CN217361530U - Material feeding unit is used in wafer processing - Google Patents

Abstract

The utility model relates to a material feeding unit is used in wafer processing, including unable adjustment base, arm, clamping jaw unit and power pack, power pack installs on unable adjustment base, and power pack includes arm rotary mechanism and clamping jaw rotary mechanism along the positive direction of X axle in proper order. The utility model relates to a material feeding unit is used in wafer processing, arm, clamping jaw unit and power pack's structure setting, the convenience is carried out business turn over material to the wafer box and is handled, and degree of automation is higher, improves machining efficiency.

Description

Material feeding unit is used in wafer processing

Technical Field

The utility model relates to a wafer processing correlation technique field especially relates to a material feeding unit for wafer processing.

Background

A wafer is a very expensive product that must be protected from damage during placement. The wafer cassette is a device for loading wafers and sapphire in the industry. The wafer box is usually manually taken in the feeding and discharging process, and the feeding and discharging operation mode has the advantages of lower automation degree and lower working efficiency.

In view of the above-mentioned defects, the present inventors have made active research and innovation to create a feeding device for wafer processing, which has industrial application value.

SUMMERY OF THE UTILITY MODEL

In order to solve the above technical problem, the present invention provides a feeding device for wafer processing.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a feeding device for wafer processing comprises a fixed base, a mechanical arm, a clamping jaw unit and a power unit, wherein the power unit is arranged on the fixed base and sequentially comprises a mechanical arm rotating mechanism and a clamping jaw rotating mechanism along the positive direction of an X axis;

the mechanical arm comprises a mechanical arm shell, a first arm transmission chain wheel and a second arm transmission chain wheel are sequentially arranged in the mechanical arm shell from top to bottom, and the first arm transmission chain wheel is connected with the second arm transmission chain wheel through an arm transmission chain;

the mechanical arm rotating mechanism comprises a first motor, a speed reducer and a mandrel, the first motor is installed on the fixed base through a supporting bottom block, a driving end of the first motor on one side of the positive direction of the X axis is connected with a first synchronous belt wheel on the upper side in a driving mode sequentially through a first driving belt wheel and a first synchronous belt, the first synchronous belt wheel is connected with the mandrel on the inner side of the first motor along the X axis direction, the mandrel is installed in the speed reducer along the X axis direction, and one side of the mandrel along the negative direction of the X axis is connected with the bottom of the mechanical arm shell;

the clamping jaw rotating mechanism comprises a second motor and a chain wheel shaft, the second motor is installed on the fixed base through a protective cover, the driving end of one side of the second motor along the Y-axis negative direction is sequentially connected with a second synchronous belt wheel and a second synchronous belt wheel in a driving mode, the second synchronous belt wheel is connected with a first worm in a first worm seat along one side of the Y-axis positive direction, the first worm is arranged along the Y-axis direction and connected with a first worm wheel above, the first worm wheel is connected with the chain wheel shaft arranged along the X-axis direction, and one side of the chain wheel shaft along the X-axis negative direction penetrates through the mandrel and then is connected with a first arm transmission chain wheel;

the clamping jaw box comprises a clamping jaw box body, wherein the top and the bottom of the clamping jaw box body are respectively provided with an upper cover and a lower cover, a pressing mechanism and a clamping jaw driving mechanism are sequentially arranged in a clamping jaw box cavity of the clamping jaw box body along the positive direction of a Y axis, a second arm transmission chain wheel is connected with a clamping jaw connecting block, and the clamping jaw connecting block is connected with the pressing mechanism through a clamping jaw connecting shaft;

the clamping jaw driving mechanism comprises a clamping jaw, a clamping jaw motor, a second worm seat, a second worm and a second worm wheel, the clamping jaw motor is installed on the second worm seat through the motor seat, a driving end of one side of the clamping jaw motor along the positive direction of an X axis is in driving connection with the second worm in the second worm seat along the direction of the X axis, the second worm is connected with the second worm wheel along one side of the negative direction of the Y axis, clamping jaw fixing shafts are respectively arranged on two sides of the bottom of the second worm wheel, clamping jaws are respectively arranged in the middle positions of two sides of the clamping jaw box body along the direction of the X axis, the inner sides of the clamping jaws are installed on a clamping jaw arm installation block in the clamping jaw box body through clamping jaw arms, the clamping jaw arms are hinged with the clamping jaw arm installation block, the clamping jaw fixing shafts are connected with a first side of a connecting rod, a second side of the connecting rod is connected with a clamping jaw connecting arm, and the clamping jaw connecting arm is connected with the bottom of the inner side of the clamping jaw arm, a clamping jaw limiting block is arranged on the lower cover on the inner side of the bottom of the clamping jaw;

the mechanism that pushes down includes two sets of subassemblies that push down that set up side by side along the X axle direction, the subassembly that pushes down is including pushing down the grudging post, push down the swing arm and push down the connecting block, it has down two swing arms to have set gradually from last on the grudging post to push down, and two swing arms that push down are located the top and the below of clamping jaw connecting axle respectively, it is connected with the grudging post that pushes down through the round pin axle along one side of Y axle negative direction to push down the swing arm, it is connected with the connecting block that pushes down through the round pin axle along one side in Y axle positive direction to push down the swing arm, the clamping jaw connecting axle passes two connecting blocks that push down in proper order along the X axle direction, and the clamping jaw connecting axle links together with the connecting block that pushes down through the anticollision pin.

As a further improvement, the outside of first synchronous pulley is provided with fixing chuck, the outside of reduction gear is provided with the reduction gear shell, fixing chuck installs on the reduction gear shell, the dabber is connected with fixing chuck through first bearing along one side in X axle positive direction, fixing chuck is provided with first position board along one side in X axle positive direction, the dabber has set gradually first response piece along the positive direction of X axle after passing fixing chuck, second response piece and third response piece, first response piece, all be provided with first response piece on second response piece and the third response piece, be provided with on the first position board three respectively with first response piece, first response piece complex first inductor on second response piece and the third response piece.

As a further improvement, the first worm wheel is provided with the second position board along one side in X axle positive direction, first worm wheel is connected with the second position board through first bearing, first worm wheel has set gradually fourth response piece and fifth response piece along the positive direction of X axle after passing the second position board, all be provided with the second on fourth response piece and the fifth response piece and respond to the piece, be provided with on the second position board two respectively with fourth response piece and the fifth response piece on the second response piece respond to the piece matched with second inductor.

As a further improvement, the tensioning wheel which plays the tensioning role for the arm transmission chain is arranged in the arm shell, and the tensioning wheel is arranged in the arm shell through the tensioning installation block.

As a further improvement, the top of second worm gear seat still is provided with the bearing mounting panel, and the bearing mounting panel passes through the column mouting and covers under, and the top of second worm gear is connected and is provided with the worm wheel dish, and the top of worm wheel dish is connected with the bearing mounting panel through the second bearing, and the bottom of worm wheel dish is connected with the lower cover through the third bearing.

As a further improvement, the worm wheel disc is provided with a third induction sheet, the bearing mounting plate is provided with a first inductor mounting plate, and the first inductor mounting plate is provided with third induction sheet-matched third inductors along the two sides of the X-axis direction.

As a further improvement, the clamping jaw arm is provided with a fourth induction sheet along one side of the Y-axis direction, and a fourth inductor matched with the fourth induction sheet is arranged on the lower cover of one side of the clamping jaw arm.

As a further improvement, the bottom inner side of the clamping jaw arm is also connected and provided with a tension spring, the tension spring is connected with the bearing mounting plate, and the spring is arranged between the bottom of the pressing connecting block and the lower cover.

As a further improvement, the clamping jaw connecting axle is provided with down to push down the stopper along covering under Y axle negative direction one side, pushes down the stopper and is located two and pushes down between the connecting block, has seted up down along Y axle direction in pushing down the stopper and has pushed down the spacing groove, and the clamping jaw connecting axle is connected with pushing down the spacing groove through pushing down spacing post.

As a further improvement, the inboard of pushing down the connecting block is provided with the fifth response piece, covers under between two fifth response pieces and is provided with the second inductor mounting panel, all is provided with the fifth inductor of mutually supporting with the fifth response piece along the both sides of X axle direction on the second inductor mounting panel.

Borrow by above-mentioned scheme, the utility model discloses at least, have following advantage:

the utility model relates to a feeding device for wafer processing, the structure of mechanical arm, clamping jaw unit and power unit is set up, conveniently carries out the processing of business turn over material to the wafer box, and degree of automation is higher, improves machining efficiency; the wafer clamping device has the advantages that the rotation operation of the mechanical arm can be realized through the mechanical arm rotation mechanism, the rotation operation of the clamping jaw can be realized through the clamping jaw rotation mechanism, the use is convenient, the operation is simple, the clamping operation of the wafer box can be realized through the clamping jaw driving mechanism of the clamping jaw box body in the clamping jaw unit, the structure arrangement is reasonable, the operation is simple, and the use is convenient; the pressing-down processing of the clamping jaw box body to a certain degree can be realized through the pressing-down mechanism, and the clamping operation is convenient.

The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on these drawings without inventive efforts.

Fig. 1 is a schematic structural view of a power clamping jaw device for wafer processing according to the present invention;

FIG. 2 is a schematic view of the structure of FIG. 1 with the shield removed;

FIG. 3 is a schematic view of the structure of FIG. 2 with the support shoe and the retarder housing removed;

FIG. 4 is a schematic view of the internal structure of the robot arm shown in FIGS. 1 to 3;

FIG. 5 is a schematic structural diagram of the arm rotation mechanism of FIG. 3;

FIG. 6 is a front view of FIG. 5;

FIG. 7 is a schematic structural view of the jaw rotation mechanism of FIG. 3;

FIG. 8 is a schematic view of the structure of FIG. 7 with the first worm seat removed;

FIG. 9 is a schematic view of the structure on the other side of FIG. 8;

FIG. 10 is a schematic view of the construction of the jaw unit of FIG. 1;

FIG. 11 is a top view of FIG. 10 with the cover removed;

FIG. 12 is a bottom view of FIG. 10 with the lower cover removed;

fig. 13 is a schematic view of the structure of the pressing mechanism in fig. 11 or 12.

In the drawings, the meanings of the reference numerals are as follows.

1 fixed base 2 shield

3 support bottom block 4 speed reducer shell

5 arm 6 clamping jaw connecting block

7 clamping jaw unit 8 power unit

9 fixed chuck 10 mechanical arm rotating mechanism

11 clamping jaw rotary mechanism 12 mechanical arm shell

13 first arm drive sprocket 14 rises and tightly installs piece

15 tensioning wheel 16 arm transmission chain

17 second arm drive sprocket 18 first motor

19 primary pulley 20 primary timing belt

21 speed reducer 22 first synchronous pulley

23 first bearing 24 first position plate

25 first induction block 26 second induction block

27 third induction block 28 mandrel

29 first sensing piece 30 first sensor

31 second electric motor 32 second synchronous pulley

33 sprocket shaft 34 first worm wheel

35 second position plate 36 first worm seat

37 second timing belt 38 first worm

39 fourth sensing block 40 fifth sensing block

41 second sensing piece 42 second sensor

701 jaw box body 702 jaw box cavity

703 upper cover 704 lower cover

705 clamping jaw 706 clamping jaw limiting block

707 clamping jaw connecting shaft 708 pressing mechanism

709 jaw arm 710 jaw arm mounting block

711 jaw connecting arm 712 jaw motor

713 tension spring 714 motor base

715 second worm mount 716 bearing mounting plate

717 second worm 718 second worm wheel

719 first inductor mounting plate 720 upright post

721 third sensing piece 722 second bearing

723 Worm wheel 724 third inductor

725 fourth inductor 726 fourth induction patch

727 connecting rod 728 connecting rod

729 third bearing 730 jaw fixing shaft

731 pushes down grudging post 732 and pushes down the swing arm

733 push down connection block 734 anti-collision pin

735 pushes down stopper 736 and pushes down spacing post

737 push-down limiting groove 738 second inductor mounting plate

739 fifth inductor 740 fifth inductor piece

741 spring

Detailed Description

The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

In order to make the technical solution of the present invention better understood, the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by those skilled in the art without creative efforts belong to the protection scope of the present invention.

Examples

As shown in figures 1 to 13 of the drawings,

a feeding device for wafer processing comprises a fixed base 1, a mechanical arm 5, a clamping jaw unit 7 and a power unit 8, wherein the power unit 8 is installed on the fixed base 1, and the power unit 8 sequentially comprises a mechanical arm rotating mechanism 10 and a clamping jaw rotating mechanism 11 along the positive direction of an X axis;

the mechanical arm 5 comprises a mechanical arm shell 12, a first arm transmission chain wheel 13 and a second arm transmission chain wheel 17 are sequentially arranged in the mechanical arm shell 12 from top to bottom, and the first arm transmission chain wheel 13 is connected with the second arm transmission chain wheel 17 through an arm transmission chain 16;

the mechanical arm rotating mechanism 10 comprises a first motor 18, a speed reducer 21 and a mandrel 28, the first motor 18 is installed on the fixed base 1 through a supporting bottom block 3, the driving end of the first motor 18 on one side of the positive direction of the X axis sequentially passes through a first driving belt wheel 19 and a first synchronous belt 20 to be in driving connection with a first synchronous belt wheel 22 above, the first synchronous belt wheel 22 is connected with the mandrel 28 on the inner side along the X axis direction, the mandrel 28 is installed in the speed reducer 21 along the X axis direction, and one side of the mandrel 28 along the negative direction of the X axis is connected with the bottom of the mechanical arm shell 12;

the clamping jaw rotating mechanism 11 comprises a second motor 31 and a chain wheel shaft 33, the second motor 31 is installed on the fixed base 1 through the shield 2, the driving end of one side of the second motor 31 along the Y-axis negative direction is connected with a second synchronous belt wheel 32 above through a second driving belt wheel and a second synchronous belt 37 in a driving mode, the second synchronous belt wheel 32 is connected with a first worm 38 in a first worm seat 36 along one side of the Y-axis positive direction, the first worm 38 is arranged along the Y-axis direction and connected with a first worm wheel 34 above, the first worm wheel 34 is connected with the chain wheel shaft 33 arranged along the X-axis direction, and one side of the chain wheel shaft 33 along the X-axis negative direction penetrates through the mandrel 28 and is connected with the first arm driving chain wheel 13;

the clamping jaw box comprises a clamping jaw box body 701, wherein an upper cover 703 and a lower cover 704 are respectively arranged at the top and the bottom of the clamping jaw box body 701, a pressing mechanism 708 and a clamping jaw driving mechanism are sequentially arranged in a clamping jaw box cavity 702 of the clamping jaw box body 701 along the positive direction of a Y axis, a second arm transmission chain wheel 17 is connected with a clamping jaw connecting block 6, and the clamping jaw connecting block 6 is connected with the pressing mechanism 708 through a clamping jaw connecting shaft 707;

the clamping jaw driving mechanism comprises a clamping jaw 705, a clamping jaw motor 712, a second worm seat 715, a second worm 717 and a second worm wheel 718, wherein the clamping jaw motor 712 is installed on the second worm seat 715 through a motor seat 714, the driving end of one side of the clamping jaw motor 712 along the positive direction of the X axis is in driving connection with the second worm 717 along the direction of the X axis in the second worm seat 715, the second worm 717 is connected with the second worm wheel 718 along one side of the negative direction of the Y axis, two sides of the bottom of the second worm wheel 718 are respectively provided with a clamping jaw fixing shaft 730, the clamping jaw 705 is arranged at the middle position of the two sides of the clamping jaw box body 701 along the direction of the X axis, the inner side of the clamping jaw 705 is installed on a clamping jaw arm installation block 710 in the clamping jaw box body 701 through a clamping jaw arm 709, the clamping jaw arm 709 is hinged with the clamping jaw arm installation block 710, the clamping jaw fixing shaft 730 is connected with the first side of a connecting rod 728, the second side of the connecting rod 728 is connected with a clamping jaw connecting arm 711 through a connecting rod 727, the clamping jaw connecting arm 711 is connected with the bottom of the inner side of the clamping jaw arm 709, and a clamping jaw limiting block 706 is arranged on a lower cover 704 on the inner side of the bottom of the clamping jaw 705;

the pressing mechanism 708 comprises two groups of pressing assemblies arranged in parallel along the X-axis direction, each pressing assembly comprises a pressing stand 731, a pressing swing arm 732 and a pressing connecting block 733, the two pressing swing arms 732 are sequentially arranged on the pressing stand 731 from top to bottom, the two pressing swing arms 732 are respectively located above and below the clamping jaw connecting shaft 707, the pressing swing arms 732 are connected with the pressing stand 731 through pin shafts along one side of the Y-axis negative direction, the pressing swing arms 732 are connected with the pressing connecting blocks 733 through pin shafts along one side of the Y-axis positive direction, the clamping jaw connecting shaft 707 sequentially penetrates through the two pressing connecting blocks 733 along the X-axis direction, and the clamping jaw connecting shaft 707 is connected with the pressing connecting blocks 733 through anti-collision pins 734.

Preferably, a fixing chuck 9 is arranged on the outer side of the first synchronous pulley 22, a reducer housing 4 is arranged on the outer side of the reducer 21, the fixing chuck 9 is mounted on the reducer housing 4, one side of the mandrel 28 in the positive direction of the X axis is connected with the fixing chuck 9 through a first bearing 23, a first position plate 24 is arranged on one side of the fixing chuck 9 in the positive direction of the X axis, a first induction block 25, a second induction block 26 and a third induction block 27 are sequentially arranged on the mandrel 28 in the positive direction of the X axis after passing through the fixing chuck 9, first induction sheets 29 are arranged on the first induction block 25, the second induction block 26 and the third induction block 27, and three first inductors 30 respectively matched with the first induction sheets 29 on the first induction block 25, the second induction block 26 and the third induction block 27 are arranged on the first position plate 24.

Preferably, a second position plate 35 is arranged on one side of the first worm wheel 34 in the positive direction of the X axis, the first worm wheel 34 is connected with the second position plate 35 through the first bearing 23, a fourth sensing block 39 and a fifth sensing block 40 are sequentially arranged in the positive direction of the X axis after the first worm wheel 34 passes through the second position plate 35, the fourth sensing block 39 and the fifth sensing block 40 are both provided with second sensing pieces 41, and the second position plate 35 is provided with two second sensors 42 respectively matched with the second sensing pieces 41 on the fourth sensing block 39 and the fifth sensing block 40.

Preferably, a tension wheel 15 for tensioning the arm transmission chain 16 is further disposed in the mechanical arm housing 12, and the tension wheel 15 is mounted in the mechanical arm housing 12 through a tension mounting block 14.

Preferably, a bearing mounting plate 716 is further arranged above the second worm seat 715, the bearing mounting plate 716 is mounted on the lower cover 704 through a vertical column 720, a worm wheel disc 723 is connected to the top of the second worm wheel 718, the top of the worm wheel disc 723 is connected to the bearing mounting plate 716 through a second bearing 722, and the bottom of the worm wheel disc 723 is connected to the lower cover 704 through a third bearing 729.

Preferably, the worm wheel 723 is provided with a third sensing piece 721, the bearing mounting plate 716 is provided with a first sensor mounting plate 719, and both sides of the first sensor mounting plate 719 along the X-axis direction are provided with third sensors 724 matched with the third sensing piece 721.

Preferably, a fourth sensing piece 726 is further disposed on one side of the clamping jaw arm 709 along the Y-axis direction, and a fourth sensor 725 configured to cooperate with the fourth sensing piece 726 is disposed on the lower cover 704 on one side of the clamping jaw arm 709.

Preferably, a tension spring 713 is further connected to the inner side of the bottom of the jaw arm 709, the tension spring 713 is connected to the bearing mounting plate 716, and a spring 741 is further disposed between the bottom of the pressing connection block 733 and the lower cover 704.

Preferably, the lower cover 704 on the side of the clamping jaw connecting shaft 707 along the negative direction of the Y axis is provided with a downward pressing limiting block 735, the downward pressing limiting block 735 is located between the two downward pressing connecting blocks 733, a downward pressing limiting groove 737 is formed in the downward pressing limiting block 735 along the Y axis direction, and the clamping jaw connecting shaft 707 is connected with the downward pressing limiting groove 737 through a downward pressing limiting column 736.

Preferably, fifth sensing pads 740 are disposed on the inner side of the downward pressing connection block 733, a second sensor mounting plate 738 is disposed on the lower cover 704 between the two fifth sensing pads 740, and fifth sensors 739 matched with the fifth sensing pads 740 are disposed on both sides of the second sensor mounting plate 738 along the X-axis direction.

The utility model relates to a material feeding unit for wafer processing can drive arm 5 through arm rotary mechanism 10 and carry out the rotation operation, can realize the rotation operation of clamping jaw unit 7 through clamping jaw rotary mechanism 11 and arm 5's inner structure to the operation is got to the clamp of wafer box through clamping jaw unit 7 realization.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly referring to the number of technical features being grined. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected: either mechanically or electrically: the terms may be directly connected or indirectly connected through an intermediate member, or may be a communication between two elements.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims (10)

1. The feeding device for wafer processing is characterized by comprising a fixed base (1), a mechanical arm (5), a clamping jaw unit (7) and a power unit (8), wherein the power unit (8) is installed on the fixed base (1), and the power unit (8) sequentially comprises a mechanical arm rotating mechanism (10) and a clamping jaw rotating mechanism (11) along the positive direction of an X axis;

the mechanical arm (5) comprises a mechanical arm shell (12), a first arm transmission chain wheel (13) and a second arm transmission chain wheel (17) are sequentially arranged in the mechanical arm shell (12) from top to bottom, and the first arm transmission chain wheel (13) is connected with the second arm transmission chain wheel (17) through an arm transmission chain (16);

the mechanical arm rotating mechanism (10) comprises a first motor (18), a speed reducer (21) and a mandrel (28), the first motor (18) is installed on the fixed base (1) through a supporting bottom block (3), a driving end of the first motor (18) on one side of the positive direction of the X axis sequentially passes through a first transmission belt wheel (19) and a first synchronous belt (20) to be in driving connection with a first synchronous belt wheel (22) above, the first synchronous belt wheel (22) is connected with the mandrel (28) on the inner side of the first motor along the X axis direction, the mandrel (28) is installed in the speed reducer (21) along the X axis direction, and one side of the mandrel (28) along the negative direction of the X axis is connected with the bottom of the mechanical arm shell (12);

the clamping jaw rotating mechanism (11) comprises a second motor (31) and a chain wheel shaft (33), the second motor (31) is arranged on the fixed base (1) through the shield (2), the driving end of the second motor (31) along one side of the negative direction of the Y axis is connected with the second synchronous pulley (32) above through a second driving pulley and a second synchronous belt (37) in a driving way, the second synchronous pulley (32) is connected with a first worm (38) in a first worm seat (36) on one side along the positive direction of the Y axis, the first worm (38) is arranged along the Y-axis direction and is connected with a first worm wheel (34) above, the first worm wheel (34) is connected with a chain wheel shaft (33) arranged along the X-axis direction, one side of the chain wheel shaft (33) along the negative direction of the X axis penetrates through the mandrel (28) and is connected with the first arm transmission chain wheel (13);

the clamping jaw box comprises a clamping jaw box body (701), wherein an upper cover (703) and a lower cover (704) are respectively arranged at the top and the bottom of the clamping jaw box body (701), a pressing mechanism (708) and a clamping jaw driving mechanism are sequentially arranged in a clamping jaw box cavity (702) of the clamping jaw box body (701) along the positive direction of a Y axis, a second arm transmission chain wheel (17) is connected with a clamping jaw connecting block (6), and the clamping jaw connecting block (6) is connected with the pressing mechanism (708) through a clamping jaw connecting shaft (707);

the clamping jaw driving mechanism comprises a clamping jaw (705), a clamping jaw motor (712), a second worm seat (715), a second worm (717) and a second worm wheel (718), wherein the clamping jaw motor (712) is installed on the second worm seat (715) through the motor seat (714), the clamping jaw motor (712) is arranged in the second worm seat (715) along the driving connection of the second worm (717) in the X-axis direction along the driving end on one side of the X-axis positive direction and the second worm wheel (718) in the second worm seat (715) along the X-axis direction, the second worm (717) is connected with the second worm wheel (718) on one side of the Y-axis negative direction, two sides of the bottom of the second worm wheel (718) are respectively provided with a clamping jaw fixing shaft (730), the clamping jaw box body (701) is provided with a clamping jaw (705) along the middle position of two sides of the X-axis direction, the inner side of the clamping jaw (705) is installed on a clamping jaw arm installation block (710) in the clamping jaw box body (701) through a clamping jaw arm (709), the clamping jaw arm (709) is hinged to the clamping jaw arm mounting block (710), the clamping jaw fixing shaft (730) is connected with the first side of the connecting rod (728), the second side of the connecting rod (728) is connected with the clamping jaw connecting arm (711) through a connecting rod (727), the clamping jaw connecting arm (711) is connected with the bottom of the inner side of the clamping jaw arm (709), and a clamping jaw limiting block (706) is arranged on a lower cover (704) on the inner side of the bottom of the clamping jaw (705);

the pressing mechanism (708) comprises two groups of pressing components which are arranged in parallel along the X-axis direction, the pressing component comprises a pressing vertical frame (731), a pressing swing arm (732) and a pressing connecting block (733), two pressing swinging arms (732) are sequentially arranged on the pressing vertical frame (731) from top to bottom, and the two pressing swing arms (732) are respectively positioned above and below the clamping jaw connecting shaft (707), one side of the lower pressing swing arm (732) along the negative direction of the Y axis is connected with a lower pressing vertical frame (731) through a pin shaft, one side of the pressing swing arm (732) along the positive direction of the Y axis is connected with a pressing connecting block (733) through a pin shaft, the clamping jaw connecting shaft (707) sequentially passes through the two pressing connecting blocks (733) along the X-axis direction, and the clamping jaw connecting shaft (707) is connected with the pressing connecting block (733) through an anti-collision pin (734).

2. The feeding device for wafer processing as claimed in claim 1, wherein a fixing chuck (9) is disposed outside the first synchronous pulley (22), a decelerator housing (4) is disposed outside the decelerator (21), the fixing chuck (9) is mounted on the decelerator housing (4), the mandrel (28) is connected to the fixing chuck (9) through a first bearing (23) along one side of the X-axis positive direction, a first position plate (24) is disposed on one side of the fixing chuck (9) along the X-axis positive direction, a first induction block (25), a second induction block (26) and a third induction block (27) are sequentially disposed along the X-axis positive direction after the mandrel (28) passes through the fixing chuck (9), and first induction pieces (29) are disposed on the first induction block (25), the second induction block (26) and the third induction block (27), the first position plate (24) is provided with three first inductors (30) which are respectively matched with the first induction pieces (29) on the first induction block (25), the second induction block (26) and the third induction block (27).

3. The feeding device for wafer processing as claimed in claim 1, wherein a second position plate (35) is disposed on one side of the first worm wheel (34) along the positive direction of the X-axis, the first worm wheel (34) is connected to the second position plate (35) through a first bearing (23), a fourth sensing block (39) and a fifth sensing block (40) are sequentially disposed along the positive direction of the X-axis after the first worm wheel (34) passes through the second position plate (35), the fourth sensing block (39) and the fifth sensing block (40) are both provided with second sensing pieces (41), and the second position plate (35) is provided with two second sensors (42) respectively matched with the second sensing pieces (41) on the fourth sensing block (39) and the fifth sensing block (40).

4. The feeding device for wafer processing as claimed in claim 1, wherein a tension wheel (15) for tensioning the arm transmission chain (16) is further disposed in the robot housing (12), and the tension wheel (15) is mounted in the robot housing (12) through a tension mounting block (14).

5. The feeding device for wafer processing as claimed in claim 1, wherein a bearing mounting plate (716) is further disposed above the second worm seat (715), the bearing mounting plate (716) is mounted on the lower cover (704) through a vertical column (720), a worm wheel disc (723) is connected to the top of the second worm wheel (718), the top of the worm wheel disc (723) is connected to the bearing mounting plate (716) through a second bearing (722), and the bottom of the worm wheel disc (723) is connected to the lower cover (704) through a third bearing (729).

6. The feeding device for wafer processing as claimed in claim 5, wherein a third sensing piece (721) is disposed on the worm wheel disk (723), a first sensor mounting plate (719) is disposed on the bearing mounting plate (716), and third sensors (724) matched with the third sensing piece (721) are disposed on both sides of the first sensor mounting plate (719) along the X-axis direction.

7. The feeding apparatus for wafer processing as claimed in claim 1, wherein a fourth sensing piece (726) is further disposed on one side of the gripper arm (709) along the Y-axis direction, and a fourth sensor (725) is disposed on the lower cover (704) on one side of the gripper arm (709) and is matched with the fourth sensing piece (726).

8. The feeding device for wafer processing as claimed in claim 1, wherein a tension spring (713) is further connected to an inner side of a bottom of the jaw arm (709), the tension spring (713) is connected to the bearing mounting plate (716), and a spring (741) is further disposed between a bottom of the pressing connection block (733) and the lower cover (704).

9. The feeding device for wafer processing as claimed in claim 1, wherein a pressing limiting block (735) is disposed on the lower cover (704) on one side of the clamping jaw connecting shaft (707) along the negative direction of the Y axis, the pressing limiting block (735) is located between two pressing connecting blocks (733), a pressing limiting groove (737) is disposed in the pressing limiting block (735) along the direction of the Y axis, and the clamping jaw connecting shaft (707) is connected with the pressing limiting groove (737) through a pressing limiting column (736).

10. The feeding device for wafer processing as claimed in claim 9, wherein a fifth sensing piece (740) is disposed inside the pressing connection block (733), a second sensor mounting plate (738) is disposed on the lower cover (704) between the fifth sensing pieces (740), and fifth sensors (739) matched with the fifth sensing piece (740) are disposed on both sides of the second sensor mounting plate (738) along the X-axis direction.

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