CN217387125U

CN217387125U - Miniature bernoulli suction head

Info

Publication number: CN217387125U
Application number: CN202221289243.8U
Authority: CN
Inventors: 丁飞; 王启东; 戴风伟; 曹立强
Original assignee: Institute of Microelectronics of CAS
Current assignee: Institute of Microelectronics of CAS
Priority date: 2022-05-27
Filing date: 2022-05-27
Publication date: 2022-09-06
Anticipated expiration: 2032-05-27

Abstract

The utility model discloses a miniature Bernoulli suction head belongs to semiconductor packaging technical field, has solved the problem that miniature chip can't realize non-contact picking up among the prior art. The miniature Bernoulli suction head comprises an air inlet channel, a horn cavity, a jet disc and a plurality of bulges; the air outlet of the air inlet channel is connected with the air inlet of the horn cavity, the jet flow disc and the bulge are arranged at the air inlet of the horn cavity, and the bulge is arranged on one surface of the jet flow disc, which faces the air inlet of the horn cavity; one end of the bulge is connected with the jet flow disc, and the other end of the bulge is connected with the inner wall of the horn cavity. The miniature Bernoulli suction head can be used for the patch of a miniature chip.

Description

Miniature bernoulli suction head

Technical Field

The utility model belongs to the technical field of the semiconductor package, especially, relate to a miniature Bernoulli suction head.

Background

The hybrid bonding is a bump-free bonding mode, is sensitive to the cleanliness of a bonding surface, and causes a large amount of pores at a bonding interface or complete failure of bonding due to pollution generated on the chip surface in the chip mounting process.

At present, the non-contact pick-up method is mainly applied to pick-up and place of products with larger sizes (such as ultra-thin wafers, glass jet disks and the like), and cannot be applied to pick-up and place of micro chips.

SUMMERY OF THE UTILITY MODEL

In view of the above analysis, the utility model aims at providing a miniature Bernoulli suction head has solved the unable problem that realizes non-contact picking up of microchip among the prior art.

The purpose of the utility model is mainly realized through the following technical scheme:

the utility model provides a miniature Bernoulli suction head, which comprises an air inlet channel, a horn cavity, a jet disc and a plurality of bulges; the air outlet of the air inlet channel is connected with the air inlet of the horn cavity, the jet flow disc and the bulge are arranged at the air inlet of the horn cavity, and the bulge is arranged on one surface of the jet flow disc facing the air inlet of the horn cavity; one end of the bulge is connected with the jet flow disc, and the other end of the bulge is connected with the inner wall of the horn cavity.

Further, the longitudinal section of the air inlet channel is L-shaped and comprises a first channel and a second channel; the air inlet end of the first channel is connected with the air supply unit, the air outlet end of the first channel is connected with the air inlet end of the second channel, and the air outlet end of the second channel is connected with the horn cavity.

Further, the axis of the first channel is perpendicular to the axis of the horn cavity, and the second channel is arranged coaxially with the horn cavity.

Furthermore, the diameter of the jet flow plate is 3.0-3.2 mm, and the thickness is 0.4-0.6 mm.

Further, the cross-section of the protrusion is circular in shape.

Furthermore, the width of a gap between two adjacent bulges is 0.5-0.6 mm, and the height of the gap is 0.5-0.6 mm.

Further, the cross-section of the protrusion is shaped as a continuous arc.

Furthermore, the number of the protrusions is 4, and the jet flow disk is provided with two diameter lines which are perpendicular to each other; the distance between the point of intersection of the first end of the projection with one of the diameter lines and the dot of the jet disk is greater than the distance between the point of intersection of the second end of the projection with the other of the diameter lines and the dot of the jet disk.

Further, in two adjacent bulges, the distance between the first end and the second end which are intersected with the same diameter line is 0.3-0.4 mm.

Furthermore, the diameter of the miniature Bernoulli suction head is 5-100 mm, and the height of the miniature Bernoulli suction head is 4-6 mm.

Compared with the prior art, the utility model discloses can realize one of following beneficial effect at least:

A) the utility model provides a miniature Bernoulli suction head to microchip, has carried out unique Bernoulli suction head's structural design, adopts loudspeaker die cavity to carry out the water conservancy diversion to high-velocity air, and high-velocity air can form the negative pressure region at loudspeaker die cavity's center under the water conservancy diversion of loudspeaker die cavity lateral wall, is favorable to producing the Bernoulli effect more, realizes microchip's non-contact and picks up.

B) The utility model provides a miniature Bernoulli suction head through jet disk and a plurality of arch, can further improve the velocity of flow of high velocity air to can guarantee Bernoulli adsorption stability.

C) The utility model provides a miniature Bernoulli suction head when the high velocity air current through two adjacent bellied clearances, can give the high velocity air current tangential velocity for the high velocity air current can produce certain rotation, and rotatory high velocity air current can form the vacuum area at air current center (also be exactly the center of loudspeaker die cavity gas outlet), thereby can further improve microchip's the front and the pressure differential of reverse side, and then can further improve the adsorption affinity of Bernoulli suction head.

Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and drawings.

Drawings

The drawings are only for purposes of illustrating particular embodiments and are not to be construed as limiting the invention, wherein like reference numerals are used to designate like parts throughout the drawings.

FIG. 1 is a schematic view of a micro Bernoulli tip according to the present invention, wherein the solid arrows indicate the direction of the high-speed airflow, and the dotted arrows indicate the direction of the adsorption force;

FIG. 2 is a schematic view of the arrangement of the micro Bernoulli tip in which the protrusions are circular;

FIG. 3 is a schematic view of the arrangement of the micro Bernoulli tip in which the protrusions are curved.

Reference numerals:

1-an intake passage; 2-horn cavity; 3-a jet flow plate; 4-bulge; 5-microchip.

Detailed Description

The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which form a part hereof, and which together with the embodiments of the invention serve to explain the principles of the invention.

The utility model provides a miniature Bernoulli suction head, see figure 1 to figure 3, including inlet channel 1, loudspeaker die cavity 2, jet flow dish 3 and a plurality of arch 4, inlet channel 1's gas outlet is connected with loudspeaker die cavity 2's air inlet, and loudspeaker die cavity 2's air inlet department is located to jet flow dish 3 and

arch

4, and 3 one sides towards loudspeaker die cavity 2 air inlets of jet flow dish are located to arch 4, and arch 4's one end is connected with jet flow dish 3, and arch 4's the other end and loudspeaker die cavity 2's interior wall connection.

It will be appreciated that, in order to achieve an increase in the gas flow rate, the gap between two adjacent projections 4 is smaller than the size of the inlet of the horn cavity 2.

During the implementation, inlet channel 1's air inlet is connected with the air feed unit, microchip 5 locates the gas outlet of loudspeaker die cavity 2, the high-pressure gas that the air feed unit provided passes through inlet channel 1 in proper order, the air inlet of loudspeaker die cavity 2, two adjacent protruding 4's clearance, and flow out from the gas outlet of loudspeaker die cavity 2 along the lateral wall of loudspeaker die cavity 2, high velocity gas meets behind microchip 5 along the radial outside quick diffusion of loudspeaker die cavity 2, thereby make the gas flow rate increase of microchip 5 top, microchip 5 positive atmospheric pressure is greater than the atmospheric pressure at the back, make microchip 5 to being close to the removal of bernoulli suction head direction, realize the absorption and the pick-up of microchip 5. It should be emphasized that, due to the high velocity of the air flow between the microchip 5 and the Bernoulli head, the microchip 5 does not come into contact with the Bernoulli head, and contamination of the chip surface by the head during chip pick-up is avoided.

In order to enable the microchip 5 to be adsorbed, the bernoulli suction head has a diameter of 5 to 100mm, for example, 5mm, 10mm, 25mm, 40mm, 60mm, 85mm or 100mm, an overall height of 4 to 6mm, an air inlet diameter of 1 to 2mm, an outer diameter of an air outlet of the horn cavity 2 of 8 to 10mm, and an inner diameter of 3 to 5 mm.

Illustratively, the miniature Bernoulli tip is suitable for picking and pasting of a microchip, and the size (length x width) of the microchip 5 is 1-100 mm x 1-100 mm.

Compared with the prior art, the utility model provides a miniature Bernoulli suction head to microchip 5, has carried out the structural design of unique Bernoulli suction head, adopts loudspeaker cavity 2 to carry out the water conservancy diversion to high velocity air, and high velocity air can form the negative pressure region at loudspeaker cavity 2's center under the water conservancy diversion of loudspeaker cavity 2 lateral wall, is favorable to producing the Bernoulli effect more, realizes that microchip 5's non-contact picks up. Meanwhile, the flow velocity of high-speed airflow can be further improved through the jet disc 3 and the plurality of protrusions 4, so that the Bernoulli adsorption stability can be ensured.

It should be noted that, in practical application, the utility model discloses a bernoulli suction head adopts integrated into one piece processing or components of a whole that can function independently processing (inlet channel 1 and loudspeaker die cavity 2 are the subassembly of integrated into one piece, and jet flow dish 3 and a plurality of protruding 4 are another subassembly of integrated into one piece), wherein, adopts the processing of disconnect-type subassembly to fit again, can greatly reduced bernoulli suction head's the processing degree of difficulty.

For the structure of the air inlet channel 1, specifically, the shape of the longitudinal section of the air inlet channel is L-shaped, the air inlet channel comprises a first channel and a second channel, the air inlet end of the first channel is connected with the air supply unit, the air outlet end of the first channel is connected with the air inlet end of the second channel, the air outlet end of the second channel is connected with the horn cavity 2, the axis of the first channel is vertical to the axis of the horn cavity 2, and the second channel and the horn cavity 2 are coaxially arranged.

In consideration of the adsorption force of the bernoulli tip and the flow stability of the high-speed air flow, the inclination angle of the side wall of the horn cavity 2 with respect to the microchip 5 is 30 to 45 °. Like this, inject the inclination of the lateral wall of loudspeaker die cavity 2 for microchip 5 in above-mentioned scope, on the one hand, can reduce the lateral wall of loudspeaker die cavity 2 and be less to the resistance of high-speed fluid, reduce the reduction of the in-process velocity of flow of high-speed fluid and loudspeaker die cavity 2 contact, and then can guarantee the adsorption affinity of bernoulli suction head, on the other hand, can also guarantee the flow stability of high-speed fluid, and then improve the stability of adsorbing microchip 5.

Illustratively, the number of the projections 4 may be 3 to 6, for example, 4, and the cross section of the projections 4 may be circular or arc.

The shape of the cross section of the above-mentioned projection 4 may be circular from the viewpoint of flow resistance and flow stability of the high-speed gas flow. This is because the rounded side walls of the protrusions 4 do not have corners, so that high-speed fluid can be guided better, and the flow resistance and the flow stability of high-speed airflow can be ensured. Illustratively, the diameter of the jet plate 3 is 3.0-3.2 mm, the thickness is 0.4-0.6 mm, the gap width of two adjacent protrusions 4 is 0.5-0.6 mm, and the gap height is 0.5-0.6 mm.

In order to be able to further increase the suction force of the bernoulli tip, the number of projections 4 is 4, 4 projections 4 are distributed diffusing out from the circular points of the jet disk 3, the cross-sectional shape of the projections 4 may be a continuous arc, the spray disk 3 may have two diameter lines perpendicular to each other, a distance between an intersection of a first end of the projection 4 with one of the diameter lines and a dot of the spray disk 3 is a1, a distance between an intersection of a second end of the projection 4 with the other diameter line and a dot of the spray disk 3 is a2, a1 > a2, and in adjacent two projections 4, the distance between the first end and the second end intersecting the same diameter line is b, and illustratively, the jet flow disk 3 has a diameter of 3.0 to 3.2mm, a thickness of 0.4 to 0.6mm, an a1 of 0.5 to 0.7mm, an a2 of 0.2 to 0.3mm, b of 0.3 to 0.4mm, and a height of the protrusion 4 of 0.4 to 0.5mm, so that a vacuum region of 3.0 to 3.5mm can be formed in the center of the jet flow disk 3. Thus, the projections 4 with the shapes and the layout can endow the high-speed airflow with tangential speed when the high-speed airflow passes through the gap between two adjacent projections 4, so that the high-speed airflow can generate certain rotation, and the rotating high-speed airflow can form a vacuum area in the center of the airflow (namely the center of the air outlet of the horn cavity 2), so that the pressure difference between the front surface and the back surface of the microchip 5 can be further improved, and the adsorption force of the Bernoulli suction head can be further improved.

For the material of the miniature bernoulli tip, in particular, stainless steel, aluminum alloy or copper alloy can be used.

Example one

The specific dimensions of the bernoulli tip of this example are as follows:

the whole diameter of Bernoulli suction head is 10mm, and whole height is 4mm, and the diameter of air inlet is 1mm, and the external diameter of loudspeaker die cavity gas outlet is 9mm, and the internal diameter is 4mm, and the angle of inclination of loudspeaker die cavity lateral wall for microchip is 30, and the diameter of jet disc is 3mm, and the thickness of jet disc is 0.5mm, and bellied quantity is 4, and the shape is circular, and two adjacent bellied gap width is 0.5, and the gap height is 0.5 mm.

Example two

The specific dimensions of the bernoulli tip of this example are as follows:

the Bernoulli suction head has the overall diameter of 10mm, the overall height of 4mm, the diameter of the air inlet of 1mm, the outer diameter of the air outlet of the horn cavity of 9mm, the inner diameter of 4mm, the inclination angle of the side wall of the horn cavity relative to the microchip is 45 degrees, the diameter of the jet disc is 3.2mm, the thickness of the jet disc is 0.4mm, the number of the protrusions is 4, the shape of the protrusions is arc, a1 is 0.6mm, a2 is 0.3mm, b is 0.3mm, the height of the protrusions is 0.5mm, and the diameter of a vacuum area formed in the center of the jet disc is 3.2 mm.

The above description is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the present invention.

Claims

1. A miniature Bernoulli suction head is characterized by comprising an air inlet channel, a horn cavity, a jet disc and a plurality of bulges;

the air outlet of the air inlet channel is connected with the air inlet of the horn cavity, the jet flow disc and the bulge are arranged at the air inlet of the horn cavity, and the bulge is arranged on one surface of the jet flow disc facing the air inlet of the horn cavity;

one end of the bulge is connected with the jet flow disc, and the other end of the bulge is connected with the inner wall of the horn cavity.

2. The miniature bernoulli tip of claim 1, wherein said air inlet channel is L-shaped in longitudinal cross-section, comprising a first channel and a second channel;

the inlet end and the air feed unit of first passageway are connected, the end of giving vent to anger of first passageway is connected with the inlet end of second passageway, the end of giving vent to anger of second passageway is connected with loudspeaker die cavity.

3. The miniature bernoulli tip of claim 2, wherein the axis of the first channel is perpendicular to the axis of the horn cavity and the second channel is coaxial with the horn cavity.

4. The miniature Bernoulli tip according to claim 1, wherein the jet disk has a diameter of 3.0-3.2 mm and a thickness of 0.4-0.6 mm.

5. The miniature bernoulli tip of claim 1, wherein the cross-section of said projection is circular in shape.

6. The miniature Bernoulli tip according to claim 5, wherein the gap width between two adjacent protrusions is 0.5-0.6 mm and the gap height is 0.5-0.6 mm.

7. The miniature bernoulli tip of claim 1, wherein the cross-section of said projection is continuously arcuate in shape.

8. The miniature bernoulli tip of claim 7, wherein said number of protrusions is 4, and said jet disk has two diameter lines that are perpendicular to each other; the distance between the intersection point of the first end of the protrusion and one of the diameter lines and the dot of the jet disk is larger than the distance between the intersection point of the second end of the protrusion and the other diameter line and the dot of the jet disk.

9. The miniature Bernoulli tip according to claim 8, wherein the distance between the first and second ends of two adjacent projections that intersect a line of the same diameter is from 0.3 to 0.4 mm.

10. A miniature bernoulli tip according to any one of claims 1 to 9, wherein the miniature bernoulli tip has a diameter of 5-100 mm and a height of 4-6 mm.