CN217378090U - Quartz guide cylinder for single crystal furnace - Google Patents
Quartz guide cylinder for single crystal furnace Download PDFInfo
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- CN217378090U CN217378090U CN202220383783.6U CN202220383783U CN217378090U CN 217378090 U CN217378090 U CN 217378090U CN 202220383783 U CN202220383783 U CN 202220383783U CN 217378090 U CN217378090 U CN 217378090U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model belongs to the technical field of monocrystalline silicon production, and particularly discloses a quartz guide cylinder for a monocrystalline furnace, which comprises an inner guide cylinder and an outer guide cylinder; the inner guide cylinder is of an inverted cone-shaped cylindrical quartz structure, and a guide cylinder tray is arranged at the bottom of the inner guide cylinder; the top of the guide shell tray is fixedly connected with the bottom of the inner guide shell; the outer guide cylinder is sleeved outside the inner guide cylinder and is coaxially arranged with the inner guide cylinder; the outer guide cylinder and the inner guide cylinder are both provided with an outward-turned supporting outer edge which is formed with the cylinder body in one step, and the supporting outer edge of the outer guide cylinder is fixedly connected with the supporting outer edge of the inner guide cylinder; the bottom of the outer draft tube is fixedly connected with the bottom of the flow tube tray; the heat preservation felt is densely filled between the inner guide cylinder and the outer guide cylinder. The utility model discloses change traditional graphite inner guide shell for guide shell in the quartzy to including the guide shell bottom has set up the connection of guide shell tray realization inner and outer guide shell, increased the space between the inner and outer guide shell, reinforcing heat preservation effect.
Description
Technical Field
The utility model belongs to the technical field of monocrystalline silicon production, in particular to quartz draft tube for single crystal growing furnace.
Background
In the thermal field structure of the Czochralski single crystal furnace, the guide cylinder mainly plays a role in controlling the temperature gradient of the thermal field and the steady flow of the gas field. The graphite carbon felt is sandwiched between an inner guide cylinder and an outer guide cylinder. The inner and outer guide cylinders are made of isostatic pressing graphite, and the material is applied to the thermal field and has the defects that: 1, a certain amount of impurities exist in the furnace, and volatile matters generated in a high-temperature state of a thermal field have great influence on the production of single crystals in the furnace; 2, the toughness and the oxidation resistance are poor at high temperature; 3 poor heat insulating property, and influences the control of the temperature gradient of the thermal field. And the interval between the existing inner guide cylinder and the outer guide cylinder is limited, so that the wall thickness of the heat-insulating layer is small, and the heat-insulating effect is not ideal.
Therefore, it is an urgent technical problem to be solved by those skilled in the art to provide a new quartz guide cylinder for a single crystal furnace.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the defect of poor heat preservation effect of the draft tube in the prior art and provide a quartz draft tube for a single crystal furnace.
The utility model provides a quartz guide cylinder for a single crystal furnace, which comprises an inner guide cylinder and an outer guide cylinder;
the inner guide cylinder is of an inverted cone-shaped cylindrical quartz structure, and a guide cylinder tray is arranged at the bottom of the inner guide cylinder; the top of the guide shell tray is fixedly connected with the bottom of the inner guide shell;
the outer guide cylinder is sleeved outside the inner guide cylinder and is coaxially arranged with the inner guide cylinder;
the outer guide cylinder and the inner guide cylinder are both provided with an outward-turned supporting outer edge which is formed with the cylinder body in one step, and the supporting outer edge of the outer guide cylinder is fixedly connected with the supporting outer edge of the inner guide cylinder;
the bottom of the outer draft tube is fixedly connected with the bottom of the draft tube tray;
the heat preservation felt is densely filled between the inner guide cylinder and the outer guide cylinder.
The further scheme is that the inner guide cylinder comprises a first straight cylinder and a first conical cylinder, the first straight cylinder is positioned at the top of the first conical cylinder, the first straight cylinder and the first conical cylinder are integrally formed, and the height of the first straight cylinder is 1/3 of the height of the first conical cylinder.
The further scheme is that the outer guide cylinder comprises a second straight cylinder and a second conical cylinder, the second straight cylinder is located at the top of the second conical cylinder, the second straight cylinder and the second conical cylinder are integrally formed, and the height of the second straight cylinder is 3 times of that of the second conical cylinder.
The further scheme is that the height of the inner guide cylinder is larger than that of the outer guide cylinder, and the support extension width of the inner guide cylinder is larger than that of the outer guide cylinder.
The further proposal is that the vertical section of the guide shell tray is in an inverted cone shape, and the included angle between the guide shell tray and the horizontal plane is 30 degrees.
The further proposal is that the included angle between the first straight cylinder and the first conical cylinder is 115 degrees and 125 degrees.
The further proposal is that the included angle between the second straight cylinder and the second conical cylinder is 115-125 degrees.
The further proposal is that the outer draft tube is a graphite outer draft tube, and the heat preservation felt is a graphite heat preservation carbon felt.
Compared with the prior art, the beneficial effects of the utility model reside in that:
the utility model discloses change guide shell in the quartz with guide shell in traditional graphite to including the guide shell bottom has set up the connection of guide shell tray realization interior outer guide shell, increased the space between the interior outer guide shell, through the straight tube part individual of interior outer guide shell and the limited of awl section of thick bamboo part and awl section of thick bamboo part contained angle with the limited of awl section of thick bamboo part height, further increased the space of guide shell bottom, and then can realize having increased the thickness of heat preservation felt, reinforcing heat preservation effect. And the connecting pieces of the guide cylinder and the inner and outer guide cylinders are separately processed, so that the processing difficulty is reduced, the processing period is shortened, and compared with the traditional graphite guide cylinder, the high-temperature oxidation resistance and the heat preservation performance are obviously improved, and the improvement of the production quality and the yield of the single crystal is more facilitated.
Drawings
The following drawings are merely illustrative of and explanatory of the invention and are not intended to limit the scope of the invention, wherein:
FIG. 1: the utility model has a schematic structure;
FIG. 2: the structure schematic diagram of the guide shell tray;
FIG. 3: the structure schematic diagram of the inner draft tube;
FIG. 4 is a schematic view of: the structure schematic diagram of the outer guide cylinder;
in the figure: 1. an inner draft tube; 2. an outer draft tube; 3. a heat preservation felt; 4. a draft tube tray; 5. a first straight cylinder; 6. a first cone; 7. a second straight cylinder; 8. and a second cone.
Detailed Description
In order to make the objects, technical solutions, design methods, and advantages of the present invention more apparent, the present invention will be described in detail by specific embodiments with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
As shown in fig. 1 and fig. 2, the utility model provides a quartz guide cylinder for a single crystal furnace, which comprises an inner guide cylinder 1 and an outer guide cylinder 2; the inner guide cylinder 1 is of an inverted cone-shaped cylindrical quartz structure, and a guide cylinder tray 4 is arranged at the bottom of the inner guide cylinder; the top of the guide shell tray 4 is fixedly connected with the bottom of the inner guide shell 1; the outer guide cylinder 2 is sleeved outside the inner guide cylinder 1 and is coaxially arranged with the inner guide cylinder 1; the outer guide cylinder 2 and the inner guide cylinder 1 are both provided with an outward-turned supporting outer edge which is formed with the cylinder body in one step, and the supporting outer edge of the outer guide cylinder 2 is fixedly connected with the supporting outer edge of the inner guide cylinder 1; the bottom of the outer guide cylinder 2 is fixedly connected with the bottom of the guide cylinder tray; and a heat insulation felt 3 is densely filled between the inner guide cylinder 1 and the outer guide cylinder 2. The outer guide cylinder 2 is a graphite outer guide cylinder 2, and the heat preservation felt 3 is a graphite heat preservation carbon felt.
In order to further increase the gap between the inner guide cylinder 1 and the outer guide cylinder 2, the inner guide cylinder 1 is divided into a first straight cylinder 5 and a first conical cylinder 6, the first straight cylinder 5 is located at the top of the first conical cylinder 6, the first straight cylinder 5 and the first conical cylinder 6 are integrally formed, and the height of the first straight cylinder 5 is 1/3 of the height of the first conical cylinder 6. Will outer draft tube 2 divide into second straight section of thick bamboo 7 and second taper section of thick bamboo 8, second straight section of thick bamboo 7 is located second taper section of thick bamboo 8 top, second straight section of thick bamboo 7 with second taper section of thick bamboo 8 integrated into one piece, the height of second straight section of thick bamboo 7 does 3 times of second taper section of thick bamboo 8 height, the vertical cross-section of draft tube tray 4 is the back taper, draft tube tray 4 is 30 with horizontal angle, the contained angle of first straight section of thick bamboo 5 and first taper section of thick bamboo 6 is 120, the contained angle of second straight section of thick bamboo 7 and second taper section of thick bamboo 8 is 120. It should be understood that the height of the inner guide shell is greater than the height of the outer guide shell, and the supporting extension width of the inner guide shell is greater than the supporting extension width of the outer guide shell. Under the structure, the heat preservation felt 3 is of a structure with a thin upper part and a thick lower part, so that the formation of the longitudinal temperature of the thermal field in the inner guide cylinder 1 is promoted, and the isodiametric growth speed of crystals is improved.
While various embodiments of the present invention have been described above, the above description is intended to be illustrative, not exhaustive, and not limited to the disclosed embodiments. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (8)
1. A quartz draft tube for a single crystal furnace is characterized by comprising an inner draft tube and an outer draft tube;
the inner guide cylinder is of an inverted cone-shaped cylindrical quartz structure, and a guide cylinder tray is arranged at the bottom of the inner guide cylinder; the top of the guide cylinder tray is fixedly connected with the bottom of the inner guide cylinder;
the outer guide cylinder is sleeved outside the inner guide cylinder and is coaxially arranged with the inner guide cylinder;
the outer guide cylinder and the inner guide cylinder are both provided with outward-turned supporting outer edges which are formed with the cylinder body in one step, and the supporting outer edges of the outer guide cylinder and the inner guide cylinder are fixedly connected;
the bottom of the outer guide cylinder is fixedly connected with the bottom of the guide cylinder tray;
and a heat insulation felt is densely filled between the inner guide cylinder and the outer guide cylinder.
2. The quartz guide cylinder for the single crystal furnace according to claim 1, wherein the inner guide cylinder comprises a first straight cylinder and a first conical cylinder, the first straight cylinder is positioned at the top of the first conical cylinder, the first straight cylinder and the first conical cylinder are integrally formed, and the height of the first straight cylinder is 1/3 of the height of the first conical cylinder.
3. The quartz guide cylinder for the single crystal furnace according to claim 2, wherein the outer guide cylinder comprises a second straight cylinder and a second conical cylinder, the second straight cylinder is located at the top of the second conical cylinder, the second straight cylinder and the second conical cylinder are integrally formed, and the height of the second straight cylinder is 3 times of the height of the second conical cylinder.
4. The quartz guide cylinder for the single crystal furnace according to claim 3, wherein the height of the inner guide cylinder is greater than that of the outer guide cylinder, and the support extension width of the inner guide cylinder is greater than that of the outer guide cylinder.
5. The quartz guide cylinder for the single crystal furnace according to claim 1, wherein the vertical section of the guide cylinder tray is in an inverted cone shape, and the included angle between the inclined plane of the guide cylinder tray and the horizontal plane is 30 degrees.
6. The quartz guide cylinder for a single crystal furnace as set forth in claim 3, wherein the angle between the first straight cylinder and the first conical cylinder is 115-125 °.
7. The quartz guide cylinder for a single crystal furnace as set forth in claim 3, wherein the angle between the second straight cylinder and the second conical cylinder is 115-125 °.
8. The quartz guide cylinder for the single crystal furnace according to claim 1, wherein the outer guide cylinder is a graphite outer guide cylinder, and the heat preservation felt is a graphite heat preservation carbon felt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220383783.6U CN217378090U (en) | 2022-02-24 | 2022-02-24 | Quartz guide cylinder for single crystal furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220383783.6U CN217378090U (en) | 2022-02-24 | 2022-02-24 | Quartz guide cylinder for single crystal furnace |
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| Publication Number | Publication Date |
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| CN217378090U true CN217378090U (en) | 2022-09-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202220383783.6U Active CN217378090U (en) | 2022-02-24 | 2022-02-24 | Quartz guide cylinder for single crystal furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116219532A (en) * | 2023-05-08 | 2023-06-06 | 苏州晨晖智能设备有限公司 | Guide cylinder for single crystal furnace, preparation method and single crystal furnace |
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2022
- 2022-02-24 CN CN202220383783.6U patent/CN217378090U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116219532A (en) * | 2023-05-08 | 2023-06-06 | 苏州晨晖智能设备有限公司 | Guide cylinder for single crystal furnace, preparation method and single crystal furnace |
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