CN217476325U - Cutting spray set and slicer - Google Patents

Abstract

The embodiment of the application provides a cutting spray set and slicer, wherein, cutting spray set is used for spraying cutting fluid to the cutting wire net, includes: a spray pipe for containing cutting fluid; the spraying pipe is provided with spraying holes; the injection port of the spray pipe is communicated with the liquid supply system through a pipeline; and the flow discharge plate is arranged in the spray pipe and divides the inner space of the spray pipe into a first space and a second space, the first space is communicated with the injection port, and the second space is communicated with the spray hole. The drain plate is provided with a drain hole, and the first space and the second space of the spray pipe are communicated through the drain hole. The cutting spray set and slicer that this application embodiment provided can adapt to liquid supply system's pressure fluctuation, make cutting fluid evenly spray to the cutting wire net.

Description

Cutting spray set and slicer

Technical Field

The application relates to a silicon chip production technology, especially relates to a cutting spray set and slicer.

Background

A slicer is a device for slicing a bar of hard and brittle material, and is usually arranged horizontally with two parallel main rollers, on which a single diamond wire is wound to form at least 2000 wire saws. Taking a silicon rod as a hard and brittle material rod as an example, the silicon rod moves from top to bottom and passes through between two main rollers, and the main rollers rotate to drive a diamond wire to move at a high speed so as to cut the silicon rod into slices.

And spraying devices are respectively arranged on two sides of the silicon rod and used for spraying cutting liquid to the fretsaw in the cutting process, cooling the fretsaw and washing away silicon powder on the fretsaw. The cutting liquid is provided by a liquid supply system in the slicing machine, in practical application, the liquid supply pressure of the liquid supply system has large fluctuation, so that the pressure sprayed out from the spraying device by the cutting liquid is large and small, the cutting liquid sprayed to the wire saw is unevenly distributed, the cooling effect is greatly influenced, and the roughness of the surface of the silicon wafer formed by cutting can be influenced when more silicon powder exists on the wire saw, so that the yield is reduced.

Disclosure of Invention

In order to solve one of the above technical drawbacks, an embodiment of the present application provides a cutting shower device and a slicing machine.

According to a first aspect of the embodiments of the present application, there is provided a cutting spray device for spraying a cutting fluid to a cutting wire web, comprising:

a spray pipe for containing cutting fluid; the spraying pipe is provided with spraying holes; the injection port of the spray pipe is communicated with the liquid supply system through a pipeline;

the flow discharge plate is arranged in the spray pipe and divides the inner space of the spray pipe into a first space and a second space, the first space is communicated with the injection port, and the second space is communicated with the spray hole. The flow discharge plate is provided with a flow discharge hole, and the first space and the second space of the spray pipe are communicated through the flow discharge hole.

The cutting shower device as described above, further comprising:

and the drainage plate is arranged below the spraying holes so as to guide the cutting fluid flowing out of the spraying holes to the cutting wire net.

According to the cutting and spraying device, the drainage plate is obliquely arranged, one end of the drainage plate is connected with the spraying pipe and used for receiving the cutting fluid flowing out of the spraying hole, and the other end of the drainage plate faces the cutting wire net so as to guide the cutting fluid to the cutting wire net.

According to the cutting and spraying device, the first space in the spraying pipe is positioned above the second space.

The cutting shower device as described above, the flow guide plate includes: the drainage plate comprises a first plate section and a second plate section which are distributed along the width direction of the drainage plate, wherein an included angle between the first plate section and the second plate section is larger than or equal to 90 degrees; the top of first plate section extends to the side that the cutting wire net was kept away from to the hole that sprays, and first plate section and second plate section enclose the below formation drainage space of locating the shower.

The cutting shower device as described above, further comprising:

one end of the sealing plate extends to the outer surface of the spray pipe and is positioned on the side face of the spray hole close to the cutting wire net; the closing plate backstop forms the egress opening of cutting fluid in the top in drainage space between the tip of closing plate and drainage plate.

The cutting shower device as described above, further comprising:

a connecting plate; the two ends of the connecting plate in the length direction are connected to the drainage plate; the sealing plate is fixed to the connecting plate.

The cutting shower apparatus as described above, the sealing plate includes: a sealing plate section and a fixing plate section; the included angle between the sealing plate section and the fixing plate section is less than or equal to 90 degrees; one end of the sealing plate section extends to the outer surface of the spray pipe; the fixed plate section is parallel to the connecting plate and is fixed on the connecting plate.

According to the cutting and spraying device, the sealing plate section is obliquely arranged, and the distance between one end, close to the spraying pipe, of the sealing plate section and the drainage plate is larger than the distance between the end part, far away from the spraying pipe, of the sealing plate section and the drainage plate.

The cutting spray device as described above further includes:

an adjustment plate; the adjusting plate is provided with a long hole extending along the vertical direction and is connected to the connecting plate through a bolt capable of penetrating through the long hole; and the gap between the bottom end of the adjusting plate and the drainage plate forms an outlet of the drainage space.

According to the cutting and spraying device, the included angle between the second plate section and the horizontal direction is (0 degrees and 20 degrees).

According to a second aspect of embodiments of the present application, there is provided a microtome comprising: the cutting main roller is wound with cutting lines, and the cutting spraying device is arranged; the cutting spraying device is positioned above the cutting main roller, and cutting fluid reserved along the drainage plate flows to a cutting line on the cutting main roller.

According to the technical scheme, the flow discharge plate is arranged in the spray pipe, the inner space of the spray pipe is divided into the first space and the second space by the flow discharge plate, the first space is communicated with the second space through the flow discharge holes formed in the flow discharge plate, so that the cutting fluid entering the spray pipe firstly reaches the first space, enters the second space through the flow discharge holes, and flows to the cutting wire net through the spray holes. The discharge hole is arranged on the discharge plate in the scheme, so that the flow of the cutting liquid in the spray pipe is slowed down. Under the condition of pressure fluctuation of the supplied liquid, the cutting liquid can be uniformly distributed in the spray pipe, so that the cutting liquid uniformly flows out from the spray holes, the cutting liquid is ensured to uniformly flow to the cutting wire net, the cooling effect is ensured, and the silicon powder on the cutting wire is washed away.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:

fig. 1 is a perspective view of a slicing machine provided with a cutting spray device according to an embodiment of the present disclosure;

FIG. 2 is a side view of a microtome provided with a cutting spray assembly according to an embodiment of the present disclosure;

fig. 3 is a schematic structural diagram of a cutting spray device in a microtome according to an embodiment of the present disclosure;

FIG. 4 is a cross-sectional view of a cutting shower in a microtome according to an embodiment of the present disclosure;

FIG. 5 is an enlarged view of area A of FIG. 3;

FIG. 6 is a schematic diagram of a cleaning device in a microtome according to an embodiment of the present disclosure;

fig. 7 is an enlarged view of the region B in fig. 1.

Reference numerals:

11-a cutting frame; 12-cutting the main roller; 13-a collection tank; 14-a first-stage filter screen; 15-secondary filter screen; 16-a chip bin;

2-a spraying device; 21-a spray pipe; 211-spray holes; 212-cutting fluid injection tube; 213-cutting fluid line connection; 22-a leakage flow plate; 221-a drain hole; 23-a drainage plate; 24-a connecting plate; 25-an adjusting plate; 251-a long hole; 26-a sealing plate; 27-spraying bracket;

31-a silicon rod;

4-a cleaning device; 41-cleaning tube; 42-cleaning liquid injection pipe; 43-cleaning liquid spraying hole; 44-cleaning liquid line connection; 45-buckling.

Detailed Description

In order to make the technical solutions and advantages in the embodiments of the present application more clearly understood, the following description of the exemplary embodiments of the present application with reference to the accompanying drawings is made in further detail, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and are not exhaustive of all the embodiments. It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.

The embodiment provides a cutting spray set, can be applied to among the cutting equipment, especially is applied to the slicer that carries out the section to the silicon rod. The cutting spraying device is used for spraying cutting liquid to a cutting line in the process of cutting the silicon rod, cooling the cutting liquid and washing away silicon powder attached to the cutting line, so that the surface roughness of a silicon wafer formed by cutting meets the requirement, and the yield is improved.

Fig. 1 is a perspective view of a slicing machine provided with a cutting spray device according to an embodiment of the present disclosure, and fig. 2 is a side view of the slicing machine provided with the cutting spray device according to the embodiment of the present disclosure. As shown in fig. 1 and 2, the slicer provided in the present embodiment includes: a cutting frame 11 and at least two cutting main rollers 12, the cutting main rollers 12 being arranged side by side. A gap for the silicon rod 31 to pass through is left between the two main cutting rollers 12. The cutting wire wound on the cutting main rollers 12 forms a cutting wire net, the cutting wire section between the two cutting main rollers 12 serves as a cutting wire saw, the silicon rod 31 moves from one side of the cutting wire net to the other side of the cutting wire net to the position between the two cutting main rollers 12, and the silicon rod 31 is sliced by the plurality of wire saws to form a silicon wafer.

The number of the cutting main rollers 12 may be two, three, four, or four or more, and the cutting lines are wound around the respective cutting main rollers 12. The two cutting main rollers 12 are arranged horizontally side by side. The three cutting main rollers 12 are arranged in a triangle, wherein two cutting main rollers 12 are at the same height and the other cutting main roller 12 is above or below. The four cutting main rollers 12 are arranged in a rectangular or trapezoidal shape. Both ends of the cutting main roller 12 are arranged on the cutting frame 11 through bearings, and the cutting main roller 12 is driven to rotate through a motor.

In this embodiment, taking two cutting main rollers 12 as an example, the two cutting main rollers 12 are parallel and at the same height, and the silicon rod 31 may move from top to bottom to perform cutting, or from bottom to top to perform cutting. In this embodiment, the silicon rod 31 is moved from the top to the bottom for cutting.

The slicing machine further comprises a spraying device 2 which is arranged above the cutting main roller 12 and is positioned on one side of the cutting wire net and used for spraying cutting liquid to the cutting wire net in the slicing process so as to reduce dust generated in the cutting process and cool the cutting liquid. The shower device 2 may be mounted on the cutting frame 11.

Fig. 3 is a schematic structural diagram of a cutting spray device in a microtome according to an embodiment of the present disclosure, and fig. 4 is a cross-sectional view of the cutting spray device in the microtome according to an embodiment of the present disclosure. As shown in fig. 3 and 4, the shower apparatus includes: a shower 21 and a effusion plate 22.

Wherein, shower 21 is used for holding cutting fluid, and shower 21 and cutting main roll 12 parallel arrangement. The spray pipe 21 is provided with an injection port, the injection port is connected with a liquid supply system in the slicing machine through a pipeline, and the liquid supply system injects cutting liquid into the spray pipe 21. The spray pipe 21 is provided with spray holes 211, and the cutting fluid can flow out from the spray holes 211. The number of the spray holes 211 is plural, and the spray holes 211 are arranged at intervals or uniformly.

The effusion plate 22 is disposed within the shower pipe 21, and divides the internal space of the shower pipe 21 into a first space and a second space. The first space is communicated with the injection port, and the second space is communicated with the spray holes 211. Drain plate 22 is provided with drain hole 221, and the first space and the second space communicate through drain hole 221.

According to the technical scheme, the flow discharge plate is arranged in the spray pipe, the inner space of the spray pipe is divided into the first space and the second space by the flow discharge plate, the first space is communicated with the second space through the flow discharge holes formed in the flow discharge plate, so that the cutting fluid entering the spray pipe firstly reaches the first space, enters the second space through the flow discharge holes, and then flows to the cutting wire net through the spray holes. The discharge hole is arranged on the discharge plate in the scheme, so that the flow of the cutting liquid in the spray pipe is slowed down. Under the condition of pressure fluctuation of the supplied liquid, the cutting liquid can be uniformly distributed in the spray pipe, so that the cutting liquid uniformly flows out from the spray holes, the cutting liquid is ensured to uniformly flow to the cutting wire net, the cooling effect is ensured, and the silicon powder on the cutting wire is washed away.

On the basis of the technical scheme, one implementation mode is as follows: the effusion plate 22 is provided inside the shower pipe 21, and divides the internal space of the shower pipe 21 into an upper space (i.e., a first space) and a lower space (a second space). The drain plate 22 is provided with a drain hole 221 penetrating the drain plate 22 in the thickness direction, and the first space and the second space of the shower pipe 21 are communicated with each other through the drain hole 221. The upper part of the spray pipe 21 is provided with an injection port for connecting with a liquid supply system through a pipeline. The cutting fluid in the upper space enters the lower space through the drain hole 221, and the cutting fluid in the lower space flows out through the spray holes 211.

Drain holes 221 are provided in plurality and drain holes 221 may be spaced apart or uniformly spaced. The drain holes 221 and the shower holes 211 may be aligned vertically or staggered vertically.

Further, the flow guide plate 23 is disposed below the spray holes 211 to guide the cutting fluid flowing out of the spray holes 211 to the cutting wire mesh.

One embodiment is: the drainage plate 23 is arranged below the spray pipe 21 and is obliquely arranged. One end of the flow guide plate 23 is connected with the spray pipe 21 for receiving the cutting fluid flowing out of the spray holes 211, and the other end faces the cutting wire net to guide the cutting fluid to the cutting wire net.

One specific way is as follows: the end of the flow guide plate 23 close to the shower pipe 21 is higher, and the height close to the cutting wire net is lower. The drainage plate 23 receives the cutting fluid flowing out from the spraying holes 211, and the cutting fluid flows to the cutting wire net along the drainage plate 23. One implementation is as follows: the length of the flow guide plate 23 is matched with that of the spray pipe 21, so that all cutting fluid flowing out of the spray holes 211 is received by the flow guide plate 23.

An injection port is arranged at the end part or the middle part of the spray pipe 21, one end of the cutting fluid injection pipe 212 is connected to the injection port, the other end of the cutting fluid injection pipe is provided with a cutting fluid pipeline connector 213, and the cutting fluid pipeline connector 213 is connected with a cleaning fluid supply pipeline in the fluid supply system through a pipeline.

On the basis of the above technical scheme, this embodiment provides a concrete implementation of drainage plate:

as shown in fig. 5, the longitudinal direction of the flow guide plate 23 is defined as the same direction as the axial direction of the cutting main roller 12, and the width direction of the flow guide plate 23 is defined as the direction from the shower pipe 21 toward the wire net. The drainage plate 23 specifically includes: the included angle between the first plate section and the second plate section is larger than or equal to 90 degrees, and the first plate section and the second plate section are in smooth transition. The first plate section can extend in the vertical direction or extend obliquely, the top end of the first plate section extends to abut against the spray pipe 21 and is located in the spray hole 211 and far away from the side face of the cutting wire net, if the first plate section abuts against the left side of the spray pipe 21 upwards in fig. 5, the first plate section and the second plate section are arranged below the spray pipe 21 in an enclosing manner to form a drainage space.

One specific way is as follows: the first plate section and the second plate section are L-shaped, wherein the top end of the first plate section extends to the left side which is welded with the outer wall of the spray pipe 21 and is positioned in the spray hole 211, and the second plate section extends towards the right lower direction. A drainage space is enclosed by the drainage plate 23 and the spray pipe 21, and cutting fluid flows out from the spray holes 211, flows downwards along the second plate section in the drainage space and flows out from the right end of the second plate section.

The included angle between the second plate section and the horizontal direction is (0 degree, 20 degrees), namely, the included angle is larger than 0 degree and smaller than or equal to 20 degrees, for example, the included angle between the second plate section and the horizontal direction can be about 5 degrees, so that the cutting fluid flows out smoothly, and the included angle has a certain initial speed and is shot to the cutting wire net by a parabolic track, so that the middle part and two ends of the cutting wire net are contacted with the cutting fluid, and the cooling and flushing effects are guaranteed.

The above-mentioned shower 21 can be fixed to the cutting frame 11, for example: both ends of the shower pipe 21 are fixed to the cutting frame 11 through shower brackets 27, respectively.

Further, a sealing plate 26 is used, one end of which extends to the outer surface of the shower pipe 21, for example, may be welded to the outer surface of the shower pipe 21, and is located at the side of the shower holes 211 adjacent to the wire mesh, as shown at the right side of the shower holes 211 in fig. 5. The sealing plate 26 may extend horizontally or obliquely downward, stopping above the drainage space, and forming an outflow opening for the cutting fluid between the sealing plate 26 and the end of the drainage plate 21. The sealing plate 26, the drainage plate 23 and the spray pipe 21 enclose a closed drainage space, and an opening is formed only at the end parts of the sealing plate 26 and the drainage plate 23 for the cutting fluid to flow out. Above-mentioned scheme makes cutting fluid all flow from the opening, all can flow to the cutting wire net, and the guarantee is to the cooling and the washing effect of cutting wire net.

The sealing plate 26 may also be fixed at both ends to the shower brackets 27. Alternatively, the sealing plate 26 may be fixed as follows:

the connecting plate 24 is used to extend in the axial direction of the cutting main roller 12. Both ends of the connecting plate 24 in the length direction thereof may be fixed to the flow guide plate 23 by welding. The seal plate 26 is fixed to the connecting plate 24 by welding or bolting. Connecting plate 24 plays fixed sealing plate 26's effect on the one hand, and the clearance between the bottom of on the other hand connecting plate 24 and the drainage plate 23 forms the export in drainage space, and encloses together with sealing plate 26, drainage plate 23 and establish the formation drainage space, makes the cutting fluid all flow from the opening, on the cutting wire net all can flow, the guarantee to the cooling of cutting wire net and wash the effect.

Further, the sealing plate 26 includes a sealing plate section and a fixing plate section. Wherein the included angle between the sealing plate section and the fixing plate section is less than or equal to 90 degrees. One end of the sealing plate section extends to the outer surface of the shower pipe 21, specifically is welded to the outer surface of the shower pipe 21, and is located at the right side of the shower hole 211. The sealing plate section is arranged to incline downwards to the right, and the distance between one end of the sealing plate section close to the spray pipe 21 and the drainage plate 23 is larger than the distance between the end part of the seal plate section far away from the spray pipe 21 and the drainage plate 23. The fixing plate section is parallel to the connecting plate 24 and fixed to the connecting plate 24.

Further, an adjustment plate 25 is included. The adjusting plate 25 is parallel to the connecting plate 24, and is located on both sides of the connecting plate 24 with the sealing plate 26. The adjusting plate 25 is provided with a vertically extending long hole 251, and is connected to the connecting plate 24 by a bolt capable of passing through the long hole 251, specifically, the bolt is adapted to pass through the long hole 251 of the adjusting plate 25, the through hole of the connecting plate 24 and the through hole of the sealing plate 26 in sequence and then is matched and connected with a nut, so as to fix the sealing plate 26, the connecting plate 24 and the adjusting plate 25 together. The gap between the bottom end of the adjusting plate 25 and the drainage plate 23 forms the outlet of the drainage space, and the height of the adjusting plate 25 is further changed by adjusting the position of the bolt in the long hole 251 so as to adjust the size of the outlet of the drainage space and change the flow and pressure of the cutting fluid outlet.

With respect to the slicer provided by the present embodiment, as shown in fig. 1 and fig. 2, a collecting tank 13 for collecting the cutting fluid is provided below the cutting main rollers 12, and the cutting fluid flows into the collecting tank 13 from the area between the two cutting main rollers 12, passes through the collecting pipeline, and is filtered for recycling. The cutting liquid can be clean water or other corrosion-resistant liquid which is not easy to react with the surface of the silicon rod.

Further, a filter screen is arranged at the top of the collecting tank 13 for filtering out the cut fragments. Two stages of filter screens are adopted, namely: the upper part is provided with a first-level filter screen 14 for filtering large particles, and the lower part is provided with a second-level filter screen 15 for filtering small particles.

A chip box 16 is further provided between the two cutting main rollers 12 for collecting silicon chips generated during the cutting process, reducing silicon chips falling on the first filter 14 and avoiding clogging.

On the basis of the technical scheme, the slicing machine provided by the embodiment is also provided with the cleaning device 4, so that the silicon wafer can be pre-cleaned in the process of slicing and retreating the rod, and the silicon powder on the surface of the silicon wafer and in the kerf can be washed off. The rod withdrawing process is utilized for pre-cleaning, so that the subsequent step of pre-cleaning in a degumming machine is omitted, and the production time of the silicon wafer is shortened. And need not set up belt cleaning device in advance in the degumming machine, can simplify the structure of degumming machine.

The cleaning device 4 and the spraying device 2 are arranged on the same side of the cutting wire net. The distance between the cleaning liquid outlet of the cleaning device 4 and the cutting main roller 12 is larger than the distance between the cutting liquid outlet of the spraying device 2 and the cutting main roller 12.

In this embodiment, the silicon rod is lowered and the silicon rod is sliced by the cutting wire net formed on the upper surface of the cutting main roller 12, taking the example of cutting by moving from top to bottom. After the cutting is completed, the silicon rod rises to retreat. The cleaning device 4 and the spraying device 2 are arranged above the cutting wire net, a cleaning liquid outlet in the cleaning device 4 is higher than a cutting liquid outlet in the spraying device 2, and the cutting liquid outlet is lower in height and directly sprayed onto the cutting wire net; and the cleaning liquid outlet is higher in height so as to spray cleaning liquid in the rod withdrawing process.

In the process of moving back the bar upwards, the cutting line is clamped between the silicon wafers and is slowly threaded, a certain gap is reserved between the adjacent silicon wafers, the silicon wafers are not completely attached together, the silicon wafers are cleaned at the moment, liquid can enter the silicon wafers more easily, the cleaning effect can be improved, the silicon powder concentration between the silicon wafers is greatly reduced, the bar can be moved back upwards more conveniently, and the scratch of the silicon wafers can be reduced.

Fig. 6 is a schematic structural diagram of a cleaning device in a microtome according to an embodiment of the present disclosure. As shown in fig. 6, the cleaning device 4 includes: a cleaning pipe 41 and a cleaning liquid injection pipe 42. The cleaning pipe 41 extends in a horizontal direction from one end of the cutting main roller 12 to the other end. The cleaning pipe 41 has a cleaning liquid injection hole 43 formed on a side thereof facing the silicon wafer as a cleaning liquid outlet, and the cleaning liquid is injected from the cleaning liquid injection hole 43 to be directed to the silicon wafer. The cleaning liquid injection pipe 42 is connected to one end of the cleaning pipe 41, and the other end of the cleaning pipe 41 is closed. The cleaning pipe 41 is provided with a plurality of cleaning liquid spray holes 43.

Specifically, one end of the cleaning liquid injection pipe 42 is connected to a cleaning liquid supply pipe on the slicer through a cleaning liquid pipe joint 44, and the cleaning liquid is continuously supplied to the cleaning pipe 141 through the cleaning liquid supply pipe, and the cleaning liquid is collected and recovered from the lower side of the cutting main roller 12 for recycling. The cleaning liquid can be clean water or other corrosion-resistant liquid which is not easy to generate chemical reaction on the surface of the silicon wafer.

The length of the cleaning pipe 41 may be smaller than the length of the cutting main roller 12 and larger than the length of the silicon rod, and may be specifically set according to the length of the silicon rod. For example: the length of the cleaning pipe 41 is 600mm-900mm, the pipe diameter is 20mm-40mm, and the liquid injection pressure of the cleaning liquid injection pipe 42 is 0.2Mpa-1 Mpa. The diameter of the cleaning liquid spray holes 43 is 0.3mm-1.5mm, and the cleaning liquid spray holes are uniformly distributed on the cleaning pipe 41.

As shown in fig. 1 and 7, the cleaning pipe 41 may be disposed above the sealing plate 26 based on the solution of the spraying device 2. The cleaning pipe 41 is fixed on the cutting fluid injection pipe 212 by using the fastener 45, and the fastener 45 is positioned in the middle of the cleaning pipe 41, so that the installation distance is short, and the size of the installation part is reduced. The buckle 45 specifically includes an upper mounting plate and a lower retaining ring, and the lower retaining ring is located below the cutting fluid injection pipe 212 and is fixed to the upper mounting plate through a bolt, so as to be convenient for disassembly and assembly.

In the description of the present application, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be considered as limiting the present application.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; can be mechanically connected, electrically connected or can communicate with each other; they may be directly connected or indirectly connected through intervening media, or may be connected through the use of two elements or the interaction of two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

While the preferred embodiments of the present application have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all alterations and modifications as fall within the scope of the application.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.

Claims (12)

1. The utility model provides a cutting spray set for spray cutting fluid to cutting wire net, its characterized in that includes:

a spray pipe for containing cutting fluid; the spraying pipe is provided with spraying holes; the injection port of the spray pipe is communicated with the liquid supply system through a pipeline;

the flow discharge plate is arranged in the spray pipe and divides the inner space of the spray pipe into a first space and a second space, the first space is communicated with the injection port, and the second space is communicated with the spray hole; the drain plate is provided with a drain hole, and the first space and the second space of the spray pipe are communicated through the drain hole.

2. The cutting shower apparatus of claim 1, further comprising:

and the drainage plate is arranged below the spraying holes so as to guide the cutting liquid flowing out of the spraying holes to the cutting wire net.

3. The cutting and spraying device as claimed in claim 2, wherein the flow guide plate is disposed obliquely, one end of the flow guide plate is connected with the spray pipe for receiving the cutting fluid flowing out from the spray holes, and the other end faces the cutting wire net to guide the cutting fluid to the cutting wire net.

4. The cutting shower of claim 1, wherein the first space within the shower pipe is located above the second space.

5. The cutting shower apparatus of claim 3, wherein the flow diverter plate comprises: the drainage plate comprises a first plate section and a second plate section which are arranged along the width direction of the drainage plate, and an included angle between the first plate section and the second plate section is larger than or equal to 90 degrees; the top of first plate section extends to the side that the cutting wire net was kept away from to the hole that sprays, and first plate section and second plate section enclose the below formation drainage space of locating the shower.

6. The cutting shower apparatus of claim 5, further comprising:

one end of the sealing plate extends to the outer surface of the spray pipe and is positioned on the side surface of the spray hole close to the cutting wire net; the sealing plate is stopped above the drainage space, and an outlet of the cutting fluid is formed between the sealing plate and the end part of the drainage plate.

7. The cutting shower apparatus of claim 6, further comprising:

a connecting plate; the two ends of the connecting plate in the length direction are connected to the drainage plate; the sealing plate is fixed to the connecting plate.

8. The cutting shower as defined in claim 7, wherein said sealing plate includes: a sealing plate section and a fixing plate section; the included angle between the sealing plate section and the fixing plate section is less than or equal to 90 degrees; one end of the sealing plate section extends to the outer surface of the spray pipe; the fixed plate section is parallel to the connecting plate and is fixed on the connecting plate.

9. The cutting shower assembly of claim 8 wherein the sealing plate segment is angled such that the distance between the end of the sealing plate segment proximal to the shower tube and the flow directing plate is greater than the distance between the end of the sealing plate segment distal to the shower tube and the flow directing plate.

10. The cutting shower apparatus of claim 7, further comprising:

an adjustment plate; the adjusting plate is provided with a long hole extending along the vertical direction and is connected to the connecting plate through a bolt capable of penetrating through the long hole; and the gap between the bottom end of the adjusting plate and the drainage plate forms an outlet of the drainage space.

11. The cutting shower assembly of claim 5, wherein said second plate segment is angled (0 °, 20 ° ]) from horizontal.

12. A microtome, comprising: a cutting main roller around which a cutting line is provided, and a cutting shower device according to any one of claims 1 to 11; the cutting spraying device is positioned above the cutting main roller, and cutting liquid reserved along the drainage plate flows to a cutting wire net on the cutting main roller.

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