CN217479540U - Arc source and multi-arc ion film plating machine - Google Patents
Arc source and multi-arc ion film plating machine Download PDFInfo
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- CN217479540U CN217479540U CN202221310741.6U CN202221310741U CN217479540U CN 217479540 U CN217479540 U CN 217479540U CN 202221310741 U CN202221310741 U CN 202221310741U CN 217479540 U CN217479540 U CN 217479540U
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Abstract
The application relates to the technical field of vacuum coating, in particular to an arc source and a multi-arc ion coating machine, wherein the arc source comprises: the insulating enclosure is provided with an accommodating space; the magnetic field assembly is arranged in the accommodating space and forms a comprehensive magnetic field in the accommodating space; the arc target is arranged on one side of the magnetic field assembly; the distance adjusting device is arranged in the accommodating space and connected with the magnetic field assembly, and the distance adjusting device drives the magnetic field assembly to move relative to the arc target. The application provides an arc source can adjust the distance between the part magnetism component in a plurality of magnetism components and the arc target through the roll adjustment device to make the distribution condition of the comprehensive magnetic field in the arc source and with the arc target between the distance adjustable, thereby help improving the dense layer quality after carrying out vacuum coating.
Description
Technical Field
The application relates to the technical field of vacuum coating, in particular to an arc source and a multi-arc ion coating machine.
Background
At present, in an arc source of the existing vacuum coating machine, the arrangement position of a magnetic component is relatively fixed, so that the positions of a magnetic field and an arc target in the arc source are relatively fixed, and the distribution range of the magnetic field and the distance between the magnetic field and the arc target directly influence the movement range and the movement track of the arc spot, so that the existing arc source cannot control or adjust the movement direction and the movement path of the arc spot.
SUMMERY OF THE UTILITY MODEL
The application aims to provide an arc source and a multi-arc ion coating machine, so as to solve the technical problems that the position of a magnetic field relative to an arc target is fixed and the distance between the magnetic field and the arc target cannot be adjusted in the prior art to a certain extent.
The present application provides an arc source comprising: the insulating enclosure is provided with an accommodating space;
the magnetic field assembly is arranged in the accommodating space and forms a comprehensive magnetic field in the accommodating space;
the arc target is arranged on one side of the magnetic field assembly;
the distance adjusting device is arranged in the accommodating space and connected with the magnetic field assembly, and the distance adjusting device drives the magnetic field assembly to move relative to the arc target.
In the above technical solution, further, the insulating enclosure has a cylindrical structure with openings at two ends, the arc source further includes a fixing component, and the magnetic field component is disposed on the fixing component.
In any of the above technical solutions, further, the arc source further includes a cooling device disposed at an opening at one end of the insulating enclosure;
the cooling device is positioned between the magnetic field assembly and the arc target, and the arc target is contacted with or attached to the cooling device;
the cooling device is of a flat plate structure, and a cooling medium flowing channel is formed in the cooling device.
In any of the above technical solutions, further, the cooling device is provided with a first fixed flange, the arc target is provided with a second fixed flange, and the first fixed flange is connected with the second fixed flange;
the second fixing flange is of an annular structure, and a first connecting part is formed on an inner ring of the second fixing flange;
the arc target is provided with a circular flat plate structure, a second connecting part is formed at the edge of the arc target, and the first connecting part is connected with the second connecting part in an adaptive manner.
In any of the above technical solutions, further, the distance adjusting device includes a first adjusting member and a second adjusting member;
a penetrating channel is formed in the center of the magnetic field assembly, the second adjusting piece is arranged in the penetrating channel, and the second adjusting piece is connected with the magnetic field assembly;
a first adjustment member threadably connected to the second adjustment member.
In any of the above technical solutions, further, the arc source further includes:
an insulating spacer having an annular configuration;
the ceramic ring is of an annular structure and is arranged on the inner ring of the insulating spacer sleeve; the second fixing flange is arranged on the inner ring of the ceramic ring.
In any of the above technical solutions, further, the arc source further includes a shield disposed on a side of the arc target facing away from the cooling device;
the shielding cover is provided with a cylinder structure with openings at two ends, and the outer wall surface of the opening at one end of the shielding cover is attached to the inner ring wall surface of the ceramic ring;
the arc source further comprises an arc source seat, a first sliding connection portion is formed on the shielding cover, a second sliding connection portion is formed on the arc source seat, and the first sliding connection portion is connected with the second sliding connection portion in an adaptive mode.
In any of the above technical solutions, further, the magnetic field assembly includes:
the first magnetic component is arranged on the fixed component and forms a first magnetic field distributed along a first direction;
a second magnetic member disposed on the fixing member and forming a second magnetic field distributed in a second direction different from the first direction;
a third magnetic member provided to the fixing member and forming a third magnetic field distributed in a third direction different from the first direction and the second direction;
the first magnetic field, the second magnetic field and the third magnetic field are superposed to form a comprehensive magnetic field.
In any of the above technical solutions, further, the fixing assembly includes:
a first fixing member;
the second fixing piece is arranged at an interval with the first fixing piece, and the first magnetic component is arranged on the second fixing piece;
the second fixing piece is provided with a mounting part, the third fixing piece is arranged on the mounting part, and the second magnetic component is arranged on the third fixing piece;
and the cover plate is connected with the third fixing piece and used for limiting the second magnetic component between the third fixing piece and the cover plate.
The application also provides a multi-arc ion coating machine, which comprises the arc source in any technical scheme, so that the arc source has all the beneficial technical effects of the arc source, and the description is omitted.
Compared with the prior art, the beneficial effect of this application is:
the application provides an arc source including: the insulating enclosure is provided with an accommodating space; the magnetic field assembly is arranged in the accommodating space and forms a comprehensive magnetic field in the accommodating space; the arc target is arranged on one side of the magnetic field assembly; the distance adjusting device is arranged in the accommodating space and connected with the magnetic field assembly, and the distance adjusting device drives the magnetic field assembly to move relative to the arc target.
The application provides an arc source can adjust the distance between the part magnetism component in a plurality of magnetism components and the arc target through the roll adjustment device to make the distribution condition of the comprehensive magnetic field in the arc source and with the arc target between the distance adjustable, thereby help improving the dense layer quality after carrying out vacuum coating.
The application provides a multi-arc ion coating machine, including above-mentioned arc source, therefore, can show the coating film quality who improves multi-arc ion coating machine through this arc source.
Drawings
In order to more clearly illustrate the detailed description of the present application or the technical solutions in the prior art, the drawings needed to be used in the detailed description of the present application or the prior art description will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic structural diagram of an arc source provided in an embodiment of the present application;
fig. 2 is a schematic structural view of an arc source hidden insulating barrier according to an embodiment of the present disclosure;
FIG. 3 is a schematic diagram of a partial structure of an arc source according to an embodiment of the present disclosure;
FIG. 4 is a schematic structural diagram of another portion of an arc source provided in an embodiment of the present application;
FIG. 5 is a schematic structural diagram of another portion of an arc source provided in an embodiment of the present application;
FIG. 6 is another perspective view of FIG. 5;
FIG. 7 is a schematic diagram of an arc target of an arc source according to an embodiment of the present disclosure;
FIG. 8 is a schematic structural view of a second mounting flange of the arc source provided in the embodiments of the present application;
FIG. 9 is a schematic structural diagram of a shield of an arc source according to an embodiment of the present disclosure;
fig. 10 is a cross-sectional view taken along a-a of fig. 9.
Reference numerals:
1-an insulating enclosure, 2-an arc target, 201-a second fixed flange, 202-a second connecting part, 203-a first connecting part, 204-a stopping part, 3-a distance adjusting device, 301-a first adjusting part, 302-a second adjusting part, 4-a cooling device, 401-a first fixed flange, 402-an electrode connector, 403-a liquid inlet, 5-a first magnetic component, 6-a second magnetic component, 7-a coil rack, 8-an insulating spacer, 9-a ceramic ring, 10-a shielding cover, 1001-a first sliding connecting part, 1002-a first sliding chute, 1003-a second sliding chute, 1004-a stepped part, 11-a first fixing part, 12-a second fixing part, 13-a third fixing part, 14-an electrode and 15-an electrode cover.
Detailed Description
The technical solutions of the present application will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments.
The components of the embodiments of the present application, as generally described and illustrated in the figures herein, could be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, presented in the accompanying drawings, is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application.
All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood in a specific case by those of ordinary skill in the art.
An arc source and a multi-arc ion coater according to some embodiments of the present application are described below with reference to fig. 1-10.
First aspect
Referring to fig. 1 to 10, embodiments of the present application provide an arc source including: keep off 1 in the insulation, the magnetic field subassembly, the arc target 2, roll adjustment device 3 and shield cover 10, wherein, the insulation is enclosed and is kept off 1 and has both ends open-ended section of thick bamboo structure, inside forms accommodation space, the magnetic field subassembly sets up in accommodation space through fixed subassembly, under the state shown in fig. 1, the insulation is enclosed the both ends opening that keeps off 1 and is vertical up respectively, down, the arc target 2 sets up in the insulation bottom opening part that keeps off 1, roll adjustment device 3 also sets up in accommodation space, roll adjustment device 3 is used for adjusting, change the magnetic field that the magnetic field subassembly formed and the distance between the arc target 2. The shielding case 10 is arranged below the arc target 2 and is used for connecting the arc source seat so as to fix the arc source through the arc source seat.
Specifically, the magnetic field assembly includes: the number of the first magnetic members 5 is multiple, the multiple first magnetic members 5 are distributed in a ring shape, the multiple first magnetic members 5 jointly form a first magnetic field, and the first magnetic field is distributed along a first direction; the number of the second magnetic members 6 is plural, the plural second magnetic members 6 are arranged next to each other in sequence, the plural second magnetic members 6 collectively form a second magnetic field, and the second magnetic field is distributed along a second direction, which is different from the first direction, preferably, the first direction is arranged at an angle to the second direction, and more preferably, the first direction is perpendicular to the second direction. Note that the first magnetic member 5 and the second magnetic member 6 are both permanent magnets.
The third magnetic member comprises a coil former 7 and a coil arranged on the coil former 7, and generates a third magnetic field when the coil is energized, the third magnetic field being distributed along a third direction, preferably the third direction being arranged at an angle to the first direction and the second direction.
The first magnetic field, the second magnetic field and the third magnetic field together form a comprehensive magnetic field.
Further, the fixing assembly includes: the adjusting device comprises a first fixing piece 11, a second fixing piece 12, a third fixing piece 13 and a cover plate, wherein the first fixing piece 11 is of a circular flat plate structure, a mounting hole is formed in the center of the first fixing piece 11, and the mounting hole is used for penetrating through an adjusting assembly.
The second fixing member 12 has a circular plate structure, the diameter of the second fixing member 12 is approximately equal to the diameter of the first fixing member 11, the second fixing member 12 is located below the first fixing member 11 and disposed opposite to each other, and the bobbin 7 is disposed between the first fixing member 11 and the second fixing member 12.
The lower surface of the second fixing piece 12 can also be regarded as a bottom wall surface which is attached to the arc target 2 or connected to the arc target 2, an accommodating groove is formed in the upper surface of the second fixing piece 12, the edge of the accommodating groove close to the second fixing piece 12 is arranged along the circumference of the second fixing piece 12, and the plurality of first magnetic members 5 are arranged in the accommodating groove one by one.
The first magnetic members 5 are permanent magnets having rectangular parallelepiped shapes and having N poles and S poles, the S pole of each first magnetic member 5 faces the bottom wall surface of the housing groove in the housing groove, and the N pole of each first magnetic member 5 faces the bobbin 7.
Further, a mounting portion is formed at a central position of the second fixing member 12, the mounting portion is specifically a circular hole structure, the third fixing member 13 is disposed at the mounting portion, and a gap is formed between a wall surface of the third fixing member 13 and the wall surface of the mounting portion, so that the third fixing member 13 and the second fixing member 12 can move relative to each other without mutual interference. Further, a groove body is formed on the upper surface of the third fixing piece 13, and the wall surface of the groove body is further sunk to form a plurality of mounting grooves, the number of the second magnetic members 6 is the same as that of the mounting grooves, preferably, the number of the mounting grooves and the number of the second magnetic members 6 are four, and one second magnetic member 6 is arranged in each mounting groove.
Preferably, two opposite mounting grooves in the four mounting grooves are arranged in parallel, and an included angle formed between any two adjacent mounting grooves is a right angle.
The second magnetic members 6 are rectangular permanent magnets, and similarly have N poles and S poles, the N pole of each second magnetic member 6 is disposed toward the center of the third fixing member 13, and the S pole of each second magnetic member 6 is disposed facing the inner wall surface of the third fixing member 13, so that the distribution direction of the second magnetic field is different from the distribution direction of the first magnetic field.
The shape of the cover plate is matched with the opening shape of the groove body on the upper surface of the third fixing piece 13, so that the cover plate can cover the opening of the groove body of the third fixing piece 13, and the plurality of second magnetic members 6 are sealed and limited in the mounting groove.
Further, the adjustment assembly includes: a second adjustment member 302 and a first adjustment member 301. The center of coil former 7 forms along the high through-passage way that establishes of coil former 7, through-passage way along the central point that vertical direction runs through coil former 7 puts, the mounting hole of first mounting 11 central point put with wear to establish the passageway intercommunication, second regulating part 302 wears to establish in the mounting hole and wears to establish the passageway, and second regulating part 302 is provided with flange, flange sets up along the circumference of second regulating part 302, flange passes through the fastener of screw or other forms and is connected with coil former 7.
The diameter of first regulating part 301 is less than the diameter of second regulating part 302, the surface of first regulating part 301 is formed with the external screw thread, the internal wall face of second regulating part 302 is formed with the internal thread with the external screw thread looks adaptation of first regulating part 301, thereby make second regulating part 302 and first regulating part 301 threaded connection, when rotating first regulating part 301, second regulating part 302 can turn into the lifting motion of self with the rotary motion of first regulating part 301, thereby make second regulating part 302 can drive coil former 7, second mounting 12 rises or descends.
Further, the magnetic field assembly still includes electrode 14, and electrode 14 has the pole structure, and the adjusting device 3 is formed with and wears to establish the passageway, and electrode 14 wears to establish in the passageway to the one end of electrode 14 is located outside first mounting 11, and when electrode 14 is located the one end connection outside first mounting 11 and is used for connecting the power.
Preferably, the outer wall surface of the first fixing member 11 is provided with an electrode cover 15, and the electrode cover 15 covers a portion of the electrode 14 extending beyond the first fixing member 11.
An electrode joint 402 for connecting the electrode 14 is provided at a central position of the cooling device 4, and one end of the electrode 14 penetrating the through passage is connected to the electrode joint 402.
Preferably, an O-ring for sealing is arranged between the copper sheet and the bottom wall surface of the cooling device 4.
One side of the cooling device 4, which is far away from the cooling surface, is provided with a groove, the groove is used as a flow channel, a cooling medium continuously flows in the groove, and the cooling medium can continuously absorb the heat transferred from the arc target 2 to the cooling device 4 in the flowing process, so that the cooling effect on the arc target 2 is ensured. Wherein the cooling medium may be, but is not limited to, water.
The edge of the cooling device 4 is provided with a first fixing flange 401, the edge of the arc target 2 is provided with a second fixing flange 201, and the first fixing flange 401 is connected with the second fixing flange 201 so that the arc source cooling device 4 is fixed with the arc target 2. First mounting flange 401 is provided with inlet 403, and each inlet 403 is provided with the water injection well choke, the water injection well choke sets up with first mounting flange 401's perpendicular to surface, also be formed with a side surface perpendicular setting of runner with cooling device 4, the water injection well choke is used for the connecting tube to connect so that connect through the pipe fitting, the water injection well choke, inlet 403 injects coolant in to the runner, the bottom of runner is formed with the liquid outlet, and the liquid outlet is connected with the drain pipe, make the coolant that flows in the runner can be through the liquid outlet, the drain pipe flows, and then make coolant continuously circulate in order to ensure the cooling effect.
Further, the second fixing flange 201 has a ring structure, and the inner wall of the ring structure is formed with a plurality of first connecting portions 203 at equal intervals, preferably, the number of the first connecting portions 203 is four, and four first connecting portions 203 equally divide the inner ring circumference of the second fixing flange 201. The first connecting portion 203 has an elongated structure, the length of the first connecting portion 203 extends along the circumferential direction of the inner ring of the second fixing flange 201, the first connecting portion 203 is parallel to the upper side and the lower side of the second fixing flange 201, and a stopper portion 204 is formed at one end portion of the first connecting portion 203.
The edge of the arc target 2 is formed with the second connecting portions 202 with the same number as the first connecting portions 203 at equal intervals, the second connecting portions 202 have a long structure and are protruded relative to the side wall of the arc target 2, preferably, the length of the second connecting portions 202 is smaller than that of the first connecting portions 203, and the height of the positions of the second connecting portions 202 on the side edge of the arc target 2 is lower than that of the positions of the first connecting portions 203 on the inner ring wall surface of the second fixing flange 201, firstly, the second connecting portions 202 are aligned with the gaps between the two adjacent first connecting portions 203, and then the arc target 2 is rotated towards the stopping portion 204, so that the second connecting portions 202 are rotated below the first connecting portions 203 and are blocked by the stopping portion 204 to excessively rotate, and therefore, the arc target 2 and the second fixing flange 201 are limited, and the two are mutually clamped.
Further, the arc source provided by the application also comprises an insulating spacer 8, a ceramic ring 9 and an arc source seat, the shielding cover 10 has a cylindrical structure with two open ends, the thickness of the upper end part of the shielding cover 10 is reduced, so that the upper end opening of the shielding case 10 forms a step part 1004, the inner wall surface of the upper end opening of the shielding case 10 contacts with the lower surface of the second fixing flange 201, the ceramic ring 9 is sleeved on the step part 1004 of the shielding case 10, the insulating spacer 8 surrounds the outside of the ceramic ring 9, and a plurality of through holes are formed on the insulating spacer 8 at equal intervals along the circumferential direction of the insulating spacer 8 in a manner of penetrating through the upper and lower surfaces of the insulating spacer 8, the through holes are used for penetrating screws or other fasteners, thereby, the insulating spacer 8 is connected with the second fixing flange 201 and the first fixing flange 401 which are positioned above the insulating spacer 8, and the insulating spacer 8 and the ceramic ring 9 have an insulating function to separate the inner space of the shielding case 10 from the outer space.
Further, the outer surface of the shield case 10 is formed with the first sliding coupling portions 1001, the number of the first sliding coupling portions 1001 is preferably three, and the three first sliding coupling portions 1001 are provided at equal intervals.
Preferably, the first sliding connection portion 1001 is specifically an L-shaped groove formed on the outer surface of the shield case 10, and includes a first sliding groove 1002 extending along the vertical direction and a second sliding groove 1003 extending along the horizontal direction, the arc source base is formed with a protrusion, the shield case 10 is lowered or the arc source base is raised after the protrusion is aligned with the inlet of the first sliding groove 1002, and then the shield case 10 or the arc source base is rotated to slide the protrusion into the second sliding groove 1003, so that the shield case 10 and the arc source base can be connected and locked.
Further, along the direction from the upper end opening to the lower end opening of the shielding case 10, the wall thickness of the shielding case 10 is gradually reduced, the specific surface is the outer wall surface of the shielding case 10 and the horizontal plane, and the inner wall surface of the shielding case 10 is an inclined surface, so that the inner space surrounded by the shielding case 10 is in a truncated cone shape, the depth of a shielding area can be increased, and the electronic motion range is further expanded.
To sum up, the arc source that this application provided can adjust the distance between partial magnetism component in a plurality of magnetism components and the arc target through the roll adjustment device to make the distribution condition of the comprehensive magnetic field in the arc source and with the arc target between the distance adjustable, thereby help improving the dense layer quality after carrying out vacuum coating.
(II) second aspect
The embodiment of the application also provides a multi-arc ion plating machine which comprises the arc source in any embodiment, so that all beneficial technical effects of the arc source are achieved, and the description is omitted.
Finally, it should be noted that: the above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present application.
Claims (10)
1. An arc source, comprising:
the insulating enclosure is provided with an accommodating space;
the magnetic field assembly is arranged in the accommodating space and forms a comprehensive magnetic field in the accommodating space;
the arc target is arranged on one side of the magnetic field assembly;
and the distance adjusting device is arranged in the accommodating space and is connected with the magnetic field assembly, and the distance adjusting device drives the magnetic field assembly to move relative to the arc target.
2. The arc source of claim 1, wherein the insulating enclosure has a cylindrical structure open at both ends, the arc source further comprising a stationary assembly, the magnetic field assembly being disposed on the stationary assembly.
3. The arc source of claim 1, further comprising a cooling device disposed at an end opening of the insulating enclosure;
the cooling device is positioned between the magnetic field assembly and the arc target, and the arc target is contacted with or attached to the cooling device;
the cooling device is of a flat plate structure, and a cooling medium flowing channel is formed in the cooling device.
4. The arc source of claim 3, wherein the cooling device is provided with a first fixed flange, the arc target is provided with a second fixed flange, and the first fixed flange is connected with the second fixed flange;
the second fixing flange is of an annular structure, and a first connecting part is formed on an inner ring of the second fixing flange;
the arc target is provided with a circular flat plate structure, a second connecting part is formed at the edge of the arc target, and the first connecting part is connected with the second connecting part in an adaptive mode.
5. The arc source of claim 1, wherein the pitch adjustment device comprises a first adjustment member and a second adjustment member;
a penetrating channel is formed in the center of the magnetic field assembly, the second adjusting piece is arranged in the penetrating channel, and the second adjusting piece is connected with the magnetic field assembly;
a first adjustment member threadably connected with the second adjustment member.
6. The arc source of claim 4, further comprising:
an insulating spacer having an annular configuration;
the ceramic ring is of an annular structure and is arranged on the inner ring of the insulating spacer sleeve; the second fixing flange is arranged on the inner ring of the ceramic ring.
7. The arc source of claim 6 further comprising a shield disposed on a side of the arc target facing away from the cooling device;
the shielding cover is provided with a cylinder structure with openings at two ends, and the outer wall surface of the opening at one end of the shielding cover is attached to the inner ring wall surface of the ceramic ring;
the arc source further comprises an arc source seat, a first sliding connection portion is formed on the shielding cover, a second sliding connection portion is formed on the arc source seat, and the first sliding connection portion is connected with the second sliding connection portion in an adaptive mode.
8. The arc source of claim 2, wherein the magnetic field assembly comprises:
the first magnetic component is arranged on the fixed component and forms a first magnetic field distributed along a first direction;
a second magnetic member disposed on the fixing member and forming a second magnetic field distributed in a second direction different from the first direction;
a third magnetic member provided to the fixing assembly and forming a third magnetic field distributed in a third direction different from the first direction and the second direction;
the first magnetic field, the second magnetic field and the third magnetic field are superposed to form a comprehensive magnetic field.
9. The arc source of claim 8, wherein the fixture assembly comprises:
a first fixing member;
the second fixing piece is arranged at an interval with the first fixing piece, and the first magnetic component is arranged on the second fixing piece;
the second fixing piece is provided with a mounting part, the third fixing piece is arranged on the mounting part, and the second magnetic component is arranged on the third fixing piece;
and the cover plate is connected with the third fixing piece and used for limiting the second magnetic component between the third fixing piece and the cover plate.
10. A multi-arc ion coater comprising the arc source of any of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221310741.6U CN217479540U (en) | 2022-05-27 | 2022-05-27 | Arc source and multi-arc ion film plating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221310741.6U CN217479540U (en) | 2022-05-27 | 2022-05-27 | Arc source and multi-arc ion film plating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217479540U true CN217479540U (en) | 2022-09-23 |
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ID=83313473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221310741.6U Active CN217479540U (en) | 2022-05-27 | 2022-05-27 | Arc source and multi-arc ion film plating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217479540U (en) |
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2022
- 2022-05-27 CN CN202221310741.6U patent/CN217479540U/en active Active
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