CN217476323U - Liquid supply cylinder, liquid path circulating system and slicing machine - Google Patents

Abstract

The embodiment of the application provides a supply liquid jar, liquid way circulation system and slicer, wherein, supply the liquid jar to include: the cylinder body is internally provided with an accommodating cavity for accommodating cutting fluid; the cylinder body is provided with a liquid feeding port and a liquid discharging port which are respectively communicated with the accommodating cavity; the liquid feeding port is arranged at the top of the cylinder body, and the liquid discharging port is arranged at the bottom of the cylinder body; and the liquid discharge valve is arranged on the liquid discharge port and used for controlling the opening or closing of the liquid discharge port. The confession liquid jar that this application embodiment provided can conveniently discharge useless cutting fluid to pour into new cutting fluid into.

Description

Liquid supply cylinder, liquid path circulating system and slicing machine

Technical Field

The application relates to a silicon wafer production technology, in particular to a liquid supply cylinder, a liquid path circulating system and a slicing machine.

Background

A slicer is a device for slicing a bar of hard and brittle material, and is usually arranged horizontally with two parallel main rollers, on which a single diamond wire is wound to form at least 2000 wire saws. Taking a silicon rod as a hard and brittle material rod as an example, the silicon rod moves from top to bottom and passes through between two main rollers, and the main rollers rotate to drive a diamond wire to move at a high speed so as to cut the silicon rod into slices.

In order to cool down the diamond wire moving at a high speed, a liquid supply cylinder is generally arranged in the slicing machine, a spraying device is arranged above the main roller, and cutting liquid in the liquid supply cylinder is sprayed onto the diamond wire through the spraying device to cool down the diamond wire. And cutting fluid is collected from the bottom of the main roller and then returns to the liquid supply cylinder for recycling. A large amount of silicon powder is generated in the process of cutting the silicon rod, the fine-particle silicon powder flows along with the cutting liquid and enters the liquid supply cylinder, when the concentration of the silicon powder is too high, the service cycle of each filter screen in the liquid supply system can be shortened, the filter screens need to be frequently replaced, the production efficiency is reduced, and the maintenance cost is also improved.

Disclosure of Invention

In order to solve one of the above technical drawbacks, an embodiment of the present application provides a liquid supply cylinder, a liquid path circulating system and a slicing machine.

According to a first aspect of embodiments of the present application, there is provided a liquid supply cylinder comprising:

the cylinder body is internally provided with an accommodating cavity for accommodating cutting fluid; the cylinder body is provided with a liquid feeding port and a liquid discharging port which are respectively communicated with the accommodating cavity; the liquid feeding port is arranged at the top of the cylinder body, and the liquid discharging port is arranged at the bottom of the cylinder body;

and the liquid discharge valve is arranged on the liquid discharge port and used for controlling the opening or closing of the liquid discharge port. According to the liquid supply cylinder, the bottom of the cylinder body is provided with the opening, the opening is connected with the liquid discharge pipe, the liquid discharge valve is arranged on the liquid discharge pipe, and the outlet end of the liquid discharge port is used as the liquid discharge port.

As for the liquid supply cylinder, the liquid filling port cover is provided with a liquid filling cover.

According to the liquid supply cylinder, the other end of the top surface of the cylinder body is provided with the cutting liquid return port, and the filter screen is arranged below the cutting liquid return port; and a sealing rubber strip is also arranged at the position of the cutting fluid return port.

According to the liquid supply cylinder, the side surface of the cylinder body is provided with the stop seat, and the stop seat is provided with the adjusting bolt in a penetrating manner; the cylinder body and the cutting equipment can move relatively along the first direction, and the adjusting bolt extends along the first direction and is used for adjusting the distance between the liquid supply cylinder and the cutting equipment.

According to the liquid supply cylinder, the bottom of the cylinder body is provided with at least three movable wheel sets; remove the wheelset and include: a wheel support and a roller; the wheel bracket is rotatably arranged at the bottom of the cylinder body and can rotate relative to the wheel bracket in the horizontal direction; the roller is connected to the wheel bracket through a wheel shaft.

According to the liquid supply cylinder, the wheel brackets of at least two movable wheel sets are provided with the locking pieces, and the locking pieces can rotate relative to the wheel brackets until the pressing roller is locked.

According to a second aspect of embodiments of the present application, there is provided a fluid circuit system, including:

a spraying device;

a liquid supply cylinder as described above;

and the liquid supply pump is arranged on the cylinder body of the liquid supply cylinder and pumps the cutting liquid in the liquid supply cylinder to the spraying device.

The liquid path circulation system as described above, the shower device includes:

a spray pipe for containing cutting fluid; the spraying pipe is provided with spraying holes; the injection port of the spray pipe is communicated with the liquid supply cylinder through a pipeline;

the flow discharge plate is arranged in the spray pipe and divides the inner space of the spray pipe into a first space and a second space, the first space is communicated with the injection port of the spray pipe, and the second space is communicated with the spray hole; the drain plate is provided with a drain hole, and the first space and the second space of the spray pipe are communicated through the drain hole.

The liquid path circulation system as described above, the shower device further includes:

and the drainage plate is arranged below the spraying holes so as to guide the cutting liquid flowing out of the spraying holes to the cutting wire net.

According to the liquid path circulating system, the drainage plate is obliquely arranged, one end of the drainage plate is connected with the spray pipe and used for receiving the cutting liquid flowing out of the spray holes, and the other end of the drainage plate faces the cutting wire net so as to guide the cutting liquid to the cutting wire net.

In the liquid path circulation system, the first space in the shower pipe is located above the second space.

According to a third aspect of embodiments of the present application, there is provided a microtome comprising:

cutting the main roller; cutting lines are wound on the cutting main roller; and

the liquid path circulation system as described above; and a spraying device in the liquid path circulating system is arranged above the cutting main roller and sprays cutting liquid to the cutting line.

The technical scheme that this application embodiment provided sets up the filling opening at the cylinder body top that supplies the liquid jar for pour into cutting fluid into in the cylinder body through the filling opening, and set up leakage fluid dram and flowing back valve in the bottom of cylinder body, through leakage fluid dram discharge cutting fluid after opening the flowing back valve, then pour into new cutting fluid into through the filling opening, with the life cycle of filter screen in the extension liquid supply system, reduce and change the number of times, not only can improve production efficiency, but also can guarantee section finished product quality.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:

fig. 1 is a schematic structural diagram of a liquid supply cylinder provided in an embodiment of the present application;

FIG. 2 is a schematic structural view of a fluid supply cylinder applied to a fluid path circulating system according to an embodiment of the present disclosure;

fig. 3 is a perspective view of a slicer provided with a spraying device according to an embodiment of the present disclosure;

FIG. 4 is a side view of a slicer with a spray assembly according to an embodiment of the present disclosure;

FIG. 5 is a schematic structural diagram of a spraying device in a microtome according to an embodiment of the present disclosure;

FIG. 6 is a cross-sectional view of a spray assembly of a microtome according to an embodiment of the present disclosure;

fig. 7 is an enlarged view of the area a in fig. 5.

FIG. 8 is a schematic diagram of a cleaning device in a microtome according to an embodiment of the present disclosure;

fig. 9 is an enlarged view of the region B in fig. 3.

Reference numerals:

11-a cutting frame; 12-cutting the main roller; 13-a holding tank; 14-a first-stage filter screen; 15-secondary filter screen; 16-a chip bin;

2-a spraying device; 21-a spray pipe; 211-spray holes; 212-cutting fluid injection tube; 213-cutting fluid line connection; 22-a leakage flow plate; 221-a drain hole; 23-a drainage plate; 24-a connecting plate; 25-an adjusting plate; 251-a long hole; 26-a sealing plate; 27-spraying bracket; 28-a tee;

31-a silicon rod;

4-a cleaning device; 41-cleaning tube; 42-cleaning liquid injection pipe; 43-cleaning liquid spraying hole; 44-cleaning liquid line connection; 45-buckling;

5-a liquid supply cylinder; 51-cylinder body; 52-liquid adding cover; 53-drain valve; 54-drain pipe; 55-cutting fluid return port; 56-output pipe; 58-pushing hands; 591-a stop seat; 592-adjusting bolts; 510-moving the wheel set; 511-reserved port; 512-liquid supply pump;

6-a filter vat component;

7-a heat exchange assembly;

8-flow meter assembly.

Detailed Description

In order to make the technical solutions and advantages in the embodiments of the present application more clearly understood, the following description of the exemplary embodiments of the present application with reference to the accompanying drawings is made in further detail, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and are not exhaustive of all the embodiments. It should be noted that, in the present application, the embodiments and features of the embodiments may be combined with each other without conflict.

The embodiment provides a liquid supply cylinder which can be applied to equipment for cutting a hard and brittle material rod, in particular to a slicing machine for slicing a single crystal silicon rod. The liquid supply cylinder is internally accommodated with cutting liquid, and the cutting liquid can be supplied through a pipeline in the liquid path circulating system and used for cooling the cutting part.

Fig. 1 is a schematic structural diagram of a liquid supply cylinder provided in an embodiment of the present application. As shown in fig. 1, the present embodiment provides a liquid supply cylinder including: the cylinder 51, the cylinder 51 has a holding cavity for holding the cutting fluid therein. The cylinder 51 is provided with a liquid charging port and a liquid discharging port respectively communicating with the accommodation cavity. Wherein, the liquid filling port is arranged at the top of the cylinder body 51, and cutting fluid is injected into the cylinder body 51 from the top through the liquid filling port; the liquid discharge port is provided at the bottom of the cylinder 51, and the cutting fluid is discharged from the bottom through the liquid discharge port.

The drain valve 53 is fixed to the cylinder 51, and is specifically disposed at the drain port for controlling the opening or closing of the drain port.

The technical scheme that this embodiment provided sets up the filling opening at the cylinder body top that supplies the liquid cylinder for pour into cutting fluid into in the cylinder body through the filling opening, and set up leakage fluid dram and flowing back valve in the bottom of cylinder body, through leakage fluid dram discharge cutting fluid after opening the flowing back valve, then pour into new cutting fluid into through the filling opening, with the life cycle of filter screen in the extension liquid supply system, reduce the change number of times, not only can improve production efficiency, but also can guarantee section finished product quality.

On the basis of the above technical solution, the bottom of the cylinder body 51 is provided with an opening communicated with the accommodating cavity, the opening is connected with a drain pipe 54, a drain valve 53 is arranged on the drain pipe 54, and the outlet end of the drain pipe 54 is used as a drain outlet. The cutting fluid is discharged from the fluid discharge port by opening the fluid discharge valve 53.

The drain valve 53 may be a commonly used manual valve, for example: a ball valve. Alternatively, the drain valve 53 may be an electrically controlled valve, such as: an electromagnetic valve. The electric control valve is electrically connected with the controller and is controlled to be opened or closed by the controller so as to realize automatic removal of the cutting fluid.

Specifically, the opening is provided at the bottom of the side wall of the cylinder 51. One embodiment is as follows: the bottom of the side wall of the cylinder 51 is provided with two openings, each of which is connected with a drain pipe 54 through a pipeline. The two openings can be symmetrically arranged on two sides of the cylinder body 5 so as to improve the discharge speed of the cutting fluid and facilitate the complete discharge of the cutting fluid.

One embodiment is: the cylinder 51 has a rectangular parallelepiped shape, and has a height smaller than a width and a length. The opening is provided at the bottom of the side wall where the cylinder 51 is located in the width direction.

Further, the filler is provided with a filler cap 52 for closing the filler. The drain pipe 54 is located at one end in the longitudinal direction of the cylinder 51, and the charging port is provided on the top surface of the cylinder 51 and also at the end.

At the same end, the top surface of the cylinder body 51 is further provided with a cutting fluid outlet, and specifically, the top surface of the cylinder body 51 is provided with an opening, and the opening is connected with an output pipe 56 and is connected with a supply pipeline in the liquid path circulation system so as to provide cutting fluid for the liquid path circulation system.

A cutting fluid return port 55 is provided on the other end top surface of the cylinder 51 and connected to a return line in the fluid circuit circulation system to return the cutting fluid into the cylinder 51. A filter screen is arranged below the cutting fluid return port 55, and a sealing rubber strip is further arranged at the cutting fluid return port 55 and used for sealing a gap between the cutting fluid return port 55 and the pipeline.

The upper part of the cylinder 51 is provided with a bubble overflow port, specifically, the bubble overflow port is arranged at the end part on the same side with the liquid discharge port and is positioned at the upper part of the side wall. The gas in the cylinder 51 is discharged from the bubble overflow port so as to ensure that the gas pressure in the cylinder 51 is atmospheric pressure.

The cylinder body 51 is provided with a push handle 58, and an operator pulls the liquid supply cylinder out of the base of the slicer or pushes the liquid supply cylinder below the base by applying pushing or pulling force to the push handle 58.

On the basis of the above technical solution, a stop seat 591 is arranged on the side surface of the cylinder body 51, and an adjusting bolt 592 penetrates through the stop seat 591. The cylinder body 51 is relatively movable in a first direction with respect to the cutting apparatus, and the adjustment bolt 592 extends in the first direction for adjusting the distance between the fluid supply cylinder and the cutting apparatus. Specifically, the stopper 591 is provided on a side surface of the cylinder 51 parallel to the longitudinal direction, and the adjustment bolt 592 extends in the longitudinal direction. The hydraulic cylinder is pushed down the base in the longitudinal direction and the end of the adjusting bolt 592 abuts the base. The adjusting bolt 592 is threadedly engaged with the stopper 591, and the protruding length of the adjusting bolt 592 is changed by rotating the adjusting bolt 592, thereby adjusting the distance between the fluid supply cylinder and the base.

At least three moving wheel groups 510 are provided at the bottom of the cylinder 51. The moving wheel group 510 includes: a wheel bracket rotatably disposed at the bottom of the cylinder body 51, and a roller, the wheel bracket being rotatable in a horizontal direction with respect to the wheel bracket. The roller is connected to the wheel bracket through a wheel shaft. When cutting fluid needs to be added, an operator applies pulling force to the push handle 58 to pull out the fluid supply cylinder from the lower part of the base; and after the cutting fluid is added, pushing the fluid supply cylinder back to the lower part of the base.

Furthermore, locking pieces are arranged on the wheel supports of the at least two movable wheel sets, the locking pieces can rotate to the pressing roller wheels for the wheel supports to be locked, and free movement of the liquid supply cylinder in the operation process of the slicing machine is avoided.

One implementation is as follows: the front end of the bottom of the cylinder body 51 is provided with two movable wheel sets, and the rear end is provided with two movable wheel sets. The two movable wheel sets at the rear end adopt the structure of the wheel bracket and the roller wheel, and the wheel bracket can horizontally and universally rotate relative to the cylinder body 51.

Further, the top surface of the cylinder 51 is provided with a reserved opening 511 for installing other pipelines or other uses on the cylinder later.

On the basis of the above technical scheme, this embodiment also provides a liquid way circulation system, is applicable to above-mentioned slicer. The liquid path circulating system comprises the liquid supply cylinder, a liquid supply pump and a spraying device. A fluid supply pump 512 may be provided on the cylinder 51 for pumping the cutting fluid in the fluid supply cylinder toward the spray device.

Fig. 2 is a schematic structural diagram of a liquid supply cylinder applied to a liquid path circulation system according to an embodiment of the present application. The present embodiment provides a specific implementation manner. As shown in fig. 2, the liquid path circulation system includes: a liquid supply cylinder 5 and a spraying device 2. The liquid supply cylinder 5 is used for containing cutting liquid, the spraying device 2 is connected with an output pipe 56 of the liquid supply cylinder 5 through a pipeline, is arranged above a cutting main roller 12 of the cutting equipment, and is used for supplying the cutting liquid to the cutting main roller 12 around a cutting wire net, cooling the cutting liquid, and washing away silicon powder attached to the cutting wire, so that the surface roughness of a silicon wafer formed by cutting meets the requirement, and the yield is improved.

In addition, the liquid path circulating system further comprises a collecting tank 13, and the collecting tank 13 is arranged below the cutting main roller 12 and used for collecting cutting liquid. The collecting tank 13 is also communicated with the liquid supply cylinder 5 through a pipeline, and the collected cutting liquid flows back to the liquid supply cylinder for cyclic utilization.

Fig. 3 is a perspective view of a slicer provided with a spraying device according to an embodiment of the present disclosure, and fig. 4 is a side view of the slicer provided with a spraying device according to an embodiment of the present disclosure. As shown in fig. 3 and 4, the slicer according to the present embodiment includes: a cutting frame 11 and at least two cutting main rollers 12, the cutting main rollers 12 being arranged side by side. A gap for the silicon rod 31 to pass through is left between the two main cutting rollers 12. A cutting wire web is formed around the cutting wire provided on the cutting main rollers 12, the cutting wire section between the two cutting main rollers 12 serves as a cutting wire saw, the silicon rod 31 moves from one side of the cutting wire web to the other side to between the two cutting main rollers 12, and the silicon rod 31 is sliced by the plurality of wire saws to form a silicon wafer.

The number of the cutting main rollers 12 may be two, three, four, or four or more, and the cutting lines are wound around the respective cutting main rollers 12. The two cutting main rollers 12 are arranged horizontally side by side. The three cutting main rollers 12 are arranged in a triangle, wherein two cutting main rollers 12 are at the same height and the other cutting main roller 12 is above or below. The four cutting main rollers 12 are arranged in a rectangular or trapezoidal shape. Both ends of the cutting main roller 12 are arranged on the cutting frame 11 through bearings, and the cutting main roller 12 is driven to rotate through a motor.

In this embodiment, taking two cutting main rollers 12 as an example, the two cutting main rollers 12 are parallel and at the same height, and the silicon rod 31 may move from top to bottom for cutting or from bottom to top for cutting. In this embodiment, the silicon rod 31 moves from the top to the bottom for cutting.

The spraying device 2 is arranged above the cutting main roller 12 and is positioned on one side of the cutting wire net and used for spraying cutting liquid to the cutting wire net in the slicing process so as to reduce dust generated in the cutting process and cool the cutting liquid. The spraying device 2 may be mounted on the cutting frame 11.

Fig. 5 is a schematic structural view of a spraying device in a microtome according to an embodiment of the present disclosure, and fig. 6 is a cross-sectional view of the spraying device in the microtome according to an embodiment of the present disclosure. As shown in fig. 5 and 6, the spray device includes: a shower 21 and a effusion plate 22.

Wherein, shower 21 is used for holding cutting fluid, and shower 21 and cutting main roll 12 parallel arrangement. The spray pipe 21 is provided with an injection port, the injection port is connected with a liquid supply system in the slicing machine through a pipeline, and the liquid supply system injects cutting liquid into the spray pipe 21. The spray pipe 21 is provided with spray holes 211, and the cutting fluid can flow out from the spray holes 211. The number of the spraying holes 211 is plural, and the spraying holes 211 are arranged at intervals or uniformly.

The effusion plate 22 is disposed within the shower pipe 21, and divides the internal space of the shower pipe 21 into a first space and a second space. The first space is communicated with the injection port, and the second space is communicated with the spray holes 211. Drain plate 22 is provided with drain hole 221, and the first space and the second space communicate through drain hole 221.

According to the scheme, the spraying device is arranged above the cutting main roller, the liquid supply cylinder supplies cutting liquid to the spraying device, so that the spraying device sprays the cutting liquid to the cutting wire net, the cutting wire net is cooled, silicon powder attached to the cutting wire net is washed away, the surface quality of the silicon wafer obtained by cutting is guaranteed, and the yield of the silicon wafer is further improved. In addition, a flow discharge plate is arranged in the spray pipe, the flow discharge plate divides the inner space of the spray pipe into a first space and a second space, and a flow discharge hole formed in the flow discharge plate is communicated with the first space and the second space, so that the cutting fluid entering the spray pipe firstly enters the first space, enters the second space through the flow discharge hole and then flows to the cutting wire net through the spray hole. The discharge hole is arranged on the discharge plate in the scheme, so that the flow of the cutting liquid in the spray pipe is slowed down. Under the condition of pressure fluctuation of the liquid supply, the cutting liquid can be uniformly distributed in the spraying pipe so as to uniformly flow out of the spraying holes, thereby ensuring that the cutting liquid uniformly flows to a cutting wire net, ensuring the cooling effect and washing silicon powder on the cutting wire.

On the basis of the technical scheme, one implementation mode is as follows: the blow-off plate 22 is provided in the shower pipe 21 to divide an inner space of the shower pipe 21 into an upper space (i.e., a first space) and a lower space (i.e., a second space). The drain plate 22 is provided with drain holes 221 penetrating through the drain plate 22 in the thickness direction, and the first space and the second space of the shower pipe 21 are communicated with each other through the drain holes 221. The upper part of the spray pipe 21 is provided with an injection port for connecting with a liquid supply system through a pipeline. The cutting fluid in the upper space enters the lower space through the drain hole 221, and the cutting fluid in the lower space flows out through the spray holes 211.

Drain holes 221 are provided in plurality and drain holes 221 may be spaced apart or uniformly spaced. The drain holes 221 and the shower holes 211 may be aligned vertically or staggered vertically.

Further, the flow guide plate 23 is disposed below the spray holes 211 to guide the cutting fluid flowing out of the spray holes 211 to the cutting wire mesh.

One embodiment is: the drainage plate 23 is arranged below the spray pipe 21 and is obliquely arranged. One end of the flow guide plate 23 is connected with the spray pipe 21 for receiving the cutting fluid flowing out of the spray holes 211, and the other end faces the cutting wire net to guide the cutting fluid to the cutting wire net.

One specific way is as follows: the end of the flow guide plate 23 close to the shower pipe 21 is higher, and the height close to the cutting wire net is lower. The drainage plate 23 receives the cutting fluid flowing out from the spraying holes 211, and the cutting fluid flows to the cutting wire net along the drainage plate 23. One implementation is as follows: the length of the flow guide plate 23 is matched with that of the spray pipe 21, so that all cutting fluid flowing out of the spray holes 211 is received by the flow guide plate 23.

An injection port is arranged at the end part or the middle part of the spray pipe 21, one end of the cutting fluid injection pipe 212 is connected to the injection port, the other end of the cutting fluid injection pipe is provided with a cutting fluid pipeline connector 213, and the cutting fluid pipeline connector 213 is connected with a cleaning fluid supply pipeline in the fluid supply system through a pipeline.

According to the scheme, the spraying device is arranged above the cutting main roller, the liquid supply cylinder supplies cutting liquid to the spraying device, so that the spraying device sprays the cutting liquid to the cutting wire net, the cutting wire net is cooled, silicon powder attached to the cutting wire net is washed away, the surface quality of the silicon wafer obtained by cutting is guaranteed, and the yield of the silicon wafer is improved. In addition, a flow discharge plate is arranged in the spray pipe, the inner space of the spray pipe is divided into an upper space and a lower space by the flow discharge plate, and the upper space and the lower space are communicated by a flow discharge hole formed in the flow discharge plate, so that the cutting fluid entering the spray pipe firstly enters the lower space through the flow discharge plate and then leaves the cutting fluid through the spray hole, and flows to the cutting wire net along a drainage plate below the cutting fluid net. The discharge hole is arranged on the discharge plate in the scheme, so that the flow of the cutting liquid in the spray pipe is slowed down. Under the condition of pressure fluctuation of the supplied liquid, the cutting liquid can be uniformly distributed in the spray pipe, so that the cutting liquid uniformly flows out from the spray holes, the cutting liquid is ensured to uniformly flow to the cutting wire net, the cooling effect is ensured, and the silicon powder on the cutting wire is washed away.

On the basis of the above scheme, the liquid path circulating system further comprises: and the filter barrel assembly 6 is connected between the liquid supply cylinder 5 and the spraying device 2. Be equipped with the cutting fluid filter screen in the filter vat subassembly for filter cutting fluid, the filtering large granule, the tiny particle object to reduce the follow-up solid particle in the cutting fluid that sends out through spray set 2, and then guarantee cutting quality, improve the yield.

Further, the liquid path circulation system further includes: and the heat exchange assembly 7 is connected between the filter barrel assembly 6 and the spraying device 2, and the cutting fluid flows through the heat exchange assembly 7 to be cooled. The temperature of cutting fluid is reduced, and the cooling effect on the cutting wire net can be improved.

Further, the liquid path circulation system further includes: and the flowmeter assembly 8 is connected between the heat exchange assembly 7 and the spraying device 2. The flowmeter assembly 8 is used for detecting the cutting fluid flow provided for the spraying device 2, the flow detected by the flowmeter assembly 8 can also be fed back to the controller, an opening instruction is sent to the switch valve in the pipeline through the controller, the opening of the switch valve is adjusted, and then the cutting fluid flow in the pipeline is adjusted, so that the effect of meeting the cooling requirement of a cutting wire net is achieved.

Based on the above scheme, the number of the spraying devices 2 is two, and the spraying devices are respectively arranged above the two cutting main rollers 12. The two spraying devices 2 are respectively connected with two interfaces of a three-way part 28 through pipelines, and the other interface of the three-way part 28 is connected with the liquid supply cylinder 5 through a pipeline. Cutting liquid is supplied to the two spraying devices 2 through the liquid supply cylinder 5, the flow rates of the cutting liquid in the two spraying devices 2 are basically the same, the cutting liquid on a cutting wire net can be kept uniform, and the cutting quality of the silicon wafer can be guaranteed.

The solid arrows in fig. 2 show the flow direction of the cutting fluid, which flows out of the fluid supply cylinder, sequentially flows to the cutting wire net through the filter barrel assembly, the heat exchange assembly, the flow meter assembly and the spraying device.

On the basis of the above technical scheme, this embodiment provides a concrete implementation of drainage plate:

fig. 7 is an enlarged view of the area a in fig. 5. As shown in fig. 6 and 7, the longitudinal direction of the flow guide plate 23 is defined as the same direction as the axial direction of the cutting main roller 12, and the width direction of the flow guide plate 23 is defined as the direction from the shower pipe 21 toward the wire net. The drainage plate 23 specifically includes: the included angle between the first plate section and the second plate section is larger than or equal to 90 degrees, and the first plate section and the second plate section are in smooth transition. The first plate section can extend along the vertical direction or extend obliquely, the top end of the first plate section extends to abut against the spray pipe 21 and is positioned in the spray hole 211 to be far away from the side face of the cutting wire net, for example, the first plate section abuts against the left side and the side face of the spray pipe 21 upwards in fig. 5, and the first plate section and the second plate section are arranged below the spray pipe 21 in a surrounding manner to form a drainage space.

One specific way is as follows: the first plate section and the second plate section are L-shaped, wherein the top end of the first plate section extends to the left side which is welded with the outer wall of the spray pipe 21 and is positioned in the spray hole 211, and the second plate section extends towards the right lower direction. A drainage space is defined by the drainage plate 23 and the spray pipe 21, and cutting fluid flows out from the spray holes 211, flows downwards along the second plate section in the drainage space and flows out from the right end of the second plate section.

The included angle between the second plate section and the horizontal direction is (0 degree, 20 degrees), namely, the included angle is larger than 0 degree and smaller than or equal to 20 degrees, for example, the included angle between the second plate section and the horizontal direction can be about 5 degrees, so that the cutting fluid flows out smoothly, and the included angle has a certain initial speed and is shot to the cutting wire net by a parabolic track, so that the middle part and two ends of the cutting wire net are contacted with the cutting fluid, and the cooling and flushing effects are guaranteed.

The above-mentioned shower 21 can be fixed to the cutting frame 11, for example: both ends of the shower pipe 21 are fixed to the cutting frame 11 through shower brackets 27, respectively.

Further, a sealing plate 26 is used, one end of which extends to the outer surface of the shower pipe 21, for example, may be welded to the outer surface of the shower pipe 21, and is located at the side of the shower holes 211 adjacent to the wire mesh, as shown at the right side of the shower holes 211 in fig. 5. The sealing plate 26 may extend horizontally or obliquely downward, stopping above the drainage space, and forming an outflow opening for the cutting fluid between the sealing plate 26 and the end of the drainage plate 21. The sealing plate 26, the drainage plate 23 and the spray pipe 21 enclose a closed drainage space, and an opening is formed only at the end parts of the sealing plate 26 and the drainage plate 23 for the cutting fluid to flow out. Above-mentioned scheme makes cutting fluid all flow from the opening, all can flow to the cutting wire net, and the guarantee is to the cooling and the washing effect of cutting wire net.

Both ends of the sealing plate 26 may also be fixed to the shower brackets 27. Alternatively, the sealing plate 26 may be fixed as follows:

the connecting plate 24 is used to extend in the axial direction of the cutting main roller 12. Both ends of the connecting plate 24 in the length direction thereof may be fixed to the flow guide plate 23 by welding. The seal plate 26 is fixed to the connecting plate 24 by welding or bolting. Connecting plate 24 plays the effect of fixed closing plate 26 on the one hand, and the clearance between the bottom of on the other hand connecting plate 24 and the drainage plate 23 forms the export in drainage space, and encloses with closing plate 26, drainage plate 23 and establish together and form drainage space, makes the cutting fluid all flow from the opening, and the guarantee can flow to the cutting line on the net, the guarantee to the cooling of cutting line net and wash the effect.

Further, the sealing plate 26 includes a sealing plate section and a fixing plate section. Wherein the included angle between the sealing plate section and the fixing plate section is less than or equal to 90 degrees. One end of the sealing plate section extends to the outer surface of the spray pipe 21, and is welded to the outer surface of the spray pipe 21 and is located on the right side of the spray hole 211. The sealing plate section is arranged to incline downwards to the right, and the distance between one end of the sealing plate section close to the spray pipe 21 and the drainage plate 23 is larger than the distance between the end part of the seal plate section far away from the spray pipe 21 and the drainage plate 23. The fixing plate section is parallel to the connecting plate 24 and fixed to the connecting plate 24.

Further, an adjustment plate 25 is included. The adjusting plate 25 is parallel to the connecting plate 24, and is located on both sides of the connecting plate 24 with the sealing plate 26. The adjusting plate 25 is provided with a vertically extending long hole 251, and is connected to the connecting plate 24 by a bolt capable of passing through the long hole 251, specifically, the bolt is adapted to pass through the long hole 251 of the adjusting plate 25, the through hole of the connecting plate 24 and the through hole of the sealing plate 26 in sequence and then is matched and connected with a nut, so as to fix the sealing plate 26, the connecting plate 24 and the adjusting plate 25 together. The gap between the bottom end of the adjusting plate 25 and the drainage plate 23 forms the outlet of the drainage space, and the height of the adjusting plate 25 is further changed by adjusting the position of the bolt in the long hole 251 so as to adjust the size of the outlet of the drainage space and change the flow and pressure of the cutting fluid outlet.

According to the slicer provided by the embodiment, a collecting tank 13 for collecting cutting fluid is arranged below the cutting main rollers 12, and the cutting fluid flows into the collecting tank 13 from the area between the two cutting main rollers 12, passes through a collecting pipeline, is filtered and is recycled. The cutting liquid can be clean water or other corrosion-resistant liquid which is not easy to react with the surface of the silicon rod.

Further, a filter screen is arranged at the top of the collecting tank 13 for filtering out the cut fragments. Two stages of filter screens are adopted, namely: the upper part is provided with a first-level filter screen 14 for filtering large particles, and the lower part is provided with a second-level filter screen 15 for filtering small particles.

A chip box 16 is further provided between the two cutting main rollers 12 for collecting silicon chips generated during the cutting process, reducing silicon chips falling on the first filter 14 and avoiding clogging.

On the basis of the technical scheme, the slicing machine provided by the embodiment is also provided with the cleaning device 4, so that the silicon wafer can be pre-cleaned in the process of slicing and retreating the rod, and the silicon powder on the surface of the silicon wafer and in the kerf can be washed off. The rod withdrawing process is utilized for pre-cleaning, so that the subsequent step of pre-cleaning in a degumming machine is omitted, and the production time of the silicon wafer is shortened. And need not set up belt cleaning device in advance in the degumming machine, can simplify the structure of degumming machine.

The cleaning device 4 and the spraying device 2 are arranged on the same side of the cutting wire net. The distance between the cleaning liquid outlet of the cleaning device 4 and the cutting main roller 12 is larger than the distance between the cutting liquid outlet of the spraying device 2 and the cutting main roller 12.

In the present embodiment, the silicon rod is lowered and the cutting wire net formed on the upper surface of the cutting main roller 12 slices the silicon rod, taking the example of moving from top to bottom for cutting. After the cutting is completed, the silicon rod rises to retreat. The cleaning device 4 and the spraying device 2 are arranged above the cutting wire net, a cleaning liquid outlet in the cleaning device 4 is higher than a cutting liquid outlet in the spraying device 2, and the cutting liquid outlet is lower in height and directly sprayed onto the cutting wire net; and the cleaning liquid outlet is higher in height so as to spray cleaning liquid in the rod withdrawing process.

In the process of moving back the bar upwards, the cutting line is clamped between the silicon wafers and is slowly threaded, a certain gap is reserved between the adjacent silicon wafers, the silicon wafers are not completely attached together, the silicon wafers are cleaned at the moment, liquid can enter the silicon wafers more easily, the cleaning effect can be improved, the silicon powder concentration between the silicon wafers is greatly reduced, the bar can be moved back upwards more conveniently, and the scratch of the silicon wafers can be reduced.

Fig. 8 is a schematic structural diagram of a cleaning device in a microtome according to an embodiment of the present disclosure. As shown in fig. 8, the cleaning device 4 includes: a cleaning pipe 41 and a cleaning liquid injection pipe 42. The cleaning pipe 41 extends in a horizontal direction from one end of the cutting main roller 12 to the other end. The cleaning pipe 41 has a cleaning liquid injection hole 43 formed on a side thereof facing the silicon wafer as a cleaning liquid outlet, and the cleaning liquid is injected from the cleaning liquid injection hole 43 to be directed to the silicon wafer. The cleaning liquid injection pipe 42 is connected to one end of the cleaning pipe 41, and the other end of the cleaning pipe 41 is closed. The cleaning pipe 41 is provided with a plurality of cleaning liquid spray holes 43.

Specifically, one end of the cleaning liquid injection pipe 42 is connected to a cleaning liquid supply pipe on the slicer through a cleaning liquid pipe joint 44, and the cleaning liquid is continuously supplied to the cleaning pipe 141 through the cleaning liquid supply pipe, and the cleaning liquid is collected and recovered from the lower side of the cutting main roller 12 for recycling. The cleaning liquid can be clean water or other corrosion-resistant liquid which is not easy to generate chemical reaction on the surface of the silicon wafer.

The length of the cleaning pipe 41 may be smaller than the length of the cutting main roller 12 and larger than the length of the silicon rod, and may be specifically set according to the length of the silicon rod. For example: the length of the cleaning pipe 41 is 600mm-900mm, the pipe diameter is 20mm-40mm, and the liquid injection pressure of the cleaning liquid injection pipe 42 is 0.2Mpa-1 Mpa. The diameter of the cleaning liquid spray holes 43 is 0.3mm-1.5mm, and the cleaning liquid spray holes are uniformly distributed on the cleaning pipe 41.

Fig. 9 is an enlarged view of the region B in fig. 3. As shown in fig. 9, the cleaning pipe 41 may be arranged above the sealing plate 26 according to the solution of the shower apparatus 2. The cleaning pipe 41 is fixed on the cutting fluid injection pipe 212 by using the buckle 45, and the buckle 45 is positioned in the middle of the cleaning pipe 41, so that the installation distance is short, and the size of the installation part is reduced. The buckle 45 specifically includes an upper mounting plate and a lower retaining ring, and the lower retaining ring is located below the cutting fluid injection pipe 212 and fixed to the upper mounting plate through a bolt, so as to be convenient for disassembly and assembly.

The present embodiment provides a slicer including the liquid path circulation system provided in any of the above embodiments, and having the same technical effects as the liquid path circulation system.

In the description of the present application, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be considered as limiting the present application.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless explicitly specified otherwise.

In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; can be mechanically connected, electrically connected or can communicate with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

While the preferred embodiments of the present application have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including preferred embodiments and all alterations and modifications as fall within the scope of the application.

It will be apparent to those skilled in the art that various changes and modifications may be made in the present application without departing from the spirit and scope of the application. Thus, if such modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is intended to include such modifications and variations as well.

Claims (13)

1. A liquid supply cylinder, comprising:

the cylinder body is internally provided with an accommodating cavity for accommodating cutting fluid; the cylinder body is provided with a liquid feeding port and a liquid discharging port which are respectively communicated with the accommodating cavity; the liquid feeding port is arranged at the top of the cylinder body, and the liquid discharging port is arranged at the bottom of the cylinder body;

and the liquid discharge valve is arranged on the liquid discharge port and used for controlling the opening or closing of the liquid discharge port.

2. The liquid supply cylinder as claimed in claim 1, wherein the bottom of the cylinder body is provided with an opening, a liquid discharge pipe is connected to the opening, a liquid discharge valve is arranged on the liquid discharge pipe, and the outlet end of the liquid discharge port is used as the liquid discharge port.

3. The liquid supply cylinder as claimed in claim 1, wherein said filler cap is provided with a filler cap.

4. The liquid supply cylinder according to claim 3, wherein the other end of the top surface of the cylinder body is provided with a cutting liquid return port, and a filter screen is arranged below the cutting liquid return port; and a sealing rubber strip is also arranged at the cutting fluid return port.

5. The liquid supply cylinder as claimed in claim 1, wherein a stop seat is arranged on the side surface of the cylinder body, and an adjusting bolt is arranged in the stop seat in a penetrating way; the cylinder body and the cutting equipment can move relatively along the first direction, and the adjusting bolt extends along the first direction and is used for adjusting the distance between the liquid supply cylinder and the cutting equipment.

6. The feed cylinder of claim 1, wherein the bottom of said cylinder body is provided with at least three moving wheel sets; the removal wheelset includes: a wheel bracket and a roller; the wheel bracket is rotatably arranged at the bottom of the cylinder body and can rotate relative to the wheel bracket in the horizontal direction; the roller is connected to the wheel bracket through a wheel shaft.

7. The feed cylinder as set forth in claim 6, wherein the wheel brackets of at least two of the moving wheel sets are provided with locking members, the locking members being rotatable relative to the wheel brackets until the pinch rollers are locked.

8. A fluid circuit circulation system, comprising:

a spraying device;

a feed cylinder as set forth in any one of claims 1 to 7;

and the liquid supply pump is arranged on the cylinder body of the liquid supply cylinder and pumps the cutting liquid in the liquid supply cylinder to the spraying device.

9. The fluid circuit circulation system of claim 8, wherein the spray device comprises:

a spray pipe for containing cutting fluid; the spraying pipe is provided with spraying holes; the injection port of the spray pipe is communicated with the liquid supply cylinder through a pipeline;

the flow discharge plate is arranged in the spray pipe and divides the inner space of the spray pipe into a first space and a second space, the first space is communicated with the injection port of the spray pipe, and the second space is communicated with the spray hole; the flow discharge plate is provided with a flow discharge hole, and the first space and the second space of the spray pipe are communicated through the flow discharge hole.

10. The fluid circuit circulation system of claim 9, wherein the spray device further comprises:

and the drainage plate is arranged below the spraying holes so as to guide the cutting liquid flowing out of the spraying holes to the cutting wire net.

11. The fluid path circulation system of claim 10, wherein the flow guide plate is disposed obliquely, one end of the flow guide plate is connected to the spray pipe for receiving the cutting fluid flowing out from the spray holes, and the other end faces the cutting wire net to guide the cutting fluid to the cutting wire net.

12. The fluid path circulation system of claim 9, wherein the first space within the shower pipe is located above the second space.

13. A microtome, comprising:

cutting the main roller; cutting lines are wound on the cutting main roller; and

the hydronic system of any one of claims 8-12; and a spraying device in the liquid path circulating system is arranged above the cutting main roller and sprays cutting liquid to the cutting line.

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