CN217474739U

CN217474739U - Density-adjustable magnetron coating sputtering target material tool

Info

Publication number: CN217474739U
Application number: CN202123372881.4U
Authority: CN
Inventors: 孙洪梅; 陈方波
Original assignee: Shanghai Zhenka New Material Technology Co ltd
Current assignee: Shanghai Zhenka New Material Technology Co ltd
Priority date: 2021-12-29
Filing date: 2021-12-29
Publication date: 2022-09-23
Anticipated expiration: 2031-12-29

Abstract

The utility model discloses a density adjustable magnetic control coating sputtering target frock, the on-line screen storage device comprises a base, the left side fixed mounting of base upper end has the transfer chamber, the right-hand member movable mounting of transfer chamber has the transfer gate, the right-hand member fixed mounting of transfer gate has the forging chamber, the right-hand member fixed mounting of forging chamber has control system, the upper end fixed mounting of forging chamber has the pneumatic cylinder, the inside fixed mounting that the lower extreme of pneumatic cylinder is located the forging chamber has the limiting plate, the lower extreme fixed mounting of limiting plate has last moulding-die, the below fixed mounting of going up the moulding-die has the bed die. According to the density-adjustable magnetron coating sputtering target tool, the conveying door can be automatically opened while the raw materials are conveyed by the driving motor, the automation degree is high, the operation is simple and convenient, the labor cost is saved, and the temperature of the raw materials during preheating and forging can be controlled by installing the heating element and the temperature sensor so as to obtain the target with the expected density.

Description

Density-adjustable magnetron coating sputtering target material tool

Technical Field

The utility model relates to a target technical field specifically is a density adjustable magnetic control coating sputters target frock.

Background

Various types of sputtering thin film materials are widely applied to the aspects of surface coatings of semiconductor integrated circuits (VLSI), optical disks, flat panel displays and workpieces, and the like, and the synchronous development of sputtering targets and sputtering technologies since the 90 th century greatly meets the development requirements of various novel electronic components, for example, in the manufacturing process of semiconductor integrated circuits, aluminum film wiring is replaced by a copper conductor thin film with lower resistivity; in the information storage industry, the storage capacity of magnetic memories is increasing, new magneto-optical recording materials are being developed, which place ever-increasing demands on the quality of the sputtering target required, and the number of demands is increasing year by year.

When a general target is put into use, the target density may need to be adjusted due to different processing requirements, but the corresponding adjusting device has a low automation degree and is complex to operate.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a density adjustable magnetron coating sputters target frock to it may need to adjust target density because of the processing needs of difference to put forward general target in the solution above-mentioned background art when coming into use, but corresponding adjusting device degree of automation is lower, operates comparatively loaded down with trivial details problem.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a density adjustable magnetron coating sputter target frock, includes the base, the left side fixed mounting of base upper end has the transfer chamber, the right-hand member movable mounting of transfer chamber has the transfer gate, the right-hand member fixed mounting of transfer gate has the forging chamber, the right-hand member fixed mounting who forges the chamber has control system, the upper end fixed mounting who forges the chamber has the pneumatic cylinder, the lower extreme of pneumatic cylinder is located the inside fixed mounting who forges the chamber and has the limiting plate, the lower extreme fixed mounting of limiting plate has the upper die, the below fixed mounting of upper die has the lower die, the right-hand member fixed mounting of transfer chamber has first driving motor, the right-hand member fixed mounting of first driving motor transmission end has the transmission shaft, the outer end fixed mounting of transmission shaft has first band pulley, the top fixed mounting of first band pulley has the second band pulley, the outer end rotation of first band pulley installs the belt, the axle head fixed mounting of second band pulley has the connecting axle, the right-hand member fixed mounting of connecting axle has the gear, the outer end fixed mounting of transfer gate has the rack, gear and rack swing joint, the right-hand member fixed mounting of transmission shaft has the lead screw, the screw is installed to the outer end screw thread of lead screw, the upper end fixed mounting of screw has the backup pad, the upper end fixed mounting of backup pad has second driving motor, the right-hand member fixed mounting of second driving motor transmission end has moulding stick, moulding stick's outer end fixed mounting has raw and other materials, the inside fixed mounting of transfer chamber has first heating element, the inside fixed mounting of forging chamber has the second heating element, the bottom fixed mounting of transfer chamber has first temperature sensor, the left side fixed mounting of forging indoor portion has second temperature sensor.

Preferably, the lower extreme fixed mounting of transfer gate has first magnetism to inhale the piece, the lower extreme movable mounting of first magnetism inhale the piece has the second magnetism to inhale the piece, through installing first driving motor, can drive transmission shaft, first band pulley and rotate, can drive gear revolve from this, because the rack and the gear engagement with transfer gate fixed connection, therefore the rotation of gear can drive rack and transfer gate up-and-down motion.

Preferably, the lower extreme fixed mounting of second magnetism piece has the baffle, the transfer gate runs through the transfer chamber and extends to the outside of transfer chamber, and driving motor also can drive the lead screw and rotate, can drive the screw from this and move about along the lead screw, finally drives raw and other materials and second driving motor and moves about.

Preferably, the left end of forging the room is fixed and is provided with the opening, opening and transfer gate looks adaptation utilize control system to control first driving motor forward rotation, and the lead screw drives second driving motor and raw and other materials right movement this moment, and the gear drives rack and transfer gate upward movement simultaneously, and finally raw and other materials pass the opening and come to forge between the last moulding-die of room and the lower moulding-die.

Preferably, the left and right sides fixed mounting who forges indoor portion has spacing post, spacing post runs through the limiting plate, through the installation pneumatic cylinder, utilizes control system control pneumatic cylinder to push down, drives limiting plate and last moulding-die and pushes down, can carry out further high temperature forging to raw and other materials from this, adjusts its density.

Preferably, electric connection between first driving motor and the control system, electric connection between second driving motor and the control system through installation second driving motor, utilizes control system control second driving motor work, drives moulding stick and raw and other materials high-speed rotatory, can make raw and other materials forge fast high-efficient more.

Preferably, the first temperature sensor is electrically connected with the control system, the second temperature sensor is electrically connected with the control system, the first heating element and the first temperature sensor are arranged, so that the raw material can be preheated in the conveying chamber, and the heating time and temperature are controlled by the control system.

Preferably, the upper die is matched with the lower die, the first belt wheel is rotationally connected with the second belt wheel through a belt, the upper die and the lower die can be subjected to heating treatment through installing a second heating element and a second temperature sensor, and the heating time and temperature are controlled through a control system.

Compared with the prior art, the beneficial effects of the utility model are that:

1. according to the density-adjustable magnetron coating sputtering target material tool, the conveying door and the lead screw nut are installed, so that raw materials can be conveyed by using the driving motor, the conveying door can be automatically opened, the automation degree is high, the operation is simple and convenient, the working efficiency is high, and the labor cost is saved;

2. according to the magnetron coating sputtering target material tool with adjustable density, the temperature of the raw material during preheating and forging can be controlled by installing the heating element and the temperature sensor so as to achieve the target material with the expected density;

3. according to the magnetron coating sputtering target material tool with the adjustable density, the upper pressing die and the lower pressing die and the driving motor are installed, so that raw materials can be driven to rotate at a high speed and can be extruded at the same time, the raw materials can be conveniently forged, and the density of the raw materials can be adjusted.

Drawings

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic sectional view of the present invention;

FIG. 3 is a schematic view of the cross-sectional structure of the upper and lower dies of the present invention;

FIG. 4 is a schematic cross-sectional view of the transfer chamber of the present invention;

FIG. 5 is a schematic view of the cross-sectional structure of the belt of the present invention;

fig. 6 is a schematic view of the cross-sectional structure of the transfer door of the present invention.

In the figure: 1. a base; 2. a transfer chamber; 3. a transfer gate; 4. a forging chamber; 5. a control system; 6. a hydraulic cylinder; 7. a limiting plate; 8. pressing the die; 9. a lower pressing die; 10. a first drive motor; 11. a drive shaft; 12. a first pulley; 13. a second pulley; 14. a belt; 15. a connecting shaft; 16. a gear; 17. a rack; 18. a lead screw; 19. a nut; 20. a support plate; 21. a second drive motor; 22. a shaping rod; 23. Raw materials; 24. a first heating element; 25. a second heating element; 26. a first temperature sensor; 27. A second temperature sensor; 28. a first magnetic attraction block; 29. a second magnetic attraction block; 30. a partition plate; 31. a port; 32. a limiting column.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-6, the present invention provides a technical solution: a magnetron coating sputtering target material tool with adjustable density comprises a base 1, a conveying chamber 2 is fixedly installed on the left side of the upper end of the base 1, a conveying door 3 is movably installed at the right end of the conveying chamber 2, a forging chamber 4 is fixedly installed at the right end of the conveying door 3, a control system 5 is fixedly installed at the right end of the forging chamber 4, a hydraulic cylinder 6 is fixedly installed at the upper end of the forging chamber 4, a limiting plate 7 is fixedly installed at the lower end of the hydraulic cylinder 6 positioned inside the forging chamber 4, an upper pressing die 8 is fixedly installed at the lower end of the limiting plate 7, a lower pressing die 9 is fixedly installed below the upper pressing die 8, a first driving motor 10 is fixedly installed at the right end of the conveying chamber 2, a transmission shaft 11 is fixedly installed at the right end of the transmission end of the first driving motor 10, a first belt pulley 12 is fixedly installed at the outer end of the transmission shaft 11, a second belt pulley 13 is fixedly installed above the first belt pulley 12, and a belt 14 is rotatably installed at the outer end of the first belt pulley 12, shaft end fixed mounting of second band pulley 13 has connecting axle 15, the right-hand member fixed mounting of connecting axle 15 has gear 16, the outer end fixed mounting of transfer gate 3 has rack 17, gear 16 and rack 17 active mesh, the right-hand member fixed mounting of transmission shaft 11 has lead screw 18, screw 19 is installed to the outer end screw thread of lead screw 18, the upper end fixed mounting of screw 19 has backup pad 20, the upper end fixed mounting of backup pad 20 has second driving motor 21, the right-hand member fixed mounting of second driving motor 21 transmission end has moulding stick 22, moulding stick 22's outer end fixed mounting has raw and other materials 23, the inside fixed mounting of transfer chamber 2 has first heating element 24, the inside fixed mounting of forging chamber 4 has second heating element 25, the bottom fixed mounting of transfer chamber 2 has first temperature sensor 26, the inside left side fixed mounting of forging chamber 4 has second temperature sensor 27.

Furthermore, a first magnetic suction block 28 is fixedly installed at the lower end of the transfer door 3, a second magnetic suction block 29 is movably installed at the lower end of the first magnetic suction block 28, the transmission shaft 11 and the first belt pulley 12 can be driven to rotate by installing the first driving motor 10, and therefore the gear 16 can be driven to rotate, and the rack 17 fixedly connected with the transfer door 3 is meshed with the gear 16, so that the rack 17 and the transfer door 3 can be driven to move up and down by the rotation of the gear 16.

Furthermore, a partition plate 30 is fixedly installed at the lower end of the second magnetic suction block 29, the conveying door 3 penetrates through the conveying chamber 2 and extends to the outer side of the conveying chamber 2, and the driving motor also drives the screw rod 18 to rotate, so that the screw nut 19 is driven to move left and right along the screw rod 18, and finally the raw material 23 and the second driving motor 21 are driven to move left and right.

Furthermore, a through opening 31 is fixedly arranged at the left end of the forging chamber 4, the through opening 31 is matched with the transfer door 3, the control system 5 is used for controlling the first driving motor 10 to rotate in the forward direction, at the moment, the lead screw 18 drives the second driving motor 21 and the raw material 23 to move rightwards, meanwhile, the gear 16 drives the rack 17 and the transfer door 3 to move upwards, and finally, the raw material 23 passes through the through opening 31 to reach between the upper pressing die 8 and the lower pressing die 9 of the forging chamber 4.

Furthermore, the left side and the right side of the interior of the forging chamber 4 are fixedly provided with limit posts 32, the limit posts 32 penetrate through the limit plate 7, the hydraulic cylinder 6 is controlled to be pressed downwards by the control system 5 through the installation of the hydraulic cylinder 6, the limit plate 7 and the upper pressing die 8 are driven to be pressed downwards, and therefore the raw material 23 can be subjected to further high-temperature forging to adjust the density of the raw material.

Furthermore, the first driving motor 10 is electrically connected with the control system 5, the second driving motor 21 is electrically connected with the control system 5, and the second driving motor 21 is installed and controlled by the control system 5 to work, so that the shaping rod 22 and the raw material 23 are driven to rotate at a high speed, and the raw material 23 can be forged more quickly and efficiently.

Further, the first temperature sensor 26 is electrically connected to the control system 5, the second temperature sensor 27 is electrically connected to the control system 5, and the first heating element 24 and the first temperature sensor 26 are installed to preheat the raw material 23 inside the transfer chamber 2, and the control system 5 controls the heating time and temperature.

Further, the upper die 8 is adapted to the lower die 9, the first pulley 12 is rotatably connected to the second pulley 13 via the belt 14, the upper die 8 and the lower die 9 can be heated by installing the second heating element 25 and the second temperature sensor 27, and the heating time and temperature can be controlled by the control system 5, wherein the first temperature sensor 26 and the second temperature sensor 27 are of type KGW 5.

The working principle is as follows: the utility model relates to a density adjustable magnetic control coating sputter target frock, when using, at first through installing first heating element 24 and first temperature sensor 26, can carry out preheating treatment to raw and other materials 23 in transfer chamber 2 inside, through installing second heating element 25 and second temperature sensor 27, can heat treatment to upper die 8 and lower die 9, and control heating time and temperature through control system 5 control, the model of first temperature sensor 26 and second temperature sensor 27 is KGW5, control system 5 drives first driving motor 10, can drive transmission shaft 11, first band pulley 12 rotates, can drive gear 16 and rotate from this, because rack 17 and gear 16 meshing with transfer gate 3 fixed connection, therefore the rotation of gear 16 can drive rack 17 and transfer gate 3 up-and-down motion, driving motor also can drive lead screw 18 and rotate, therefore, the screw 19 is driven to move left and right along the screw 18, the raw material 23 and the second driving motor 21 are finally driven to move left and right, the control system 5 is used for controlling the first driving motor 10 to rotate forward, at the moment, the screw 18 drives the second driving motor 21 and the raw material 23 to move right, meanwhile, the gear 16 drives the rack 17 and the transmission door 3 to move upwards, finally, the raw material 23 passes through the through hole 31 to reach a position between the upper pressing die 8 and the lower pressing die 9 of the forging chamber 4, at the moment, the control system 5 is used for controlling the second driving motor 21 to work, the shaping rod 22 and the raw material 23 are driven to rotate at high speed, the forging of the raw material 23 can be faster and more efficient, meanwhile, the control system 5 is used for controlling the hydraulic cylinder 6 to press downwards, the limiting plate 7 and the upper pressing die 8 to press downwards, and therefore, the raw material 23 can be further forged at high temperature and the density of the raw material can be adjusted.

It should be finally noted that the above contents are only used to illustrate the technical solutions of the present invention, but not to limit the protection scope of the present invention, and the simple modification or equivalent replacement performed by the technical solutions of the present invention by those skilled in the art does not depart from the spirit and scope of the technical solutions of the present invention.

Claims

1. The utility model provides a density adjustable magnetron coating sputter target frock, includes base (1), its characterized in that: the automatic forging device is characterized in that a conveying chamber (2) is fixedly mounted on the upper end of the base (1), a conveying door (3) is movably mounted at the right end of the conveying chamber (2), a forging chamber (4) is fixedly mounted at the right end of the conveying door (3), a control system (5) is fixedly mounted at the right end of the forging chamber (4), a hydraulic cylinder (6) is fixedly mounted at the upper end of the forging chamber (4), a limiting plate (7) is fixedly mounted at the inner part of the forging chamber (4) at the lower end of the hydraulic cylinder (6), an upper pressing die (8) is fixedly mounted at the lower end of the limiting plate (7), a lower pressing die (9) is fixedly mounted below the upper pressing die (8), a first driving motor (10) is fixedly mounted at the right end of the conveying chamber (2), a transmission shaft (11) is fixedly mounted at the right end of the transmission motor (10), and a first belt wheel (12) is fixedly mounted at the outer end of the transmission shaft (11), the top fixed mounting of first band pulley (12) has second band pulley (13), belt (14) are installed in the outer end rotation of first band pulley (12), the axle head fixed mounting of second band pulley (13) has connecting axle (15), the right-hand member fixed mounting of connecting axle (15) has gear (16), the outer end fixed mounting of transfer gate (3) has rack (17), gear (16) and rack (17) swing joint, the right-hand member fixed mounting of transmission shaft (11) has lead screw (18), screw (19) are installed to the outer end screw thread of lead screw (18), the upper end fixed mounting of screw (19) has backup pad (20), the upper end fixed mounting of backup pad (20) has second driving motor (21), the right-hand member fixed mounting of second driving motor (21) transmission end has moulding stick (22), the outer end fixed mounting of moulding stick (22) has raw and other materials (23), the inside fixed mounting of transfer chamber (2) has first heating element (24), the inside fixed mounting of forging room (4) has second heating element (25), the bottom fixed mounting of transfer chamber (2) has first temperature sensor (26), the inside left side fixed mounting of forging room (4) has second temperature sensor (27).

2. The magnetron coating sputtering target tool with adjustable density of claim 1, characterized in that: the lower extreme fixed mounting of transfer gate (3) has first magnetism to inhale piece (28), the lower extreme movable mounting of first magnetism piece (28) has second magnetism to inhale piece (29).

3. The magnetron coating sputtering target tool with the adjustable density of claim 2, which is characterized in that: the lower extreme fixed mounting of piece (29) is inhaled to the second magnetism has baffle (30), transfer gate (3) run through transfer chamber (2) and extend to the outside of transfer chamber (2).

4. The magnetron coating sputtering target tool with adjustable density of claim 1, characterized in that: forge the left end of room (4) and fix and be provided with through opening (31), through opening (31) and transfer gate (3) looks adaptation.

5. The magnetron coating sputtering target tool with adjustable density of claim 1, characterized in that: the left and right sides fixed mounting who forges room (4) inside has spacing post (32), limiting plate (7) are run through in spacing post (32).

6. The magnetron coating sputtering target tool with adjustable density of claim 1, characterized in that: the first driving motor (10) is electrically connected with the control system (5), and the second driving motor (21) is electrically connected with the control system (5).

7. The magnetron coating sputtering target tool with adjustable density of claim 1, characterized in that: the first temperature sensor (26) is electrically connected with the control system (5), and the second temperature sensor (27) is electrically connected with the control system (5).

8. The magnetron coating sputtering target tool with adjustable density of claim 1, characterized in that: the upper pressing die (8) is matched with the lower pressing die (9), and the first belt wheel (12) is rotationally connected with the second belt wheel (13) through a belt (14).