CN217600917U

CN217600917U - Furnace mouth double-sealing device of boron diffusion furnace

Info

Publication number: CN217600917U
Application number: CN202220736594.2U
Authority: CN
Inventors: 陈骏; 赵增超; 李明; 黄嘉斌; 谢湘洲; 周小荣; 刘湘祁; 申凯琳
Original assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Current assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Priority date: 2022-03-31
Filing date: 2022-03-31
Publication date: 2022-10-18
Anticipated expiration: 2032-03-31

Abstract

The utility model discloses a fire door double seal device of boron diffusion furnace, include: a furnace door, a furnace tube and a quartz ring; the furnace tube is of a tubular structure with an opening at one end, the periphery of the opening end of the furnace tube is hermetically connected with the inner side of the quartz ring, and the furnace tube and the quartz ring form an integrated structure; the outer contour of the quartz ring is stepped, the inner side of the furnace door is concave, the inner side of the furnace door is provided with a double-layer sealing structure, and the quartz ring is connected with the furnace door in an embedded mode so as to achieve sealing of a furnace mouth of the boron diffusion furnace. The utility model discloses a fire door double sealing device has compact structure, installs advantages such as convenient, sealed effect is showing and sealing washer long service life, has improved the sealing reliability in the reacting chamber, has reduced the cost of equipment operation and maintenance.

Description

Furnace mouth double-sealing device of boron diffusion furnace

Technical Field

The utility model belongs to the technical field of solar cell and semiconductor equip, concretely relates to fire door double sealing device of boron diffusion furnace.

Background

Solar battery power generation is an environment-friendly power generation mode, and a high-efficiency battery is always a target pursued by the photovoltaic industry. In recent years, high-efficiency battery technology has been developed from BSF batteries to Perc batteries to current N-type Topcon batteries. With the technological innovation, the traditional P-type silicon wafer substrate phosphorus diffused junction is gradually changed into an N-type silicon wafer substrate boron diffused junction. Along with the maturity of boron diffusion technology and the expansion of market, the high-temperature characteristic of the boron diffusion technology also brings many problems, and the bearing capacity of the sealing ring of the high-temperature furnace mouth is the first time.

In the furnace mouth sealing device in the prior art, the pipe orifice of the quartz tube is in a straight cylindrical structure, the furnace door is in a flat panel structure, most of the quartz tube and the quartz tube are extruded by a single-layer sealing ring on the furnace door, the sealing purpose is achieved by the self deformation of the sealing ring, and the sealing requirement under the high-temperature condition cannot be met, so that the sealing property of the furnace mouth of the diffusion furnace is very necessary to be enhanced.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to overcome the not enough of prior art, provide a compact structure, install convenient, sealed effect is showing and sealing washer long service life's fire door double sealing device of boron diffusion furnace.

In order to solve the technical problem, the utility model discloses a following technical scheme:

a fire hole double-sealing device of a boron diffusion furnace comprises: a furnace door, a furnace tube and a quartz ring; the furnace tube is of a tubular structure with an opening at one end, the periphery of the opening end of the furnace tube is connected with the inner side of the quartz ring, and the furnace tube and the quartz ring form an integral structure; the outer contour of the quartz ring is stepped, the inner side of the furnace door is concave, the inner side of the furnace door is provided with a double-layer sealing structure, and the quartz ring is connected with the furnace door in a nested manner so as to realize the furnace mouth sealing of the boron diffusion furnace.

As a further improvement, the inside annular cooling cavity that is equipped with the echelonment of quartz ring, the quartz ring lateral part is equipped with the coolant access & exit, and the coolant access & exit and cooling cavity intercommunication let in the coolant by the coolant access & exit to cooling cavity for realize the fire door cooling of boron diffusion furnace.

As a further improvement of the utility model, the cooling medium access & exit includes cooling medium entry and cooling medium export, be equipped with the water conservancy diversion piece in the cooling cavity, the water conservancy diversion piece is located between cooling medium entry and the cooling medium export.

As a further improvement of the utility model, the cooling cavity is filled with a gas medium or a liquid medium for cooling.

As a further improvement of the utility model, the double-deck seal structure includes the sealing washer, the sealing washer includes external seal circle and interior sealing washer.

As a further improvement of the utility model, the outer sealing ring and the inner sealing ring are offset with the stepped outer wall of the quartz ring to realize the sealing of the furnace mouth.

As a further improvement of the utility model, the outer sealing ring and the inner sealing ring are both made of rubber or silica gel or polytetrafluoroethylene material.

As a further improvement, the oven door is provided with a first groove and a second groove, the first groove is used for the fixed mounting outer sealing ring, and the second groove is used for the fixed mounting inner sealing ring.

As a further improvement of the present invention, the first groove and the second groove are both of an annular structure.

As a further improvement of the utility model, the periphery of the opening end of the furnace tube is welded with the inner side of the quartz ring, or the quartz ring and the furnace tube are integrally formed.

Compared with the prior art, the utility model has the advantages of:

the utility model discloses fire door double sealing device of boron diffusion furnace is through linking into an organic whole boiler tube and quartz ring to set up the outline of quartz ring into the ladder shape, and the inboard corresponding setting of furnace gate is then to the spill structure, has set up double-deck sealing washer in the furnace gate inboard simultaneously, with quartz ring and furnace gate nested connection, makes quartz ring butt on the double-deck sealing washer of furnace gate, has realized that the fire door of boron diffusion furnace is sealed promptly, and simple structure is reliable, and sealed effect is showing. Furthermore, a stepped annular cooling cavity is arranged inside the quartz ring, and a gas medium or a liquid medium is introduced into the cooling cavity for cooling, so that the cooling of the contact area of the quartz ring and the furnace door double-layer sealing ring is realized, the double-layer sealing ring is prevented from being aged or damaged in a high-temperature process, and the service life of the sealing ring is effectively prolonged; meanwhile, the guide ring is arranged in the cooling cavity, so that the guide of the cooling medium along the cooling cavity is ensured, the contact area of the sealing ring and the furnace tube is cooled to the maximum extent, the cooling effect is obviously improved, the sealing performance of the double-layer sealing ring is effectively improved, the sealing reliability in the boron diffusion furnace is ensured, and the operation and maintenance cost of the equipment is reduced. The utility model discloses a fire door double sealing device can be applicable to well in the boron diffusion high temperature technology more than 1000 ℃ to have excellent sealing performance and longer life.

Drawings

Fig. 1 is one of the structural principle schematic diagrams of the furnace mouth double sealing device of the boron diffusion furnace of the present invention.

Fig. 2 is a second schematic structural diagram of a dual sealing device for a furnace mouth of a boron diffusion furnace according to the present invention.

Fig. 3 is a schematic view of the structural principle of the middle furnace door of the present invention.

Fig. 4 is a schematic cross-sectional structure at a dotted line a in fig. 2.

Fig. 5 is a schematic cross-sectional structure at the broken line B in fig. 2.

Fig. 6 is a schematic cross-sectional structure at the dotted line C in fig. 2.

Illustration of the drawings: 1. a furnace door; 11. the outer side of the furnace door; 12. the inner side of the furnace door; 13. a first groove; 14. a second groove; 2. a furnace tube; 21. a furnace tube wall; 22. an inner cavity of the furnace tube; 3. a quartz ring; 31. the outer wall of the quartz ring; 32. cooling the cavity; 4. a seal ring; 41. an outer sealing ring; 42. an inner seal ring; 5. a cooling medium inlet and outlet; 51. a cooling medium inlet; 52. a cooling medium outlet; 6. and a flow guide block.

Detailed Description

The invention will be further described with reference to the drawings and specific preferred embodiments without limiting the scope of the invention.

Examples

As shown in fig. 1 to 6, the dual sealing device for the furnace mouth of the boron diffusion furnace of the present invention comprises: a furnace door 1, a furnace tube 2 and a quartz ring 3; the furnace tube 2 is of a tubular structure with an opening at one end, the periphery of the opening end of the furnace tube 2 is connected with the inner side of the quartz ring 3, and the furnace tube 2 and the quartz ring 3 form an integral structure; the outer contour of the quartz ring 3 is in a step shape, the inner side of the furnace door 1 is in a concave shape, the inner side of the furnace door 1 is provided with a double-layer sealing structure, and the quartz ring 3 is connected with the furnace door 1 in a nested manner so as to realize the furnace mouth sealing of the boron diffusion furnace. In the embodiment, the stepped quartz ring 3 is embedded with the concave furnace door 1, so that the sealing connection of the furnace mouth of the boron diffusion furnace is realized, and the double-layer sealing structure has more excellent sealing performance, can better meet the sealing requirement inside the boron diffusion furnace, and is favorable for improving the production efficiency of the battery piece. It can be understood that the quartz has the characteristics of stable physicochemical properties and no reaction with process gases used in the passivation process of the battery piece, namely the quartz ring 3 has the characteristics of stable structure, low loss, long service life and the like, and is beneficial to reducing the production cost.

Further, the outer periphery of the opening end of the furnace tube 2 is welded with the inner side of the quartz ring 3, or the quartz ring 3 and the furnace tube 2 are integrally formed. In this embodiment, the quartz ring 3 and the furnace tube 2 are integrally connected, and have the characteristics of simple structure, stable connection, excellent airtightness, and the like. It is understood that in other embodiments, the quartz ring 3 may be welded to the outer periphery of the open end of the furnace tube 2 to ensure the connection between the two. The connection stability of the quartz ring 3 and the furnace tube 2 is enhanced by welding. Meanwhile, in order to ensure the air tightness between the quartz ring 3 and the furnace tube 2, seamless welding can be adopted.

As shown in fig. 1, in this embodiment, a stepped annular cooling cavity 32 is provided inside the quartz ring 3, a cooling medium inlet and outlet 5 is provided at a side portion of the quartz ring 3, the cooling medium inlet and outlet 5 is communicated with the cooling cavity 32, and a cooling medium is introduced into the cooling cavity 32 through the cooling medium inlet and outlet 5, so as to lower the temperature of the furnace mouth of the boron diffusion furnace. One side of the furnace door 1 close to the furnace tube 2 is cooled by the quartz ring 3, so that the temperature of the double-layer sealing structure close to the region of the furnace tube 2 can be effectively reduced, and the service life of the double-layer sealing structure is prolonged.

Further, in this embodiment, a gas medium or a liquid medium, such as cooling water, cold air, or nitrogen, may be introduced into the cooling cavity 32 for cooling.

As shown in fig. 4, in the present embodiment, the cooling medium inlet and outlet 5 includes a cooling medium inlet 51 and a cooling medium outlet 52, a flow guide block 6 is disposed in the cooling cavity 32, and the flow guide block 6 is located between the cooling medium inlet 51 and the cooling medium outlet 52.

As shown in fig. 4, in the present embodiment, the cooling medium inlet 51 and the cooling medium outlet 52 are close to each other, and in order to make the flow of the cooling medium in the cooling cavity 32 directional, a solid deflector 6 is provided inside the cooling cavity 32, and the deflector 6 is located between the cooling medium inlet 51 and the cooling medium outlet 52. By arranging the flow guide block 6, the cooling medium can flow in the direction departing from the flow guide block 6 after entering the cooling cavity 32 from the cooling medium inlet 51, and effectively flows through the whole cooling cavity 32 and then flows out from the cooling medium outlet 52, so that the utilization efficiency of the cooling medium is improved.

In this embodiment, the double-layer sealing structure includes a sealing ring 4, and the sealing ring 4 includes an outer sealing ring 41 and an inner sealing ring 42. The outer sealing ring 41 and the inner sealing ring 42 are abutted against the stepped outer wall of the quartz ring 3 to realize double-layer sealing of the furnace mouth. Further, the outer sealing ring 41 and the inner sealing ring 42 are both made of rubber, silica gel or polytetrafluoroethylene.

As shown in fig. 3, in this embodiment, a first groove 13 and a second groove 14 are provided on the oven door 1, and both the first groove 13 and the second groove 14 are annular groove structures, the first groove 13 is used for fixedly mounting the outer sealing ring 41, and the second groove 14 is used for fixedly mounting the inner sealing ring 42. Further, the first groove 13 and the second groove 14 can be embedded with sealing rings with different diameters, so as to meet the sealing installation requirements of furnace tubes 2 with different diameters.

In order to more intuitively see the structure of the dual sealing device for the fire door of the present embodiment, fig. 4, 5 and 6 respectively show the schematic structural cross-sectional views along three dotted lines a, B and C in fig. 2. As shown in fig. 4, when a cross section is taken from a direction indicated by a dotted line a in fig. 2, it can be seen that the cooling cavity 32 surrounds the outside of the furnace tube wall 21, the cooling medium inlet 51 and the cooling medium outlet 52 penetrate through the quartz ring outer wall 31 to communicate with the cooling cavity 32, the deflector ring 6 is arranged in the cooling cavity 32, the deflector ring 6 is located between the cooling medium inlet 51 and the cooling medium outlet 52, and the furnace tube inner cavity 22 is located at the innermost layer of the apparatus.

As shown in fig. 5, when a cross section is taken from a direction shown by a dotted line B in fig. 2, it can be seen that the outer sealing ring 41 is arranged between the outside 11 and the inside 12 of the furnace door, the quartz ring outer wall 31 at the end of the quartz ring 3 is located at the inside of the inside 12 of the furnace door, the cooling cavity 32 surrounds the outside of the furnace tube wall 21, the deflector ring 6 is arranged in the cooling cavity 32, and the furnace tube inner cavity 22 is located at the innermost layer of the device. After the furnace mouth double-sealing device is installed, the steps on the side part of the quartz ring 3 are abutted against the outer sealing ring 41.

As shown in fig. 6, when viewed in cross-section from the direction indicated by the broken line C in fig. 2, the annular inner seal 42 disposed at the innermost side of the oven door 1 can be seen. After the double sealing device at the furnace mouth is installed, the step at the end part of the quartz ring 3 is abutted against the inner sealing ring 42.

In the embodiment, the furnace tube 2 and the quartz ring 3 are connected into a whole, the outer contour of the quartz ring 3 is set into a step shape, the inner side of the furnace door 1 is correspondingly set into a concave structure, meanwhile, the double-layer sealing ring is arranged on the inner side of the furnace door, and the quartz ring 3 is connected with the furnace door 1 in a nested manner, so that the quartz ring 3 is abutted against the double-layer sealing ring of the furnace door 1, the furnace mouth sealing of the boron diffusion furnace is realized, the structure is simple and reliable, and the sealing effect is obvious. Furthermore, a stepped annular cooling cavity 32 is arranged in the quartz ring 3, and a gas medium or a liquid medium is introduced into the cooling cavity 32 for cooling, so that the cooling of the contact area of the quartz ring 3 and the double-layer sealing ring of the furnace door is realized, the aging or damage of the double-layer sealing ring in a high-temperature process is avoided, and the service life of the sealing ring is effectively prolonged; meanwhile, the guide ring 6 is arranged in the cooling cavity 32, so that the guide of the cooling medium along the cooling cavity 32 is ensured, the contact area of the sealing ring and the furnace tube 2 is cooled to the maximum extent, the cooling effect is obviously improved, the sealing performance of the double-layer sealing ring is effectively improved, the sealing reliability in the boron diffusion furnace is ensured, and the operation and maintenance cost of the equipment is reduced. The furnace mouth double-sealing device of the embodiment can be well suitable for the boron diffusion high-temperature process with the temperature of more than 1000 ℃, and has excellent sealing performance and long service life.

Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the invention. Those skilled in the art can make numerous changes and modifications to the disclosed embodiments, or modify equivalent embodiments, without departing from the spirit and scope of the invention, using the methods and techniques disclosed above. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments by the technical entity of the present invention all still belong to the protection scope of the technical solution of the present invention.

Claims

1. The utility model provides a fire door double seal device of boron diffusion furnace which characterized in that includes: the furnace comprises a furnace door (1), a furnace tube (2) and a quartz ring (3); the furnace tube (2) is of a tubular structure with an opening at one end, the periphery of the opening end of the furnace tube (2) is connected with the inner side of the quartz ring (3), and the furnace tube (2) and the quartz ring (3) form an integral structure; the outer contour of the quartz ring (3) is in a step shape, the inner side of the furnace door (1) is in a concave shape, the inner side of the furnace door (1) is provided with a double-layer sealing structure, and the quartz ring (3) is connected with the furnace door (1) in a nested manner so as to realize the sealing of a furnace mouth of the boron diffusion furnace.

2. The dual sealing device for the furnace mouth of the boron diffusion furnace according to claim 1, wherein a stepped annular cooling cavity (32) is arranged inside the quartz ring (3), a cooling medium inlet and outlet (5) is arranged on the side of the quartz ring (3), the cooling medium inlet and outlet (5) is communicated with the cooling cavity (32), and a cooling medium is introduced into the cooling cavity (32) from the cooling medium inlet and outlet (5) for cooling the furnace mouth of the boron diffusion furnace.

3. The dual sealing device for the fire hole of the boron diffusion furnace according to claim 2, wherein the cooling medium inlet and outlet (5) comprises a cooling medium inlet (51) and a cooling medium outlet (52), a flow guide block (6) is arranged in the cooling cavity (32), and the flow guide block (6) is located between the cooling medium inlet (51) and the cooling medium outlet (52).

4. The dual sealing device for the fire hole of the boron diffusion furnace according to claim 2, wherein a gas medium or a liquid medium is introduced into the cooling chamber (32) for cooling.

5. The dual sealing device for the fire door of a boron diffusion furnace according to claim 1, wherein the dual sealing structure comprises a sealing ring (4), and the sealing ring (4) comprises an outer sealing ring (41) and an inner sealing ring (42).

6. The dual sealing device for the fire hole of the boron diffusion furnace according to claim 5, wherein the outer sealing ring (41) and the inner sealing ring (42) are abutted against the stepped outer wall of the quartz ring (3) to achieve the fire hole sealing.

7. The dual sealing device for the fire hole of the boron diffusion furnace according to claim 5, wherein the outer sealing ring (41) and the inner sealing ring (42) are made of rubber, silica gel or polytetrafluoroethylene.

8. The dual sealing device for the fire door of the boron diffusion furnace according to claim 5, wherein the fire door (1) is provided with a first groove (13) and a second groove (14), the first groove (13) is used for fixedly mounting the outer sealing ring (41), and the second groove (14) is used for fixedly mounting the inner sealing ring (42).

9. The dual sealing device for the fire door of a boron diffusion furnace according to claim 8, wherein the first groove (13) and the second groove (14) are both of an annular structure.

10. The dual sealing device for the fire hole of the boron diffusion furnace according to any one of claims 1 to 9, wherein the quartz ring (3) is integrally formed with the furnace tube (2), or the outer circumference of the open end of the furnace tube (2) is welded to the inner side of the quartz ring (3).