CN217788375U

CN217788375U - Wafer clamping device and bearing equipment

Info

Publication number: CN217788375U
Application number: CN202221697792.9U
Authority: CN
Inventors: 张龙; 黄有为; 陈鲁; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2022-07-01
Filing date: 2022-07-01
Publication date: 2022-11-11
Anticipated expiration: 2032-07-01

Abstract

The embodiment of the utility model discloses a wafer clamping device and should wafer clamping device's air supporting bears equipment. The wafer clamping device comprises: a base; the rotary table comprises a rotary table main body, a first clamping piece rotating shaft and a second clamping piece rotating shaft; the turntable main body is connected to the base; the first clamping piece rotating shaft and the second clamping piece rotating shaft are respectively connected to two opposite ends of a first side face, far away from the base, of the turntable main body; the first clamping piece is provided with a first rotating hole, and the first rotating hole is sleeved on the rotating shaft of the first clamping piece and can rotate relative to the rotating table; and the second clamping piece is provided with a second rotating hole, and the second rotating hole is sleeved on the rotating shaft of the second clamping piece and can rotate relative to the rotating table. The utility model provides a wafer clamping device can improve clamping device add the stability of holding power and promote the centre gripping effect.

Description

Wafer clamping device and bearing equipment

Technical Field

The utility model relates to the field of semiconductor technology, especially, relate to a wafer clamping device and a bear equipment.

Background

When the air floatation bearing device (chuck) uses the clamping piece to clamp the wafer (wafer), in the prior art, the wafer is usually clamped through one clamping piece, but in the process of clamping the wafer, the clamping force is usually unstable, so that the wafer cannot be clamped or clamped tightly, the wafer is damaged or the clamping piece is damaged, and metal ions are scattered to pollute the wafer.

SUMMERY OF THE UTILITY MODEL

To at least some problems and not enough among the prior art, the embodiment of the utility model discloses a wafer clamping device and one kind bear equipment to improve clamping device add the stability of holding power and promote the centre gripping effect.

In one aspect, an embodiment of the present invention provides a wafer clamping device, for example, including: a base; the rotary table comprises a rotary table main body, a first clamping piece rotating shaft and a second clamping piece rotating shaft; the turntable main body is connected to the base; the first clamping piece rotating shaft and the second clamping piece rotating shaft are respectively connected to two opposite ends of a first side face, far away from the base, of the rotary table main body; the first clamping piece is provided with a first rotating hole, and the first rotating hole is sleeved on the rotating shaft of the first clamping piece and can rotate relative to the rotating table; and the second clamping piece is provided with a second rotating hole, and the second rotating hole is sleeved on the rotating shaft of the second clamping piece and can rotate relative to the rotating table.

In an embodiment of the present invention, the base is provided with a turntable connecting hole; the second side surface of the turntable main body, which is adjacent to the base, is provided with a turntable rotating shaft, and the turntable rotating shaft is sleeved in the turntable connecting hole and can rotate around the center of the turntable connecting hole relative to the base.

In an embodiment of the present invention, the base includes: a base station; the displacement table is connected to the base table; and the fixed station is connected to the displacement table and is provided with a fixed seat, the fixed seat is provided with a rotary table, the fixed station can reciprocate relative to the base station under the driving of the displacement table, and the rotary table main body is arranged on the fixed seat.

In an embodiment of the present invention, the displacement table includes: the positioning base is arranged on the base platform; the pneumatic assembly is connected to the positioning base; and the moving seat is connected to the positioning base and can drive the fixed table to reciprocate relative to the positioning base under the driving of the pneumatic assembly.

In an embodiment of the present invention, the base further includes: the elastic piece comprises a first connecting end, a second connecting end and a bent section, the bent section is connected between the first connecting end and the second connecting end, the first connecting end and the second connecting end are respectively abutted against the fixed seat, the first connecting end and the second connecting end of the elastic piece are respectively provided with an adjusting hole, and the bent section protrudes and extends along one side, away from the fixed seat, of the first connecting end; and the fixing piece is arranged in the adjusting hole in a penetrating mode and is connected to the fixing seat.

In an embodiment of the present invention, the base further includes a distance adjusting plate, and the elastic piece is connected to the fixing seat through the fixing member and the distance adjusting plate.

In an embodiment of the present invention, the fixing base is provided with a connecting hole, the distance adjusting plate is provided with a connecting column, the connecting column is inserted into the connecting hole and connected to the fixing base, the fixing member passes through the elastic piece the adjusting hole is connected to the distance adjusting plate.

In an embodiment of the present invention, the fixing base is provided with a mounting hole; the wafer clamping device further comprises a pushing rod, wherein the pushing rod penetrates through the mounting hole and abuts against one side, far away from the elastic sheet, of the distance adjusting plate.

The utility model discloses an in one embodiment, be provided with the draw runner on the base station, the draw runner be used for with bear the weight of the last slide rail sliding connection of device, it is used for bearing the weight of the wafer that awaits measuring to bear the device.

On the other hand, the embodiment of the utility model provides a bear equipment, for example include: a carrying device; the wafer clamping device is connected to the edge of the carrying device to clamp the wafer to be tested carried by the carrying device.

In view of the above, the above technical features of the present invention can have one or more of the following advantages: through setting up two holders, can promote the clamping-force that adds of holder to can promote the clamping effect of holder to the wafer that awaits measuring. In addition, the limiting part is arranged on the clamping part to limit the angle of the clamping part, so that the problem that the angle of the clamping part is not aligned when the clamping part clamps the wafer in the prior art is solved, and the efficiency of the wafer clamping device is improved. In addition, the elastic piece such as the elastic sheet is arranged on the fixed seat, so that the clamping force of the wafer clamping device can be adjusted through the elastic sheet. Moreover, the distance between the elastic piece and the bearing device can be adjusted by arranging the distance adjusting plate and the push rod.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a carrying device according to an embodiment of the present invention.

Fig. 2 is a schematic structural diagram of the wafer clamping device in fig. 1.

Fig. 3 is a schematic view of the wafer clamping device in fig. 1 from another perspective.

Fig. 4 is an exploded view of the wafer clamping device shown in fig. 2.

Fig. 5 is an exploded view of the base of fig. 2.

Fig. 6 is a schematic structural view of the turntable in fig. 2.

Fig. 7 is a schematic structural view of another view angle of the turntable in fig. 2.

Fig. 8 is a schematic structural view of the clamping member in fig. 2.

Fig. 9 is a schematic structural diagram of the position limiting element in fig. 2.

Fig. 10 is a schematic structural view of the distance adjusting plate in fig. 5.

Fig. 11 is a schematic structural view of the elastic sheet in fig. 5.

Fig. 12 is a schematic structural view of the elastic sheet in fig. 5 from another view angle.

Detailed Description

To make the purpose, technical solution and advantages of the present invention clearer, the following will combine the embodiments of the present invention and the corresponding drawings to clearly and completely describe the technical solution of the present invention. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It should be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outer", "side", and the like, used in the embodiments of the present invention are only directions referring to the attached drawings. Accordingly, the directional terms used are used for describing and understanding the present invention, and are not used for limiting the present invention. For understanding and ease of description, the size and thickness of each component shown in the drawings are arbitrarily illustrated, but the present invention is not limited thereto.

It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. In addition, in the description, unless explicitly described to the contrary, the word "comprise" will be understood to mean that the recited components are included, but not to exclude any other components. Further, in the specification, "on … …" means above or below the target component, and does not mean that it must be on top of gravity.

Some embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The embodiments described below and the features of the embodiments can be combined with each other without conflict.

As shown in fig. 1, an embodiment of the present invention provides a carrying device 50. The carrying apparatus 50 is used for carrying and fixing a to-be-tested object, which may be, for example, a wafer, so that the wafer inspection apparatus can perform inspection, such as defect inspection, specifically, for example, flatness inspection, on the to-be-tested wafer. Further, the carrying device 50 herein may be, for example, an air-float carrying device. Referring to fig. 1, a carrier apparatus 50 according to an embodiment of the present invention includes, for example, a carrier 30 and a wafer holding device 10. Specifically, the carrying device 30 is used for carrying the wafer to be tested, and the specific structure thereof can refer to the structure and technical scheme of the carrying device mature in the market, which is not described herein again. The wafer holding apparatus 10 is used for holding and fixing a wafer to be tested. The wafer holding device 10 is connected to a carrier device 30, specifically, the carrier device 30 is a component of a circular disk-shaped structure, and the wafer holding device 10 is connected to an edge position of the carrier device 30.

As shown in fig. 2 and 3, the wafer clamping device 10 includes, for example, a base 11, a turntable 13, a clamping member 121 (corresponding to a first clamping member), a clamping member 122 (corresponding to a second clamping member), a limiting member 123 (corresponding to a first limiting member), and a limiting member 124 (corresponding to a second limiting member). The turntable 13 is disposed on the base 11, the

clamps

121 and 122 are disposed on the turntable 13, and the

stoppers

123 and 124 are respectively disposed on the turntable 13 and abut against the

clamps

121 and 122, respectively, to restrict the

clamps

121 and 122.

Specifically, the base 11 is, for example, a support base type component for supporting and mounting other components of the wafer chuck apparatus 10. The base 11 is connected to the carrying device 30, and specifically, the base 11 connecting piece is connected to the bottom of the carrying device 30. As shown in fig. 4, the base 11 includes, for example, a base 111, a displacement table 112, and a fixed table 113.

As shown in fig. 4 and 5, a slider 1111 is provided on the base 111. Correspondingly, the bottom of the carrier 30 is provided with a slide rail, and the slide 1111 is embedded in the slide rail so that the base 11 and the carrier 30 form a sliding connection. In addition, the base 111 may further include a fixing hole, and the base 111 is fixedly connected to the carrier 30 through the fixing hole.

As shown in fig. 5, the displacement table 112 is connected, for example, between the base table 111 and the fixed table 113 for bringing the fixed table 113 to reciprocate relative to the base table 111. Specifically, as shown in fig. 4 and 5, the displacement table 112 includes, for example: a positioning base 1121, a pneumatic assembly 1122, and a moving base 1123. The positioning base 1121 is attached to the base 111, for example, by a threaded connection. A pneumatic assembly 1122 is attached to the positioning base 1121. A movable base 1123 is attached to the positioning base. The pneumatic assembly 1122 includes various pneumatic elements, such as pneumatic valves, for connecting to a gas source and driving the movable base 1123 to reciprocate relative to the positioning base 1121 to move the fixed stage 113.

As shown in fig. 4 and 5, the fixed stage 113 is attached to the displacement stage 112 on a side away from the base 111, that is, the displacement stage 112 is attached between the fixed stage 113 and the base 111. The fixed table 113 reciprocates relative to the base table 111 in accordance with the movement of the movable base 1123 by the drive of the pneumatic unit 1122 of the displacement table 112. In addition, a fixing seat 1131 is further disposed on the fixing table 113. The fixing base 1131 is provided with a turntable coupling hole 1132. Further, the turntable connecting hole 1132 may be, for example, a flat square hole, that is, two inner side walls parallel to each other are disposed on the turntable connecting hole 1132.

As shown in fig. 4 and 6, the turntable 13 is provided on the base 11. Specifically, the turntable 13 includes, for example, a turntable main body 131 and a turntable rotation shaft 132. The rotary table 13 is connected to the fixing base 1131 of the base 11, and more specifically, the rotary table 13 is connected to the rotary table connecting hole 1132 of the fixing base 1131 through the rotary table rotating shaft 132. In this way, the turntable 13 can rotate back and forth relative to the fixing base 1131, and the relative position can be properly adjusted, so as to perform the wafer loading and inspection at a more suitable angle. Further, two flat sides are provided on the turntable shaft 132. Preferably, the two flat faces are arranged in parallel. The width between the two flat sides is not greater than the distance between the two inner side walls of the flat square hole on the turntable connection hole 1132. In this way, the turntable 13 can rotate within a certain range relative to the fixed table 113, thereby adjusting the angle of the turntable.

As shown in fig. 6 and 7, the turntable main body 131 is further provided with a clamp rotating shaft 133 and a clamp rotating shaft 134. The clamp rotating shaft 133 and the clamp rotating shaft 134 are provided on the side of the turntable body 1132 remote from the base 11. That is, the holder rotating shaft 133 and the holder rotating shaft 134 are located on opposite sides of the turntable body 1132 from the turntable rotating shaft 132. The clamp member rotation shaft 133 and the clamp member rotation shaft 134 may be located at opposite ends of the turntable body 1132, for example. It should be noted that only one of the clamping member rotating shaft 133 and the clamping member rotating shaft 134 may be provided, or more rotating shafts may be provided, which is not limited in the present application.

As shown in fig. 4 and 8, the number of the holding members is, for example, two, including a holding member 121 and a holding member 122. The clamp 121 and the clamp 122 have, for example, the same structure. The rotating hole 1211 of the clamping member 121 is sleeved on the clamping member rotating shaft 133, and the same rotating hole of the clamping member 122 and the clamping member rotating shaft 134 form a double-clamping member structure, so as to improve the clamping force of the clamping device 10 and the clamping effect on the wafer to be tested. The clamp is provided on the turntable 13, for example. The clamping member is used for clamping the wafer to be tested carried on the carrying device 30. The number of the clamping pieces can be one or more, and the application is not limited to this. The clamping piece is provided with a rotating hole, and the rotating hole is sleeved on the rotating shaft of the clamping piece, so that the clamping piece can rotate relative to the rotating table 13.

Further, as shown in fig. 7, the opposite ends of the turn table 13 are also provided with mounting

holes

135 and 136. Accordingly, as shown in fig. 4, the number of the limiting members is, for example, two, and the limiting members include a limiting member 123 and a limiting member 124 for limiting the angle of the clamping member relative to the wafer to be measured. The

stoppers

123 and 124 have the same structure. Specifically, as shown in fig. 9, the limiting member 123 includes, for example, a through hole 1231, and the limiting member 123 is mounted 135 on the turntable 13 and abuts against the clamping member 121 through the through hole 1231 and the mounting hole. The limiting member 124 is also provided with a through hole, and the limiting member 124 is mounted on the rotary table 13 and abuts against the clamping member 122 through the through hole and the mounting hole 136. In this way, the position of the clamping member 121 and the clamping member 122 can be limited by the limiting member 123 and the limiting member 124, so as to form a double-limiting structure. More specifically, as shown in fig. 8, a limiting side 1212 is further disposed on the clamping member 121. As shown in fig. 9, the limiting member 123 is provided with a limiting groove 1232, and the limiting side surface 1212 is engaged with the limiting groove 1232. Similarly, the clamping member 122 is also provided with a limiting side surface; a limiting groove is formed in the limiting member 124, and a limiting side surface of the clamping member 122 is clamped in the limiting groove of the limiting member 124. The quantity of the limiting parts is consistent with that of the clamping parts. When the clamping piece is one, the limiting piece can be one; when the holder is 2, the locating part also can be 2, the utility model discloses not use this as the limit.

In addition, as shown in fig. 4, the base 11 may further include a spring plate 114, a fixing member 115, and a distance adjusting plate 116. The spring piece 114 is connected to the distance adjustment plate 116, for example, through the fixing member 115, and the distance adjustment plate 116 is connected to the fixing member 1132.

Specifically, as shown in fig. 5, the fixing seat 1132 is further provided with two connecting holes 1133. Of course, the number of the connecting holes 1133 may be 3 or more.

As shown in fig. 5 and 10, two connecting posts 1161 are provided on the distance adjustment plate 116. Of course, the number of the connecting posts 1161 can be 3 or more, which is the same as the number of the connecting holes 1133 on the fixing base 1132. The connecting rod 1161 of the distance adjusting plate 116 is inserted into the connecting hole 1133 of the fixing base 1132, and is connected to the fixing base 1132 through a threaded connection member such as a nut.

In addition, two spring piece mounting holes 1162 are provided on the distance adjusting plate 116. The number of the spring plate mounting holes 1162 may be 3 or more, for example.

As shown in fig. 5, 11 and 12, the elastic sheet 114 is, for example, an elastic sheet member. Specifically, the elastic piece 114 includes, for example, a connection end 1141, a connection end 1142, and a bent section 1143. Curved section 1143 is connected between connecting band 1141 and connecting end 1142. The curved section 1143 is, for example, an arc-shaped curved section. The curved section 1143 is formed with a concave arcuate sheet-like curved structure. In addition, connecting end 1141 is further provided with adjusting hole 11411, and connecting end 1142 is further provided with adjusting hole 11421. Wherein adjustment holes 11411 and 11421 may be, for example, oblong holes. The length directions of the adjustment holes 11411 and 11421 are the same. The fixing member 115 is, for example, a threaded connection member such as a bolt or a screw. One fixing element 115 is arranged in the adjusting hole 11411 and connected to one spring sheet mounting hole 1162 on the distance adjusting plate 116, and the other fixing element 115 is arranged in the adjusting hole 11421 and connected to one spring sheet mounting hole 1162 on the distance adjusting plate 116, so that the spring sheet 114 is connected to the distance adjusting plate 116 through the fixing element 115. Meanwhile, the curved section 1143 of the elastic sheet 114 is located on a side of the connecting band 1141 away from the distance adjusting plate 116, that is, the curved section 1143 protrudes and extends towards a side away from the distance adjusting plate 116, that is, the curved section 1143 extends towards the carrying device 30. In this way, when the elastic sheet 114 is not pressed by the carrying device 30, the two fixing members 115 respectively abut against the two adjusting holes 11411 of the elastic sheet 114 and the inner side walls of the adjusting holes 11421; when the elastic sheet 114 is pressed by the carrier 30, the two fixing members 115 are respectively abutted against the two adjusting holes 111411 of the elastic sheet 114 and the opposite outer side walls of the adjusting holes 11421, so that the clamping force of the wafer clamping device can be adjusted by the elastic sheet.

As shown in fig. 5, the fixing seat 1132 of the fixing table 113 is further provided with an adjustable distance hole 1134. The base 11 also includes, for example, a push rod 117. The pushing rod 117 is inserted into the distance adjusting hole 1134 of the fixing seat 1132, and abuts against one side of the distance adjusting plate 116 far away from the elastic sheet 114. The user can push the distance between the distance adjusting plate 116 and the fixing seat 1132 by the pushing rod 117, so as to adjust the distance between the elastic sheet 114 and the carrying device 30. The number of the distance-adjusting holes 1134 is, for example, 2, and the number of the distance-adjusting holes 1134 may also be 2.

Of course, in other embodiments of the present application, the base 11 may not be provided with the distance adjustment plate 116 and the pushing rod 117, and the elastic sheet 114 and the fixing member 115 may be directly connected to the fixing seat 1132. In addition, the base 11 may not be provided with the pushing rod 117, but the elastic sheet 114 and the fixing member 115 are directly connected to the distance adjustment plate 116, and the distance between the elastic sheet 114 and the carrying device 30 may be adjusted by replacing the distance adjustment plate 116 with different thicknesses.

To sum up, the embodiment of the utility model provides a through setting up two holders, can promote the clamping-holding power that adds of holder to can promote the centre gripping effect of holder to the wafer that awaits measuring. In addition, the limiting part is arranged on the clamping part to limit the angle of the clamping part, so that the problem that the angle of the clamping part is not aligned when the clamping part clamps the wafer in the prior art is solved, and the efficiency of the wafer clamping device is improved. In addition, the elastic piece such as the elastic sheet is arranged on the fixed seat, so that the clamping force of the wafer clamping device can be adjusted through the elastic sheet. Moreover, the distance between the elastic piece and the bearing device can be adjusted by arranging the distance adjusting plate and the push rod.

It can be understood that the foregoing embodiments are merely exemplary illustrations of the present invention, and the technical solutions of the embodiments can be arbitrarily combined and collocated for use on the premise that the technical features are not conflicted, the structure is not contradictory, and the purpose of the present invention is not violated.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims

1. A wafer clamping device, comprising:

a base;

the rotary table comprises a rotary table main body, a first clamping piece rotating shaft and a second clamping piece rotating shaft; the turntable main body is connected to the base; the first clamping piece rotating shaft and the second clamping piece rotating shaft are respectively connected to two opposite ends of a first side face, far away from the base, of the turntable main body;

the first clamping piece is provided with a first rotating hole, and the first rotating hole is sleeved on the rotating shaft of the first clamping piece and can rotate relative to the rotating table; and

and the second clamping piece is provided with a second rotating hole, and the second rotating hole is sleeved on the rotating shaft of the second clamping piece and can rotate relative to the rotating table.

2. The wafer clamping device of claim 1, wherein the base is provided with a turntable attachment hole; the second side surface of the turntable main body, which is adjacent to the base, is provided with a turntable rotating shaft, and the turntable rotating shaft is sleeved in the turntable connecting hole and can rotate around the center of the turntable connecting hole relative to the base.

3. The wafer holding apparatus of claim 1, wherein the pedestal comprises:

a base station;

a displacement table connected to the base table; and

the fixed station is connected to the displacement table and is provided with a fixed seat, the fixed seat is provided with a rotary table, the fixed station can reciprocate relative to the base station under the driving of the displacement table, and the rotary table main body is arranged on the fixed seat.

4. The wafer holding apparatus of claim 3, wherein the displacement stage comprises:

the positioning base is arranged on the base platform;

the pneumatic assembly is connected to the positioning base; and

and the moving seat is connected to the positioning base and can drive the fixed table to reciprocate relative to the positioning base under the driving of the pneumatic assembly.

5. The wafer clamping apparatus of claim 3, wherein the wafer clamping apparatus further comprises:

the middle part of the elastic sheet is provided with an arc-shaped bending structure, two ends of the elastic sheet are respectively provided with an adjusting hole, and the arc-shaped bending structure protrudes and extends towards the direction far away from the fixed seat; and

the fixing part is arranged in the adjusting hole in a penetrating mode and is connected to the fixing seat.

6. The wafer clamping device of claim 5, wherein the base further comprises a distance adjusting plate, and the spring plate is connected to the fixed seat through the fixing member and the distance adjusting plate.

7. The wafer clamping device as claimed in claim 6, wherein the fixing base is provided with a connecting hole, the distance adjusting plate is provided with a connecting column, the connecting column penetrates through the connecting hole and is connected with the fixing base, and the fixing member penetrates through the adjusting hole of the elastic sheet and is connected with the distance adjusting plate.

8. The wafer clamping device of claim 6 wherein the mounting base has mounting holes; the wafer clamping device further comprises a pushing rod, wherein the pushing rod penetrates through the mounting hole and abuts against one side, far away from the elastic sheet, of the distance adjusting plate.

9. The wafer holding device as claimed in claim 3, wherein the base platform is provided with a slide bar for sliding connection with a slide rail on a carrying device for carrying a wafer to be tested.

10. A carrying device is characterized by comprising

A carrying device; and

the wafer holding device as claimed in any one of claims 1 to 9, connected to an edge of the carrier device to hold a wafer to be tested carried by the carrier device.