CN217544551U - Cavity sealing structure - Google Patents

Abstract

The utility model relates to a semiconductor material makes technical field, provides a cavity seal structure for the material loading chamber, it includes: the object bearing platform is arranged in the feeding cavity; any end of the ejector rod is fixedly connected with one end face of the object bearing table; the driving assembly is fixedly connected with the other end of the ejector rod and used for driving the ejector rod to move up and down; the first telescopic protective sleeve is sleeved on the periphery of the ejector rod and used for isolating the inner space and the outer space of the feeding cavity, and two ends of the first telescopic protective sleeve are respectively in sealing connection with one end face of the object bearing table and one inner wall face of the feeding cavity or are respectively in sealing connection with one outer wall face of the feeding cavity and one end face of the driving assembly; the first telescopic protection sleeve isolates the inner space and the outer space of the feeding cavity, the gap between the sealing ejector rod and the feeding cavity is not required to be sealed by the sealing assembly, and the situations that the sealing assembly is abraded and the surface molecules of the sealing assembly fall off when the object bearing platform is lifted are avoided.

Description

Cavity sealing structure

Technical Field

The utility model belongs to the technical field of semiconductor material makes, in particular to cavity seal structure.

Background

Generally, a horizontal epitaxial growth apparatus includes a loading chamber for storing a wafer and a robot for moving the wafer from the loading chamber to a reaction chamber, and the loading chamber moves the wafer to a wafer pick-up position when the robot performs a loading operation.

In the prior art, a feeding cavity generally adopts contact transmission, and because the epitaxial growth of a semiconductor needs a high-cleanness and well-sealed environment, a gap between a driving assembly and an automatic feeding and discharging cavity needs to be sealed by using sealing assemblies such as a sealing ring and a magnetic fluid sealing device. Use the sealing washer as an example, in order to reach better sealed effect, the pretightning force between sealing washer and the drive assembly is great, and when drive assembly reciprocated, drive assembly motion relative to the sealing washer, can have great frictional force between drive assembly and the sealing washer, and this frictional force not only can cause the top layer molecule of sealing washer to drop and enter the reaction chamber, thereby still can wear and tear the sealing washer and lead to external dust and gas to get into the reaction chamber. The fallen surface molecules and external dust and gas can cause pollution to the wafer, thereby affecting the quality of the epitaxial growth product.

Accordingly, the prior art is in need of improvement and development.

SUMMERY OF THE UTILITY MODEL

An object of this application is to provide a cavity seal structure, need not to set up seal assembly between drive assembly and material loading chamber, the condition that seal assembly wearing and tearing and seal assembly's surface molecule drop when avoiding appearing drive assembly drive and holding the thing platform and go up and down.

The application provides a cavity seal structure for the material loading chamber, it includes:

the object bearing platform is arranged in the feeding cavity;

one end of the ejector rod is fixedly connected with one end face of the object bearing table;

the driving component is fixedly connected with the other end of the ejector rod and is used for driving the ejector rod to move up and down;

the first telescopic protective sleeve is sleeved on the periphery of the ejector rod and used for isolating the inner space and the outer space of the feeding cavity, and two ends of the first telescopic protective sleeve are respectively in sealing connection with one end face of the object bearing platform and the inner wall face of the feeding cavity or are respectively in sealing connection with the outer wall face of the feeding cavity and the end face of the driving assembly.

The application provides a cavity seal structure, first flexible protective sheath cup joints in the ejector pin periphery, the both ends of first flexible protective sheath respectively with above-mentioned material loading platform terminal surface and the first internal face sealing connection in above-mentioned material loading chamber, or respectively with the first outer wall in above-mentioned material loading chamber and a terminal surface sealing connection in above-mentioned drive assembly, can completely cut off the inner space and the exterior space in material loading chamber, consequently need not to use the clearance between sealed ejector pin of seal assembly and the material loading chamber, the condition that the surface molecule that seal assembly wearing and seal assembly drops when avoiding appearing drive assembly and holding the material platform through the ejector pin drive.

Further, the first telescopic protection sleeve is a corrugated pipe.

Further, the push rod is connected to the center of the upper end surface or the center of the lower end surface of the object bearing table.

Further, the driving assembly includes:

the linear module is arranged on the feeding cavity, and the ejector rod is fixedly connected with the sliding block of the linear module;

and the servo motor is connected with the linear module and is used for driving the ejector rod to move up and down through the linear module.

Further, the both ends of above-mentioned first flexible protective sheath respectively with an terminal surface of above-mentioned object platform and the sealed connection of an internal face in above-mentioned material loading chamber, above-mentioned cavity seal structure still includes:

the two ends of the second telescopic protective sleeve are respectively connected with the outer wall surface of the feeding cavity and the top of the sliding block of the linear module.

The utility model provides a cavity seal structure still includes the flexible protective sheath of second, and the both ends of the flexible protective sheath of second are connected with the slider of material loading chamber outer wall and sharp module respectively, further improve cavity seal structure's leakproofness.

Further, the feeding cavity comprises:

a cavity;

the chamber door is hinged with the chamber body.

Furthermore, a sealing assembly is arranged on the cavity or the cavity door and used for sealing the joint of the cavity and the cavity door.

Further, the above-mentioned object bearing table includes:

a base;

the wafer box is arranged on the base and comprises a plurality of wafer carrying platforms used for carrying wafers.

The utility model discloses a cavity seal structure's thing platform of holding includes base and piece dish, and the spool box includes that a plurality of is used for bearing the slide holder of wafer, thereby can once place a plurality of wafers and reduce intensity of labour.

Furthermore, be provided with the spacing post that is used for limiting above-mentioned spool box and places the position on the above-mentioned base.

The utility model discloses a cavity seal structure sets up the spacing post that is used for restricting the spool box and places the position on the base, and the position of placing of spool box can not take place the skew during material loading, avoids appearing because the skew of spool box and leads to the circumstances of material loading failure.

By last, the utility model discloses a cavity seal structure, the inner space and the exterior space in first flexible protective sheath isolated material loading chamber consequently need not to use the clearance between sealed ejector pin of seal assembly and the material loading chamber, the condition that seal assembly wearing and tearing and seal assembly's surface molecule drop when avoiding appearing drive assembly and passing through the ejector pin drive and hold the thing platform and go up and down.

Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.

Drawings

Fig. 1 is a schematic structural diagram of a cavity sealing structure provided in an embodiment of the present application.

Fig. 2 is a schematic structural diagram of another cavity sealing structure provided in an embodiment of the present application.

Fig. 3 is a schematic structural diagram of another cavity sealing structure provided in an embodiment of the present application.

Description of the reference symbols: 1. a feeding cavity; 11. a cavity; 12. a chamber door; 13. a seal assembly; 2. a material bearing platform; 21. a base; 22. a sheet cassette; 23. a slide stage; 3. a top rod; 4. a drive assembly; 41. a linear module; 411. a slider; 412. a linear guide rail; 42. a servo motor; 5. a first telescoping protective sleeve; 6. the second flexible protective sheath.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature "on," "above" and "over" the second feature may include the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The following disclosure provides many different embodiments or examples for implementing different features of the invention. In order to simplify the disclosure of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the present invention. Furthermore, the present invention may repeat reference numerals and/or reference letters in the various examples, which have been repeated for purposes of simplicity and clarity and do not in themselves dictate a relationship between the various embodiments and/or arrangements discussed.

In the prior art, a gap between a driving assembly and an automatic feeding and discharging cavity needs to be sealed by sealing rings, magnetic fluid sealing and the like. Use the sealing washer as an example, in order to reach better sealed effect, the pretightning force between sealing washer and the drive assembly is great, and when drive assembly reciprocated, drive assembly motion relative to the sealing washer, can have great frictional force between drive assembly and the sealing washer, and this frictional force not only can cause the top layer molecule of sealing washer to drop and enter the reaction chamber, thereby still can wear and tear the sealing washer and lead to external dust and gas to get into the reaction chamber. The fallen surface molecules and external dust and gas can cause pollution to the wafer, thereby affecting the quality of the epitaxial growth product.

As shown in fig. 1 and 3, the utility model provides a cavity sealing structure for material loading chamber 1, it includes: the object bearing platform 2 is arranged in the feeding cavity 1; a push rod 3, any end of which is fixedly connected with one end face of the object bearing platform 2; the driving component 4 is fixedly connected with the other end of the ejector rod 3 and is used for driving the ejector rod 3 to move up and down; first flexible protective sheath 5 cup joints in 3 peripheries of above-mentioned ejector pin for isolated above-mentioned 1 inner space in material loading chamber and exterior space, the both ends of above-mentioned first flexible protective sheath 5 respectively with 2 terminal surfaces in above-mentioned material bearing platform and 1 internal face sealing connection in above-mentioned material loading chamber, or respectively with 1 outer wall in above-mentioned material loading chamber and 4 terminal surface sealing connection of above-mentioned drive assembly.

The feeding cavity 1 is a rectangular parallelepiped structure, and the feeding cavity 1 is prior art and will not be discussed in detail here. The object bearing table 2 is disposed in the loading chamber 1, and the object bearing table 2 may be a tray for bearing a wafer in the prior art. The ejector rod 3 penetrates through one end face (any one of the upper end face and the lower end face) of the feeding cavity 1 and is fixedly connected with one end face (any one of the upper end face and the lower end face) of the object bearing table 2, for example, when the ejector rod 3 penetrates through the upper end face of the feeding cavity 1, any one end of the ejector rod 3 is fixedly connected with the upper end face of the object bearing table 2; when the push rod 3 penetrates through the lower end face of the feeding cavity 1, any end of the push rod 3 is fixedly connected with the lower end face of the object bearing platform 2. The driving component 4 is arranged on one outer wall surface (any one of the upper outer wall surface and the lower outer wall surface) of the feeding cavity 1, the driving component 4 is a linear driving mechanism, such as a cylinder, an oil cylinder, an electric push rod and the like, and the driving component 4 is in transmission connection with the ejector rod 3. It will be appreciated that when the drive assembly 4 is an air cylinder or a hydraulic cylinder, the ram 3 is the piston rod of the air cylinder or the hydraulic cylinder.

As shown in fig. 1, in some embodiments, the first retractable protection sleeve 5 is sleeved on the periphery of the ram 3, two ends of the first retractable protection sleeve 5 are respectively connected with one end surface (any one of the upper end surface and the lower end surface) of the object holding table 2 and an inner wall surface (any one of the upper inner wall surface and the lower inner wall surface) of the loading cavity 1 in a sealing manner, and the application uses the two ends of the first retractable protection sleeve 5 respectively connected with the lower end surface of the object holding table 2 and the lower inner wall surface of the loading cavity 1 in a sealing manner as a preferred embodiment. In the embodiment of the application, the space that the outside of material loading chamber 1 and first flexible protective sheath 5 formed is the inner space of material loading chamber 1, the space outside this inner space is the outer space of material loading chamber 1, the isolated inner space and the outer space in material loading chamber 1 of first flexible protective sheath 5, ejector pin 3 does not have with material loading chamber 1 direct or indirect contact, consequently, need not to use the clearance between the sealed ejector pin 3 of seal assembly and the material loading chamber 1, the condition that seal assembly wearing and seal assembly's surface molecule drops when avoiding appearing drive assembly 4 and holding the lift of thing platform 2 through the drive of ejector pin 3.

As shown in fig. 3, in some embodiments, the first retractable protection sleeve 5 is sleeved on the periphery of the ejector rod 3, two ends of the first retractable protection sleeve 5 are respectively and hermetically connected with an outer wall surface (any one of an upper outer wall surface and a lower outer wall surface) of the feeding cavity 1 and an end surface (any one of an upper end surface and a lower end surface) of the driving body, and the present application takes as a preferred embodiment that two ends of the first retractable protection sleeve 5 are respectively and hermetically connected with the lower outer wall surface of the feeding cavity 1 and the upper end surface of the driving body. In the embodiment of the application, the space that the inboard of material loading chamber 1 and first flexible protective sheath 5 formed is the inner space in material loading chamber 1, the space outside this inner space is the outer space in material loading chamber 1, the isolated inner space and the outer space in material loading chamber 1 of first flexible protective sheath 5, ejector pin 3 does not have with material loading chamber 1 direct or indirect contact, consequently, need not to use the clearance between sealed ejector pin 3 of seal assembly and the material loading chamber 1, the condition that the surface molecule of seal assembly wearing and tearing and seal assembly drops when avoiding appearing drive assembly 4 and holding the lift of thing platform 2 through the drive of ejector pin 3.

In some embodiments, the first telescopic protection sleeve 5 is a corrugated tube, when two ends of the first telescopic protection sleeve 5 are connected in a sealing manner, the first telescopic protection sleeve 5 can isolate the inner space and the outer space of the first telescopic protection sleeve 5, and because the first telescopic protection sleeve 5 can be compressed or stretched, when the driving assembly 4 drives the object bearing platform 2 to ascend and descend through the push rod 3, the isolated relationship between the inner space and the outer space of the first telescopic protection sleeve 5 can be maintained.

In some embodiments, the lift pin 3 is connected to the center of one end surface (any one of the upper end surface and the lower end surface) of the object bearing table 2, and the present application takes the center of the lift pin 3 connected to the lower end surface of the object bearing table 2 as a preferred embodiment. In this application embodiment, the focus of holding platform 2 is located ejector pin 3 top to stability when effectively improving holding platform 2 and going up and down.

In some embodiments, the above-mentioned drive assembly 4 comprises: the linear module 41 is arranged on the feeding cavity 1, and the ejector rod 3 is fixedly connected with the sliding block 411 of the linear module 41; and a servo motor 42 connected to the linear module 41 and used for driving the lift rod 3 to move up and down through the linear module 41.

The linear module 41 includes a slider 411, a ball screw (not shown in the figure) and a linear guide 412, the rod 3 is fixedly connected with the slider 411 of the linear module 41, the slider 411 is in transmission connection with the ball screw, and the slider 411 is in sliding connection with the linear guide 412. In the present embodiment, a servo motor 42 is used as a power source of the linear module 41, the servo motor 42 is installed on the linear module 41 and is in transmission connection with the linear module 41, for example, the servo motor 42 is installed below the linear module 41, and a rotating shaft of the servo motor 42 is fixedly connected with a ball screw in the linear module 41. Because the ball screw can convert the rotary motion into the linear motion, when the servo motor 42 drives the ball screw to make the rotary motion, the slider 411 can move up and down on the linear guide rail 412 to realize the up-and-down movement of the ejector pin 3 (i.e. the servo motor 42 drives the ejector pin 3 to move up and down through the linear module 41 to realize the up-and-down movement of the bearing platform 2).

As shown in fig. 2, in some embodiments, when two ends of the first retractable protection sleeve 5 are respectively connected to an end surface of the object-holding platform 2 and an inner wall surface of the loading cavity 1 in a sealing manner, the cavity sealing structure further includes: and two ends of the second telescopic protection sleeve 6 are respectively connected with an outer wall surface of the feeding cavity 1 and the top of the sliding block 411 of the linear module 41. The structure of the second telescopic protection sleeve 6 is the same as that of the first telescopic protection sleeve 5, two ends of the second telescopic protection sleeve 6 are respectively connected with an outer wall surface (any one of the upper outer wall surface and the lower outer wall surface, and the lower outer wall surface is taken as a preferred embodiment) of the feeding cavity 1 and the sliding block 411 of the linear module, so that a closed space between the outer wall surface of the feeding cavity 1 and the sliding block 411 of the linear module 41 is formed, the closed space is isolated from the external space through the second telescopic protection sleeve 6, and the sealing performance of the cavity sealing structure is further improved.

In some embodiments, in order to conveniently pick and place the wafer, the loading chamber 1 of the present invention includes: a cavity 11; and a chamber door 12 hinged to the chamber body 11. When the wafers need to be taken and placed, the wafers can be taken out of the loading cavity 1 or placed in the loading cavity 1 only by opening the cavity door 12. In practical applications, the gap existing between the chamber door 12 and the chamber body 11 affects the sealing performance of the loading chamber 1. In order to solve the above technical problem, in some embodiments, a sealing assembly 13 is disposed at the cavity 11 or the chamber door 12, and the sealing assembly 13 may be a sealing ring, a sealing strip, or the like, and the sealing assembly 13 is used for sealing a connection between the cavity 11 and the chamber door 12 to improve the sealing performance of the loading cavity 1.

In the prior art, the object bearing platform 2 can only be used for placing a wafer, the wafer loading is required to be carried out again after the wafer loading is completed every time, the vacuum breaking and the vacuum pumping are required for the wafer loading every time, the waste of energy and special gas is caused, and the labor intensity is also increased.

In order to solve the above problem, in some embodiments, the object-holding platform 2 of the present invention includes: a base 21; the cassette 22 is disposed on the base 21, and the cassette 22 includes a plurality of wafer loading platforms 23 for loading wafers. Wherein the number of the slide stages 23 in this embodiment is 8, the slide stages 23 may be trays for carrying wafers in the prior art, and will not be described in detail here. Through the technical scheme of the embodiment of the application, a plurality of wafers can be placed at one time, and the feeding cavity 1 does not need to be opened and the wafers are placed after the wafers are fed every time. Through the technical scheme of this application embodiment, reduced intensity of labour under the condition of reducing the energy and special gas consumption. It should be understood that the number of the slide stages 23 can be changed according to actual needs.

In practical applications, a robot is generally used to take out the wafer from the loading chamber 1 and transfer the wafer to the reaction chamber or the transfer chamber, when the robot takes out the wafer, the gripping position is fixed, and if the position of the cassette 22 deviates (i.e. the position of the wafer deviates from the gripping position), firstly, a failure in taking out the wafer may occur, and secondly, a situation in which the robot grips a vulnerable portion of the wafer due to the deviation of the position of the wafer, thereby damaging the wafer may occur.

In order to solve the technical problem, in some embodiments, the utility model discloses be provided with the gag lever post that is used for restricting spool box 22 to place the position on base 21, because the limiting displacement of gag lever post, spool box 22 places the position and can not take place the skew (the position of wafer can not take place the skew promptly), thereby the manipulator can not appear when getting the piece and get the condition of piece failure, also can not be because the offset of wafer, thereby the manipulator grabs the condition that damages the wafer of the vulnerable part of wafer.

As shown in fig. 1, in some preferred embodiments, the cavity sealing structure comprises a loading cavity 1, an object bearing platform 2, a push rod 3, a driving assembly 4 and a first telescopic protection sleeve 5. The feeding cavity 1 comprises a cavity 11, a cavity door 12 and a sealing assembly 13, wherein the sealing assembly 13 is a sealing strip, the sealing strip is arranged on the cavity 11, and the sealing strip is used for sealing the joint of the cavity 11 and the cavity door 12. The object bearing table 2 comprises a base 21 and a wafer box 22, the wafer box 22 is arranged on the base 21, and the wafer box 22 comprises 8 wafer bearing tables 23 for bearing wafers. The driving assembly 4 comprises a linear module 41 and a servo motor 42, the linear module 41 comprises a sliding block 411, a ball screw and a linear guide rail 412, the sliding block 411 is connected with the linear guide rail 412 in a sliding mode, the ejector rod 3 penetrates through the lower end face of the feeding cavity 1, two ends of the ejector rod 3 are fixedly connected with the base 21 and the sliding block 411 of the linear module 41 respectively, the servo motor 42 is in transmission connection with the ball screw of the linear module 41, the ball screw can convert rotary motion into linear motion, and therefore the servo motor 42 drives the ejector rod 3 to move up and down through the linear module 41 to drive the object bearing table 2 to lift. First flexible protective sheath 5 is both ends open-ended bellows, first flexible protective sheath 5 cup joints in ejector pin 3 periphery, thereby the both ends of first flexible protective sheath 5 with hold under object platform 2 terminal surface and material loading chamber 1 internal face sealing connection under thereby isolated material loading chamber 1 inner space (the space that material loading chamber 1 and the first flexible protective sheath 5 outside formed) and exterior space (the space beyond the above-mentioned inner space of detaching), material loading chamber 1 does not have with ejector pin 3 direct or indirect contact, consequently need not to use the clearance between the sealed ejector pin 3 of seal assembly and the material loading chamber 1, the condition that seal assembly wearing and tearing and seal assembly's surface molecule drop when avoiding appearing drive assembly 4 and holding the lift of object platform 2 through the drive of ejector pin 3.

As shown in fig. 2, in some preferred embodiments, the cavity sealing structure comprises a loading cavity 1, an object bearing platform 2, a push rod 3, a driving assembly 4, a first telescopic protection sleeve 5 and a second telescopic protection sleeve 6. The feeding cavity 1 comprises a cavity 11, a cavity door 12 and a sealing assembly 13, wherein the sealing assembly 13 is a sealing strip, the sealing strip is arranged on the cavity 11, and the sealing strip is used for sealing the joint of the cavity 11 and the cavity door 12. The object bearing table 2 comprises a base 21 and a wafer box 22, the wafer box 22 is arranged on the base 21, and the wafer box 22 comprises 8 wafer bearing tables 23 for bearing wafers. The driving assembly 4 comprises a linear module 41 and a servo motor 42, the linear module 41 comprises a sliding block 411, a ball screw and a linear guide rail 412, the sliding block 411 is connected with the linear guide rail 412 in a sliding mode, the ejector rod 3 penetrates through the lower end face of the feeding cavity 1, two ends of the ejector rod 3 are fixedly connected with the base 21 and the sliding block 411 of the linear module 41 respectively, the servo motor 42 is in transmission connection with the ball screw of the linear module 41, the ball screw can convert rotary motion into linear motion, and therefore the servo motor 42 drives the ejector rod 3 to move up and down through the linear module 41 to drive the object bearing table 2 to lift. First flexible protective sheath 5 is both ends open-ended structure, and first flexible protective sheath 5 cup joints in 3 peripheries of ejector pin, thereby the both ends of first flexible protective sheath 5 with hold under object platform 2 terminal surface and the material loading chamber 1 internal wall be connected isolated material loading chamber 1 inner space (the space that the material loading chamber formed with the first flexible protective sheath 5 outside) and exterior space (the space except above-mentioned inner space) respectively. The second flexible protective sheath 6 is both ends open-ended bellows cover, and the both ends of the flexible protective sheath 6 of second are connected with outer wall and the slider 411 top of sharp module 41 under the material loading chamber 1 respectively and are isolated with this airtight space and external space between the slider 411 of sharp module 41 and the outer wall under the material loading chamber 1 with the airtight space that forms to further improve cavity seal structure's leakproofness. In the embodiment of the application, the feeding cavity 1 is not in direct or indirect contact with the ejector rod 3, so that a gap between the sealing component and the feeding cavity 1 is not required to be sealed, and the situations that the sealing component is abraded and surface molecules of the sealing component fall off when the driving component 4 drives the object bearing platform 2 to ascend and descend through the ejector rod 3 are avoided.

As shown in fig. 3, in some preferred embodiments, the cavity sealing structure comprises a feeding cavity 1, an object bearing platform 2, a push rod 3, a driving assembly 4 and a first telescopic protection sleeve 5. The feeding cavity 1 comprises a cavity 11, a cavity door 12 and a sealing assembly 13, wherein the sealing assembly 13 is a sealing strip, the sealing strip is arranged on the cavity 11, and the sealing strip is used for sealing the joint of the cavity 11 and the cavity door 12. The object bearing table 2 comprises a base 21 and a wafer box 22, the wafer box 22 is arranged on the base 21, and the wafer box 22 comprises 8 wafer bearing tables 23 for bearing wafers. The driving assembly 4 comprises a linear module 41 and a servo motor 42, the linear module 41 comprises a sliding block 411, a ball screw and a linear guide rail 412, the sliding block 411 is connected with the linear guide rail 412 in a sliding mode, the ejector rod 3 penetrates through the lower end face of the feeding cavity 1, two ends of the ejector rod 3 are fixedly connected with the base 21 and the sliding block 411 of the linear module 41 respectively, the servo motor 42 is in transmission connection with the ball screw of the linear module 41, the ball screw can convert rotary motion into linear motion, and therefore the servo motor 42 drives the ejector rod 3 to move up and down through the linear module 41 to drive the object bearing table 2 to lift. First flexible protective sheath 5 is both ends open-ended structure, first flexible protective sheath 5 cup joints in ejector pin 3 periphery, thereby isolated material loading 1 inner space (material loading chamber 1, the space of slider 411 and the inboard formation of first flexible protective sheath 5) and exterior space (the space beyond above-mentioned inner space) of material loading chamber are connected with material loading chamber 1 outer wall surface and straight line module 41's slider 411 top respectively at the both ends of first flexible protective sheath 5, material loading chamber 1 does not have and ejector pin 3 direct or indirect contact, consequently, need not to use the clearance between the sealed ejector pin 3 of seal assembly and the material loading chamber, the condition that the surface molecule of seal assembly wearing and tearing and seal assembly drops when avoiding appearing drive assembly 4 and holding the thing platform 2 through the drive of ejector pin 3.

From the above, this application provides a cavity seal structure for material loading chamber 1, it includes: the object bearing platform 2 is arranged in the feeding cavity 1; a push rod 3, any end of which is fixedly connected with one end face of the object bearing platform 2; the driving component 4 is fixedly connected with the other end of the ejector rod 3 and is used for driving the ejector rod 3 to move up and down; the first telescopic protection sleeve 5 is sleeved on the periphery of the ejector rod 3 and used for isolating the inner space and the outer space of the feeding cavity 1, and two ends of the first telescopic protection sleeve 5 are respectively in sealing connection with one end face of the object bearing platform 2 and one inner wall face of the feeding cavity 1 or are respectively in sealing connection with one outer wall face of the feeding cavity 1 and one end face of the driving assembly 4; the first telescopic protection sleeve 5 isolates the inner space and the outer space of the feeding cavity 1, so that a gap between the sealing component sealing ejector rod 3 and the feeding cavity 1 is not needed, and the situations that the sealing component is abraded and the surface molecules of the sealing component fall off when the driving component 4 drives the object bearing platform 2 to ascend and descend through the ejector rod 3 are avoided.

In the description herein, references to the description of the terms "one embodiment," "certain embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

What has been described above are only some embodiments of the invention. For those skilled in the art, without departing from the inventive concept, several modifications and improvements can be made, which are within the scope of the invention.

Claims (9)

1. A cavity seal structure for a loading cavity, comprising:

the object bearing platform (2) is arranged in the feeding cavity (1);

the any end of the ejector rod (3) is fixedly connected with one end face of the object bearing platform (2);

the driving component (4) is fixedly connected with the other end of the ejector rod (3) and is used for driving the ejector rod (3) to move up and down;

the first telescopic protection sleeve (5) is sleeved on the periphery of the ejector rod (3) and used for isolating the inner space and the outer space of the feeding cavity (1), and two ends of the first telescopic protection sleeve (5) are respectively in sealing connection with one end face of the object bearing platform (2) and one inner wall face of the feeding cavity (1) or respectively in sealing connection with one outer wall face of the feeding cavity (1) and one end face of the driving assembly (4).

2. The cavity sealing structure according to claim 1, characterized in that said first telescoping protective sleeve (5) is a bellows.

3. The cavity sealing structure according to claim 1, wherein the ejector pin (3) is connected to the center of the upper end surface or the center of the lower end surface of the object bearing table (2).

4. The cavity sealing structure according to claim 1, wherein the driving assembly (4) comprises:

the linear module (41) is installed on the feeding cavity (1), and the ejector rod (3) is fixedly connected with a sliding block (411) of the linear module (41);

and the servo motor (42) is connected with the linear module (41) and is used for driving the ejector rod (3) to move up and down through the linear module (41).

5. The cavity sealing structure according to claim 4, wherein when two ends of the first telescopic protection sleeve (5) are respectively connected with an end surface of the object bearing platform (2) and an inner wall surface of the loading cavity (1) in a sealing manner, the cavity sealing structure further comprises:

and two ends of the second telescopic protective sleeve (6) are respectively connected with an outer wall surface of the feeding cavity (1) and the top of the sliding block (411) of the linear module (41).

6. The cavity sealing structure according to claim 1, wherein the loading cavity (1) comprises:

a cavity (11);

a chamber door (12) hinged with the chamber body (11).

7. The cavity sealing structure according to claim 6, characterized in that a sealing component (13) is arranged on the cavity (11) or the cavity door (12), and the sealing component (13) is used for sealing the connection part of the cavity (11) and the cavity door (12).

8. The cavity sealing structure according to claim 1, wherein the stage (2) comprises:

a base (21);

the wafer box (22) is arranged on the base (21), and the wafer box (22) comprises a plurality of wafer carrying tables (23) for carrying wafers.

9. The cavity sealing structure according to claim 8, wherein a position-limiting column for limiting the placing position of the cassette (22) is arranged on the base (21).

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