CN217586250U - Infrared laser beam quality measuring device - Google Patents
Infrared laser beam quality measuring device Download PDFInfo
- Publication number
- CN217586250U CN217586250U CN202220960317.XU CN202220960317U CN217586250U CN 217586250 U CN217586250 U CN 217586250U CN 202220960317 U CN202220960317 U CN 202220960317U CN 217586250 U CN217586250 U CN 217586250U
- Authority
- CN
- China
- Prior art keywords
- infrared
- laser beam
- infrared laser
- thick film
- beam quality
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The utility model discloses an infrared laser beam quality measuring device, which comprises a CMOS/CCD camera, an imaging lens, a spectroscope and an infrared up-conversion thick film material; the CMOS/CCD camera, the imaging lens, the spectroscope and the infrared up-conversion thick film material are sequentially arranged. The utility model converts the light spot of the infrared laser which can not be detected by the CMOS/CCD camera into the light spot which can be detected by the CMOS/CCD camera, and utilizes the CMOS/CCD camera to collect the light spot, thereby realizing the low-cost and reliable laser spot imaging, realizing the measurement of the light beam quality of the infrared laser which can not be detected by the CMOS/CCD camera, and being easy to be widely popularized in industrial application; furthermore, the reliability of measurement is better improved, and the measurement efficiency is improved.
Description
Technical Field
The utility model relates to an infrared laser beam quality measurement device belongs to infrared laser beam quality measurement technical field.
Background
Fig. 1 is a spectral representation of the optical response of a conventional CMOS camera, which has a cutoff wavelength in the long-wavelength direction of slightly more than 1000nm (the cutoff position of the optical response is set at 20%); the light response wavelength of the common CCD camera is slightly longer than that of the CMOS in the long-wave direction, but only extends to be slightly less than 1100nm; for lasers with wavelengths longer than 1000nm (for CMOS cameras) or 1080nm (for CCD cameras), the commonly used silicon-based digital cameras cannot detect them.
As shown in fig. 2, wavelengths of common M: YAG (M represents various doped metals) laser are all larger than 1064nm, and most of the mid-infrared laser, even the infrared CO2 laser with a long wavelength of 10.6um, which is very active in recent years, exceeds the optical response band of the silicon-based CMOS/CCD camera, and thus a digitized image cannot be obtained. The inability to obtain a digitized image of the laser beam makes it impossible to quantitatively measure the quality of the laser beam, which is a technical problem to be solved.
Aiming at the technical problems, an InGaAs-based near-infrared camera can be adopted to obtain a short-wave infrared laser spot image at present, the intrinsic spectral response of the InGaAs-based near-infrared camera can cover a 1.7um wave band, and the extensibility of the InGaAs-based near-infrared camera can even cover 2.5um; the image acquisition of the laser spot in the middle infrared band can utilize InSb-based and MCT-based middle infrared cameras (3 um-5 um) to acquire the image of the laser spot; for spot detection of a long-wavelength laser of 10.6um such as CO2, a silicon-based microbolometer (microbolometer) long-wavelength camera may be used to acquire an image of a laser beam. However, the short wave infrared, medium wave infrared and long wave infrared cameras are very expensive, and the scale and resolution of the area array are far inferior to those of silicon-based CMOS cameras, which is difficult to be widely popularized in industrial applications.
SUMMERY OF THE UTILITY MODEL
The utility model provides an infrared laser beam quality measurement device has realized low-cost, reliable laser facula formation of image, easily extensively promotes in industrial application.
In order to solve the technical problem, the utility model discloses the technical scheme who adopts as follows:
the infrared laser beam quality measuring method includes directly or focally irradiating infrared laser onto infrared upconversion thick film material, converting the light spot of the infrared laser incapable of being detected by CMOS/CCD camera into light spot capable of being detected by CMOS/CCD camera, collecting the light spot on the infrared upconversion thick film material by the CMOS/CCD camera, and quantitatively analyzing various parameters of the light spot to realize quantitative measurement and evaluation of infrared laser beam quality.
The method adopts a relatively cheap CMOS/CCD camera to realize the acquisition of the infrared laser spot image, and has low cost and high reliability.
The parameters of the light spots correspond to the parameters of the laser beams one by one, and the quality of the laser beams can be obtained by analyzing the light spots. And (4) carrying out quantitative analysis on various parameters of the light spots by directly referring to the prior art.
The infrared laser which cannot be detected by the CMOS/CCD camera comprises invisible infrared laser.
The thickness of the infrared upconversion thick film material is not less than 0.01mm. The infrared up-conversion thick film material directly adopts the existing material, and the composition of the material itself is not particularly improved in the application, so that the material is not repeated.
At generally low laser power densities, the nonlinear effects can be neglected. The brightness of any point of the light spot on the infrared upconversion thick film material can be considered to be in direct proportion to the light intensity of the infrared laser, and the light spot on the infrared upconversion thick film material can reflect the light intensity distribution of the infrared laser without distortion. That is, the quality of the laser can be analyzed by studying the brightness distribution of the spot.
An infrared laser beam quality measuring device comprises a CMOS/CCD camera, an imaging lens, a spectroscope and an infrared up-conversion thick film material; the CMOS/CCD camera, the imaging lens, the spectroscope and the infrared upconversion thick film material are sequentially arranged;
or the infrared laser beam quality measuring device comprises a focusing lens, a CMOS/CCD camera, an imaging lens, a spectroscope and an infrared upconversion thick film material; the CMOS/CCD camera, the imaging lens, the spectroscope and the infrared upconversion thick film material are sequentially arranged; the focusing mirror is arranged on one side of the spectroscope.
The method for measuring the quality of the infrared laser beam by using the infrared laser beam quality measuring device comprises the following steps:
1) An infrared laser beam emitted by an infrared laser is focused directly or through a focusing mirror, and then is refracted through a spectroscope to be reflected to an infrared upconversion thick film material to form a light spot;
2) Light spots on the infrared upconversion thick film material are reflected, sequentially pass through the spectroscope and the imaging lens, and are imaged on the surface of a photosensitive sensor of the CMOS/CCD camera to obtain a digital image (an image of the light spots), and parameters of the obtained image are quantitatively analyzed to realize quantitative measurement and evaluation of the quality of the infrared laser beam.
Since the infrared upconverting thick film material is an opaque material, an infrared laser and camera need to be arranged on the same side of the upconverting thick film material to acquire an image of the laser spot.
For convenience of detection arrangement, the CMOS/CCD camera, the imaging lens, the spectroscope and the infrared upconversion thick film material are preferably arranged in sequence from top to bottom. At this time, in the step 1), the infrared laser beam emitted by the infrared laser is focused directly or through a focusing mirror, and then the infrared laser beam passes through a spectroscope to refract light reversely, so that an infrared laser spot is imaged on the infrared up-conversion thick film material which is horizontally placed; in the step 2), light spots on the infrared upconversion thick film material are reflected upwards, sequentially pass through the spectroscope and the imaging lens, and are imaged on the surface of a photosensitive sensor of the CMOS/CCD camera to obtain a digital image, and parameters of the obtained image are quantitatively analyzed, so that quantitative measurement and evaluation of the quality of the infrared laser beam are realized.
In order to ensure that the camera can vertically photograph the pattern of the laser spot and thus record the shape and intensity distribution of the laser spot without distortion, the beam splitter is a 45-degree beam splitter.
The 45-degree beam splitter, namely when placed horizontally, the included angle between the splitting surface and the horizontal plane is 45 degrees, and the beam splitter can be a cube-type beam splitter formed by splicing two 45-degree right-angle triangular prisms or a single-chip 45-degree beam splitter.
In order to ensure the fidelity of the light spot recording, the optical axis of the focusing mirror is perpendicular to the optical axis of the imaging lens, and the included angles between the optical axis of the focusing mirror and the optical axis of the imaging lens and the splitting surface of the spectroscope are 45 degrees.
In above-mentioned step 1), because conversion material's energy level structure's complexity on the infrared especially receives the influence that the energy level life-span is longer, utility model people discovers in the experiment: a. stable visible light spots appear on the infrared upconversion material from the instant when the infrared laser hits the infrared upconversion thick film material, and the time is about 1-2 seconds according to the difference of the infrared upconversion thick film material; b. under continuous infrared laser irradiation, about 5 seconds, the optical conversion efficiency of the infrared up-conversion material is seriously attenuated until visible light spots on the infrared up-conversion material are gradually faded, and the dynamic change seriously influences the accuracy of a measurement result; c. after the previous infrared laser irradiation, if the second infrared laser irradiation is performed immediately, the same light spot of the previous experiment cannot be repeated immediately on the infrared upconversion thick film material, that is, between the two experiments, the infrared upconversion material needs enough time to return to the original state, and usually needs about 5 minutes to return.
Therefore, in engineering practice, measures need to be taken to make the obtained spot image consistent in all possible variables. Therefore, the electronic control shutter is arranged on the laser light path and used for controlling the starting time, the closing time and the gap time of the light beam striking the infrared upconversion thick film material. The structure and the principle of the electric control shutter can be directly referred to the prior art, and the structure and the principle are not particularly improved in the application, so that the details are not repeated.
The electric control shutter is arranged at the light inlet end (the end where the laser enters first during measurement) of the infrared laser beam quality measuring device.
If the device is also provided with an electric control shutter and an infrared laser beam quality measurement method, the method comprises the following steps:
1) Opening an electric control shutter, closing a CMOS/CCD camera, enabling an infrared laser beam emitted by an infrared laser to be refracted to an infrared up-conversion thick film material through a spectroscope directly or after being focused by a focusing mirror, forming a light spot, and establishing a relatively stable and complete visible laser light spot through time td, wherein the light spot can maintain the time of tso;
2) Opening the CMOS/CCD camera at the td time after the electric control shutter is opened, closing the CMOS/CCD camera after the CMOS/CCD camera is exposed for tc time, and storing an image;
3) After the time tsc, the step 1-2) is repeated to continue the measurement.
In the step 2), td is 1-2s, td + tc is not more than 5s; in the step 3), tsc is 4-7 minutes.
In the step 2), after the image acquisition is completed, the laser shutter can be closed, the irradiation of the infrared laser to the infrared upconversion thick film is stopped, and the infrared upconversion thick film is recovered to obtain the original state for a period of tsc. And repeating the image acquisition process after the infrared up-conversion thick film is restored to the original state.
Since the infrared upconversion thick film material needs to wait for tsc time after undergoing the previous measurement, the second measurement can be started after the infrared upconversion thick film is restored to the original state, and the efficiency of the device use is low. Therefore, the utility model discloses the people is further, installs a moving platform to infrared upconversion thick film material, after above-mentioned step 2) finishes, moving platform drives infrared upconversion thick film material and removes, makes the facula position of formation of image once more (next time) leave the facula position of formation of image last time (this that just ended), in step 3), need not latency tsc, directly repeats step 1-2) and continues to measure. Namely, after the previous measurement is carried out, as long as the platform is moved, the infrared up-conversion thick film material is moved for a certain distance to reach a new position, the second measurement can be carried out at any time, and the feasibility of the device is greatly improved.
For convenience of control and assembly, the moving platform is an XY moving platform, or a rotating platform, or a combination of the XY moving platform and the rotating platform.
When the moving platform is an XY moving platform, after the step 2) is finished, the XY moving platform drives the infrared up-conversion thick film material to move towards the X direction or the Y direction, so that the light spot position imaged again is separated from the light spot position imaged last time.
When the moving platform is a rotating platform, after the step 2) is finished, the rotating platform drives the infrared up-conversion thick film material to rotate, so that the light spot position imaged again is separated from the light spot position imaged last time.
In order to more uniformly utilize the infrared up-conversion thick film, the moving platform is a combination of an XY moving platform and a rotating platform, the infrared up-conversion thick film material is firstly installed on the rotating platform, and then the rotating platform is installed on the XY moving platform. Therefore, the working point on the infrared up-conversion thick film can move along the radial direction and can also move along the circular arc, and more efficient measurement work is realized.
The CMOS/CCD camera is a CMOS camera or a CCD camera.
The technology not mentioned in the present invention refers to the prior art.
The utility model discloses infrared laser beam quality measurement method can convert the facula of the infrared laser that CMOS/CCD camera can't be surveyed into the facula that CMOS/CCD camera can be surveyed, utilizes CMOS/CCD camera to gather the facula, has realized low cost, reliable laser facula formation of image, has realized the measurement of the beam quality of the infrared laser that CMOS/CCD camera can't be surveyed, easily extensively promotes in industrial application; furthermore, the reliability of measurement is better improved, and the measurement efficiency is improved.
Drawings
FIG. 1 is a spectral response spectrum of a conventional CMOS/CCD camera;
FIG. 2 is a diagram of a wavelength distribution of a conventional laser source;
fig. 3 is a graph showing the effect of a 1550nm laser beam on an infrared upconversion thick film material according to embodiment 1 of the present invention;
fig. 4 is a schematic structural view of an infrared laser beam quality measuring device in embodiment 2 of the present invention;
fig. 5 is a schematic structural view of an infrared laser beam quality measuring device in embodiment 3 of the present invention;
fig. 6 is the sequential logic of the shutter and image acquisition in embodiment 3 of the present invention;
fig. 7 is a schematic structural view of an infrared laser beam quality measuring device in embodiment 4 of the present invention;
fig. 8 is a schematic structural view of an infrared laser beam quality measuring device in embodiment 5 of the present invention;
in the figure, 1 is a focusing lens, 2 is a CMOS/CCD camera, 3 is an imaging lens, 4 is a spectroscope, 5 is an infrared up-conversion thick film material, 6 is an infrared laser, 7 is an electric control shutter, 8 is an XY moving platform, 9 is a rotating platform, and 10 is a light spot.
Detailed Description
For a better understanding of the present invention, the following examples are provided to further illustrate the present invention, but the present invention is not limited to the following examples.
The terms "upper", "lower", "top", "bottom", and the like in the present application are used in the relative orientations and positional relationships shown in the drawings, and should not be construed as limiting the present application.
Example 1
The infrared laser beam quality measuring method includes directly or focally irradiating infrared laser onto infrared upconversion thick film material, converting the light spot of the infrared laser incapable of being detected by CMOS/CCD camera into light spot capable of being detected by CMOS/CCD camera, collecting the light spot on the infrared upconversion thick film material by the CMOS/CCD camera, and quantitatively analyzing various parameters of the light spot to realize quantitative measurement and evaluation of infrared laser beam quality.
The brightness of any point of the light spot on the infrared upconversion thick film material is in direct proportion to the light intensity of the laser, and the light spot on the infrared upconversion thick film material can reflect the light intensity distribution of the infrared laser without distortion.
The method adopts a relatively cheap CMOS/CCD camera to realize the acquisition of the infrared laser spot image, and has low cost and high reliability.
For example, a silicon-based CMOS/CCD camera cannot directly acquire a digitized image of an infrared laser beam of 1550nm, as shown in fig. 3, the laser beam of 1550nm is projected onto an infrared upconversion thick film material, the infrared upconversion thick film material can convert a 1550nm laser spot, which cannot be detected by the CMOS/CCD camera, into a detectable visible spot, then the CMOS/CCD camera is used to collect spots on the infrared upconversion thick film material, and various parameters of the spots are quantitatively analyzed, thereby realizing quantitative measurement and evaluation of the quality of the infrared laser beam.
Example 2
As shown in fig. 4, an infrared laser beam quality measuring device includes a focusing mirror, a CMOS/CCD camera, an imaging lens, a beam splitter and an infrared upconversion thick film material; the CMOS/CCD camera, the imaging lens, the spectroscope and the infrared up-conversion thick film material are sequentially arranged from top to bottom; the focusing mirror is arranged on one side of the spectroscope. In order to ensure that the camera can vertically shoot the pattern of the laser spot so as to record the shape and the intensity distribution of the laser spot without distortion, the spectroscope is a 45-degree spectroscope, and the spectroscope is a cube-type spectroscope formed by splicing two 45-degree right-angled triangular prisms. In order to ensure the fidelity of the light spot recording, the optical axis of the focusing mirror is perpendicular to the optical axis of the imaging lens, and the included angles between the optical axis of the focusing mirror and the optical axis of the imaging lens and the splitting surface of the spectroscope are 45 degrees.
The method for measuring the quality of the infrared laser beam by using the infrared laser beam quality measuring device comprises the following steps:
1) As shown in fig. 4, an infrared laser beam emitted by an infrared laser is focused directly or via a focusing lens, and then passes through a 45-degree beam splitter to reflect light downward, so that an infrared laser spot is imaged on an infrared up-conversion thick film material horizontally placed;
2) Light spots on the infrared up-conversion thick film material are reflected, sequentially pass through the spectroscope and the imaging lens, and are imaged on the surface of a photosensitive sensor of the CMOS/CCD camera to obtain a digital image, and parameters of the obtained image are quantitatively analyzed, so that quantitative measurement and evaluation of the quality of the infrared laser beam are realized.
Example 3
On the basis of the embodiment 2, the following improvements are further made: and an electric control shutter is arranged on a laser light path and used for controlling the starting time, closing time and gap time of the light beam striking the infrared upconversion thick film material. As shown in fig. 5, the electrically controlled shutter is installed at the light inlet end of the infrared laser beam quality measuring device.
The method for measuring the quality of the infrared laser beam by using the infrared laser beam quality measuring device comprises the following steps:
1) Opening an electric control shutter, closing a CMOS/CCD camera, enabling an infrared laser beam emitted by an infrared laser to be refracted to an infrared up-conversion thick film material through a spectroscope directly or after being focused by a focusing mirror, and forming a light spot, wherein a relatively stable and complete visible laser light spot is established through time td and can maintain the time of tso as shown in figure 6;
2) As shown in fig. 6, at the td moment after the electronic control shutter is opened, the CMOS/CCD camera is opened, and after the CMOS/CCD camera is exposed for the tc time, the CMOS/CCD camera is closed, and the image is stored; td is 1-2s, and td + tc is not more than 5s;
3) After a time tsc, the measurement is continued by repeating steps 1-2), and the tsc is about 5 minutes.
Example 4
On the basis of the embodiment 3, the following improvements are further made: as shown in fig. 7, the infrared laser beam quality measuring apparatus further includes an XY moving platform, and the infrared up-conversion thick film material is mounted on the XY moving platform.
The method for measuring the quality of the infrared laser beam by using the infrared laser beam quality measuring device is different from the method in the embodiment 3 as follows: in example 3, since the infrared up-conversion thick film needs to wait for tsc time after undergoing the previous measurement, the second measurement can be started until the infrared up-conversion thick film returns to the original state, and the efficiency of the device usage is low. In this example, the infrared upconversion thick film material is mounted on a moving platform, after step 2) is finished, the XY moving platform drives the infrared upconversion thick film material to move in the X or Y direction, so that the light spot position imaged again is separated from the light spot position imaged last time, and in step 3), the step 1-2) is directly repeated to continue the measurement without waiting for the time tsc.
Example 5
On the basis of the embodiment 3, the following improvements are further made: as shown in fig. 8, the infrared laser beam quality measuring apparatus further includes a rotating platform, and the infrared upconversion thick film material is mounted on the rotating platform.
The method for measuring the quality of the infrared laser beam by using the infrared laser beam quality measuring device is different from the method in the embodiment 3 as follows: after the step 2) is finished, the rotating platform drives the infrared upconversion thick film material to rotate, so that the light spot position imaged again is separated from the light spot position imaged last time, and in the step 3), the step 1-2) is directly repeated to continue measurement without waiting for the time tsc.
Example 6
On the basis of the embodiment 3, the following changes are further made: the infrared laser beam quality measuring device also comprises an XY moving platform and a rotating platform, wherein the infrared up-conversion thick film material is firstly installed on the rotating platform, and then the rotating platform is installed on the XY moving platform. Therefore, the working point on the infrared up-conversion thick film can move along the radial direction and can also move along the circular arc, and more efficient measurement work is realized.
The method for measuring the quality of the infrared laser beam by using the infrared laser beam quality measuring device is different from the method in the embodiment 3 as follows: after the step 2), the XY moving platform and the rotating platform drive the infrared up-conversion thick film material to move, so that the light spot position imaged again is separated from the light spot position imaged last time, and in the step 3), the step 1-2) is directly repeated to continue measurement without waiting for the time tsc.
Claims (10)
1. An infrared laser beam quality measuring device which is characterized in that: comprises a CMOS/CCD camera (2), an imaging lens (3), a spectroscope (4) and an infrared up-conversion thick film material (5); the CMOS/CCD camera (2), the imaging lens (3), the spectroscope (4) and the infrared up-conversion thick film material (5) are arranged in sequence.
2. The infrared laser beam quality measuring apparatus of claim 1, wherein: the device also comprises a focusing mirror (1), wherein the focusing mirror (1) is arranged on one side of the spectroscope (4).
3. The infrared laser beam quality measuring apparatus of claim 2, wherein: the optical axis of the focusing mirror (1) is perpendicular to the optical axis of the imaging lens (3), and included angles between the optical axis of the focusing mirror (1) and the optical axis of the imaging lens (3) and the light splitting surface of the spectroscope (4) are 45 degrees.
4. The infrared laser beam quality measuring apparatus of any one of claims 1 to 3, characterized in that: the spectroscope (4) is a 45-degree spectroscope.
5. The infrared laser beam quality measuring apparatus of any one of claims 1 to 3, characterized in that: and an electric control shutter (7) is arranged on the laser light path and is used for controlling the starting time, the closing time and the gap time of the light beam striking the infrared upconversion thick film material (5).
6. The infrared laser beam quality measuring apparatus according to claim 5, characterized in that: and the electric control shutter (7) is arranged at the light inlet end of the infrared laser beam quality measuring device.
7. The infrared laser beam quality measuring apparatus according to any one of claims 1 to 3, wherein: the infrared up-conversion thick film material (5) is arranged on the mobile platform.
8. The infrared laser beam quality measuring device of claim 7, characterized in that: the moving platform is an XY moving platform (8), or a rotating platform (9), or the combination of the XY moving platform (8) and the rotating platform (9).
9. The infrared laser beam quality measurement device of claim 8, wherein: the moving platform is a combination of an XY moving platform (8) and a rotating platform (9), the infrared up-conversion thick film material (5) is firstly installed on the rotating platform (9), and then the rotating platform (9) is installed on the XY moving platform (8).
10. The infrared laser beam quality measuring apparatus of any one of claims 1 to 3, characterized in that: the CMOS/CCD camera (2), the imaging lens (3), the spectroscope (4) and the infrared up-conversion thick film material (5) are sequentially arranged from top to bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220960317.XU CN217586250U (en) | 2022-04-22 | 2022-04-22 | Infrared laser beam quality measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220960317.XU CN217586250U (en) | 2022-04-22 | 2022-04-22 | Infrared laser beam quality measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217586250U true CN217586250U (en) | 2022-10-14 |
Family
ID=83543474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220960317.XU Active CN217586250U (en) | 2022-04-22 | 2022-04-22 | Infrared laser beam quality measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217586250U (en) |
-
2022
- 2022-04-22 CN CN202220960317.XU patent/CN217586250U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101007724B1 (en) | Laser weld monitor | |
| JP5094719B2 (en) | Hair removal system and method | |
| CN105067568A (en) | Automatic focusing laser-induced breakdown spectroscopy detection system and detection method thereof | |
| CN105807305B (en) | A kind of double-wavelength pulse laser radiation dose rate effect analog system | |
| CN102564611B (en) | High-power laser wave front measuring instrument and wave front measuring method | |
| KR920701799A (en) | Instant Spectroscopy and Apparatus for Intermediate Product Analysis of Molten Metals | |
| CN108941064A (en) | A kind of remote auto laser cleaning system | |
| CN207850928U (en) | A kind of laser induced breakdown spectroscopy detecting system | |
| CN209156612U (en) | A kind of remote auto laser cleaning system | |
| CN111141701A (en) | Rapid super-resolution imaging method and system based on terahertz single pulse | |
| CN102539254B (en) | Digital laser dynamic caustics experiment method and system thereof | |
| CN114858415A (en) | Infrared laser beam quality measuring device and method | |
| CN213275355U (en) | Laser-induced breakdown spectroscopy scanning analyzer | |
| CN105203222A (en) | Device for measuring temperature of flame through one-dimensional scanning on basis of Fresnel lens and CARS | |
| CN114755183A (en) | Ultrafast pumping detection transient absorption imaging system and method based on area array CCD | |
| CN110095416B (en) | Metal molten pool laser absorption rate distribution on-line measuring system and method | |
| CN217586250U (en) | Infrared laser beam quality measuring device | |
| CN108548481A (en) | A kind of measuring system and method for laser spot size | |
| CN104048813A (en) | Method and device for recording laser damage process of optical element | |
| CN112730888B (en) | Flow field speed measurement calibration system of planar laser induced fluorescence method | |
| CN113740316A (en) | Laser focusing point position automatic positioning method and system based on light spot position | |
| CN213275354U (en) | Laser-induced breakdown spectroscopy scanning analyzer | |
| JP3437154B2 (en) | Laser beam measuring device and control device | |
| CN112525952A (en) | Active infrared nondestructive testing device and testing method thereof | |
| CN112595493A (en) | Common target surface measuring device and method for laser damage threshold and nonlinear absorption |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |