CN217468371U - A quick change mechanism for Load Port docks polymorphic type wafer box - Google Patents
A quick change mechanism for Load Port docks polymorphic type wafer box Download PDFInfo
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- CN217468371U CN217468371U CN202221226045.7U CN202221226045U CN217468371U CN 217468371 U CN217468371 U CN 217468371U CN 202221226045 U CN202221226045 U CN 202221226045U CN 217468371 U CN217468371 U CN 217468371U
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Abstract
The utility model relates to the technical field of semiconductors, and provides a quick change mechanism for a Load Port butt joint multi-type wafer box, which comprises a gas circuit butt joint plate, a butt joint sucker, an electric signal butt joint plate and a magnetic suction terminal connector, wherein a rubber sucker is arranged inside the end of the butt joint sucker, which is in contact with a wafer box panel, the connecting end of the rubber sucker is connected with the fixed end of the butt joint sucker, and the rubber sucker is used for butt joint the internal gas circuit of the wafer box panel; the connecting end of the butt-joint sucker is fixedly arranged at the end, contacting the wafer box panel, of the gas circuit butt-joint plate, and the butt-joint sucker is used for fixing the wafer box panel; the connecting end of the magnetic terminal connector is fixedly arranged at the end, contacting the wafer box panel, of the electric signal butt-joint plate, and the magnetic terminal connector is used for butt-joint of circuits inside the wafer box panel; the utility model is compatible with FOUP and Cassette and other types of wafer boxes on the same Load Port, and is used for rapidly switching the panels of various wafer boxes so as to rapidly butt different types of wafer boxes; when the wafer box panel is switched, manual wiring and take-over are not needed.
Description
Technical Field
The utility model relates to the field of semiconductor technology, concretely relates to quick change mechanism that is used for Load Port to dock polymorphic type wafer box.
Background
The Load Port is applied to each link of semiconductor production, and mainly has the functions of loading a wafer box, realizing butt joint between the wafer box and production equipment and playing a bearing role; the wafer box is often closed when being circulated in an overhead traveling crane system of a production workshop, and the internal wafer cannot be taken and placed; the automatic opening or closing action of the wafer box can be realized through a Load Port, so that a robot in production equipment can pick and place wafers, the wafer box for production mainly has two forms of FOUP and case, and the wafer box for production has two different models of 8 inches and 12 inches according to the difference of the sizes of the wafers; when the types of the wafer boxes need to be switched in production, the corresponding wafer box panels need to be switched to correspond to the wafer boxes, when the wafer box panels are switched, manual fixing, wiring and gas connecting pipes are needed, time and labor are consumed, frequent changes in actual production or experiments are difficult to deal with, and therefore improvement is needed.
SUMMERY OF THE UTILITY MODEL
The utility model provides a problem when switching wafer cassette panel, need artifical fixed and wiring and connect the trachea.
In order to solve the problems, the utility model provides a quick change mechanism for Load Port butt joint polymorphic type wafer box, a quick change mechanism for quick change wafer box panel, the quick change mechanism includes gas circuit butt joint board, butt joint sucking disc, electric signal butt joint board and magnetism inhale terminal connector, the inside of the contact wafer box panel end of butt joint sucking disc sets up the rubber sucking disc, the link of rubber sucking disc is connected with the stiff end of butt joint sucking disc, the rubber sucking disc is used for butt joint the inside gas circuit of wafer box panel; the connecting end of the butt-joint sucker is fixedly arranged at the end, contacting the wafer box panel, of the gas circuit butt-joint plate, and the butt-joint sucker is used for fixing the wafer box panel; the connecting end of the magnetic terminal connector is fixedly arranged at the end, contacting the wafer box panel, of the electric signal butt-joint plate, and the magnetic terminal connector is used for butt-joint of circuits in the wafer box panel; when the butt joint sucker sucks the wafer box panel, the rubber sucker is automatically in butt joint with an air passage inside the wafer box panel, and the magnetic terminal connector is automatically in butt joint with a circuit inside the wafer box panel.
Preferably, the middle of the butt joint sucker is of a hollow structure, the bottom of the butt joint sucker is of an external thread structure, a rubber sucker is arranged inside the top end of the butt joint sucker, and the rubber sucker is used for butt joint with an internal gas circuit of a wafer box panel.
Preferably, a counter bore is formed in the side, which is in contact with the wafer box panel, of the gas circuit butt joint plate, the butt joint sucker is installed inside the counter bore, and an external thread of the butt joint sucker is arranged outside the counter bore, so that the wafer box panel and the gas circuit butt joint plate cannot be well attached due to the fact that the external thread structure of the butt joint sucker is compressed inconsistently when the butt joint sucker sucks and fixes the wafer box panel.
Preferably, the butt joint end of the rubber sucker is arranged in the counter bore, the contact end of the rubber sucker is arranged outside the counter bore, and therefore the gas leakage caused by the too short distance between the internal gas circuit of the wafer box panel and the butt joint of the rubber sucker is prevented.
Preferably, the electrical signal docking plate is an integrated circuit board, and the electrical signal docking plate is used for generating an electrical signal.
Preferably, the inside a plurality of contact caps and the magnetic main body that sets up of terminal connector are inhaled to magnetism, the contact cap welding sets up on the signal of telecommunication butt-joint board, the contact cap is arranged in a plurality of circuits of butt joint wafer box panel.
Preferably, the magnetic body is arranged on the periphery of the contact cap and used for fixing the electric signal butt joint of the wafer box panel.
Preferably, a pin is arranged at the bottom of the contact cap, the pin is correspondingly welded on the electric signal butt-joint plate, and the contact cap is used for transferring signals of the electric signal butt-joint plate.
Preferably, a quick change mechanism for Load Port docks polymorphic type wafer box still includes the keysets main part, the side of keysets main part sets up the gas circuit butt joint board with the signal of telecommunication butt joint board, the keysets main part with the gas circuit butt joint board the signal of telecommunication butt joint board fixed connection, the keysets main part is used for fixing the gas circuit butt joint board with the signal of telecommunication butt joint board.
Has the advantages that: the utility model can realize the compatibility of various wafer boxes such as FOUP and Cassette on the same Load Port, can be used for rapidly switching the panels of various wafer boxes, and further rapidly butt-joint the wafer boxes of different types; when the wafer box panel is switched, manual wiring and connection are not needed, butt joint is convenient, efficiency is high, replacement time is short, and efficiency is greatly improved.
Drawings
Fig. 1 is an isometric view of the overall structure of the quick-change mechanism of the present invention;
fig. 2 is a front view of the overall structure of the quick-change mechanism of the present invention;
FIG. 3 is a schematic view of the structure of the butt-joint sucker of the present invention;
fig. 4 is a front view of the magnetic terminal connector of the present invention;
fig. 5 is a schematic structural diagram of the quick-change mechanism of the present invention in an integrated device;
fig. 6 is a schematic view of the overall structure of the device of the present invention.
Description of reference numerals:
1-an adapter plate main body; 2-gas path butt-joint plate; 3, butting a sucker; 4-electrical signal docking plate; 5-magnetic terminal connector; 6-gas circuit butt joint module; 7-an electrical signal docking module; 51-a magnetic main body; 52-a contact cap; 21-counter bore; 31-rubber suction cups.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, embodiments accompanied with figures are described in detail below.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or otherwise described herein.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; may be a mechanical connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the description herein, references to the description of the terms "an example," "one example," and "one implementation," etc., mean that a particular feature, structure, material, or characteristic described in connection with the example or implementation is included in at least one example or implementation of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or implementation. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or implementations.
Embodiment 1, as shown in fig. 1, a quick-change mechanism for Load Port docking of multiple types of wafer cassettes, the quick-change mechanism for quickly changing a wafer cassette panel, the quick-change mechanism includes a gas circuit docking plate 2, a docking chuck 3, an electrical signal docking plate 4, and a magnetic terminal connector 5, a rubber chuck 31 is disposed inside an end of the docking chuck 3 contacting the wafer cassette panel, a connecting end of the rubber chuck 31 is connected to a fixed end of the docking chuck 3, and the rubber chuck 31 is used for docking an internal gas circuit of the wafer cassette panel; the connecting end of the butt-joint sucker 3 is fixedly arranged at the end of the gas circuit butt-joint plate 2, which is contacted with the wafer box panel, and the butt-joint sucker 3 is used for fixing the wafer box panel; the connecting end of the magnetic terminal connector 5 is fixedly arranged at the end of the electric signal butt-joint plate 4, which is contacted with the wafer box panel, and the magnetic terminal connector 5 is used for butt-joint with a circuit in the wafer box panel; when the butt joint sucker 3 sucks the wafer box panel, the rubber sucker 31 is automatically in butt joint with an air passage inside the wafer box panel, and the magnetic terminal connector 5 is automatically in butt joint with a circuit inside the wafer box panel.
It should be noted that the gas circuit butt-joint plate 2 and the butt-joint sucker 3 are combined to form a gas circuit butt-joint module 6, the gas circuit butt-joint module 6 is used for butt-joint the gas circuit on the wafer box panel, the electric signal butt-joint plate 4 and the magnetic terminal connector 5 are combined to form an electric signal butt-joint module 7, the electric signal butt-joint module 7 is used for butt-joint the electric signal on the wafer box panel, a plurality of butt-joint suckers 3 are arranged on the gas circuit butt-joint plate 2, the butt-joint wafer box panel is fixed through the butt-joint suckers 3, the wafer box panel is conveniently and quickly fixed, so that the corresponding wafer box is quickly replaced, a rubber sucker 31 is arranged inside the butt-joint sucker 3, the gas circuit inside the wafer box panel is butt-jointed while the wafer box panel is fixed by the butt-joint sucker 3, the gas circulation of the cylinder or the vacuum sucker inside the panel is realized, the magnetic terminal connector 5 is arranged on the electric signal butt-joint plate 4, the wafer box panel is fixed by the butt-joint sucker in a suction mode, and meanwhile the magnetic terminal connector 5 is used for connecting a circuit inside the wafer box panel, so that electric signals of sensors inside the panel are transmitted.
Specifically, the gas circuit butt joint plate 2 is provided with as many butt joint suckers 3 as the gas circuit butt joint ports of the wafer box panel, the butt joint suckers 3 as many as the gas circuit butt joint ports of the wafer box panel are arranged, so that a rubber sucker 31 is conveniently arranged in the butt joint sucker 3, the butt joint sucker 3 can be conveniently butted with the gas circuit in the wafer box panel while the wafer box panel is fixed, the rubber sucker 31 matched with the gas circuit joint of the wafer box panel is arranged at the top end of the inner part of the butt joint sucker 3, in order to save space, the butt joint of the rubber sucker 31 and the gas circuit joint of the wafer box panel is realized, so that the connection of the gas circuit in the rubber sucker 31 and the gas circuit in the wafer box panel is realized, the gas circulation of a cylinder or a vacuum sucker in the panel is realized, the magnetic terminal connector 5 is arranged on the electric signal butt joint plate 4, so that the magnetic terminal connector 5 can be matched with the circuit butt joint contacts on the wafer box panel, meanwhile, the magnetic terminal connector 5 and the butt joint sucker are positioned in the same plane, so that when the butt joint sucker 3 is attracted and fixed on the wafer box panel, the magnetic terminal connector 5 is just in butt joint with a circuit butt joint contact on the wafer box panel, and signals can be directly connected with the wafer box panel through the magnetic terminal connector 5, so that the transmission of electric signals of a sensor inside the panel and the like is switched on.
In embodiment 2, as shown in fig. 3, the middle of the butt joint sucker 3 is of a hollow structure, the bottom of the butt joint sucker 3 is of an external thread structure, a rubber sucker 31 is arranged inside the top end of the butt joint sucker 3, and the rubber sucker 31 is used for butting an internal air passage of a wafer cassette panel.
It should be noted that, the middle of the butt joint sucker 3 is set as a hollow structure, the hollow structure is set to be convenient for setting the rubber sucker 31 in the hollow structure, the external thread structure is set at the material contact end of the butt joint sucker 3, when the wafer box panel is fixed in the attraction, the material contact end of the butt joint sucker 3 can be always attached to the wafer box panel without being affected by the angle, the rubber sucker 31 used for abutting the internal gas circuit of the wafer box panel is set in the butt joint sucker 3, when the internal gas circuit of the wafer box panel is in the butt joint, the pipeline does not need to be detached, the butt joint is direct, time and labor are saved.
Specifically, the middle of the upper end of the butt joint sucker 3 is made into a hollow cavity structure, the lower part of the butt joint sucker 3 is of an outer spiral structure, two ends of the butt joint sucker 3 are communicated, the rubber sucker 31 for butting an internal gas circuit of a wafer box panel is arranged inside the hollow cavity structure in the middle of the butt joint sucker 3, the length of the rubber sucker 31 is consistent with that of the butt joint sucker 3, the two ends of the rubber sucker are communicated, and the rubber sucker 31 can be conveniently communicated with the gas circuit inside the wafer box panel when the butt joint sucker 3 is used for fixing and butting the wafer box panel.
It should be noted that, correspond wafer box panel gas circuit on gas circuit butt joint board 2 to the kneck, set up counter bore 21, set up installation butt joint sucking disc 3 in the inside of counter bore 21, and make the external screw thread structure of butt joint sucking disc 3 set up in the outer terminal surface of counter bore 21, set up counter bore 21 is because the external screw thread structure of butt joint sucking disc 3 outside when the actuation is because the atress compression is inconsistent, highly inconsistent when causing the fixed wafer box panel of actuation, thereby cause the wafer box panel not smooth, then cause the positional deviation at the wafer material loading to the inside of wafer box.
Specifically, when the number of the butt joints on the wafer box panel is 3, 3 counter bores are correspondingly arranged on the gas circuit butt joint plate 2, the position of the interface of the wafer box panel is consistent with the position of the counter bore 21 on the gas circuit butt joint plate 2, the butt joint sucker 3 is installed inside the counter bore 21, one end of the interface of the butt joint sucker 3 is arranged inside the counter bore 21, one end of the external thread structure of the butt joint sucker 3 exceeds the end face of the position of the counter bore 21, when the butt joint sucker 3 fixes the wafer box panel in an attraction manner, the external thread mechanism of the butt joint sucker 3 is tightly attached to the wafer box panel, the external thread mechanism is contracted into the counter bore under the action of the attraction force, the end face of the attraction fixed end of the wafer box panel is attached to the end face of the gas circuit butt joint plate 2, the wafer box panel and the gas circuit butt joint plate 2 can be tightly attached to the greatest extent, and the precision in taking is guaranteed.
In embodiment 4, as shown in fig. 3, the abutting end of the rubber suction cup 31 is disposed inside the counterbore 21, and the contact end of the rubber suction cup 31 is disposed outside the counterbore 21, so as to prevent the rubber suction cup 31 from leaking air due to a too short distance when the internal air passage of the wafer cassette panel abuts against the rubber suction cup 31.
It should be noted that, the butt joint end of the rubber suction cup 31 is fixed at the top of the inner side of the butt joint suction cup 3, and is simultaneously arranged in the inside of the counterbore 21, the air passage end of the contact wafer box panel of the rubber suction cup 31 is exposed out of the counterbore 21, when the butt joint suction cup 3 is fixedly attracted to the wafer box panel, the rubber suction cup 31 just butt joints the air passage hole on the wafer box panel, the air passage end of the contact wafer box panel of the rubber suction cup 31 is exposed out of the counterbore 21, the inner air passage of the wafer box panel is prevented, and when the rubber suction cup 31 is in butt joint, the rubber suction cup 31 is not butted or is air leakage due to the short distance.
Specifically, fix the inside on the top of butt joint sucking disc 3 with the one end of rubber suction disc 31, will dock sucking disc 3 and the inlet end of rubber suction disc 31 and install simultaneously in counter bore 21, make the other end of rubber suction disc 31 expose gas circuit buttcover plate 1 cm's height, when butt joint sucking disc 3 when the fixed wafer box panel of actuation, butt joint sucking disc 3 receives the inside at counter bore 21 after the compression, butt joint gas circuit pore pair of 3 inside rubber suction discs 31 of butt joint sucking disc on can be fine and the wafer box panel.
Embodiment 5, as shown in fig. 1, the electrical signal interface board 4 is an integrated circuit board, and the electrical signal interface board 4 is used for generating electrical signals.
The electrical signal docking plate 4 is a circuit board, an analog signal for detecting the wafer plate is generated by the electrical signal docking plate 4, and the electrical signal docking plate 4 is arranged as the circuit board to detect the wafer plate and save space.
Embodiment 6, as shown in fig. 4, a plurality of contact caps 52 and a magnetic body 51 are disposed inside the magnetic terminal connector 5, the contact caps 52 are soldered to the electrical signal docking plate 4, and the contact caps 52 are used for docking a plurality of electrical signals in a wafer cassette panel.
It should be noted that the magnetic terminal connector 5 matched with the wafer cassette panel electrical signal butt joint is arranged on the electrical signal butt joint plate 4, the contact cap 52 matched with the contact inside the wafer cassette panel electrical signal butt joint is arranged in the middle of the magnetic terminal connector 5, and the magnetic terminal connector 5 is arranged, so that the butt joint of the electrical signal butt joint on the wafer cassette panel is facilitated, and manual wiring is reduced.
Specifically, magnetism is inhaled terminal connector 5 optimal choice and is used the IMG 0906 series of sandan, when there are 7 contacts on the signal of telecommunication butt joint of wafer box panel, set up 7 contact caps 52 in the centre of magnetism terminal connector 5 of inhaling, make the position and the number of contact cap 52 unanimous with the position and the number of the contact on the signal of telecommunication connects, make the contact on the signal of telecommunication butt joint and the contact cap 52 on the terminal connector of magnetism inhale can be linked together through the butt joint to make signal and electric current etc. can flow into the inside of wafer box panel through the contact cap 52 on the terminal connector 5 of magnetism.
In embodiment 7, as shown in fig. 4, the magnetic body 51 is disposed on a peripheral side of the contact cap 52, and the magnetic body 51 is used for fixing the electrical signal of the wafer cassette panel to the contact.
It should be noted that the plurality of magnetic bodies 51 are disposed around the contact cap 52, so that the magnetic bodies 51 correspond to the magnetic material on the electrical signal butt joint of the wafer cassette panel, and the magnetic bodies 51 can attract the magnetic material on the wafer cassette panel well, so that the magnetic bodies 51 are disposed to facilitate the relative fixation of the magnetic terminal connector 5 and the electrical signal butt joint of the wafer cassette panel.
Specifically, on the terminal connector 5 is inhaled to magnetism, set up neodymium magnet around the contact cap 52, make the position and the number of neodymium magnet the same with the position and the number of the magnetic substance on the wafer cassette panel, thereby it is relatively fixed to inhale terminal connector 5 and wafer cassette panel through the magnetic substance on the neodymium magnet actuation wafer cassette panel to make the contact on the signal of telecommunication butt joint on the contact cap 52 and the wafer cassette panel on the terminal connector 5 is inhaled to magnetism.
In embodiment 8, as shown in fig. 1, pins are disposed at the bottom of the contact cap 52, the pins are correspondingly soldered on the electrical signal docking board 4, and the contact cap 52 is used for transferring signals of the electrical signal docking board 4.
It should be noted that pins are disposed at the bottom of the contact cap 52, and then the pins are correspondingly soldered on the electrical signal docking plate 4, and signals, currents, etc. generated on the electrical signal docking plate 4 are transmitted to the internal circuit of the wafer cassette panel through the contact cap 52 by the contact cap 52.
Specifically, a pin is soldered to the bottom of the contact cap 52, and a pin is soldered to the board 4 using the ic board as an electrical signal, so that the contact cap 52 and the circuit board are electrically connected.
Embodiment 9, as shown in fig. 1, a quick change mechanism for a Load Port docking multi-type wafer cassette further includes an adapter plate main body 1, a side of the adapter plate main body 1 is provided with the gas circuit docking plate 2 and the electrical signal docking plate 4, the adapter plate main body 1 is fixedly connected to the gas circuit docking plate 2 and the electrical signal docking plate 4, and the adapter plate main body 1 is used for fixing the gas circuit docking plate 2 and the electrical signal docking plate 4.
It should be noted that, the adapter plate main body and the air path butt-joint plate are arranged on one side of the adapter plate main body, so that the air path butt-joint plate and the electric signal butt-joint plate are fixed through the adapter plate main body, and therefore the adapter plate main body, the air path butt-joint plate and the electric signal butt-joint plate are integrated, and the stability of the overall structure of the quick-change mechanism is improved.
Specifically, set up gas circuit butt-joint plate 2 in one side of the horizontal position of keysets main part 1, make the butt joint sucking disc on the gas circuit butt-joint plate and the position that the gas circuit of wafer box panel connects corresponding, set up signal of telecommunication butt-joint plate 4 under gas circuit butt-joint plate 2, make the position of the signal of telecommunication interface of magnetism terminal connector and wafer box panel of inhaling on the signal of telecommunication butt-joint plate corresponding, and through keysets main part and gas circuit butt-joint plate, signal of telecommunication butt-joint plate fixed connection, make it become a whole, provide support for the fixed of wafer board.
The basic working principle is as follows: aligning the wafer box panel of the required type to the adapter plate main body, and positioning by utilizing the side or the pin, wherein the wafer box panel is tightly attached to the gas circuit butt-joint plate and the electric signal butt-joint plate which are close to one side of the adapter plate main body, and the gas circuit butt-joint plate is provided with a butt-joint sucker corresponding to the gas circuit of the wafer box panel and used for sucking and fixing the wafer box panel; the rubber sucker is arranged in the butt joint sucker and is used for butt joint with an air passage in the wafer box panel; the signal of telecommunication butt joint that corresponds wafer box panel on the signal of telecommunication butt-joint plate sets up magnetism and inhales terminal connector, an internal circuit for butt joint wafer box panel, the inside of inhaling terminal connector sets up the contact cap at magnetism, a contact for butt joint on the wafer box panel, set up magnetism around the contact cap and inhale the main part, a fixed for inhaling terminal connector and wafer box panel signal of telecommunication butt joint to magnetism, when butt joint sucking disc closes the wafer disc panel, the inside gas circuit interface of wafer box panel will be aimed at simultaneously to rubber suction cup, realize the inside cylinder of panel or vacuum chuck's gas flow, magnetism is inhaled terminal connector and will be aimed at the inside signal of telecommunication interface of wafer box panel (the magnetism of opposite magnetic pole and inhale terminal connector to the formula, thereby the transmission of switch-on panel internal sensor isoelectrical signal.
Although the present disclosure has been described above, the scope of the present disclosure is not limited thereto. Various changes and modifications may be made by those skilled in the art without departing from the spirit and scope of the present disclosure, and these changes and modifications are intended to fall within the scope of the present disclosure.
Claims (9)
1. A quick-change mechanism for a Load Port to dock multiple types of wafer cassettes is characterized by comprising a quick-change mechanism for quickly changing a wafer cassette panel, wherein the quick-change mechanism comprises a gas circuit docking plate (2), a docking sucker (3), an electric signal docking plate (4) and a magnetic suction terminal connector (5), a rubber sucker (31) is arranged inside the end, contacting the wafer cassette panel, of the docking sucker (3), the connecting end of the rubber sucker (31) is connected with the fixed end of the docking sucker (3), and the rubber sucker (31) is used for docking the internal gas circuit of the wafer cassette panel; the connecting end of the butt joint sucker (3) is fixedly arranged at the end, contacting the wafer box panel, of the gas circuit butt joint plate (2), and the butt joint sucker (3) is used for fixing the wafer box panel; the connecting end of the magnetic terminal connector (5) is fixedly arranged at the end, contacting the wafer box panel, of the electric signal butt-joint plate (4), and the magnetic terminal connector (5) is used for butt-jointing the circuit in the wafer box panel; when the butt joint sucker (3) sucks the wafer box panel, the rubber sucker (31) automatically butts against an air passage inside the wafer box panel, and the magnetic terminal connector (5) automatically butts against a circuit inside the wafer box panel.
2. The quick-change mechanism for the Load Port to dock the multiple types of wafer cassettes according to claim 1, wherein the middle of the docking sucker (3) is of a hollow structure, the bottom of the docking sucker (3) is of an external thread structure, a rubber sucker (31) is arranged inside the top end of the docking sucker (3), and the rubber sucker (31) is used for docking an internal air path of a wafer cassette panel.
3. The quick-change mechanism for the Load Port docking of the multiple types of wafer cassettes as claimed in claim 2, wherein the gas circuit docking plate (2) is provided with a counter bore (21) on the side contacting with the wafer cassette panel, the docking sucker (3) is installed inside the counter bore (21), the external thread of the docking sucker (3) is provided outside the counter bore (21), so as to prevent the wafer cassette panel and the gas circuit docking plate from being not well attached due to inconsistent compression of the external thread structure of the docking sucker (3) when the docking sucker (3) is used for sucking and fixing the wafer cassette panel.
4. The quick-change mechanism for the Load Port to dock the multiple types of wafer cassettes according to claim 3, wherein the docking end of the rubber suction cup (31) is arranged inside the counterbore (21), and the contact end of the rubber suction cup (31) is arranged outside the counterbore (21), so that when the internal air passage of the wafer cassette panel is docked with the rubber suction cup (31), the rubber suction cup (31) is prevented from leaking air due to too short distance.
5. The quick-change mechanism for a Load Port docking multi-type wafer cassette according to claim 1, wherein the electrical signal docking plate (4) is an integrated circuit board, and the electrical signal docking plate (4) is used for generating electrical signals.
6. The quick-change mechanism for a Load Port to dock multiple types of wafer cassettes according to claim 1, wherein a plurality of contact caps (52) and a magnetic main body (51) are arranged inside the magnetic terminal connector (5), the contact caps (52) are welded on the electrical signal docking plate (4), and the contact caps (52) are used for docking a plurality of circuits in a wafer cassette panel.
7. The quick-change mechanism for a Load Port to dock multiple types of cassettes as claimed in claim 6, wherein the magnetic body (51) is disposed on the periphery of the contact cap (52), and the magnetic body (51) is used for fixing the electrical signal docking head of the cassette panel.
8. The quick-change mechanism for a Load Port to dock multiple types of wafer cassettes according to claim 7, wherein pins are disposed at the bottom of the contact cap (52), the pins are correspondingly welded on the electrical signal docking plate (4), and the contact cap (52) is used for transferring signals of the electrical signal docking plate (4).
9. The quick-change mechanism for the Load Port docking of the multiple types of wafer cassettes as claimed in claim 1, further comprising a main adapter plate body (1), wherein the side of the main adapter plate body (1) is provided with the gas circuit docking plate (2) and the electrical signal docking plate (4), the main adapter plate body (1) is fixedly connected with the gas circuit docking plate (2) and the electrical signal docking plate (4), and the main adapter plate body (1) is used for fixing the gas circuit docking plate (2) and the electrical signal docking plate (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221226045.7U CN217468371U (en) | 2022-05-21 | 2022-05-21 | A quick change mechanism for Load Port docks polymorphic type wafer box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221226045.7U CN217468371U (en) | 2022-05-21 | 2022-05-21 | A quick change mechanism for Load Port docks polymorphic type wafer box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217468371U true CN217468371U (en) | 2022-09-20 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221226045.7U Active CN217468371U (en) | 2022-05-21 | 2022-05-21 | A quick change mechanism for Load Port docks polymorphic type wafer box |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217468371U (en) |
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2022
- 2022-05-21 CN CN202221226045.7U patent/CN217468371U/en active Active
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