CN217677900U - Cooling control system for single crystal pull rod workshop - Google Patents
Cooling control system for single crystal pull rod workshop Download PDFInfo
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- CN217677900U CN217677900U CN202221895121.3U CN202221895121U CN217677900U CN 217677900 U CN217677900 U CN 217677900U CN 202221895121 U CN202221895121 U CN 202221895121U CN 217677900 U CN217677900 U CN 217677900U
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Abstract
In order to solve current single crystal growing furnace and carrying out the in-process of water-cooling, water in the technology pond reaches behind the overflow position directly with water along the direct discharge of outlet, the water resource has been wasted greatly, manufacturing cost's problem has been improved, the utility model provides a single crystal draws excellent workshop cooling control system, technology cooling pond bottom is equipped with main delivery port, inferior delivery port, main delivery port passes through the pipe connection with the electrovalve group input, be used for exporting the cooling water in the technology cooling pond to the electrovalve group in, inferior delivery port connection is equipped with self-loopa water pipe device, the self-loopa water pipe device other end is responsible for with the moisturizing and is connected, through the connection of inferior delivery port department in technology cooling pond self-loopa water pipe device, self-loopa water pipe device carries the process water that nevertheless exceeds the overflow mouth water level up to standard to export to the moisturizing and is responsible for the moisturizing of cooling tower group, resource utilization rate is improved, reduce consumption, reduction in production cost.
Description
Technical Field
The utility model relates to a single crystal pull rod workshop cooling arrangement field, it is comparatively specific, involve a single crystal pull rod workshop cooling control system.
Background
Single crystal pulling rods are used in the manufacture of semiconductor devices. The single crystal pulling rod is a solar cell, is formed by shaping or pulling a single crystal silicon rod in a hearth of a single crystal furnace through a zone melting or czochralski process, and is a silicon single crystal rod with silicon atoms rearranged according to the lattice arrangement direction of seed crystals. A single crystal furnace is an apparatus for growing a crystal ingot by pulling up a polycrystalline material such as polycrystalline silicon or the like in an atmosphere of an inert gas (mainly nitrogen or helium) by a graphite heater or the like and then by a Czochralski method. The crystal bar needs to be cooled in the manufacturing process, so that the crystal bar is fixedly formed. A spiral cooling channel is arranged on the outer side of the single crystal furnace in the circumferential direction, and cooling fluid flows in the cooling channel to cool the single crystal furnace and materials in the single crystal furnace.
In the process of water cooling of the existing single crystal furnace, water in a process water tank is directly discharged along a water outlet after reaching an overflow position, so that water resources are greatly wasted, and the production cost is increased.
In view of this, the utility model provides a cooling control system for a single crystal pulling rod workshop, which recycles the process cooling water pool and is convenient to use.
SUMMERY OF THE UTILITY MODEL
In view of this, in order to solve current single crystal growing furnace and at the in-process that carries out the water cooling, water in the technology pond directly discharges water along the outlet directly after reaching the overflow position, has wasted the water resource greatly, has improved manufacturing cost's problem, the utility model provides a single crystal draws excellent workshop cooling control system, technology cooling pond 21 bottom is equipped with main delivery port 24, inferior delivery port 25, main delivery port 24 passes through the pipe connection with 3 inputs of electronic valves, be used for exporting the cooling water in technology cooling pond 21 to the electronic valves 3 in, inferior delivery port 25 is connected and is equipped with from circulating water pipe device 9, and the other end of from circulating water pipe device 9 is connected with moisturizing person in charge 7, through connecting from circulating water pipe device 9 in the inferior delivery port 25 department at technology cooling pond 21, and from circulating water pipe device 9 carries the process water that nevertheless reaches standard and surpasss overflow mouth 211 water level and exports to moisturizing person in charge 7 for cooling tower group 1 moisturizing, improves resource utilization, reduces consumption, reduction in production cost.
The utility model provides a single crystal pull rod workshop cooling control system, includes that cooling tower group 1, technology cooling water pond group 2, electronic valves 3, cooling water supply are responsible for 4, the cooling water return is responsible for 5, single crystal growing furnace equipment group 6, moisturizing and is responsible for 7, RO water moisturizing and is responsible for 8, self-loopa water pipe device 9, its characterized in that: the output end of a cooling tower group 1 is connected with the input end of a process cooling water tank group 2 through a pipeline, the output end of the process cooling water tank group 2 is connected with an electric valve group 3 through a pipeline, the output end of the electric valve group 3 is connected with the input end of a single crystal furnace equipment group 6 through a cooling water supply main pipe 4, the output end of the single crystal furnace equipment group 6 is connected with the input end of the cooling tower group 1 through a cooling water return main pipe 5, the process cooling water tank group 2 is composed of at least 2 process cooling water tanks 21, a third water replenishing port 22 and a fourth water replenishing port 23 are arranged at the top of the process cooling water tanks 21, the third water replenishing port 22 is used for receiving normal RO water replenishing for the process cooling water tanks 21, the fourth water replenishing port 23 is used for receiving emergency tap water replenishing for the process cooling water tanks 21, and the RO water replenishing main pipe 8 is connected with the third water replenishing port 22 through a pipeline, the water replenishing main pipe 7 is connected with the fourth water replenishing port 23 through a pipeline, a conductivity sensor is arranged in the process cooling water tank 21 and used for monitoring the water quality in the process cooling water tank 21, a main water outlet 24 and a secondary water outlet 25 are arranged at the bottom of the process cooling water tank 21, the main water outlet 24 is connected with the input end of the electric valve group 3 through a pipeline and used for outputting cooling water in the process cooling water tank 21 to the electric valve group 3, a self-circulating water pipe device 9 is connected with the secondary water outlet 25 and used for outputting excessive standard-reaching water in the process cooling water tank 21 to the water replenishing main pipe 7 through the self-circulating water pipe device 9 to replenish water for the cooling tower group 1, one end of the self-circulating water pipe device 9 is connected with the secondary water outlet 25, and the other end of the self-circulating water pipe device 9 is connected with the water replenishing main pipe 7.
Further, the self-circulation water pipe device 9 comprises a self-circulation main pipe 91, a first butterfly valve, a first pressure gauge 92, a first Y-shaped filter 93, a first water release valve 94, a first soft joint, a first electric water pump 95, a second soft joint, a second pressure gauge 96, a first check valve 97, a second butterfly valve, a third butterfly valve, a filter 98 and a fourth butterfly valve are sequentially arranged from top to bottom on the self-circulation main pipe 91, and the first electric water pump 95 is electrically connected with the conductivity sensor.
Further, an overflow port 211 is arranged at the height of the overflow liquid level of the process cooling water tank 21, a drain port 212 is arranged on the side edge of the bottom of the process cooling water tank 21, the overflow port 211 is connected with the drain port 212 through a pipeline, and the drain port 212 is used for draining cooling water overflowing from the process cooling water tank 21.
Further, a liquid level sensor, a temperature sensor, a PH value sensor and a chloride ion sensor are further arranged in the process cooling water pool 21 and used for monitoring the liquid level height, the temperature, the PH value and the chloride ion concentration in the process cooling water pool 21.
Further, the lowest alarm liquid level of the process cooling water tank 21 is 1.0m, the normal liquid level is 2.9m, the alarm liquid level is 3.0m, and the overflow liquid level is 3.1m.
In some embodiments, the cooling tower assembly 1 is composed of a plurality of closed cooling towers 11, a first water replenishing port 12 and a second water replenishing port 13 are sequentially arranged at the bottom of each closed cooling tower 11, the first water replenishing port 12 is used for receiving normal tap water replenishing water, the second water replenishing port 13 is used for receiving emergency RO water replenishing water, the water replenishing main pipe 7 is connected with the first water replenishing port 12 through a pipeline, and the RO water replenishing main pipe 8 is connected with the second water replenishing port 13 through a pipeline.
In some embodiments, the electric valve set 3 is composed of a plurality of electric water pump devices 31, the electric water pump devices 31 include a first cooling water supply pipe 32, a fifth butterfly valve, a third pressure gauge 33, a second Y-shaped filter 34, a second water release valve 35, a third flexible joint, a second electric water pump 36, a fourth flexible joint, a fourth pressure gauge 37, a second check valve 38, and a sixth butterfly valve, one end of the first cooling water supply pipe 32 is connected to an output end of the process cooling water set 2, the other end of the first cooling water supply pipe 32 is connected to an input end of the single crystal furnace equipment set 6, and the first cooling water supply pipe 32 is sequentially connected to the fifth butterfly valve, the third pressure gauge 33, the second Y-shaped filter 34, the second water release valve 35, the third flexible joint, the second electric water pump 36, the fourth flexible joint, the fourth pressure gauge 37, the second check valve 38, and the sixth butterfly valve from top to bottom.
In some embodiments, the adjacent process cooling water tanks 21 are connected by a pipe, and a butterfly valve assembly is disposed on the pipe connected to the adjacent process cooling water tanks 21 to open and close the pipe.
The utility model has the advantages that: the utility model provides a single crystal draws excellent workshop cooling control system, 21 bottoms of technology cooling water pond are equipped with main delivery port 24, inferior delivery port 25, main delivery port 24 passes through the pipe connection with 3 inputs of electronic valves, be used for exporting the cooling water in the technology cooling water pond 21 to electronic valves in 3, inferior delivery port 25 is connected and is equipped with self-loopa water pipe device 9, the self-loopa water pipe device 9 other end is responsible for 7 with the moisturizing and is connected, through connecting self-loopa water pipe device 9 in the inferior delivery port 25 department of technology cooling water pond 21, self-loopa water pipe device 9 carries the process water that nevertheless exceeds overflow mouth 211 water level up to standard to carry to export to the moisturizing and is responsible for 7 and is the 1 moisturizing of cooling tower group, resource utilization is improved, and consumption is reduced, and production cost is reduced.
Drawings
Fig. 1 is a schematic structural diagram of the cooling control system of the single crystal pulling rod workshop of the present invention.
Fig. 2 is a schematic view of a local structure of the cooling control system of the single crystal pulling rod workshop of the present invention.
Fig. 3 is a schematic view of a local structure of the cooling control system of the single crystal pulling rod workshop of the present invention.
Fig. 4 is a schematic view of a partial structure of a cooling control system of a single crystal pulling rod workshop according to the present invention.
Fig. 5 is a schematic view of a partial structure of a cooling control system of a single crystal pulling rod workshop according to the present invention.
Description of the main elements
The following detailed description of the invention will be further described in conjunction with the above-identified drawings.
Detailed Description
As shown in fig. 1, is a schematic structural diagram of a cooling control system of a single crystal pulling rod workshop of the present invention; as shown in fig. 2, is a schematic view of a partial structure of a cooling control system of a single crystal pulling rod workshop according to the present invention; as shown in fig. 3, is a schematic view of a partial structure of a cooling control system of a single crystal pulling rod workshop according to the present invention; as shown in fig. 4, is a schematic view of a partial structure of a cooling control system of a single crystal pulling rod workshop according to the present invention; as shown in fig. 5, it is a schematic view of a partial structure of a cooling control system of a single crystal pulling rod workshop according to the present invention.
The utility model provides a single crystal pull rod workshop cooling control system, includes that cooling tower group 1, technology cooling water pond group 2, electronic valves 3, cooling water supply are responsible for 4, the cooling water return is responsible for 5, single crystal growing furnace equipment group 6, the moisturizing is responsible for 7, the RO water moisturizing is responsible for 8, self-loopa water pipe device 9, its characterized in that: the output end of a cooling tower group 1 is connected with the input end of a process cooling water tank group 2 through a pipeline, the output end of the process cooling water tank group 2 is connected with an electric valve group 3 through a pipeline, the output end of the electric valve group 3 is connected with the input end of a single crystal furnace equipment group 6 through a cooling water supply main pipe 4, the output end of the single crystal furnace equipment group 6 is connected with the input end of the cooling tower group 1 through a cooling water return main pipe 5, the process cooling water tank group 2 is composed of at least 2 process cooling water tanks 21, a third water replenishing port 22 and a fourth water replenishing port 23 are arranged at the top of the process cooling water tanks 21, the third water replenishing port 22 is used for receiving normal RO water replenishing for the process cooling water tanks 21, the fourth water replenishing port 23 is used for receiving emergency tap water replenishing for the process cooling water tanks 21, and the RO water replenishing main pipe 8 is connected with the third water replenishing port 22 through a pipeline, the water replenishing main pipe 7 is connected with the fourth water replenishing port 23 through a pipeline, a conductivity sensor is arranged in the process cooling water tank 21 and used for monitoring the water quality in the process cooling water tank 21, a main water outlet 24 and a secondary water outlet 25 are arranged at the bottom of the process cooling water tank 21, the main water outlet 24 is connected with the input end of the electric valve group 3 through a pipeline and used for outputting cooling water in the process cooling water tank 21 to the electric valve group 3, a self-circulating water pipe device 9 is connected with the secondary water outlet 25 and used for outputting excessive standard-reaching water in the process cooling water tank 21 to the water replenishing main pipe 7 through the self-circulating water pipe device 9 to replenish water for the cooling tower group 1, one end of the self-circulating water pipe device 9 is connected with the secondary water outlet 25, and the other end of the self-circulating water pipe device 9 is connected with the water replenishing main pipe 7.
The self-circulation water pipe device 9 comprises a self-circulation main pipe 91, wherein a first butterfly valve, a first pressure gauge 92, a first Y-shaped filter 93, a first water drain valve 94, a first soft joint, a first electric water pump 95, a second soft joint, a second pressure gauge 96, a first check valve 97, a second butterfly valve, a third butterfly valve, a filter 98 and a fourth butterfly valve are sequentially arranged from top to bottom on the self-circulation main pipe 91, and the first electric water pump 95 is electrically connected with the conductivity sensor.
The overflow liquid level height of the process cooling water tank 21 is provided with an overflow port 211, the side edge of the bottom of the process cooling water tank 21 is provided with a water discharge port 212, the overflow port 211 is connected with the water discharge port 212 through a pipeline, and the water discharge port 212 is used for discharging cooling water overflowing from the process cooling water tank 21.
And a liquid level sensor, a temperature sensor, a PH value sensor and a chloride ion sensor are also arranged in the process cooling water tank 21 and used for monitoring the liquid level height, the temperature, the PH value and the chloride ion concentration in the process cooling water tank 21.
The lowest alarm liquid level of the process cooling water tank 21 is 1.0m, the normal liquid level is 2.9m, the alarm liquid level is 3.0m, and the overflow liquid level is 3.1m.
The cooling tower group 1 comprises a plurality of closed cooling towers 11, and 11 bottoms of closed cooling towers are equipped with first moisturizing mouth 12, second moisturizing mouth 13 in proper order, and first moisturizing mouth 12 is used for receiving normal running water moisturizing, and second moisturizing mouth 13 is used for receiving emergent RO water moisturizing, and the moisturizing is responsible for 7 and is connected with first moisturizing mouth 12 through the pipeline, and RO water moisturizing is responsible for 8 and is connected with second moisturizing mouth 13 through the pipeline.
The electric valve group 3 is composed of a plurality of electric water pump devices 31, each electric water pump device 31 comprises a first cooling water supply pipe 32, a fifth butterfly valve, a third pressure gauge 33, a second Y-shaped filter 34, a second water release valve 35, a third soft joint, a second electric water pump 36, a fourth soft joint, a fourth pressure gauge 37, a second check valve 38 and a sixth butterfly valve, one end of the first cooling water supply pipe 32 is connected with the output end of the process cooling water group 2, the other end of the first cooling water supply pipe 32 is connected with the input end of the single crystal furnace equipment group 6, and the first cooling water supply pipe 32 is sequentially connected with the fifth butterfly valve, the third pressure gauge 33, the second Y-shaped filter 34, the second water release valve 35, the third soft joint, the second electric water pump 36, the fourth soft joint, the fourth pressure gauge 37, the second check valve 38 and the sixth butterfly valve from top to bottom.
The adjacent process cooling water tanks 21 are connected through a pipeline, and a butterfly valve assembly for opening and closing the pipeline is arranged on the pipeline connected with the adjacent process cooling water tanks 21.
The utility model has the advantages that: the utility model provides a single crystal draws excellent workshop cooling control system, 21 bottoms of technology cooling water pond are equipped with main delivery port 24, inferior delivery port 25, main delivery port 24 passes through the pipe connection with 3 inputs of electronic valves, be used for exporting the cooling water in the technology cooling water pond 21 to electronic valves 3 in, inferior delivery port 25 is connected and is equipped with self-loopa water pipe device 9, the self-loopa water pipe device 9 other end is responsible for 7 with the moisturizing and is connected, locate to connect self-loopa water pipe device 9 through inferior delivery port 25 at technology cooling water pond 21, from self-loopa water pipe device 9 will be up to standard but the process water of surpassing overflow mouth 211 water level carries to export to the moisturizing and is responsible for 7 and is the 1 moisturizing of cooling tower group, resource utilization is improved, and consumption is reduced, and production cost is reduced.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (8)
1. The utility model provides a single crystal pull rod workshop cooling control system, includes that cooling tower group (1), technology cooling water pond group (2), electronic valves (3), cooling water supply are responsible for (4), the cooling water return is responsible for (5), single crystal growing furnace equipment group (6), the moisturizing is responsible for (7), the RO water moisturizing is responsible for (8), self-loopa water pipe device (9), its characterized in that: the output end of a cooling tower set (1) is connected with the input end of a process cooling water tank set (2) through a pipeline, the output end of the process cooling water tank set (2) is connected with an electric valve set (3) through a pipeline, the output end of the electric valve set (3) is connected with the input end of a single crystal furnace equipment set (6) through a cooling water supply main pipe (4), the output end of the single crystal furnace equipment set (6) is connected with the input end of the cooling tower set (1) through a cooling water return main pipe (5), the process cooling water tank set (2) is composed of at least 2 process cooling water tanks (21), a third water replenishing port (22) and a fourth water replenishing port (23) are arranged at the top of the process cooling water tanks (21), and the third water replenishing port (22) is used for receiving normal RO water replenishing water for the process cooling water tanks (21), the fourth water replenishing port (23) is used for receiving emergency running water replenishing for the process cooling water tank (21), the RO water replenishing main pipe (8) is connected with the third water replenishing port (22) through a pipeline, the water replenishing main pipe (7) is connected with the fourth water replenishing port (23) through a pipeline, a conductivity sensor is arranged in the process cooling water tank (21) and used for monitoring the water quality in the process cooling water tank (21), a main water outlet (24) and a secondary water outlet (25) are arranged at the bottom of the process cooling water tank (21), the main water outlet (24) is connected with the input end of the electric valve group (3) through a pipeline, and the cooling water in the process cooling water tank (21) is output to the electric valve group (3) And the secondary water outlet (25) is connected with a self-circulating water pipe device (9) and is used for outputting the excessive standard-reaching water in the process cooling water pool (21) to the water supplementing main pipe (7) through the self-circulating water pipe device (9) to supplement water for the cooling tower set (1), one end of the self-circulating water pipe device (9) is connected with the secondary water outlet (25), and the other end of the self-circulating water pipe device (9) is connected with the water supplementing main pipe (7).
2. A single crystal pull rod plant cooling control system as claimed in claim 1, wherein: the self-circulation water pipe device (9) comprises a self-circulation main pipe (91), wherein a first butterfly valve, a first pressure gauge (92), a first Y-shaped filter (93), a first water release valve (94), a first soft joint, a first electric water pump (95), a second soft joint, a second pressure gauge (96), a first check valve (97), a second butterfly valve, a third butterfly valve, a filter (98) and a fourth butterfly valve are sequentially arranged from top to bottom of the self-circulation main pipe (91), and the first electric water pump (95) is electrically connected with the conductivity sensor.
3. A single crystal pull rod plant cooling control system as claimed in claim 1, wherein: the overflow device is characterized in that an overflow port (211) is arranged at the height of the overflow liquid level of the process cooling water pool (21), a water outlet (212) is arranged on the side edge of the bottom of the process cooling water pool (21), the overflow port (211) is connected with the water outlet (212) through a pipeline, and the water outlet (212) is used for discharging cooling water overflowing from the process cooling water pool (21).
4. A single crystal pull rod plant cooling control system as claimed in claim 1, wherein: and a liquid level sensor, a temperature sensor, a PH value sensor and a chloride ion sensor are also arranged in the process cooling water tank (21) and used for monitoring the liquid level height, the temperature, the PH value and the chloride ion concentration in the process cooling water tank (21).
5. A single crystal pull rod plant cooling control system as defined in claim 1, wherein: the lowest alarm liquid level of the process cooling water pool (21) is 1.0m, the normal liquid level is 2.9m, the alarm liquid level is 3.0m, and the overflow liquid level is 3.1m.
6. A single crystal pull rod plant cooling control system as claimed in claim 1, wherein: the cooling tower group (1) comprises a plurality of closed cooling towers (11), closed cooling tower (11) bottom is equipped with first moisturizing mouth (12), second moisturizing mouth (13) in proper order, and first moisturizing mouth (12) are used for receiving normal running water moisturizing, and second moisturizing mouth (13) are used for receiving emergent RO water moisturizing, and the moisturizing is responsible for (7) and is connected with first moisturizing mouth (12) through the pipeline, and RO water moisturizing is responsible for (8) and is connected with second moisturizing mouth (13) through the pipeline.
7. A single crystal pull rod plant cooling control system as defined in claim 1, wherein: the electric valve group (3) is composed of a plurality of electric water pump devices (31), each electric water pump device (31) comprises a first cooling water supply pipe (32), a fifth butterfly valve, a third pressure gauge (33), a second Y-shaped filter (34), a second water release valve (35), a third soft joint, a second electric water pump (36), a fourth soft joint, a fourth pressure gauge (37), a second check valve (38) and a sixth butterfly valve, one end of the first cooling water supply pipe (32) is connected with the output end of the process cooling water group (2), the other end of the first cooling water supply pipe (32) is connected with the input end of the single crystal furnace equipment group (6), and the first cooling water supply pipe (32) is sequentially connected with the fifth butterfly valve, the third pressure gauge (33), the second Y-shaped filter (34), the second water release valve (35), the third soft joint, the second electric water pump (36), the fourth soft joint, the fourth pressure gauge (37), the second check valve (38) and the sixth butterfly valve from top to bottom.
8. A single crystal pull rod plant cooling control system as defined in claim 1, wherein: the adjacent process cooling water tanks (21) are connected through a pipeline, and a butterfly valve assembly for opening and closing the pipeline is arranged on the pipeline connected with the adjacent process cooling water tanks (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221895121.3U CN217677900U (en) | 2022-07-21 | 2022-07-21 | Cooling control system for single crystal pull rod workshop |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221895121.3U CN217677900U (en) | 2022-07-21 | 2022-07-21 | Cooling control system for single crystal pull rod workshop |
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| CN217677900U true CN217677900U (en) | 2022-10-28 |
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| CN202221895121.3U Active CN217677900U (en) | 2022-07-21 | 2022-07-21 | Cooling control system for single crystal pull rod workshop |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115790197A (en) * | 2022-12-16 | 2023-03-14 | 江苏源一工程科技有限公司 | Energy-conserving stationary flow chilled water system in battery workshop |
-
2022
- 2022-07-21 CN CN202221895121.3U patent/CN217677900U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115790197A (en) * | 2022-12-16 | 2023-03-14 | 江苏源一工程科技有限公司 | Energy-conserving stationary flow chilled water system in battery workshop |
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