CN217511490U

CN217511490U - Dust removal device for microelectronic component

Info

Publication number: CN217511490U
Application number: CN202123034986.9U
Authority: CN
Inventors: 许卫华; 郭琴; 汪炎
Original assignee: Anhui Zhonggao Information Technology Co ltd
Current assignee: Anhui Zhonggao Information Technology Co ltd
Priority date: 2021-12-06
Filing date: 2021-12-06
Publication date: 2022-09-30
Anticipated expiration: 2031-12-06

Abstract

The utility model discloses a dust removal device for microelectronic components, relating to the field of microelectronic component production, which comprises a dust removal mechanism, comprising a box body, wherein the box body is hollow and internally provided with a top plate made of wear-resistant metal; the negative pressure mechanism comprises a bidirectional air inlet pipe connected with the air duct pipe through a bolt and a negative pressure assembly arranged inside the bidirectional air inlet pipe; and a discharge mechanism mounted on one side of the case and inside the case. The utility model relates to a dust collector for microelectronic components, the motor passes through belt pulley and the operation of driving belt drive negative pressure fan, the air current flows through dust pipe and exhaust pipe, at the inside negative pressure environment that forms of box, the dust gets into the box simultaneously, adsorbed when the sack adsorber, after partial dust got into the condenser pipe along with the air current, because the inside vapor of pressure effect condenser pipe can condense into the drop of water and adsorb the dust, prevent internal blockage, easy maintenance, prevent simultaneously and block up, device life has been increased.

Description

Dust removal device for microelectronic components

Technical Field

The utility model relates to a microelectronic components and parts production field, in particular to a dust collector for microelectronic components and parts.

Background

Microelectronics is a new technology developed with integrated circuits, especially very large scale integrated circuits. The theoretical basis for its development is modern physics established during the end of the 19 th century to the 30's of the 20 th century. The microelectronic technology includes a series of special technologies such as system circuit design, device physics, process technology, material preparation, automatic test, packaging and assembly, and is the sum of all process technologies in microelectronics. The microelectronic device belongs to a precise device, and the microelectronic device must be isolated from dust and a clean production environment must be ensured in the production and use processes of the microelectronic device, but the production environment cannot be completely clean due to the movement of machines and personnel, so the microelectronic device is contaminated by dust in the production process, and the microelectronic device needs to be cleaned in time.

However, the existing microelectronic dust removal device in the market is inconvenient to maintain when in failure due to a complex structure, and is low in dust removal efficiency, and the interior of the device is easy to block after being used for a long time.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a dust collector for microelectronic components and parts has overcome the not enough of prior art, through setting up the condenser pipe, can further adsorb the dust through the drop of water that condenses after the dust gets into the connecting pipe, has work efficiency height, be convenient for control, characteristics that stability is high.

In order to solve the above problems, the utility model adopts the following technical proposal:

a dust collector for microelectronic components comprises

The dust removal mechanism comprises a box body, wherein the box body is hollow, a top plate made of wear-resistant metal is arranged in the box body, and an air duct pipe for air flow to pass through is fixedly arranged on one side of the box body;

the negative pressure mechanism comprises a bidirectional air inlet pipe connected with the air duct pipe through a bolt and a negative pressure assembly arranged inside the bidirectional air inlet pipe;

and the discharging mechanism is arranged on one side of the box body and inside the box body, and comprises a dust passing pipe and exhaust pipes, wherein the dust passing pipe is used for passing dust, and the dust passing pipe is respectively connected with the exhaust pipes and is uniformly distributed inside the box body.

Further, the cover door that conveniently changes the sack adsorber is installed at the box top, the roof top is equipped with a plurality of round holes and installs a plurality of sack adsorbers, the vertical setting of sack adsorber, air duct pipe output is located a plurality of sack adsorber tops, lead to the dirt pipe and pass sack adsorber centre of a circle position and reach the sack adsorber bottom.

Furthermore, the bag adsorber is hollow inside, a plurality of filter screens are mounted on the inner circular wall of the bag adsorber, and the filter screens are made of corrosion-resistant and wear-resistant metal materials.

Further, the negative pressure component comprises a motor and a negative pressure fan, a base is fixedly arranged on one side of the bidirectional air inlet pipe, the motor is installed on one side of the base, the negative pressure fan is of a circular frame type structure, and the negative pressure fan is installed on an axle seat inside the bidirectional air inlet pipe through a transmission shaft.

Further, the belt pulley is all installed to motor output and transmission shaft one end, two adopt driving belt to connect between the belt pulley, the base top is located belt pulley one side and still is provided with the supporting seat that increases stability, the transmission shaft overlap joint is at the supporting seat top.

Further, the exhaust mechanism still includes pressure sensor and condenser pipe, condenser pipe fixed mounting is in box one side, and is a plurality of the exhaust pipe all is connected through connecting pipe and condenser pipe top, and is a plurality of pressure sensor installs respectively in a plurality of connecting pipe one side.

Furthermore, a plurality of valves for controlling the internal pressure of the box body are arranged at the connecting part of the connecting pipe and the condensing pipe and at one end of the condensing pipe, and a barometer for monitoring the internal pressure is further arranged at the top of the condensing pipe close to one end of the valve.

Compared with the prior art, the utility model, following beneficial effect has:

the utility model discloses an at sack adsorber internally mounted filter screen, can effectively protect the sack adsorber under the high-pressure draught, improve device life.

The utility model discloses a set up the condenser pipe, can get into the connecting pipe after the dust, further adsorb the dust through the drop of water that condenses to through opening valve control device internal pressure, prevent to block up, improve absorption efficiency.

The utility model has the characteristics of work efficiency is high, be convenient for control, stability is high.

Drawings

Fig. 1 is a schematic external overall structure diagram of a dust removing device for microelectronic components.

Fig. 2 is a first-view external side view of a dust removal device for microelectronic components.

Fig. 3 is a second perspective external side view of a dust removal device for microelectronic components.

Fig. 4 is a schematic view of an internal cross-sectional structure of a dust removing apparatus for microelectronic devices.

Fig. 5 is a schematic view of a part a of the dust removing apparatus for a microelectronic device shown in fig. 1.

In the figure: 100. a dust removal mechanism; 101. a box body; 102. covering the door; 103. a top plate; 104. a cloth bag adsorber; 105. a filter screen; 106. an air duct pipe; 200. a negative pressure mechanism; 201. a motor; 202. a base; 203. a bidirectional air inlet pipe; 204. a pulley; 205. a negative pressure fan; 206. a drive shaft; 207. a drive belt; 208. a supporting seat; 300. a discharge mechanism; 301. an exhaust duct; 302. a dust pipe; 303. a connecting pipe; 304. a pressure sensor; 305. a barometer; 306. a condenser tube; 307. and (4) a valve.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to which the reference is made must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected or detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.

Referring to fig. 1-5, the present invention relates to a dust removing device for microelectronic components, which comprises

The dust removal mechanism 100 comprises a box body 101, a top plate 103 which is hollow and is made of wear-resistant metal is arranged in the box body 101, and an air duct 106 for air flow to pass through is fixedly arranged on one side of the box body 101;

the negative pressure mechanism 200 comprises a bidirectional air inlet pipe 203 connected with the air duct pipe 106 through a bolt and a negative pressure component arranged inside the bidirectional air inlet pipe 203;

the discharging mechanism 300 is installed on one side of the box 101 and inside the box 101, and includes a dust passing pipe 302 and an exhaust pipe 301 for passing dust, and the dust passing pipes 302 are respectively connected with the exhaust pipes 301 and are uniformly distributed inside the box 101.

The box body 101 is arranged on one side of a workshop, the motor 201 is started, the motor 201 drives the negative pressure fan 205 to operate through the belt pulley 204 and the transmission belt 207, airflow enters the box body 101 from the two-way air inlet pipe 203, flows through the dust through pipe 302 and the exhaust pipe 301, a negative pressure environment is formed inside the box body 101, dust simultaneously enters the box body 101 under the action of the airflow and is adsorbed when passing through the cloth bag adsorber 104, the filter screen 105 effectively prevents the high-pressure airflow from scouring the cloth bag adsorber 104, the service life of the device is prolonged, after part of dust enters the condenser pipe 306 through the dust through pipe 302 along with the airflow, water vapor inside the condenser pipe 306 can be condensed into water drops under the action of pressure to adsorb the dust, the water drops can be discharged by opening the valve 307 to prevent internal blockage, the internal pressure of the device can be rapidly observed through the pressure sensor 304 and the barometer 305, the internal condition of the device can be helped to judge by workers, the device can effectively adsorb dust, is convenient for change sack adsorber 104 simultaneously, and it is convenient to maintain, prevents simultaneously to block up, has increased device life.

In order to effectively adsorb dust, a cover door 102 convenient for replacing the cloth bag adsorber 104 is installed at the top of the box body 101, a plurality of round holes are formed in the top of the top plate 103, the cloth bag adsorber 104 is installed, the cloth bag adsorber 104 is vertically arranged, the output end of the air duct pipe 106 is located at the top of the cloth bag adsorber 104, and the dust pipe 302 penetrates through the circle center of the cloth bag adsorber 104 to reach the bottom of the cloth bag adsorber 104.

In order to protect the cloth bag adsorber 104 under the high-pressure airflow, the cloth bag adsorber 104 is hollow, a plurality of filter screens 105 are arranged on the inner circular wall, and the filter screens 105 are made of corrosion-resistant and wear-resistant metal materials.

The negative pressure component comprises a motor 201 and a negative pressure fan 205, a base 202 is fixedly arranged on one side of the bidirectional air inlet pipe 203, the motor 201 is installed on one side of the base 202, the negative pressure fan 205 is of a circular frame type structure, and the negative pressure fan 205 is installed on a shaft seat inside the bidirectional air inlet pipe 203 through a transmission shaft 206.

Belt pulleys 204 are installed at the output end of the motor 201 and one end of the transmission shaft 206, the two belt pulleys 204 are connected through a transmission belt 207, a supporting seat 208 for increasing stability is further arranged on one side, located on one side of the belt pulley 204, of the top of the base 202, the transmission shaft 206 is in lap joint with the top of the supporting seat 208, after the motor 201 is started, the transmission shaft 206 is driven to rotate through the belt pulley 204 and the transmission belt 207, and the negative pressure fan 205 runs.

In order to facilitate the staff to judge the internal condition of the device, the exhaust mechanism 300 further includes a pressure sensor 304 and a condenser 306, the condenser 306 is fixedly installed on one side of the box 101, the exhaust pipes 301 are all connected with the top of the condenser 306 through connecting pipes 303, and the pressure sensors 304 are respectively installed on one side of the connecting pipes 303.

The valve 307 for controlling the internal pressure of the box body 101 is arranged at the joint of the connecting pipes 303 and the condensing pipe 306 and at one end of the condensing pipe 306, the barometer 305 for monitoring the internal pressure is further arranged at the top of the condensing pipe 306 close to one end of the valve 307, and the internal pressure of the box body 101 can be effectively controlled by opening and closing the valve 307, so that the dust removal effect is controlled.

In order to conveniently control the equipment, the equipment is also provided with a PLC control system, and the PLC control system respectively controls the forward and reverse rotation of the motor 201; the circuit structure and the control principle of the PLC control system are prior art, and are not described in detail in this application.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a dust collector for microelectronic components and parts which characterized in that: comprises that

The dust removal mechanism (100) comprises a box body (101), a top plate (103) which is hollow and is made of wear-resistant metal is arranged in the box body (101), and an air duct pipe (106) for air flow to pass through is fixedly arranged on one side of the box body (101);

the negative pressure mechanism (200) comprises a bidirectional air inlet pipe (203) connected with the air duct pipe (106) through a bolt and a negative pressure assembly arranged inside the bidirectional air inlet pipe (203);

the discharging mechanism (300) is arranged on one side of the box body (101) and inside the box body (101), and comprises a dust passing pipe (302) and an exhaust pipe (301) which are used for passing through dust, and the dust passing pipe (302) is connected with the exhaust pipes (301) respectively and is uniformly distributed inside the box body (101).

2. The dust removing device for the microelectronic component as claimed in claim 1, wherein: cover door (102) of conveniently changing sack adsorber (104) are installed at box (101) top, roof (103) top is equipped with a plurality of round holes and installs a plurality of sack adsorbers (104), the vertical setting of sack adsorber (104), air duct pipe (106) output is located a plurality of sack adsorber (104) tops, it reaches sack adsorber (104) bottom to pass through sack adsorber (104) centre of a circle position through dirt pipe (302).

3. A dust extraction apparatus for a microelectronic component as claimed in claim 2, wherein: the cloth bag adsorber (104) is hollow, a plurality of filter screens (105) are mounted on the inner circular wall, and the filter screens (105) are made of corrosion-resistant and wear-resistant metal materials.

4. A dust removing device for a microelectronic component as claimed in claim 1, wherein: the negative pressure component comprises a motor (201) and a negative pressure fan (205), a base (202) is fixedly arranged on one side of the bidirectional air inlet pipe (203), the motor (201) is installed on one side of the base (202), the negative pressure fan (205) is of a circular frame type structure, and the negative pressure fan (205) is installed on an axle seat inside the bidirectional air inlet pipe (203) through a transmission shaft (206).

5. The dust removing device for the microelectronic component as claimed in claim 4, wherein: belt pulley (204), two are all installed to motor (201) output and transmission shaft (206) one end adopt drive belt (207) to connect between belt pulley (204), base (202) top is located belt pulley (204) one side and still is provided with supporting seat (208) that increase stability, transmission shaft (206) overlap joint is at supporting seat (208) top.

6. The dust removing device for the microelectronic component as claimed in claim 1, wherein: the exhaust mechanism (300) further comprises a pressure sensor (304) and a condensation pipe (306), the condensation pipe (306) is fixedly installed on one side of the box body (101), the exhaust pipe (301) is connected with the top of the condensation pipe (306) through a connecting pipe (303), and the pressure sensor (304) is installed on one side of the connecting pipes (303) respectively.

7. The dust removing device for the microelectronic component as claimed in claim 6, wherein: a plurality of valve (307) of control box (101) internal pressure are all installed to connecting pipe (303) and condenser pipe (306) junction and condenser pipe (306) one end, barometer (305) that are used for monitoring inside atmospheric pressure are still installed to condenser pipe (306) top near valve (307) one end.