fixedly connected with an elastically telescopic connecting rod, and one end of the connecting rod is connected with the limiting plate 772; before the first template imprinting apparatus 200 performs the imprinting operation, the rotation motor may drive the connection rod to drive the limiting plate 772 to rotate to the alignment installation groove 712, so that even though the first template imprinting apparatus 200 performs the imprinting operation, the limiting plate 772 may be forced to retract into the installation groove 712 without affecting the imprinting operation of the first template imprinting apparatus 200; before the second template imprinting apparatus 300 is operated, the limiting plate 772 is not stressed and is in a state of extending out of the mounting groove 712, and the limiting plate 772 is driven to rotate to limit the substrate 800. Of course, the present invention is not limited to the above design, and those skilled in the art can make appropriate design changes based on the design.

Further, the apparatus may further integrate a glue spraying device 8, and the glue spraying device 8 is installed in the imprint operation cabin and is used for spraying glue on the first template 901, the second template 902, or the substrate 800.

Further, the glue spraying device 8 includes a bucket 81, a spray head 82, a fifth Y-axis moving mechanism 83, and a sixth X-axis moving mechanism 84.

The material tank 81 is used for storing sizing materials; the spray head 82 is connected with the charging bucket 81; the sixth X-axis moving mechanism 84 is connected to the spray head 82 and is configured to drive the spray head 82 to move; the fifth Y-axis moving mechanism 83 is connected to the sixth X-axis moving mechanism 84, and is configured to drive the sixth X-axis moving mechanism 84 to move, so as to drive the spray head 82 to move along the Y direction. Taking a screw slide design as an example, the sixth X-axis moving mechanism 84 is mounted on the movable portion of the fifth Y-axis moving mechanism 83, and the movable portion of the sixth X-axis moving mechanism 84 is connected to the head 82. The design of the glue spraying device 8 also facilitates the use of the equipment, and the corresponding glue spraying work can be performed before imprinting, and certainly, under the condition that the glue spraying device 8 is not arranged, glue can be sprayed on the substrate 800, the first template 901 or the second template 902 in advance and then used, and the method is not particularly limited.

Further, as for the structure of the apparatus main body 100, including the cage frame 1, the embossing work compartment is formed in the cage frame 1.

Further, in order to seal the impression operation compartment relatively and prevent the external environment from influencing the impression operation, the cage frame 1 is covered with a transparent baffle (not shown).

Various implementation means of the first template imprinting apparatus 200, the second template imprinting apparatus 300, the first ejecting apparatus 400, the second ejecting apparatus 500, and the substrate supporting apparatus 600 provided above in the present application may be flexibly combined, for example, the first template imprinting apparatus 200 and the second template imprinting apparatus 300 having the roller 24 in fig. 1 are combined with the first ejecting apparatus 400 and the second ejecting apparatus 500 having the first cylinder 31. In this combination, the first/second template imprinting apparatus may have YZ-axis direction displacement control for the first template 901/second template 902, and the substrate supporting apparatus may have XYR-axis direction displacement control for the substrate 800.

For example, in fig. 2, the first template imprinting apparatus 200 having the roller 24 is matched with the second template imprinting apparatus 300 having the second cylinder 41, and the like, in this matching, the second template imprinting apparatus 300 may not have rotation control for the second cylinder 41, the substrate supporting apparatus may have XYR axis direction displacement control for the substrate, or the second template imprinting apparatus 300 may have rotation control for the second cylinder 41, and the substrate supporting apparatus may have XY axis direction displacement control for the substrate, which is not limited specifically, and those skilled in the art can make appropriate conversion combinations based on this, and not limited specifically.

In addition, the displacement adjusting function of the first template imprinting apparatus 200 and the second template imprinting apparatus 300 is not limited to the Z-axis moving mechanism, and the moving mechanisms such as the X-axis, the Y-axis, and the R-axis may be flexibly combined.

While the foregoing has described in detail a double-sided nanoimprinting apparatus provided in the present application, those skilled in the art will appreciate that there are variations in the concepts and the embodiments of the present application.

Claims

1. A double-sided nanoimprinting apparatus characterized by comprising:

an apparatus main body (100), the apparatus main body (100) having an imprint work compartment;

the substrate supporting device (600), the substrate supporting device (600) is installed on the impressing operation cabin and is used for supporting and fixing the substrate (800) to be impressed;

the first template imprinting device (200), the first template imprinting device (200) is installed in the imprinting operation cabin, and is used for fixing a first template (901) and imprinting the pattern on the first template (901) to one side surface of the substrate (800);

a first ejection device (400), wherein the first ejection device (400) is mounted in the imprinting operation cabin and is used for providing acting force for the first template (901) to be attached to the substrate (800) and providing a curing light source;

the second template imprinting device (300), the second template imprinting device (300) is installed in the imprinting operation cabin, and is used for fixing a second template (902) and imprinting the pattern on the second template (902) to the other side surface of the substrate (800);

the second ejection device (500), the second ejection device (500) is installed in the impression operation cabin and is used for providing acting force for the second template (902) to be tightly attached to the substrate (800) and providing a curing light source;

an alignment device (700), the alignment device (700) being mounted to the imprint process bay on the same side of the first template imprint device (200) or the second template imprint device (300) with respect to the substrate support device (600), the alignment device (700) being for capturing a first template mark on the first template (901) and a second template mark on the second template (902), or for capturing a first template mark on the first template (901) and a substrate mark on the substrate (800), or for capturing a second template mark on the second template (902) and a substrate mark on the substrate (800);

a control device installed to the apparatus main body (100) and electrically connected to the substrate supporting device (600), the first template imprinting device (200), the second template imprinting device (300), and the alignment device (700);

during alignment, the control device is used for controlling the first template imprinting device (200) to drive the first template (901) to move and/or controlling the second template imprinting device (300) to drive the second template (902) to move, so that the first template mark and the second template mark are relatively overlapped; or

The control device is used for controlling the first template imprinting device (200) to drive the first template (901) to move and/or controlling the substrate supporting device (600) to drive the substrate (800) to move, so that the first template mark and the substrate mark are relatively overlapped; or

The control device is used for controlling the second template imprinting device (300) to drive the second template (902) to move and/or controlling the substrate supporting device (600) to drive the substrate (800) to move, so that the second template marks and the substrate marks are relatively overlapped.

2. A double-sided nanoimprinting apparatus as claimed in claim 1, characterized in that each of the first template imprinting device (200) and the second template imprinting device (300) comprises:

a formwork frame (23), the formwork frame (23) having a formwork mounting station thereon;

the two first Y-axis moving mechanisms (22) are symmetrically arranged relative to the template frame (23) and are used for driving the template frame (23) to move along the Y direction;

two first Z-axis moving mechanisms (21), two first Z-axis moving mechanisms (21) one-to-one with first Y-axis moving mechanism (22) is connected for driving first Y-axis moving mechanism (22) to move, so that template frame (23) moves along the direction close to or far away from substrate supporting device (600).

3. A double-sided nanoimprinting apparatus as claimed in claim 2, characterized in that each of the first template imprinting device (200) and the second template imprinting device (300) further comprises:

the two first X-axis moving mechanisms (25) are symmetrically arranged relative to the template frame (23), are respectively connected with the template frame (23), and are used for driving the template frame (23) to move along the X direction;

the two first Y-axis moving mechanisms (22) are in one-to-one correspondence with the first X-axis moving mechanisms (25) and are used for driving the first X-axis moving mechanisms (25) to move along the Y direction, and further driving the template frame (23) to move along the Y direction.

4. A double-sided nanoimprinting apparatus as claimed in claim 2, characterized in that each of the first template imprinting device (200) and the second template imprinting device (300) further comprises:

a roll shaft (24), wherein the roll shaft (24) is arranged in the formwork frame (23) and is in contact with the first formwork (901) or the second formwork (902);

a roller shaft driving component mounted on the template frame (23) and connected with the roller shaft (24) for driving the roller shaft (24) to move in the template frame (23) to roll the first template (901) or the second template (902).

5. A double-sided nanoimprinting apparatus as claimed in claim 2, characterized in that the first ejection device (400) and the second ejection device (500) each comprise:

a first cylinder (31), wherein one end of the first cylinder (31) facing the substrate supporting device (600) is provided with a first opening;

a transparent first support plate (32), the first support plate (32) being mounted within the first cylinder (31);

a first curing lamp (33), the first curing lamp (33) being mounted on a side of the first support plate (32) remote from the first opening;

a transparent first ventilating plate (36), wherein the first ventilating plate (36) is installed in the first cylinder body (31) and is positioned on one side, close to the first opening, of the first supporting plate (32), and a first ventilating cavity is formed between the first ventilating plate (36) and the first supporting plate (32);

the sealing ring (34) is mounted on the first cylinder body (31) and is arranged outside the first ventilating plate (36) in an annular mode;

and the second Z-axis moving mechanism (35) is connected with the first cylinder (31) and used for driving the first cylinder (31) to move, so that a sealed extrusion cavity is formed among the sealing ring (34), the first ventilating plate (36) and the side wall of the first cylinder (31).

6. A double-sided nanoimprinting apparatus as claimed in claim 1, characterized in that the first template imprinting device (200) comprises:

the template frame (23), the template frame (23) is provided with a template mounting station;

the two first Z-axis moving mechanisms (21) are connected with the first Y-axis moving mechanism (22) in a one-to-one correspondence mode and used for driving the first Y-axis moving mechanism (22) to move so that the template frame (23) can move in the direction close to or far away from the substrate supporting device (600);

the second template imprinting apparatus (300) comprising:

a second opening is formed in one end, facing the substrate supporting device (600), of the second cylinder (41), a template mounting step communicated with the second opening is arranged at one end of the second cylinder (41), and a plurality of first vacuum adsorption holes (411) are formed in the mounting step;

a first negative pressure device communicated with the first vacuum adsorption hole (411);

the third Z-axis moving mechanism (44), the third Z-axis moving mechanism (44) is used for driving the second cylinder (41) to move along the direction close to or far away from the substrate supporting device (600);

the second X-axis moving mechanism (43), the second X-axis moving mechanism (43) is connected with the third Z-axis moving mechanism (44) and is used for driving the third Z-axis moving mechanism (44) to move along the X direction so as to drive the second cylinder (41) to move along the X direction;

and the second Y-axis moving mechanism (42), the second Y-axis moving mechanism (42) is connected with the second X-axis moving mechanism (43) and is used for driving the second X-axis moving mechanism (43) to move along the Y direction so as to drive the second cylinder (41) to move along the Y direction.

7. A double-sided nanoimprinting apparatus as defined in claim 6, characterized in that the first template imprint device (200) further comprises:

the two first X-axis moving mechanisms (25) are symmetrically arranged relative to the template frame (23), and are respectively connected with the template frame (23) and used for driving the template frame (23) to move along the X direction;

the two first Y-axis moving mechanisms (22) are connected with the first X-axis moving mechanism (25) in a one-to-one correspondence mode and used for driving the first X-axis moving mechanism (25) to move along the Y direction and further driving the template frame (23) to move along the Y direction.

8. A double-sided nanoimprinting apparatus as claimed in claim 6, characterized in that the second template imprinting device (300) further comprises:

the first rotating mechanism (45) is installed on the third Z-axis moving mechanism (44), and the first rotating mechanism (45) is connected with the second cylinder body (41) and used for driving the second cylinder body (41) to rotate.

9. A double-sided nanoimprinting apparatus as claimed in claim 6, characterized in that the first template imprinting device (200) further comprises:

the roll shaft (24) is arranged in the template frame (23), and the roll shaft (24) is in contact with the first template (901);

a roller shaft driving component, the roller shaft driving component is installed on the template frame (23) and connected with the roller shaft (24) and used for driving the roller shaft (24) to move in the template frame (23) so as to roll the first template.

10. A double-sided nanoimprinting apparatus as defined in claim 6, characterized in that the first ejection device (400) comprises:

a transparent first support plate (32), the first support plate (32) being mounted within the first barrel (31);

a first transparent air permeable plate (36), wherein the first air permeable plate (36) is installed in the first cylinder (31), is positioned on one side, close to the first opening, of the first support plate (32), and forms a first ventilation cavity with the first support plate (32);

the sealing ring (34) is mounted at one end of the first cylinder body (31) and is arranged outside the first ventilating plate (36) in a surrounding mode;

the second Z-axis moving mechanism (35) is connected with the first cylinder (31) and used for driving the first cylinder (31) to move, so that a sealed extrusion cavity is formed among the sealing ring (34), the first ventilating plate (36) and the side wall of the first cylinder (31);

the second ejection device (500) comprises:

a transparent second support plate (51), the second support plate (51) being mounted within the second cylinder (41);

a second curing lamp (52), wherein the second curing lamp (52) is installed on one surface of the second supporting plate (51) far away from the second opening;

the second transparent ventilating plate (53) is arranged in the second cylinder body (41), is positioned on one side, close to the second opening, of the second supporting plate (51), and forms a second ventilating cavity with the second supporting plate;

and the second positive pressure device is communicated with the second ventilation cavity, and the air flow sent out through the ventilation port on the second ventilation plate (53) acts on the second template (902), so that the second template (902) can be arched.

11. A double-sided nanoimprinting apparatus as claimed in claim 1, characterized in that the alignment means (700) comprises:

at least one image collector (61);

the third X-axis moving mechanism (62), the third X-axis moving mechanism (62) is connected with the image collector (61) and is used for driving the image collector (61) to move;

and the third Y-axis moving mechanism (63) is connected with the third X-axis moving mechanism (62) and is used for driving the third X-axis moving mechanism to move so as to drive the image collector (61) to move.

12. A double-sided nanoimprinting apparatus as claimed in claim 1, characterized in that the substrate supporting device (600) comprises:

the substrate (800) is provided with a base (71), a through groove is formed in the base (71), a flange used for supporting the substrate (800) is arranged on the through groove in a surrounding mode, and a plurality of second vacuum adsorption holes (711) are formed in the flange;

a second negative pressure device communicating with the second vacuum adsorption hole (711).

13. A double-sided nanoimprint lithography apparatus as claimed in claim 12, characterized in that the first template imprint device (200) and the second template imprint device (300) are distributed in alignment with respect to the substrate support device (600);

the substrate supporting apparatus (600) further includes: the two fourth X-axis moving mechanisms (72) are connected with the base (71) and used for driving the base (71) to move along the X direction, each fourth X-axis moving mechanism (72) comprises a moving part, a second rotating mechanism (76) is arranged on each moving part, and each second rotating mechanism (76) is connected with the base (71) and used for driving the base (71) to rotate;

and the two fourth Y-axis moving mechanisms (73) are connected with the fourth X-axis moving mechanism (72) in a one-to-one correspondence mode and are used for driving the fourth X-axis moving mechanism (72) to move so as to drive the base (71) to move along the Y direction.

14. A double-sided nanoimprinting apparatus as claimed in claim 12, characterized in that the first template imprinting device (200) and the second template imprinting device (300) are distributed in alignment with respect to the substrate support (600);

the substrate supporting apparatus (600) further includes:

two fifth X-axis moving mechanisms (75), the two fifth X-axis moving mechanisms (75) being symmetrically disposed with respect to the base (71), and being connected to the base (71), for driving the substrate (800) to move from a position outside the first template imprinting apparatus (200) and the second template imprinting apparatus (300) to a position between the first template imprinting apparatus (200) and the second template imprinting apparatus (300).

15. A double-sided nanoimprinting apparatus as claimed in claim 12, characterized in that the first template imprinting device (200) and the second template imprinting device (300) are distributed with a shifted position with respect to the substrate supporting device (600);

the substrate supporting apparatus further includes:

two fifth X-axis moving mechanisms (75), wherein the two fifth X-axis moving mechanisms (75) are symmetrically arranged relative to the base (71) and are connected with the base (71) and can be used for driving the substrate (800) to switch between a position aligned with the first template imprinting device (200) and a position aligned with the second template imprinting device (300).

16. A double-sided nanoimprinting apparatus as claimed in claim 12, characterized in that the substrate support device (600) further comprises:

the limiting mechanism (77) comprises a brake (771) and a limiting plate (772);

be equipped with mounting groove (712) on base (71), stopper (771) inlay locate mounting groove (712) and with limiting plate (772) are connected, before first template stamp-pad printing device (200) operation, stopper (771) can drive limiting plate (772) move to aligning mounting groove (712) position, so that limiting plate (772) can retract when receiving external force extrusion mounting groove (712), before second template stamp-pad printing device (300) operation, stopper (771) can drive limiting plate (772) stretch out mounting groove (712) and with form the centre gripping between the flange substrate (800).

17. A double-sided nanoimprinting apparatus as claimed in any one of claims 1 to 16, characterized by further comprising:

and the glue spraying device (8) is arranged in the imprinting operation cabin, and is used for spraying glue on the first template (901), the second template (902) or the substrate (800).

18. A double-sided nanoimprinting apparatus as claimed in claim 17, characterized in that said glue spraying device (8) comprises:

the material tank (81), wherein the material tank (81) is used for storing the sizing material;

the spray head (82), the spray head (82) is connected with the charging bucket (81);

the sixth X-axis moving mechanism (84), the sixth X-axis moving mechanism (84) is connected with the spray head (82) and is used for driving the spray head (82) to move;

and the fifth Y-axis moving mechanism (83), the fifth Y-axis moving mechanism (83) is connected with the sixth X-axis moving mechanism (84) and is used for driving the sixth X-axis moving mechanism (84) to move so as to drive the spray head (82) to move.