CN217387096U - Box for chip overturning assembly and soaking pool - Google Patents
Box for chip overturning assembly and soaking pool Download PDFInfo
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- CN217387096U CN217387096U CN202221142997.0U CN202221142997U CN217387096U CN 217387096 U CN217387096 U CN 217387096U CN 202221142997 U CN202221142997 U CN 202221142997U CN 217387096 U CN217387096 U CN 217387096U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates to a semiconductor trade wafer wet processing field particularly, relates to a wafer box upset subassembly and fermentation vat, the utility model provides a problem: the crystal box can not be accurately adjusted to the horizontal state when rotating. In order to solve the above problem, an embodiment of the utility model provides a wafer box upset subassembly includes: the driving shaft is provided with a first transmission end; the rotating assembly is fixedly connected with the first transmission end and is obliquely arranged relative to the driving shaft; the swinging connecting rod is connected with the rotating assembly; brilliant box, brilliant box is connected with runner assembly, and runner assembly includes: rotating the transmission member; the side, away from the driving shaft, of the rotating plate is connected with the rotating part, and a first notch is formed in the rotating plate; wherein, the rotating transmission spare passes first breach and is connected with first transmission end.
Description
Technical Field
The utility model relates to a semiconductor trade wafer wet processing field particularly, relates to a wafer box upset subassembly and fermentation vat.
Background
Currently, in the semiconductor industry, wafers refer to silicon wafers used in the fabrication of silicon semiconductor integrated circuits. In the wafer gold tearing and photoresist removing process, photoresist removing liquid can remain on the wafer, the residual photoresist removing liquid needs to be removed through steps of soaking, cleaning and the like, the wafer box is not turned in the soaking pool, the photoresist removing liquid cannot be completely removed, but in the turning process, the wafer box cannot be accurately adjusted to be in a horizontal state.
SUMMERY OF THE UTILITY MODEL
The utility model provides a problem: the crystal box can not be accurately adjusted to the horizontal state when rotating.
In order to solve the above problem, an embodiment of the utility model provides a wafer box upset subassembly includes: the driving shaft is provided with a first transmission end; the rotating assembly is fixedly connected with the first transmission end and is obliquely arranged relative to the driving shaft; the swinging connecting rod is connected with the rotating assembly; brilliant box, brilliant box is connected with runner assembly, and runner assembly includes: rotating the transmission member; the side, away from the driving shaft, of the rotating plate is connected with the rotating part, and a first notch is formed in the rotating plate; wherein, rotating transmission spare passes first breach and is connected with first drive end.
Compared with the prior art, the technical scheme has the following technical effects: the vertical movement of the device is converted into the rotation of the rotating plate through the arrangement of the rotating transmission part, the rotating amplitude of the rotating plate is controlled through the arrangement of the swing connecting rod, the rotating plate can be accurately stopped at a horizontal position when the driving shaft rises to the highest point, and the crystal box is more convenient to clean. .
In an embodiment of the present invention, the rotary drive member includes: the first transmission section is attached to the rotating plate; the second transmission section is obliquely arranged relative to the driving shaft and is fixedly connected with the swinging connecting rod, a second notch is formed in the second transmission section, and the driving shaft is connected with the second transmission section through the second notch; and the avoidance groove is arranged at the joint of the first transmission section and the second transmission section.
Compared with the prior art, the technical scheme has the following technical effects: the setting of first transmission section lets the rising of driving shaft drive rotating transmission spare, and the setting of second breach lets the driving shaft more firm with being connected of first transmission section, and the setting of second transmission section and first transmission section bending connection can drive second transmission section and rotate downwards when letting first transmission section rise, and the setting of dodging the groove can avoid the rotor plate to rotate in-process and first transmission section contact.
In an embodiment of the present invention, the rotating plate includes: the first mounting position is provided with a crystal box; a second mounting position, wherein a crystal box is arranged on the second mounting position; the connecting section is connected with the first installation position and the second installation position, and the first transmission section is fixedly connected with the connecting section.
Compared with the prior art, the technical scheme has the following technical effects: the setting that first installation is located second installation position lets the rotor plate can drive a plurality of brilliant boxes simultaneously and rotate, when having increased brilliant box quantity, also can let the opening of a plurality of brilliant boxes level down simultaneously, reduces the gluey residue of piece.
In an embodiment of the present invention, the cassette turnover assembly further comprises: the distance-increasing section is arranged between the rotating plate and the crystal box, and the distance-increasing section is arranged on the first installation position and the second installation position.
Compared with the prior art, the technical scheme has the following technical effects: the distance between rotor plate and the brilliant box has been increased in the setting of increase apart from the section, has avoided rotor plate and washing liquid contact, has increased the life of rotor plate, also lets the dismantlement of brilliant box more convenient simultaneously, and the setting of increase apart from the section U type also lets the whole weight reduction of increase apart from the section, and the resistance is littleer when rotating.
In an embodiment of the present invention, the cassette turnover assembly further comprises: the connecting assembly is sleeved outside the driving shaft and is connected with the swinging connecting rod; and the fixing piece penetrates through the second transmission section to fix the swinging connecting rod.
Compared with the prior art, the technical scheme has the following technical effects: the connecting component plays a limiting role in the second transmission section, the swinging connecting rods on two sides can rotate simultaneously due to the arrangement of the fixing component, and the rotating direction of the rotating plate is further limited.
In an embodiment of the present invention, the cassette turnover assembly further comprises: the driving device is connected with the other end, opposite to the first transmission end, of the driving shaft, and the mounting sleeve is connected with the driving device and fixed through the flange.
Compared with the prior art, the technical scheme has the following technical effects: when the driving shaft needs to ascend or descend, the driving device is started to provide power for the movement of the driving shaft, and the flange enables the connection of the mounting sleeve to be more stable.
In an embodiment of the present invention, the pod comprises: a cassette body; the wafer clamping groove is formed in the inner wall of the crystal box body; the wafer supporting rod is connected with one side of the crystal box body, which is far away from the first transmission end.
Compared with the prior art, the technical effect achieved by adopting the technical scheme is as follows: the wafer supporting rod can play a role in supporting the round crystal in the rotation process, the round crystal is prevented from falling off from the crystal box body, the round crystal can be clamped in the clamping groove through the arrangement of the wafer clamping groove, the round crystal is prevented from being deviated in the rotation process, a plurality of round crystals can be placed in one crystal box body, and the cleaning quantity is increased.
In an embodiment of the present invention, the present invention further includes: the utility model provides a soaking pool, soaking pool include the soaking pool casing, and spool box upset subassembly is located in the soaking pool casing, this spool box upset subassembly has the whole technical characterstic of above-mentioned spool box upset subassembly, and here is no longer repeated one by one.
Drawings
FIG. 1 is a schematic view of the whole structure of the cassette turnover assembly of the present invention;
FIG. 2 is a schematic view of the structure of the rotating transmission member of the present invention;
FIG. 3 is a schematic diagram of the structure of the rotating plate of the present invention;
FIG. 4 is a schematic view of the connection between the rotating assembly and the cassette of the present invention;
FIG. 5 is a schematic view of the connection between the swing link and the rotating transmission member of the present invention;
FIG. 6 is a schematic view of the fixing member of the present invention;
fig. 7 is the overall structure schematic diagram of the soaking pool of the utility model.
Description of reference numerals:
100-a cassette flipping assembly; 110-a drive shaft; 120-a cassette; 130-a connection assembly; 131-installing a sleeve; 132-a connection station; 140-a flange; 150-a swing link; 160-a distance increasing section; 200-a rotating assembly; 210-a rotating plate; 211-a first mounting location; 212-second installation site; 213-first gap; 214-a connecting segment; 220-a rotating transmission; 221-a first transmission section; 222-a second transmission section; 223-avoidance groove; 224-a second gap; 230-a fixing member; 300-a drive device; 310-steeping cistern.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, embodiments accompanied with figures are described in detail below.
[ first embodiment ] A method for manufacturing a semiconductor device
Referring to fig. 1-7, in one particular embodiment, cassette flipping assembly 100 comprises: the driving shaft 110, the driving shaft 110 is provided with a first transmission end; the rotating assembly 200, the rotating assembly 200 is fixedly connected with the first transmission end, and the rotating assembly 200 is obliquely arranged relative to the driving shaft 110; the swinging connecting rod 150, the swinging connecting rod 150 is connected with the rotating component 200; a cassette 120, the cassette 120 being connected to a rotating assembly 200, the rotating assembly 200 including: a rotating transmission member 220; the rotating plate 210, the rotating plate 210 is connected with the rotating part far away from the driving shaft 110, and the rotating plate 210 is provided with a first notch 213; the rotating transmission member 220 passes through the first notch 213 and is connected to the first transmission end.
The driving shaft 110 is vertically arranged, the first transmission end is located at the lowermost end of the driving shaft 110, the rotary transmission part 220 is located at the lowermost end of the rotating assembly 200 and is fixedly connected with the driving shaft 110 through screws, the rotary transmission part is inclined relative to the driving shaft 110, the swing connecting rods 150 are L-shaped, the swing connecting rods 150 are two in number and are respectively located at two opposite sides of the driving shaft 110, a longer section of the rotary transmission part is fixed to the driving shaft 110, a shorter section of the rotary transmission part is fixed to a through hole in the rotary transmission part 220, an opening is formed in one side, away from the rotating plate 210, of the crystal box 120, and a wafer needing to be cleaned is placed inside the opening.
When the crystal box 120 needs to rotate, the driving shaft 110 is driven to lift in the vertical direction, in the lifting process, the height of the first transmission end is changed, the rotary transmission piece 220 rotates downwards relative to the driving shaft 110, the rotary plate 210 moves along with the rotary transmission piece 220, the crystal box 120 rotates downwards under the action of the rotary plate 210, the cleaning liquid is positioned below the crystal box 120, in the rotating process, the crystal box 120 gradually enters the cleaning liquid, the angle between the rotary plate 210 and the driving shaft 110 is gradually increased, when one end of the rotary transmission piece 220 is parallel to the swinging connecting rod 150, the driving shaft 110 reaches the maximum value of the lifting, the rotary plate 210 is in the horizontal state, at the moment, the driving shaft 110 cannot continue to move upwards, the length of the swinging connecting rod 150 plays a limiting role, after the cleaning work is completed, the driving shaft 110 is controlled to descend, the crystal box 120 is separated from the cleaning liquid, and then the round crystals in the crystal box 120 are taken away, and putting a new round crystal to be cleaned, and carrying out the next cleaning operation.
In the related art, when the rotation of the rotating plate 210 is controlled, the rotating plate 210 is likely to rotate excessively or insufficiently, so that the rotating plate 210 cannot be in a horizontal position, and when the pod 120 is lowered into the cleaning solution, part of the positions cannot be cleaned effectively, and glue solution residue occurs.
The arrangement of the rotating transmission member 220 converts the vertical movement of the device into the rotation of the rotating plate 210, the arrangement of the swing link 150 controls the rotation amplitude of the rotating plate 210, so that the rotating plate 210 can accurately stay at the horizontal position when the driving shaft 110 rises to the highest point, and the cleaning of the cassette 120 becomes more convenient.
[ second embodiment ] A
Referring to fig. 2, 5, in one particular embodiment, the rotary drive 220 comprises: the first transmission section 221, the first transmission section 221 is attached to the rotating plate 210; the second transmission section 222 is obliquely arranged relative to the driving shaft 110 and is fixedly connected with the swinging connecting rod 150, a second notch 224 is formed in the second transmission section 222, and the driving shaft 110 is connected with the second transmission section 222 through the second notch 224; the avoiding groove 223 is formed at the joint of the first transmission section 221 and the second transmission section 222.
The left side and the right side of the second transmission section 222 are symmetrically arranged, the left side and the right side of the swing connecting rod 150 are respectively fixed with one swing connecting rod 150, the left side and the right side of the second transmission section 222 are uniformly stressed, when the driving shaft 110 ascends, the second transmission section 222 integrally ascends, the connecting point of the second transmission section 222 and the swing connecting rod 150 takes the fixed point at the other end of the swing connecting rod 150 as the center of a circle, the length of the swing connecting rod 150 as the radius to move upwards, the moving distance in the vertical direction is smaller than the ascending distance of the driving shaft 110, meanwhile, the first transmission section 221 rotates downwards and drives the rotating plate 210 to rotate, when the first rotation section rotates to be horizontal to the swing connecting rod 150, the driving shaft 110 cannot continuously ascend, and at the moment, the second transmission section 222 and the rotating plate 210 are both in the horizontal state.
The setting of first transmission section 221 lets the rising of driving shaft 110 can drive rotating transmission spare 220, the setting of second breach 224 lets driving shaft 110 be connected more firmly with first transmission section 221, the setting that second transmission section 222 and first transmission section 221 buckle to be connected can drive second transmission section 222 and rotate downwards when letting first transmission section 221 rise, dodge the setting of groove 223 and can avoid rotor plate 210 to rotate the in-process and contact with first transmission section 221.
[ third embodiment ]
Referring to fig. 3, in one particular embodiment, the rotating plate 210 includes: a first mounting position 211, on which the cassette 120 is disposed, is provided on the first mounting position 211; a second mounting position 212, wherein the second mounting position 212 is provided with a crystal box 120; the connecting section 214, the connecting section 214 connects the first mounting position 211 and the second mounting position 212, and the first transmission section 221 is fixedly connected with the connecting section 214.
The first installation position 211 and the second installation position 212 are respectively located on the left side and the right side of the rotating plate 210, the connecting section 214 is located right above the middle position of the rotating plate 210, the first notch 213 is arranged below the connecting section 214, the second transmission section 222 is attached to the connecting section 214, the first transmission section 221 inclines relative to the second transmission section 222 and penetrates through the first notch 213 to be connected with the driving shaft 110, the first installation position 211 and the second installation position 212 are both provided with the crystal box 120, and the crystal box 120 rotates along with the rotating plate 210.
Preferably, the first mounting position 211 and the second mounting position 212 can be used for placing cassettes 120 with different sizes for placing wafers with different sizes.
The arrangement of the first mounting position 211 on the second mounting position 212 allows the rotating plate 210 to simultaneously drive the plurality of cassettes 120 to rotate, and when the number of cassettes 120 is increased, the openings of the plurality of cassettes 120 are simultaneously and horizontally downward, so that the residue of wafer adhesive is reduced.
[ fourth example ] A
In a particular embodiment, cassette flipping assembly 100 further comprises: the distance-increasing section 160 is arranged between the rotating plate 210 and the crystal box 120, and the distance-increasing section 160 is arranged on each of the first mounting position 211 and the second mounting position 212.
The distance-increasing section 160 is a U-shaped cushion block, the distance-increasing section 160 is arranged between the crystal box 120 and the rotating plate 210, two distance-increasing sections 160 are arranged on the first installation position 211, the distance-increasing sections 160 are positioned on the left side and the right side of the crystal box 120, the length of the distance-increasing section 160 is matched with that of the crystal box 120, the structure of the distance-increasing section 160 on the second installation position 212 is consistent with that on the first installation position 211, and it needs to be noted that when the size of the crystal box 120 is changed, the length of the distance-increasing section 160 is also correspondingly adjusted.
In the process that the rotating plate 210 rotates, the whole crystal box 120 gradually moves towards the direction of the cleaning solution, the distance between the crystal box 120 and the rotating plate 210 can be increased by the arrangement of the distance increasing section 160, and when the whole crystal box 120 enters the cleaning solution, the rotating plate 210 cannot enter the cleaning solution due to the arrangement of the distance increasing section 160.
Preferably, the distance-increasing section 160 may be made of a metal material, and the thickness of the distance-increasing section 160 may also be adjusted according to the distance from the rotating plate 210 to the cleaning solution after rotation.
The distance between the rotating plate 210 and the crystal box 120 is increased due to the arrangement of the distance-increasing section 160, the contact between the rotating plate 210 and the cleaning liquid is avoided, the service life of the rotating plate 210 is prolonged, the crystal box 120 is more convenient to disassemble, the overall weight of the distance-increasing section 160 is reduced due to the arrangement of the U-shaped distance-increasing section 160, and the resistance is smaller when the distance-increasing section 160 rotates.
[ fifth embodiment ]
Referring to FIG. 6, in one particular embodiment, the cassette flipping assembly 100 further comprises: a connecting assembly 130, the connecting assembly 130 is sleeved outside the driving shaft 110 and connected with the swing link 150; the fixing member 230, the fixing member 230 passes through the second transmission section 222 to fix the swing link 150.
The connecting assembly 130 comprises a connecting sleeve and a connecting table 132, the connecting table 132 is located on one side of the connecting sleeve close to the first transmission end, one end of the swing connecting rod 150 is fixedly connected with the connecting table 132, the connecting sleeve is sleeved outside the driving shaft 110 and plays a role in protecting the driving shaft 110, the fixing piece 230 penetrates through a through hole in the middle of the second transmission section 222, two screw mounting positions are arranged on the fixing piece 230, after the through hole is penetrated, the fixing piece is fixed with the second transmission section 222 through screws, the swing connecting rods 150 on the left side and the right side move synchronously, and the force on the left side and the right side of the rotating plate 210 is ensured to be consistent.
In the process of ascending the driving shaft 110, the position of the connecting platform 132 is not changed, one end of the swinging connecting rod 150 is fixed, one end connected with the second transmission section 222 moves upwards along an arc track in the ascending process, when the second transmission section 222 is parallel to the swinging connecting rod 150, the fixed end on the connecting platform 132 plays a role of limiting, the second transmission section 222 is prevented from continuously moving upwards,
the connecting assembly 130 limits the second transmission section 222, and the fixing member 230 allows the swing links 150 on two sides to rotate simultaneously, so as to further limit the rotation direction of the rotating plate 210.
[ sixth embodiment ]
Referring to FIG. 7, in one particular embodiment, cassette flipping assembly 100 further comprises: and the driving device 300, the driving device 300 is connected with the other end of the driving shaft 110 opposite to the first transmission end, and the mounting sleeve 131 is connected with the driving device 300 and fixed through the flange 140.
When the driving shaft 110 needs to be raised or lowered, the flange 140 is provided to make the connection of the mounting sleeve 131 more stable by actuating the driving means 300 to power the movement of the driving shaft 110.
[ seventh example ]
In a particular embodiment, the pod 120 includes: a cassette 120 body; the wafer clamping groove is formed in the inner wall of the wafer box 120 body; at least one wafer support rod is connected to the side of the main body of the cassette 120 away from the first transmission end.
The inner wall of the main body of the wafer box 120 is provided with wafer slots, the wafer slots are located at two opposite sides of the main body of the wafer box 120 and are distributed along the height direction of the main body of the wafer box 120, and the two opposite wafer slots are used for placing the same wafer; the wafer support rod is connected to one side of the main body of the wafer box 120, which is far away from the rotating side, and when the wafer box 120 rotates, the wafer support rod can support the wafer.
The wafer support rod is provided with a plurality of wafer clamping grooves along the height direction, and the wafer support rod corresponds to the wafer clamping grooves on the inner wall of the wafer box 120 body, so that the wafer can be prevented from being deviated in the rotating process.
The wafer supporting rod can play a role in supporting the round crystal in the rotating process, the round crystal is prevented from falling off from the crystal box 120 body, the round crystal can be clamped in the clamping groove due to the arrangement of the wafer clamping groove, the round crystal is prevented from offsetting in the rotating process, a plurality of round crystals can be placed in one crystal box 120 body, and the cleaning quantity is increased.
[ eighth embodiment ]
In a specific embodiment, the method further comprises the following steps: the utility model provides a steeping vat 310, steeping vat 310 includes steeping vat 310 casing, and spool box upset subassembly 100 is located in steeping vat 310 casing, this spool box upset subassembly 100 has the whole technical characterstic of above-mentioned spool box upset subassembly 100, and the no longer repeated description here.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected by one skilled in the art without departing from the spirit and scope of the invention, as defined in the appended claims.
Claims (10)
1. The utility model provides a wafer cassette upset subassembly, its characterized in that, wafer cassette upset subassembly includes:
the driving shaft is provided with a first transmission end;
the rotating assembly is fixedly connected with the first transmission end and is obliquely arranged relative to the driving shaft;
the swinging connecting rod is connected with the rotating assembly;
and the crystal box is connected with the rotating assembly.
2. The cassette flipping assembly of claim 1, wherein the rotation assembly comprises:
rotating the transmission member;
the side, far away from the driving shaft, of the rotating plate is connected with the rotating transmission part, and a first notch is formed in the rotating plate;
wherein, the rotating transmission part passes through the first notch and is connected with the first transmission end.
3. The cassette flipping assembly of claim 2, wherein the rotary drive comprises:
the first transmission section is attached to the rotating plate;
the second transmission section is obliquely arranged relative to the driving shaft and is fixedly connected with the swing connecting rod, a second notch is formed in the second transmission section, and the driving shaft is connected with the second transmission section through the second notch;
and the avoidance groove is arranged at the joint of the first transmission section and the second transmission section.
4. A cassette flipping assembly of claim 3, wherein the rotation plate comprises:
the first mounting position is provided with the crystal box;
the second mounting position is provided with the crystal box;
the connecting section is connected with the first installation position and the second installation position, and the first transmission section is fixedly connected with the connecting section;
the first installation position, the second installation position and the connecting section surround to form the first notch.
5. The cassette flipping assembly of claim 4, further comprising:
the distance-increasing section is arranged between the rotating plate and the crystal box, and the first installation position and the second installation position are both provided with the distance-increasing section.
6. The cassette flipping assembly of claim 4, further comprising:
the connecting assembly is sleeved outside the driving shaft and is connected with the swinging connecting rod;
and the fixing piece penetrates through the second transmission section to fix the swinging connecting rod.
7. The cassette flipping assembly of claim 6, wherein the connecting assembly comprises:
the mounting sleeve is sleeved outside the driving shaft;
and the connecting platform is connected with the swinging connecting rod.
8. The cassette flipping assembly of claim 7, further comprising:
the driving device is connected with the other end, opposite to the first transmission end, of the driving shaft, and the mounting sleeve is connected with the driving device and fixed through a flange.
9. A cassette flip assembly as in any of claims 1-8 wherein the cassette comprises:
a cassette body;
the wafer clamping groove is formed in the inner wall of the crystal box body;
the wafer supporting rod is provided with at least one, and the wafer supporting rod is connected with one side, far away from the first transmission end, of the crystal box body.
10. A steeping cistern, characterized by comprising:
a soaking pool shell;
the cartridge flipping assembly of any one of claims 1 to 9, located within the soaking pool housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221142997.0U CN217387096U (en) | 2022-05-12 | 2022-05-12 | Box for chip overturning assembly and soaking pool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221142997.0U CN217387096U (en) | 2022-05-12 | 2022-05-12 | Box for chip overturning assembly and soaking pool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217387096U true CN217387096U (en) | 2022-09-06 |
Family
ID=83086395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221142997.0U Active CN217387096U (en) | 2022-05-12 | 2022-05-12 | Box for chip overturning assembly and soaking pool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217387096U (en) |
-
2022
- 2022-05-12 CN CN202221142997.0U patent/CN217387096U/en active Active
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