CN217620206U

CN217620206U - Clamping device and bearing equipment

Info

Publication number: CN217620206U
Application number: CN202221705370.1U
Authority: CN
Inventors: 张龙; 黄有为; 陈鲁; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2022-07-01
Filing date: 2022-07-01
Publication date: 2022-10-21
Anticipated expiration: 2032-07-01

Abstract

The embodiment of the utility model discloses a clamping device and bearing equipment. The clamping device includes, for example: a base; the rotary table comprises a rotary table main body and a clamping piece rotating shaft; the turntable main body is connected to the base, and the clamping piece rotating shaft is arranged on a first side face, far away from the base, of the turntable main body; the clamping component is provided with a rotating hole, and the rotating hole is sleeved on the clamping piece rotating shaft; and the limiting assembly is connected to the rotary table and is abutted against the clamping assembly to limit the clamping assembly. The utility model provides a clamping device can promote the centre gripping effect and the maintenance efficiency of the wafer that awaits measuring.

Description

Clamping device and bearing equipment

Technical Field

The utility model relates to the field of semiconductor technology, especially, relate to a clamping device and a bear equipment.

Background

When an air bearing device (chuck) uses a clamping piece to clamp a workpiece to be tested, such as a wafer (wafer), in the prior art, the wafer is usually clamped through one clamping piece, but in the process of clamping the wafer, the clamping force is usually unstable, so that the wafer cannot be clamped or is clamped too tightly, the wafer is damaged or the clamping piece is damaged, and metal ions are scattered to pollute the wafer.

When the clamping piece is fixed, as the common clamping piece rotates and is fixed in a screw rotation mode, when the screwing angle of the clamping piece is not aligned, the clamping piece can be screwed, the angle of the clamping piece is not aligned, and therefore the maintenance efficiency of the bearing device is reduced.

SUMMERY OF THE UTILITY MODEL

To at least some problems among the prior art and not enough, the embodiment of the utility model discloses a clamping device and should clamping device's equipment that bears has promoted the centre gripping effect and the maintenance efficiency of the wafer that awaits measuring.

In one aspect, an embodiment of the present invention provides a wafer clamping device, for example, including: a base; the rotary table comprises a rotary table main body and a clamping piece rotating shaft; the turntable main body is connected to the base, and the clamping piece rotating shaft is arranged on a first side face, far away from the base, of the turntable main body; the clamping component is provided with a rotating hole, and the rotating hole is sleeved on the clamping piece rotating shaft; and the limiting assembly is connected to the rotary table and is abutted against the clamping piece to limit the clamping assembly.

In an embodiment of the present invention, the holder rotating shaft includes a first holder rotating shaft and a second holder rotating shaft, and the first holder rotating shaft and the second holder rotating shaft are respectively disposed at two opposite ends of the first side surface of the turntable main body; the clamping assembly comprises a first clamping piece and a second clamping piece, the first clamping piece is provided with a first rotating hole, and the first rotating hole is sleeved on the rotating shaft of the first clamping piece and can rotate relative to the rotating table; the second clamping piece is provided with a second rotating hole which is sleeved on the rotating shaft of the second clamping piece and can rotate relative to the rotating table; the two opposite ends of the rotary table are also provided with a first mounting hole and a second mounting hole; the limiting assembly comprises a first limiting part and a second limiting part, the first limiting part comprises a first through hole, the first limiting part passes through the first through hole, the first mounting hole is installed on the rotary table and abutted against the first clamping piece, the second limiting part comprises a second through hole, and the second limiting part passes through the second through hole, the second mounting hole is installed on the rotary table and abutted against the second clamping piece.

In an embodiment of the present invention, the first clamping member is further provided with a first limiting side surface; the first limiting piece is provided with a first limiting groove, and the first limiting side face is clamped in the first limiting groove; the second clamping piece is also provided with a second limiting side face; and a second limiting groove is formed in the second limiting part, and the second limiting side face is clamped in the second limiting groove.

In an embodiment of the present invention, the base includes: a base station; a displacement table connected to the base table; and the fixed station is connected to the displacement table and is provided with a fixed seat, the fixed seat is provided with a rotary table, the fixed station can reciprocate relative to the base station under the driving of the displacement table, and the rotary table main body is arranged on the fixed seat.

In an embodiment of the present invention, the displacement table includes: the positioning base is arranged on the base platform; the pneumatic assembly is connected to the positioning base; and the moving seat is connected to the positioning base and can drive the fixed table to reciprocate relative to the positioning base under the driving of the pneumatic assembly.

In an embodiment of the present invention, the base further includes: the elastic piece comprises a first connecting end, a second connecting end and a bent section, the bent section is connected between the first connecting end and the second connecting end, the first connecting end and the second connecting end are respectively abutted against the fixed seat, the first connecting end and the second connecting end of the elastic piece are respectively provided with an adjusting hole, and the bent section protrudes and extends along one side, away from the fixed seat, of the first connecting end; and the fixing piece is arranged in the adjusting hole in a penetrating mode and is connected to the fixing seat.

In an embodiment of the present invention, the base further includes a distance adjusting plate, and the elastic piece is connected to the fixing seat through the fixing member and the distance adjusting plate.

In an embodiment of the present invention, the fixing base is provided with an adjustable distance hole; the base further comprises a push rod, the push rod penetrates through the distance adjusting hole and abuts against one side, far away from the elastic sheet, of the distance adjusting plate.

In an embodiment of the present invention, the fixing base is provided with a turntable connecting hole; and a rotary table rotating shaft is arranged on one side of the rotary table main body, which is adjacent to the fixed seat, penetrates through the rotary table connecting hole and can rotate around the center of the rotary table rotating shaft relative to the base.

On the other hand, the embodiment of the utility model provides a bear equipment, for example include: a carrying device; and the clamping device is connected to the edge of the bearing device so as to clamp the to-be-tested piece borne by the air floatation bearing device.

In view of the above, the above technical features of the present invention can have one or more of the following advantages: through setting up spacing subassembly to the centre gripping subassembly to the realization is to the restriction of the angle of centre gripping subassembly, the angle when having solved among the prior art centre gripping subassembly centre gripping piece such as wafer is not to the problem, has promoted clamping device's efficiency. In addition, through set up the elastic component such as the shell fragment on the fixing base to can make can realize the adjustment to clamping device's centre gripping strength through the shell fragment. Moreover, the distance between the elastic piece and the bearing device can be adjusted by arranging the distance adjusting plate and the push rod.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a carrying device according to an embodiment of the present invention.

Fig. 2 is a schematic structural view of the clamping device in fig. 1.

Fig. 3 is a schematic structural view of another view angle of the clamping device in fig. 1.

Fig. 4 is an exploded view of the clamping device of fig. 2.

Fig. 5 is an exploded view of the base of fig. 2.

Fig. 6 is a schematic structural view of the turntable in fig. 2.

Fig. 7 is a schematic structural view of another view angle of the turntable in fig. 2.

Fig. 8 is a schematic structural view of the clamping member in fig. 2.

Fig. 9 is a schematic structural diagram of the position limiting element in fig. 2.

Fig. 10 is a schematic structural view of the distance adjusting plate in fig. 5.

Fig. 11 is a schematic structural view of the elastic sheet in fig. 5.

Fig. 12 is a schematic structural view of the elastic sheet in fig. 5 from another view angle.

Detailed Description

To make the purpose, technical solution and advantages of the present invention clearer, the following will combine the embodiments of the present invention and the corresponding drawings to clearly and completely describe the technical solution of the present invention. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It should be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outer", "side", etc., used in the embodiments of the present invention are only referring to the directions of the appended drawings. Accordingly, the directional terms used are used for describing and understanding the present invention, and are not used for limiting the present invention. For understanding and ease of description, the size and thickness of each component shown in the drawings are arbitrarily illustrated, but the present invention is not limited thereto.

It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. In addition, in the description, unless explicitly described to the contrary, the word "comprise" will be understood to mean that the recited components are included, but not to exclude any other components. Further, in the specification, "on" \8230; \8230 ";" on "means above or below the target component, and does not mean that it must be on top based on gravity.

Some embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.

As shown in fig. 1, an embodiment of the present invention provides a carrying device 50. The carrying apparatus 50 is used for carrying and fixing a workpiece, such as a wafer. Further, the carrying device 50 herein may be, for example, an air-floating carrying device. The carrying apparatus 50 may be used for carrying and fixing a wafer to be tested, for example, for the wafer testing apparatus to perform a test, such as defect inspection, specifically, for example, flatness test, on the wafer to be tested. Referring to fig. 1, a carrying apparatus 50 provided by the embodiment of the present invention includes, for example, a carrying device 30 and a holding device 10. Specifically, the carrying device 30 is used for carrying the wafer to be tested, and the specific structure thereof can refer to the structure and technical scheme of the carrying device mature in the market, which is not described herein again. The clamping device 10 is used for clamping and fixing a wafer to be tested, for example. The holding device 10 is connected to the carrier device 30, specifically, the carrier device 30 is an assembly of a circular disk-shaped structure, for example, and the holding device 10 is connected to the edge position of the carrier device 30.

Further, as shown in fig. 2 and 3, the clamp apparatus 10 includes, for example, a base 11, a turntable 13, clamp assemblies 15, 151152, and a stopper assembly 17171172. Turntable 13 is disposed on base 11, clamping assembly 151152 is disposed on turntable 13, and limiting assemblies 171172 are disposed on turntable 13 and respectively abut against clamping assembly 151152 to limit clamping assembly 151152.

Further, the clamp assembly 15 includes, for example, a clamp 151 and a clamp 152. The limiting component 17 includes, for example, a limiting member 171 and a limiting member 172. The clamping members 151 and the clamping members 152 are respectively disposed on the rotary table 13, and the limiting members 171 and the limiting members 172 are respectively disposed on the rotary table 13 and abut against the clamping members 151 and the clamping members 152 in a one-to-one correspondence to limit the positions.

Specifically, the base 11 is, for example, a support-seat-type component for supporting and mounting other components of the clamping device 10. The base 11 is connected to the carrying device 30, and specifically, the base 11 connecting piece is connected to the bottom of the carrying device 30. As shown in fig. 4, the base 11 includes, for example, a base 111, a displacement table 112, and a fixing table 113.

As shown in fig. 4 and 5, a slider 1111 is provided on the base 111. Correspondingly, the bottom of the bearing device 30 is provided with a sliding rail, and the sliding strip 1111 is embedded in the sliding rail, so that the base 11 and the bearing device 30 form a sliding connection. In addition, the base 111 may further include a fixing hole, and the base 111 is fixedly connected to the carrier 30 through the fixing hole.

As shown in fig. 5, the displacement table 112 is connected, for example, between the base table 111 and the fixed table 113 for bringing the fixed table 113 to reciprocate relative to the base table 111. Specifically, as shown in fig. 4 and 5, the displacement table 112 includes, for example: a positioning base 1121, a pneumatic assembly 1122, and a moving base 1123. The positioning base 1121 is attached to the base 111, for example, by a threaded connection. A pneumatic assembly 1122 is attached to the positioning base 1121. A movable base 1123 is attached to the positioning base. The pneumatic assembly 1122 includes various pneumatic elements, such as pneumatic valves, for connecting to a gas source and driving the movable base 1123 to reciprocate relative to the positioning base 1121 to move the fixed stage 113.

As shown in fig. 4 and 5, the fixed stage 113 is attached to the side of the displacement stage 112 away from the base 111, that is, the displacement stage 112 is attached between the fixed stage 113 and the base 111. The fixed stage 113 reciprocates relative to the base stage 111 with the movement of the movable base 1123 by the drive of the pneumatic unit 1122 of the displacement stage 112. In addition, a fixing seat 1131 is further disposed on the fixing table 113. The fixing base 1131 is provided with a turntable coupling hole 1132. Further, the turntable coupling hole 1132 may be, for example, a flat square hole, that is, the turntable coupling hole 1132 is provided with two inner side walls parallel to each other.

As shown in fig. 4 and 6, the turntable 13 is provided on the base 11. Specifically, the turntable 13 includes, for example, a turntable main body 131 and a turntable rotation shaft 132. The rotary table 13 is connected to the fixing base 1131 of the base 11, and more specifically, the rotary table 13 is connected to the rotary table connecting hole 1132 of the fixing base 1131 through the rotary table rotating shaft 132. In this way, the turntable 13 can rotate back and forth relative to the fixing base 1131, and the relative position can be properly adjusted, so as to perform the loading and inspection of the wafer at a more suitable angle. Further, the turntable shaft 132 is provided with two opposite flat sides. Preferably, the two flat faces are arranged in parallel. The width between the two flat sides is not greater than the distance between the two inner side walls of the flat square hole on the turntable coupling hole 1132. In this way, the turntable 13 can rotate within a certain range with respect to the fixed table 113, thereby adjusting the angle of the turntable.

As shown in fig. 6 and 7, the turntable main body 131 is further provided with a clamp rotating shaft 133 and a clamp rotating shaft 134. The clamp rotating shaft 133 and the clamp rotating shaft 134 are provided on the side of the turntable body 1132 remote from the base 11. That is, the holder rotating shaft 133 and the holder rotating shaft 134 are located on opposite sides of the turntable body 1132 from the turntable rotating shaft 132. The holder rotating shaft 133 and the holder rotating shaft 134 may be located at opposite ends of the turntable body 1132, for example. It should be noted that only one of the clamping member rotating shaft 133 and the clamping member rotating shaft 134 may be provided, or more rotating shafts may be provided, which is not limited in the present application.

As shown in fig. 4 and 8, the clamp assembly 15 includes two clamp members, for example, including a clamp member 151 and a clamp member 152. The clamping

members

151 and 152 may, for example, have the same structure. The rotating hole 151 of the clamping member 151 is sleeved on the clamping member rotating shaft 133, and the same rotating hole of the clamping member 152 and the clamping member rotating shaft 134 form a double-clamping-member structure. Two clamping members are provided on the turntable 13, for example. The two clamping members are used for clamping the wafer to be tested carried on the carrying device 30. The number of the clamping pieces can be one or more, and the application is not limited to this. The clamping piece is provided with a rotating hole, and the rotating hole is sleeved on the rotating shaft of the clamping piece, so that the clamping piece can rotate relative to the rotating table 13.

Further, as shown in fig. 7, the opposite ends of the turn table 13 are also provided with mounting

holes

135 and 136. Accordingly, as shown in fig. 4, the number of the limiting members is, for example, two, and the limiting members include a limiting member 171 and a limiting member 172 for limiting the angle of the clamping member relative to the wafer to be measured. The

stoppers

171 and 172 have the same structure, for example. Specifically, as shown in fig. 9, the limiting member 171 includes, for example, a through hole 1711, and the limiting member 171 is mounted 135 on the rotary table 13 and abuts against the clamping member 151 through the through hole 1711 and the mounting hole. The limiting member 172 is also provided with a through hole, and the limiting member 172 is mounted 136 on the rotating platform 13 through the through hole and the mounting hole and abuts against the clamping member 152. In this way, the position of the clamping member 151 and the clamping member 152 can be limited by the

position limiting members

171 and 172, and a double-position limiting structure is formed. More specifically, as shown in fig. 8, a limiting side 1512 is further disposed on the clamping member 151. As shown in fig. 9, the limiting member 171 is provided with a limiting groove 1712, and the limiting side surface 1512 is clamped in the limiting groove 1712. Similarly, the clamping member 152 is also provided with a limiting side surface; the limiting member 172 is provided with a limiting groove, and a limiting side surface of the clamping member 152 is clamped in the limiting groove of the limiting member 172. The quantity of locating parts is the same with the quantity of holder. When the clamping piece is one, the limiting piece can be one; when the holder is 2, the locating part also can be 2, the utility model discloses not use this as the limit.

In addition, as shown in fig. 4, the base 11 may further include a spring plate 114, a fixing member 115, and a distance adjusting plate 116. The spring piece 114 is connected to the distance adjustment plate 116, for example, through the fixing member 115, and the distance adjustment plate 116 is connected to the fixing member 1132.

Specifically, as shown in fig. 5, the fixing seat 1132 is further provided with two connecting holes 1133. Of course, the number of the connecting holes 1133 may be 3 or more.

As shown in fig. 5 and 10, two connecting posts 1161 are provided on the distance adjustment plate 116. Of course, the number of the connecting posts 1161 can be 3 or more, which is the same as the number of the connecting holes 1133 on the fixing base 1132. The connecting post 1161 of the distance adjusting plate 116 is inserted into the connecting hole 1133 of the fixing base 1132, and is connected to the fixing base 1132 through a threaded connection member such as a nut.

In addition, two spring piece mounting holes 1162 are provided on the distance adjusting plate 116. The number of the spring plate mounting holes 1162 may be 3 or more, for example.

As shown in fig. 5, 11 and 12, the elastic sheet 114 is, for example, an elastic sheet member. Specifically, the elastic piece 114 includes, for example, a connection end 1141, a connection end 1142, and a bent section 1143. Curved section 1143 is connected between connecting band 1141 and connecting end 1142. The curved section 1143 is, for example, an arc-shaped curved section. The curved section 1143 is formed with a concave curved sheet-like curved structure. In addition, connecting end 1141 is further provided with adjusting hole 11411, and connecting end 1142 is further provided with adjusting hole 11421. Wherein, the adjusting

holes

11411 and 11421 may be oblong holes, for example. The length directions of the adjustment holes 11411 and 11421 are the same. The fixing member 115 is, for example, a threaded connection member such as a bolt or a screw. One fixing element 115 penetrates through the adjusting hole 11411 and is connected to one spring piece mounting hole 1162 on the distance adjusting plate 116, and the other fixing element 115 penetrates through the adjusting hole 11421 and is connected to one spring piece mounting hole 1162 on the distance adjusting plate 116, so that the spring pieces 114 are connected to the distance adjusting plate 116 through the fixing elements 115. Meanwhile, the curved section 1143 of the elastic sheet 114 is located on a side of the connecting band 1141 away from the distance adjusting plate 116, that is, the curved section 1143 protrudes and extends towards a side away from the distance adjusting plate 116, that is, the curved section 1143 extends towards the carrying device 30. In this way, when the elastic sheet 114 is not pressed by the carrying device 30, the two fixing members 115 respectively abut against the two adjusting holes 11411 of the elastic sheet 114 and the inner side walls of the adjusting holes 11421; when the elastic sheet 114 is pressed by the carrier 30, the two fixing members 115 respectively abut against the two adjusting holes 11411 and the opposite outer side walls of the adjusting holes 11421 of the elastic sheet 114, so that the clamping force of the clamping device can be adjusted by the elastic sheet.

As shown in fig. 5, the fixing seat 1132 of the fixing table 113 is further provided with an adjustable distance hole 1134.. The base 11 also includes, for example, a push rod 117. The pushing rod 117 is inserted into the distance adjusting hole 1134 of the fixing seat 1132, and abuts against one side of the distance adjusting plate 116 far away from the elastic sheet 114. The user can push the distance between the distance adjusting plate 116 and the fixing seat 1132 by the pushing rod 117, so as to adjust the distance between the elastic sheet 114 and the carrying device 30. The number of the distance-adjusting holes 1134 is, for example, 2, and the number of the distance-adjusting holes 1134 may also be 2.

Of course, in other embodiments of the present application, the base 11 may not be provided with the distance adjustment plate 116 and the pushing rod 117, and the elastic sheet 114 and the fixing member 115 may be directly connected to the fixing seat 1132. In addition, the base 11 may not be provided with the pushing rod 117, but the elastic sheet 114 and the fixing member 115 are directly connected to the distance adjustment plate 116, and the distance between the elastic sheet 114 and the carrying device 30 may be adjusted by replacing the distance adjustment plate 116 with different thicknesses.

To sum up, the embodiment of the utility model provides a through set up spacing subassembly to the centre gripping subassembly to the realization is to the restriction of the angle of centre gripping subassembly, and the angle when having solved centre gripping subassembly centre gripping wafer among the prior art is not to the problem, has promoted clamping device's efficiency. In addition, through set up elastic component such as shell fragment on the fixing base to can make can realize the adjustment to clamping device's centre gripping strength through the shell fragment. Moreover, the distance between the elastic piece and the bearing device can be adjusted by arranging the distance adjusting plate and the push rod.

It can be understood that, the foregoing embodiments are only exemplary illustrations of the present invention, and the technical solutions of the embodiments can be combined and matched arbitrarily on the premise that the technical features are not conflicted, the structure is not contradictory, and the purpose of the present invention is not violated.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications or substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A clamping device, comprising:

a base;

the rotary table comprises a rotary table main body and a clamping piece rotating shaft; the turntable main body is connected to the base, and the clamping piece rotating shaft is arranged on a first side face, far away from the base, of the turntable main body;

the clamping component is provided with a rotating hole, and the rotating hole is sleeved on the clamping piece rotating shaft; and

and the limiting assembly is connected to the rotary table and abutted against the clamping piece to limit the clamping assembly.

2. The clamping device of claim 1, wherein said clamp member pivot axis comprises a first clamp member pivot axis and a second clamp member pivot axis, said first clamp member pivot axis and said second clamp member pivot axis being disposed at opposite ends of said first side of said turntable body, respectively;

the clamping assembly comprises a first clamping piece and a second clamping piece, the first clamping piece is provided with a first rotating hole, and the first rotating hole is sleeved on the rotating shaft of the first clamping piece and can rotate relative to the rotating table; the second clamping piece is provided with a second rotating hole which is sleeved on the rotating shaft of the second clamping piece and can rotate relative to the rotating table;

the two opposite ends of the rotary table are also provided with a first mounting hole and a second mounting hole;

the limiting assembly comprises a first limiting part and a second limiting part, the first limiting part comprises a first through hole, the first limiting part passes through the first through hole, the first mounting hole is installed on the rotary table and abutted against the first clamping piece, the second limiting part comprises a second through hole, and the second limiting part passes through the second through hole, the second mounting hole is installed on the rotary table and abutted against the second clamping piece.

3. The clamping device of claim 2, wherein said first clamping member further comprises a first stop side; a first limiting groove is formed in the first limiting piece, and the first limiting side face is clamped in the first limiting groove; the second clamping piece is also provided with a second limiting side face; and a second limiting groove is formed in the second limiting part, and the second limiting side face is clamped in the second limiting groove.

4. The clamping device of claim 1, wherein the base comprises:

a base station;

a displacement table connected to the base table; and

the fixed table is connected to the displacement table and provided with a fixed seat, a rotary table is arranged on the fixed seat, the fixed table can reciprocate relative to the base table under the driving of the displacement table, and the rotary table main body is arranged on the fixed seat.

5. The clamping device of claim 4, wherein the displacement table comprises:

the positioning base is arranged on the base platform;

the pneumatic assembly is connected to the positioning base; and

and the moving seat is connected to the positioning base and can drive the fixed table to reciprocate relative to the positioning base under the driving of the pneumatic assembly.

6. The clamping device of claim 4, wherein the base further comprises:

the elastic sheet comprises a first connecting end, a second connecting end and a bent section, the bent section is connected between the first connecting end and the second connecting end, the first connecting end and the second connecting end are respectively abutted against the fixed seat, the first connecting end and the second connecting end of the elastic sheet are respectively provided with an adjusting hole, and the bent section protrudes and extends along one side, away from the fixed seat, of the first connecting end; and

the fixing part is arranged in the adjusting hole in a penetrating mode and is connected to the fixing seat.

7. The clamping device of claim 6, wherein the base further comprises a distance adjusting plate, and the spring plate is connected to the fixed seat through the fixing member and the distance adjusting plate.

8. The clamping device as recited in claim 7, wherein said mounting base is provided with a distance adjustment hole; the base further comprises a push rod, the push rod penetrates through the distance adjusting hole and abuts against one side, far away from the elastic sheet, of the distance adjusting plate.

9. The clamping device of claim 4, wherein the fixed base is provided with a turntable attachment hole; and a rotary table rotating shaft is arranged on one side of the rotary table main body, which is adjacent to the fixed seat, penetrates through the rotary table connecting hole and can rotate around the center of the rotary table rotating shaft relative to the base.

10. A bearing device is characterized by comprising

A carrying device; and

the clamping device of any one of claims 1-9, connected to the carrier device for clamping a test object carried by the carrier device.